KR20130117536A - Anti-static sheet coated with nano film and manufacturing method thereof - Google Patents

Abstract

PURPOSE: A sheet having an antistatic function which is coated with a nano thin film, and a manufacturing method thereof are provided to obtain the antistatic sheet having excellent physical property with a simple process. CONSTITUTION: A sheet having an antistatic function is obtained by coating a conductive carbon layer in the nano thickness on a polymer sheet (100). The resistance of the sheet is 106-1,010 Ohm/sq. A manufacturing system for the sheet having the antistatic function includes a vacuum chamber, an ion gun (200) installed on the vacuum gun, and a drum rolling the polymer sheet and supplying in a roll-to-roll method for depositing the conductive carbon layer using plasma generated from the ion gun. The ion gun includes heaters (300, 400).

Description

Anti-Static Sheet Coated with Nano Film and Manufacturing Method Thereof}

The present invention relates to a sheet having an antistatic function, and more particularly to a new technology for producing a sheet having an antistatic function using a new material.

Sheets having an antistatic function are used as sheets or antistatic adhesive tapes for protecting electronic parts such as semiconductors, which are fatal to static electricity. In addition, sheets having an antistatic function are used to prevent adsorption of contaminants such as dust and generation of static electricity.

Conventional antistatic sheet fabrication methods include a metal material such as aluminum (Al), nickel (Ni), copper (Cu) and indium oxide using a sputter source by PVD (Physical Vapor Deposition) method using vacuum equipment. (In ₂ O ₃ ), tin oxide (SnO) and the like are deposited on a general polymer sheet to form a conductive / electrostatic dissipative sheet.

During the sheet fabrication process having the antistatic function produced by the above-described PVD method and / or after the completion of the fabrication process, the bond strength between the polymer sheet and the deposited metal thin film is low, so that the metal thin film falls off, thus preventing the antistatic function and contaminating the surroundings. have.

Another method for producing a sheet having an antistatic function is to use a surfactant. An external coating type for applying a surfactant to the surface of the polymer resin film and an internal incorporation of an antistatic surfactant at the time of manufacturing the polymer resin film There is a brother. In the former case, the manufacturing cost is low and the initial performance is good, but since the antistatic surfactant is coated on the surface of the film, the durability and durability of the antistatic function are poor, and it has a problem of contaminating other materials contacted during use.

In the case of the internally mixed type, the durability and durability are superior to the former, the manufacturing cost is low, and the manufacturing process is simple.

However, all of the sheets having the antistatic function known to date have good initial performance but have a poor sustainability, and thus lose electrostatic dissipation efficacy after a certain time.

In addition, in the case of solving the above problems to some extent, for example, in the case of an antistatic sheet in which a metal thin film and a DLC (Diamond Like Carbon) thin film are alternately laminated, the manufacturing process is not simple, and thus the effort for manufacturing equipment cost and process implementation There is a problem that the manufacturing cost rises.

Accordingly, it is an object of the present invention to provide a sheet having a new antistatic function which can be used continuously with excellent antistatic function and with durability, lubricity and chemical non-reactivity, and a method of manufacturing the same, with a simpler process system.

Accordingly, the present invention produced an antistatic sheet coated with a conductive carbon layer having a nano size thickness on the polymer sheet.

In addition, the present invention in the manufacture of the antistatic sheet, the heater is mounted on the ion gun, the polymer sheet is wound around the drum to deposit a conductive carbon layer to a nano-size thickness in a roll-to-roll method, the heat resistance limit of the polymer sheet In view of this, a cooling device is provided on the drum to prevent denaturation of the polymer sheet.

In addition, the present invention, the resistance of the antistatic sheet is from 10 ⁶ to An antistatic sheet can be provided which is in the range of 10 ¹⁰ Ω / sq.

In addition, the present invention can provide an antistatic sheet, wherein the conductive carbon layer is formed to a thickness of 1 to 50 nm.

Further, according to the present invention,

A vacuum chamber;

An ion gun installed in the vacuum chamber; and

And a drum for winding a polymer sheet to which the conductive carbon layer is to be deposited by plasma by the ion gun and supplying the roll-to-roll method.

The ion gun may provide an antistatic sheet manufacturing system, characterized in that the heating heater is mounted.

In addition, the present invention can provide an antistatic sheet manufacturing system, characterized in that the cooling device is provided on the drum.

In addition, the present invention can provide an antistatic sheet manufacturing system, further comprising a heater for a vacuum chamber.

In addition, the present invention, the ion gun heating heater may provide an antistatic sheet manufacturing system, characterized in that it comprises a heater for heating the gas supply portion and the heater for heating the ion gun front portion facing the plasma generating region.

