KR20130136147A - Polishing apparatus using ultrasonic vibrations - Google Patents

Polishing apparatus using ultrasonic vibrations Download PDF

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Publication number
KR20130136147A
KR20130136147A KR1020120059749A KR20120059749A KR20130136147A KR 20130136147 A KR20130136147 A KR 20130136147A KR 1020120059749 A KR1020120059749 A KR 1020120059749A KR 20120059749 A KR20120059749 A KR 20120059749A KR 20130136147 A KR20130136147 A KR 20130136147A
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KR
South Korea
Prior art keywords
vibration
roller
polishing apparatus
plate
polishing
Prior art date
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KR1020120059749A
Other languages
Korean (ko)
Inventor
지영석
Original Assignee
(주)신아시스템
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Priority to KR1020120059749A priority Critical patent/KR20130136147A/en
Publication of KR20130136147A publication Critical patent/KR20130136147A/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/02—Frames; Beds; Carriages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/02—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor involving a reciprocatingly-moved work-table
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/24—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
    • B24B7/242—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass for plate glass

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)

Abstract

A polishing apparatus using ultrasonic vibrations according to the present invention comprises: a process table which supports an object to be processed; a polishing unit which is equipped with an abrasive in contact with the object to be processed; a first vibration generation unit which generates vibrations applied to the process table in a first direction; a second vibration generation unit which generates vibrations applied to the process table in a second direction intersected with the first direction; a roller bearing unit which is arranged to be rolled in the first direction between the process table and second vibration generation unit and applies vibrations supplied from the second vibration generation unit to the process table. The present invention can apply the ultrasonic vibrations of the two directions (first direction and second direction) to the process table in which the object to be process is safely settled, thereby reducing abrasion resistance in a polishing process, minimizing thermal transformation in the polishing process and improving the quality and productivity of polishing.

Description

Polishing apparatus using ultrasonic vibrations

The present invention relates to a polishing apparatus using ultrasonic vibrations, and more particularly, to a structure for applying ultrasonic vibrations to a processing table on which a workpiece is mounted.

In general, the polishing apparatus refers to an apparatus for performing polishing processing or grinding processing by rubbing the surface or the edge of the object to be processed, etc. using an abrasive material.

Polishing is usually a finishing process applied to an object that has undergone other processes. As the quality of processing recently demanded has increased, especially in the case of window glass used in digital display products, it is finished in one polishing process. In many cases, multi-step polishing is not performed.

Since the multi-stage polishing process is a factor of lowering the production efficiency, it is required to develop a polishing apparatus that can obtain sufficient processing quality with only one set-up polishing or grinding process. Efforts are being made to apply them efficiently.

The object of the present invention is to easily and simply apply to a conventional polishing device, while polishing using ultrasonic vibrations that can ultimately improve the quality and productivity of polishing, such as reducing the polishing resistance and minimizing thermal deformation during polishing. To provide a device.

Moreover, the objective of this invention is providing the grinding | polishing apparatus using the ultrasonic vibration which can apply the ultrasonic vibration of the two directions (1st direction and 2nd direction) which cross | intersect each other and the processing table on which the process object was mounted.

According to the present invention, the above object is a processing table for supporting a processing object; A polishing unit provided with an abrasive in contact with the object to be processed; A first vibration generating unit generating vibration applied to the working table in a first direction; A second vibration generator for generating vibrations applied to the processing table in a second direction crossing the first direction; And a first roller bearing unit provided to roll in the first direction between the machining table and the second vibration generating unit and receiving the vibration of the second vibration generating unit and applying the vibration to the processing table. It can be achieved by a polishing apparatus using ultrasonic vibration.

The abrasive may be provided to rotate relative to the object to be processed.

At least one of the first vibration generator and the second vibration generator may include a magnetostrictive transducer using a magnetostrictive element for generating ultrasonic vibration.

The magnetostrictive element may be terfenol-D.

The polishing apparatus may further include a vibration frame part coupled to the second vibration generating part and supporting the first roller bearing part.

The first roller bearing part may include a first roller disposed between the working table and the vibration frame part; A first-first plate whose one end is fixed to the outer circumferential surface of the first roller and the tartan part is fixed to the processing table; And a 1-2 plate having one end fixed to the outer circumferential surface of the first roller and the other end fixed to the vibration frame part.

The first-first plate and the first-second plate may be wound and unwound around the first roller as the working table vibrates in the first direction.

The pair of first roller bearings is provided in pairs, and the pair of first and second rollers is wound around the first roller in any one of the pair of first roller bearings. In the other one of the first roller bearing portion of the 1-1 and 1-2 plate can be released around the first roller.

The polishing apparatus includes a fixed frame portion disposed adjacent to the vibration frame portion; And a second roller bearing part provided to roll in the second direction between the vibration frame part and the fixed frame part.

The second roller bearing part may include a second roller disposed between the vibration frame part and the fixed frame part; A 2-1 plate having one end fixed to an outer circumferential surface of the second roller and a tartan part fixed to the vibration frame part; And a 2-2 plate having one end fixed to the outer circumferential surface of the second roller and the other end fixed to the fixing frame part.

The 2-1 plate and the 2-2 plate may be wound and unwound around the second roller as the vibrating frame part vibrates in the second direction.

The present invention provides a roller bearing portion provided to roll in a first direction in applying ultrasonic vibration in a second direction intersecting the first direction to a machining table on which a workpiece is placed and reciprocating in a first direction during polishing. By applying, effectively applying ultrasonic vibration in the second direction to the machining table without restraining or limiting the reciprocating movement in the first direction of the machining table, ultimately polishing, such as reducing the polishing resistance and minimizing thermal deformation during the polishing process. The quality and productivity of the processing can be improved.

In addition, the present invention, by applying ultrasonic vibration in two directions (first direction and second direction) intersecting each other, not ultrasonic vibration in one direction, to the machining table 110 on which the workpiece is seated, ultrasonic waves in polishing processing. The effect obtained by applying vibration can further improve the quality and productivity of the polishing process.

1 is a schematic configuration diagram of a polishing apparatus using ultrasonic vibration according to an embodiment of the present invention.
FIG. 2 is a block diagram illustrating ultrasonic vibration in the polishing apparatus of FIG. 1.
3 is a schematic exploded perspective view of the first roller bearing portion in the polishing apparatus of FIG. 1.

In order to fully understand the present invention, operational advantages of the present invention, and objects achieved by the practice of the present invention, reference should be made to the accompanying drawings and the accompanying drawings which illustrate preferred embodiments of the present invention.

Hereinafter, the present invention will be described in detail with reference to the preferred embodiments of the present invention with reference to the accompanying drawings. In the following description, well-known functions or constructions are not described in order to avoid unnecessary obscuration of the present invention.

1 is a schematic configuration diagram of a polishing apparatus using ultrasonic vibration according to an embodiment of the present invention.

Referring to FIG. 1, the polishing apparatus 100 using ultrasonic vibration according to the present invention is an apparatus for polishing a surface of a workpiece W at high speed, and includes a processing table 110, a polishing unit 120, and a first polishing apparatus 100. The vibration generating unit 130, the second vibration generating unit 140, and the first roller bearing unit 150 may be included. In addition, the polishing apparatus 100 using the ultrasonic vibration according to the present invention may further include a vibration frame 160, a fixed frame 170 and the second roller bearing 180.

For reference, the polishing apparatus 100 using the ultrasonic vibration shown in FIG. 1 may be a processing object W having a glass material (especially, tempered glass material), for example, window glass of a digital product such as a mobile phone or a navigation device. Apparatus for grinding or grinding the surface of However, the present invention is not limited to the processing target of the glass material, but may be applied to the processing target having various materials. In addition, in the present specification, 'grinding' may be used in a broad sense including 'grinding' and the like.

As illustrated in FIG. 1, the machining table 110 may seat the workpiece W and support the workpiece W. As shown in FIG. At this time, the processing table 110 may be provided with a vacuum chuck 115 to fix the processing object (W) during the polishing process. The vacuum chuck 115 may have a plurality of vacuum holes (not shown) formed on a surface contacting the processing object W, for example, an upper surface thereof to fix the processing object W on the processing table 110 by a vacuum suction method. have. However, the means for fixing the processing object (W) on the processing table 110 in the present invention is not limited to the vacuum chuck 115 and any one of a variety of clamp (clamp) or jig (jig) can be applied. have. On the other hand, the machining table 110 is applied to the vibration generated by the first vibration generating unit 130 in the grinding direction in the first direction (left or right or horizontal direction in Figure 1), the second vibration generating unit 140 Is generated in the second direction (up or down direction or vertical direction in FIG. 1). Details thereof will be described together with the first and second vibration generating units 130 and 140.

