KR20130025804A - Pressure sensor - Google Patents

Pressure sensor Download PDF

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KR20130025804A
KR20130025804A KR1020120053488A KR20120053488A KR20130025804A KR 20130025804 A KR20130025804 A KR 20130025804A KR 1020120053488 A KR1020120053488 A KR 1020120053488A KR 20120053488 A KR20120053488 A KR 20120053488A KR 20130025804 A KR20130025804 A KR 20130025804A
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pressure
base
diaphragm
receiving member
pressure sensor
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KR1020120053488A
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KR102009043B1 (en
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오사무 타카츠키
토모히사 아오야마
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가부시기가이샤 후지고오키
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
    • G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
    • G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type

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  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE: A pressure sensor is provided to detect the pressure of a flow passage where high refrigerant passes through and to prevent damage caused by high pressure. CONSTITUTION: A pressure sensor comprises a pressure detecting element(2), a base(4), a receiving member(5), a diaphragm(6), and liquid. The pressure detecting element is fixed to an inner surface of the base. The receiving member is arranged facing the base. The diaphragm is fitted into between the base and the receiving member, thereby being supported. The pressure of a space between the receiving member and the diaphragm is delivered to the pressure detecting member via the diaphragm and the liquid.

Description

압력 센서{PRESSURE SENSOR}Pressure sensor {PRESSURE SENSOR}

본 발명은, 압력 센서에 관한 것으로, 특히, 압력 검출 소자를 수용한 수압 공간에 액체를 봉입한 액봉입식(液封入式)의 압력 센서에 관한 것이다.TECHNICAL FIELD This invention relates to a pressure sensor. Specifically, It is related with the liquid encapsulation type pressure sensor which enclosed the liquid in the hydraulic pressure space which accommodated the pressure detection element.

종래, 압력 검출 소자가 수용된 수압 공간 내에 액체를 봉입하고, 압력 검출실에 외부로부터 가하여진 압력을 액체를 통하여 압력 검출 소자에 전함으로써, 압력 검출 소자로부터 외부 압력에 응한 전압 신호를 출력하는 압력 센서가 여러가지 제안되어 있다.Conventionally, a pressure sensor encapsulates a liquid in a pressure receiving space in which a pressure detecting element is housed, and transmits a pressure applied from the outside to the pressure detecting element through the liquid to output a voltage signal corresponding to the external pressure from the pressure detecting element. Has been proposed.

상기 액봉입식 압력 센서의 한 예로서, 특허 문헌 1에는, 외부로부터의 압력을 도입하는 압력 도입관과 저부에 형성된 관통구멍으로 접속되고, 압력 검출 소자와 외주에 따른 용접부로 접속되는 덮개부재를 구비하고, 이 덮개부재의 외주부로부터 관통구멍에 이르는 종단면(縱斷面)의 적어도 일부를 L자형상으로 형성함으로써, 덮개부재의 내면에 유체압이 작용한 때에 있어서의, 용접부를 지점(支點)으로 한 회전 방향으로의 힘을 저감하고, 용접부의 파단을 방지하는 압력 센서가 기재되어 있다.As an example of the liquid encapsulated pressure sensor, Patent Document 1 includes a cover member connected to a pressure inlet tube for introducing pressure from the outside and a through hole formed at the bottom, and connected to a pressure detecting element and a welded portion along the outer periphery. By forming at least a portion of the longitudinal section from the outer circumference of the lid member to the through hole in an L-shape, the welded portion at the time when the fluid pressure acts on the inner surface of the lid member A pressure sensor is described which reduces the force in one rotational direction and prevents the fracture of the welded portion.

특허 문헌 1 : 일본 특개2005―308397호 공보Patent Document 1: Japanese Patent Application Laid-Open No. 2005-303097

그러나, 상기 특허 문헌에 기재된 압력 센서에서는, 덮개부재의 용접부의 파단을 방지함으로써 내압 성능을 향상시키고 있지만, C02 등의 고압 냉매를 이용한 냉동기기, 공조 기기의 냉매 유로 등의 압력의 검출에 이용한 경우에는, 반복되는 높은 압력이 상기 용접부 등에 가하여지기 때문에, 용접부에 갈라짐 등이 발생하여, 파손으로 이어질 우려가 있다.However, in the pressure sensor described in the patent document, the breakdown resistance is improved by preventing the welded portion of the lid member from breaking, but C0 2 When used for the detection of the pressure of the refrigerant path of a refrigerating device or an air conditioning device using a high-pressure refrigerant such as the same, repeated high pressure is applied to the welding part or the like, which may cause cracking in the welding part and lead to damage. .