Further, according to the present invention,

In a vacuum chamber, the polymer sheet is wound on a drum and supplied in a roll-to-roll manner,

Supplying heated hydrocarbon to deposit a conductive carbon layer on the polymer sheet,

Plasma is generated in the vacuum chamber by the plasma generating source,

The conductive carbon layer is deposited on the polymer sheet using the plasma, and a cooling device is installed on the drum wound around the polymer sheet to prevent the modification of the polymer sheet and to deposit the conductive carbon layer on the polymer sheet to produce an antistatic sheet. An antistatic sheet manufacturing method can be provided.

In addition, the present invention can provide a method for producing an antistatic sheet, wherein the plasma generating source is an ion gun, and the hydrocarbon gas supplied by attaching a heater to the ion gun is heated.

In addition, the present invention can provide an antistatic sheet manufacturing method characterized in that the temperature during the process in the vacuum chamber is maintained at 200 to 500 ℃.

In addition, the present invention, the resistance of the antistatic sheet is from 10 ⁶ to 10 antistatic sheet, characterized in that in the range of ¹⁰ Ω / sq. It is possible to provide a process for producing the same.

According to the present invention, a conductive carbon thin film having an antistatic function having a resistance of 10 ⁶ to 10 ¹⁰ Ω / □ by supplying a gas heated to a high temperature and generating a plasma at a high temperature by a heater mounted on an ion gun By depositing a nano-sized thickness on the surface of the polymer sheet, it is possible to produce an antistatic sheet having better physical properties in a simple process than the conductive thin film implemented as a conventional multilayer thin film.

The present invention has a high productivity using a roll-to-roll method. Accordingly, the polymer sheet is wound around the drum to rotate the drum, and a cooling device is installed on the drum to prevent deterioration of the polymer sheet despite the high temperature process. can do.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic diagram of a deposition system used in the present invention, which shows a process of depositing a polymer sheet around a ion gun equipped with a heater and a drum provided with a cooling device.
2 is a cross-sectional view showing a more detailed configuration of the ion gun of the present invention.
3 is a cross-sectional view showing the layered configuration of the antistatic sheet manufactured according to the preferred embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

First, the overall thin film deposition system of the present invention will be described with reference to FIG.

In the present invention, the mounting of the heaters 300 and 400 on the ion gun 200 to deposit the conductive carbon layer 200 on the polymer sheet 100 is one of the main features. That is, the heater 300 is mounted on the gas supply unit of the ion gun 200 to activate the hydrocarbon gas supplied by heating to a high temperature, and the heater 400 is also installed on the front surface of the ion gun 200 to heat the plasma generation region. Thus, the movement of the ions by the plasma field (feild) is further configured.

In addition, a heater for heating the chamber (not shown) for raising the temperature inside the chamber as a whole may be further provided separately.

This high temperature environment decomposes and activates the hydrocarbon gas to help the formation of a conductive carbon layer by plasma, but the polymer sheet 100, which is a base material, is susceptible to heat and thus may be denatured. Accordingly, in the present invention, a cooling device is installed on the drum winding the polymer sheet 100 so that the polymer sheet 100 is not denatured even at a high temperature process. The cooling apparatus may be implemented by flowing cooling water or cooling gas along the drum inner surface.

In the thin film deposition using the ion gun 200 as described above, by using a roll-to-roll (Roll to Roll) method to rotate and supply the base material to the drum can be very high productivity.

2 shows in detail the structure of the ion gun 200 used in the deposition process of the present invention. The self-enhanced ion gun 200 provided with the anode 210 and the cathode 220 and the magnet enables high-density, high-energy plasma generation, thereby suppressing the hydrogen fraction from the hydrocarbons supplied, sp ² , sp ³ bonds are included to form a conductive carbon layer. The conductive carbon layer 110 may be referred to as so-called conductive DLC, but unlike the inherent DLC, graphite-like carbon is included to have sufficient conductivity (sometimes referred to as electrostatic dissipation).

Hereinafter, the manufacturing process of the antistatic sheet of the structure like FIG. 3 is demonstrated in detail.

1) Films such as PI and PET used in this embodiment are inherently electrostatic polymer sheets 100, and are adsorbed onto the polymer sheets 100 using IPA (isopropyl alcohol) before the conductive carbon layer 110 deposition process. It is preferable to wash to remove dust, but this process can be omitted.

2) The washed polymer sheet 100 was wound on a drum equipped with a cooling device, charged in a reaction chamber, fixed to a jig, and the reaction chamber was evacuated to 10 ⁻¹ to 10 ⁻⁶ torr.

3) Argon ions (Ar ⁺ ), oxygen ions, nitrogen ions to remove contaminants such as oxide films that may exist on the surface of the polymer sheet 100 and to facilitate deposition of a desired thin film by activating the surface of the polymer sheet 100. A cleaning process was performed to remove surface contaminants using one or more of the ions.

