KR20140025792A - Spraying nozzle unit - Google Patents

Spraying nozzle unit Download PDF

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Publication number
KR20140025792A
KR20140025792A KR1020120091912A KR20120091912A KR20140025792A KR 20140025792 A KR20140025792 A KR 20140025792A KR 1020120091912 A KR1020120091912 A KR 1020120091912A KR 20120091912 A KR20120091912 A KR 20120091912A KR 20140025792 A KR20140025792 A KR 20140025792A
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South Korea
Prior art keywords
chamber
wall
nozzle body
raw material
nozzle
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KR1020120091912A
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Korean (ko)
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KR101394265B1 (en
Inventor
정기택
최호중
강명성
송욱
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에스엔유 프리시젼 주식회사
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Priority to KR1020120091912A priority Critical patent/KR101394265B1/en
Priority to TW102129159A priority patent/TWI490047B/en
Priority to JP2013171390A priority patent/JP5594503B2/en
Priority to CN201310367263.1A priority patent/CN103623962B/en
Publication of KR20140025792A publication Critical patent/KR20140025792A/en
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Publication of KR101394265B1 publication Critical patent/KR101394265B1/en

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/0278—Arrangement or mounting of spray heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/60—Arrangements for mounting, supporting or holding spraying apparatus
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)
  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
  • Nozzles (AREA)

Abstract

The present invention relates to a spray nozzle unit comprising a nozzle body, a sealing member, a washer member, and a spring member. The nozzle body includes a spray hole inside thereof, which penetrate from top to the bottom of the nozzle body to pass a vaporized raw material, and is combined to pass through an external surface of a chamber in which the raw material is stored. The sealing member is installed between the nozzle body and the external surface of the chamber to seal a gap between the nozzle body and the external surface of the chamber such that the vaporized raw material may not escape between the nozzle body and the external surface of the chamber. The washer member is combined to a bottom end of the nozzle body which is disposed inside the chamber. The spring member is installed between the washer member and an inner side of the chamber to apply elastic forces toward the external surface of the chamber and the washer member such that the nozzle body may be adhered to the external surface of the chamber.

Description

분사노즐 유닛{Spraying Nozzle Unit}[0001] Spraying Nozzle Unit [0002]

본 발명은 분사노즐 유닛에 관한 것으로서, 보다 상세하게는 기판상에 박막 형태로 원료물질을 증착시키기 위하여 기화된 원료물질을 기판에 분사하는 분사노즐 유닛에 관한 것이다.The present invention relates to a spray nozzle unit, and more particularly, to a spray nozzle unit for spraying a vaporized raw material onto a substrate in order to deposit a raw material on a substrate in a thin film form.

자체발광 특성을 갖는 유기발광 표시장치는, 주사 라인(scan line)과 데이터 라인(data line) 사이에 매트릭스 방식으로 연결되어 화소를 구성하는 유기발광 소자를 포함한다. 유기발광 소자는 애노드(anode) 전극 및 캐소드(cathode) 전극과, 애노드 전극 및 캐소드 전극 사이에 형성되고 정공 수송층, 유기발광층 및 전자 수송층을 포함하는 유기 박막층으로 구성된다.An organic light emitting display device having self-emission characteristics includes an organic light emitting device connected between a scan line and a data line in a matrix manner to form pixels. The organic light emitting device includes an anode electrode and a cathode electrode, and an organic thin film layer formed between the anode electrode and the cathode electrode and including a hole transporting layer, an organic light emitting layer, and an electron transporting layer.

유기 박막층을 증착하는 공정에서 사용되는 유기 재료는 무기 재료와 달리 높은 증기압이 필요치 않으나, 고온에서 분해 및 변성이 용이하다. 이러한 소재의 특성으로 인해 유기 박막은 텅스텐, 티타늄, SUS 등의 재질로 된 원료 용기에 유기 재료를 충진하고, 원료 용기를 가열하여 유기 재료를 기화시켜서 기판상에 증착시킨다.Unlike inorganic materials, organic materials used in the process of depositing an organic thin film layer do not require high vapor pressure, but decomposition and denaturation at high temperatures are easy. Due to the characteristics of the material, the organic thin film is filled with an organic material in a raw material container made of tungsten, titanium, SUS or the like, and the organic material is vaporized by heating the raw material container to deposit on the substrate.