그래서, 본 발명은, 상기 과제를 해결하기 위해 이루어진 것으로서, C02 등의 고압 냉매가 통과하는 유로 등의 압력의 검출에 이용한 경우에도, 고압에 의한 파손을 방지하여, 안전한 압력 센서를 제공하는 것을 목적으로 한다.Accordingly, the present invention has been made to solve the above problems, and even when used for detection of a pressure such as a flow path through which a high pressure refrigerant such as C0 2 passes, it is possible to prevent breakage due to high pressure and to provide a safe pressure sensor. The purpose.

상기 목적을 달성하기 위해, 본 발명은, 압력 센서로서, 압력 검출 소자와, 그 압력 검출 소자가 내면에 고정된 베이스와, 그 베이스에 대향하여 배치된 받이부재와, 상기 베이스와 상기 받이부재 사이에 끼여 지지된 다이어프램과, 그 다이어프램을 끼워 지지한 상태의 상기 베이스 및 상기 받이부재를, 양자가 서로 이간하는 것을 방지하도록 양자를 끼워 지지하는 협지부재(挾持部材)와, 상기 베이스와 상기 다이어프램 사이의 공간에 봉입된 액체를 구비하고, 상기 받이부재와 상기 다이어프램 사이의 공간 내의 압력이, 상기 다이어프램 및 상기 액체를 통하여 상기 압력 검출 소자에 전달되는 것을 특징으로 한다.In order to achieve the above object, the present invention provides a pressure sensor, a pressure detecting element, a base fixed to the inner surface of the pressure detecting element, a receiving member disposed to face the base, and between the base and the receiving member. A diaphragm sandwiched between the base and the receiving member in a state where the diaphragm is held by the clamping member, and a clamping member for clamping the diaphragm so as to prevent the two from being separated from each other, and between the base and the diaphragm. And a pressure in the space between the receiving member and the diaphragm is transmitted to the pressure detecting element through the diaphragm and the liquid.

그리고, 본 발명에 의하면, 협지부재에 의해, 다이어프램을 끼워 지지한 상태의 베이스 및 받이부재를 끼워 지지하여 양자가 서로 이간하는 것을 방지하고 있기 때문에, 베이스와 받이부재 사이에 반복 고압이 부가된 경우에도 양자가 이간하는 일이 없고, 베이스와 받이부재가 용접 접합되어 있는 경우에도 용접부의 갈라짐을 회피하고, 압력 센서의 파손을 방지할 수 있다.In addition, according to the present invention, since the sandwiching member supports the base and the receiving member in a state where the diaphragm is held by the sandwiching member to prevent the two from being separated from each other, a repetitive high pressure is added between the base and the receiving member. Even when the two are not separated from each other, even when the base and the receiving member are welded to each other, cracking of the welded portion can be avoided and damage to the pressure sensor can be prevented.

상기 압력 센서에 있어서, 상기 협지부재를 원통형상으로 형성하고, 한쪽의 개구단부를 상기 베이스 또는 상기 받이부재의 어느 한쪽에 계합시키고, 다른쪽의 개구단부를 상기 베이스 또는 상기 받이부재의 어느 다른쪽과 용접 접합할 수 있다.The said pressure sensor WHEREIN: The said clamping member is formed in cylindrical shape, and one opening end part is engaged with either the said base or the said receiving member, and the other opening end part is any other of the said base or the said receiving member. And welding can be joined.

이상과 같이, 본 발명에 의하면, C02 등의 고압 냉매가 통과한 유로 등의 압력의 검출에 이용한 경우에도, 고압에 의한 파손을 방지하고, 안전한 압력 센서를 제공할 수 있다.As described above, according to the present invention, even in the case where the detection of the pressure of the flow path such as a high-pressure refrigerant is passed through, such as C0 2, it is possible to prevent damage due to high pressure and to provide a safe pressure sensor.

도 1은 본 발명에 관한 압력 센서의 한 실시의 형태를 도시하는 도면으로, (a)는 상면도, (b)는 (a)의 A-A선 단면도.BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows one Embodiment of the pressure sensor which concerns on this invention, (a) is a top view, (b) is sectional drawing along the line A-A of (a).

다음에, 본 발명을 실시하기 위한 형태에 관해, 도면을 참조하면서 상세히 설명한다.EMBODIMENT OF THE INVENTION Next, the form for implementing this invention is demonstrated in detail, referring drawings.

