≪ First Embodiment >
<Wheel Tip and Surrounding Configuration>
First, the holder joint which is the installation place of the wheel tip (it is also called a tip), the tip holder which is its holder, and the tip holder in a scribe device used for a scribing apparatus in 1st Embodiment of this invention is demonstrated. FIG. 1: is a perspective view of the tip holder 10 in the state which hold | maintained the wheel tip 1, and FIG. 2 is a side view of the tip holder 10 which shows the mode in which the wheel tip 1 is installed. 3 is a side cross-sectional view of the holder joint 20 in a state where the tip holder 10 is installed.
The wheel tip 1 is a disk-shaped tool in which the outer peripheral end part becomes the V-shaped blade part 2, and has the through-hole 3 in the center. The wheel tip 1 is made of hard material such as diamond at least part of the blade portion 2. The wheel tip 1 is installed in a scribing apparatus described later in the state held in the tip holder 10 and used for scribing. As the wheel tip 1, one having an outer diameter (wheel diameter) of about 1.0 mm to 6.0 mm and a thickness of about 0.4 mm to 1.1 mm is usually used.
The tip holder 10 is a substantially cylindrical member holding the wheel tip 1. The tip holder 10 has substantially square flat portions 11a and 11b provided at one end in the longitudinal direction in parallel with the longitudinal direction. On the other hand, the other end part of the longitudinal direction becomes the attaching part 16 for attaching the tip holder 10 to a scribe apparatus. In addition, the tip holder 10 is made of magnetic metal at least in the vicinity of the mounting portion 16.
The flat parts 11a and 11b are provided symmetrically with respect to the central axis of the longitudinal direction of the tip holder 10, and the notch part 12 along the center axis is provided between the flat parts 11a and 11b. It is. Further, pin grooves 13 penetrating in the direction perpendicular to the respective surfaces are formed at the lower ends of the flat portions 11a and 11b.
In the tip holder 10, the pin 15 is positioned at the center of the wheel tip 1 and the through holes 3 provided at both sides thereof with the wheel tip 1 positioned at the cutout 12. By inserting into the pin groove 13 of the flat parts 11a and 11b, the wheel tip 1 is rotatably held with the pin 15 as the axis. In addition, in the present embodiment, after the pin 15 is inserted into the pin groove 13 and the wheel tip 1 is held in the tip holder 10, the wheel tip 1 is removed from the tip holder 10. It shall not be removed. For example, the wheel tip 1 used in the scribing device is to be replaced by replacing the tip holder 10 itself. Therefore, in the following description, unless otherwise indicated, the tip holder 10 shall refer to the state in which the wheel tip 1 was installed.
The cord 14 is printed on the flat part 11a (however, not shown in FIG. 3). The cord 14 is provided in the tip holder 10, such as individual identification information such as the type and control number of the wheel tip 1 held by the tip holder 10, and initial correction (offset) information. The text information about the wheel tip 1 made is coded and recorded beforehand. As the code 14, using a QR code (registered trademark) is an example suitable. The format of the basic text information may be appropriately determined, and may be determined, for example, in the following format.
(String indicating format) / (string indicating control number) / (string indicating initial calibration information)
Here, the form is a string form of the size (outer diameter, inner diameter, thickness, blade angle, etc.), material, and the like of the wheel tip 1 according to a specific rule. The management number is a number uniquely assigned to each wheel tip 1. In addition, the initial correction (offset) information is previously described with respect to the individual wheel tips 1 in order to cancel (offset) the shift of the scribe position due to the installation error of the wheel tips 1 with respect to the tip holder 10. The calibration information specified.
The cord 14 is printed by a known laser marking device or the like after the wheel tip 1 is installed in the tip holder 10 and after initial correction (offset) information is specified. In addition, as will be described later, the code 14 is read and restored (decoded) by the code reader 140 (see FIG. 5) prior to scribing.
The mounting portion 16 has a shape in which a part of the cylinder is cut out, and has an inclined portion 16a and a flat portion 16b parallel to the longitudinal direction of the tip holder 10. The flat portion 16b is formed perpendicular to the flat portions 11a and 11b on the side where the wheel tip 1 is held. By inserting the mounting portion 16 having such a shape into the holder joint 20 provided in the scribing apparatus, the state where the wheel tip 1 is installed in the scribing apparatus is realized.
Although illustration is abbreviate | omitted in FIG. 3, the holder joint 20 is a member which forms a part of scribe apparatus mentioned later, and is the installation place of the tip holder 10 in a scribe apparatus. The holder joint 20 has a holding part 22 in which the tip holder 10 is installed and held. In addition, the holder joint 20 is provided with bearings 21a and 21b which enable the holder joint 20 to rotate around the rotation axis AX1 extending in the Z-axis direction.
The holding part 22 is formed with a bottomed cylindrical opening 23, and a magnet 24 is embedded at the innermost end thereof. Moreover, the positioning pin 25 for determining the insertion position of the tip holder 10 is provided in the side surface of the opening 23 perpendicular to the extending direction of the opening 23.
Installation of the tip holder 10 with respect to the holder joint 20 can be performed by inserting the installation part 16 of the tip holder 10 into the opening 23 of the holder joint 20. As shown in FIG. That is, when the mounting portion 16 of the tip holder 10 is inserted into the opening 23, the mounting portion 16 of the tip holder 10 made of magnetic material is attracted by the magnet 24, whereby the tip holder 10 ) Is drawn into the opening 23, and in the process, if one of the inclined portions 16a contacts the positioning pin 25, the mounting portion 16 then axially extends the opening 23. 3, the extending direction of the positioning pin 25 and the inclined portion 16a stop in the state in contact with each other in parallel with each other as shown in FIG. At this time, the tip holder 10 is prohibited from being moved in the rotational direction by the positioning pin 25 and receives suction force from the magnet 24. As a result, the tip holder 10 is fixedly installed in the holder joint 20. It is.
On the other hand, in the state provided in the holder joint 20, since the force acting in the longitudinal direction of the tip holder 10 is only a magnetic force, the removal of the tip holder 10 from the holder joint 20 is performed by the flat parts 11a, This can be done easily by pulling on the side of 11b).
In addition, the opening 23 of the holder joint 20 is a rotating shaft which is a horizontal position of the pin 15 of the wheel tip 1 and the center of rotation of the bearings 21a and 21b with the tip holder 10 installed. It is provided so that the horizontal position of AX1 may shift. This is for generating the so-called caster effect on the wheel tip 1 when executing the scribe operation. The caster effect will be described later.
<Main configuration of scribe processing system>
Next, the structure of the scribe device which comprises the scribe processing system which concerns on this embodiment, and the controller which controls the operation is demonstrated. In addition, the scribing apparatus can take various structural modifications, and is common in that the scribing apparatus includes a holder joint 20 and scribes in a state in which the tip holder 10 is attached to the holder joint 20. Hereinafter, a scribing apparatus 100 having a mechanism for rotating the brittle material substrate, which is a typical configuration example, but having a scribe only on one side of the brittle material substrate, and a scribing apparatus capable of double-sided scribing but without a mechanism for rotating the brittle material substrate ( 200) will be described sequentially. It should be understood that the brittle material substrate can not be rotated and the scribe device which can be scribed only on one side or the scribe device capable of both sides scribing and substrate rotation can also be the subject of the present invention.
(First Configuration)
4 is an external perspective view showing the main mechanical components of the scribe device 100 according to the first configuration. The scribing apparatus 100 schematically moves the scribing head 30 including the moving table 101 and the wheel tip 1 formed by stacking and fixing the brittle material substrate P relatively, whereby the brittle material substrate P is moved. It is a device to scribe. In addition, in FIG. 4, the right-handed coordinate system which makes the moving direction of the movable base 101 the Y-axis direction, makes the moving direction of the scribe head 30 in a horizontal plane the X-axis direction, and makes the vertical direction the Z-axis direction. The XYZ coordinate of was described.