유기 박막층을 증착하기 위하여 기화된 원료물질을 기판상에 균일하게 분사하게 되는데, 기화된 원료물질을 수용하는 원료 용기의 외벽에 분사노즐을 결합하여 원료 용기 내부의 원료물질을 분사노즐을 통과시켜 기판에 증발시킨다.The vaporized raw material is uniformly sprayed on the substrate in order to deposit the organic thin film layer. The spraying nozzle is coupled to the outer wall of the raw material container containing the vaporized raw material to pass the raw material inside the raw material container through the spraying nozzle, Lt; / RTI >

도 1은 종래의 분사노즐의 일례를 도시한 도면이다. 도 1을 참조하면, 종래의 분사노즐(10)은 나사결합부(12) 등을 이용하여 챔버의 외벽(21)에 결합되었다.1 is a view showing an example of a conventional injection nozzle. Referring to FIG. 1, a conventional injection nozzle 10 is coupled to an outer wall 21 of a chamber by using a screw coupling portion 12 or the like.

챔버(20)와 분사노즐(10)은 증착 공정 중에는 분사홀(11)을 통과하는 기화된 원료물질과 접촉하므로 기화된 원료물질로부터 전달된 열에 의해 고온 상태가 되었다가 증착 공정이 완료되면 다시 저온 상태가 된다. 증착 공정이 반복되면서 챔버(20)와 분사노즐(10)은 열에 의해 팽창과 수축이 되풀이되는 반복 하중에 노출되며 이러한 열에 의한 반복 하중으로 인해 분사노즐(10)을 챔버의 외벽(21)에 결합시키는 나사결합부(12) 부위에 헐거움 또는 균열이 발생할 수 있고, 분사노즐(10)과 챔버의 외벽(21) 사이에는 미세한 틈이 형성될 수 있다.During the deposition process, the chamber 20 and the injection nozzle 10 are brought into a high-temperature state due to the heat transferred from the vaporized raw material since they are in contact with the vaporized raw material passing through the injection hole 11, State. As the deposition process is repeated, the chamber 20 and the injection nozzle 10 are exposed to a cyclic load that is repeatedly expanded and contracted by heat, and the injection nozzle 10 is coupled to the outer wall 21 of the chamber And a fine gap may be formed between the injection nozzle 10 and the outer wall 21 of the chamber.

이와 같은 분사노즐과 챔버의 결합 부위에서 발생한 손상으로 인해 챔버 내부의 기화된 원료물질이 손상 부위를 통해 외부로 누출됨으로써, 값비싼 원료물질이 손실될 뿐만 아니라, 누출된 원료물질로 인해 기판 외의 다른 영역에서 원료물질로 인한 오염 문제가 발생한다.Since the vaporized raw material in the chamber leaks to the outside through the damaged part due to the damage occurring at the joint portion between the injection nozzle and the chamber, not only the expensive raw material is lost, but also the raw material other than the substrate There arises a problem of contamination due to the raw material in the region.

따라서, 본 발명의 목적은 이와 같은 종래의 문제점을 해결하기 위한 것으로서, 기화된 원료물질을 분사하는 분사노즐과 원료물질을 수용하는 챔버 사이가 손상되지 않도록 밀봉함으로써, 값비싼 원료물질의 누출을 막아 생산비용을 절감하고, 기판 이외의 영역으로 원료물질이 증착되는 것을 방지하여 원료물질로 인한 오염을 방지할 수 있는 분사노즐 유닛을 제공함에 있다.SUMMARY OF THE INVENTION It is therefore an object of the present invention to solve the problems of the prior art as described above and to provide an apparatus and a method for sealing a raw material material by sealing the injection nozzle for spraying the vaporized raw material material and the chamber containing the raw material material, And an object of the present invention is to provide a spray nozzle unit capable of reducing the production cost and preventing contamination due to the raw material by preventing the source material from being deposited in a region other than the substrate.