도 1은, 본 발명에 관한 압력 센서의 한 실시의 형태를 도시하고, 이 압력 센서(1)는, 압력 검출 소자(2)와, 베이스(4)와, 베이스(4)에 대향하여 배치된 받이부재(5)와, 베이스(4)와 받이부재(5) 사이에 끼여 지지된 다이어프램(6)과, 다이어프램(6)을 끼워 지지한 상태의 베이스(4) 및 받이부재(5)를 또한 끼워 지지하는 협지부재(13)를 구비한다. 베이스(4)와 다이어프램(6) 사이의 수압(受壓) 공간(7)에는, 액체(오일)가 봉입된다.1 shows an embodiment of a pressure sensor according to the present invention, in which the pressure sensor 1 is arranged to face the pressure detecting element 2, the base 4, and the base 4. The receiving member 5, the diaphragm 6 sandwiched between the base 4 and the receiving member 5, and the base 4 and the receiving member 5 in a state where the diaphragm 6 is sandwiched and supported are also provided. It is provided with the clamping member 13 which clamps. Liquid (oil) is sealed in the hydraulic pressure space 7 between the base 4 and the diaphragm 6.

압력 검출 소자(2)는, 수압 공간(7)의 내부에서 베이스(4)에 고정된다. 받이부재(5)와 다이어프램(6) 사이에는 압력 도입 공간으로서의 가압 공간(8)이 형성되고, 가압 공간(8)에는 냉매가 유입하는 유입관(3)의 내부 공간이 연통된다.The pressure detection element 2 is fixed to the base 4 in the hydraulic pressure space 7. The pressurizing space 8 as a pressure introduction space is formed between the receiving member 5 and the diaphragm 6, and the inner space of the inflow pipe 3 through which the refrigerant flows is communicated with the pressurizing space 8.

베이스(4)는, 덮개형상으로 형성되고, 베이스(4)의 하면에는 압력 검출 소자(2)가 고정된다. 받이부재(5)는, 상방이 개구하는 접시형상으로 형성되고, 중심부 개구에 유입관(3)이 솔더링 고정된다. 다이어프램(6)은, 그 외주연부가 베이스(4)의 차양부와 받이부재(5)의 차양부의 사이에 끼워 넣어지고, 이들 3개의 부재(4 내지 6)는, 다이어프램(6)의 외주연부가 노출하는 외주연 부분에서 레이저 용접 등에 의해 동시에 용접되어(용접부(14)), 일체화된다. 수압 공간(7)은, 베이스(4)를 관통하여 형성된 충전구멍(부도시)으로부터 액체(오일)가 주입된 후, 베이스(4)의 윗면에서, 충전구멍이 볼(9)에 의해 막혀진다.The base 4 is formed in the shape of a lid, and the pressure detecting element 2 is fixed to the lower surface of the base 4. The receiving member 5 is formed in the shape of a plate with an upper opening, and the inflow pipe 3 is soldered and fixed to the central opening. The outer periphery of the diaphragm 6 is sandwiched between the shade of the base 4 and the shade of the receiving member 5, and these three members 4 to 6 are the outer periphery of the diaphragm 6. Is welded at the same time by laser welding or the like on the outer peripheral portion that is exposed (welding portion 14) and is integrated. After the liquid (oil) is injected from the filling hole (not shown) formed through the base 4, the filling hole is blocked by the ball 9 in the hydraulic pressure space 7. .

협지부재(13)는, 원통형상으로 형성되고, 다이어프램(6)을 끼워 지지한 상태의 베이스(4) 및 받이부재(5)를, 양자가 서로 이간하는 것을 방지하도록 끼워 지지한다. 협지부재(13)의 상부에서 그 내측을 향하여 형성된 상방 개구단부(13a)는, 베이스(4)의 주연부(4c)에 계합하고, 하방 개구단부(13b)는, 받이부재(5)의 주연부(5a)에 예를 들면 레이저 용접된다(용접부(15)). 이 용접은, 하방 개구단부(13b)의 전둘레에 걸쳐서 이루어져도 좋고, 그 주면(周面)에 부분적으로 이루어져도 좋다. 또한 이 협지부재(13)와 주연부(5a)와의 용접은, 용접부(14)의 열영향부로부터 가능한 한 떨어지도록, 그 협지부재(13)의 하단측에서 행하면 좋다.The clamping member 13 is formed in a cylindrical shape and supports the base 4 and the receiving member 5 in a state where the diaphragm 6 is sandwiched to prevent the two from being separated from each other. The upper opening end 13a formed from the upper part of the clamping member 13 toward the inner side engages with the peripheral part 4c of the base 4, and the lower opening end 13b is the peripheral part of the receiving member 5 ( For example, it is laser-welded to 5a) (welding part 15). This welding may be made over the whole circumference of the lower opening end part 13b, and may be made in part on the main surface. In addition, the welding between the clamping member 13 and the peripheral portion 5a may be performed at the lower end side of the clamping member 13 so that the welding member 14 is separated as far as possible from the heat affected zone.

또한, 협지부재(13)는, 상하 역으로 부착되어도 좋다. 즉, 상방 개구단부(13a)를 받이부재(5)의 주연부(5a)에 계합시키고, 하방 개구단부(13b)를 베이스(4)의 주연부(4c)에 레이저 용접하여도 좋다.In addition, the clamping member 13 may be attached up and down. That is, the upper opening end part 13a may be engaged with the peripheral part 5a of the receiving member 5, and the lower opening end part 13b may be laser-welded to the peripheral part 4c of the base 4. As shown in FIG.

압력 검출 소자(2)는, 예를 들면, 피에조 소자이고, 이 피에조 소자는, 강유전체(强誘電體)의 일종으로서 압전 소자라고도 불리고, 진동이나 압력 등의 힘이 가하여지면 전압이 발생하고, 역으로 전압이 가하여지면 신축한다.The pressure detecting element 2 is, for example, a piezo element, which is also called a piezoelectric element as a kind of ferroelectric. When a force such as vibration or pressure is applied, a voltage is generated. Stretch when voltage is applied.

압력 검출 소자(2)는, 베이스(4)에 형성된 관통구멍(4a)을 삽통하는 출력용 리드 핀(11)(11A 내지 11c) 및 조정용 리드 핀(12)(12A-12E)에 와이어(10)를 통하여 전기적으로 접속된다. 출력용 리드 핀(11)은, 압력 검출 소자(2)에서 검출된 압력에 응한 전압 신호를 외부에 출력하기 위한 것이고, 조정용 리드 핀(12)은, 제조시의 전압 보정용 등에 이용된다.The pressure detecting element 2 has a wire 10 connected to the output lead pins 11 (11A to 11c) and the adjustment lead pins 12 (12A-12E) through which the through holes 4a formed in the base 4 are inserted. It is electrically connected through. The output lead pin 11 is for outputting the voltage signal corresponding to the pressure detected by the pressure detection element 2 to the outside, and the adjustment lead pin 12 is used for voltage correction etc. at the time of manufacture.

베이스(4)의 관통구멍(4a)은, 출력용 리드 핀(11) 및 조정용 리드 핀(12)을 삽통시킨 후, 허메틱 실(hermetic seal; b)에 의해 액체(오일) 누설이 없도록 막혀진다. 출력용 리드 핀(11)은, 도시를 생략하지만, 그 상단부에서 기판에 접속되고, 기판은, 또한 커넥터 및 외부 출력용 리드선에 접속된다.The through hole 4a of the base 4 is plugged so that there is no liquid (oil) leakage by the hermetic seal b after inserting the output lead pin 11 and the adjustment lead pin 12. . Although the lead pin 11 for output is abbreviate | omitted, it is connected to the board | substrate at the upper end part, and the board | substrate is further connected to the connector and the lead wire for external outputs.

상기 구성을 갖는 압력 센서(1)는, 유입관(3)으로부터 유입한 냉매의 압력 변화에 의해 가압 공간(8)의 압력이 변화하고, 다이어프램(6)을 변형시킨다. 다이어프램(6)의 변형에 의해 수압 공간(7)의 내부에 봉입되어 있는 액체(오일)의 압력이 변화하고, 그 압력 변화가 압력 검출 소자(2)에 전파된다. 압력 검출 소자(2)에 의해 검출된 압력은, 전압으로 변환되고, 그 때, 압력 센서(1)의 특성에 응한 소정의 전압 보정이 이루어진다. 보정 후의 전압 신호는, 출력용 리드 핀(11), 기판 및 커넥터를 통하여 외부 출력용 리드선에 전송된다.In the pressure sensor 1 having the above-described configuration, the pressure in the pressurized space 8 changes due to the pressure change of the refrigerant flowing in from the inflow pipe 3, and the diaphragm 6 is deformed. By the deformation of the diaphragm 6, the pressure of the liquid (oil) enclosed in the hydraulic space 7 changes, and the pressure change propagates to the pressure detection element 2. The pressure detected by the pressure detecting element 2 is converted into a voltage, at which time a predetermined voltage correction in accordance with the characteristics of the pressure sensor 1 is performed. The voltage signal after the correction is transmitted to the external output lead wire through the output lead pin 11, the board and the connector.