As illustrated in FIG. 1, the polishing unit 120 may include an abrasive 121 or a polishing pad contacting the object W during polishing. The polishing unit 120 may be disposed opposite the processing table 110 with the processing target W therebetween. In this case, the abrasive 121 may be provided to rotate with respect to the processing target object W in a state in contact with the processing target object W during polishing. To this end, the polishing unit 120 may include a spindle 123 for rotating the abrasive 121 as shown in FIG. 1. In addition, the abrasive 121 may be provided to be movable in a direction (up and down direction in FIG. 1) to approach and space the workpiece W and may be pressed at a predetermined load against the workpiece W during polishing. . To this end, the spindle 123 on which the abrasive 121 is mounted may be provided in a structure that is moved in the vertical direction, and may further be provided in a structure that is also moved in the left and right directions and the front and rear directions to enable the polishing process at various positions. . That is, the spindle 123 on which the abrasive 121 is mounted may be provided in a structure that is generally moved in three axes (X, Y, and Z axes).

FIG. 2 is a block diagram illustrating ultrasonic vibration in the polishing apparatus of FIG. 1.

As shown in FIGS. 1 and 2, the first vibration generator 130 may generate vibrations applied to the machining table 110 in a first direction (see left and right directions or horizontal directions in FIG. 1, arrows ①). have. At this time, the first power generator 135 is a device for supplying power for driving the first vibration generator 130, the first vibration generator 130 is a predetermined power by the first power generator 135. When applied, vibrations having a predetermined frequency may be generated. On the other hand, the vibration generated by the first vibration generating unit 130 is preferably an ultrasonic vibration in terms of maximizing the quality of the polishing process, but is not necessarily limited thereto.

Specifically, the first vibration generator 130 may be easily implemented as a conventional piezoelectric transducer that generates ultrasonic vibration using a piezoelectric device.

Alternatively, the first vibration generator 130 may be implemented as a magnetostrictive transducer instead of a piezoelectric transducer as a means for generating ultrasonic vibration. Magnetostrictive transducers generate ultrasonic vibrations using magnetostrictive devices, where magnetostrictive devices convert magnetic energy into mechanical energy (such as displacement or stress), ie a magnetic field is applied around it. In this case, it refers to a device having a characteristic of varying in length in order to preserve the total energy to the minimum.

It is preferable to use Terfenol-D as the magnetostrictive element, which means that the piezoelectric element can use only a specific frequency determined due to the limitation of the resonance design, while Terfenol-D is used. Since D) can use various frequencies, there is an advantage in that an optimum processing frequency can be selected according to the type and characteristics of the object to be processed (W). Terfenol-D can also produce nearly constant and large displacements over a fairly wide frequency band, with very fast response times, and no fatigue even after long periods of use. The advantage is that it can be kept constant over time. For reference, Terfenol-D (Terfenol-D) is a single crystal alloy having the chemical formula (x = 0.27 ~ 0.3, y = 1.9 ~ 2.0) of the most representative magnetostrictive element Tb x Dy 1 -x Fe y .

As shown in FIGS. 1 and 2, the second vibration generating unit 140 is applied to the machining table 110 in a second direction crossing the first direction (up or down direction or vertical direction in FIG. 1, see arrow ②). Can generate vibrations. At this time, the second power generator 145 is a device for supplying power for driving the second vibration generator 140, the second vibration generator 130 is a predetermined power by the second power generator 145. When applied, vibrations having a predetermined frequency may be generated.

Like the first vibration generator 130 described above, the second vibration generator 140 may be implemented as a piezoelectric transducer using a piezoelectric element or as a magnetostrictive transducer using a magnetostrictive element to generate ultrasonic vibration. In this case, the second vibration generating unit 140 is a terphenol-di (terfenol), a magnetostrictive element capable of generating ultrasonic vibrations of various frequencies so as to select an optimum processing frequency according to the type and characteristics of the object to be processed (W). -D) is preferably implemented as a magnetostrictive transducer. Details of the magnetostrictive transducer using Terfenol-D will be described mutatis mutandis to the description of the above-described first vibration generator 130.

Meanwhile, the polishing apparatus 100 using the ultrasonic vibration according to the present invention may further include a controller 190 as shown in FIG. 2. The controller 190 controls a driving voltage applied to the vibration generators 130 and 140 by the power generators 135 and 145 to change or adjust the frequency and amplitude of the ultrasonic vibrations applied to the machining table 110. Can be generated. The controller 190 may be implemented as a digital signal processor (DSP), a microprocessor, or the like embedded in a personal computer, and may include software or firmware installed in advance in a personal computer. It may be implemented as. In addition to controlling the driving voltages of the power generators 135 and 145, the controller 190 may be responsible for overall control of the respective components of the polishing apparatus 100.

3 is a schematic exploded perspective view of the first roller bearing portion in the polishing apparatus of FIG. 1.

As shown in FIGS. 1 and 3, the first roller bearing part 150 is rolled in a first direction (left and right directions or horizontal directions in FIG. 1) between the machining table 110 and the second vibration generating part 140. It may be arranged to. In addition, the first roller bearing unit 150 may receive ultrasonic vibration generated by the second vibration generating unit 140 through the vibration frame unit 160, which will be described later, and apply the ultrasonic vibration to the processing table 110. In this case, the first roller bearing unit 150 may be supported by the vibration frame unit 160. In addition, the first roller bearing 150 may be provided in a pair of left and right as shown in FIG. By such a configuration of the first roller bearing portion 150, the polishing apparatus 100 according to the present invention is the first direction of the machining table 110 by the ultrasonic vibration of the first vibration generating unit 130 (in Figure 1 The second vibration generating portion (2) which causes the reciprocating movement in the second direction (vertical direction or vertical direction in FIG. 1) of the machining table 110 without restricting or limiting the reciprocating movement in the horizontal direction or the horizontal direction ( Ultrasonic vibration of the 140 can be smoothly applied to the machining table (110).

In detail, the first roller bearing unit 150 may include the first roller 155, the first-first plate 151, and the first-second plate 152 as shown in FIGS. 1 and 3. have. The first roller 155 may be disposed between the machining table 110 and the vibration frame unit 160. The first-first plate 151 may have a thin plate structure, and one end may be fixed to the outer circumferential surface of the first roller 155, and the tartan part may be fixed to the lower surface of the machining table 110. The 1-2 plate 152 may have a thin plate structure and may have one end fixed to the outer circumferential surface of the first roller 1550 and the other end fixed to the upper surface of the vibration frame unit 160. Here, the first-first plate 151 and the first-second plate 152 have the machining table 110 in the first direction (left-right direction or horizontal direction in FIG. 1) by the first vibration generating unit 130. As it vibrates, it is wound around the first roller 155 and released. Meanwhile, in the accompanying drawings, both ends of the first-first plate 151 and the first-second plate 152 are welded to the outer circumferential surface of the first roller 155, the machining table 110, or the vibration frame part 160. Although shown to be fixed to, the present invention is not limited thereto.

The first roller bearing part 150 having such a configuration can be manufactured with a simple structure and low cost, but also has a first direction (left and right direction in FIG. 1) of the machining table 110 due to the ultrasonic vibration of the first vibration generating part 130. Alternatively, the reciprocating movement in the horizontal direction) can be stably and smoothly guided within a predetermined section. In particular, the elastic restoring force generated as the first-first plate 151 and the first-second plate 152 are wound around the first roller 155 and then unwinded may cause the processing table 110 to have a first vibration generating unit. 130 may help to reciprocate in the first direction in quick response to the ultrasonic vibrations. In this case, the first-first and the first-second plates 151 and 152 may be formed in any one of the pair of first roller bearing parts 150 (for example, the first roller bearing part 150 disposed at the left side in FIG. 1). When wound on the first roller 155, the first one and the first one of the pair of left and right first roller bearings 150 (eg, the first roller bearings 150 disposed on the right side in FIG. 1) may be formed. It is preferable that the 1-2 plates 151 and 152 are configured to be unrolled from the first roller 155, that is, the 1-1 and 1-2 plates 151 and 152 have a pair of left and right as shown in FIG. It is preferable that the first roller bearing part 150 is disposed in a symmetrical structure.