상기와 같은 목적을 달성하기 위하여 본 발명의 분사노즐 유닛은, 내부에서 상하 방향으로 관통하게 형성되어 기화된 원료물질이 통과하는 분사홀을 구비하며, 상기 원료물질이 수용된 챔버의 외벽을 관통하여 결합되는 노즐 본체; 상기 노즐 본체와 상기 챔버 외벽 사이에 설치되어, 기화된 원료물질이 상기 노즐 본체와 상기 챔버의 외벽 사이로 빠져나가지 못하도록 상기 노즐 본체와 상기 챔버의 외벽 사이를 밀봉하는 밀봉부재; 상기 노즐 본체에서 상기 챔버의 내측에 위치하는 하단부에 결합되는 와셔부재; 및 상기 와셔부재와 상기 챔버 외벽의 내측면 사이에 설치되어, 상기 챔버 외벽과 상기 와셔부재 측으로 향하는 탄성력을 각각 작용하여 상기 노즐 본체를 상기 챔버 외벽에 밀착시키는 스프링부재;를 포함하는 것을 특징으로 한다.In order to achieve the above object, the injection nozzle unit of the present invention has an injection hole which is formed to penetrate in the vertical direction from the inside and passes through the vaporized raw material, and passes through the outer wall of the chamber in which the raw material is accommodated. Nozzle body; A sealing member installed between the nozzle body and the outer wall of the chamber to seal between the nozzle body and the outer wall of the chamber so that the vaporized raw material can not escape from the nozzle body and the outer wall of the chamber; A washer member coupled to a lower end portion of the nozzle body located inside the chamber; And a spring member installed between the washer member and the inner side surface of the chamber outer wall to apply elastic force toward the chamber outer wall and the washer member to close the nozzle body to the chamber outer wall. .

본 발명에 따른 분사노즐 유닛에 있어서, 바람직하게는, 상기 노즐 본체는, 상기 챔버의 외벽에 형성된 관통홀에 삽입되어 상기 챔버의 내측까지 돌출되는 제1본체부와, 상기 제1본체부의 상부에 마련되고 상기 제1본체부보다 단면적이 크며 상기 챔버의 외측으로 돌출되는 제2본체부를 더 구비한다.In the injection nozzle unit according to the present invention, preferably, the nozzle body is inserted into a through hole formed in the outer wall of the chamber and protrudes to the inside of the chamber, and the upper portion of the first body portion. A second body portion is provided and has a larger cross-sectional area than the first body portion and protrudes out of the chamber.

본 발명에 따른 분사노즐 유닛에 있어서, 바람직하게는, 상기 밀봉부재는, 상기 제2본체부와 상기 챔버 외벽의 외측면 사이에 설치되는 제1밀봉부재와, 상기 스프링부재와 상기 챔버 외벽의 내측면 사이에 설치되는 제2밀봉부재를 포함한다.In the spray nozzle unit according to the present invention, preferably, the sealing member includes a first sealing member provided between the second main body and the outer surface of the outer wall of the chamber, and a second sealing member provided between the spring member and the inner wall of the chamber outer wall And a second sealing member provided between the side surfaces.

본 발명에 따른 분사노즐 유닛에 있어서, 바람직하게는, 상기 와셔부재는 U자 형상으로 형성되며, 상기 노즐 본체의 하단부에는 측면으로부터 함몰되고 서로 반대 방향을 바라보는 한 쌍의 함몰부가 형성되고, 상기 와셔부재가 상기 함몰부에 끼워지는 방식으로 상기 와셔부재와 상기 노즐 본체가 결합된다.In the spray nozzle unit according to the present invention, preferably, the washer member is formed in a U-shape, a lower end portion of the nozzle body is formed with a pair of depressed portions depressed from the side surface and facing each other in opposite directions, The washer member and the nozzle body are engaged with each other in such a manner that the washer member is fitted in the depression.

본 발명에 따른 분사노즐 유닛에 있어서, 바람직하게는, 상기 밀봉부재는 구리 재질로 형성된다.In the spray nozzle unit according to the present invention, preferably, the sealing member is formed of a copper material.

본 발명의 분사노즐 유닛에 따르면, 장시간 사용에도 분사노즐과 챔버 사이에 원료물질이 누출될 수 있는 틈새의 발생을 방지하여, 값비싼 원료물질의 누출을 막아 생산비용을 절감하고, 기판 이외의 영역으로 원료물질이 증착되는 것을 방지하여 원료물질로 인한 오염을 방지할 수 있다.According to the spray nozzle unit of the present invention, it is possible to prevent the occurrence of a gap in which a raw material can leak between the injection nozzle and the chamber even for a long time of use, to prevent the leakage of expensive raw material materials, It is possible to prevent the raw material from being deposited and prevent contamination due to the raw material.

