KR20140040515A - Semiconductor device and method offabricating the same - Google Patents

Abstract

The present invention comprises a substrate; a laminated structure comprising interlayer insulating films and gate electrodes which are alternately laminated on the substrate; a penetrating hole which vertically penetrates the laminated structure; and a vertical structure which fills the penetration hole. The vertical structure comprises a gap fill pattern which is formed in the center of the penetrating hole; a channel pattern which surrounds the outer surface of the gap fill pattern; and a gate dielectric film which surrounds the outer surface of the channel pattern. The gate dielectric film comprises a tunneling film which touches the channel pattern; an electron trap film which touches the tunneling film; a barrier film which touches the electron trap film; a protective pattern which touches the barrier film and is solider than the barrier film; and a blocking film which touches the protective pattern and the gate electrodes and is solider than the protective pattern.

Description

Semiconductor device and method of manufacturing {Semiconductor Device and Method of Fabrication the Same}

The present invention relates to a semiconductor device having a vertical cell and a method of manufacturing the same.

As the scale reduction of integrated circuits is accelerated, vertical cell type semiconductor devices that vertically planarize devices have been proposed, and forming a dielectric layer of uniform thickness has become a very important problem.

An object of the present invention is to provide a vertical cell type semiconductor device and a method of manufacturing the same.

Another object of the present invention is to provide a vertical cell semiconductor device and a manufacturing method capable of preventing a charge trap layer from being lost by an etchant during a process of manufacturing a vertical cell semiconductor device. It is.

A semiconductor device according to an embodiment of the inventive concept may include a substrate, a stack structure including interlayer insulating layers and gate electrodes alternately stacked on the substrate, a through hole vertically passing through the stack structure, and the through It includes a vertical structure that fills the hole. The vertical structure may include a gap fill pattern formed at the center of the through hole, a channel pattern surrounding an outer side of the gap fill pattern, and a gate dielectric layer surrounding an outer side of the channel pattern. The gate dielectric layer may include a tunneling layer in contact with the channel pattern, a charge trap layer in contact with the tunneling layer, a barrier layer in contact with the charge trap layer, and a protection pattern that is in contact with the barrier layer and is closer to the barrier layer. And a blocking film in contact with the protection pattern and the gate electrodes and having a denser blocking film than the protection pattern.

The protective pattern may include oxidized silicon.

The protective pattern may be horizontally aligned with the lower surface or the upper surface of the interlayer insulating layers and may protrude toward the channel pattern.

The protective pattern may protrude toward the gate electrodes rather than side surfaces of the interlayer insulating layers.

An upper surface or a lower surface of the protective pattern may partially contact the lower surface or the upper surface of the interlayer insulating layers.

The protective pattern may contact side surfaces of the interlayer insulating layers.

A portion of an upper surface and a lower surface of the protective pattern may contact the barrier layer.

The barrier layer may contact side surfaces of the interlayer insulating layers.

The blocking film may cover the top, bottom, and one side of the gate electrodes.

The tunneling film and the barrier film may include silicon oxide.

The charge trap layer may include silicon nitride.

The blocking film may include a metal oxide.

A semiconductor device according to an embodiment of the inventive concept may include a substrate, interlayer insulating layers and gate electrodes alternately stacked on the substrate, one side surfaces of the interlayer insulating layers, and a gate dielectric layer on one side surfaces of the gate electrodes. And a channel pattern on the side of the gate dielectric layer. The gate dielectric layer includes a blocking layer, a protection pattern, a charge trap layer, and a tunneling layer that are sequentially formed on the side surfaces of the gate electrodes. The blocking film includes a metal oxide, the protective pattern comprises oxidized silicon, the charge trap film includes silicon nitride, and the tunneling film includes silicon oxide. oxide).

The protective pattern may be formed on the side surfaces of the interlayer insulating layers.

An interface between the protective pattern and the blocking layer may be closer to the side surfaces of the gate electrodes than the side surfaces of the interlayer insulating layers.

The semiconductor device may further include a barrier layer formed between the protective pattern and the charge trap layer and including silicon oxide. The protective pattern may be denser than the barrier layer.

The blocking film may extend between the interlayer insulating film and the gate electrode.

In the method of manufacturing a semiconductor device according to an embodiment of the present invention, the interlayer insulating layers and the sacrificial layers are alternately stacked on a substrate, and the interlayer insulating layers and the sacrificial layers are vertically penetrated. Forming a through hole exposing side surfaces of the substrate, oxidizing the side surfaces of the exposed sacrificial layers to form a protective pattern, forming a charge trap layer on the protective pattern and the interlayer insulating layer, and forming a charge trap layer on the charge trap layer Forming a tunneling film, and forming a channel pattern on the tunneling film.

The interlayer insulating layers may include silicon oxide.

The sacrificial layers may include silicon nitride.

Forming the protective pattern may include oxidizing the silicon nitride.

Oxidizing the silicon nitride may include a thermal oxidation process, a plasma oxidation process, or a CLN oxidation process that selectively uses H ₂ , O ₂ , H ₂ O, or HCl gas.

The method may further include forming an insulating barrier layer between the protective pattern and the charge trap layer.

Forming the barrier film may include depositing silicon oxide.

The protective pattern may be denser than the barrier film.

The protective pattern may contact a portion of a lower surface and a portion of an upper surface of the interlayer insulating layers.

The protective pattern may be formed on side surfaces of the interlayer insulating layers.

The method removes the sacrificial film to form an interlayer space between the interlayer insulating films, conformally forms a blocking film on the surface of the interlayer insulating film and the surface of the protective pattern exposed in the interlayer space, and the interlayer The method may further include forming a gate electrode on the blocking film in the space.

Top, bottom and one side surfaces of the gate electrode may contact the blocking layer.

The blocking film may include a metal oxide and may be solider than the protective pattern.

In a method of manufacturing a semiconductor device according to an embodiment of the present invention, a plurality of interlayer insulating layers and sacrificial layers are alternately stacked on a substrate, and the through layers vertically penetrate the interlayer insulating layers and the sacrificial layers to expose a surface of the substrate. Forming a hole, forming a protective pattern including oxidized silicon on an inner wall of the through hole, forming a charge trap layer including silicon nitride on the protective pattern, and including silicon oxide on the charge trap layer A tunneling layer is formed, a channel pattern is formed on the tunneling layer, and the sacrificial layers are removed to expose the top and bottom surfaces of the interlayer insulating layers and one side of the protective pattern, and the top surfaces of the exposed interlayer insulating layers. And a blocking film including a bottom surface and a metal oxide in direct contact with one side of the protective pattern. It includes.

