KR20130064695A - Motor control device - Google Patents

Abstract

PURPOSE: A motor controller is provided to quickly and surely determine a position without vibrating a control object. CONSTITUTION: A control parameter of a feedback control system(400) is set up in order to fit with a real producing machine. And the control parameter fits with a parameter which is set up with the feedback control system. The feedback control system includes a position controller(410) and a speed controller(420). The position controller calculates a speed instruction from a deviation of a model position of control object and a position of control object. The speed controller outputs a torque instruction from a deviation of a speed instruction which differentiates the model position, a speed instruction which a controller calculates, and a speed instruction which differentiates a position of a motor which drives the control object. The speed controller includes an integral controller(424) and a proportional controller(422). When the motor moves the control object, the torque instruction is outputted by using only the integral controller. When the motor stops the control object, the torque instruction is outputted by using a torque controller(455) and the proportional controller. [Reference numerals] (120) Motor; (120S,140S) Sensor; (140) Table; (300) Model control system; (310) Model position controller; (320) Model speed controller; (330) Model torque command low pass filter; (340) Operating unit model; (350) Substrate model; (400) Feedback control system; (410) Position controller; (415) Timing controller; (420) Speed controller; (422) Proportional controller; (424) Integral controller; (430) Torque command low pass filter; (445) Torque command notch filter; (455) Torque controller; (AA) Position command; (BB) Model speed command; (CC) Model torque command; (DD) Model torque after a low pass filter; (EE) Position of model operating unit; (FF) Model position; (GG) Model substrate position; (HH) State feedback

Description

Motor Control Device

The present invention relates to a motor control apparatus capable of positioning a control object quickly and reliably.

In production machines, such as a printed circuit board drill machine, it is required to shorten the punching processing time of a printed board as much as possible and to improve production efficiency. The production efficiency of a printed board drill depends on the positioning speed of the printed board. Therefore, in order to improve the production efficiency of a printed board drill, the printed board must be positioned quickly and reliably.

In general, if the production machine is an ideal rigid body and there is no friction, it is theoretically possible to make fast and reliable positioning using the control theory. However, the actual production machine, unlike an ideal rigid body, has a part with low rigidity in some parts and friction exists in the control object. Since the printed board drill is not an ideal rigid body and friction exists, when the punching operation of the printed board is to be performed at a high speed, the printed board drill itself vibrates and friction exists, so that the settling time of positioning is theoretical. Longer than

As a control technique for realizing relatively fast and reliable positioning while suppressing vibration of a production machine, there is a control technique for inserting a notch filter into an input portion of a position command. This control method eliminates the vibration of the production machine by setting the vibration frequency of the production machine in the notch filter, but the positioning correction time becomes longer due to the delay of the notch filter.

Moreover, as another control method, as disclosed in the following patent document 1, there exists a control method which applies a model control system to the model of a production machine. This control method eliminates vibration of the production machine by performing model following control on the model of the production machine, and realizes reliable positioning without overshoot at a relatively high speed.

In the control method of applying the model control system to the model of the production machine, a state equation is specifically set for the model of the production machine as follows, and each parameter is set so that the characteristic equation of the state equation has the quinine root.

[Equation 1]

[Math 2]

&Quot; (3) "

In the above equation, K _P indicates a position loop gain, K _V indicates a velocity loop gain, K _PB indicates a substrate position feedback gain, K _AB indicates a substrate acceleration feedback gain, and K _VB indicates a substrate velocity feedback gain. In the above formula, J represents the sum of the motor inertia J _M and the load inertia J _L in the model of the production machine. T represents the time constant of the model torque command low pass filter.

And a position control system and a speed control system is stable such that K _V = 4J ₂ · K _P and, J ₂ · utilizes 4 as a function of K _P. By setting the control parameters of each element constituting the model control system of the production machine based on this K _V value, reliable positioning without overshoot can be realized at a relatively high speed.

