KR20140038844A - Top down linear type evaporation source and downward evaporator for manufacturing the super large size oled thin film - Google Patents

Abstract

The present invention relates to a particle-free top-down linear type evaporation source for manufacturing an ultra large scale OLED thin film in large quantities and an ultra large scale top-down OLED evaporator using the same. Multiple cylindrical nozzles are formed in a row at the bottom center part of a linear crucible of the top-down linear type evaporation source. The crucible and the nozzle are separated and heated so there is no hardening as organic matter evaporates downward. One or more top-down linear type evaporation sources are formed at the upper part of a high-vacuum chamber. A top-down type aligner including a mask frame fixing device, an alignment device, a substrate holding table, and a substrate alignment device is formed at the lower part of the chamber. A top-down type evaporation is conducted during the transfer-scanning of the evaporation source or during the linear transfer-scanning by integrally forming a substrate and a mask for the fixed evaporation source. The large substrate does not sag so a substrate chuck and a mask chuck are not used. Therefore It is possible to manufacture cheap ultra large scale OLED evaporators.

Description

Top down linear type evaporation source and downward evaporator for manufacturing the super large size OLED thin film}

The present invention relates to a particle-free top-down linear evaporation source and a top-down evaporator using the same for mass production of a large-area (11th generation) OLED (Organic Lighting Emission Display) thin film. In order to ensure that there is no deflection of the substrate so that the mass productivity of the product can be significantly improved, a very thin glass substrate is placed on a table located at the bottom of the chamber, and a continuous production of a thin film composed of light emitting organic materials on the substrate is performed. A top-down linear evaporation source for gasifying organic matter in the chamber in a high vacuum atmosphere is configured at the upper part of the chamber, and particles formed by the generation of particles from the evaporation source or the dropping of the hardened organic material around the evaporation source are lowered to the organic thin film. Hot wires on the gas vent and the chamber inner wall to prevent generation Pay special mounting to prevent the curing of the organic material, and by evaporation induced by the organic gas in a downward deflection to form the deposition of organic matter on a substrate is not typical, to a low top-down deposition for mass production of an organic thin film having a large area.

The OLED display is not only a post LCD display but also a surface emitting device for illumination, and its energy efficiency and low cost have been proved worldwide. As a key process technology of an OLED light emitting device, a thermal evaporation deposition process in which an organic light emitting material is vaporized by vaporization and deposited on a glass substrate in a high vacuum state to produce an organic thin film is mainly used.

The thermal evaporation deposition process is a source for evaporating organic matter, a substrate mask for fixing an evaporation source, an induction evaporator by heat radiation, a substrate tray for fixing a substrate, a shadow mask device for manufacturing patterning, and a thickness sensor for finely adjusting the amount of evaporation gas. Multipoint sensors are used in high vacuum chambers.

Especially recently, in order to lower the unit cost of the OLED product, there has been a need for a technique of manufacturing a larger size of a substrate, followed by cutting a small piece into several pieces. For example, if an organic thin film is formed by depositing a 4th generation or a 5th generation substrate and cut to 2 inch or 4 inch according to the application, the productivity is improved and the manufacturing cost is lowered. However, recently, in order to mass-produce OLED TVs of large size (55 inches or more), an 8th generation (2200 mm × 2500 mm) glass substrate is used. At this time, since the thickness of the glass substrate is about 0.7 mm, It is very easy to break.

In the case of depositing an organic thin film on the large glass substrate 3 of the 8th generation class or more, as shown in FIG. 1, a linear bottom-up evaporation source 1 is disposed below the evaporator. In the upward direction, the organics are induction heated by radiant heat and evaporated. The substrate chuck 5 device is placed in the upper part of the chamber to prevent large substrate deflection, and the substrate edge is an IC circuit connection part, and an open mask tray 4 is used to prevent deposition. The mask chuck 6 is used, and the clamp 7 device is used so that the chuck and the substrate coincide with each other. The problem is that the substrate chuck device is 800kg or more up to 1.5 tons, so the device is very expensive, and the roller (2) device, which transfers heavy devices, is too heavy and the durability of the equipment is lowered. It will be very low.

In order to solve this problem, a top-down evaporator which prevents the substrate from sagging should be developed. Particularly, a special and inverse anti-evaporation evaporator for depositing a large sized organic thin film which suppresses particle generation due to organic hardening when gas is evaporated downward. Development is urgently needed, and the new concept of deposition technology is emerging as a globally competitive technology. However, no successful cases have been reported.

