KR20140026566A - Ｍｅｍｓ 앵커 및 스페이서 구조 - Google Patents

Ｍｅｍｓ 앵커 및 스페이서 구조 Download PDF

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KR20140026566A
KR20140026566A KR1020137034030A KR20137034030A KR20140026566A KR 20140026566 A KR20140026566 A KR 20140026566A KR 1020137034030 A KR1020137034030 A KR 1020137034030A KR 20137034030 A KR20137034030 A KR 20137034030A KR 20140026566 A KR20140026566 A KR 20140026566A
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layer
substrate
polymer layer
structural material
mems
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Korean (ko)
Inventor
티모시 제이. 브로스니한
마크 비. 앤더슨
유진 이. 3세 피크
제스퍼 로드윅 스테인
조이스 우
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픽스트로닉스 인코포레이티드
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Publication of KR20140026566A publication Critical patent/KR20140026566A/ko
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    • H01L2224/8312—Aligning
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    • H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
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  • Mechanical Light Control Or Optical Switches (AREA)
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KR1020137034030A 2011-05-20 2012-05-18 Ｍｅｍｓ 앵커 및 스페이서 구조 Ceased KR20140026566A (ko)

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JP2025057942A (ja) 2023-09-28 2025-04-09 オムロン株式会社 表示装置およびこれを備えた展示装置

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KR20210005454A (ko) * 2019-07-05 2021-01-14 삼성전자주식회사 발광소자 패키지 제조방법 및 이를 이용한 디스플레이 패널 제조방법
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