The moving table 101 is held along the pair of guide rails 102a and 102b so as to be movable in the Y-axis direction and is screwed with the ball screw 103. The ball screw 103 is rotated by the drive of the conveying motor 104 to move the movable base 101 along the guide rails 102a and 102b in the Y-axis direction.
Moreover, on the movable base 101, the rotating mechanism 105 and the table 106 are provided. The rotating mechanism 105 includes a motor for rotating the table 106 in the xy plane. On the table 106, two positioning pins 107a and 107b are provided, respectively, for determining the stacking positions of two sides at which the brittle material substrate P is orthogonal. When performing scribing, the brittle material substrate P is mounted on the table 106 in contact with these positioning pins 107a and 107b, and vacuum suction means (not shown) provided inside the table 106. It is fixed to the table by, for example. That is, in the scribe apparatus 100, the table 106 functions as a holding means of the brittle material substrate P. As shown in FIG.
Moreover, two CCD cameras 108 which image the alignment mark for positioning provided in the upper surface (scribing surface) of the brittle material board | substrate P are provided in the upper part of the scribing apparatus 100. As shown in FIG.
Moreover, in the scribe apparatus 100, the bridge 110 is constructed by the support pillar 111a, 111b. The bridge 110 is formed along the X-axis direction in a form spanning the movement path of the movable table 101 extending in the Y-axis direction. In addition, the bridge 110 is provided with a scribe head 30. The scribe head 30 is made to be movable in the X-axis direction by the well-known linear motor 112 provided along the X-axis direction which is the extension direction in the bridge 110. As shown in FIG. In addition, in this embodiment, the moving speed of the scribe head 30 at the time of driving the linear motor 112 is a scribe speed in the scribe of an X-axis direction.
The scribe head 30 is provided with the holder joint 20 mentioned above in the attitude which the opening 23 is perpendicularly downward. In the state where the tip holder 10 is attached to the holder joint 20 of such a posture, the wheel tip 1 is located in the lowest end. In such a state, since the pin 15 is horizontal in the tip holder 10, the wheel tip 1 is rotatable in the horizontal direction in the axis in a posture perpendicular to the horizontal plane.
In addition, by providing the bearings 21a and 21b as described above, the holder joint 20 is made rotatable in the horizontal plane in the scribe device 100. Thereby, when the tip holder 10 is provided in the holder joint 20, the wheel tip 1 is rotatable in the horizontal plane.
The scribe head 30 also has a lifting portion 31 that enables the lifting operation of the holder joint 20. The lifting unit 31 is realized by, for example, a servo motor, a linear motor, an air cylinder using air pressure control, or the like.
In the scribing apparatus 100 which has the above structure, the movement performed by mounting and fixing the brittle material board | substrate P on the table 106 in the state which forms the tip holder 10 in the holder joint 20 as an outline generally. The scribe head 30 is disposed by the linear motor 112 while the base 101 is disposed directly under the bridge 110 and the wheel tip 1 at the lower end of the tip holder 10 is in contact with the brittle material substrate P. It is possible to perform scribe along the X-axis direction with respect to the brittle material substrate P by moving the wheel tip 1 against the brittle material substrate P by moving the wheel tip 1 in the X-axis direction. In such a case, by appropriately changing the arrangement position of the movable table 101, the scribe along the X-axis direction can be performed at the arbitrary position of the Y-axis direction.
Furthermore, the movable table 101 is moved in the Y-axis direction while the wheel tip 1 of the lower end of the tip holder 10 is brought into contact with the brittle material substrate P formed by loading and fixing on the table 106, whereby the wheel tip By moving (1) to the brittle-material board | substrate P relatively relatively, the scribe along the Y-axis direction can also be performed with respect to the brittle-material board | substrate P. FIG. In such a case, by appropriately changing the arrangement position of the scribe head 30 in the bridge 110, the scribe along the Y-axis direction can be performed in arbitrary positions of an X-axis direction.
5 is a block diagram showing the functional configuration of the controller 120 included in the scribe device 100. The controller 120 includes a control unit 121, an image processing unit 122, an input unit 123, a code processing unit 124, a transport mechanism driver 125, a rotation mechanism driver 126, and a scribe head driver. 127, the monitor 128, the recipe data holding part 129, and the usage history holding part 130 are mainly provided. In addition, although the controller 120 is an example suitable to be implemented by the general-purpose personal computer, it may be comprised by being incorporated in the scribe apparatus 100. FIG.
The control unit 121 is composed of a CPU, a ROM, a RAM, and the like, and is a portion that collectively controls the operation of each unit of the scribe device 100.
The image processing unit 122 is a site for processing image signals from the CCD cameras 108a and 108b. For example, an image signal from the CCD cameras 108a and 108b is appropriate in the image processing unit 122, such as position correction (alignment) of the brittle material substrate P to be scribed, and initial correction of the scribe position. After the processing is completed, the process is provided to the correction calculation processing in the control unit 121.
The input unit 123 is an input device such as a touch panel, a keyboard, or a mouse, for example. Operation instructions for the scribe device 100 are given through the input unit 123.
The code processing unit 124 restores (decodes) the text information such as the format and the management number of the wheel tip 1 based on the read result of the code 14 by the code reader 140, and restores the restored contents. It is in charge of the processing given to the control part 121. In the present embodiment, as will be described later, by comparing the restored form or management number with the usage history or the description content of the recipe, it is possible to perform scribing using the wheel tip 1 having the format and management number. Judging.
The conveyance mechanism drive part 125 drives the conveyance motor 104 which is in charge of the conveyance operation | movement of the moving base 101 according to the drive signal from the control part 121. FIG. Moreover, the rotating mechanism drive part 126 drives the rotating mechanism 105 which is responsible for the rotating operation of the movable base 101 according to the drive signal from the control part 121. As shown in FIG.
The scribe head driver 127 is provided in the scribe head 30 and the linear motor 112 that is in charge of the horizontal movement of the scribe head 30 in response to a drive signal from the control unit 121, and the holder joint 20. Drive the lifting unit 31 in charge of the lifting operation.
The monitor 128 is display means for displaying various setting menus and operation menus (recipes) of the scribing apparatus 100, operation states of respective parts, captured images of the CCD cameras 108a and 108b, and the like. In addition, since the monitor 128 itself is a touch panel, the monitor 128 may also function as the input unit 123.
The recipe data holding unit 129 is a portion (memory medium) that holds (remembers) recipe data D1 which describes the operation contents of each unit of the scribe device 100 when scribing. In the scribe device 100, the recipe data D1 corresponding to the contents of the desired scribing process is selected and called from the plurality of recipe data D1 held by the recipe data holding unit 129, and the control unit 121 is called. Assigns an operation instruction to each unit according to the description of the description, the scribing process according to the description of the recipe data D1 is executed.
Each recipe data D1 includes, for example, the type of wheel tip 1 suitable for the contents of the scribe to be executed, the size (plane size and thickness) of the brittle material substrate P to be scribed, or the brittle material. The position (or the position which lowers and raises a scribe head) in the board | substrate P, the fall distance of the scribe head 30 at the time of scribing, a scribe speed, etc. are described.
In addition, in the recipe data D1, the exchange recommendation value V1 is further described. When the scribing recommended value V1 is scribed according to the recipe set based on the recipe data D1, the wheel tip 1 being used (with the tip holder 10) and the other wheel tip 1 are scribed. It is a standard value when it is recommended to replace (with the other tip holder 10). The details of the replacement recommended value V1 will be described later.