In the present invention, in order to develop not only a large (4G) substrate but also an ultra-large (11G) OLED thin film fabrication evaporator, it is an object of the present invention to provide a top-down evaporation source and a top-down OLED evaporator technology that the following problems and considerations have to be solved. Doing.

1) The concept of a top-down evaporator in which the size of the substrate must be able to accommodate 11th generation class (3000x3320mm)

2) Particle-free linear top-down evaporation source concept

3) Concept of not using heavy substrate chuck

4) Concept of not using heavy mask chuck

5) Concept of top down evaporation source and top down evaporator for organic hardening prevention

6) Low cost of evaporator

In order to achieve the above object, the top-down linear evaporation source according to the present invention is a linear gas funnel or a multi-point nozzle gas guide portion is attached to the lower portion of the downward gas ejection portion of the linear crucible, the gas can be efficiently ejected downward, the funnel heating line is Separately, a heating wall and a cooling wall are configured around the evaporation source.

Also, the alignment device for patterning is composed of a substrate holder table and a mask frame holder, connected to the alignment stage for fine alignment, and the downward alignment device is configured at the bottom of the evaporator.

In order to perform the top-down deposition, the substrate is stationary, and the evaporator may be configured to deposit the organic thin film while transferring the top-down linear evaporation source. In addition, the inner wall of the evaporator is characterized in that it consists of a heating wall with a built-in heating wire.

According to the above invention, the substrate chuck and the mask chuck are not used, so that the evaporator becomes inexpensive, the substrate of the ultra-large size does not sag, and the deposition process is performed, and the production and production ability of the ultra-large organic thin film without particle generation is improved. .

When using a top-down OLED thin film deposition apparatus using a particle-free top-down linear evaporation source and a top-down substrate aligning apparatus according to the present invention, unlike conventional techniques, large-scale substrate sagging and mask sagging are prevented, thereby preventing substrate chuck and mask chuck. Since the deposition machine is not used, the evaporator becomes inexpensive, the deposition process is easy, and the hardening phenomenon of the organic material is suppressed, and the generation of particles is suppressed, and the thin film can be deposited from the top down. In organic thin film manufacture, there exists an effect of improving the productivity.

1 is a conceptual diagram schematically showing a configuration of a bottom-up linear evaporator and a bottom-up evaporator for depositing a conventional OLED thin film,
2 is a schematic diagram of a crucible of a top-down linear evaporation source invented previously;
3 is a schematic view showing a top down linear gas funnel structure according to the present invention;
4 is an external schematic of a top down linear evaporation source,
5 is a schematic view of the nozzle shape below the top linear evaporation source;
6 is a schematic view of a top down linear multi-point nozzle guide according to the invention,
7 is a schematic cross-sectional view showing a top-down evaporation source cross-sectional structure according to the present invention,
8 is a top-down evaporator schematic showing the top down linear evaporator and the in-chamber construction of the substrate;
9 is a schematic diagram of a top down evaporator using two top down linear evaporators;
10 is a schematic of a top down evaporator using three top down linear evaporation sources,
11 is a conceptual diagram of a top-down evaporator showing the configuration of a top-down linear evaporator for transport and a top-down alignment device for stationary;
12 is a conceptual diagram of the top down evaporator of another angle showing the configuration of the top-down linear evaporator for transport and the top-down alignment device for stationary;
13 is a conceptual diagram of a top down evaporator showing a stationary top down linear evaporation source and a substrate transfer device;
14 is a conceptual view of another angle of the top down evaporator showing the stationary top down linear evaporation source and the substrate transfer device;
15 is a conceptual diagram of a top-down evaporator showing the configuration of two stationary alignment apparatuses having one top-down linear evaporation source for transfer;

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. Embodiment of the present invention may be modified in various forms, the scope of the present invention should not be construed as limited to the embodiments described below. This embodiment is provided to explain in detail the present invention to those skilled in the art. Accordingly, the shape of each element shown in the drawings may be exaggerated to emphasize a clearer description.

