KR20130112882A - 유기 전자 디바이스의 제조 방법 - Google Patents

유기 전자 디바이스의 제조 방법 Download PDF

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Publication number
KR20130112882A
KR20130112882A KR1020137008504A KR20137008504A KR20130112882A KR 20130112882 A KR20130112882 A KR 20130112882A KR 1020137008504 A KR1020137008504 A KR 1020137008504A KR 20137008504 A KR20137008504 A KR 20137008504A KR 20130112882 A KR20130112882 A KR 20130112882A
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KR
South Korea
Prior art keywords
layer
insulator layer
dielectric material
osc
regions
Prior art date
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Withdrawn
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KR1020137008504A
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English (en)
Korean (ko)
Inventor
다비트 크리슈토프 뮐러
토비 쿨
파벨 미스키에비츠
미구엘 카라스코-오로즈코
Original Assignee
메르크 파텐트 게엠베하
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Publication of KR20130112882A publication Critical patent/KR20130112882A/ko
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/191—Deposition of organic active material characterised by provisions for the orientation or alignment of the layer to be deposited
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462—Insulated gate field-effect transistors [IGFETs]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462—Insulated gate field-effect transistors [IGFETs]
    • H10K10/468—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics
    • H10K10/471—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics the gate dielectric comprising only organic materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462—Insulated gate field-effect transistors [IGFETs]
    • H10K10/464—Lateral top-gate IGFETs comprising only a single gate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462—Insulated gate field-effect transistors [IGFETs]
    • H10K10/466—Lateral bottom-gate IGFETs comprising only a single gate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
    • H10K77/10—Substrates, e.g. flexible substrates

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Thin Film Transistor (AREA)
  • Formation Of Insulating Films (AREA)
KR1020137008504A 2010-09-02 2011-08-05 유기 전자 디바이스의 제조 방법 Withdrawn KR20130112882A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP10009116 2010-09-02
EP10009116.4 2010-09-02
PCT/EP2011/003950 WO2012028244A1 (en) 2010-09-02 2011-08-05 Process for preparing an organic electronic device

Publications (1)

Publication Number Publication Date
KR20130112882A true KR20130112882A (ko) 2013-10-14

Family

ID=44629966

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020137008504A Withdrawn KR20130112882A (ko) 2010-09-02 2011-08-05 유기 전자 디바이스의 제조 방법

Country Status (6)

Country Link
US (1) US8883546B2 (https=)
EP (1) EP2612377B1 (https=)
JP (1) JP2013541190A (https=)
KR (1) KR20130112882A (https=)
TW (1) TW201228060A (https=)
WO (1) WO2012028244A1 (https=)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010057984A2 (en) * 2008-11-24 2010-05-27 Basf Se Photocurable polymeric dielectrics and methods of preparation and use thereof
WO2015193818A1 (en) * 2014-06-16 2015-12-23 Sabic Global Technologies B.V. Crosslinkable polycarbonates for material extrusion additive manufacturing processes
JP6505857B2 (ja) * 2015-09-24 2019-04-24 富士フイルム株式会社 有機薄膜トランジスタおよび有機薄膜トランジスタの製造方法
US10382806B2 (en) * 2016-11-14 2019-08-13 DISH Technologies L.L.C. Apparatus, systems and methods for controlling presentation of content using a multi-media table
GB2563191A (en) * 2017-03-15 2018-12-12 Flexenable Ltd Cross-linked polymers
US20210135109A1 (en) * 2017-07-31 2021-05-06 Corning Incorporated Accelerated thermal crosslinking of pvdf-hfp via addition of organic bases, and the usage of crosslinked pvdf-hfp as gate dielectric material for otft devices
GB201810710D0 (en) * 2018-06-29 2018-08-15 Smartkem Ltd Sputter Protective Layer For Organic Electronic Devices
CN110838546A (zh) * 2018-08-17 2020-02-25 康宁股份有限公司 用于有机薄膜晶体管的栅极电介质绝缘体的基于pvdf的聚合物的uv交联
US12360455B2 (en) 2019-02-08 2025-07-15 Brewer Science, Inc. Poly(cyanocinnamate)s for structural and optical applications
US20220045274A1 (en) * 2020-08-06 2022-02-10 Facebook Technologies Llc Ofets having organic semiconductor layer with high carrier mobility and in situ isolation
CN113410384B (zh) * 2021-06-28 2023-04-07 西南大学 一种用于柔性场效应晶体管的聚合物介电层的制备方法