The description format of the recipe data D1 is not particularly limited, and may be described in any format that can be processed by the scribe device 100.
In addition, in the scribe device 100, by operating the input unit 123 according to the setting menu displayed on the monitor 128, it is also possible to create new recipe data D1 and hold it in the recipe data holding unit 129. .
The usage history maintaining unit 130 records usage history data D2 obtained by recording respective usage histories for all the wheel tips 1 used in the scribe device 100 (or may be used in the future). It is a site (memory medium) to hold (remember). Specifically, at least one tip parameter, which is a parameter that characterizes the operation form of the wheel tip 1 in the scribe and affects the service life of the wheel tip 1, is preset. The tip parameter is a value that increases each time a corresponding scribe operation is performed, and each time a scribe process is performed, an increment value of each tip parameter in the scribe is obtained, and together with the accumulated value up to that point, the usage history data (D2) is used. ).
6 is a diagram illustrating usage history data D2 in the present embodiment. In FIG. 6, the number of collisions between the wheel tip 1 and the brittle material substrate P, the number of cutouts, and the number of twists occurring in the wheel tip 1 from the start of the scribing to the end of the scribe. And the travel distance (unit: m) in the X-axis direction of the wheel tip 1, the travel distance (unit: m) in the Y-axis direction, and the total travel distance (unit: m) are set as the tip parameters, , The increment value of each tip parameter (a 1 to a n , b 1 to b n , c 1 to c n , d 1 to d n , e 1 to e n , d on the day the wheel tip 1 is used) 1 + e 1 to d n + e n and the integrated values (a, b, c, d, e, d + e) of each tip parameter are illustrated. In addition, the detail about each tip parameter is mentioned later.
In addition, as shown in Fig. 6, the usage limit values A, B, C, D, E, and F for each tip parameter are described in the usage history data D2. For this purpose, a limit flag indicating whether or not the latest integrated value has reached the usage limit value is described. The use limit value is a value that almost certainly causes a product defect (scribing defect) when the wheel tip 1 is used in a state where the latest integrated value of the tip parameter exceeds that value. The use limit value is a value unique to the individual wheel tips 1.
In the present embodiment, the limit flag is "1" for the tip parameter whose latest integrated value exceeds the usage limit value, and the limit flag is "1" for the tip parameter whose latest integrated value does not exceed the usage limit value. 0 ". In FIG. 6, the case where the tip parameter which is "the X-axis traveling distance" exceeded the use limit value (it is d> D). As described later, in the present embodiment, the use of the wheel tip 1 in which even one tip parameter having the limit flag of "1" exists is prohibited, and the scribe operation cannot be performed unless the replacement is performed. That is, by checking the value of the limit flag, it is possible to specify whether or not the wheel tip 1 is unavailable.
Alternatively, the disabled tip data obtained by extracting only the object identification information of the wheel tip 1 in which the tip parameter having the limit flag of "1" exists in the corresponding usage history data D2 is generated, and the use of the wheel tip 1 is performed. The determination may be made based on whether or not the object identification information is described in the unavailable tip data.
In addition, the tip parameter shown in FIG. 6 is an illustration to the last, The kind of tip parameter to set, and the description format of the usage history data D2 are not limited to what is shown in FIG. In addition, what is necessary is just to determine an appropriate value empirically or experimentally as a use limit value.
In addition, in this embodiment, it is not essential that the scribing apparatus 100 itself includes the code reader 140 and also the code processing part 124. For example, if the scribe processing system is configured by connecting a plurality of scribe devices 100 and a common management server that manages them collectively through a communication network such as a LAN (not shown), a code reader ( 140 or the code processing unit 124 may be provided only in the management server, and the restored contents may be given to each scribe device 100 from the management server via the network. Alternatively, the operator of the scribing processing system (hereinafter, simply referred to as an operator) may input the restored contents via the input unit 123 in principle.
In addition, when the scribing processing system has the above-described network configuration, it is preferable that the management server also includes the recipe data holding unit 129 and the usage history holding unit 130. In such a case, the recipe data D1, the usage history data D2, and further, the unavailable tip data are shared among the plurality of scribe devices 100 so that they can be referenced or updated from any scribe device 100. Done.
(Second configuration)
FIG. 7: is an external perspective view which shows the main mechanical component of the scribe apparatus 200 which concerns on a 2nd structure. The scribing apparatus 200 is generally a brittle material substrate P between a pair of upper and lower scribe heads 30 (upper scribe head 30A and lower scribe head 30B) each having a wheel tip 1. ) Is a device that simultaneously scribes the brittle material substrate P in two directions. In addition, in FIG. 7, the right-handed coordinate system makes the movement direction of a brittle material substrate into a Y-axis direction, makes the movement direction of scribe head 30A, 30B in a horizontal plane the X-axis direction, and makes a perpendicular direction the Z-axis direction. The XYZ coordinate of was described. In addition, in FIG. 7, in order to simplify illustration, the holder joint 20 provided in the scribe head 30A, 30B, the tip holder 10 provided in the said holder joint 20, and the said tip holder The wheel tip 1 held by 10 is omitted.
Such a scribe apparatus 200 mainly includes the substrate support mechanism 210, the clamp mechanism 220, and the scribe mechanism 230 as its mechanical components. In addition, although illustration is abbreviate | omitted in FIG. 7, the two CCD cameras 240a which image the alignment mark for positioning formed in the upper surface (scribing surface) of the brittle material board | substrate P on the scribe apparatus 200, 240b) is installed (see FIG. 8).
The substrate support mechanism 210 consists of 210A of 1st board | substrate support parts, and the 2nd board | substrate support part 210B. The first substrate support part 210A and the second substrate support part 210B are disposed to face each other with the scribe mechanism 230 interposed therebetween. 210 A of 1st board | substrate support parts are in charge of conveyance of the brittle material board | substrate P before being scribed, and the 2nd board | substrate support part 210B is in charge of conveyance of the brittle material board | substrate P after being scribed.
The 1st board | substrate support part 210A and the 2nd board | substrate support part 210B are each comprised from the some (five in FIG. 7) support unit 211 arrange | positioned apart in the X-axis direction. Each support unit 211 has a longitudinal direction in the Y-axis direction, and a timing belt 212 is provided along the Y-axis direction. The timing belt 212 is driven by the movement of the brittle material substrate P when a force in the Y-axis direction is applied to the brittle material substrate P while the brittle material substrate P is supported on the upper surface thereof. It rotates and can assist the movement of the brittle material board | substrate P to the Y-axis direction.
The clamp mechanism 220 clamps (holds) the rear end of the brittle material substrate P stacked on the timing belt 212 with a pair of clamp members 221L and 221R spaced apart in the X-axis direction. It is a mechanism for moving the clamp members 221L and 221R in the Y-axis direction while maintaining such a clamp state. The movement operation of the clamp mechanism 220 is realized by the linear motor. The clamp members 221L and 221R are provided so as not to interfere with the support unit 211 when moving in the Y-axis direction.
The scribe mechanism 230 is a site | part which scribes simultaneously and simultaneously with respect to the upper and lower surfaces of the brittle material board | substrate P. FIG. The scribe mechanism 30 is equipped with the upper scribe head 30A and the lower scribe head 30B in the position between 210 A of 1st board | substrate support parts, and 2nd board | substrate support part 210B in a Y-axis direction. The upper scribe head 30A is provided in the upper scribe mechanism 231, and the lower scribe head 30B is provided in the lower scribe mechanism 232, and each is a linear motor (not shown). It is made to be movable in the X-axis direction. In addition, in this embodiment, the moving speed of the upper scribe head 30A and the lower scribe head 30B at the time of driving such a linear motor is the X-axis direction with respect to the upper surface and lower surface of the brittle material board | substrate P. In addition, in FIG. This is the scribing speed when scribing.