1 is a conceptual view showing the inside of a conventional large area bottom-up evaporator, in which a bottom-up linear evaporation source 1 is placed at the bottom of a high vacuum chamber, and organic gas is ejected upwards from the bottom of the high-vacuum chamber. Organic substances are deposited on the substrate to form a thin film. Since the glass substrate 3 is very thin, about 0.7 mm thick, and about 1100 × 1500 mm or more in size, the glass substrate 3 is severely sag due to gravity when placed horizontally. It is very heavy using a mask frame tray 4 and a mask chuck 6 for fixing and transferring a substrate and a clamp 7 device for fixing them after alignment. For example, since the weight is very heavy, such as 800kg ~ 1.5 tons, the conveying device such as the roller (2) for transporting the device is very heavy so that the productivity of the equipment is drastically reduced, very expensive. In addition, when a high voltage electrostatic chuck is used to chuck a glass substrate in a high vacuum, a very expensive high voltage supply device is inevitable, generation of particles by static electricity is a problem, and it is difficult to transfer high voltage wire devices in a high vacuum. Very difficult. As another technique, when chucking a glass substrate using a sticky polymer material, foreign matter remains on the back side of the substrate, which must be cleaned later. In particular, in this case, since a process chamber for chucking and de-chucking functions is additionally required, the mass production equipment is very complicated.

Since it is difficult to manufacture a very large organic thin film using such a bottom-up evaporator, a top-down linear evaporation source 10 and a top-down linear evaporation source crucible 20 having a structure as shown in FIG. 2 are patented (10-2007-0079560, 10-2007). -0039514), but when the organic gas leaves the crucible inlet, there is a problem of particles due to hardening that occurs.

In order to solve the problem of the particles, as shown in Figures 3 and 4, a linear gas funnel 30 structure is installed at the bottom of the top-down linear crucible, and the funnel structure is heated in addition to the crucible to form an organic material. It will prevent hardening. A linear gas spreading guide 31 and a linear funnel structure A 32 in which a plurality of rectangular openings are formed in a row, as shown in FIG. 5, to more uniformly spread the ejected organic gas. By constructing the linear funnel structure B 33 in which a plurality of nozzle portions are formed in a row, the amount of the organic gas to be ejected is controlled to further improve the uniformity of the deposited organic thin film.

As another invention, as shown in FIG. 6, when the linear multi-point nozzle guide portion 40 in which a plurality of cylindrical nozzles 41 are arranged in a line is provided below the gas ejection portion of the linear top-down crucible more effectively. It may also control the direction of blowing out of the gas. Of course, by installing a heating wire on the sides of the cylindrical nozzles to maintain the proper temperature, the organic gas is not cured on the nozzle wall, thereby suppressing particle generation.

7 shows a cross-sectional view of the top-down linear evaporation source, showing the internal structure. The upper portion of the evaporation source has a housing upper cover 50 to prevent the internal heat from escaping to the outside, it is configured in the form of a cover to take out the crucible from the lower housing 51 when the material is filled. Inside the housing, the upper reflecting film 52, the upper reflecting film 53, the lower reflecting film 54, and the like surround the crucible, thereby preventing the heat of the crucible from escaping to the outside. A crucible heating wire 55 for heating the crucible is configured around the crucible, and the heating wire is fixed to the heating wire fixing device 56. The crucible base 57 is made of an insulating material for the purpose of fixing the crucible inside the housing, and a gas funnel heating wire 58 is formed. The crucible is configured in such a way that the upper part of the crucible 60 covers the upper part of the body of the crucible 61 so that the material can be put therein. The crucible inner wall 62 is formed inside the crucible to form a room for containing organic matter. do. As described above, the gas guide portion 63, such as a funnel, is formed to facilitate the ejection of gas.

As shown in FIG. 8, an embodiment of performing a deposition process of a top-down organic thin film using a top-down linear evaporator 70 is illustrated. In the upper part of the chamber, a heating plate gas guide portion 72 connected to the top-down linear evaporation source using the support fixing device 71 is formed to guide the gas leaving the evaporation source to reach the substrate more effectively. Heating wires 73 are planted in the wall of the guide so as not to harden, and a current is flowed, thereby heating. In order for the evaporation source guide device to prevent heat from being transferred to another device in the chamber, the outside of the guide is surrounded by a cooling jacket 74 in which coolant lines 75 are planted. As the linear evaporation source device is scanned against the substrate, downward deposition is performed, and the large substrate 90 is placed on the substrate holder table 91 without sagging. In other words, no substrate chuck is required. At this time, the table for the substrate holder is connected to a device such as a UVW stage, the XYZ motion can be fine, fine alignment with the shadow mask 81 is possible to form a display pixel on the substrate. The shadow mask has a mask frame 80, which is placed in a mask frame holder 82 device, which is also connected to the stage 83, enabling fine align motion to form more effective pixels. This is possible. Such a device is called a "top-down aligner", and after alignment motion of the substrate and the mask, the shadow mask is gently lowered on the substrate to prevent the mask from sagging. In other words, the use of a mask chuck is unnecessary. In the case of using a very large substrate, in the process of using an open mask, since the frame of the mask is supported upward, the weight of the frame against gravity is not burdened. That is, mechanically very light and stable aligning device has the effect, there is no deflection of the mask, as in the conventional, the frame does not have to be very heavy or thick. In the case of the organic thin film deposition of the EML pixel formation of the RGB layer, it is possible to deposit in this way.

9 shows an example in which two top down linear evaporation sources 70 are used (one for host material and one for dopant material). A heating separating wall 100 is further configured between the evaporation sources, and a transfer roller 112 is installed at the lower portion of the chamber, so that the tray 111 carrying the substrate 113 is aligned with the open mask frame 110. Combined, it is possible to simultaneously linearly transport and downward deposition. In the case of forming non-pixel forming organic thin films such as HIL, HTL, and ETL, deposition can be performed in this manner. In particular, even when manufacturing an organic thin film for OLED lighting that does not require pixel formation, effective down deposition is possible in this way. 10 shows an example in which three top down linear evaporation sources are used (one for the host material and the other for the dopant material).

11 and 12 illustrate an embodiment in which the top-down deposition chamber 200 is configured by using the top-down linear evaporation source 202. A pumping port is formed at an upper portion of the deposition chamber, and there is an evaporation source support portion 203 for fixing a linear evaporation source, and a conveying roller portion 204 is formed to enable a transfer scan of the evaporation source. In particular, the conveying rail part 205 is formed in the conveying rail fixing part 206, so that the evaporation source can be easily conveyed to form an organic thin film in a downward manner while linearly scanning the stationary substrate. In particular, the organic material hardening prevention heating wire 207 is used to moderately heat the center upper wall of the chamber, so that the flying organic gas does not harden or adhere to the wall, thereby suppressing the generation of particles. In order to prevent hardening of organic substance, a barrier wall is formed and a heating wire is planted inside and heated.

A mask frame fixing part 211 for horizontally fixing the shadow mask frame 210 is formed in the lower center of the deposition chamber, and is connected to the fine alignment stage 212. The substrate 213 is placed on the substrate table 214 using a robot, and a substrate cooling coolant line 215 is planted in the substrate table to keep the temperature of the substrate sufficiently low. In addition, in order to suppress the temperature rise of the mask, a mask cooling coolant line 216 may be installed in the mask frame fixing part. A source door 217 is formed on the outer wall of the deposition chamber, so that the evaporation source can be installed and the material can be filled, and the substrate door 218 is formed to allow the substrate to enter and exit. 219) to keep the amount of evaporation constant. Evaporation source fixing part 220 blades are formed on both sides of the evaporation source.

13 and 14, the top-down linear evaporation source 302 fixed to the center of the deposition chamber 300 is fixed, and the internal structure of the evaporator in which the substrate is transferred downward in a linear direction is shown. Pumping ports 301 are formed on the upper and lower sides of the chamber, and an anti-curing heating unit 304 of the organic material is formed of a heating wire 305 in the inner central portion of the chamber. In order to prevent the organic material from being deposited and hardened, a barrier wall may be formed and heated inside the heating wire.

A plurality of transfer rollers 306 are formed in the lower part of the chamber, so that the substrate 308, the mask 307, and the tray 309 are united into one body, and are simultaneously transported to allow the top-down deposition. In particular, the substrate up-down pin transfer part 311 is configured so that the substrate introduced through the substrate door 315 is seated on the tray, and when the robot is pulled out after placing the substrate on the pin, the pin device comes down so that the substrate does not sag on the tray. Will be placed. Moreover, the mask frame up-down conveyance part 310 is comprised and the stage apparatus which aligns the mask frame 307 with a board | substrate and puts it down on a board | substrate is installed in a chamber. A source door 316 is formed at the side of the chamber, and an evaporation source fixing part, which is a fixed wing 318, is attached to both sides of the top-down linear evaporation source, and is caught by the evaporation source fixing part 303 at the upper part of the chamber. On one side of the evaporation source, a thickness control crystal sensor 317 is attached. When the substrate and the mask are conveyed, a rotating motor part 312 for rotating the roller is configured together with the conveying roller part 313 through the roller rotating shaft 314.