As shown in FIG. 1, the vibrating frame part 160 is coupled to one end (the upper part in FIG. 1) of the lower part of the second vibration generating part 140 and generated by the second vibration generating part 140. The vibration may be driven in the second direction (up or down direction or vertical direction in FIG. 1). That is, the vibration frame unit 160 may be configured to interlock with the ultrasonic vibration of the second vibration generator 140. In addition, as illustrated in FIG. 1, the vibrating frame part 160 may support the first roller bearing part 150. Accordingly, the ultrasonic vibration generated by the second vibration generating unit 140 may be transmitted to the first roller bearing unit 150 via the vibration frame unit 160.

The fixed frame unit 170 may be disposed adjacent to the vibration frame unit 160 outside the vibration frame unit 160 as shown in FIG. 1. The fixed frame unit 170 may form a lower structure of the polishing apparatus 100 as a whole, and may provide a space where the position thereof is fixed during the polishing process and the second vibration generating unit 140 is installed.

As shown in FIG. 1, the second roller bearing unit 180 may be provided to roll in a second direction (up or down direction or vertical direction in FIG. 1) between the vibration frame unit 160 and the fixed frame unit 170. have. At this time, the second roller bearing unit 180 may be provided in a pair of left and right as shown in FIG. Due to the configuration of the second roller bearing part 150, the polishing apparatus 100 according to the present invention is the vibration of the frame frame 160 or the processing table 110 by the ultrasonic vibration of the second vibration generating unit 140. The reciprocating movement in the second direction can be made stable and smoothly within a predetermined section.

In detail, the second roller bearing unit 180 may include a second roller 185, a 2-1 plate 181, and a 2-2 plate 182 as shown in FIG. 1. The first roller 185 may be disposed between the vibration frame unit 160 and the fixed frame unit 170. The second-1 plate 181 may have a thin plate structure, and one end may be fixed to the outer circumferential surface of the second roller 185, and the tartan part may be fixed to the outer surface of the vibration frame part 160. The second-2 plate 182 may have a thin plate structure, and one end may be fixed to the outer circumferential surface of the second roller 185, and the other end may be fixed to the inner surface of the fixing frame unit 170. Here, in the 2-1 plate 181 and the 2-2 plate 182, the vibration frame unit 160 is the second direction (vertical direction or vertical direction in Figure 1) by the second vibration generating unit 140 As it vibrates, it is wound around the second roller 185 and released. Meanwhile, both ends of the second-first plate 181 and the second-second plate 182 are welded, as shown in FIG. 1, to the second roller 185, the vibration frame unit 160, or the fixed frame unit ( 170). The operation of the second roller bearing unit 180 having such a configuration and the effects thereof are different from those of the first roller bearing unit 150 described above in terms of directionality and the like, and most of the same is substantially the same. 1 The description regarding the roller bearing part 150 shall apply mutatis mutandis.

As described above, the polishing apparatus 100 using the ultrasonic vibration according to the present invention has a first direction and a first direction on the machining table 110 reciprocating in the first direction by the vibration to which the processing object W is seated and applied. In applying the ultrasonic vibration in the crossing second direction, by applying the first roller bearing portion 150 provided to roll in the first direction, the reciprocating movement of the machining table 110 in the first direction is limited or hindered. Without effectively applying ultrasonic vibration to the machining table 110 in the second direction, it is possible to ultimately improve the quality and productivity of the polishing process, such as reducing the polishing resistance and minimizing thermal deformation during processing.

In addition, the polishing apparatus 100 using the ultrasonic vibration according to the present invention is not the ultrasonic vibration of one direction on the machining table 110 on which the processing object W is seated, but two directions that intersect each other (first direction and second). Direction by applying ultrasonic vibration, it is possible to further improve the effect obtained by applying ultrasonic vibration in polishing, that is, the quality and productivity of polishing.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the invention. Accordingly, such modifications or variations are intended to fall within the scope of the appended claims.