More specifically, the upper scribe head 30A includes a holder joint 20 so that the wheel tip 1 is located at the lowest end in the state where the tip holder 10 is installed. On the other hand, the lower scribe head 30B is provided with the holder joint 20 so that the wheel tip 1 may be located in the uppermost end in the state in which the tip holder 10 was installed. In addition, the upper scribe head 30A and the lower scribe head 30B are each provided with lifting portions 31A and 31B to enable the lifting operation of the holder joint 20. Such lifting portions 31A and 31B are realized by, for example, a servo motor, a linear motor, or an air cylinder using air pressure control.
In the scribing apparatus 200 having the above configuration, the clamp mechanism 220 in a state where the rear end side of the brittle material substrate P loaded on the first substrate support portion 210A is clamped by the clamp mechanism 220. ) Is moved in the Y-axis direction, while the brittle material substrate P formed by the support unit 211 of the first substrate support portion 210A is supported by the support unit 211, and thus the timing belt 212. It is conveyed in the Y-axis direction by the driven rotation of the and the movement of the clamp mechanism 220. On the way, after the brittle material substrate P is scribed by passing between the upper scribe mechanism 231 and the lower scribe mechanism 232, the brittle material substrate P gradually becomes the second substrate support portion 210B at the tip end side. Is supported by the support unit 211. In the second substrate support portion 210B, similarly to the first substrate support portion 210A, the brittle material substrate P is driven by the movement of the clamp mechanism 220 and driven by the timing belt 212 provided in the support unit 211. Conveyed by rotation. Therefore, in the scribe apparatus 200, the board | substrate support mechanism 210 and the clamp mechanism 220 function as a holding means of the brittle material board | substrate P. As shown in FIG.
In such a case, the wheel tip 1 at the tip of the tip holder 10 formed in each of the upper scribe head 30A and the lower scribe head 30B is adjusted in advance, and the upper scribe mechanism When it is made to contact the brittle material board | substrate P which passes between 231 and the lower scribe mechanism 232, the wheel tip 1 will press-cloudly move to the upper and lower surfaces of the brittle material board | substrate P during conveyance, respectively. . Thereby, scribe along the Y-axis direction can be performed with respect to the upper and lower surfaces of the brittle material board | substrate P. FIG. In such a case, scribing along the Y-axis direction can be performed at arbitrary positions in the X-axis direction by appropriately different arrangement positions in the X-axis direction of the upper scribe head 30A and the lower scribe head 30B.
Further, the tip holder is provided in each of the upper scribe head 30A and the lower scribe head 30B while the brittle material substrate P is positioned between the upper scribe mechanism 231 and the lower scribe mechanism 232. (10) The wheel tip 1 is moved to the brittle material substrate by moving the upper scribe head 30A and the lower scribe head 30B in the X-axis direction while making the tip of the tip tip contact the brittle material substrate P. When the pressure welding rolling movement with respect to P) is performed, the scribe along the X-axis direction can be performed with respect to the brittle material board | substrate P. FIG.
In addition, about the installation form of the tip holder 10 with respect to the holder joint 20, since the scribe apparatus 200 is also the same as the scribe apparatus 100, even when scribing in the scribe apparatus 200, the caster effect is the same. Works.
8 is a block diagram showing the functional configuration of the controller 250 included in the scribe device 200. The controller 250 includes a control unit 251, an image processing unit 252, an input unit 253, a code processing unit 254, a clamp mechanism driver 255, a first scribe head driver 256, The second scribe head drive unit 257, the monitor 258, the recipe data holding unit 259, and the usage history holding unit 260 are mainly provided. In addition, the controller 250 is an example suitable for being realized by a general-purpose personal computer similarly to the controller 120, but may be configured by being incorporated in the scribe device 200.
Among these, the control unit 251, the image processing unit 252, the input unit 253, the code processing unit 254, the monitor 258, the recipe data holding unit 259 and the usage history holding unit 260 are each a scribe device. The control unit 121, the image processing unit 122, the input unit 123, the code processing unit 124, the monitor 128, the recipe data holding unit 129, and the usage history maintaining unit 130 included in the 100 are provided. Since the components have the same function, detailed description thereof will be omitted.
The clamp mechanism driving unit 255 operates the clamp members 221L and 221R of the clamp mechanism 220 and moves the clamp mechanism 220 in the Y axis direction in response to a drive signal from the control unit 251. .
The first scribe head drive unit 256 and the second scribe head drive unit 257 respectively move the upper scribe head 30A and the lower scribe head 30B in the X-axis direction in response to a drive signal from the control unit 251. At the same time, the elevating portions 31A and 31B in charge of the elevating operation of the holder joint 20 are driven in the upper scribe head 30A and the lower scribe head 30B, respectively.
In the scribe device 200, like the scribe device 100, the recipe data D1 matching the contents of the desired scribe process is selected from the plurality of recipe data D1 held in the recipe data holding unit 259. When the control unit 251 gives an operation instruction to each unit according to the description, the scribing process according to the description of the recipe data D1 is executed.
<Details of Tip Parameter>
Next, the detail of the tip parameter which shows the use condition of the wheel tip 1 illustrated in FIG. 6 is demonstrated.
(Collisions)
With the number of collisions between the wheel tip 1 and the brittle material substrate P, in this embodiment, the blade of the wheel tip 1 is lowered by lowering the scribe head 30 provided with the wheel tip 1 in order to scribe. The frequency | count of contacting the part 2 and the brittle material board | substrate P is said. Since the blade portion 2 is impacted every time such a contact occurs, the blade portion 2 wears as the contact is repeated. Use of the worn blade portion 2 is a factor that degrades the scribe quality. Therefore, in the present embodiment, the number of collisions between the wheel tip 1 and the brittle material substrate P is set as a tip parameter, and it is determined whether the wheel tip 1 has reached the usage limit based on the integrated value. I shall do it.
(External cutting)
The outer cut is, roughly speaking, in the case where the upper surface of the brittle material substrate P is a pscribed surface, the wheel tip 1 is formed at a position outside the edge portion of the brittle material substrate P. It is a method of lowering to the scribe height slightly below the height position of the scribe surface of P), and scribing from one end part to the other end part of the brittle material board | substrate P. FIG. 9 is a schematic diagram showing a state of external cutting. In the case shown in FIG. 9, the wheel tip 1 is lowered from the brittle material substrate P to the scribe height below the scribe surface of the brittle material substrate P at the position ahead of the distance OH1 with respect to the X-axis direction, The case where external cutting is performed from the brittle material substrate P to the position of the end side by distance OH2 similarly to the X-axis direction is illustrated.
In addition, with respect to such external cutting, a method of scribing by lowering the wheel tip 1 at the position where the brittle material substrate P is present is referred to as internal cutting.
Since the scribe line reaches both ends of the substrate, the external cut is easy to break (break) after scribing, and slip of the wheel tip 1 at the scribe start position, which is a problem in the case of internal cut, does not occur. There is an advantage. However, since the wheel tip 1 is easier to be consumed than in the case of internal cutting, the more the number of times of external cutting is, the easier the wheel tip 1 is to reach the limit of use. Therefore, in this embodiment, the number of times of external cutting is set as a tip parameter, and it is determined whether the wheel tip 1 has reached the use limit based on the integrated value.