Family Cites Families (17)

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Publication number Priority date Publication date Assignee Title
JP3246189B2 (ja) 1994-06-28 2002-01-15 株式会社日立製作所 半導体表示装置
US6690029B1 (en) 2001-08-24 2004-02-10 University Of Kentucky Research Foundation Substituted pentacenes and electronic devices made with substituted pentacenes
US7279777B2 (en) * 2003-05-08 2007-10-09 3M Innovative Properties Company Organic polymers, laminates, and capacitors
US7098525B2 (en) * 2003-05-08 2006-08-29 3M Innovative Properties Company Organic polymers, electronic devices, and methods
GB2403023A (en) * 2003-06-20 2004-12-22 Sharp Kk Organic light emitting device
EP1687830B1 (en) 2003-11-28 2010-07-28 Merck Patent GmbH Organic semiconducting layer formulations comprising polyacenes and organic binder polymers
KR100592278B1 (ko) * 2004-06-08 2006-06-21 삼성에스디아이 주식회사 박막 트랜지스터 및 이를 구비한 평판표시장치
GB0424342D0 (en) * 2004-11-03 2004-12-08 Avecia Ltd Process and device
KR20070094617A (ko) * 2005-01-05 2007-09-20 세키스이가가쿠 고교가부시키가이샤 실리콘 함유 감광성 조성물, 이를 이용한 박막 패턴의 제조방법, 전자 기기용 보호막, 게이트 절연막 및 박막트랜지스터
US7385221B1 (en) 2005-03-08 2008-06-10 University Of Kentucky Research Foundation Silylethynylated heteroacenes and electronic devices made therewith
JP4349307B2 (ja) * 2005-03-16 2009-10-21 セイコーエプソン株式会社 有機半導体装置の製造方法、有機半導体装置、電子デバイスおよび電子機器
US20060231829A1 (en) * 2005-04-13 2006-10-19 Xerox Corporation TFT gate dielectric with crosslinked polymer
JP2007150246A (ja) 2005-11-02 2007-06-14 Ricoh Co Ltd 有機トランジスタ及び表示装置
JP2007256782A (ja) * 2006-03-24 2007-10-04 Sekisui Chem Co Ltd シリコン含有感光性組成物、これを用いた薄膜パターンの製造方法、電子機器用保護膜、トランジスタ、カラーフィルタ、有機ｅｌ素子、ゲート絶縁膜及び薄膜トランジスタ
US20080161464A1 (en) * 2006-06-28 2008-07-03 Marks Tobin J Crosslinked polymeric dielectric materials and methods of manufacturing and use thereof
KR101224723B1 (ko) * 2006-09-15 2013-01-21 삼성전자주식회사 유기 절연막 조성물, 이를 이용하여 제조된 유기 절연막 및유기 박막 트랜지스터
KR101591101B1 (ko) 2007-03-07 2016-02-03 유니버시티 오브 켄터키 리서치 파운데이션 실릴에티닐화 헤테로아센 및 이로 제조된 전자 장치

Also Published As

Publication number Publication date
JP2013541190A (ja) 2013-11-07
US8883546B2 (en) 2014-11-11
US20130153885A1 (en) 2013-06-20
EP2612377B1 (en) 2019-10-02
TW201228060A (en) 2012-07-01
EP2612377A1 (en) 2013-07-10
WO2012028244A1 (en) 2012-03-08

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Date Code Title Description
PA0105 International application

Patent event date: 20130402

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid