KR20130118455A - An exhaust pipe for emitting a by-product gas of semiconductor process - Google Patents

Abstract

PURPOSE: An exhaust pipe for discharging byproduct gases in a semiconductor process is provided to reduce time and costs for an installation and a reinstallation by supplying flexibility in a first installation process. CONSTITUTION: A corrugated connection pipe (10) is made of SUS materials and includes a lower corrugated connection pipe which is vertically corrugated in a pipe direction. A hot wire (20) is wound around the corrugated connection pipe. A thermal insulation layer (30) is made of thermal insulation materials and is coated on the outer surface of the wound hot wire. The hot wire and the thermal insulation layer are coated on the outside of the lower corrugated connection pipe.

Description

An exhaust pipe for emitting a by-product gas of semiconductor process

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a process exhaust pipe for exhausting a byproduct gas of a semiconductor process, and to a process exhaust pipe of a semiconductor process having a reduced cost of modification and relocation of a process exhaust facility and a reduced degree of deposition of gaseous dispersion.

1 is a diagram illustrating a path through which a by-product gas of a semiconductor process is discharged.

The process chamber 1 is a space for performing various processes such as deposition and etching on a wafer, which is a material of a semiconductor. At this time, only 10% or less of the process gas flowing into the process chamber is used for the process, and the remaining 90% is discharged through the process exhaust pipe 2 and the external exhaust pipe 5, and the remaining gas discharged is called by-product gas.

This by-product gas creates various problems inside the discharge path. The biggest problem is that various by-product gases are chemically reacted and solidified, which causes them to solidify inside the exhaust pipe and block the exhaust pipe, which causes various problems in the process chamber in connection with the pressure control of the process gas. Shutting down the semiconductor process causes a lot of losses.

In order to prevent this, a technology of adding various steps to prevent the by-product gas sticking through various accessory devices such as a pump (3), a scrubber (4), and other valves is used in the discharge path of the same by-product gas. . This step includes a heating step. In other words, by providing a certain amount of external energy to maintain the gas state to prevent the sticking phenomenon in the piping of the by-product gas. In other words, process exhaust pipes having such a heating function are installed in the discharge path of the by-product gas.

However, the existing process exhaust pipe installed in the conventional by-product gas discharge path as described above has the following problems.

First, it is expensive to change the structure and location of the exhaust system. The conventional process exhaust pipe is a type in which electric heating wire is wound around a pipe made of general synthetic resin and metal. This conventional process exhaust pipe has to disassemble the windings and pipes and repeat the reassembly and rewinding when the structure and position of the accessories 3, 4 are changed or new accessories are added. This is especially true for the maintenance of existing installations, and further increases the time and cost, because the safety of the existing by-product gas is to be kept in mind.

Second, existing pipes and heating equipment can not be recycled, resulting in double costs. If the location of accessories in the by-product gas discharge path, such as pumps, valves and scrubbers, is changed, existing pipes may not be available. In other words, if any of the lengths, diameters and shapes of pipes change, existing pipes become useless and new pipes must be rebuilt. The same applies to electric heating wires and other accessories. This causes a problem of double investment of material and manufacturing cost.

Third, existing pipes have limitations in their connection structure, which deepens the sticking phenomenon of by-products. Existing piping structure is generally composed of a combination of a plurality of straight pipes and trap-type parts installed in their connection portion. However, since these connecting parts are not produced at various angles, the shape of the connected pipe is likely to be a rather complicated structure in which the connection parts of 90 and 45 degrees are generally present in various parts. Since complex or angled pipe structures act as resistance to fluid flow, these conventional pipes have a problem of deepening the sticking and accumulation of the by-products.

Accordingly, the present invention has been made to solve the above problems, the object of the present invention relates to a semiconductor process by-product gas exhaust pipe that is easy to be relocated and installed accordingly even if the by-product discharge path of the semiconductor process is modified and rearranged.