(Torsion of wheel tip)
Subsequently, in explaining the twisting of the wheel tip 1, first, the caster effect generated at the time of scribing will be described. As described above, the holder joint 20 is rotatable around the rotation axis AX1 and does not include a mechanism for directly adjusting the posture of the wheel tip 1. Therefore, in starting a scribe, the blade part 2 of the wheel tip 1 is not necessarily facing the scribe direction. However, on the other hand, in the state where the tip holder 10 is installed in the holder joint 20, the horizontal position of the pin 15 of the wheel tip 1 and the horizontal position of the rotation axis AX1 which are the rotation centers of the bearings 21a and 21b. Is out of order. Therefore, when the scribe head 30 starts to move relative in any direction in the horizontal plane while the wheel tip 1 is in contact with the brittle material substrate P, torque is immediately applied to the holder joint 20, The wheel tip 1 is pressed against the brittle material substrate P in a state parallel to the relative moving direction of the scribe head 30. This phenomenon is called the caster effect.
However, when such a caster effect occurs, the wheel tip 1 is forcibly changed in its posture in the state where the blade portion 2 is in contact with the brittle material substrate P. In this embodiment, the forced attitude change which arises in the wheel tip 1 with the expression of this caster effect is called "torsion" of the wheel tip 1.
10 is a diagram illustrating twisting of the wheel tip. In FIG. 10, after scribing a plurality of times in the X-axis direction indicated by arrow AR1 with respect to the brittle material substrate P by relatively moving the scribe head 30 in the X-axis direction, the wheel tip 1 is once subjected to the brittle material. After separating from the substrate P and subsequently contacting the wheel tip 1 with the next scribe starting position of the brittle material substrate P, the scribe head 30 is moved relative to the Y-axis direction to indicate the arrow AR2. The case where scribe in the Y-axis direction is performed is shown. In such a case, the wheel tip 1 in the state where the first scribe is finished is provided to the scribe in the next Y-axis direction while maintaining the posture almost in the X-axis direction. Therefore, when the wheel tip 1 is brought into contact with the brittle material substrate P again to start scribing in the Y-axis direction, as shown in the circle of Fig. 10, once in a direction slightly different from the Y-axis, A scribe is made, but soon the torsion occurs in the wheel tip 1 due to the relative movement of the scribe head 30, and the wheel tip 1 takes a posture parallel to the Y-axis direction. As a result, the desired Y A scribe in the axial direction is realized.
Since the twist of the wheel tip 1 is one of the factors that wears the blade portion 2 of the wheel tip 1, if this is repeated, the quality of the scribe by the wheel tip 1 is deteriorated. Therefore, in the present embodiment, the number of times the twist has occurred is set as the tip parameter, and it is determined whether or not the wheel tip 1 has reached the usage limit based on the integrated value.
(distance driven)
The travel distance of the wheel tip 1 means that the wheel tip 1 is relatively moved relative to the brittle material substrate P while the blade portion 2 of the wheel tip 1 is in contact with the brittle material substrate P. FIG. Say the distance. The scribe is realized by moving the blade portion 2 against the brittle material substrate P by rolling, so that when the running distance of the wheel tip 1 becomes long, wear of the blade portion 2 proceeds, and the scribe quality deteriorates. It is clear. Therefore, in this embodiment, the traveling distance of the wheel tip 1 is set as a tip parameter, and it is determined whether the wheel tip 1 has reached the use limit based on the integrated value.
In FIG. 6, the travel distance in the X-axis direction, the travel distance in the Y-axis direction, and the total travel distance that is the sum of these values are treated as separate tip parameters, but this is a recipe set at the time of scribing. In accordance with the description, it is corresponding to the fact that the traveling distance to be noted may be different.
As an example, a case where the first scribe in the X-axis direction is finished, and the second scribe in the Y-axis direction is performed without rotating the brittle material substrate P is considered. In this case, at the time of the second scribe, the wheel tip 1 traverses the scribe line formed by the first scribe preceding it, so that the wheel tip 1 is more susceptible to shock than in the case where there is no such crossing. In such a case, by setting the replacement recommended value V1 for the travel distance in the Y-axis direction shorter than the replacement recommended value V1 for the travel distance in the X-axis direction, the scribe It is possible to more reliably suppress the occurrence of defects.
<Replacement of wheel tip based on replacement recommended value>
As described above, in the present embodiment, the replacement recommendation value V1 is described in the recipe data D1. The replacement recommendation value V1 is, roughly speaking, a value that serves as a reference when recommending replacement of the wheel tip 1 that is set for each tip parameter. In other words, the replacement recommendation value V1 means that if the scribing process based on the recipe is continued without replacing the wheel tip 1, the possibility of scribe failure is increased. It is a good reference value. Therefore, it is usually set such that the wheel tip 1 does not immediately reach the service life even if the wheel tip 1 is continuously used in the state in which the tip parameter exceeds its value. In addition, the replacement recommended value V1 may be determined empirically or experimentally by an appropriate value similarly to the use limit value. In the following, the wheel tip 1 that satisfies the criteria for which replacement is recommended is referred to as being in a replacement recommended state.
In this embodiment, the use history unique to the wheel tip 1 and the recommendation for replacement of the wheel tip 1 when the scribing is performed (replacement necessity) is determined for each recipe and the wheel tip 1 is unique. By judging based on the data D2, generation | occurrence | production of the defect in the scribing process of the brittle material board | substrate P can be prevented reliably, and a yield can be improved.
In short, even the scribing process, the method of using the wheel tip 1 is completely different depending on the contents of the recipe. For example, various scribes can be made by changing recipe settings such as a scribe process for repeating only one scribe in one direction, a scribe process for moving the scribe head 30 only a short time and a short running distance, or a scribe process for repeated twisting. The treatment is carried out, the wear mode of the wheel tip 1 being different according to each scribing treatment. This means that if the recipe setting contents are different, the integration method of each tip parameter leading up to a scribe failure, or the upper limit of the integration value of the tip parameter that can use the wheel tip 1 without generating a scribe failure is different. have. In this embodiment, paying attention to this point, the replacement recommendation value V1 for each tip parameter is set for each recipe data D1, so that the presence or absence of the wheel tip is judged based on the most suitable reference for each recipe. .
For example, in the case of the recipe with many lifting of the scribe head 30, since the abrasion of the blade part 2 by the collision of the wheel tip 1 and the brittle material board | substrate P tends to generate | occur | produce, By setting the replacement recommended value V1 regarding the number of collisions between the wheel tip 1 and the brittle material substrate P low, the occurrence of a scribe failure is reliably prevented.
On the other hand, according to the exchange recommendation value V1 described in any recipe data D1, even if the wheel tip 1 in which the tip parameter is integrated up to the value to which replacement is recommended, the recipe data D1 having different integration values is included. When smaller than the replacement recommendation value V1 described in the above, it can be used for scribing to a recipe based on such recipe data D1. Thereby, the wheel tip 1 can be used effectively within the range which can be used.
In addition, as long as the replacement of the wheel tip 1 based on the replacement recommendation value V1 is made, except that the usage limit value and the replacement recommendation value V1 are set as the same value, the tip parameter reaches the usage limit value. There will be no case. Therefore, at first glance, the setting of the use limit value may seem unnecessary, but in practice, when the wheel tip 1 exceeding the replacement recommendation value V1 is used, or the wheel tip reaching the service life ( Since 1) may be used incorrectly, the use limit setting is effective in preventing scribing failure in such a case.
<Scribe processing>
Next, the flow of processing in the case of scribing in a scribing processing system having the above-described configuration will be described. In addition, in the following description, the scribing apparatus 100 and 200 which are the mechanical components which are responsible for an actual scribing operation are also called "the apparatus main body." In addition, the following description is made on the assumption of scribing by the scribing apparatus 100 and 200 for convenience, but the said description is applicable also to the other scribing apparatus which has the same structure.