Forming the protective pattern may include depositing a silicon oxide film on side surfaces of the interlayer insulating layers and side surfaces of the sacrificial layers exposed in the through hole, and densifying the silicon oxide film.

Curing the silicon oxide film may include an oxidizing process.

The channel pattern may directly contact the surface of the exposed substrate.

The details of other embodiments are included in the detailed description and drawings.

According to an embodiment of the inventive concept, a semiconductor device and a method of manufacturing the same include a method of manufacturing a charge trap film during an etching process by using a high density oxide film as a dielectric film between a channel and a gate electrode during a process of manufacturing a vertical cell type semiconductor device. The loss can be prevented. By preventing the loss of the charge trapping film, a reliable semiconductor device can be manufactured.

1A is a cross-sectional view illustrating a vertical cell type semiconductor device according to a first exemplary embodiment of the inventive concept, and FIG. 1B is an enlarged cross-sectional view of A of FIG. 1A.
2A is a cross-sectional view illustrating a vertical cell type semiconductor device according to a second exemplary embodiment of the inventive concept, and FIG. 2B is an enlarged cross-sectional view of B of FIG. 2A.
3A is a cross-sectional view illustrating a vertical cell type semiconductor device according to a third exemplary embodiment of the inventive concept, and FIG. 3B is an enlarged cross-sectional view of FIG. 3A.
4A is a cross-sectional view illustrating a vertical semiconductor device in accordance with a fourth embodiment of the inventive concept, and FIG. 4B is an enlarged cross-sectional view of D of FIG. 4A.
5A to 5Q are cross-sectional views illustrating a method of manufacturing a vertical cell semiconductor device according to a first embodiment of the inventive concept in a process sequence.
6A to 6D are cross-sectional views illustrating a method of manufacturing a vertical cell semiconductor device according to a second exemplary embodiment of the inventive concept in a process sequence.
7A to 7C are cross-sectional views illustrating a method of manufacturing a vertical cell semiconductor device in accordance with a third embodiment of the inventive concept, in a process sequence.
8A to 8D are cross-sectional views illustrating a method of manufacturing a vertical cell semiconductor device according to a fourth embodiment of the inventive concept in a process sequence.
9 is a conceptual diagram illustrating a semiconductor module including at least one of semiconductor devices according to various embodiments of the inventive concept.
10 is a block diagram conceptually illustrating an electronic system including a semiconductor device according to example embodiments of the inventive concepts.
11 is a block diagram schematically illustrating an electronic system according to embodiments of the inventive concept.
12 is a diagram schematically illustrating a mobile electronic device according to embodiments of the inventive concept.

BRIEF DESCRIPTION OF THE DRAWINGS The advantages and features of the present invention, and how to accomplish them, will become apparent by reference to the embodiments described in detail below with reference to the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the invention to those skilled in the art. Is provided to fully convey the scope of the invention to those skilled in the art, and the invention is only defined by the scope of the claims.

Like reference numerals refer to like elements throughout the specification. Accordingly, although the same reference numerals or similar reference numerals are not mentioned or described in the drawings, they may be described with reference to other drawings. Further, even if the reference numerals are not shown, they can be described with reference to other drawings.

1A is a cross-sectional view illustrating a vertical cell type semiconductor device according to a first exemplary embodiment of the inventive concept, and FIG. 1B is an enlarged cross-sectional view of A of FIG. 1A.

1A and 1B, a vertical cell semiconductor device 100a according to a first embodiment of the inventive concept may include a stack structure 100S formed on a substrate 102 and the stack structure ( The first capping film 110 covering the 100S, the through-hole H penetrating the stack structure 110S and the first capping film 110, the first capping film 110, and the through hole H ) And the second and third capping layers 126 and 128, spaced apart from the through hole H, and the laminate structure 110S and the first to third capping layers 110, 126 and 128. A trench (T) extending vertically and extending in a horizontal direction, first and second vertical structures (VS1, VS2) filling the through hole (H) and the trench (T), respectively, and the first vertical structure Contact before contacting the contact pad 124 through the contact pad 124 disposed on the VS1, the second capping layer 126, and the third capping layer 128. May include (contact electrode, 140), and a conductive wire (conductive interconnection, 142) disposed on an upper surface of the third pingmak cap 128 while making contact with the contact electrode 140.

The stacked structure 100S may include alternately stacked interlayer insulating films 104 and gate electrodes 134GS, 134C and 134SS. The interlayer insulating layers 104 may include silicon oxide (SiO 2), and the gate electrodes 134GS, 134C, and 134SS may include tungsten (W), copper (Cu), aluminum (Al), titanium (Ti) , Titanium nitride (TiN), tantalum (Ta), doped silicon (n or p type Si), or the like.

The first vertical structure VS1 may include a gate dielectric layer GDa formed along an inner wall of the through hole H, and a cylindrical channel pattern formed along an inner wall of the gate dielectric layer GDa. 120, a gapfill pattern 122 formed in the center of the through hole H to fill the inside of the channel pattern 120. The channel pattern 120 may surround the outer surface of the gap fill pattern 122, and the gate dielectric layer GDa may surround the outer surface of the channel pattern 120. An upper surface of the gap fill pattern 122 may be located lower than an upper end of the through hole H. Since the through hole H is circular in the top view, the first vertical structure VS1 may appear to be symmetrically formed on the inner wall of the through hole H in the longitudinal cross-sectional view.

The lower portion of the channel pattern 120 may contact the surface of the substrate 102, which is the bottom surface of the through hole H, and the upper portion may contact the side surface of the contact pad 124. The channel pattern 120 may include a semiconductor material such as single crystalline silicon or poly-crystalline silicon.

The substrate 102 may be a semiconductor substrate, and may include, for example, a silicon substrate, a silicon germanium substrate, or a silicon on insulator.

The contact pad 124 may comprise a conductive material such as monocrystalline silicon or polycrystalline silicon or a semiconductor material. The first capping layer 110, the second capping layer 126, and the third capping layer 128 may include an insulating material such as silicon oxide. The contact electrode 140 and the conductive wiring 142 may include a conductive material such as copper (Cu), tungsten (W), and aluminum (Al).

