≪ First Embodiment >
≪ Wheel tip and peripheral structure thereof >
First, a wheel tip (also simply referred to as a tip) used in a scribing apparatus according to the first embodiment of the present invention, a tip holder as a holder thereof, and a holder joint as a place where the tip holder is installed in the scribing apparatus will be described. Fig. 1 is a perspective view of a tip holder 10 in a state of holding a wheel tip 1, and Fig. 2 is a side view of a tip holder 10 showing a state in which the wheel tip 1 is installed. 3 is a side sectional view of the holder joint 20 in a state where the tip holder 10 is installed.
The wheel tip 1 is a disk-shaped tool having a V-shaped blade portion 2 at its outer peripheral end, and has a through hole 3 at its center. At least the portion of the blade portion (2) of the wheel tip (1) is made of a hard material such as diamond. The wheel tip 1 is installed in a scribe device to be described later in a state in which it is held in the tip holder 10, and is used for scribe processing. As the wheel tip 1, an outer diameter (wheel diameter) of about 1.0 mm to 6.0 mm and a thickness of about 0.4 mm to 1.1 mm are generally used.
The tip holder 10 is a substantially cylindrical member holding the wheel tip 1. The tip holder 10 has flat portions 11a and 11b of substantially square shape provided at one longitudinal end portion thereof in parallel with the longitudinal direction. On the other hand, the other end in the longitudinal direction is a mounting portion 16 for mounting the tip holder 10 to the scribing device. In addition, the tip holder 10 is formed at least in the vicinity of the mounting portion 16 with a magnetic metal.
The flat portions 11a and 11b are provided symmetrically with respect to the central axis in the longitudinal direction of the tip holder 10. The flat portions 11a and 11b are provided with notches 12 along the central axis, . Further, pin grooves 13 penetrating in the direction perpendicular to the respective surfaces are formed in the lower end portions of the flat portions 11a, 11b.
In the tip holder 10, the pin 15 is inserted into the through hole 3 provided at the center of the wheel tip 1, and the through hole 3 located at both sides of the through hole 3 with the wheel tip 1 positioned in the cutout 12 The wheel tip 1 is rotatably held about the pin 15 by being inserted into the pin groove 13 of the flat portions 11a and 11b. In this embodiment, after the pin 15 is inserted into the pin groove 13 and the wheel tip 1 is held in the tip holder 10, the wheel tip 1 is moved from the tip holder 10 It is assumed that it is not removed. For example, it is assumed that the wheel tip 1 used in the scribing apparatus is replaced by exchanging the tip holder 10 itself. Therefore, in the following description, the tip holder 10 refers to a state in which the wheel tip 1 is installed, unless otherwise specified.
In the flat portion 11a, a cord 14 is printed (however, not shown in Fig. 3). The code 14 is provided in the tip holder 10 such as the object identification information such as the type and the management number of the wheel tip 1 held by the tip holder 10 and the initial correction And text information relating to the wheel tip 1 is recorded in advance in the form of a code. As a code 14, it is preferable to use a QR code (registered trademark). The format of the basic text information may be appropriately determined, and may be determined in the following format, for example.
(Character string indicating format) / (character string indicating management number) / (character string indicating initial correction information)
Here, the format is a character string of the size (outer diameter, inner diameter, thickness, blade angle, etc.) and material of the wheel tip 1 according to a specific rule. The control number is a number uniquely assigned to each wheel tip 1. The initial correction (offset) information is information on the individual wheel tips 1 in advance in order to cancel the offset of the scribe position due to the installation error of the wheel tip 1 with respect to the tip holder 10 It is the specified calibration information.
The code 14 is printed by a known laser marking device or the like after the initial correction (offset) information is specified after installing the wheel tip 1 in the tip holder 10. Also, as will be described later, the code 14 is read and restored (decoded) by the code reader 140 (see Fig. 5) prior to scribing.
The mounting portion 16 has a shape in which a part of the cylinder is cut and has an inclined portion 16a and a flat portion 16b parallel to the longitudinal direction of the tip holder 10. The flat portion 16b is provided perpendicular to the flat portions 11a and 11b on the side where the wheel tip 1 is held. By inserting the mounting portion 16 having such a shape into the holder joint 20 provided in the scribing device, a state in which the wheel tip 1 is installed in the scribe device is realized.
Although not shown in Fig. 3, the holder joint 20 is a member constituting a part of a scribing apparatus described later, and is a place for installing the tip holder 10 in the scribing apparatus. The holder joint (20) has a holding portion (22) where the tip holder (10) is installed and held. The holder joint 20 is also provided with bearings 21a and 21b for rotating the holder joint 20 around a rotation axis AX1 extending in the Z axis direction.
A cylindrical opening 23 having a bottom is formed in the holding part 22, and a magnet 24 is buried in the innermost end. A positioning pin 25 is provided on the side surface of the opening 23 for determining the insertion position of the tip holder 10 perpendicular to the direction in which the opening 23 extends.
The attachment of the tip holder 10 to the holder joint 20 can be performed by inserting the attachment portion 16 of the tip holder 10 into the opening 23 of the holder joint 20. That is, when the mounting portion 16 of the tip holder 10 is inserted into the opening 23, the mounting portion 16 of the tip holder 10 made of a magnetic material is sucked by the magnet 24, The attaching portion 16 moves the extending direction of the opening 23 in the direction of the axis 23 in the direction of the axis 23, And stops when the extending direction of the positioning pin 25 and the inclined portion 16a are in contact with each other in parallel with each other as shown in Fig. At this time, the tip holder 10 is inhibited by the positioning pin 25 in its rotational direction and receives a suction force from the magnet 24. As a result, the tip holder 10 is fixed to the holder joint 20 .
The removal of the tip holder 10 from the holder joint 20 is performed only when the flat portions 11a and 11b are removed from the holder joint 20 because the force acting in the longitudinal direction of the tip holder 10 is only a magnetic force, 11b by pulling it from the side.
The opening 23 of the holder joint 20 is formed so that the horizontal position of the pin 15 of the wheel tip 1 and the horizontal position of the rotation axis of the bearings 21a and 21b, (AX1) are offset from each other. This is to cause a so-called caster effect on the wheel tip 1 when executing the scribing operation. The castor effect will be described later.
<Main Configuration of the Scribe Processing System>
Next, a configuration of a scribe apparatus constituting the scribe processing system according to the present embodiment and a controller for controlling the operation thereof will be described. The scribing apparatus can be modified in various configurations. The scribing apparatus is common in that a scribe is performed in a state in which the holder holder 20 is provided with the holder joint 20 and the tip holder 10 is provided. Hereinafter, a scribe apparatus 100 having a mechanism for rotating a brittle material substrate, which is a typical constitutional example, but a scribe is a scribe apparatus 100 capable of scribing both sides but not having a mechanism for rotating a brittle material substrate 200 will be described sequentially. Needless to say, a scribe device capable of only one-side scribing or a scribing device capable of both-side scribing and rotating the substrate without being able to rotate the brittle material substrate can also be an object of the present invention.