11 and 12 are diagrams showing the flow of processing from the scribe device 100 or 200 to the tip holder 10 until the scribing process is completed.
First, the tip holder 10 which holds the wheel tip 1 is prepared (step S1). In addition, since the recipe used for scribing is selected and set in advance (step S0), when the contents of the scribe to be performed from now on are known, the tip holder provided with the wheel tip 1 of the type suitable for the scribe It is preferable to prepare (10). In the case of the scribe device 200, two tip holders 10 are prepared for both the upper scribe head 30A and the lower scribe head 30B. In addition, unless otherwise mentioned, in the case of the scribe apparatus 200, when the wheel tip 1 which is hold | maintained by the at least one tip holder 10 is unusable or it becomes object of replacement recommendation, It is assumed that processing is performed accordingly.
Next, the code 14 printed on the prepared flat portion 11a of the tip holder 10 is read by the code reader 140 or 270 (step S2). The read code 14 is immediately restored to text information by the code processing unit 124 or 254 (step S3). Text information such as a format, management number, and initial correction information restored from the code 14 is provided to the control unit 121 or 251.
Subsequently, the controller 121 or 251 uses the usage history data D2 for the wheel tip 1 with the management number, based on the management number restored from the code 14, to the usage history maintaining unit 130 or 260. (Step S4), and according to the description, it is determined whether or not the wheel tip 1 can be used without reaching the usage limit (step S5). Specifically, when there is no tip parameter in which the limit flag is described as "1" in the usage history data D2, it is determined that it can be used (YES in step S5). On the other hand, when there is even one tip parameter in which the limit flag is " 1 " in the usage history data D2, it is determined that it is not available (NO in step S5). In addition, when the unusable tip data is generated, this may be referred to to determine whether or not the wheel tip 1 can be used without reaching the usage limit.
If it is determined that the wheel tip 1 is not available (“No” in step S5), the control unit 121 or 251 cannot use the wheel tip 1 that reads the code 14 to be used from now on. Is displayed on the monitor 128 or 258, and a signal forbidding the execution of the scribe using the wheel tip 1 (locking the scribe operation) is issued (step S6). Thereby, in the scribe device 100 or 200, it is notified that such a wheel tip 1 is unusable, and since scribe using such a wheel tip 1 cannot be performed, for example, a service life is used, for example. The occurrence of scribing defects or the like caused by the incorrect use of the wheel tip 1 that has arrived can be reliably prevented.
When the warning indication of the unusability is given, the operator removes the tip holder 10 formed by holding the wheel tip 1 when the holder joint 20 is installed. After checking the state (step S7), another tip holder 10 is prepared (step S8). Then, the code 14 is read again to the newly prepared tip holder 10 (step S2). Further, by rereading the code 14, the prohibition state of the scribe operation in the scribe device 100 or 200 is released.
When it is determined that the prepared wheel tip 1 is usable (YES in step S5), one recipe data to be applied to the scribe is subsequently operated by the operator according to the menu displayed on the monitor 128 or 258. (D1) is selected from the recipe data holding unit 129 or 259, and necessary information such as the number of the brittle material substrates P to be processed is input. Thereby, the recipe required for scribing is set (step S9). As described above, the recipe may be selected and set in advance prior to the preparation of the tip holder 10.
When the recipe is set, the control unit 121 or 251 returns the format restored from the code 14 and the format of the wheel tip 1 usable in the scribe by the execution of the recipe, which is described in the recipe data D1. In contrast, it is determined whether the prepared wheel tip 1 is suitable for the execution of the recipe (step S10).
If it is determined that the wheel tip 1 is not suitable for the execution of the set recipe (NO in step S10), similarly to the case described above, a warning indication that the wheel tip 1 is not available is monitored 128 or 258. ) And a signal for inhibiting the execution operation of the scribe using the wheel tip 1 (locking the scribe operation) is issued (step S6). Thereby, in the scribe device 100 or 200, it is notified that such wheel tip 1 is not available, and since the scribe using the said wheel tip 1 cannot be performed, for example, to the set recipe, The occurrence of scribing defects due to the erroneous use of the wheel tip 1 which is inappropriate for scribing by the scribe can be reliably prevented. In addition, in this case, the wheel tip 1 judged to be unusable cannot be used for scribing based on the recipe which is set to the last, and it is not that it is not the unusable article which the service life reached. Therefore, it may be available when another recipe is set.
In this way, when it is determined that the wheel tip 1 is not suitable for the execution of the set recipe, it is also necessary to prepare another tip holder and read the code again (steps S7, S8, S2).
On the other hand, when it is determined that the wheel tip 1 is suitable for the execution of the set recipe (YES in step S10), the control unit 121 or 251 performs the scribing by the recipe until the end based on the setting contents of the recipe. When it is performed, an increment value of each tip parameter is calculated, and an arithmetic processing is performed to add the increment value to the integrated value of each tip parameter described in the use history data D2 (step S11). The value obtained thereby becomes an integrated value (called an expected arrival value) of the tip parameter which will be reached after the end of the scribing.
Then, the control unit 121 or 251 compares the expected arrival value with the replacement recommendation value V1 described in the recipe data D1, and replaces the wheel tip 1, which is to be used, during the scribing process. It is determined whether or not the recommended state is reached (step S12).
More specifically, performing scribing according to the recipe means, in other words, the specific operation content of the scribe, and ultimately, lowering the scribe head 30 so that the wheel tip 1 is brought into contact with the brittle material substrate P. The number of times, the traveling distance of the wheel tip 1, and the like can be specified from the recipe setting contents. In other words, by analyzing the description of the recipe, the increment value of each tip parameter can be calculated when scribing is performed according to the recipe even if the scribing is not actually performed. If such an increment value is obtained, as described above, the expected arrival value of each tip parameter after the scribing process can be obtained before actually scribing.
It is a figure for demonstrating the calculation of the increment value of the tip parameter based on a recipe. For example, as shown in Fig. 13, after scribing six locations (traveling distance L1) of X1 to X6 with respect to the X-axis direction by internal cutting, six locations of Y1 to Y6 (traveling distance also in the Y-axis direction are shown. The case where the recipe which performs the process which scribes L2) by internal cutting with respect to 100 sheets of brittle material board | substrate P is set is considered.
In such a case, the number of collisions between the wheel tip 1 and the brittle material substrate P is 1200 times because there are 12 collisions with 100 pieces of the brittle material substrate P, and the number of external cuts is all internally cut. Therefore, the number of times of twisting is only 200 when twisting occurs when scribing Y1 after scribing X6 and when scribing X1 to the next brittle material substrate P after scribing Y6. The X-axis travel distance is 600L1 (m), the Y-axis travel distance is 600L2 (m), and the total travel distance is 600 (L1 + L2) (m).
In such a case, if, for example, the integrated value described in the usage history data D2 shown in Fig. 6 is applied to the calculation of the expected arrival value, it is determined whether the wheel tip 1 reaches the replacement recommended state. In the judgment, the following two values are compared for each tip parameter.
Number of collisions between the wheel tip 1 and the brittle material substrate P:
Expected arrival value = a 1 +. + a n +1200, exchange recommended value (V1) = V1a;
Number of cuts:
Expected arrival value = b 1 +... + b n , recommended exchange value V1 = V1b;
Number of twists:
Expected arrival value = c 1 +... + c n +200, exchange recommended value (V1) = V1c;
X-axis travel:
Expected arrival value = d 1 +... + d n + 600L1, replacement recommended value V1 = V1d;
Y-axis travel:
Expected arrival value = e 1 +. + e n + 600L2, replacement recommended value V1 = V1e;
Overall mileage:
Expected arrival value = (d 1 + e 1 ). + (d n + e n ) +600 (L1 + L2), exchange recommended value (V1) = V1f.