As shown in FIG. 15, in the case of the top-down evaporator which is located above the center of one evaporator 200 of the top-down linear evaporation source for transport 200 and shows the configuration of two stop alignment devices 211 on the left and right sides, one substrate is provided. During the time when the evaporation source scans and deposits after being aligned with the mask, the other substrate is drawn in and the mask is aligned, and when the deposition of the right substrate is completed, the evaporation source is moved to the left substrate for scanning deposition. This improves the material use of the evaporation source and increases productivity. In other words, the deposition can be performed on another substrate even during an idle time generated when only one substrate is inserted and deposited.

As described above, a plurality of top-down evaporators are connected to each other to form an in-line type or a cluster type to continuously perform an organic thin film process to mass produce an OLED device having a large area by using a top-down deposition technique.

1: Upward Linear Evaporation Substrate 2: Feed Roller
3: Substrate 4: Mask Frame Tray
5: anti-substrate chuck 6: anti-mask sag chuck
7: clamp
10: top down linear incremental source 20: crucible structure of top down linear evaporation source
30: linear stage funnel 31: gas spreading guide
32: linear funnel structure A 33: linear funnel structure B
40: linear multi-point nozzle guide 41: cylindrical nozzle
50: housing top cover 51: housing bottom
52: upper reflecting film 53: upper reflecting film
54: side lower reflecting film 55: crucible heating wire
56: heating wire fixing device 57: crucible base
58: funnel heating wire
60: crucible upper part 61: crucible
62: interior of the crucible room 63: gas guide
70: top down linear evaporator 71: support fixture
72: heating plate gas guide 73: heating line
74: cooling jacket 75: coolant line
80: mask frame 81: shadow mask
82: mask frame holder 83: UVW alignment stage
90: substrate 91: substrate holder table
100: separating wall for heating 110: open mask frame
111: tray 112: roller
113: substrate
200: deposition chamber 201: pumping port
202: top down linear evaporation source 203: evaporation source support
204: feed roller portion 205: feed rail portion
206: transfer rail fixing portion 207: heating wire for preventing organic hardening
210: shadow mask frame 211: mask frame fixing portion
212: fine alignment stage 213: substrate
214: substrate table 215: cooling water line for substrate cooling
216: coolant line for mask cooling 217: source door
218: substrate door 219: crystal sensor
220: evaporation source fixing part
300: deposition chamber 301: pumping port
302: top down linear tube evaporation source 303: evaporation source fixture
304: anti-hardening heating unit 305: heating wire
306: feed roller 307: mask frame
308: substrate 309: tray
310: mask frame up-down transfer unit 311: substrate up-down pin transfer unit
312: rotary motor portion 313: feed roller portion
314: roller rotation axis 315: substrate door
316: source door 317: crystal sensor
318: evaporation source fixing part 319: shutter

Claims (23)

A top down evaporation source and a top down aligner device installed in a high vacuum deposition chamber, the top down linear evaporation source and the bottom down aligner;
The top-down linear evaporation source is an evaporation source fixing part fixed on both sides and supported by the evaporation source support part, and the top-down aligner device comprises a mask frame fixing part, a fine alignment stage, and a substrate table. .
The large-area OLED top down deposition apparatus according to claim 1, wherein a transfer roller portion, a transfer rail portion, and a transfer rail fixing portion are provided for the linear transfer scan of the top down linear evaporation source.
The large-area OLED top-down deposition apparatus according to claim 1, wherein heating wires for preventing organic hardening are provided in the transport rail fixing part wall and in the barrier wall to prevent hardening of the organic material.
The large-area OLED top-down evaporator according to claim 1, wherein a crystal sensor is attached to the evaporation document unit at an appropriate length by using a fixed shaft to control the evaporation rate of the organic evaporation gas.
The large-area OLED top-down method according to claim 1, wherein a plurality of pumping ports and a door for drawing in and out of the substrate, the shadow mask and the evaporation source are formed on the outer wall of the deposition chamber to maintain the high vacuum in the deposition chamber. Evaporator.

The large-area OLED top down deposition apparatus according to claim 1, wherein a cooling water line for cooling the substrate is provided in the substrate table of the top-down aligner and a cooling water line for mask cooling is provided in the mask frame fixing part.
The organic thin film forming surface of the substrate is placed and fixed upwards, and the shadow mask is finely aligned and fixed on the upper surface of the substrate, and the organic gas is evaporated downward while the linear downward evaporation source is linearly scanned at the upper portion thereof, The organic thin film is deposited on the substrate, and the fine alignment of the substrate and the shadow mask is performed by aligning the substrate holder table and the mask frame holder to the UVW stage, respectively.
Ultra-area OLED top down evaporator featuring the method
A top down evaporation source and a linear substrate transfer roller installed in a high vacuum deposition chamber, a top down aligner apparatus, comprising: a top linear evaporation source at the top, a bottom aligner at the bottom, a transfer roller at the center, and a substrate tray; The top-down linear evaporation source is fixed to the evaporation source by the evaporation source fixing portion on both sides, the top-down aligner device is composed of a mask frame up-down transfer unit, a fine alignment stage, a substrate up-down pin transfer unit, the transfer roller is a transfer roller unit, And a roller rotating shaft and a rotating motor part, wherein the substrate tray is configured to be a body with a substrate and a shadow mask.
The organic thin film forming surface of the substrate is placed on the substrate tray with the upper side facing upwards, and the shadow mask is finely aligned with the upper surface of the substrate so that it is integrated with the substrate tray to be clamped and linearly scanned and further fixed at the top. Ultra-area OLED top-down evaporator characterized in that the organic thin film is deposited on a large-area substrate as the organic gas is evaporated downward in the linear evaporation source.
9. The large-area OLED top down deposition apparatus according to claim 8, wherein a shutter is provided for shorting the evaporation gas between the evaporation source and the substrate.
The large-area OLED top-down evaporator according to claim 8, wherein a heating wire and a barrier wall are provided to prevent hardening of the organic material between the evaporation source part and the substrate transfer to prevent hardening of the organic material.
The large-area OLED top-down evaporator according to claim 8, wherein a crystal sensor is attached to an evaporation document unit at an appropriate height by using a fixed shaft at a lower portion of the fixed shaft to control the evaporation rate of the organic evaporation gas.
A top-down linear evaporation source apparatus, comprising: a rectangular parallelepiped housing, an internal reflecting film, a crucible heating line, a funnel heating line, a linear crucible, and a gas guide.
14. The top-down evaporation source of claim 13, wherein the housing is comprised of a housing top cover and a bottoming substructure to conform.
14. The top-down evaporation source according to claim 13, wherein the reflecting film is composed of an upper reflecting film on the inside of the housing, a side reflecting film on the upper part, and a lower part reflecting film on the lower part of the housing.
The top-down evaporation source according to claim 13, wherein the linear crucible is supported by a crucible pedestal, and consists of a linear crucible body composed of an upper part of the crucible and an inner wall of the crucible, and a gas guide part is formed in the center of the lower surface. .
The gas guide portion of the linear crucible is composed of a linear gas funnel and a linear gas spreading guide portion, the inside of which is formed in a row of rectangular jets, or a circular jet is formed in a row. Top down evaporation source.
17. The top-down evaporation source according to claim 16, wherein the gas guide portion of the linear crucible is formed in a row with cylindrical nozzle portions, and a linear multi-point nozzle guide portion is formed.
14. The top-down evaporation source according to claim 13, wherein the top-down linear evaporation source device is supported by the support fixing device and comprises a hot plate gas guide and a cooling jacket.
20. The top-down evaporation source according to claim 19, wherein the heating plate is internally heated to allow heating, and a cooling water line is formed inside the cooling jacket to enable cooling.
20. The top-down evaporation source of claim 19, wherein for the host material and the dopant material, two or three top-down linear evaporation sources are arranged face to face at an angle with a heating partition therebetween.
2. The large-area OLED top down evaporator according to claim 1, wherein two top down aligners are disposed on the left and right sides of the deposition chamber, and one top down linear evaporation source is installed at the center of the chamber. 23. The method of claim 22, wherein while one substrate is being deposited, the other substrate is introduced into the depositor and mask aligned, and after deposition of one substrate is complete, another substrate is deposited and the sequence is repeated alternately. Extra Large Area OLED Top Down Evaporator

Images