The present invention for solving the above-described problems, the process exhaust pipe 100 for exhausting the by-product gas of the semiconductor process, formed of stainless steel as a tubular member of the corrugated shape perpendicular to the extending direction of the tubular shape Corrugated pipe (10) ; An electrically conductive wire-shaped member, the heating wire (20) wound outside the corrugated connector (10 ); And a pipe-shaped member formed of a flexible heat insulating material, the heat insulating material layer 30 being applied to and positioned on the outer circumferential surface of the wound heating wire 20.

In one embodiment, the heat insulating material layer 30, the first insulating material layer 31 is applied in contact with the outside of the heating wire as a member of the glass wool material ; An aluminum thin film member, the second insulating material layer 32 being coated in a film form in contact with the outside of the first insulating material layer ; As the silicon material member, a third heat insulating material layer 33 applied to the outside of the second heat insulating material layer is used.

In one embodiment, the heating wire 20 is characterized in that wound around the corrugated bone portion of the corrugated connector.

In one embodiment, the corrugated connector 10 is made of a stainless steel material as a tubular member and at least one lower corrugated connector 12a, 12b, .. corrugated perpendicular to the direction of travel of the tube . .) , And the end surface portion of one end of the lower wrinkle connection pipe (12a, 12b, ...) and the other end of the other end facing each other by welding to each other, the heating wire 20 and the heat insulating material layer (30) Is characterized in that the entire application is located on the outside of the combined lower fold connector.

In one embodiment, the lower pleated connector 12 further includes a cross-sectional weld 13 of the one end of the lower pleated connector tube protruded in a direction perpendicular to the extending direction of the lower pleated connector, By welding the cross-section welds are characterized in that the different lower corrugated connection pipe is connected.

In one embodiment, the corrugated connecting tube 10 is a tubular member, made of a stainless material and corrugated inner corrugated connecting tube 42 with respect to the tubular traveling direction; A tubular member positioned in a shape of applying the inner pleated connector in the outer side of the inner pleated connector, consisting of a stainless material and corrugated in the shape of the tubular traveling direction 44 It includes, the heating wire 20 is wound between the inner fold connecting pipe 42 and the outer fold connecting pipe 44, the insulation layer 30 is the outside of the outer fold connecting pipe 44 It is characterized by being applied to.

In one embodiment, the gap (d2) of the wrinkles formed in the outer wrinkle connecting tube is characterized in that formed larger than the gap (d1) of the wrinkles formed in the inner wrinkle connecting tube.

In one embodiment, the interval d2 of the pleats formed in the outer wrinkle connecting tube is an integer multiple of the interval d1 of the pleats formed in the inner wrinkle connecting tube.

In one embodiment, the number of turns of the heating wire 20 is larger than the number of winding of the heating wire located in the inlet (P1) of the exhaust pipe that the number of turns of the heating wire located in the outlet (P2) of the process exhaust pipe. It features.

According to the present invention, since the inner pipe is formed of a corrugated pipe and the outer pipe is also formed of a flexible material, the entire exhaust pipe has flexibility, thereby allowing the user to form a curved surface at will. This provides flexibility in the initial installation of the exhaust pipe, reducing time and cost during installation and reinstallation. In addition, the free space design allows efficient use of the workplace.

In addition, according to the present invention, even if the structure and location of the existing equipment, such as pumps, valves, scrubbers, and the like is required to change the existing exhaust pipe and attached equipment can be recycled as it is, material costs when changing the equipment of the semiconductor factory And reassembly time is significantly reduced.

In addition, according to the present invention, the degree of by-product deposition of the exhaust pipe is significantly reduced. This is due to the selectivity of the free bend angle of the exhaust pipe.

In addition, according to the present invention, by the combination of the inner pleated tube and the outer pleated tube can be formed more easily and maintain the strength.

In addition, according to the present invention, when the inner and outer corrugated pipes are combined, the gap between the corrugated pipes and the outer corrugated pipes can be increased to increase the degree of smoothing and to increase durability.

In addition, according to the present invention, the number of windings of the inlet and outlet of the exhaust pipe are different from each other to maximize the heat transfer efficiency and the control efficiency thereof.

1 is a diagram illustrating a path through which a by-product gas of a semiconductor process is discharged.
2 and 3 are an external perspective view and an exploded perspective view showing the by-product gas process exhaust pipe 100 according to the first embodiment of the present invention.
4 is a perspective view of the corrugated connector 10.
5 is an enlarged view of a wrinkled portion of the corrugated connector of FIG. 4.
6 is a perspective view of a by-product gas exhaust pipe according to the present invention.
7 is a view showing the effect of the present invention, a comparative example of the piping structure that can be implemented.
8 is a cross-sectional view of the by-product gas exhaust pipe according to the second embodiment of the present invention.
9 is a perspective view of the corrugated connector according to the embodiment of FIG.
10 is an enlarged view of a connection portion of the corrugated connector of the embodiment of FIG.
11 is a cross-sectional view of the by-product gas exhaust pipe according to the second embodiment of the present invention.
12 is a cross-sectional view of the by-product gas exhaust pipe according to the third embodiment of the present invention.
13 is a cross-sectional view of the by-product gas exhaust pipe according to the fourth embodiment of the present invention.
14 is a cross-sectional view of the by-product gas exhaust pipe according to the fifth embodiment of the present invention.
15 is a view illustrating various forms of corrugated pipe cross section as various embodiments of the present invention.

Hereinafter, embodiments of the present invention will be described.

2 and 3 of the present invention In the first embodiment  Showing by-product gas process exhaust pipe 100 according to Appearance  And It is an exploded perspective view. 4 is a corrugated connector 10 Perspective view 5 is a corrugated portion of the corrugated connector of FIG. It is an enlarged view 6 is a perspective view of a by-product gas exhaust pipe according to the present invention, and FIG. 7 is a view showing the effect of the present invention, which is a pipe structure that can be implemented. It is a comparative example .

As shown in FIG. 2, the semiconductor process byproduct gas process exhaust pipe 100 according to the present invention includes a corrugated connection pipe 10, a heating wire 20, and a heat insulation layer 30.

Corrugated connection tube 10, as shown in Figure 4, is formed of a stainless steel material as a tubular member and includes a corrugated shape perpendicular to the extending direction of the tube.

As shown in Figure 4, each end of the corrugated pipe is not wrinkled because the first end does not need to form a curved shape, so the wrinkle shape is not necessary and the second rather end is exposed to the outside This is because it is necessary to maintain the strength to some extent.

The inside of the corrugated connector is coated with a compound of an inner coating agent. This compound includes fluororesin, palylene, DIX and the like. This is to prevent the corrugated pipe from being chemically damaged by the by-product gas.

In a preferred embodiment, the diameter of the corrugated connector is 30mm to 300mm.

In a preferred embodiment, the thickness of the corrugations is between 0.1 and 0.5 mm and the thickness of the distal ends is between 1 and 4 mm. The thinner the pleats, the greater the flexibility than the strength, and the thicker the end of the thicker than the flexibility. On the other hand, the thickness of the pleats is the thickness selected as the thickness to achieve the minimum strength required for installation and curved surface formation.

The heating wire 20 is an electrically conductive wire-shaped member and is wound outside the corrugated connector. The heating wire is formed of a metallic member such as copper and an outer covering member.

The heat insulating material layer 30 is a tubular member formed of a heat insulating material, and is coated and positioned on the outer circumferential surface of the wound heating wire 20. Here, the insulating material includes glass fiber, silicon, and the like (flexible).

In one embodiment, as shown in FIG. 3, the insulation layer 30 includes a first insulation layer 31, a second insulation layer 32, and a third insulation layer 33.

The first insulation layer 31 is applied to the outside of the heating wire 20 as a member of glass wool (glass wool) material. Glass wool (glass wool) is a glass component contained in the interior of the fibrous material, such as wool, and excellent heat insulation to prevent heat loss due to conduction.