As a result of the comparison, when there is even one tip parameter whose estimated arrival value exceeds the recommended replacement value V1, the control unit 121 or 251 recommends that the wheel tip 1, which is the target of use, be replaced during the scribing process. It is judged that the state is reached (YES in step S12), and the monitor 128 or 258 displays an indication (recommended replacement indication) recommending replacement of the wheel tip 1 having read the code 14 ( Step S13). Thereby, the wheel tip 1 is notified that the replacement is in a recommended state.
When the replacement recommendation indication is made, the operator usually determines that the wheel tip 1 needs to be replaced (YES in step S14), and prepares another tip holder to read the code again (steps S7, S8, S2). ). Thereby, the occurrence of scribe failure is surely prevented.
On the other hand, when it is determined that the wheel tip 1, which is to be used, does not reach the recommended replacement state during the scribing process (NO in step S12), the tip holder 10 holding the wheel tip 1 is removed. It installs in the holder joint 20 (step S15). In addition, when the said tip holder 10 is already installed in the holder joint 20, it is confirmed.
In addition, although the replacement recommendation indication has been made, there is a case in which the replacement is not performed at the operator's discretion (No in step S14). Also in this case, the tip holder 10 is provided in the holder joint. For example, this is the case where the integrated value calculated as described above only slightly exceeds the replacement recommended value V1 and it is determined that the possibility of a scribe failure is low.
When the tip holder 10 is installed in the holder joint 20, after a known alignment process or initial process, which is omitted in detail, is performed, the control unit 121 or 251 instructs the execution of the scribe process according to the set recipe. (Step S16). In response to the execution instruction signal, the scribe device 100 or 200 starts scribing according to the recipe (step S17).
Specifically, in the case of the scribing apparatus 100, the conveyance mechanism drive part 125, the rotation mechanism drive part 126, and the scribe head drive part 127 are the conveying motors 104 of the movable base 101, respectively. By operating the rotary mechanism 105, the linear motor 112, and the lift unit 31 in accordance with the description of the recipe, a series of scribe operations according to the recipe are realized. In the case of the scribe device 200, the clamp mechanism driver 255, the first scribe head driver 256, and the second scribe head driver 257 respectively correspond to the clamp mechanism 220 and the upper scribe mechanism 231. And by operating the lower scribe mechanism 232 in accordance with the description of the recipe, a series of scribe operations in accordance with the recipe are realized.
In addition, in the scribe device 200, in order to contact the wheel tip 1 with the brittle material substrate P in the lower scribe mechanism 232, the lower scribe head 30B is raised, but the brittle material substrate ( Since the relative positional relationship between P) and the wheel tip 1 is the same as the case of the upper scribe head 30A with which the scribe head 30 of the scribe apparatus 100 and the upper scribe mechanism 231 are equipped, this embodiment For convenience, the contact form between the brittle material substrate P and the wheel tip 1 in the lower scribe head 30B is also referred to as "lower the scribe head 30".
When the scribing process is completed by completing all the scribing operations set in the recipe (step S18), the usage history is updated assuming the contents of such scribing process (step S19). More specifically, the increment value of each tip parameter resulting from performing the scribing process, calculated before the scribing operation on the usage history data D2, is added together with the date of scribing, and the accumulated value described up to that time. It is rewritten with the expected arrival value obtained in the above calculation.
When the usage history is updated, the control unit 121 or 251 causes the monitor 128 or 258 to display a menu for inputting the execution of scribing by other recipes (step S20). If execution of scribing to another recipe is selected (YES in step S20), the flow returns to step S5, after which the same processing as described above is repeated. If it is selected not to execute scribing to another recipe (NO in step S20), the series of processing ends.
As described above, in the scribing processing system according to the present embodiment, prior to scribing, the code number printed on the tip holder is read by a code reader, and the management number and format of the wheel tip held by the tip holder. Restore and compare the restored management number and usage history. As a result of such a check, when the wheel tip of the control number has already been recorded as an unusable wheel tip that has already reached the usage limit, the scribe device displays an indication to prohibit the use of the wheel tip, and the other tip. The operation is prohibited until the holder is ready. Thereby, generation | occurrence | production of the scribe defect by using the wheel tip which has already reached the usage limit can be prevented.
Also, the restored format is compared with the format described in the recipe data that defines the contents of the scribe processing to be performed from now on. As a result of such a contrast, when the format of the wheel tip is not described in the recipe data as a usable wheel tip format, the scribing device displays an indication to prohibit the use of the wheel tip and the other tip holders. The operation is prohibited until is ready. As a result, it is possible to prevent the occurrence of a scribe failure due to the use of a wheel tip of an improper type in the execution of the recipe set based on the recipe data.
Furthermore, for each wheel tip, record the history of the tip parameter, which is a parameter that characterizes the usage pattern and affects the service life, while the recipe data includes a replacement recommendation value, which is a reference value for wheel tip replacement. For each tip parameter, set according to the scribe content described in the recipe data. Then, for each tip parameter, the integrated value (estimated arrival value) to be reached when the scribing is performed according to the recipe is compared with the replacement recommendation value, and when the former has a large tip parameter, the wheel tip is replaced. Make the recommended markings. This makes it possible to reliably prevent the occurrence of a scribe failure when the recipe set based on the recipe data is executed. In addition, the replacement recommended value is determined according to the recipe setting, so that the wheel tip can be effectively used within the available range.
≪ Second Embodiment >
In the above-described first embodiment, integration of each tip parameter is performed by arithmetic processing based on the set recipe, but the form of integration of the tip parameter is not limited to this. In this embodiment, the flow of the scribing process in the case of integrating the tip parameter based on the measured value will be described. However, for the sake of simplicity, in the present embodiment, among the tip parameters exemplified above, only the number of collisions between the wheel tip 1 and the brittle material substrate P and the traveling distance of the wheel tip 1 are used. It is assumed that the tip 1 is used to determine whether the tip 1 needs to be replaced.
14 and 15 are views showing the flow of processing from the scribe device 100 or 200 to the scribe device 100 or 200 until the scribing process is completed after the tip holder 10 is installed in the present embodiment.
As shown in FIG. 14, after preparing the front end part of the scribing process of this embodiment, specifically, the tip holder 10, the wheel tip 1 based on the management number or format restored from the cord 14 Processes (steps S1 to S10) until determining whether or not this can be used are the same as in the first embodiment.
However, in the case of the present embodiment, the tip holder 10 is moved to the holder joint 20 when the wheel tip 1 is judged to be suitable for the execution of the set recipe by the check of the form (YES in step S10). It installs in (step S15). In addition, when the said tip holder 10 is already installed in the holder joint 20, it is confirmed. When the tip holder 10 is installed in the holder joint 20, a known alignment process or an initial process is performed, and then the control unit 121 or 251 issues a signal instructing execution of the scribe process according to the set recipe ( Step S16).
In response to such an execution instruction signal, the scribing apparatus 100 or 200 starts scribing according to the recipe (step S17). In this embodiment, the scribing apparatus 100 or 200 is started with the start of such scribing. Measures the tip parameter and transmits the measured value (parameter actual value) to the control unit 121 or 251 in order. Each time the control unit 121 or 251 acquires the parameter actual value, the control unit 121 or 251 adds this to the integrated value up to the immediately preceding end of each tip parameter described in the use history data D2 (step S101).