또한, 본 발명의 분사노즐 유닛에 따르면, 챔버로부터 원료물질의 누출을 차단하는 밀봉의 효율을 더욱 높일 수 있다.Further, according to the spray nozzle unit of the present invention, it is possible to further increase the efficiency of sealing to prevent the leakage of the raw material from the chamber.

또한, 본 발명의 분사노즐 유닛에 따르면, 가열과 냉각에 따른 열변형을 최소화하여 노즐 파손을 완벽하게 막을 수 있다.Further, according to the injection nozzle unit of the present invention, thermal deformation due to heating and cooling can be minimized, and nozzle breakage can be completely prevented.

또한, 본 발명의 분사노즐 유닛에 따르면, 노즐 파손에 따른 유지보수를 용이하게 할 수 있다.Further, according to the spray nozzle unit of the present invention, maintenance due to breakage of the nozzle can be facilitated.

또한, 본 발명의 분사노즐 유닛에 따르면, 노즐 본체와 챔버 외벽의 관통홀 사이의 틈새를 완벽하게 막을 수 있다.Further, according to the spray nozzle unit of the present invention, the gap between the nozzle body and the through-hole of the outer wall of the chamber can be completely prevented.

도 1은 종래의 분사노즐의 일례를 도시한 도면이고,
도 2는 본 발명의 일 실시예에 따른 분사노즐 유닛을 도시한 도면이고,
도 3은 도 2의 분사노즐 유닛의 노즐 본체와 와셔부재가 결합된 상태를 도시한 도면이다.1 is a view showing an example of a conventional injection nozzle,
2 is a view showing an injection nozzle unit according to an embodiment of the present invention,
FIG. 3 is a view showing a state in which the nozzle body and the washer member of the spray nozzle unit of FIG. 2 are engaged.

이하, 본 발명에 따른 분사노즐 유닛의 실시예들을 첨부된 도면을 참조하여 상세히 설명한다.Hereinafter, embodiments of the spray nozzle unit according to the present invention will be described in detail with reference to the accompanying drawings.

도 2는 본 발명의 일 실시예에 따른 분사노즐 유닛을 도시한 도면이고, 도 3은 도 2의 분사노즐 유닛의 노즐 본체와 와셔부재가 결합된 상태를 도시한 도면이다.FIG. 2 is a view showing an injection nozzle unit according to an embodiment of the present invention, and FIG. 3 is a view showing a state where a nozzle body and a washer member of the injection nozzle unit of FIG. 2 are coupled.

도 2 및 도 3을 참조하면, 본 실시예의 분사노즐 유닛(100)은, 기판상에 박막 형태로 원료물질을 증착시키기 위하여 기화된 원료물질을 기판에 분사하기 위한 것으로서, 노즐 본체(110)와, 밀봉부재(120)와, 와셔부재(130)와, 스프링부재(140)를 포함한다.2 and 3, the injection nozzle unit 100 of the present embodiment is for spraying a vaporized raw material onto a substrate in order to deposit a raw material on a substrate in the form of a thin film, and includes a nozzle body 110, A sealing member 120, a washer member 130, and a spring member 140. As shown in Fig.

상기 노즐 본체(110)는, 챔버(20) 내부의 기화된 원료물질을 통과시켜 기판에 분사하기 위한 것으로서, 원료물질이 수용된 챔버의 외벽(21)을 관통하여 결합된다. 본 실시예의 노즐 본체(110)는 분사홀(111)과, 제1본체부(112)와, 제2본체부(113)을 포함한다.The nozzle body 110 is for spraying the vaporized raw material in the chamber 20 to the substrate and is coupled through the outer wall 21 of the chamber containing the raw material. The nozzle body 110 of this embodiment includes a spray hole 111, a first main body 112, and a second main body 113.

분사홀(111)은 노즐 본체(110)의 내부에서 상하 방향으로 관통하게 형성되며, 챔버(20) 내부에 수용된 기화된 원료물질이 분사홀(111)을 통과하여 기판으로 분사된다. 분사홀(111)의 상단부는 원료물질이 확산될 수 있도록 테이퍼진 형상으로 형성되어 있다.The spray hole 111 is formed to penetrate the nozzle body 110 in the vertical direction. The vaporized raw material contained in the chamber 20 is injected into the substrate through the spray hole 111. The upper end of the injection hole 111 is formed in a tapered shape so that the raw material can be diffused.