The second heat insulating material layer 32 is a member of an aluminum thin film shape and is coated in a film form in contact with the outside of the first heat insulating material layer. Since the second heat insulating material layer 32 is an aluminum thin film member, the second heat insulating material layer 32 mainly functions as a heat reflection insulating material that blocks heat radiation.

The third insulation layer 33 is a member made of silicon and is applied to the outside of the second insulation layer. Silicon is suitable for being located at the outermost part of the heat insulating material layer 33 because it has a function to protect external wear and internal coating while having some heat insulation. In addition, silicone is suitable for the third insulation layer because it is easy to process into a final pipe form after curing in the form of a highly viscous liquid.

According to this embodiment, since the insulation layer is divided into three layers each having an independent function, the insulation function of the heating wire is improved to improve the heating function of the exhaust pipe, and as a result, the deposition phenomenon of the by-product gas is more efficiently. It can prevent.

As shown in Fig. 5, in a preferred embodiment, the heating wire is wound around the corrugations of the corrugated pipe. The reason is that the closer the winding position is to the valley, the more the contact area between the hot wire and the corrugated connector increases and the heat conduction efficiency increases.

In addition, the wrinkle length (d) of the corrugated pipe is preferably 2mm to 10mm. This is because if the curvature of the exhaust pipe is too large or the curvature radius is increased too much, if it is too large, the thickness of the corrugated pipe is significantly reduced.

6 is a perspective view of the embodiment of FIG. 2 . The end of the corrugated connector is exposed to the outside of the heat insulating material layer 30, the heating wire 20 is included inside the heat insulating material layer. In addition, the terminal 64 for connecting the heating wire to the outside is exposed to the outside of the heat insulating material layer, if necessary, a temperature sensor 62 for measuring the temperature of the corrugated connector can be mounted on the outer surface of the corrugated connector.

7 is a view showing the effect of the present invention, the piping structure that can be implemented It is a comparative example .

According to the present invention, since the inner pipe is formed of a corrugated pipe and the outer pipe is also formed of a flexible material, the entire exhaust pipe has flexibility, thereby allowing the user to form a curved surface at will. This provides flexibility in the initial installation of the exhaust pipe, reducing time and cost during installation and reinstallation. In addition, the free space design allows efficient use of the workplace.

In addition, according to the present invention, even if the structure and location of the existing equipment, such as pumps, valves, scrubbers, and the like is required to change the existing exhaust pipe and attached equipment can be recycled as it is, material costs when changing the equipment of the semiconductor factory And reassembly time is significantly reduced.

In addition, according to the present invention, the degree of by-product deposition of the exhaust pipe is significantly reduced. This is due to the selectivity of the free bend angle of the exhaust pipe. 7 is a view showing a pipe structure that can be implemented in the prior art (left) and the present invention (right). In other words, the existing pipe had to rely on the connection between the pipe and the connecting member, and the selectable bending angle by the connecting member was limited to 45 and 90, so that the curved surface was relatively large and the angle was large, which significantly reduced the fluid velocity. As a result, the degree of deposition of by-product gas was relatively high. However, according to the present invention, since the piping structure to be implemented, for example, 45 degrees-> 90 degrees-> 45 degrees, can be configured at an angle of 75 degrees-> 75 degrees as a whole, the number and angles of the bent portions are significantly reduced, so that the fluid It is possible to significantly reduce the degree of deposition of the by-product gas by improving the gas traveling speed. In particular, the degree can be further increased without bending one particular location, and the degree of deposition of by-product gas is significantly reduced.

FIG. 8 is a cross- In the second embodiment  9 is a cross-sectional view of the by-product gas exhaust pipe, and FIG. Example  Of corrugated connectors Perspective view , Degree 10 is  Of FIG. 8 Example  Of the connection part of the crimp connector It is an enlarged view .

In the present embodiment, the corrugated connector 10 includes at least one lower corrugated connector 12a, 12b, ..., as shown in Figure 9, the end of the end portion of the lower corrugated connector It is characterized in that the coupling by welding the cross-section portion of the other end facing each other with each other. At this time, the lower wrinkle connecting pipe is a tubular main material is formed in the wrinkles in the extension direction of the pipe.