(First Configuration)
4 is an external perspective view showing the main mechanical components of the scribing apparatus 100 according to the first configuration. The scribing apparatus 100 roughly includes a movable base 101 formed by mounting and fixing a brittle material substrate P and a scribe head 30 provided with a wheel tip 1 to relatively move the brittle material substrate P, . 4, the moving direction of the moving base 101 is the Y axis direction, the moving direction of the scribe head 30 in the horizontal plane is the X axis direction, and the vertical direction is the Z axis direction. XYZ coordinates of the XYZ coordinate system are described.
The moving base 101 is movably held along the pair of guide rails 102a and 102b in the Y axis direction and is screwed to the ball screw 103. [ The ball screw 103 is rotated by the driving motor 104 to move the moving base 101 along the guide rails 102a and 102b in the Y axis direction.
On the moving base 101, a rotating mechanism 105 and a table 106 are provided. The rotating mechanism 105 has a motor for rotating the table 106 in the xy plane. On the table 106, two positioning pins 107a and 107b for determining the stacking positions of the two sides orthogonal to the brittle material substrate P are respectively provided. When the scribing is performed, the brittle material substrate P is placed on the table 106 in contact with these positioning pins 107a and 107b, and the vacuum suction means (not shown) provided in the table 106 And the like. That is, in the scribe apparatus 100, the table 106 functions as a holding means for the brittle material substrate P.
Two CCD cameras 108 for picking up positioning alignment marks provided on the upper surface (scribe surface) of the brittle material substrate P are provided at the upper part of the scribing device 100. [
Further, in the scribe apparatus 100, the bridge 110 is laid by the supporting pillars 111a and 111b. The bridge 110 is provided along the X-axis direction in a form crossing the movement path of the moving base 101 extending in the Y-axis direction. The bridge 110 is provided with a scribe head 30. The scribe head 30 is movable in the X-axis direction by a known linear motor 112 provided along the X-axis direction which is an extending direction of the bridge 110. [ In the present embodiment, the moving speed of the scribe head 30 when the linear motor 112 is driven becomes the scribing speed in the scribe in the X-axis direction.
In the scribe head 30, the above-described holder joint 20 is provided in a posture in which the opening 23 is vertically downwardly directed. When the tip holder 10 is mounted on the holder joint 20 having such an attitude, the wheel tip 1 is positioned at the lowermost end. In this state, the pin 15 is leveled in the tip holder 10, so that the wheel tip 1 is rotatable about the horizontal direction in a posture orthogonal to the horizontal plane.
In addition, by providing the bearings 21a and 21b as described above, the holder joint 20 can be rotated in the horizontal plane in the scribe apparatus 100. [ Thus, when the tip holder 10 is provided in the holder joint 20, the wheel tip 1 is also rotatable in the horizontal plane.
The scribe head (30) further includes a lifting portion (31) for enabling the lifting operation of the holder joint (20). The elevating portion 31 is realized by, for example, a servo motor, a linear motor, an air cylinder using air pressure control, or the like.
In the scribing apparatus 100 having the above-described structure, the brittle material substrate P is mounted on the table 106 in a state in which the holder 10 is mounted on the holder joint 20, The scribe head 30 is arranged by the linear motor 112 while the spindle 101 is disposed immediately below the bridge 110 and the wheel tip 1 at the lower end of the tip holder 10 is contacted with the brittle material substrate P. [ Axis direction with respect to the brittle material substrate P by rolling the wheel tip 1 against the brittle material substrate P by rolling the brittle material substrate P in the X axis direction. In such a case, scribing along the X-axis direction can be performed at an arbitrary position in the Y-axis direction by properly setting the arrangement position of the moving table 101. [
Further, the moving table 101 is moved in the Y-axis direction while the wheel tip 1 at the lower end of the tip holder 10 is brought into contact with the brittle material substrate P which is stacked and fixed on the table 106, Scribing can be performed along the Y-axis direction with respect to the brittle material substrate (P) by moving the pressure-sensitive adhesive layer (1) relative to the brittle material substrate (P). In such a case, scribing along the Y-axis direction at an arbitrary position in the X-axis direction can be performed by appropriately setting the positions of the scribe heads 30 in the bridge 110. [
Fig. 5 is a block diagram showing the functional configuration of the controller 120 provided in the scribe apparatus 100. As shown in Fig. The controller 120 includes a control unit 121, an image processing unit 122, an input unit 123, a code processing unit 124, a transport mechanism drive unit 125, a rotation mechanism drive unit 126, A recipe data storage unit 129, and a usage history storage unit 130. The usage history storage unit 130 stores the usage history storage unit 127, the monitor 128, the recipe data storage unit 129, In addition, the controller 120 is an example suitable for realization by a general-purpose personal computer, and may be constituted by being embedded in the scribe apparatus 100. [
The control unit 121 includes a CPU, a ROM, a RAM, and the like, and controls the operation of each part of the scribe apparatus 100 in a general manner.
The image processing unit 122 is a unit for processing image signals from the CCD cameras 108a and 108b. For example, image signals from the CCD cameras 108a and 108b, such as when correcting (aligning) the brittle material substrate P to be scribed and correcting the scribe position in advance, And supplied to the correction calculation processing in the control section 121. [
The input unit 123 is, for example, an input device such as a touch panel, a keyboard, or a mouse. An operation instruction to the scribe apparatus 100 is given through the input unit 123. [
The code processing unit 124 restores (decodes) the text information such as the type and the control number of the wheel tip 1 based on the result of reading the code 14 in the code reader 140, And controls the control unit 121 to perform the processing. In the present embodiment, it is possible to perform scribing using the wheel tip 1 having the type and control number by collating the restored form or control number with the history of use or the description of the recipe .
The transport mechanism drive section 125 drives the transport motor 104 that carries out the transport operation of the moving platform 101 in accordance with the drive signal from the control section 121. [ The rotating mechanism driving unit 126 drives the rotating mechanism 105 that performs the rotating operation of the moving base 101 in accordance with the driving signal from the control unit 121. [
The scribe head driving unit 127 includes a linear motor 112 for performing a horizontal movement operation of the scribe head 30 in accordance with a drive signal from the control unit 121, (Not shown).
The monitor 128 is a display means for displaying various setting menus or operation menus (recipes) of the scribe apparatus 100, operation states of the respective units, picked-up images of the CCD cameras 108a and 108b, and the like. In addition, the monitor 128 itself may be a touch panel, and may also serve as a function of the input section 123.
The recipe data holding unit 129 is a region (storage medium) for holding (storing) the recipe data D1 formed by describing the operation contents of the respective units of the scribe apparatus 100 at the time of scribing. Recipe data D1 matching the content of a desired scribing process is selected and called from a plurality of recipe data D1 held in a recipe data holding unit 129 in the scribe apparatus 100, Scribing processing according to the description contents of the recipe data D1 is executed by giving an operation instruction to each part in accordance with the description of the technique.
In each recipe data D1, for example, the type of the wheel tip 1 suited to the content of the scribe to be executed, the size (plane size and thickness) of the brittle material substrate P to be scribed, The position at which the scribing is performed on the substrate P (or the position at which the scribing head is lowered and raised), the descent distance of the scribing head 30 at the scribing, the scribing speed, and the like are described.
Further, the exchange recommended value V1 is further described in the recipe data D1. The exchange recommended value V1 is a value obtained by dividing the wheel tip 1 being used (the tip holder 10) by the other wheel tip 1 and the wheel tip 1 when scribing according to the recipe set based on the recipe data D1. (With the other tip holder 10) is recommended. Details of the exchange recommended value (V1) will be described later.
