KR20130067985A - A heating apparatus of a pipe fitting section - Google Patents

Abstract

PURPOSE: A heating device of a pipe fitting part is provided to increase the quantity of heat by surrounding and heating first and second outer sockets with a heating jacket. CONSTITUTION: A second inner socket is combined with a first inner socket. A first outer socket(42) is semicircular. A second outer socket(44) is attached to the outer circumference surface of the first and second inner sockets. A fixing ring(50) maintains the combination of the first and second outer sockets. A heating jacket delivers heat.

Description

Heating apparatus {a heating apparatus of a pipe fitting section}

The present invention relates to a pipe fitting heating device, and to a pipe fitting heating device for efficiently heating a pipe fitting connecting the gas pipe or liquid pipes to each other.

In order to ensure that the liquid or gas needs to be transported at a certain temperature in semiconductor manufacturing equipment, chemical processes, vacuum piping, plastic production, etc. Rather, it is necessary to heat the pipe fitting to an appropriate temperature.

For example, semiconductor manufacturing process can be divided into pre-process and post-process. During the process, various ignition gases, corrosive foreign substances and harmful gases are generated inside the process chamber, and these harmful gases are purified in the gas cleaner. Is released. If the reaction product in the form of the gas purified by the gas cleaner is fixed in the form of powder to the external exhaust pipe of the process chamber, the exhaust pressure may be increased and the vacuum pump may fail. In this case, harmful gas flows back into the process chamber to contaminate the wafer. It can cause serious problems. Therefore, the generation of the solid powder is suppressed by heating the pipe through which the gaseous by-products are discharged using the heating jacket and always maintaining the temperature above a certain temperature.

However, the pipe fitting part, which is the part connecting the pipe to the pipe or connecting the pipe to a specific device (hereinafter, all connecting parts to which the pipe is connected) is called a 'piping fitting part', and a nut is installed to connect the pipe to the pipe. Because of the non-circular cross section, when the pipe fitting part is covered with a heating jacket, a space is generated between the nut and the heating jacket, thereby degrading heat transfer efficiency. As such, when the heat transfer is insufficient in the pipe fitting part and thus is not maintained at the required temperature, gas by-products may be stuck to the pipe fitting part to generate a solid powder, thereby increasing the pressure of the pipe.

1.Registered Patent No.0990157 2. Patent No. 0978797

The present invention is to solve the above-mentioned problems of the prior art, an object of the present invention to provide a pipe fitting portion heating apparatus is improved heat transfer efficiency of the pipe fitting portion so that solid powder is not generated in the pipe fitting portion.

Pipe fitting part heating apparatus of the present invention for achieving the object of the present invention, the first inner socket, the first inner socket and the symmetrical shape to surround the nut of the pipe fitting portion is in close contact, and the first inner socket and A second inner socket coupled to wrap around the nut to be in close contact with the outer circumferential surface of the first inner socket, the first outer socket having a semicircular shape, and a symmetrical shape with the first inner socket; The second outer socket is coupled to the socket to be in close contact with the outer circumferential surface of the first and second inner socket, the first outer socket is installed around the outer circumferential surface of the first and second outer socket is coupled to the first and second outer socket It includes a fixing ring for maintaining a, and a heating jacket in close contact with the outer circumferential surface of the first and second outer socket to transfer heat, the inner circumferential surface of the first and second inner socket Is formed with a plurality of grooves and inclined surfaces to be engaged with the edge of the nut, the inner peripheral surface of the first and second outer sockets are formed in the sealing projections and the sealing projections in close contact with the pipe connected to the pipe fittings It is characterized in that the sealing groove is formed.

A cross section of the first and second inner sockets coupled to each other, and a cross section of the first and second outer sockets coupled to each other, may be formed in a circular shape so that heat transfer efficiency from the heating jacket is high.

The inclined portion may be formed at ends of the first inner socket and the second inner socket, respectively.