In this embodiment, the heat insulating material layer 30 is located as a whole is applied to the outside of the plurality of lower corrugated connection pipes as shown in FIG. Here, a plurality of sub-wrinkle connectors means all of the sub-wrinkle connectors that are included and connected as a unit forming a single pipe. That is, it means a thermal insulation unit.

According to this embodiment, even when the length of the pipe is increased, it is easy to coat the inner coating agent of the lower wrinkle connecting pipe. As described above, an inner coating agent such as a fluororesin is applied to the inside of the corrugated connector. However, if the length of the corrugated pipe is increased, the coating operation of the inner coating agent is impossible. This is because there is a limit to the coatable length by the nozzle when applying to a narrow area of pipe shape. In particular, since the inside of the corrugated pipe is wrinkled, this phenomenon is further increased. The present embodiment solves this problem by connecting a plurality of lower fold connecting pipe composed of one small length, that is, the maximum length capable of applying the inner coating agent.

In addition, even when connecting a plurality of sub-wrinkle tube, the heating wire and the insulation layer is to be applied to the outside of the sub-wrinkle tube as a whole to increase the efficiency of heat conduction.

Fig. In the second embodiment  The cross-sectional view of the by-product gas exhaust pipe according to.

According to the present embodiment, the lower wrinkled connection pipe 12 further includes a cross-sectional weld 13 having a shape in which one end of the lower wrinkled connection pipe protrudes in a direction perpendicular to the extending direction of the lower wrinkled connection pipe. . At this time, each of the lower corrugated connection pipe is welded to each other the cross-sectional welding portion 13 facing each other.

According to this embodiment, a space for welding is provided to facilitate the coupling of the lower pleated connector. The connection of the sub-pleated connector is achieved by welding. Generally, the thickness of the sub-pleated connector is very small, so welding is not desired. In this embodiment, this problem is solved by increasing the welding area (A).

Fig. 12 is a cross- In the third embodiment  The cross-sectional view of the by-product gas exhaust pipe according to.

Corrugated connection pipe 10 of the present embodiment includes an inner wrinkle connection pipe 42 and the outer wrinkle connection pipe (44).

The inner corrugated connecting pipe 42 is a tubular member, which is made of stainless material and is corrugated in the traveling direction of the pipe.

The outer wrinkle connecting pipe 44 is a tubular member positioned in a shape to apply the inner wrinkle connecting pipe from the outside of the inner wrinkle connecting pipe, and is made of stainless material and has a corrugated shape with respect to the advancing direction of the pipe.

Here, the heating wire 20 is wound between the inner wrinkle connection pipe 42 and the outer wrinkle connection pipe 44, the insulation layer 30 is applied to the outside of the outer wrinkle connection pipe 44 have.

In one embodiment the ends of the inner and outer corrugated connectors are welded to each other. The welding portion 52 may be each end of the inner and outer wrinkle connecting pipes, or may be where the end of the outer wrinkle connecting pipe and the end portion of the inner wrinkle connecting pipe start.

According to this embodiment, the corrugation operation is smoothly achieved for the same intensity. In order to increase the strength of the corrugated pipe, it is necessary to increase the thickness of the corrugated portion, but in this case, the flexibility is reduced. In the opposite case, flexibility increases, but is easily damaged by external forces. In this embodiment, in order to compensate for this, a thin corrugated pipe is overlapped and disposed. As a result, the overall strength and durability are increased by the double-arranged corrugated pipe without reducing the softness by maintaining a thin thickness.

In addition, according to the present embodiment, since the hot wire is surrounded at the bottom and the top by the inner and outer corrugated connection pipe, the heat loss is reduced, and as a result, the heating performance is increased, thereby reducing the deposition degree of the by-product gas.

FIG. 13 is a cross- In the fourth embodiment  The cross-sectional view of the by-product gas exhaust pipe according to.