For example, about the number of collisions between the wheel tip 1 and the brittle material substrate P, every time the wheel tip 1 contacts the brittle material substrate P by the lifting and lowering operation of the scribe head, "1" is added to the integrated value. Moreover, about the travel distance of the wheel tip 1, whenever the scribe operation | movement to an X-axis direction or a Y-axis direction is performed, the travel distance of the wheel tip 1 at that time will be added to the integrated value up to that time.
While the scribing operation is being performed, the control unit 121 or 251 compares the replacement value V1 described in the recipe data D1 with the added value for each tip parameter each time the tip parameter is added. Thus, it is judged whether or not the wheel tip 1 has reached the replacement recommendation state by any of the tip parameters exceeding the replacement recommendation value V1 (step S102).
While the exchange recommendation state has not been reached (NO in step S102), and while scribing is being performed (NO in step S103), the addition of these parameters and the comparison with the exchange recommendation value V1 are repeated.
On the other hand, if any one of the tip parameters exceeds the replacement recommendation value V1 and becomes the replacement recommendation state (YES in step S102) while the scribing is being executed, the control unit 121 or 251 is used for scribing. A display (recommended replacement display) for recommending replacement of the wheel tip 1 being displayed is displayed on the monitor 128 or 258 (step S104). Thereby, the wheel tip 1 is notified that the replacement is in a recommended state. However, at this point, the scribing operation still continues.
When the replacement recommendation display is made, the operator determines whether to replace the wheel tip 1 (step S105). When exchanging (YES in step S105), the scribe is stopped (step S106), another tip holder is prepared, and the code is read again (steps S7, S8, S2). As a result, occurrence of scribe failure is prevented.
If the replacement of the wheel tip 1 is not performed even though the replacement recommendation indication is made (NO in step S105), or if the wheel tip 1 does not become the replacement recommendation in the first place, the scribe set in the recipe If all of the operations are completed, the scribe process ends (YES in step S18, step S103). Then, the integrated value of the usage history data D2 is updated by adding each tip parameter at that time (step S19).
In the case where the wheel tip 1 is not replaced even though the replacement recommendation indication is made, the integrated value of the tip parameter at the time when the scribing process is finished is recommended because the number of the remaining lots is few. This is the case where it is judged that the possibility of occurrence of a scribe defect is low, such as when it is judged to slightly exceed the value V1.
When the usage history is updated, the control unit 121 or 251 causes the monitor 128 or 258 to display a menu for inputting the execution of scribing by other recipes (step S20). If execution of scribing to another recipe is selected (YES in step S20), the flow returns to step S5, after which the same processing as described above is repeated. If it is selected not to execute scribing to another recipe (NO in step S20), the series of processing ends.
As described above, in the present embodiment, on the basis of the actual scribing operation, in determining whether the wheel tip 1 is in the replacement recommended state, the tip parameter is calculated from the description of the recipe, and the result of the calculation. Is different from the first embodiment in which it is determined whether or not the wheel tip 1 is in the replacement recommended state on the basis of. In the case of the first embodiment, when the setting contents of the recipe are complicated, the processing efficiency may decrease because time is required for the calculation of the expected arrival value, but in the case of the present embodiment, the simple addition process is repeated during the scribing process. Since only scribing is performed, the scribe processing can be performed without lowering the processing efficiency, and the occurrence of scribe failure can be reliably prevented.
In addition, in the first embodiment, even when the wheel tip 1 that does not actually reach the replacement recommendation state is compared with the expected arrival value and the replacement recommendation value, when the replacement recommendation state is reached at the next use, it is replaced at that time. In this embodiment, the wheel tip 1 can be used more effectively since the wheel tip 1 is actually replaced only when the replacement recommendation state is actually reached.
In addition, measurement of a tip parameter can be performed using a well-known technique. Regarding the number of collisions between the wheel tip 1 and the brittle material substrate P, for example, a relay that is turned ON or OFF every time the wheel tip 1 contacts the brittle material substrate P in the scribe head 30. (Electric contact) may be provided so that the control unit 121 or 251 adds "1" every time the ON / OFF signal is detected, and the elevating portion 31 of the scribe head 30 is connected to the servo motor. It may be configured such that "1" is added every time the wheel tip 1 detects a rise in the torque generated in the servo motor when the wheel tip 1 comes into contact with the brittle material substrate P. FIG.
In addition, about the travel distance of the wheel tip 1, the relative movement of the wheel tip 1 with respect to the brittle material board | substrate P like the scribe operation of the scribe apparatus 100 in the Y-axis direction is carried out by the ball screw 103. As shown in FIG. In the case of using the circuit, the rotational speed of the rotating shaft of the motor can be calculated by converting and outputting the pulse signal into a pulse signal using a rotary encoder (not shown) and counting the output pulse signal by an encoder counter. Alternatively, if the relative movement of the wheel tip 1 is realized using a linear motor, the linear scale along the moving direction of the mover portion provided with the scribe head 30 is provided on the stator portion, If the scale portion is scanned when the scribe head 30 moves, one pulse signal per unit length may be emitted to calculate the travel distance from the number of output pulse signals.
As described above, also in the present embodiment, similarly to the first embodiment, the wheel tip is based on the management number and type of the wheel tip held by the tip holder restored from the cord printed on the tip holder. It can be determined whether or not to use.
In addition, for each wheel tip, the tip parameter, which is a parameter that characterizes the usage pattern and affects the service life, is integrated based on the measured value, and the wheel tip used for the scribe is in the recommended replacement state. Whether or not it is reached is specified based on the recommended replacement value for each tip parameter determined for each recipe made by describing the contents of the scribing process, so that a scribing failure can be reliably prevented when the recipe is executed. have. In addition, the replacement recommended value is determined according to the recipe setting, so that the wheel tip can be effectively used within the available range.
<Modifications>
In the above description, the scribing processing in the first embodiment and the scribing processing in the second embodiment are described independently, but these scribing processes are not betrayed and can be performed in parallel at the same time. In such a case, you may use each scribe process according to the kind of tip parameter. For example, the determination of the recommended replacement state based on the number of collisions and the traveling distance between the wheel tip 1 and the brittle material substrate P is performed based on actual measurement by applying the scribing process according to the second embodiment. In addition, about the determination of the exchange recommended state based on the number of external cuts and the number of twists, the scribe process according to the first embodiment may be applied and performed based on the expected arrival value.
In the second embodiment described above, the tip parameter is measured at the time of the scribing process. The measurement of the tip parameter may be performed at the time of the alignment process or at the test scribe performed by manual operation. In such a case, since the integrated value of the tip parameter recorded in the usage history data D2 becomes closer to the value of the actual tip parameter, it becomes possible to more precisely determine whether the wheel tip needs to be replaced. . In the case of the first embodiment as well, this correspondence is not impossible, but it is not necessarily practical.
In the second embodiment, the integrated value of the tip parameter is updated in near real time. By using this, the integrated value may be displayed on the monitor 128 or 258 in real time. In this case, since the operator can visually recognize that the tip parameter is close to the replacement recommended value V1, preparation for replacement is possible in advance. In such a case, it may be a form which counts down the value of the tip parameter until reaching the recommended replacement value V1.
In the above-described case, there is only one wheel tip for scribing one side of the brittle material substrate P, but by providing a plurality of scribe heads on the same side, a scribing apparatus capable of simultaneously scribing a plurality of portions of the surface is provided. The form to be used may be sufficient. In such a case, the above-mentioned judgment of useability or determination of replacement is performed for each wheel tip provided in each scribe head.
The scribing processing system may have a means for automatically replacing the tip holder 10 installed in the holder joint 20 (holder automatic replacement means). In such a case, it is preferable that the holder automatic replacement means replace the tip holder 10 in response to the controller 121 or 251 being notified that the wheel tip 1 is not available or in the replacement recommended state. .