제1본체부(112)는 챔버의 외벽(21)에 형성된 관통홀(23)에 삽입되어 챔버의 내측(22)까지 돌출되어 있다.The first body portion 112 is inserted into the through hole 23 formed in the outer wall 21 of the chamber and protrudes to the inner side 22 of the chamber.

제2본체부(113)는 제1본체부(112)의 상부에 마련되고 제1본체부(112)보다 단면적이 크게 형성된다. 예를 들어, 제1본체부(112)와 제2본체부(113)는 원기둥 형상으로 형성되며, 제2본체부(113)의 직경이 제1본체부(112)의 직경보다 크게 형성되어 제2본체부(113)의 단면적이 제1본체부(112)의 단면적보다 크게 형성된다. 따라서, 제2본체부(113)는 챔버의 외벽(21)에 형성된 관통홀(23)에 삽입되지 않고, 노즐 본체(110)가 챔버의 외벽(21)에 결합될 때 챔버(20)의 외측으로 돌출된다.The second body portion 113 is formed on the upper portion of the first body portion 112 and has a larger sectional area than the first body portion 112. For example, the first body 112 and the second body 113 are formed in a cylindrical shape, and the diameter of the second body 113 is larger than the diameter of the first body 112, 2 body portion 113 is formed to be larger than the cross-sectional area of the first body portion 112. The second body portion 113 is not inserted into the through hole 23 formed in the outer wall 21 of the chamber and the outer side of the chamber 20 when the nozzle body 110 is coupled to the outer wall 21 of the chamber .

상기 밀봉부재(120)는, 기화된 원료물질이 노즐 본체(110)와 챔버의 외벽(21) 사이로 빠져나가지 못하도록 노즐 본체(110)와 챔버의 외벽(21) 사이를 밀봉하며, 노즐 본체(110)와 챔버 외벽(21) 사이에 설치된다. 본 실시예의 밀봉부재(120)는 제1밀봉부재(121)와, 제2밀봉부재(122)를 포함한다.The sealing member 120 seals between the nozzle body 110 and the outer wall 21 of the chamber so that the vaporized raw material can not escape from between the nozzle body 110 and the outer wall 21 of the chamber, And the outer wall 21 of the chamber. The sealing member 120 of this embodiment includes a first sealing member 121 and a second sealing member 122. [

제1밀봉부재(121)는 제1본체부(112)와 제2본체부(113) 사이에 형성된 걸림턱에 걸려 제2본체부(113)와 챔버 외벽의 외측면(21a) 사이에 설치되며, 기화된 원료물질이 챔버의 외벽(21)을 통해 외부로 누출되는 것을 방지한다.The first sealing member 121 is installed between the second body portion 113 and the outer surface 21a of the outer wall of the chamber by being caught by the engagement protrusion formed between the first and second body portions 112 and 113 , Thereby preventing the vaporized raw material from leaking to the outside through the outer wall 21 of the chamber.

제2밀봉부재(122)는 스프링부재(140)와 챔버 외벽의 내측면(21b) 사이에 설치되며, 챔버(20) 내부의 기화된 원료물질이 챔버 외벽의 관통홀(23)로 진입하는 것을 방지한다. 제2밀봉부재(122)가 추가됨으로써, 원료물질이 챔버 외벽의 관통홀(23)을 통해 외부로 누출될 수 있는 위험성을 확실히 차단할 수 있다.The second sealing member 122 is provided between the spring member 140 and the inner side surface 21b of the outer wall of the chamber so that the vaporized raw material in the chamber 20 enters the through hole 23 of the outer wall of the chamber prevent. By adding the second sealing member 122, the risk that the raw material is leaked to the outside through the through-hole 23 of the outer wall of the chamber can be reliably prevented.

본 실시예의 밀봉부재(120)는 금속 재질이면서 열전도성이 우수한 구리 재질로 형성되는 것이 바람직하다. 구리 재질의 밀봉부재(120)는 상대적으로 연한 재질이므로 스프링부재(140)의 탄성력이 작용되어 노즐 본체(110)에 의해 눌려지면서 밀봉의 효과가 강화될 수 있다.It is preferable that the sealing member 120 of this embodiment is formed of a metal material and a copper material having excellent thermal conductivity. Since the sealing member 120 made of copper is relatively soft, the elastic force of the spring member 140 is applied to the nozzle body 110 so that the sealing effect can be enhanced by being pressed by the nozzle body 110.