The cleaning process conditions may vary depending on the amount of the polymer sheet 100 and the degree of contamination, but is usually performed for a short time of less than 1 minute by applying a voltage of 300 to 2500 V through the power supply of the ion gun.

4) Next, in order to deposit the conductive carbon layer 110 on the polymer sheet 100, the ion gun 200 may be CH ₄ , C ₂ H ₂ , C ₆ H ₆ , C ₄ H _10. Hydrocarbon gas, such as, and 300 to 2500 V power is applied to the ion gun to generate a carbon plasma. At this time, in order to increase the plasma density, an inert gas such as argon may be injected together, and the process pressure may be maintained at 10 ⁻¹ to 10 ⁻⁵ Torr. In addition, a voltage of -50 to -200 V at a frequency of 50 to 350 KHz is applied to the drum on which the polymer sheet 100 is wound to control the energy of ions deposited on the polymer sheet 100 and discharge the accumulated charge. . The applied voltage may be a direct current voltage (DC) and the efficiency of the deposition process is improved due to the voltage application, but is not necessary and may be omitted to simplify the equipment and the process.

In addition, the drum is provided with a cooling device to flow cooling water or refrigerant gas, and despite the high temperature (200 to 500 ° C) around the chamber or the ion gun 200, the temperature of the polymer sheet 100 is 150 ° C or less. By maintaining the temperature of the denaturation was prevented.

Due to the dual structure of the temperature distribution, the sufficient heat supply of the base metal and the insufficient heat supply of the base material, which is necessary for the formation of the desired conductive carbon layer 110, are not a problem, thereby increasing the range of utilization of the conductive carbon layer.

The conductive carbon layer 110 may have a thickness of 1 to 100 nm, preferably 1 to 50 nm, in terms of material properties and productivity.

The resistance of the packaging material having an antistatic function produced through the above process has electrostatic dissipation property of 10 ¹⁰ Ω / sq or less.

In particular, the present inventors increase the process temperature around the ion gun at 50 ° C intervals in the range of 200 ° C to 500 ° C by the operation of the heaters 300 and 400 and the chamber heater to the ion gun 200 having a temperature of about 100 ° C. As a result of the experiment, it was found that the static dissipation gradually improved with increasing temperature. This is an increase in the percentage of hydrogen decreases and the graphite-like carbon due to the increase jeonrido and atomic arrangement change during the deposition of the gas due to heating guess the cause, if further broaden the range of temperatures, and the resistance of the antistatic sheet accordingly is ^{from 6} to 10 It can be seen that it may have a range of 10 ¹⁰ Ω / sq.

The rights of the present invention are not limited to the embodiments described above, but are defined by the claims, and those skilled in the art can make various modifications and adaptations within the scope of the claims. It is self-evident.

100: polymer sheet
110: conductive carbon layer
200: ion gun
210: anode
220: cathode
300, 400: heater
500: drum

Claims (10)

An antistatic sheet characterized by coating a conductive carbon layer having a nano size thickness on a polymer sheet. The method of claim 1, wherein the resistance of the antistatic sheet is from 10 ⁶ to An antistatic sheet having a range of 10 ¹⁰ Ω / sq. The antistatic sheet according to claim 1, wherein the conductive carbon layer is formed to a thickness of 1 to 50 nm. A vacuum chamber;
An ion gun installed in the vacuum chamber; and
And a drum for winding a polymer sheet to which the conductive carbon layer is to be deposited by plasma by the ion gun and supplying the roll-to-roll method.
The ion gun is an antistatic sheet manufacturing system, characterized in that the heating heater is mounted. The antistatic sheet manufacturing system according to claim 4, wherein the drum is provided with a cooling device. 6. The antistatic sheet manufacturing system according to claim 4 or 5, wherein the ion gun heating heater includes a gas supply heating heater and an ion gun front heating part facing the plasma generating region. In a vacuum chamber, the polymer sheet is wound on a drum and supplied in a roll-to-roll manner,
Supplying heated hydrocarbon to deposit a conductive carbon layer on the polymer sheet,
Plasma is generated in the vacuum chamber by the plasma generating source,
The conductive carbon layer is deposited on the polymer sheet using the plasma, but a cooling device is installed on the drum wound around the polymer sheet to prevent the polymer sheet from being denatured and the conductive carbon layer is deposited on the polymer sheet to produce an antistatic sheet. An antistatic sheet manufacturing method. 8. The method for producing an antistatic sheet according to claim 7, wherein the plasma generating source is an ion gun, and the hydrocarbon gas supplied by attaching a heater to the ion gun is heated. The method of claim 7, wherein the temperature is maintained at 200 to 500 ° C. during the process in the vacuum chamber. 8. The method of claim 7, wherein the resistance of the antistatic sheet is from 10 ⁶ to 10 ¹⁰ Ω / sq. The antistatic sheet manufacturing method characterized by the above-mentioned.

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