The description format of the recipe data D1 is not particularly limited and may be described in an arbitrary format that can be processed by the scribe device 100. [
The scribe apparatus 100 can also create the new recipe data D1 by operating the input unit 123 in accordance with the setting menu displayed on the monitor 128 and store it in the recipe data holding unit 129 .
The use history holding unit 130 stores usage history data D2 obtained by recording respective usage histories of all the wheel tips 1 used in the scribe apparatus 100 (or may be used in the future) (Storage medium) that stores (stores) information. Specifically, at least one tip parameter, which is a parameter affecting the service life of the wheel tip 1, is set in advance while characterizing the operation form of the wheel tip 1 in the scribe. The tip parameter is a value that increases each time a corresponding scribing operation is performed. Every time the scribing process is performed, the increment value of each tip parameter in the scribe is obtained, and the use history data D2 ).
Fig. 6 is a diagram illustrating the use history data D2 in the present embodiment. 6 shows the number of collisions between the wheel tip 1 and the brittle material substrate P, the number of times of external cutting, the number of torsions generated in the wheel tip 1 (Unit: m) of the wheel tip 1 in the X-axis direction, a running distance (unit: m) in the Y-axis direction, and the total running distance (unit: m) , The increment values (a 1 to a n , b 1 to b n , c 1 to c n , d 1 to d n , e 1 to e n , d 1 to d n ) of each tip parameter at the blade tip 1 + e 1 to d n + e n ) and the integrated values (a, b, c, d, e, d + e) of the tip parameters are written. Details of each tip parameter will be described later.
6, the use history data D2 describes the use limit values A, B, C, D, E and F for the respective tip parameters, A limit flag indicating whether or not the latest integrated value has reached the use limit value is described. The use limit value is a value at which product failure (scribe failure) occurs almost certainly when the wheel tip 1 is used in a state where the latest integrated value of the tip parameter exceeds the value. The usage limit value is a value unique to the individual wheel tip 1.
In the present embodiment, for the tip parameter whose latest integrated value exceeds the use limit value, the limit flag is set to "1 ", and for the tip parameter whose latest integrated value does not exceed the use limit value, 0 ". 6 exemplifies a case where the tip parameter which is the "X-axis direction travel distance " exceeds the use limit value (d> D). As will be described later, in this embodiment, the wheel tip 1 in which even one tip parameter with the limit flag of "1 " exists is prohibited from being used, and scribe operation can not be performed unless the exchange is performed. That is, by checking the value of the limit flag, it is possible to specify whether or not the wheel tip 1 can not be used.
Alternatively, unusable tip data in which only the object identification information of the wheel tip 1 in which the tip parameter with the limit flag of "1" exists in the corresponding use history data D2 is created and the use of the wheel tip 1 The determination of whether or not the object identification information is described in the unusable tip data may be made based on whether or not the object identification information is described in the unusable tip data.
The tip parameters shown in Fig. 6 are examples only, and the types of the tip parameters to be set and the description format of the use history data D2 are not limited to those shown in Fig. Further, as the use limit value, an appropriate value may be determined empirically or experimentally.
Alternatively, in the present embodiment, it is not an essential form that the scribe apparatus 100 itself is provided with the code reader 140 and further the code processing unit 124. For example, if the scribe processing system is configured by connecting a plurality of scribe apparatuses 100 and a common management server for collectively managing them, via a communication network such as a LAN (not shown), a code reader 140 or the code processing unit 124 may be installed only in the management server and the restoration contents may be given to each scribe apparatus 100 from the management server through the network. Alternatively, it is also possible in principle that an operator of the scribe processing system (hereinafter, simply referred to as an operator) inputs the restoration contents through the input unit 123.
When the scribe processing system has the above-described network configuration, it is preferable that the recipe data holding unit 129 and the use history holding unit 130 are also provided in the management server. In this case, the recipe data D1, the use history data D2, and unusable tip data are shared among the plurality of scribe apparatuses 100 so that they can be referred to or updated from any scribe apparatus 100 .
(Second Configuration)
7 is an external perspective view showing the main mechanical components of the scribing apparatus 200 according to the second configuration. The scribing apparatus 200 roughly includes a pair of upper and lower scribe heads 30 (an upper scribe head 30A and a lower scribe head 30B) each having a wheel tip 1 and a brittle material substrate P ), Thereby simultaneously scribing the brittle material substrate P in the upper and lower directions. 7, the moving direction of the brittle material substrate is the Y axis direction, the moving direction of the scribe heads 30A and 30B in the horizontal plane is the X axis direction, and the vertical direction is the Z axis direction. XYZ coordinates of the XYZ coordinate system are described. 7, for the sake of simplification, a holder joint 20 provided in the scribe heads 30A and 30B, a tip holder 10 provided in the holder joint 20, The wheel tip 1 held by the wheel 10 is omitted.
Such a scribing apparatus 200 mainly includes a substrate supporting mechanism 210, a clamping mechanism 220 and a scribing mechanism 230 as its mechanical components. Although not shown in Fig. 7, two scintillator devices 240a, 240b and 240c for picking up positioning alignment marks provided on the upper surface (scribe surface) of the brittle material substrate P are provided on the scribing device 200, 240b are provided (see Fig. 8).
The substrate supporting mechanism 210 includes a first substrate supporting portion 210A and a second substrate supporting portion 210B. The first substrate supporting part 210A and the second substrate supporting part 210B are disposed opposite to each other with a scribing mechanism 230 interposed therebetween. The first substrate supporting portion 210A is responsible for transporting the brittle material substrate P before scribing and the second substrate supporting portion 210B is for transporting the brittle material substrate P after being scribed.
The first substrate supporting portion 210A and the second substrate supporting portion 210B are respectively composed of a plurality of (five in FIG. 7) supporting units 211 spaced apart in the X-axis direction. Each of the support units 211 has a longitudinal direction in the Y-axis direction and a timing belt 212 is extended along the Y-axis direction. When a force in the Y axis direction is applied to the brittle material substrate P in a state where the brittle material substrate P is supported on the upper surface of the timing belt 212, So that the movement of the brittle material substrate P in the Y-axis direction can be assisted.
The clamp mechanism 220 clamps (holds) the rear end portion of the brittle material substrate P placed on the timing belt 212 with a pair of clamp members 221L and 221R spaced apart in the X axis direction, , And is a mechanism for moving the clamp members 221L and 221R in the Y-axis direction while maintaining such a clamped state. The movement of the clamping mechanism 220 is realized by a linear motor. The clamp members 221L and 221R are provided so as not to interfere with the support unit 211 when moving in the Y-axis direction.
The scribing mechanism 230 is a portion for simultaneously scribing both upper and lower surfaces of the brittle material substrate P in parallel. The scribing mechanism 30 includes an upper scribing head 30A and a lower scribing head 30B at positions between the first substrate supporting portion 210A and the second substrate supporting portion 210B in the Y axis direction. The upper scribing head 30A is provided on the upper scribing mechanism 231 and the lower scribing head 30B is provided on the lower scribing mechanism 232. The upper scribing head 30A is provided with a linear motor And is movable in the X-axis direction. In this embodiment, the moving speeds of the upper scribe head 30A and the lower scribe head 30B when the linear motor is driven are set so that the moving speeds of the upper scribing head 30A and the lower scribing head 30B in the X- This is the scribing speed when scribing is performed.