상기 와셔부재(130)는, 노즐 본체(110)에서 챔버의 내측(22)에 위치하는 하단부(110b)에 결합되며, 스프링부재(140)를 지지한다.The washer member 130 is coupled to the lower end portion 110b located at the inner side 22 of the chamber in the nozzle body 110 and supports the spring member 140. [

도 3을 참조하면, 챔버의 내측(22)에 위치하는 노즐 본체의 하단부(110b), 즉 제1본체부(112)의 하단부에는 측면으로부터 함몰된 한 쌍의 함몰부(114)가 형성되어 있다. 한 쌍의 함몰부(114)는 서로 반대 방향을 바라보도록, 즉 원주 방향으로 180도 이격되게 형성되어 있다.3, a pair of depressions 114 recessed from the side surface are formed at the lower end 110b of the nozzle body located at the inner side 22 of the chamber, that is, at the lower end of the first main body 112 . The pair of depressed portions 114 are formed so as to face each other in opposite directions, i.e., 180 degrees apart in the circumferential direction.

본 실시예의 와셔부재(130)는 U자 형상으로 형성되는데, 와셔부재(130)가 노즐 본체의 하단부(110b)에 형성된 한 쌍의 함몰부(114)에 끼워지면서 와셔부재(130)와 노즐 본체(110)의 결합이 이루어진다.The washer member 130 of the present embodiment is formed in a U shape so that the washer member 130 is fitted in a pair of depressions 114 formed in the lower end portion 110b of the nozzle body, (110).

상기 스프링부재(140)는, 노즐 본체(110)를 챔버 외벽(21)에 밀착시킨다.The spring member 140 brings the nozzle body 110 into close contact with the outer wall 21 of the chamber.

스프링부재(140)는 와셔부재(130)와 챔버 외벽의 내측면(21b) 사이에 설치되어, 챔버 외벽(21)에 의해 일단부가 지지된 상태에서 와셔부재(130) 측으로 향하는 탄성력을 작용한다. 이로 인해 노즐 본체(110)를 챔버의 내측(22)으로 향하게 하는 힘이 발생하여 제2본체부(113)가 챔버 외벽의 외측면(21a)에 밀착할 수 있다. 제2본체부(113)가 챔버 외벽의 외측면(21a)에 밀착하면서 제1밀봉부재(121)에 압력을 가하게 되고, 이를 통해 제2본체부(113)와 챔버의 외벽(21) 사이에 완벽한 밀봉이 이루어진다.The spring member 140 is provided between the washer member 130 and the inner side surface 21b of the outer wall of the chamber and exerts an elastic force toward the washer member 130 in a state where one end is supported by the outer wall 21 of the chamber. As a result, a force for directing the nozzle body 110 toward the inner side 22 of the chamber is generated, and the second body portion 113 can be brought into close contact with the outer side surface 21a of the outer wall of the chamber. The second main body 113 is pressed against the outer surface 21a of the outer wall of the chamber to apply pressure to the first sealing member 121 so that the second main body 113 is in contact with the outer wall 21 of the chamber Perfect sealing is achieved.

또한, 스프링부재(140)는 챔버 외벽의 내측면(21b) 측으로 향하는 탄성력을 작용하므로 제2밀봉부재(122)를 챔버 외벽의 내측면(21b)에 밀착할 수 있다. 이를 통해 제1본체부(112)와 챔버의 외벽(21) 사이에 완벽한 밀봉이 이루어진다.In addition, since the spring member 140 exerts an elastic force toward the inner side surface 21b of the outer wall of the chamber, the second sealing member 122 can be brought into close contact with the inner side surface 21b of the outer wall of the chamber. Thereby, a complete sealing is achieved between the first body portion 112 and the outer wall 21 of the chamber.