The lowermost gate electrode 134GS among the plurality of gate electrodes 134GS, 134C and 134SS may be used as the ground selection gate electrode 134GS and the uppermost gate electrode 134SS may be used as the string selection gate electrode 134SS And the gate electrodes 134C formed between the ground selection gate electrode 134GS and the string selection gate electrode 134SS can be used as the cell gate electrode 134C.

Thus, the gate dielectric layer (GDa) and the channel pattern 120 to contact this and the ground selection gate electrode (134GS) may be configured to ground selection transistor, a gate dielectric film in contact with the the cell gate electrode (134C) with this ( GDa) and the channel pattern 120 may be the configuration of the cell transistor, the string selection gate electrode (134SS) and the gate dielectric film (GDa) and the channel pattern 120 to contact this may constitute a string selection transistor. As such, the ground selection transistor, the plurality of cell transistors, and the string selection transistor may form a unit vertical cell string. The conductive wire 142 may be used as a bit line.

The second vertical structure VS2 may have the shape of a fence filling the trench T. [ The second vertical structure VS2 may include silicon oxide.

Referring to FIG. 1B, the gate dielectric layer GDa may include a blocking layer 132, a protective pattern 112a, a barrier layer 114, a charge trap layer 116, and a tunneling layer. 118, a tunneling layer). The blocking film 132 may be in contact with the top surface, the bottom surface, and one side surface of the gate electrodes 134GS, 134C, and 134SS. The protection pattern 112a may contact one vertical side of the blocking layer 132. The barrier layer 114 may expose the other vertical side of the protective patterns 112a that do not contact the blocking layers 132, the side surfaces of the interlayer insulating layers 104, and the first capping layer 110. It may be in contact with one side. The charge trap layer 116 may be in contact with the barrier layer 114. The tunneling film 118 may be in contact with the charge trap film 116.

The protection pattern 112a may include solider oxidized silicon that is denser than the interlayer insulating film 104 and the barrier film 114. The process of forming the protective pattern 112a may be performed by a thermal oxidizing process such as In Situ Steam generation (ISSG), a plasma oxidizing process, or a CLN oxidizing process using HCl. Oxidation processes may be included. The protection pattern 112a may have a side surface which is horizontally aligned with the bottom surface or the top surface of the interlayer insulating layers 104 and protrudes toward the channel pattern 120. The protection pattern 112a may have the other side surface protruding toward the gate electrodes 134C rather than the side surfaces of the interlayer insulating layers 104. An upper surface or a lower surface of the protective pattern 112a may partially contact the lower surface or the upper surface of the interlayer insulating layers 104. The protection pattern 112a may contact side surfaces of the interlayer insulating layers 104. A portion of an upper surface and a lower surface of the protective pattern 112a may contact the barrier layer 114.

The side profile of the barrier layer 114 may protrude or be recessed along the profile of the protective pattern 112a. The barrier layer 114 may contact one side of the protective pattern 112a and one side of the interlayer insulating layers 104. The barrier film 114 may comprise deposited silicon oxide.

The charge trap layer 116 may be in contact with the barrier layer 114. The charge trap layer 116 traps and retains electrons injected through the tunneling layer 118 from the channel pattern 120, or stores information that erases electrons trapped in the tunneling layer 118. That's it. The material forming the charge trap layer 116 may include silicon nitride (SiNx), aluminum oxide (Al 2 O 3), zirconium oxide (ZrO), hafnium oxide (HfO), and lanthanum oxide (LaO). I. E., A material having a high dielectric constant as compared to silicon oxide.

The tunneling layer 118 is a path through which electrons introduced from the channel pattern 120 move to the charge trap layer 116, and the tunneling layer 118 may include silicon oxide or silicon oxide doped with nitrogen. Can be.

The blocking film 132 prevents the charges stored in the charge trap film 116 from tunneling to the cell gate electrode 134C, thereby improving information retention. The blocking layers 132 may contact the top and / or bottom surfaces of the interlayer insulating layers 104. The blocking layer 132 may include an insulating material having a high work function, such as aluminum oxide (Al 2 O 3) and hafnium oxide (HfO 2).

The vertical cell type semiconductor device 100 according to the inventive concept is more closely protected than the barrier film 114 and the barrier film 114 between the gate electrodes 134GS, 134C, and 134SS and the charge trap film 116. By including the pattern 112a, the charge trap film 116 and the barrier film 114 can be prevented from being damaged, and the information storage capability of the charge trap film 116 can be improved.

2A is a cross-sectional view illustrating a vertical cell type semiconductor device according to a second exemplary embodiment of the inventive concept, and FIG. 2B is an enlarged cross-sectional view of B of FIG. 2A.

2A and 2B, a vertical cell type semiconductor device 100b according to a second embodiment of the inventive concept may include an interlayer insulating layer 104 and gate electrodes 134GS, 134C, and the like on a substrate 102. A stacked structure 100S in which 134SS is alternately and repeatedly stacked, a first capping film 110, a second capping film 126, and a third capping film 128 covering the stacked structure 100S, The through hole H penetrating the stack structure 100S and the first capping layer 110, the stack structure 100S, the first capping layer 110, the second capping layer 126, and the third cap A trench T penetrating the ping film 128, a first vertical structure VS1 and a second vertical structure VS2 filling the through hole H and the trench T, respectively, and the first vertical structure VS1. Contact electrodes 124 contacting the contact pads 124 through the contact pads 124, the second capping layer 126 and the third capping layer 128, and the contact electrode 140. The third while in contact The conductive wire 142 formed on the upper surface of the capping layer 128 may be included.

The first vertical structure VS1 may include a cylindrical gate dielectric film GDb formed along an inner wall of the through hole H, a channel pattern 120 formed along an inner wall of the gate dielectric film GDb, and a channel pattern ( It may include a gap fill pattern 122 filling the interior of the 120. The channel pattern 120 may contact the surface of the substrate 102, which is the bottom surface of the through hole H, and the side surface of the contact pad 124.

The gate dielectric layer GDb may include a tunneling layer 116 surrounding the channel pattern 120, a charge trap layer 114 surrounding the tunneling layer 116, and a protection pattern 112b surrounding the charge trap layer 114. The blocking layers 132 may be in contact with the protection pattern 112b and surround the gate electrodes 134GS, 134C, and 134SS. The blocking films 132 may cover the top, bottom and one side surfaces of the gate electrodes 134SS, 134C and 134GS.