Upper surfaces of the sealing protrusions formed on the first and second outer sockets may be in contact with an end portion of the first inner socket and an end portion of the second inner socket to seal one side of the inner space of the groove.

In the above-described pipe fitting heating device of the present invention, the first and second inner sockets surrounding the nut and the first and second outer sockets surrounding the nut are installed, and the first and second outer sockets having a larger outer circumferential surface are heated. Since the jacket wraps and heats, the area received from the heating heating jacket increases, so that a large amount of heat can be transferred, thereby increasing the amount of heat transferred to the fitting part.

In addition, the heat transfer efficiency is high because the first and second inner sockets and the first and second outer sockets are in close contact with each other, and the sealing projections of the first and second outer sockets are formed in a plurality of grooves. Less heat is lost because it seals up to a small amount of space formed.

In addition, since the pipe fitting part rotates the nut to connect the pipe, there is a characteristic that the nut may be fixed at any angle. A plurality of grooves and inclined parts are formed in the first and second inner sockets to engage the edges of the nut. Therefore, there is an advantage that easy to install and remove from any angle.

1 is a view showing an example of a piping line generally installed in a semiconductor line or the like,
2 is an exploded perspective view showing a pipe fitting part heating apparatus according to an embodiment of the present invention except for a heating jacket;
3 is a perspective view showing a state in which the pipe fitting part heating apparatus of FIG. 2 is installed in the pipe fitting part.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. In describing the embodiments of the present invention, when it is determined that detailed descriptions of related well-known configurations or functions may obscure the gist of the present invention, the detailed descriptions thereof will be omitted.

1 is a diagram illustrating an example of a line of a pipe 8 generally installed in a semiconductor line or the like. In general, in the case where the length of the pipe such as a semiconductor line is increased or a pipe having a different direction needs to be connected, there is a pipe fitting part 9 connecting the pipe 8 and the pipe 8 by using a pipe fitting member including a nut. do. The pipe fitting part 9 is larger than the diameter of the pipe 8, and has a hexagonal or polygonal cross section like a pipe.

2 and 3 is an exploded perspective view and a combined perspective view showing a pipe fitting portion heating apparatus 10 according to an embodiment of the present invention, the pipe fitting portion heating device 10 of the present embodiment, the inner socket 18 ), The outer socket 40, the fixing ring 50 and the heating jacket (52).

Referring to FIG. 2, the inner socket 18 is a socket for tightly wrapping a nut of the pipe fitting part 9, and includes a first inner socket 20 and a second inner socket 22. The first inner socket 22 and the second inner socket 22 have a symmetrical shape. The first and second inner sockets 20 and 22 have a semicircular shape, and the outer circumferential surface has no concave-convex shape, but two grooves and two inclined surfaces are formed on the inner side thereof. On the inner surface of the first inner socket 20, the first grooves 24 and the second grooves 26 are formed at equal intervals on both sides of the center portion 21, and at one end, the first inclined surface 28 is formed. At the other end, a second inclined surface 30 is formed. The sizes of the first grooves 24 and the second grooves 26 are the same, and the inclination and the length of the first inclined surface 28 and the second inclined surface 30 are also the same. Similarly, the second inner socket 22 is formed with the third and fourth grooves 32 and 34 and the third and fourth inclined surfaces 36 and 38 around the central portion 23.

Referring to FIG. 3, when the first inner socket 20 and the second inner socket 22 are coupled to each other, the first inclined surface 28 and the third inclined surface 36 are combined to form an inner space 31, and a second The inclined surface 30 and the fourth inclined surface 38 are combined to form another inner space 33. When the first inner socket 20 and the second inner socket 22 are coupled to the pipe fitting part 9, the first to fourth grooves 24, 26, 32, and 34 are formed on the nut 12. Coupling according to the position of each corner portion (35). Then, the space formed by the engagement of the first to fourth inclined surfaces 28, 30, 36, 38 is also engaged with the edge portion 35 of the nut 12.