상술한 바와 같이 구성된 본 실시예에 따른 분사노즐 유닛은, 노즐 본체와 챔버 외벽 사이에 밀봉부재를 삽입하고, 스프링부재의 탄성력을 이용하여 밀봉부재에 압력을 가하여 노즐 본체와 챔버의 외벽 사이를 밀봉함으로써, 장시간 사용에도 분사노즐과 챔버 사이에 원료물질이 누출될 수 있는 틈새의 발생을 방지할 수 있다. 따라서, 값비싼 원료물질의 누출을 막아 생산비용을 절감하고, 기판 이외의 영역으로 원료물질이 증착되는 것을 방지하여 원료물질로 인한 오염을 방지할 수 있는 효과를 얻을 수 있다.The injection nozzle unit according to this embodiment configured as described above has a structure in which a sealing member is inserted between the nozzle body and the outer wall of the chamber and pressure is applied to the sealing member using the elastic force of the spring member to seal the nozzle body and the outer wall of the chamber It is possible to prevent the generation of a gap in which the raw material may leak between the injection nozzle and the chamber even for a long time of use. Therefore, it is possible to prevent an expensive raw material from leaking to reduce the production cost, and prevent the raw material from being deposited in a region other than the substrate, thereby preventing contamination due to the raw material.

또한, 상술한 바와 같이 구성된 본 실시예에 따른 분사노즐 유닛은, 챔버 외벽의 외측면 및 내측면에 각각 밀봉부재를 설치함으로써, 챔버로부터 원료물질의 누출을 차단하는 밀봉의 효율을 더욱 높일 수 있는 효과를 얻을 수 있다.In addition, in the spray nozzle unit according to this embodiment configured as described above, by providing the sealing member on the outer side surface and the inner side surface of the outer wall of the chamber, it is possible to further improve the efficiency of sealing to prevent leakage of the raw material from the chamber Effect can be obtained.

또한, 상술한 바와 같이 구성된 본 실시예에 따른 분사노즐 유닛은, 밀봉부재를 비교적 연성의 구리 재질로 형성하여 스프링부재의 탄성력에 의해 살짝 눌려짐으로써, 노즐 본체와 챔버 외벽의 관통홀 사이의 틈새를 완벽하게 막을 수 있는 효과를 얻을 수 있다.The injection nozzle unit according to this embodiment configured as described above is formed of a relatively soft copper material and is slightly pressed by the elastic force of the spring member so that the gap between the nozzle body and the through hole of the outer wall of the chamber It is possible to obtain an effect of completely preventing the defects.

도 2의 실시예에 있어서, 제1본체부와 제2본체부가 원기둥 형상으로 형성된 것으로 설명하였으나, 제1본체부와 제2본체부 모두 다각형 기둥 형상 또는 제1본체부와 제2본체부 중 어느 하나는 다각형 기둥 형상이고 다른 하나는 원기둥 형상으로 형성될 수도 있다.In the embodiment of FIG. 2, the first body portion and the second body portion are formed in a cylindrical shape, but both the first body portion and the second body portion may have a polygonal columnar shape or a shape of either the first body portion or the second body portion One may be formed in a polygonal column shape and the other may be formed in a columnar shape.

도 2의 실시예에 있어서, U자형의 와셔부재가 노즐 본체의 함몰부에 끼워지는 방식으로 와셔부재와 노즐 본체가 결합되었으나, 와셔부재와 노즐 본체의 하단부가 나사결합하는 방식으로 와셔부재와 노즐 본체가 결합될 수도 있고, 그 외 다양한 방식으로 결합될 수도 있다.In the embodiment of Fig. 2, the washer member and the nozzle body are coupled in such a manner that the U-shaped washer member is fitted to the depression of the nozzle body, but the washer member and the nozzle body are screw- The body may be coupled, or may be coupled in various other ways.

본 발명의 권리범위는 상술한 실시예 및 변형례에 한정되는 것이 아니라 첨부된 특허청구범위 내에서 다양한 형태의 실시예로 구현될 수 있다. 특허청구범위에서 청구하는 본 발명의 요지를 벗어남이 없이 당해 발명이 속하는 기술 분야에서 통상의 지식을 가진 자라면 누구든지 변형 가능한 다양한 범위까지 본 발명의 청구범위 기재의 범위 내에 있는 것으로 본다.The scope of the present invention is not limited to the above-described embodiments and modifications, but can be implemented in various forms of embodiments within the scope of the appended claims. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention as defined by the appended claims.