More specifically, the upper scribe head 30A is provided with the holder joint 20 such that the wheel tip 1 is positioned at the lowermost end with the tip holder 10 installed. On the other hand, the lower scribe head 30B has the holder joint 20 so that the wheel tip 1 is located at the uppermost end in a state where the tip holder 10 is installed. The upper scribing head 30A and the lower scribing head 30B each have elevating portions 31A and 31B that enable the holder joint 20 to move up and down. The elevating portions 31A and 31B are realized by, for example, a servo motor, a linear motor, an air cylinder using air pressure control, or the like.
In the scribing apparatus 200 having the above configuration, the rear end side of the brittle material substrate P mounted on the first substrate supporting portion 210A is clamped by the clamping mechanism 220, and the clamping mechanism 220 The brittle material substrate P supported by the supporting unit 211 of the first substrate supporting portion 210A is supported by the supporting unit 211 while the timing belt 212 is moved in the Y- Axis direction by the driven rotation of the clamp mechanism 220 and the movement of the clamp mechanism 220. [ After the brittle material substrate P is scribed by passing between the upper scribing mechanism 231 and the lower scribing mechanism 232 in the middle, the brittle material substrate P is gradually moved from the distal end side to the second substrate supporting portion 210B, As shown in Fig. The brittle material substrate P is moved in the second substrate supporting portion 210B in the same manner as the first substrate supporting portion 210A by the movement of the clamp mechanism 220 and the movement of the timing belt 212 provided in the supporting unit 211 And is conveyed by rotation. Therefore, in the scribing apparatus 200, the substrate supporting mechanism 210 and the clamping mechanism 220 function as holding means for the brittle material substrate P.
In this case, the positions of the upper scribing head 30A and the lower scribing head 30B in the Z-axis direction are adjusted in advance so that the wheel tips 1 at the tips of the tip holders 10 provided in the respective scribing heads 30A, And the brittle material substrate P passing between the lower scribing mechanism 231 and the lower scribing mechanism 232 is contacted with the wheel tip 1 in the upper and lower surfaces of the brittle material substrate P during transportation . As a result, scribing along the Y-axis direction can be performed with respect to the upper and lower surfaces of the brittle material substrate (P). In such a case, scribing along the Y-axis direction at an arbitrary position in the X-axis direction can be performed by appropriately setting the arrangement positions of the upper scribing head 30A and the lower scribing head 30B in the X-axis direction.
The brittle material substrate P is placed between the upper scribe mechanism 231 and the lower scribe mechanism 232 and is held by the upper scribe head 30A and the lower scribe head 30B, By moving the upper scribe head 30A and the lower scribe head 30B in the X axis direction while bringing the wheel tip 1 at the tip of the wheel tip 1 into contact with the brittle material substrate P, P, it is possible to scribe the brittle material substrate P along the X-axis direction.
Since the scribe device 200 is also similar to the scribe device 100 with respect to the configuration of the holder holder 10 with respect to the holder joint 20, even when scribing the scribe device 200, .
Fig. 8 is a block diagram showing the functional configuration of the controller 250 provided in the scribe apparatus 200. As shown in Fig. The controller 250 includes a control unit 251, an image processing unit 252, an input unit 253, a code processing unit 254, a clamp mechanism driving unit 255, a first scribing head driving unit 256, A recipe data storage unit 259, and a usage history storage unit 260. The second scribe head drive unit 257, the monitor 258, the recipe data storage unit 259, The controller 250 is also a suitable example realized by a general-purpose personal computer in the same manner as the controller 120, but may be configured by being embedded in the scribe device 200. [
The control unit 251, the image processing unit 252, the input unit 253, the code processing unit 254, the monitor 258, the recipe data holding unit 259, and the usage history holding unit 260 are, The recipe data holding unit 129 and the usage history holding unit 130 provided in the control unit 121, the image processing unit 122, the input unit 123, the code processing unit 124, the monitor 128, And therefore detailed description thereof will be omitted.
The clamp mechanism drive unit 255 operates the clamp members 221L and 221R of the clamp mechanism 220 and moves the clamp mechanism 220 in the Y axis direction in accordance with the drive signal from the control unit 251 .
The first scribing head driving unit 256 and the second scribing head driving unit 257 move the upper scribing head 30A and the lower scribing head 30B in the X axis direction in accordance with the driving signal from the controller 251, The elevating portions 31A and 31B for moving the holder joint 20 up and down in the upper scribing head 30A and the lower scribing head 30B are driven.
Similar to the scribing apparatus 100, the scribe apparatus 200 also selects recipe data D1 matching the content of the desired scribing process from a plurality of recipe data D1 held in the recipe data holding unit 259 And the control unit 251 gives operation instructions to the respective units in accordance with the contents of the description, whereby the scribing process according to the description of the recipe data D1 is executed.
<Details of tip parameters>
Next, the tip parameters showing the use state of the wheel tip 1 illustrated in Fig. 6 will be described in detail.
(Number of collisions)
The number of collisions between the wheel tip 1 and the brittle material substrate P means that the scribe head 30 provided with the wheel tip 1 is lowered in order to perform scribing in this embodiment, (2) and the brittle material substrate (P). Since the blade portion 2 is impacted every time such contact is made, the blade portion 2 wears due to repeated contact. Use of the worn blade portion 2 is a factor that deteriorates the scribe quality. Therefore, in the present embodiment, the number of collisions between the wheel tip 1 and the brittle material substrate P is set as a tip parameter, and based on the integrated value, whether or not the wheel tip 1 has reached the use limit .
(External cutting)
Outer cutting means that the wheel tip 1 is disposed on the brittle material substrate P at a position outside the edge portion of the brittle material substrate P when the top surface of the brittle material substrate P is the live face of the brittle material substrate P is lowered to a scribe height slightly below the height position of the live face of the face so that the scribe from one end to the other end of the brittle material substrate P is scribed. 9 is a schematic view showing a state of external cutting. In the case shown in Fig. 9, the wheel tip 1 is lowered to a scribe height lower than the live surface of the brittle material substrate P from the brittle material substrate P at a position ahead by a distance OH1 with respect to the X axis direction, The outer cutting is similarly performed from the brittle material substrate P to the end position by a distance OH2 with respect to the X axis direction.
In addition, with respect to such external cutting, a method in which the scribe is performed by lowering the wheel tip 1 at the position where the brittle material substrate P is present is called cutting.
Since the scribe line reaches both ends of the substrate, the scribe line breaks easily, and the slip of the wheel tip 1 at the scribe start position, which is a problem in the case of the internal scribing, does not occur There is an advantage that it does not. However, since the wheel tip 1 is more likely to be consumed than in the case of internal cutting, the greater the number of times of external cutting, the easier the wheel tip 1 is to reach the usage limit. Therefore, in the present embodiment, it is assumed that the number of times of external cutting is set as a tip parameter, and it is determined whether or not the wheel tip 1 has reached the usage limit based on the integrated value.