In the modified embodiment of Figure 12, the interval of the pleats formed in the inner and outer fold connection tube, the spacing (d2) of the pleats formed in the outer pleat connector pipe gap (d1) It is characterized in that it is formed larger.

According to this embodiment, the smoothness and the retention of the bending work of the corrugated pipe increase. When the corrugated connector is formed in double, the degree of bending of the inner and outer wrinkle connector is different. That is, since the diameter (a1) of the inner wrinkle connection tube is smaller than the diameter (a2) of the outer wrinkle connector, the degree of bending of the inner wrinkle connector, that is, the degree of bending, is more rapid. Therefore, in the present embodiment, the smoothness of the bending work was increased by different wrinkle intervals.

In addition, according to this embodiment, the risk of breakage of the inner corrugated connection pipe is reduced and the durability is increased. In the case where the inner and outer corrugated pipes have the same crease spacing, if the operator bends the outer corrugated pipe by a desired angle, the inner corrugated pipe is bent too excessively and the inner corrugated pipe is damaged or at least reduced durability. This problem is particularly acute because the inner fold connector is not visible from the outside. In the present embodiment, the wrinkle interval is larger than the inside, thereby limiting the degree of bending of the inner pleated connector, preventing the risk of breakage of the inner pleated connector and increasing durability.

Meanwhile, in another embodiment, the pleat spacing d2 of the outer pleated connector is an integer multiple of the pleat spacing d1 of the inner pleated connector (ie, d2 = k * d1, k is an integer).

According to this embodiment, the smoothness of the bending work of the corrugated pipe increases and the durability increases. This is because a corrugated pipe made of a combination of wrinkle intervals that differ by an integral multiple has a high probability of occurring in the corrugated part when both the inside and the outside are bent at the same time. For example, when the outer corrugation tube is bent, the user stretches or bends the corrugated portion of the corrugation, if the flexion position is not the inner corrugated tube, the bending work is more difficult or at least with respect to the metal that is the material of the corrugated tube. Fatigue will increase. Therefore, in the present embodiment, the difference between the wrinkle intervals is an integer multiple, so that both the positions where the bending work occurs are generated in the bone portion, thereby improving the workability and durability of the corrugated pipe.

14 shows the present invention In the fifth embodiment  The cross-sectional view of the by-product gas exhaust pipe according to.

In this embodiment, the number of turns of the heating wire is different for each position of the corrugated connector. That is, the number of turns of the heating wire 30 is the number of turns N2 of the heating wire located at the outlet P2 of the exhaust pipe rather than the number N1 of the heating wire located at the inlet P1 of the exhaust pipe of the present invention. It is characterized by a larger.

According to this embodiment, the uniformity of the heating of the exhaust pipe can be increased to more efficiently reduce the deposition degree of the by-product gas. In general, as the by-product gas proceeds to the outside, the temperature of the fluid is usually decreased. Therefore, the closer to the outside, that is, the closer to the outlet, the more the number of turns to increase the uniformity of the heating. Of course, the temperature sensor can control the heating more frequently to the place where it goes down to the critical point more frequently, but it is better to reduce the number of switching operations by the control if the control itself is costly. In the present invention, since a certain degree of heating is already controlled through the number of turns, even if a control system is made, the number of switching is reduced, the cost is reduced, and the efficiency of the control itself is increased.

In this embodiment, the number of turns is adjustable according to the position of the exhaust pipe, such as when a separate heater is provided as an accessory. For example, if a heating device is provided in the middle, the temperature of the heating device is higher than that of the heating device even though the output terminal of the heating device is close to the outside. In this case, therefore, the number of turns must be reversed.

15 is a variety of the present invention As an example Corrugated pipe  It is a figure which shows the various forms of a cross section.

The corrugated tube of the present invention includes various corrugated forms as long as it has flexibility. 15 (reference numerals 1501, 1502, 1503) shows three examples of such wrinkles. The corrugation means a shape in which narrow and wide portions are repeatedly and regularly arranged in cross section so that the tubular member has flexibility. The narrow part is made of the corrugated tube to achieve the bending shape of the tube as a whole.