Patent Document 1: Patent No.4540727

However, in the control method of inserting the notch filter described above, the settling time of positioning cannot be shortened to meet the demand from the control delay caused by using the notch filter.

In addition, the control method to which the model control system is applied cannot be shortened to the extent that it satisfies the requirement of further shortening the positioning time for positioning without overshooting and without causing vibration.

SUMMARY OF THE INVENTION The present invention has been made in order to meet the demand for shorter positioning time, and an object of the present invention is to provide a motor control device capable of positioning a control object quickly and reliably.

The motor control apparatus according to the present invention for achieving the above object includes a model control system for modeling the movement of the production machine and a feedback control system for actually controlling the movement of the production machine. The feedback control system may include a position controller, a speed controller, and a torque controller.

The position controller calculates the speed command from the deviation between the model position of the control target of the production machine and the position of the control target of the production machine output from the model control system. The speed controller outputs the torque command from the speed command that differentiates the model position output from the model control system, the speed command calculated by the position controller, and the speed command that differentiates the position of the motor driving the control target. The torque controller controls the torque of the motor by adding the model torque command for driving the control target of the production machine output from the model control system and the torque command output from the speed controller.

The speed controller has an integral controller and a proportional controller. The speed controller outputs the torque command only to the proportional controller when the motor is moving the control target, and outputs the torque command to the integral controller and the proportional controller when the motor does not move the control target.

According to the motor control apparatus according to the present invention, positioning can be performed quickly and reliably without vibrating the control object.

BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic block diagram of the production machine used as the application target of the motor control apparatus which concerns on one Embodiment of this invention.
2 is a block diagram of a control system of the motor control apparatus according to the embodiment of the present invention.

EMBODIMENT OF THE INVENTION Below, the motor control apparatus which concerns on one Embodiment of this invention is demonstrated. BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic block diagram of the production machine used as the application target of the motor control apparatus which concerns on one Embodiment of this invention.

(Configuration of production machine)

The production machine 100 includes a substrate 110, a motor 120, a ball thread 130, a table 140, and leveling bolts 150A and 150B.

Substrate 110 is secured to firm floor 160, such as concrete, by leveling bolts 150A and 150B. The motor 120 for driving the table 140 and the ball screw 130 for moving the table 140 are provided on the substrate 110.

The motor 120, the ball screw 130, and the table 140 constitute the movable unit 180. The motor 120 is fixed to the substrate 110 by a fixture 125. The ball screw 130 is fixed to the substrate 110 by supporting members 135A and 135B supporting both ends of the ball screw 130 to rotate. The rotating shaft of the motor 120 and the ball screw 130 are connected via the seam 170. The ball screw 130 rotates in the same rotational direction as the rotational axis of the motor 120 and also rotates at the same rotational speed. The screwing portion 145 protruding from a part of the table 140 is screwed with the ball screw 130. When the ball screw 130 rotates left and right, the table 140 reciprocates in the left and right directions as shown.

In order to perform the machining at high speed, it is necessary to shorten the settling time of the positioning of the table 140. However, if the table 140 is moved at high speed and positioned at high speed, the inertia force is applied to the substrate 110 by the inertia of the table 140 at the time of positioning, and the substrate 110 is inadequate due to the lack of rigidity of the leveling bolts 150A and 150B. Oscillates as shown. In addition, since there is friction between the inner circumference of the screwed portion 145 of the table 140 and the outer circumference of the ball screw 130, the settling time for positioning becomes longer depending on the magnitude of the friction.

The motor controller according to the embodiment of the present invention positions the table 140 to be controlled at high speed and reliably while suppressing vibration of the substrate 110. The configuration and operation of the control system of the motor control apparatus according to the embodiment of the present invention will now be described.

(Configuration of Control System of Motor Control Unit)

The control system of the motor control apparatus according to one embodiment of the present invention allows a slight overshoot for positioning control of the table 140 for a production machine on the assumption that the substrate 110 of FIG. 1 vibrates. In order to prevent vibration caused by overshooting, and to consider the friction between the table 140 and the ball screw 130, a high speed and reliable positioning is possible.

2 is a block diagram of a control system of a motor control apparatus according to an embodiment of the present invention.

The control system 200 of the motor control apparatus includes a model control system 300 and a feedback control system 400. The model control system 300 is set with control parameters for implementing ideal (fast and reliable) positioning of the table 140. The feedback control system 400 actually controls the movement of the table 140 of the actual machine by using the command of the model control system 300 to position the table 140 at high speed and reliably.

The control parameters of the feedback control system 400 are set in accordance with the actual production machine, and the control parameters of the model control system 300 are set in accordance with the parameters set in the feedback control system 400.

[Overall Configuration of Control System of Motor Control Device]

The model control system 300 includes a model position controller 310, a model speed controller 320, a model torque command low pass filter 330, a movable part model 340, and a substrate model 350. In addition, the first feedback unit 360, the second feedback unit 370, and the differentiator 380 for status feedback. In addition, it includes a plurality of computing units (SP315, SP325, SP335, SP345, SP355) constituting a summing point.

The feedback control system 400 may include a motor 120, a sensor 120S, a table 140, a sensor 140S, a position controller 410, a timing controller 415, a proportional controller 422, an integral controller 424, The torque command low pass filter 430, the torque command notch filter 445, the torque controller 455, and the differentiator 480 are included. Proportional controller 422 and integral controller 424 constitute speed controller 420. In addition, a plurality of calculation units SP415, SP425, SP435, SP445 constituting the addition point are included.

[Movement of each part of model control system]

The model position controller 310 models the position controller 410 and outputs a model speed command. The gain of model position controller 310 is the same as position controller 410. The model speed controller 320 models the speed controller 420 and outputs a model torque command. The gain of model speed controller 320 is equal to speed controller 420. Since the model control system does not consider the interference, the model position controller 310 and the model speed controller 320 are configured as proportional controllers.

The model torque command low pass filter 330 is a model of the torque command low pass filter 430 as a primary low pass filter, and outputs a model torque command subjected to low pass filter processing. The value of the filter of the model torque command low pass filter 330 is the same as that of the torque command low pass filter 430.

The movable unit model 340 models the movement of the movable unit 180 including the motor 120 and outputs the model movable unit position. The model movable part position is the position of the table 140. Although there is a ball screw 130 between the motor 120 and the table 140, the movable part model 340 considers their rigidity to be very high. The substrate model 350 models the movement of the substrate 110 and outputs a model substrate position. The model substrate position is the position of the vibrating substrate 110. The model position obtained by adding the model movable part position and the model substrate position is a relative position between the table 140 and the substrate 110. The parameters of the movable part model 340 and the substrate model 350 are the same as the parameters of the movable part 180 and the substrate 110 of the actual machine.

The first feedback unit 360 outputs a first feedback including a model substrate position, a model substrate speed, and a model substrate acceleration. The second feedback unit 370 gains the model torque command after the low pass filter processing and outputs the second feedback. The state feedback amount is obtained by adding the first feedback and the second feedback. The differentiator 380 outputs the speed command by differentiating the model position which is the main feedback amount.

The calculation units SP315, SP325, SP335, SP345, and SP355 add or subtract instructions that join the respective addition points. In addition, the gain of the state feedback amount is set based on the parameters of the movable unit 180 and the substrate 110 of the actual machine. The parameters of the position gain and the speed gain of the model control system 300 may be set slightly larger than the value of the feedback control system 400 if a constant relationship is maintained between the position gain and the speed gain.

Thus, in the model control system 300, the model torque command output from the model torque command low pass filter 330, the model board position output from the board model 350, the model board speed, and the model board acceleration are used as state feedback amounts. Status feedback. By feeding back the state, the table is positioned at a high speed while suppressing the vibration of the substrate 110.