이 압력 센서(1)를, CO2 등의 고압 냉매를 이용한 공조 기기의 냉매 유로 등의 압력을 검출하기 위해 사용하면, 유입관(3)으로부터 유입한 냉매의 높은 압력이 가압 공간(8)에 반복하여 가하여지고, 베이스(4)와 받이부재(5)를 이간시키는 방향으로 큰 힘이 반복하여 작용하지만, 받이부재(5) 및 다이어프램(6)이 용접부(14)에서 일체화되어 있는 것에 더하여, 협지부재(13)에 의해 다이어프램(6)을 끼워 지지한 상태의 베이스(4) 및 받이부재(5)를 끼워 지지하고 있기 때문에, 용접부(14)에 갈라짐 등이 생길 우려가 없고, 압력 센서(1)의 파손을 효과적으로 방지할 수 있다.When the pressure sensor 1 is used to detect the pressure of the refrigerant flow path of the air conditioning equipment using high pressure refrigerant such as CO 2 , the high pressure of the refrigerant flowing from the inlet pipe 3 is applied to the pressurized space 8. It is applied repeatedly, and a large force acts repeatedly in the direction of separating the base 4 and the receiving member 5, but in addition to the receiving member 5 and the diaphragm 6 are integrated in the weld 14, Since the base 4 and the receiving member 5 in a state where the diaphragm 6 is held by the clamping member 13 are held in place, there is no fear of cracking or the like in the welded portion 14, and the pressure sensor ( The damage of 1) can be effectively prevented.

1 : 압력 센서 2 : 압력 검출 소자
3 : 유입관 4 : 베이스
4a : 관통구멍 4b : 허메틱 실
4c : 주연부 5 : 받이부재
5a : 주연부 6 : 다이어프램
7 : 수압 공간 8 : 가압 공간
9 : 볼 10 : 와이어
11(11A 내지 11C) : 출력용 리드 핀 12(12A 내지 12E) : 조정용 리드 핀
13 : 협지부재 13a : 상방 개구단부
13b : 하방 개구단부 14, 15 : 용접부1 pressure sensor 2 pressure detecting element
3: inlet tube 4: base
4a: through hole 4b: hermetic thread
4c: peripheral part 5: receiving member
5a: peripheral part 6: diaphragm
7: pressure space 8: pressure space
9: ball 10: wire
11 (11A to 11C): Output lead pin 12 (12A to 12E): Adjustment lead pin
13: sandwiching member 13a: upper opening end
13b: downward opening end 14, 15: welding part

Claims (2)

압력 검출 소자와,
그 압력 검출 소자가 내면에 고정된 베이스와,
그 베이스에 대향하여 배치된 받이부재와,
상기 베이스와 상기 받이부재 사이에 끼여 지지된 다이어프램과,
그 다이어프램을 끼워 지지한 상태의 상기 베이스 및 상기 받이부재를, 양자가 서로 이간하는 것을 방지하도록 양자를 끼워 지지하는 협지부재와,
상기 베이스와 상기 다이어프램 사이의 공간에 봉입된 액체를 구비하고,
상기 받이부재와 상기 다이어프램 사이의 공간 내의 압력이, 상기 다이어프램 및 상기 액체를 통하여 상기 압력 검출 소자에 전달되는 것을 특징으로 하는 압력 센서.A pressure detection element,
A base whose pressure detecting element is fixed to an inner surface thereof,
A receiving member disposed opposite the base,
A diaphragm sandwiched between the base and the receiving member;
A holding member for sandwiching both the base and the receiving member in a state where the diaphragm is held by the diaphragm so as to prevent them from being separated from each other;
A liquid enclosed in a space between the base and the diaphragm,
And a pressure in the space between the receiving member and the diaphragm is transmitted to the pressure detecting element via the diaphragm and the liquid. 제 1항에 있어서,
상기 협지부재는, 원통형상으로 형성되고, 한쪽의 개구단부가 상기 베이스 또는 상기 받이부재의 어느 한쪽과 계합하고, 다른쪽의 개구단부가 상기 베이스 또는 상기 받이부재의 어느 다른쪽과 용접 접합되는 것을 특징으로 하는 압력 센서.The method of claim 1,
The holding member is formed in a cylindrical shape, and one opening end is engaged with either the base or the receiving member, and the other opening end is welded and joined with the other of the base or the receiving member. Characterized by a pressure sensor.
KR1020120053488A 2011-09-02 2012-05-21 Pressure sensor KR102009043B1 (en)

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