The protective pattern 112b may include oxidized silicon. The barrier layer 114 may comprise deposited silicon oxide. The protection pattern 112b may include an oxide that is denser than the barrier layer 114. The protection pattern 112b may have one side surface protruding toward the channel pattern 120. The protection pattern 112b may have another side surface protruding toward the gate electrodes 134C rather than side surfaces of the interlayer insulating layers 104. An upper surface or a lower surface of the protective pattern 112b may partially contact the lower surface or the upper surface of the interlayer insulating layers 104. The protection pattern 112b may be formed on side surfaces of the interlayer insulating layers 104. A portion of the upper surface and the lower surface of the protective pattern 112b may contact the barrier layer 114.

3A is a cross-sectional view illustrating a vertical cell type semiconductor device according to a third exemplary embodiment of the inventive concept, and FIG. 3B is an enlarged cross-sectional view of FIG. 3A.

3A and 3B, a vertical cell type semiconductor device 100c according to a third exemplary embodiment of the inventive concept may include an interlayer insulating layer 104 and gate electrodes 134GS, 134C, and the like on a substrate 102. A stacking structure (100S) in which 134SS is alternately and repeatedly stacked, a first capping film (110), a second capping film (126), and a third capping film (128) covering the stack structure (100S), Through-hole H penetrating the stacked structure 100S and the first capping film 110, the stacked structure 100S, the first capping film 110, the second capping film 126, and the third A trench T penetrating the capping layer 128, a first vertical structure VS1 and a second vertical structure VS2 filling the through hole H and the trench T, respectively, and the first vertical structure VS1. Contact pads 124 contacting the contact pads 124, the contact electrodes 140 contacting the contact pads 124 through the second capping layer 126 and the third capping layer 128, and the contact electrodes 140. ) In contact with The conductive wire 142 formed on the upper surface of the third capping layer 128 may be included.

The first vertical structure VS1 may include a gate dielectric layer GDc formed along an inner wall of the through hole H, a cylindrical channel pattern 120 formed along an inner wall of the gate dielectric layer GDc, and an inside of a channel pattern. It may include a gap fill pattern 122 to fill the.

The gate dielectric layer GDc may include a tunneling layer 118 surrounding the channel pattern 120, a charge trap layer 116 surrounding the tunneling layer 118, a protection pattern 112c surrounding the charge trap layer, and the gate electrode. And a blocking film 132 surrounding the 134GS, 134C, and 134SS.

The protection pattern 112c may include oxidized silicon. One side of the protection pattern 112c may contact the charge trap layer 116. A portion of an upper surface and a lower surface of the protective pattern 112c may contact the charge trap layer 116.

4A is a cross-sectional view illustrating a vertical cell type semiconductor device according to a fourth exemplary embodiment of the inventive concept, and FIG. 4B is an enlarged cross-sectional view of FIG. 4A.

4A and 4B, the vertical cell type semiconductor device 100d according to the fourth embodiment of the inventive concept may include the stacked structure 100S and the stacked structure 100S formed on the substrate 102. The first capping film 110, the second capping film 126, and the third capping film 128 that cover the through hole H penetrating the stack 100S and the first capping film 110, and A trench T, a through hole H, and a trench T penetrating the stacked structure 100S, the first capping film 110, the second capping film 126, and the third capping film 128 are respectively formed. Filling the first vertical structure VS1 and the second vertical structure VS2, the contact pads 124 electrically connected to the first vertical structure VS1, and the second and third capping layers 126 and 128. The contact electrode 140 penetrates and contacts the contact pad 124, and the conductive wire 142 formed on the upper surface of the third capping layer 128 while contacting the contact electrode 140.

The first vertical structure VS1 may have a cylindrical gate dielectric layer GDd formed along an inner wall of the through hole H, a cylindrical channel pattern 120 contacting the gate dielectric layer GDd, and the channel pattern. It may include a gap fill pattern 122 filling the interior of the (120).

The gate dielectric layer GDd may include a tunneling layer 118 surrounding the channel pattern 120, a charge trap layer 116 surrounding the tunneling layer 118, and a protection pattern 112d surrounding the charge trap layer 116. The blocking layers 132 may be in contact with the protection pattern 112d and surround the gate electrodes 134GS, 134C, and 143SS.

The protective pattern 112d may include silicon oxide that is hardened by using an oxidizing process. The protection pattern 112d may contact the interlayer insulating layers 104 and the blocking layers 132. The protection pattern 112d may contact the charge trap layer 116.

5A to 5Q are cross-sectional views illustrating a method of manufacturing a vertical cell semiconductor device according to a first embodiment of the inventive concept in a process sequence.

Referring to FIG. 5A, a method of manufacturing a vertical cell type semiconductor device 100a according to a first exemplary embodiment of the inventive concept may include a plurality of interlayer insulating films 104 and a plurality of sacrificial films on a substrate 102. 106 may be alternately stacked to form a preliminary laminated structure 108, and the first capping film 110 may be stacked on the preliminary laminated structure 108. The substrate 102 may be formed of a semiconductor material and may include, for example, a silicon (Si) substrate, a silicon germanium (SiGe) substrate, or an SOI substrate. The interlayer insulating layer 104 may include silicon oxide (SiO 2), and the sacrificial layer 106 may include silicon nitride (SiNx). In addition, the first capping layer 110 may include silicon oxide (SiO2).

Referring to FIG. 5B, a method of manufacturing the vertical cell type semiconductor device 100a according to the first exemplary embodiment of the inventive concept may vertically penetrate the preliminary stacked structure 108 and the first capping layer 110. It may include forming a through hole (H). Side surfaces of the interlayer insulating layer 104 and the sacrificial layer 106 may be exposed on the inner wall of the through hole H. The surface of the substrate 102 may be exposed to the bottom of the through hole (H).

Referring to FIG. 5C, in the manufacturing method of the vertical cell type semiconductor device 100a according to the first exemplary embodiment of the inventive concept, the sacrificial layer 106 exposed to the inner wall of the through hole H may be oxidized. ) To form the protective pattern 112a. Oxidizing the sacrificial layer 106 may include oxidizing the sacrificial layer 106 by supplying oxygen radicals to the exposed surface of the sacrificial layer 106.

Accordingly, the oxidation reaction proceeds from the surface of the sacrificial film 106 to the inside and the outside, and as a result, a high density oxide film (protective pattern 112a) may be formed on the surface of the sacrificial film thickly.

The oxidation process may include a thermal oxidation process such as an In Situ Steam generation (ISSG) process, a plasma oxidation process, or a CLN oxidizing process for supplying HCl. The ISSG process may include using hydrogen (H 2) gas, oxygen (O 2) gas, or water vapor (H 2 O) at low pressure in an oxygen radical oxidation process using heat. For example, oxygen radicals may penetrate into the sacrificial layer 106 to bond with the silicon dangling bonds inside the sacrificial layer 106, or oxygen radicals that penetrate with high force may break nitrogen atoms bonded to the silicon and By combining, oxidized silicon can be formed. The plasma oxidation process is a radical oxidation process using a plasma, and a mixed gas of argon (Ar), hydrogen and oxygen, a mixed gas of argon and oxygen, a mixed gas of helium (He), hydrogen and oxygen, or a mixture of helium and oxygen A mixed gas of gas and hydrogen and oxygen can be used. The CLN oxidation process is a process of forming an oxide film using oxygen (O 2) and hydrogen chloride (HCl). Since dry hydrogen chloride serves as a catalyst and removes impurities in the film, an oxide film having a low impurity content can be obtained. . The oxide formed through the oxidation process may have a tighter composition and a stronger bond than the oxide formed through the deposition process.

Referring to FIG. 5D, in the manufacturing method of the vertical cell type semiconductor device 100a according to the first embodiment of the inventive concept, the protective pattern 112a and the interlayer insulating films 104 are formed in the through hole H. Referring to FIG. ) And a barrier dielectric layer 114a on exposed and side surfaces of the first capping layer 110, a trap dielectric layer 116a on a surface of the barrier dielectric layer 114a, and the trap dielectric layer 116a. And conformally forming the tunneling dielectric layer 118a on the surface of the substrate. The barrier dielectric layer 114a may include silicon oxide, the trap dielectric layer 116a may include silicon nitride (SiNx), and the tunneling dielectric layer 118a may be silicon oxide or silicon oxide doped with nitrogen. It may include.

Referring to FIG. 5E, in the method of manufacturing the vertical cell type semiconductor device 100a according to the first embodiment of the inventive concept, the barrier film 114, the charge trap film 116, And forming the tunneling film 118. Forming the barrier layer 114, charge trap layer 116, and tunneling layer 118 includes performing a front side anisotropic etching process to partially remove the plurality of dielectric layers 114a, 116a, 118a. can do. Through the entire anisotropic etching process, the barrier dielectric layer 114a is etched to contact the barrier layers 114 that contact the vertical side surfaces of the interlayer insulating layers 104, the protection patterns 112a, and the first capping layer 110. ), The trap dielectric layer 116a may be etched to etch the barrier layer into the charge trap layer 116 and the tunneling dielectric layer 118a to form a tunneling layer 118. In addition, during the etching process, the upper surface of the substrate 102 may be exposed to the bottom of the through hole H.

Referring to FIG. 5F, in the manufacturing method of the vertical cell type semiconductor device 100a according to the first embodiment of the inventive concept, the surface of the substrate 102 exposed under the through hole H and the tunneling film A channel film 120a is formed along the surface of 118, the side surfaces and the top surface of the first capping film 110, and on the surface of the channel film 120a to fill the inside of the through hole H. It may include forming the gap fill film 122a. Forming the channel layer 120a may include a chemical vapor deposition process (CVD), such as an atomic layer deposition process (ALD), and may be subsequently formed in a polycrystalline state through heat treatment. Therefore, the channel film 120a may include polysilicon. The gap fill layer 122a may include an insulating material such as silicon oxide.

Referring to FIG. 5G, in the manufacturing method of the vertical cell type semiconductor device 100a according to the first exemplary embodiment of the inventive concept, a gap fill pattern 122 is formed to fill a part of the through hole H. The contact layer 124a may be formed on the gap fill pattern 122 and the channel layer 120a. Forming the gap fill pattern 122 may include removing a portion of the gap fill layer 122a by using an etch-back process to leave only the inside of the through hole H. The gap fill pattern 122 may be formed. ) May be lower than the surface of the first capping layer 110. The contact layer 124a may include polysilicon.

Referring to FIG. 5H, in the manufacturing method of the vertical cell type semiconductor device 100a according to the first embodiment of the inventive concept, a channel pattern 120 and a contact pad 124 are formed in the through hole H. Referring to FIG. It may include doing. Forming the channel pattern 120 and the contact pad 124 may include a planarization process of partially removing the channel layer 120a and the contact layer 124a to expose the top surface of the first capping layer 110. It may include, for example, may include a CMP process.

Referring to FIG. 5I, in the manufacturing method of the vertical cell type semiconductor device 100a according to the first embodiment of the inventive concept, a second capping layer may be formed on the through hole H and the preliminary stacked structure 100S. 126 and the third capping layer 128 may be formed. The second capping layer 126 and the third capping layer 128 may have an etching selectivity with the sacrificial layer 106. For example, when the sacrificial layer 106 is formed of silicon nitride, the second capping layer 126 and the third capping layer 128 may include silicon oxide.

Referring to FIG. 5J, the method of manufacturing the vertical cell type semiconductor device 100a according to the first embodiment of the inventive concept may include the first capping layer 110 at a position spaced apart from the through hole H, The method may include forming a trench T penetrating the second capping layer 126, the third capping layer 128, and the preliminary stacked structure 108.

Referring to FIG. 5K, a method of manufacturing a vertical cell type semiconductor device 100a according to a first exemplary embodiment of the inventive concept may include a sacrificial layer disposed between the interlayer insulating layers 104 through the trench T. 106 may be removed to form the interlayer space 130. Phosphoric acid (H 3 PO 4) may be used as an etchant to remove the sacrificial layer 106. After removing the sacrificial layer 106 using phosphoric acid, a cleaning process using SC-1 may be further performed. In this case, during the process of removing the sacrificial layer 106 using the phosphoric acid (H 3 PO 4), the protective patterns 112 a may be exposed, and the protective pattern 112 a may include phosphoric acid (H 3 PO 4) in the through hole (H). It may be prevented from penetrating into the dam and damaging the barrier layer 114 and the charge trap layer 116.

Referring to FIG. 5L, in the method of manufacturing the vertical cell type semiconductor device 100a according to the first embodiment of the inventive concept, the surface of the interlayer insulating layer 104 and the first layer may be formed through the trench T. Referring to FIG. And forming the blocking dielectric layer 132a on the exposed surfaces of the capping layer 110, the second capping layer 126, and the third capping layer 128. The blocking dielectric layer 132a may include aluminum oxide (Al 2 O 3) and hafnium oxide (HfO).

Referring to FIG. 5M, the method of manufacturing the vertical cell type semiconductor device 100a according to the first embodiment of the inventive concept may include forming a conductive film 134a on the surface of the blocking dielectric film 132a. Can be. The conductive layer 134a may be formed while filling the interlayer space 130 (see FIG. 5L). The conductive layer 134a may be formed of a doped semiconductor such as doped silicon, a metal such as tungsten (W), copper (Cu), or aluminum (Al), titanium nitride (TiN), tantalum nitride A conductive metal-semiconductor compound such as a metal silicide, or a transition metal such as titanium (Ti) or tantalum (Ta) or the like. For example, the conductive layer 134a may include tungsten (W) or titanium nitride (TiN).

Referring to FIG. 5N, in the manufacturing method of the vertical cell type semiconductor device 100a according to the first embodiment of the inventive concept, the gate electrode 134SS may be formed by partially removing the conductive layer 134a. 134C, 134GS). The gate electrodes 134SS, 134C, and 134GS may include a ground select gate electrode 134GS located at the bottom close to the substrate 102, a string select gate electrode 134SS located at the top, and the ground select gate electrode 134GS. ) And the cell gate electrodes 134C positioned between the string selection gate electrode 134SS. At this time, the number of the cell gate electrodes 134C may be ²ⁿ . (n is a natural number)

Referring to FIG. 5O, in the method of manufacturing the vertical cell type semiconductor device 100a according to the first embodiment of the inventive concept, the gate dielectrics 134GS and 134C may be partially removed by partially removing the blocking dielectric layer 132a. , 134SS may be respectively formed to form a blocking film 132. The blocking layer 132 may cover the top, bottom, and one side surface of the gate electrodes 134GS, 134C, and 134SS. The blocking film 132 is formed to include a channel pattern 120, a tunneling film 118, a charge trap film 116, a barrier film 114, a protection pattern 112a, and a blocking film 132. The first vertical structure VS1 may be formed.

Referring to FIG. 5P, in the manufacturing method of the vertical cell type semiconductor device 100a according to the first exemplary embodiment of the inventive concept, a second vertical structure VS2 is formed in the trench T. Forming vias 138 that expose contact pads 124. The second vertical structure VS2 may include silicon oxide (SiO2).

Referring to FIG. 5Q, in the manufacturing method of the vertical cell type semiconductor device 100a according to the first embodiment of the inventive concept, a contact electrode contacting the contact pad 124 while filling the via 138 ( And forming the conductive wire 142 extending to the upper surface of the third capping layer 128 while being in contact with the contact electrode 140. The contact electrode 140 and the conductive wire 142 may include a conductive material such as copper (Cu), tungsten (W), and aluminum (Al).

6A to 6D are cross-sectional views illustrating a method of manufacturing a vertical cell type semiconductor device according to a second exemplary embodiment of the inventive concept in a process sequence.

Referring to FIG. 6A, a method of manufacturing a vertical cell type semiconductor device 100b according to a second exemplary embodiment of the inventive concept may include a plurality of interlayer insulating films 104 and a plurality of sacrificial films on a substrate 102. A preliminary laminated structure 108 in which 106 is alternately stacked is formed, a first capping film 110 is formed on the preliminary laminated structure 108, and the first capping film 110 and the preliminary laminated structure are formed. It may include forming a through hole (H) through the structure 108. The surface of the substrate 100 may be exposed to the bottom surface of the through hole H. The interlayer insulating layers 104 may include silicon oxide and the sacrificial layers 106 may include silicon nitride.

Referring to FIG. 6B, in the manufacturing method of the vertical cell type semiconductor device 100b according to the second embodiment of the inventive concept, the protection layer 112ba is formed by oxidizing the inner wall of the through hole H. It may include. In this case, oxidizing the inner wall of the through hole H may include oxygen penetrating into the surfaces of the interlayer insulating film 104 and the sacrificial film 106 constituting the inner wall of the through hole H and reacting with silicon atoms. The oxidation reaction may be more actively performed on the side of the sacrificial film 106, which is a silicon nitride film, than the interlayer insulating film 104, which is a deposited silicon oxide film. Therefore, the protective film 112ba may be formed thicker on the side of the sacrificial film 106.

Referring to FIG. 6C, in the manufacturing method of the vertical cell type semiconductor device 100 according to the second embodiment of the inventive concept, the barrier dielectric layer 114a is formed on the exposed surface of the protective layer 112ba. And forming a trap dielectric layer 116a on a surface of the barrier dielectric layer 114a and conformally forming a tunneling dielectric layer 118a on a surface of the trap dielectric layer 116a. The barrier dielectric layer 114a may include silicon oxide, the trap dielectric layer 116a may include silicon nitride, and the tunneling dielectric layer 118a may include silicon oxide or silicon nitride doped with nitrogen. have.

Referring to FIG. 6D, in the manufacturing method of the vertical cell type semiconductor device 100b according to the second exemplary embodiment of the inventive concept, a protective pattern 112b and a barrier film 114 are formed inside the through hole H. , Charge trap film 116, and tunneling film 118 may be formed. The protective pattern 112b, the barrier layer 114, the charge trap layer 116, and the tunneling layer 118 may be formed to pass through the protective layer 112ba and the dielectric layers 114a, 116a, and 118a. And an entire anisotropic etching process for partially removing the passivation layer 112ba and the dielectric layers 114a, 116a, and 118a so as to exist only in the inner wall of the hole H. Through the anisotropic etching process, the protective layer 112ba may be etched to form a protective pattern 112b that contacts the sidewall of the through hole H, and the barrier dielectric layer 114a may be etched to form the protective pattern. The barrier layer 114 may be formed to contact 112b, the trap dielectric layer 116a may be etched to form a charge trap layer 116 which contacts the barrier layer 114, and the tunneling dielectric layer may be formed. A tunneling layer 118 may be formed to etch 118a to contact the charge trap layer 116. Subsequent processes are the same as those with reference to FIGS. 5F to 5Q in the first embodiment, and thus description thereof is omitted.

7A to 7C are cross-sectional views illustrating a method of manufacturing a vertical cell type semiconductor device according to a third embodiment of the inventive concept, in a process sequence.

Referring to FIG. 7A, a method of manufacturing a vertical cell type semiconductor device 100c according to a third exemplary embodiment of the inventive concept may include a plurality of interlayer insulating films 104 and a plurality of sacrificial films on a substrate 102. Forming a preliminary laminated structure 108 in which the fields 106 are alternately stacked, forming a first capping film 110 on top of the preliminary laminated structure 108, and forming the first capping film 110 and the preliminary stacking structure 108. It may include forming a through hole (H) penetrating the stack structure 108. In addition, the inner wall of the through hole H may be oxidized to form the protective film 112ca.

Referring to FIG. 7B, in the manufacturing method of the vertical cell type semiconductor device 100c according to the third exemplary embodiment of the inventive concept, a trap is disposed on an exposed surface of the protective film 112ca in the through hole H. Referring to FIG. The dielectric film 116a may be formed, and the tunneling dielectric film 118a may be conformally formed on the surface of the trap dielectric film 116a. The trap dielectric layer 116a may include silicon nitride, and the tunneling dielectric layer 118a may include silicon oxide or nitrogen doped silicon oxide.

Referring to FIG. 7C, in the manufacturing method of the vertical cell type semiconductor device 100c according to the third embodiment of the inventive concept, the protective layer 112ca, the trap dielectric layer 114a and the tunneling dielectric layer 116a are etched. , Forming the protection pattern 112c, the charge trap layer 116, and the tunneling layer 118. The protective pattern 112c may be etch resistant to the etchant for removing the sacrificial layer 106 and may also perform a barrier function. For example, the barrier film 114 of the first and second embodiments can be omitted. Subsequent processes are the same as the processes referenced with reference to 5f to 5q of Example 1, and thus description thereof is omitted.

8A to 8D are cross-sectional views illustrating a method of manufacturing a vertical cell type semiconductor device according to a fourth embodiment of the inventive concept in a process sequence.

Referring to FIG. 8A, in the manufacturing method of the vertical cell type semiconductor device 100d according to the fourth exemplary embodiment of the inventive concept, the interlayer insulating layers 104 and the first sacrificial layer 106 are formed on a substrate 102. ) Forms a preliminary laminated structure 108 in which alternatingly and repeatedly stacked, a first capping film 110 is formed on top of the preliminary laminated structure 108, and the first capping film 110 and the preliminary A through hole H penetrating through the stack structure 108 is formed, and a protective dielectric film 112da is conformally formed on the bottom surface and inner wall of the through hole H and the surface of the first capping layer 110. It may include doing. Forming the protective dielectric layer 112da may include depositing silicon oxide.

Referring to FIG. 8B, in the manufacturing method of the vertical cell type semiconductor device 100d according to the fourth embodiment of the inventive concept, the protective dielectric film 112da is cured by performing a curing process (densifying process). 112db). The curing process may include a thermal oxidation process such as In Situ Steam generation (ISSG), a plasma oxidation process, and a CLN oxidizing process. The hardening process includes converting the protective dielectric film 112da, which is an amorphous silicon oxide film, into a denser bond or trap so that the film quality becomes more dense by replacing oxygen with a polycrystalline hardened oxide film 112db. can do.

Referring to FIG. 8C, in the manufacturing method of the vertical cell type semiconductor device 100d according to the fourth embodiment of the inventive concept, a trap dielectric film 116a is formed on the surface of the cured oxide film 112db, and the trap is formed. It may include forming a tunneling dielectric layer 118a on the surface of the dielectric layer 116a. The trap dielectric layer 116a may include silicon nitride, and the tunneling dielectric layer 118a may include silicon oxide.

Referring to FIG. 8D, a method of manufacturing a vertical cell type semiconductor device according to a fourth exemplary embodiment of the inventive concept may include a protection pattern 112d, a charge trap layer 116, and an inner wall of the through hole H. Forming tunneling film 118. Forming the protective pattern 112d, the charge trap layer 116, and the tunneling layer 118 in the through hole H may include an oxide film 112db and a trap cured to expose the bottom surface of the through hole H. Anisotropic etching of the dielectric layer 116a and the tunneling dielectric layer 118a may be performed. Through the entire anisotropic etching process, the hardened oxide film 112db may be etched to form a protective pattern 112d contacting the inner wall of the through hole H, and the trap dielectric film 116a may be etched to protect the protective film 112db. The charge trap layer 116 may be formed in contact with the pattern 112d, and the tunneling dielectric layer 118a may be etched to form the tunneling layer 118 in contact with the charge trap layer 116. In addition, the surface of the substrate 102 may be exposed under the through hole H during the etching process. Subsequent processes are the same as those with reference to FIGS. 5F to 5Q in the first embodiment, and thus description thereof is omitted.

9 is a conceptual diagram illustrating a semiconductor module 500 including at least one of the semiconductor devices 100a, 100b, 100c, and 100d according to various embodiments of the inventive concept. 9, a semiconductor module 500 according to an embodiment of the inventive concept may include semiconductor devices according to various embodiments of the inventive concept mounted on a semiconductor module substrate 510. 100a, 100b, 100c, 100d). The semiconductor module 500 may further include a microprocessor 520 mounted on the module substrate 510. Input / output terminals 540 may be disposed on at least one side of the module substrate 510. The semiconductor module 500 may include a memory card or a solid state drive (SSD).