100: Polishing apparatus
110: machining table
120:
121: abrasive
130: first vibration generating unit
135: first power generator
140: second vibration generating unit
145: second power generator
150: first roller bearing
151: 1-1 plate
152: 1-2 plate
155: first roller
160: vibrating frame portion
170: fixed frame portion
180: second roller bearing portion
181: 2-1 plate
182: 2-2 plate
190: controller

Claims (11)

A processing table for supporting a processing object;
A polishing unit provided with an abrasive in contact with the object to be processed;
A first vibration generating unit generating vibration applied to the working table in a first direction;
A second vibration generator for generating vibrations applied to the processing table in a second direction crossing the first direction; And
And a first roller bearing part provided to roll in the first direction between the working table and the second vibration generating part and receiving the vibration of the second vibration generating part and applying the vibration to the working table. Polishing apparatus using ultrasonic vibration.
The method of claim 1,
The abrasive material,
Polishing apparatus using ultrasonic vibration, characterized in that provided to rotate with respect to the object to be processed.
The method of claim 1,
At least one of the first vibration generating unit and the second vibration generating unit,
Polishing apparatus using ultrasonic vibration, characterized in that it comprises a magnetostrictive transducer using a magnetostrictive element for generating ultrasonic vibration.
The method of claim 3,
The magnetostrictive element,
Terfenol-D (Terfenol-D), characterized in that the polishing apparatus using ultrasonic vibration.
The method of claim 1,
The polishing apparatus,
And a vibration frame part coupled to the second vibration generating part and supporting the first roller bearing part.
The method of claim 5,
The first roller bearing portion,
A first roller disposed between the working table and the vibration frame portion;
A first-first plate whose one end is fixed to the outer circumferential surface of the first roller and the tartan part is fixed to the processing table; And
And a 1-2 plate having one end fixed to an outer circumferential surface of the first roller and the other end fixed to the vibration frame part.
The method according to claim 6,
The first-first plate and the first-second plate,
Polishing apparatus using ultrasonic vibration, characterized in that the processing table is wound around the first roller as the vibration in the first direction and released.
The method of claim 7, wherein
The first roller bearing portion is provided in pairs,
When the 1-2 and 1-2 plates are wound around the first roller in any one of the pair of first roller bearings, the first roller in the other one of the pair of first roller bearings Polishing apparatus using ultrasonic vibration, characterized in that 1-1 and 1-2 plate are unwound around the first roller.
The method of claim 5,
The polishing apparatus,
A fixed frame portion disposed adjacent to the vibration frame portion; And
And a second roller bearing part provided to roll in the second direction between the vibrating frame part and the fixed frame part.
10. The method of claim 9,
The second roller bearing part,
A second roller disposed between the vibration frame portion and the fixed frame portion;
A 2-1 plate having one end fixed to an outer circumferential surface of the second roller and a tartan part fixed to the vibration frame part; And
And a second-2 plate having one end fixed to an outer circumferential surface of the second roller and the other end fixed to the fixed frame part.
The method of claim 10,
The 2-1 plate and the 2-2 plate,
Polishing apparatus using ultrasonic vibration, characterized in that the vibration frame portion is wound and released around the second roller as the vibration in the second direction.
KR1020120059749A 2012-06-04 2012-06-04 Polishing apparatus using ultrasonic vibrations KR20130136147A (en)

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Application Number Priority Date Filing Date Title
KR1020120059749A KR20130136147A (en) 2012-06-04 2012-06-04 Polishing apparatus using ultrasonic vibrations

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Application Number Priority Date Filing Date Title
KR1020120059749A KR20130136147A (en) 2012-06-04 2012-06-04 Polishing apparatus using ultrasonic vibrations

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101583523B1 (en) * 2015-03-31 2016-01-11 (주)포톤 Substrate polishing apparatus
CN108499988A (en) * 2018-05-09 2018-09-07 东莞理工学院 A kind of ultrasonic vibration rolling-type removal painting equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101583523B1 (en) * 2015-03-31 2016-01-11 (주)포톤 Substrate polishing apparatus
CN108499988A (en) * 2018-05-09 2018-09-07 东莞理工学院 A kind of ultrasonic vibration rolling-type removal painting equipment

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