(Twist of wheel tip)
Next, in describing the twist of the wheel tip 1, the castor effect that occurs at the time of scribing will first be described. As described above, the holder joint 20 is rotatable around the rotation axis AX1, and does not have a mechanism for directly adjusting the posture of the wheel tip 1. [ Therefore, in starting the scribe, the blade portion 2 of the wheel tip 1 does not necessarily point in the scribe direction. On the other hand, on the other hand, in the state where the holder holder 10 is provided in the holder joint 20, the horizontal position of the pin 15 of the wheel tip 1 and the horizontal position of the rotation axis AX1 as the rotation center of the bearings 21a, . Thereby, when the scribe head 30 starts to move relative to the brittle material substrate P in a certain direction within the horizontal plane with the wheel tip 1 in contact with the brittle material substrate P, the holder joint 20 is immediately subjected to the torque, The wheel tip 1 is moved in a rolling contact with the brittle material substrate P in a state in which the wheel tip 1 is parallel to the relative moving direction of the scribe head 30. [ This phenomenon is called the castor effect.
However, when such a caster effect occurs, the posture of the wheel tip 1 is forcibly changed in a state in which the blade portion 2 is in contact with the brittle material substrate P. In the present embodiment, the forcible attitude change occurring in the wheel tip 1 with the appearance of the castor effect is referred to as "twist" of the wheel tip 1.
Fig. 10 is a view illustrating the twist of the wheel tip. 10, the scribe head 30 is relatively moved in the X-axis direction to scribe a plurality of times in the X-axis direction indicated by the arrow AR1 with respect to the brittle material substrate P, The scribe head 30 is moved relative to the substrate P in the Y axis direction after the wheel tip 1 is brought into contact with the next scribing start position of the brittle material substrate P, And scribing in the Y-axis direction is performed. In such a case, the wheel tip 1 in the state in which the first scribing has been completed is provided for scribing in the next Y-axis direction while maintaining the posture substantially along the X-axis direction. As a result, when the scribing in the Y-axis direction is started by bringing the wheel tip 1 into contact again with the brittle material substrate P, as shown in the circle of Fig. 10, The scribing is performed but the wheel tip 1 is twisted due to the relative movement of the scribe head 30 and the wheel tip 1 takes a posture in parallel with the Y axis direction, Scribing in the axial direction is realized.
Such a twist of the wheel tip 1 is one of factors that cause the blade portion 2 of the wheel tip 1 to be worn. If this is repeated, the quality of the scribe by the wheel tip 1 deteriorates. Therefore, in the present embodiment, it is assumed that the number of times this twist occurs is set as a tip parameter, and it is determined whether or not the wheel tip 1 has reached the use limit based on the integrated value.
(distance driven)
The running distance of the wheel tip 1 is defined as the distance between the wheel tip 1 and the brittle material substrate P when the blade portion 2 of the wheel tip 1 is in contact with the brittle material substrate P Speak distance. Since the scribe is realized by rolling the blade portion 2 against the brittle material substrate P, if the travel distance of the wheel tip 1 becomes long, the wear of the blade portion 2 proceeds and the scribe quality deteriorates It is clear to be. Therefore, in the present embodiment, it is assumed that the travel distance of the wheel tip 1 is set as a tip parameter, and it is determined whether or not the wheel tip 1 has reached the use limit based on the accumulated value.
6, the travel distance in the X-axis direction, the travel distance in the Y-axis direction, and the total travel distance, which is the sum of these travel distances, are treated as separate tip parameters. However, The travel distance to be noticed may be different depending on the contents of the map.
As an example, a case is considered in which a recipe is set to perform a second scribe in the Y-axis direction without rotating the brittle material substrate P after the first scribing in the X-axis direction ends. In such a case, during the second scribing, the wheel tip 1 traverses the scribe line formed by the first scribe preceding it, so that the wheel tip 1 is more likely to be impacted than when there is no such traverse. In this case, by setting the recommended replacement value V1 for the running distance in the Y-axis direction to be shorter than the recommended replacement value V1 for the running distance in the X-axis direction, the scribe quality in the Y- It is possible to more reliably suppress the occurrence of defects.
<Exchange of wheel tips based on exchange recommended values>
As described above, in the present embodiment, the exchange recommended value V1 is described in the recipe data D1. The exchange recommended value V1 is a value which is a reference for recommending replacement of the wheel tip 1, which is generally set for each tip parameter. In other words, the exchange recommended value V1 means that if the scribe processing based on the recipe is continued without replacing the wheel tip 1, the probability of occurrence of scribe defects increases, and therefore, from the viewpoint of preventing occurrence of scribe defects, It is a standard value that it is good to do. Therefore, normally, even if the wheel tip 1 is continuously used with the tip parameter exceeding the value, the wheel tip 1 is set so as not to reach the service life. Also, with respect to the exchange recommended value (V1), an appropriate value may be determined empirically or experimentally as in the use limit value. Hereinafter, it is referred to that the wheel tip 1 satisfying the exchange-recommended criterion is in the exchange recommended state.
In the present embodiment, the usability (necessity of replacement) of the wheel tip 1 at the time of scribing is compared with the recommended replacement value V1 determined for each recipe and the use history unique to each wheel tip 1 By judging based on the data D2, it is possible to reliably prevent the occurrence of defects in the scribing process of the brittle material substrate P, thereby increasing the yield.
In short, even if the scribe process is performed, the method of using the wheel tip 1 is completely different depending on the setting contents of the recipe. For example, the recipe setting is made different by, for example, a scribing process in which only the scribing in one direction is repeated, a scribing process in which only the scribing head 30 moves up and down and the moving distance is short, The wear mode of the wheel tip 1 is different according to each scribing process. This means that if the set contents of the recipe are different, the upper limit of the accumulated value of the tip parameters which can use the wheel tip 1 without causing scribing failure and the method of integrating each tip parameter from the scribing failure to the scribing failure is different have. In this embodiment, attention is paid to this point, and the exchange recommendation value V1 for each tip parameter is set for each recipe data D1, and the presence or absence of the wheel tip is judged as the most suitable reference for each recipe .
For example, in the case of a recipe in which the scribe head 30 has many lifts and tilts, wear of the blade portion 2 due to collision between the wheel tip 1 and the brittle material substrate P tends to occur, By setting the exchange recommended value V1 for the number of times of collision between the wheel tip 1 and the brittle material substrate P to be low, occurrence of scribe defects is reliably prevented.
On the other hand, according to the exchange recommended value V1 described in certain recipe data D1, even if the wheel tip 1 in which the tip parameters are accumulated up to the exchange recommended value, the recipe data D1, , It is possible to use it for scribing as a recipe based on such recipe data D1. Thereby, the wheel tip 1 can be effectively used within a usable range.
It is also possible that the tip parameter reaches the use limit value unless the use limit value and the exchange recommended value V1 are set to the same value unless the wheel tip 1 is replaced based on the recommended replacement value V1 There will be no cases. Thus, although the setting of the use limit value may seem unnecessary at first glance, it may be considered that the wheel tip 1 exceeding the exchange recommended value V1 is actually used, or the wheel tip 1 1) may be erroneously used. Therefore, setting of the use limit value is effective in that scribing failure in such a case is prevented.
<Scribe processing>
Next, the flow of processing in the case of scribing in the scribe processing system having the above-described configuration will be described. In the following description, the scribing apparatuses 100 and 200, which are mechanical components responsible for the actual scribing operation, are also referred to as "apparatus main bodies ". The following description is based on the premise of scribing by the scribing apparatuses 100 and 200 for the sake of convenience, but the description can also be applied to other scribing apparatuses having the same configuration.