[Operation of each part of feedback control system]

The sensor 140S detects the position of the table 140. The motor 120 drives the table 140 shown in FIG. The sensor 120S detects the rotational position of the motor 120.

The position controller 410 outputs a speed command by inputting a difference between the model position output from the model control system 300 and the position of the table 140 detected by the sensor 140S.

The timing adjusting unit 415 adjusts the timing of turning on and off the switch 426, and connects the integral controller 424 to the proportional controller 422 at the timing at which the motor 120 stops. The conversion timing of insertion and removal of the integration controller 424 by the timing adjustment unit 415 is finely adjusted based on the positional deviation such as the position of the table 140 detected by the sensor 140S. The timing of the conversion is the timing at which the positioning of the table 140 allows some overshoot, the positioning at high speed, and the vibrations converge quickly. This timing is set to an optimum timing by repeating trial and error.

The proportional controller 422 applies a constant gain to the speed command and outputs a torque command. The integration controller 424 outputs the integrated speed command. The speed controller 420 outputs a torque command only by the proportional controller 422 when the motor 120 is rotating (proportional control). When the motor 120 is stopped, the integral controller 424 and the proportional controller 422 are stopped. The torque command generated by the controller is output (proportional integral control). The gain of the speed controller 420 is set as large as possible in a range that does not cause high frequency resonance.

The torque command low pass filter 430 removes the quantization ripple (which occurs when an encoder is used in the sensors 120S and 140S) and the high frequency component included in the positions detected by the sensors 110S and 120S. The torque command low pass filter 430 sets the filter to remove noise of a high frequency as much as possible. The torque command notch filter 445 outputs a torque command except for resonant frequency components such as the ball screw 130 and suppresses resonance of the ball screw 130 and the like. The torque command notch filter 445 designs the filter at a resonant frequency such as the ball screw 130. The torque controller 455 controls the torque of the motor 120 based on the torque command from which noise is eliminated by the torque command low pass filter 430 and the torque command notch filter 445. In addition, the order of the torque command low pass filter 430 and the torque command notch filter 445 may be in the order of the torque command notch filter 445 and the torque command low pass filter 430, unlike FIG. 2.

The differentiator 480 differentiates the rotation position of the motor 120 detected by the sensor 120 and outputs a speed. The calculation units SP415, SP425, SP435, SP445 add or subtract instructions that join each of the addition points.

In addition, the position loop gain of the feedback control system 400 allows a slight overshoot so that the position gain is set to 1/3 of the speed gain so as not to vibrate even at high speed.

(Operation of the control system of the motor controller)

The control system of the motor control apparatus according to an embodiment of the present invention is configured as described above. Next, the operation of the entire control system of the motor control apparatus according to an embodiment of the present invention will be described taking the production machine 100 shown in FIG. 1 as an example.

The calculating part SP315 of the model control system 300 calculates the position deviation between the position command and the model position (position of the table 140) of the production machine 100. Model position controller 310 to fold the position error _P K and output a model speed command. The calculation unit SP325 calculates a speed deviation between the model speed command and the speed at which the differentiator 380 differentiates the model position. The model speed control unit 320 multiplies the speed deviation by K _VP and outputs a model torque command. The calculating unit SP335 subtracts the model torque command and the state feedback amount.

The state feedback input by the calculating unit SP335 is calculated as follows. The first feedback unit 360 outputs, as the first feedback, a result of multiplying the model substrate position output by the substrate model 350 by K _PB + K _VB S + K _AB S ² . The second feedback unit 370 outputs the model torque command after the low pass filter processing output from the model torque command low pass filter 330 to K _LP. It outputs as a 2nd feedback. The calculating part SP355 adds a 1st feedback and a 2nd feedback. The state feedback amount added by the calculating part SP355 becomes state feedback.

The torque deviation output from the calculation unit SP335 is a model torque command by removing noise of a high frequency component by the model torque command low pass filter 330. The movable part model 340 outputs the model movable part position which shows the position of the table 140 from the model torque instruction | command after the low pass filter process. At the same time, the substrate model 350 outputs a model substrate position indicating the position of the substrate 110 from the model torque command after the low pass filter processing. The calculating part SP345 adds a model movable part position and a model board | substrate position, and outputs a model position.

On the other hand, the calculation unit SP415 of the feedback control system 400 calculates the positional deviation between the model position obtained by the model control system 300 and the current position of the substrate 110 detected by the sensor 110S. The position controller 410 outputs a speed command from the position deviation. The calculation unit SP425 detects the speed command calculated by the differentiator 380 of the model control system 300 by differentiating the model position and the speed command outputted by the position controller 410 and the differentiator 480 by the sensor 120. The speed difference calculated by differentiating the rotational position of the motor 120 is added or subtracted to calculate this speed deviation. The speed controller 420 outputs a torque command from the speed deviation.

In the speed controller 420, the switch 426 is turned off by the timing adjusting unit 415 when the motor 120 is rotating. For this reason, the calculating part 435 gives the proportional controller 422 the speed instruction output from the position controller 410 as it is when the motor 120 is rotating. The proportional controller 422 outputs a torque command based on the speed command. On the other hand, when the motor 120 stops, the switch 426 is turned on at the timing set by the timing controller 415. For this reason, the calculating part 435 adds the speed command which the position controller 410 outputs, and the speed command which the integral controller 424 integrated. The proportional controller 422 outputs a torque command based on the added speed command.

The calculating part SP445 adds the torque command which the calculating part SP335 of the model control system 300 outputs, and the torque command which the proportional controller 422 outputs. The added torque command removes the quantization ripple or the high frequency component from the torque command low pass filter 430 and removes the resonance frequency component from the torque command notch filter 445. The torque controller 455 controls the torque of the motor 120 based on the torque command from which the noise is removed.

The operation of the control system of the motor control apparatus according to the embodiment of the present invention is as described above. In one embodiment of the present invention, an original value is used as a control parameter in order to realize positioning of the table 140 at high speed. The state equation of the model control system 300 according to the embodiment of the present invention is as follows.

&Quot; (4) "

[Equation 5]

&Quot; (6) "

Each parameter is set so that the characteristic equation of the above state equation has the quinine root. In one embodiment of the present invention, in order to make a slight overshoot of the position control system and the speed control system and to speed up the positioning of the table 140, KV = 3J ₂ · K _P , and as a coefficient of J ₂ · K _P 3 is used. K _V = 3J ₂ · K _P ,

[Equation 7]

.

Each numerical value described above is set as a control parameter to each element constituting the model control system 300. By setting such control parameters, while allowing a slight overshoot for positioning of the table 140, it is possible to perform high-speed positioning without generating vibration due to overshoot. In addition, even if there is friction between the table 140 and the ball screw 130, the positioning of the table 140 can be accurately and surely realized.

In the state equation, K _V = 3J ₂ · K _P , and the reason why 3 is used as the coefficient of J ₂ · K _P is as follows.

In general, in the control of a production machine, it is common to make it perform quickly without overshooting the positioning of a control object. Therefore, in the control of the conventional production machine, it is very difficult to shorten the settling time of positioning.

However, in recent years, the improvement of new production efficiency is strongly requested. In particular, in a printed board drill, it is intended to shorten the positioning time of the positioning even by allowing an overshoot of the positioning control in order to further shorten the drilling time.

In the control of the conventional production machine, the overshooting is not premised. In the state equation of the model control system, K _V = 4J ₂ · K _P , and 4 is used as the coefficient of J ₂ · K _P. In the state equation, as in the embodiment of the present invention, K _V = 3J ₂ · K _P and no coefficient other than 4 is used as the coefficient of J ₂ · K _P.

In one embodiment of the present invention, since it is assumed to overshoot, 3 is used instead of 4 as the coefficient of J ₂ · K _P. In addition, in this embodiment, but using 3 as a function of J ₂ · K _P, in response to an overshoot amount that can be allowed may be employed a small coefficient than 4. For example, an appropriate value can be used between 2.5 and 3.5. Setting it to a smaller value increases the overshoot amount, and setting it to a larger value reduces the overshoot amount.

Moreover, in one Embodiment of this invention, in order to converge overshoot quickly and to remove the influence of a friction, it concentrates on the structure of the speed controller 420 as shown in FIG.

The speed controller 420 is configured as a proportional integral controller, but the integral controller 424 is able to be inserted or removed in accordance with the operation of the motor 120. Inserting or removing the integration controller 424 in accordance with the operation of the motor 120 is for the following reasons.

When driving the control object of a production machine, friction will necessarily arise. For this reason, the speed controller of the conventional feedback system uses the proportional integration controller. However, if the speed controller of the feedback system is configured as a proportional integral controller, a small value that compensates for friction during rotation of the motor 120 remains in the speed integrator, thereby extending the settling time of positioning. If the speed controller of the feedback system is configured as a proportional integral controller, the vibration can not be quickly converged by the speed integrator when overshoot is allowed.

Therefore, while the motor 120 is rotating, the speed controller 420 is used as the proportional controller except for the integration controller 424. Thereby, while the motor 120 is rotating, the value of the integral term contained in a speed instruction | command becomes 0, and it is not influenced by allowing overshoot. In addition, while the motor 120 is rotating, the speed command of the friction compensation component does not accumulate in the integral term, so that the settling time of positioning is not extended.

In addition, in the control of a conventional production machine, a semi-close system using a motor encoder is usually employed. However, in the semi-closed system, the rotational position of the motor is controlled and, as in the embodiment of the present invention, the position of the table 140 and the rotational position of the motor 120 are not controlled. Position error due to friction of the ball screw 130 and the like occurs. For this reason, it is difficult to realize high-precision positioning of the table 140 in the semi-closed system.

Therefore, in one Embodiment of this invention, it is set as the full-close system which feeds back the rotation position of the motor 120, and the position of the table 140. FIG.

As mentioned above, the control apparatus of the production machine which concerns on one Embodiment of this invention makes the model control system 300 feed back the position of a model board | substrate, a speed, acceleration, and model torque instruction | command after a low pass filter process. In addition, the relationship between the model position gain and the model speed gain is set to allow a little overshoot, and then to achieve fast and reliable positioning. And modern control theory is applied and the control parameter of each element which comprises the model control system 300 is set so that the root of the characteristic equation of the model control system 300 may become a middle root. The feedback control system 400 was set as a full-close feedback control system so that it could follow the model control system 300 capable of high-speed and reliable positioning without vibration. The speed controller 420 of the feedback control system 400 is configured as a proportional integral controller so that the integral term becomes effective only when the motor 120 is stopped.

In addition, the gains set in the model position controller 310 and the model speed controller 320 may be the same as the gains set in the position controller 410 and the speed controller 420, respectively, and the position controller 410 and the speed controller 420 may be different. It may be slightly higher than the gain set in the

According to the above structure, positioning can be performed at high speed and high precision, without vibrating the table 140 without providing the sensor which detects the board | substrate 110 vibration.