Referring to FIG. 2, the outer socket 40 is a socket installed in close contact with the outer circumferential surface of the inner socket 18 and includes a first outer socket 42 and a second outer socket 44. The first outer socket 42 and the second outer socket 44 are symmetrical in structure and have the same components. The first outer socket 42 has a semicircular cross section as a whole, and the outer circumferential surface has no concave-convex surface, but the inner surface has a socket seating portion 43 and a pipe 8 to which the first inner socket 20 is coupled. It is composed of a sealing projection (46). When the outer circumferential surface of the first inner socket 20 is tightly coupled to the socket seating portion 43, the end 25 of the first inner socket 20 contacts the upper surface 41 of the sealing protrusion 46 so that the first and the first One end of the space 31, 33 (see FIG. 3) by the first and second inclined portions 28, 30 including the two grooves 24, 26 is sealed by the sealing protrusion 46. Thus, the heat transmitted to each of the grooves 24, 26, 32, and 34 is blocked from being discharged to the outside. The sealing protrusion 46 is protruded inward from the end of the socket seating portion 43, the pipe sealing groove 48 is formed in the center is in close contact with the pipe (8). Since the structure of the second outer socket 44 is symmetrical with the first outer socket 42 and has the same components, a detailed description thereof will be omitted.

Retaining ring 50 is composed of a ring shape with elastic force, and the inner socket 18 and the outer socket 40 in a circular shape or cut circular shape is coupled to the fitting portion 9 to maintain the coupling In order to be installed around the outer circumferential surface of the outer socket 40 to press the first and second outer sockets (42, 44) inward. Referring to FIG. 3, when the inner socket 18 and the outer socket 40 are installed in the pipe fitting part 9, it can be seen that the inner socket 18 and the outer socket 40 are installed in close contact with each other without a gap. . This is because the outer circumferential surface of the inner socket 18 and the inner surface of the socket seating portion 43 of the outer socket 40 can be accurately sealed because the surface is uneven.

The pipe part socket 14 and the pipe part socket cover 16 installed in the pipe 8 shown in FIG. 2 are coupled with the pipe 8 interposed therebetween. When the diameter of the pipe 8 is small, when the heating jacket 52 is directly connected to the pipe 8, the volume of the outer circumferential surface of the pipe 8 through which heat is transferred is small, and sufficient heat is transferred to the gas or liquid flowing inside the pipe. It is not installed, so it is installed to increase the heat transfer area. Since this is not a feature of the present invention, a detailed description thereof will be omitted.

Referring to FIG. 3, the heating jacket 52 is wrapped around the first and second outer sockets 42 and 44, and is closely installed. Heating jacket 52 is a heating wire (not shown) is installed inside, a jacket for generating heat by receiving electricity through the power line 54 drawn to the outside, the piping line of the semiconductor process and the piping line requiring heating. It is a well-known technique used for, and since it is not a characteristic of this invention, detailed description is abbreviate | omitted. Reference numeral 63 in FIG. 3, which has not been described, is a Velcro for attaching and detaching a heating jacket.

Hereinafter, the heat transfer process of the pipe fitting part 9 will be described with reference to FIGS. 2 and 3. In the installed state as shown in FIG. 3, when power is applied to the heating jacket 52, a heating wire (not shown) inside the heating jacket is provided. It is exothermic from. Heat generated in heat is transferred to the outer socket 40 which is relatively larger in diameter than the pipe fitting 9 and is in close contact with the inner surface of the heating jacket 52. Since the contact area with the heating jacket 52 is large and is in close contact with the inner surface of the heating jacket 52, excess heat is transmitted to the outer socket 40 than heat to be transmitted to the gas. Heat transmitted to the outer socket 40 transfers heat to the inner socket 18 in close contact therewith. Since the inner socket 18 and the outer socket 40 are also in close contact, almost all of the heat transferred is transferred to the inner socket 18. The heat in the inner socket 18 transfers heat to the nut through portions in contact with the nut 12 and through the first to fourth grooves 24, 26, 32, 34 and the spaces 31, 33. The inner socket 18 and the nut 12 also radiate heat through the first to fourth grooves 24, 26, 32, 34 and the spaces 31, 33. Therefore, some heat is consumed to the outside but sufficient heat is transferred to the nut 12 because the heat is transmitted to the inner socket 18 in excess of the heat to be delivered to the gas. In addition, since the one end of the first to fourth grooves 24, 26, 32, 34 and the spaces 31, 33 are sealed by the sealing protrusion 46 provided in the outer socket 40, the inner socket 18 The amount of heat consumed in the process of transferring to the nut 12 is not large. The heat transferred to the nut 12 may transfer sufficient heat to the gas or liquid flowing in the pipe fitting 9.