Figs. 11 and 12 are diagrams showing the flow of processing until the scribe process is completed after the tip holder 10 is installed in the scribe apparatus 100 or 200. Fig.
First, the tip holder 10 is prepared by holding the wheel tip 1 (step S1). If the contents of the scribe to be performed from now on are known (step S0), the recipe to be used for the scribe is selected and set, the tip holder 1 having the wheel tip 1 of the type suitable for the scribe (10) is preferably prepared. In the case of the scribing apparatus 200, two tip holders 10 are prepared for both the upper scribing head 30A and the lower scribing head 30B. In the case of the scribe apparatus 200, if the wheel tip 1 held by at least one of the tip holders 10 can not be used or is the object of replacement, unless otherwise specified, Is performed.
Then, the code 14 printed on the flat portion 11a of the prepared tip holder 10 is read by the code reader 140 or 270 (step S2). The read code 14 is immediately restored to the text information in the code processing unit 124 or 254 (step S3). The text information such as the format restored from the code 14, the management number, and the initial correction information is given to the control unit 121 or 251.
The control unit 121 or 251 stores the usage history data D2 related to the wheel tip 1 to which the management number is attached based on the management number restored from the code 14 to the usage history holding unit 130 or 260 (Step S4). Based on the description, it is judged whether or not the wheel tip 1 is usable without a limit of use (step S5). Specifically, when there is no tip parameter in which the limit flag is set to "1" in the use history data D2, it is determined that the tip parameter is usable (YES in step S5). On the other hand, if there is at least one tip parameter in which the limit flag is "1" in the use history data D2, it is determined that the tip parameter is unusable ("NO" in step S5). If unusable tip data is generated, it may be determined by referring to this that the wheel tip 1 is usable without reaching the limit of use.
If it is determined that the wheel tip 1 is unusable ("NO" in step S5), the controller 121 or 251 determines that the wheel tip 1 that reads the code 14, On the monitor 128 or 258, and issues a signal for inhibiting the execution of the scribe using the wheel tip 1 (locking the scribe operation) (step S6). As a result, the scribe device 100 or 200 is notified that the wheel tip 1 can not be used, and scribing using the wheel tip 1 can not be performed. Therefore, for example, Occurrence of a scribe defect due to the misuse of the wheel tip 1 that has arrived is reliably prevented.
When the warning indication that the wheel tip is disabled is displayed, the operator removes the tip holder 10 holding the wheel tip 1 when the holder tip 20 is provided in the holder joint 20, After confirming the state (step S7), another tip holder 10 is prepared (step S8). Then, the code 14 is read again for the newly prepared tip holder 10 (step S2). In addition, by performing the read-only operation of the code 14, the inhibition state of the scribe operation in the scribe apparatus 100 or 200 is canceled.
If it is judged that the prepared wheel tip 1 is usable (YES in step S5), by operating the operator according to the menu displayed on the monitor 128 or 258, one recipe data to be applied to the scribe (D1) is selected from the recipe data holding unit 129 or 259, and necessary information such as the number of brittle material substrates P to be processed is input. As a result, a recipe necessary for scribing is set (step S9). As described above, the recipe may be previously selected and set prior to the preparation of the tip holder 10.
When the recipe is set, the control unit 121 or 251 determines whether the type of the wheel tip 1 that can be used in scribing by execution of the recipe described in the recipe data D1, And judges whether the prepared wheel tip 1 is suitable for execution of the recipe (step S10).
If it is determined that the wheel tip 1 is not suitable for execution of the set recipe (NO in step S10), a warning indication that the wheel tip 1 is usable is displayed on the monitor 128 or 258 , And issues a signal for inhibiting the execution of the scribe using the wheel tip 1 (locking the scribe operation) (step S6). As a result, the scribe apparatus 100 or 200 notifies that the wheel tip 1 can not be used, and scribing using the wheel tip 1 can not be performed. Therefore, for example, Occurrence of scribe defects due to improper use of the wheel tip 1 inappropriate for scribing by the scribe can be reliably prevented. In this case, the wheel tip 1 judged to be unusable can not be used for scribing based on the set recipe, and is not necessarily an unusable product with a service life. Therefore, when another recipe is set, it may be usable.
In the case where it is determined that the wheel tip 1 is not suitable for the execution of the set recipe, it is also necessary to prepare another tip holder and read the code again (steps S7, S8, S2).
On the other hand, when it is determined that the wheel tip 1 is suitable for execution of the set recipe (YES in step S10), the control unit 121 or 251, based on the setting contents of the recipe, The incremental value of each tip parameter is calculated and the incremental value is added to the accumulated value of each tip parameter described in the use history data D2 (step S11). The resulting value becomes the accumulated value (referred to as predicted arrival value) of the tip parameter to be reached after the end of the scribe.
The control unit 121 or 251 compares the expected arrival value with the recommended exchange value V1 described in the recipe data D1 to determine whether the wheel tip 1 to be used is to be replaced It is determined whether or not the recommended state is reached (step S12).
More specifically, scribing in accordance with the recipe means that the scribe head 30 is lowered so that the wheel tip 1 is brought into contact with the brittle material substrate P The number of times, the travel distance of the wheel tip 1, and the like can be specified from the contents of the recipe. That is, by analyzing the description content of the recipe, even if the scribing is not actually performed, the increment value of each tip parameter can be calculated when scribing is performed according to the recipe. If such an increment value is obtained, the expected arrival value of each tip parameter after the scribing process can be obtained before actually scribing, as described above.
13 is a diagram for explaining the calculation of the increment value of the tip parameter based on the recipe. For example, as shown in Fig. 13, after six scans (driving distances L1) of X1 to X6 with respect to the X-axis direction are scribed by internal cutting, six scans of Y1 to Y6 L2 is scribed by internal cutting is set to 100 pieces of brittle material substrates P is set.
In this case, the number of times of collision between the wheel tip 1 and the brittle material substrate P is 1200 times because there are twelve collisions with each of the 100 brittle material substrates P, Therefore, the number of times of twisting is 0 when the scribing of Y1 is performed after the scribing of X6 and the scribing of X1 is performed on the next brittle material substrate P after the scribing of Y6, The X-axis travel distance is 600L1 (m), the Y-axis travel distance is 600L2 (m), and the total travel distance is 600 (L1 + L2) (m).
In such a case, for example, if the integrated value described in the use history data D2 shown in Fig. 6 is applied to the calculation of the expected arrival value, whether or not the wheel tip 1 reaches the exchange recommended state At the time of determination, the following two numerical values are compared with respect to each tip parameter.
Number of collisions of the wheel tip 1 and the brittle material substrate P:
Expected reach = a 1 + ... + a n + 1200, recommended exchange value (V1) = V1a;
Number of cutting times:
Expected reach = b 1 + ... + b n , recommended exchange value (V1) = V1b;
Number of twists:
Expected reach = c 1 + ... + c n + 200, recommended exchange value (V1) = V1c;
X-axis travel distance:
Expected reach = d 1 + ... + d n + 600L1, recommended exchange value (V1) = V1d;
Y-axis travel distance:
Expected reach = e 1 + ... + e n + 600L2, recommended replacement value (V1) = V1e;
Overall mileage:
Expected reach = (d 1 + e 1 ) ... + (d n + e n ) + 600 (L 1 + L 2), recommended exchange value (V 1) = V 1 f.
If there is at least one tip parameter whose expected arrival value exceeds the exchange recommended value V1 as a result of the comparison, the controller 121 or 251 determines that the wheel tip 1 to be used is to be exchanged during the scribe processing (YES in step S12), a display (replacement recommendation indication) recommending replacement of the wheel tip 1 from which the code 14 is read is displayed on the monitor 128 or 258 Step S13). Thereby, it is notified that the wheel tip 1 is in the exchange recommended state.
When the exchange recommendation indication is made, the operator usually determines that the wheel tip 1 needs to be replaced (YES in step S14), prepares another tip holder, and reads the code again (steps S7, S8, S2 ). Thus, occurrence of scribe defects is reliably prevented.
On the other hand, if it is determined that the wheel tip 1 to be used does not reach the exchange recommended state during the scribing process ("NO" in step S12), the tip holder 10 holding the wheel tip 1 And is installed in the holder joint 20 (step S15). If the tip holder 10 is already provided in the holder joint 20, it is confirmed.
In addition, although exchange recommendation display is made, there is a case where exchange is not performed at the judgment of the operator ("NO" in step S14), and in this case also, the tip holder 10 is installed in the holder joint. This is the case, for example, when the integrated value calculated as described above is slightly higher than the exchange recommended value (V1), and it is judged that the possibility of scribe failure is low.
When the tip holder 10 is installed in the holder joint 20, a known alignment process or an initial process, which is omitted in detail, is performed, and then the control unit 121 or 251 sends a signal instructing the execution of the scribe process according to the set recipe (Step S16). In response to this execution instruction signal, the scribe apparatus 100 or 200 starts scribing according to the recipe (step S17).
More specifically, in the case of the scribing apparatus 100, the transport mechanism drive unit 125, the rotation mechanism drive unit 126, and the scribe head drive unit 127 are driven by the transport motor 104 of the corresponding movable stand 101, The rotary mechanism 105, the linear motor 112, and the elevating unit 31 are operated in accordance with the recipe description, a series of scribing operations according to the recipe is realized. In the case of the scribing apparatus 200, the clamp mechanism driving unit 255, the first scribing head driving unit 256 and the second scribing head driving unit 257 correspond to the clamping mechanism 220, the upper scribing mechanism 231, And the lower scribe mechanism 232 are operated in accordance with the contents of the recipe, a series of scribing operations according to the recipe is realized.
In the case of the scribing apparatus 200, the lower scribing mechanism 232 raises the lower scribing head 30B in order to bring the wheel tip 1 into contact with the brittle material substrate P. However, P and the wheel tip 1 are the same as in the case of the upper scribe head 30A provided in the scribe head 30 of the scribe device 100 or the upper scribe mechanism 231, For convenience, the contact form of the brittle material substrate P and the wheel tip 1 in the lower scribe head 30B is also referred to as "descend the scribe head 30".
When the scribing process is completed by completing all the scribing operations set in the recipe (step S18), the use history is updated on the premise of the content of such scribing process (step S19). Specifically, the increment value of each tip parameter calculated by performing the scribe processing calculated before the start of scribing is added to the use history data D2 together with the date of scribing, and at the same time, the integrated value Is rewritten to the expected arrival value obtained in the above-described operation.
When the use history is updated, the control unit 121 or 251 causes the monitor 128 or 258 to display a menu for inputting whether or not to execute the scribe by another recipe (step S20). If execution of scribing to another recipe is selected (YES in step S20), the process returns to step S5, and then the same processing as described above is repeated. If it is determined that the scribing to another recipe is not executed ("NO" in step S20), the series of processes are terminated.
As described above, in the scribe processing system according to the present embodiment, the code printed on the tip holder is read by the code reader before the scribe is performed, and the control number of the wheel tip held in the tip holder and the type And collates the restored management number with the use history. As a result of such comparison, if the wheel tip of the control number has already been recorded as an unusable wheel tip that has reached the limit of use, the scribe device displays a message prohibiting the use of the wheel tip, The operation is prohibited until the holder is ready. Thereby, it is possible to prevent the scribe defect from occurring due to the use of the wheel tip which has reached the limit of use.
Also, the restored format is collated with the format described in the recipe data that prescribes the content of the scribe processing to be performed from now on. As a result of such a comparison, if the type of the wheel tip is not described in the recipe data as the type of the usable wheel tip, the scribe device displays an indication prohibiting the use of the wheel tip, The operation is prohibited until it is ready. This makes it possible to prevent the scribe defect from occurring due to the use of the wheel tip of the improper type in the execution of the recipe set based on the recipe data.
Furthermore, for each wheel tip, the history of the tip parameter, which is a parameter that affects the service life, is characterized and the recipe data includes a recommendation value of exchange Each tip parameter is set according to the contents of the scribe described in the recipe data. Then, for each of the tip parameters, the integrated value (expected arrival value) to be reached when the scribing is performed according to the recipe is compared with the recommended exchange value, Is displayed. Thus, it is possible to reliably prevent scribe defects from occurring when the recipe set based on the recipe data is executed. In addition, since the exchange recommendation value is determined according to the setting contents of the recipe, the wheel tip can be effectively used within a usable range.
≪ Second Embodiment >
In the first embodiment described above, the integration of the tip parameters is performed by the arithmetic processing based on the set recipe, but the form of accumulation of the tip parameters is not limited to this. In the present embodiment, the flow of the scribe processing when the tip parameters are integrated based on the measured values will be described. For simplicity of explanation, in this embodiment, only the number of collisions between the wheel tip 1 and the brittle material substrate P, and the distance traveled by the wheel tip 1, among the tip parameters exemplified above, And is used for determining whether or not the exchange of the tip 1 is necessary.
Figs. 14 and 15 are diagrams showing the flow of processing until the scribe process is completed after the tip holder 10 is installed in the scribe apparatus 100 or 200 in the present embodiment. Fig.
14, after preparing the front end portion of the scribing process of the present embodiment, specifically, the tip holder 10, the wheel tip 1 is moved based on the control number and the format restored from the code 14, (Steps S1 to S10) are similar to those in the first embodiment.
However, in the case of this embodiment, when the wheel tip 1 is judged to be suitable for the execution of the set recipe by the type comparison (YES in step S10), the tip holder 10 is moved to the holder joint 20 (Step S15). If the tip holder 10 is already provided in the holder joint 20, it is confirmed. When the tip holder 10 is installed in the holder joint 20, a known alignment process or initial process is performed, and then the control unit 121 or 251 issues a signal instructing execution of the scribe process according to the preset recipe Step S16).
The scribing apparatus 100 or 200 starts scribing according to the recipe in response to the execution instruction signal (step S17). In this embodiment, the scribing apparatus 100 or 200, together with the start of such scribing, (The actual measured value of the parameter) to the control unit 121 or 251 in order. Each time the control unit 121 or 251 acquires the parameter actual value, the control unit 121 or 251 adds this to the integration value up to immediately before each tip parameter described in the use history data D2 (step S101).