100 production machines
110 substrate
120 motor
120S sensor
130 Ball Screw
140 tables
140S sensor
150A, 150B Leveling Bolt
160 bottom
180 moving parts
Control system of 200 motor controller
300 model control system
310 model position controller
320 model speed controller
330 Model Torque Command Low Pass Filter
340 moving model
350 substrate model
360 First Feedback
370 Second Feedback Unit
380 Differential
SP315 to SP355 calculator
400 feedback control system
410 position controller
420 speed controller
422 proportional controller
424 Integral Controller
430 Torque Command Low Pass Filter
445 torque command notch filter
455 torque controller
SP415 to SP445 calculator

Claims (9)

A model control system that models the movement of the production machine; And,
A motor control device including a feedback control system for actually controlling the movement of the production machine,
The feedback control system is:
A position controller for calculating a speed command from a deviation between a model position of a control target of the production machine and a position of a control target of the production machine output from the model control system;
A speed controller that outputs a torque command from a speed command that differentiates the model position output from the model control system, a speed command calculated by the position controller and a speed command that differentiates the position of the motor driving the control target; And,
A torque controller configured to control a torque of the motor by adding a model torque command for driving a control target of the production machine output from the model control system and a torque command output from the speed controller;
The speed controller includes an integral controller and a proportional controller, and outputs a torque command only by the proportional controller when the motor is moving the control object, and when the motor is stopping the control object, the integral controller and the proportional controller. Motor control device that outputs torque command from the controller. The method of claim 1,
The feedback control system further includes a timing adjusting unit that controls a timing of connecting the integral controller included in the speed controller to the proportional controller. 3. The method according to claim 1 or 2,
The feedback control system is a full-close feedback system that feeds back the position of the control target to the position controller and at the same time feeds back the differential motor position to the speed controller. 3. The method according to claim 1 or 2,
Between the speed controller and the torque controller of the feedback control system.
A torque command low pass filter for removing quantization ripples and high frequency components included in the torque command; And,
And a torque command notch filter for eliminating resonant frequency components of the production machine. The method of claim 4, wherein
The model control system is:
A movable part model for modeling a movement of the movable part of the production machine to output a model movable part position of the movable part;
A substrate model that models the movement of the substrate of the production machine and outputs a model substrate position of the substrate;
A model position controller for modeling the position controller and outputting a model speed command;
A model speed controller for modeling the speed controller and outputting a model torque command;
A model torque command low pass filter for modeling the torque command low pass filter and giving a filter processing model torque command obtained by low pass filter processing the model torque command to the movable part model and the substrate model;
A main feedback unit which feeds back the model position information obtained by adding the model movable unit position and the model substrate position to the model position controller and the model speed controller as a model position to a feedback system, respectively;
A first feedback unit configured to output a first feedback including at least the model substrate position based on the model substrate position;
A second feedback unit for outputting a second feedback from the filter processing model torque command; And,
And calculating a deviation between the first feedback and the second feedback and the model torque command, and outputting the deviation to the model torque command low pass filter and the torque command low pass filter as model torque commands.
Giving the model position command to the feedback system to the position controller as the position command,
A motor control device for adding a model speed command to the feedback system created based on the model position command to the feedback system to the speed command input to the speed controller. The method of claim 5, wherein
And the first feedback unit includes a model substrate velocity and a model substrate acceleration of the substrate in addition to the model substrate position in the first feedback. The method according to claim 5 or 6,
The gains set in the model position controller and the model speed controller, respectively, are the same as the gains set in the position controller and the speed controller, respectively, and the first feedback gain and the second feedback section set in the first feedback section. And a second feedback gain that is set is determined to suppress vibration of the substrate. The method according to claim 5 or 6,
The gain set in the model position controller and the model speed controller, respectively, is slightly higher than the gain set in the position controller and the speed controller, respectively, and the first feedback gain and the second feedback section set in the first feedback section. And a second feedback gain that is set is determined to suppress vibration of the substrate. The method according to claim 5 or 6,
A plurality of parameters included in the model control system if the inertia of the position loop gains in the model control system K _P, the speed loop gain K _V, the characteristic equation of the equation of state for the model control system have a junggeun, a J K _V to cause the feedback control system to overshoot = Motor control with 2.5 ~ 3.5J ₂ · K _P.

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