Due to the above-described configuration, the pipe fitting part heating apparatus 10 of the present invention uses the same heating jacket 52 as compared to a method in which the heating jacket 52 directly surrounds the pipe fitting part 9 to transfer heat. More heat can be transferred, and the amount of heat consumed in the heat transfer process can be greatly reduced.

Pipe fitting part heating apparatus according to an embodiment of the present invention described above, by heating the heating jacket wrapped around the outer peripheral surface of the nut, like the piping line in the existing fitting portion, the heat loss in the space between the heating jacket and the polygonal nut, It solves problems such as heat loss due to small heat transfer area. In addition, the nut of the fitting part may be rotated or the installation angle may be changed for the purpose of modifying the connection state of the pipe or for other reasons, but the fitting part heating apparatus of the present invention may be installed at any angle fitting part.

While the invention has been shown and described in connection with preferred embodiments for illustrating the principles of the invention, the invention is not limited to the construction and operation as shown and described. It will be understood by those skilled in the art that many changes and modifications of the present invention can be made without departing from the spirit and scope of the appended claims. Accordingly, all such suitable changes, modifications, and equivalents should be considered to be within the scope of the present invention.

10: pipe fitting heating device
18: inner socket 20: first inner socket
22: second inner socket 24, 26, 32, 34: first to fourth grooves
28,30,36,38: first to fourth inclined surfaces
40: outer socket 42, 44: first and second outer socket
43: socket seat 46: airtight protrusion
48: piping sealing groove 50: retaining ring
52: heating jacket

Claims (4)

A first inner socket surrounding the nut of the pipe fitting to be in close contact;
A second inner socket configured to be symmetrical with the first inner socket and coupled to the first inner socket to wrap around the nut in close contact;
A first outer socket in close contact with an outer circumferential surface of the first inner socket and having a semicircular shape;
A second outer socket configured to be symmetrical with the first inner socket and disposed to be in close contact with outer peripheral surfaces of the first and second inner sockets in combination with the first inner socket;
A fixing ring installed around outer circumferential surfaces of the first and second outer sockets to maintain engagement of the first and second outer sockets with elastic force; And
And a heating jacket in close contact with the outer circumferential surfaces of the first and second outer sockets to transfer heat.
Inner circumferential surfaces of the first and second inner sockets are formed with a plurality of grooves and inclined surfaces engaging with corner portions of the nut, and inner circumferential surfaces of the first and second outer sockets are formed in a closed protrusion and the closed protrusion. Piping fitting heating device characterized in that the pipe sealing groove is formed in close contact with the pipe connected to the pipe fitting. The method of claim 1,
The cross section of the first and second inner socket is coupled, and the cross section of the first and second outer socket are coupled in a circular shape so as to increase the transfer efficiency of heat transferred from the heating jacket. Device. 3. The method of claim 2,
The inclined portion, the pipe fitting portion heating apparatus, characterized in that formed on the end of each of the first inner socket and the second inner socket. The method of claim 3, wherein
Upper surfaces of the sealing protrusions formed on the first and second outer sockets respectively contact the end of the first inner socket and the end of the second inner socket to seal one side of the inner space of the groove. Second heating device.

Images