For example, with respect to the number of collisions of the wheel tip 1 and the brittle material substrate P, each time the wheel tip 1 is brought into contact with the brittle material substrate P by the ascending operation of the scribe head, "1" is added to the accumulated value. With respect to the travel distance of the wheel tip 1, the travel distance of the wheel tip 1 at that time is added to the accumulated value up to that time every time a scribing operation is performed in the X-axis direction or the Y-axis direction.
While the scribing operation is being performed, the control unit 121 or 251 compares the value after addition for each tip parameter with the recommended replacement value V1 described in the recipe data D1 every time the tip parameter is added Then, it is judged whether or not the tip tip 1 has reached the exchange recommended state by any one of the tip parameters exceeding the exchange recommended value V1 (step S102).
(NO in step S102), and the scribing is performed ("NO" in step S103), the comparison of the addition of these parameters and the recommended replacement value V1 is repeated.
On the other hand, if any one of the tip parameters exceeds the exchange recommended value V1 while the scribe is being executed and the exchange recommendation state is reached (YES in step S102), the control unit 121 or 251 uses the scribe (Recommendation of replacement) recommended to be exchanged with the wheel tip 1 is displayed on the monitor 128 or 258 (step S104). Thereby, it is notified that the wheel tip 1 is in the exchange recommended state. However, at this point, the scribe operation still continues.
When exchange recommendation display is made, the operator judges whether or not to replace the wheel tip 1 (step S105). (YES in step S105), the scribing is stopped (step S106), another tip holder is prepared, and the code is read again (steps S7, S8, S2). Thus, scribing failure can be prevented.
In the case where the replacement of the wheel tip 1 is not performed despite the replacement recommendation indication being made ("NO" in step S105), or when the wheel tip 1 is not in the recommended replacement state in the first place, When the operation is completed, the scribing process is ended (YES in step S18 and step S103). Then, the accumulated value of the use history data D2 is updated by adding each tip parameter at that point (step S19).
The case in which the replacement of the wheel tip 1 is not performed despite the exchange recommendation indication is performed means that the integrated value of the tip parameters at the time of completion of the scribing process is recommended to be exchanged This is the case where it is judged that the probability of scribing failure is low, for example, when it is judged that it merely exceeds the value V1.
When the use history is updated, the control unit 121 or 251 causes the monitor 128 or 258 to display a menu for inputting whether or not to execute the scribe by another recipe (step S20). If execution of scribing to another recipe is selected (YES in step S20), the process returns to step S5, and then the same processing as described above is repeated. If it is determined that the scribing to another recipe is not executed ("NO" in step S20), the series of processes are terminated.
As described above, in this embodiment, based on the actual scribing operation, the tip parameter is calculated from the description of the recipe, in order to determine whether or not the wheel tip 1 is in the exchange recommended state, Is different from the first embodiment in which it is judged whether or not the wheel tip 1 is in a recommended replacement state. In the case of the first embodiment, if the contents of the recipe are complicated, there is a possibility that the processing efficiency is lowered because time is required for calculating the expected arrival value. However, in the case of this embodiment, simple addition processing is repeated during the scribing processing The scribing process can be performed without lowering the processing efficiency, and it is possible to reliably prevent occurrence of scribe defects.
In the first embodiment, even if the wheel tip 1 that has not actually attained the exchange recommendation state is used, when the expected arrival value and the recommended replacement value are compared with each other, However, in the case of the present embodiment, since the wheel tip 1 is exchanged only when it is actually recommended to exchange it, the wheel tip 1 can be used more effectively.
The actual measurement of the tip parameters can be performed using a known technique. The number of collisions between the wheel tip 1 and the brittle material substrate P is determined by the number of times the wheel tip 1 is brought into contact with the brittle material substrate P at the scribe head 30, (Electric contact) may be provided so that the control section 121 or 251 adds "1" every time the ON / OFF signal is detected, or the elevation section 31 of the scribe head 30 may be connected to the servomotor Quot; 1 "every time the rise of the torque generated in the servo motor is detected when the wheel tip 1 is brought into contact with the brittle material substrate P, as shown in Fig.
The relative movement of the wheel tip 1 with respect to the brittle material substrate P is detected by the ball screw 103 as in the scribing operation of the scribing device 100 in the Y- It is possible to calculate the number of rotations of the rotation shaft of the motor by converting and outputting the pulse signal from a rotary encoder (not shown) and counting the output pulse signal by the encoder counter. Alternatively, if the relative movement of the wheel tip 1 is realized by using a linear motor, a linear scale along the moving direction of the mover portion provided with the scribe head 30 is provided on the stator portion thereof, When the scribe head 30 is moved, when the scale portion is scanned, one pulse signal per unit length is generated, and the travel distance is calculated from the number of the output pulse signals.
As described above, in the present embodiment, as in the first embodiment, based on the control number and the type of the wheel tip held in the tip holder, restored from the code printed on the tip holder, It is possible to judge whether or not the use is possible.
In addition, for each wheel tip, the tip shape, which is a parameter that affects the service life, is integrated based on the measured value, while the wheel tip used for the scribe is recommended to be replaced Is specified on the basis of the exchange recommended values for the respective tip parameters set for each recipe which is made by describing the content of the scribing process, it is possible to reliably prevent scribe defects from occurring when the recipe is executed have. In addition, since the exchange recommendation value is determined according to the setting contents of the recipe, the wheel tip can be effectively used within a usable range.
<Modifications>
Although the scribing process according to the first embodiment and the scribing process according to the second embodiment are independently described in the above description, these scribing processes are not to be betrayed but can be performed simultaneously and concurrently. In such a case, each of the scribing processes may be separately used depending on the type of the tip parameter. For example, the scribing process according to the second embodiment is applied to the determination of the exchange recommended state based on the number of collisions and travel distance of the wheel tip 1 and the brittle material substrate P, On the other hand, the exchange recommended state based on the number of times of external cutting or the number of times of twisting may be determined based on the estimated arrival value by applying the scribing process according to the first embodiment.
In the second embodiment described above, the tip parameters are measured at the time of scribing. Actual measurement of such tip parameters may also be performed at the time of alignment scribing or the like for performing alignment processing or manual operation. In such a case, since the integrated value of the tip parameters recorded in the use history data D2 becomes closer to the value of the actual tip parameters, it becomes possible to determine more precisely whether the wheel tip needs to be replaced . Also in the case of the first embodiment, such a response is not impossible, but is not necessarily realistic.
In the case of the second embodiment, the accumulated value of the tip parameter is updated almost in real time. By using this, the integrated value may be displayed on the monitor 128 or 258 in real time. In this case, since the operator can visually recognize that the tip parameter approaches the exchange recommended value V1, it is possible to prepare for replacement in advance. In such a case, the value of the tip parameter till the exchange recommended value V1 is reached may be counted down.
In the above case, only one wheel tip scribing one surface of the brittle material substrate P is provided. However, a plurality of scribe heads may be provided for the same surface so that a scribe device capable of simultaneously scribing a plurality of portions of the surface It may be in a form to be used. In such a case, the determination of the usable parts or the judgment of the replacement is made with respect to the wheel tip provided to each scribe head.
The scribing processing system may have means for automatically replacing the tip holder 10 provided in the holder joint 20 (holder automatic changing means). In such a case, it is preferable that the holder automatic replacement means replace the tip holder 10 in response to notifying the controller 121 or 251 that the wheel tip 1 can not be used or is in a recommended replacement state .