The various embodiments of the present invention described above can be implemented in various combinations with each other without contradicting the causal relationship between the configurations and effects of the present invention. For example, it is possible to combine the lower fold connector and the three insulation layers, and the embodiment of the dual fold connector can be implemented, and the number of windings of the heating wire different while implementing the lower fold connector Embodiments are also possible.

Exhaust Pipe (100) Crimp Connector (10)
Hot wire (20) insulation layer (30)
Lower pleated connector (12) Temperature sensor (62)
Inner Wrinkle Tube (42) Outer Wrinkle Tube (44)

Claims (9)

As a process exhaust pipe 100 for exhausting a by-product gas of a semiconductor process,
A corrugated connector tube 10 formed of stainless steel as a tubular member and corrugated perpendicularly to the tubular extension direction;
An electrically conductive wire-shaped member, the heating wire (20) wound outside the corrugated connector (10 ); And
A pipe-shaped member formed of a flexible heat insulating material, the exhaust gas by-product of the semiconductor process characterized in that it comprises a heat insulating material layer 30 is applied to the outer peripheral surface of the wound heating wire (20). Process exhaust pipe. The method of claim 1, wherein the heat insulating material layer 30,
A first heat insulating material layer 31 applied to the outside of the heating wire as a member of glass wool material ;
An aluminum thin film member, the second insulating material layer 32 being coated in a film form in contact with the outside of the first insulating material layer ;
A process exhaust pipe for exhausting a by-product gas of a semiconductor process, comprising a third insulation layer (33) applied to the outside of the second insulation layer as a member of a silicon material. The process exhaust pipe according to claim 1, wherein the hot wire (20) is wound around the corrugated valley portion of the corrugated connector. The method of claim 1,
The corrugated connecting tube 10 is made of stainless steel as a tubular member and includes at least one lower corrugated connecting tube 12a, 12b,... Corrugated perpendicularly to the traveling direction of the tube. ,
End sections of one end of the lower-pleated connection pipes 12a, 12b, ... are welded to each other with end sections of the other ends that face each other,
The heating wire 20 and the heat insulating material layer 30 is characterized in that the entire application is located on the outside of the combined lower wrinkle connection pipe According to claim 1, wherein the lower wrinkle connection pipe 12, One end of the lower wrinkle connection pipe further comprises a cross-sectional weld portion 13 of the shape protruding in a direction perpendicular to the extending direction of the lower wrinkle connection pipe; And exhaust gas by-products of the semiconductor process, characterized in that different end wrinkle connection pipes are connected by welding the end face weld parts. According to claim 1, The corrugated connector 10 is,
A tubular member, comprising: a stainless material and having an inner corrugated connection pipe 42 corrugated with respect to the tubular traveling direction;
A tubular member positioned in a shape of applying the inner pleated connector in the outer side of the inner pleated connector, consisting of a stainless material and corrugated in the shape of the tubular traveling direction 44 Including,
The heating wire 20 is wound around the inner fold connecting pipe 42 and the outer fold connecting pipe 44,
The insulation layer 30 is a process exhaust pipe for exhausting the by-product gas of the semiconductor process, characterized in that applied to the outside of the outer wrinkle connecting pipe (44). The method according to claim 6,
And a gap (d2) of the wrinkles formed in the outer wrinkle connection tube is larger than a gap (d) of the wrinkles formed in the inner wrinkle connection tube. The method according to claim 6,
And a gap d2 of the wrinkles formed in the outer wrinkle connecting tube is formed by an integral multiple of the spacing d1 of the wrinkles formed in the inner wrinkle connecting tube. The number of turns of the heating wire 20 is larger than the number of windings of the heating wire located in the inlet (P1) of the exhaust pipe is larger than the number of windings of the heating wire located in the outlet (P2) of the process exhaust pipe. Process exhaust pipe for exhausting the by-product gas of the semiconductor process.

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