FIG. 10 is a block diagram conceptually illustrating an electronic system including one of the semiconductor devices 100a, 100b, 100c, and 100d according to embodiments of the inventive concept. Referring to FIG. 10, semiconductor devices 100a, 100b, 100c, and 100d according to embodiments of the inventive concept may be applied to the electronic system 600. The electronic system 600 may include a body 610, a micro processor unit 620, a power supply 630, a function unit 640, and / or a display controller unit. And a controller unit 650. The body 610 may be a system board or a mother board having a printed circuit board (PCB) or the like. The microprocessor unit 616, the power supply unit 630, the function unit 640, and the display controller unit 650 may be mounted or mounted on the body 610. The display unit 660 may be disposed on an upper surface of the body 610 or an exterior of the body 610. For example, the display unit 660 may be disposed on a surface of the body 610 to display an image processed by the display controller unit 650. The power supply unit 630 may receive a predetermined voltage from an external power source or the like and branch it to various voltage levels to supply the microprocessor unit 620, the function unit 640, the display controller unit 650, or the like. The microprocessor unit 620 may receive a voltage from the power supply unit 630 to control the function unit 640 and the display unit 660. The functional unit 640 may perform the functions of the various electronic systems 600. For example, when the electronic system 600 is a mobile electronic device such as a mobile phone, the functional unit 640 may output an image to the display unit 660 by dialing or communicating with an external device 670. It may include various components capable of performing a wireless communication function, such as a voice output to a speaker, and, in case of including a camera, may serve as an image processor. In an application embodiment, when the electronic system 600 is connected to a memory card or the like for capacity expansion, the functional unit 640 may be a memory card controller. The function unit 640 may exchange signals with the external device 670 through a wired or wireless communication unit 680. In addition, when the electronic system 600 requires a universal serial bus (USB) or the like for function expansion, the function unit 640 may serve as an interface controller. The semiconductor devices 100a, 100b, 100c, and 100d described in the embodiments of the inventive concept may be included in the functional unit 640.

11 is a block diagram schematically illustrating an electronic system 700 according to embodiments of the inventive concept. Referring to FIG. 11, the electronic system 700 may include at least one of the semiconductor devices 100a, 100b, 100c, and 100d according to embodiments of the inventive concept. The electronic system 700 may be applied to mobile electronic devices or computers. For example, the electronic system 700 may include a user interface 718 that performs data communication using the memory system 712, the microprocessor 714, the RAM 716, and the bus 720. The microprocessor 714 can program and control the electronic system 700. RAM 716 may be used as a working memory of microprocessor 714. For example, the microprocessor 714 or the RAM 716 may include at least one of the semiconductor devices 100a, 100b, 100c, and 100d according to embodiments of the inventive concept. Microprocessor 714, ram 716 and / or other components may be assembled in a single package. The user interface 718 can be used to input data to or output data from the electronic system 700. The memory system 712 may store codes for operating the microprocessor 714, data processed by the microprocessor 714, or external input data. The memory system 712 may include a controller and a memory.

12 is a diagram schematically illustrating a mobile electronic device according to embodiments of the inventive concept. The mobile electronic device 800 may be understood as a tablet PC. In addition, at least one of the semiconductor devices 100a, 100b, 100c, and 100d according to various embodiments of the inventive concept may be, in addition to a tablet PC, a portable computer such as a notebook computer, and an mpeg-1 audio layer 3 (MP3) player. It can be used in MP4 players, navigation devices, solid state disks (SSD), table computers, automobiles and home appliances.

While the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, You can understand that you can. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive.

100: vertical cell type semiconductor device 102: substrate
104: interlayer insulating film 110: first capping film
VS1: First Laminated Structure 112: Protective Pattern
114: barrier film 116: charge trap film
118: Tunneling film 120: Channel pattern
122: Gapfil pattern VS2: Second vertical structure
126: second capping film 128: third capping film
124: contact electrode 134GS: ground selection gate electrode
134C: cell gate electrode 134SS: string selection gate electrode
140: contact pad 142: conductive wiring

Claims (10)

Board,
A stack structure including interlayer insulating layers and gate electrodes alternately stacked on the substrate;
A through hole vertically penetrating the laminated structure; And
A vertical structure filling the through hole,
The vertical structure includes:
A gap fill pattern formed at the center of the through hole;
A channel pattern surrounding the outer surface of the gap fill pattern; And
And a gate dielectric film surrounding the outer surface of the channel pattern,
Wherein the gate dielectric layer comprises:
A tunneling film in contact with the channel pattern;
A charge trap film in contact with the tunneling film;
A barrier film in contact with the charge trap film;
A protective pattern in contact with the barrier film, wherein the protective pattern is denser than the barrier film; And
And a blocking film in contact with the protection pattern and the gate electrodes and having a denser blocking film than the protection pattern. The method of claim 1,
Wherein the protective pattern comprises oxidized silicon. 3. The method of claim 2,
The protective pattern is aligned with the lower surface or the upper surface of the insulating interlayer and protrudes toward the channel pattern. The method of claim 3,
The protective pattern protrudes toward the gate electrodes rather than side surfaces of the interlayer insulating layers. 5. The method of claim 4,
The upper surface or the lower surface of the protective pattern partially contacts the lower surface or the upper surface of the interlayer insulating layers. 6. The method of claim 5,
And the protective pattern is in contact with side surfaces of the interlayer insulating layers. 5. The method of claim 4,
A portion of the upper surface and the lower surface of the protective pattern is in contact with the barrier film. Board,
Interlayer insulating films and gate electrodes alternately stacked on the substrate;
A gate dielectric layer on one side surfaces of the interlayer insulating layers and one side surfaces of the gate electrodes; And
A channel pattern on a side of the gate dielectric layer,
Wherein the gate dielectric layer comprises:
A blocking film, a protective pattern, a barrier film, a charge trap film, and a tunneling film sequentially formed on the side surfaces of the gate electrodes,
The blocking film includes a metal oxide,
The protective pattern includes oxidized silicon,
The barrier film comprises silicon oxide,
The charge trap layer includes silicon nitride,
The tunneling film comprises silicon oxide, and
The protective pattern is denser than the barrier film. Alternately stacking interlayer insulating films and sacrificial films on a substrate,
A through hole for vertically penetrating the interlayer insulating layers and the sacrificial layers to expose side surfaces of the interlayer insulating layers and the sacrificial layers,
Oxidizing the side surfaces of the exposed sacrificial layers to form a protective pattern,
A charge trap layer is formed on the protective pattern and the interlayer insulating layer;
Forming a tunneling film on the charge trapping film, and
Forming a channel pattern on the tunneling film. Alternately stacking a plurality of interlayer insulating films and sacrificial films on a substrate,
A through hole for vertically penetrating the interlayer insulating layers and the sacrificial layers to expose a surface of the substrate,
Forming a protective pattern including oxidized silicon on an inner wall of the through hole,
Forming a charge trap layer including silicon nitride on the protective pattern,
Forming a tunneling film including silicon oxide on the charge trap film,
Forming a channel pattern on the tunneling layer,
Removing the sacrificial layers to expose upper and lower surfaces of the interlayer insulating layers and one side surface of the protective pattern; and
Forming a blocking film including upper and lower surfaces of the exposed interlayer insulating layers and a metal oxide in direct contact with one side of the protective pattern.

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