100 : 분사노즐 유닛
110 : 노즐 본체
120 : 밀봉부재
130 : 와셔부재
140 : 스프링부재100: injection nozzle unit
110: nozzle body
120: sealing member
130: washer member
140: spring member

Claims (5)

내부에서 상하 방향으로 관통하게 형성되어 기화된 원료물질이 통과하는 분사홀을 구비하며, 상기 원료물질이 수용된 챔버의 외벽을 관통하여 결합되는 노즐 본체;
상기 노즐 본체와 상기 챔버 외벽 사이에 설치되어, 기화된 원료물질이 상기 노즐 본체와 상기 챔버의 외벽 사이로 빠져나가지 못하도록 상기 노즐 본체와 상기 챔버의 외벽 사이를 밀봉하는 밀봉부재;
상기 노즐 본체에서 상기 챔버의 내측에 위치하는 하단부에 결합되는 와셔부재; 및
상기 와셔부재와 상기 챔버 외벽의 내측면 사이에 설치되어, 상기 챔버 외벽과 상기 와셔부재 측으로 향하는 탄성력을 각각 작용하여 상기 노즐 본체를 상기 챔버 외벽에 밀착시키는 스프링부재;를 포함하는 것을 특징으로 하는 분사노즐 유닛.A nozzle body formed to penetrate in an up and down direction therein and having an injection hole through which vaporized raw material passes, and coupled through an outer wall of a chamber in which the raw material is accommodated;
A sealing member installed between the nozzle body and the outer wall of the chamber to seal between the nozzle body and the outer wall of the chamber so that the vaporized raw material can not escape from the nozzle body and the outer wall of the chamber;
A washer member coupled to a lower end portion of the nozzle body located inside the chamber; And
And a spring member disposed between the washer member and the inner side surface of the chamber outer wall to apply elastic force directed toward the chamber outer wall and the washer member to closely adhere the nozzle body to the chamber outer wall. Nozzle unit. 제1항에 있어서,
상기 노즐 본체는, 상기 챔버의 외벽에 형성된 관통홀에 삽입되어 상기 챔버의 내측까지 돌출되는 제1본체부와, 상기 제1본체부의 상부에 마련되고 상기 제1본체부보다 단면적이 크며 상기 챔버의 외측으로 돌출되는 제2본체부를 더 구비하는 것을 특징으로 하는 분사노즐 유닛.The method of claim 1,
The nozzle body may include a first main body part inserted into a through hole formed in an outer wall of the chamber and protruding to the inner side of the chamber, and provided on an upper part of the first main body part and having a larger cross-sectional area than the first main body part. Injection nozzle unit further comprises a second body portion protruding outward. 제2항에 있어서,
상기 밀봉부재는,
상기 제2본체부와 상기 챔버 외벽의 외측면 사이에 설치되는 제1밀봉부재와, 상기 스프링부재와 상기 챔버 외벽의 내측면 사이에 설치되는 제2밀봉부재를 포함하는 것을 특징으로 하는 분사노즐 유닛.3. The method of claim 2,
The sealing member
A first sealing member provided between the second main body and the outer surface of the outer wall of the chamber and a second sealing member provided between the spring member and the inner surface of the outer wall of the chamber, . 제1항에 있어서,
상기 와셔부재는 U자 형상으로 형성되며,
상기 노즐 본체의 하단부에는 측면으로부터 함몰되고 서로 반대 방향을 바라보는 한 쌍의 함몰부가 형성되고,
상기 와셔부재가 상기 함몰부에 끼워지는 방식으로 상기 와셔부재와 상기 노즐 본체가 결합되는 것을 특징으로 하는 분사노즐 유닛.The method of claim 1,
The washer member is formed in a U-shape,
A pair of depressions depressed from the side surface and facing each other in the opposite direction is formed at the lower end of the nozzle body,
Wherein the washer member and the nozzle body are engaged with each other in such a manner that the washer member is fitted to the depression. 제1항에 있어서,
상기 밀봉부재는 구리 재질로 형성되는 것을 특징으로 하는 분사노즐 유닛.The method of claim 1,
Wherein the sealing member is formed of a copper material.
KR1020120091912A 2012-08-22 2012-08-22 Spraying Nozzle Unit KR101394265B1 (en)

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JP2013171390A JP5594503B2 (en) 2012-08-22 2013-08-21 Injection nozzle unit
CN201310367263.1A CN103623962B (en) 2012-08-22 2013-08-21 Spray nozzle unit

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