KR20130007868A

KR20130007868A - Gas cabinet

Info

Publication number: KR20130007868A
Application number: KR1020110068480A
Authority: KR
Inventors: 이효석
Original assignee: 주식회사 엘앤엘
Priority date: 2011-07-11
Filing date: 2011-07-11
Publication date: 2013-01-21

Abstract

A gas cabinet is disclosed. The gas cabinet according to the present embodiment includes a cabinet body which is opened to one side and a gas container is disposed therein; A cabinet door coupled to the cabinet body to open and close the opening of the cabinet body; It characterized in that it comprises a safety exhaust guide member occupies some of the surplus space inside the cabinet body.

Description

Gas cabinet

The present invention relates to a gas cabinet.

In general, the process gas required for the process is used in the manufacturing process, such as semiconductor, LCD. The process gas is supplied to the process chamber through a gas transfer line connected to the gas container while stored in the gas container. The process gas contains hydrogen (H 2), silane (SiH 4) or nitrogen trifluoride (NF 3), and the like, which is highly toxic and can be fatal to humans when exposed to the outside.

Process gas is often leaked to the outside through the connecting portion of the gas container and the gas transfer line, the gas container and the connection portion of the gas container and the gas transfer line to the gas to prevent human injury due to such leaking gas It is common to arrange and use inside the cabinet.

With the use of gas cabinets, there is a need to develop technologies for safely and quickly discharging leakage gas inside gas cabinets to the outside.

In the most common method, a method of quickly exhausting the air inside the gas cabinet using a large capacity air pump or blower can be used. However, this method is expensive because it requires the use of an expensive air pump or blower.

In addition, various leakage gas emission technologies have been introduced, but all have a complicated structure, which is inconvenient to manufacture and ineffective.

Embodiments of the present invention seek to provide a gas cabinet that is simply and effectively configured to safely discharge leaking gas inside a gas cabinet.

According to an aspect of the present invention, a gas cabinet for receiving a gas container in which the process gas is stored, the cabinet body is open to one side and the gas container is disposed therein; A cabinet door coupled to the cabinet body to open and close the opening of the cabinet body; Provided is a gas cabinet comprising a safety exhaust guide member occupying a part of the surplus space inside the cabinet body.

In this case, the safety exhaust guide member may be formed to surround a part of the gas container.

Furthermore, the container opposing part of the safety exhaust inducing member facing the gas container may have a shape corresponding to the outer shape of the gas container.

Furthermore, the container opposing part may be in close contact with the gas container.

Further, the container opposing portion may be made of an elastic material.

Furthermore, the safety exhaust guide member may be formed extending in the longitudinal direction of the gas container.

At this time, the cabinet door is hinged to the cabinet body, the safety exhaust guide member may be attached to the inner surface of the cabinet body.

Alternatively, the safety exhaust guide member may be disposed adjacent or proximate to a connection between a gas container and a piping component connected to the gas container and disposed inside the cabinet body.

According to embodiments of the present invention, it is possible to safely and easily discharge the leaking gas inside the gas cabinet.

1 is a perspective view of a gas cabinet according to an embodiment of the present invention,
2 is a cross-sectional view taken along line AA of FIG.
3 is a sectional view taken along line BB of FIG.
4 is a view schematically showing a gas cabinet according to another embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings, in the following description with reference to the accompanying drawings, the same or corresponding components are given the same or corresponding reference numerals and duplicate description thereof. Will be omitted.

1 is a perspective view of a gas cabinet according to an embodiment of the present invention, FIG. 2 is a sectional view taken along the line A-A of FIG. 1, and FIG. 3 is a sectional view taken along the line B-B of FIG. 1 to 3, the gas cabinet 100 according to the present embodiment includes a cabinet body 110, a cabinet door 130, and a safety exhaust guide member 150. The gas cabinet 100 according to the present embodiment accommodates the gas container 10 in which the process gas is stored therein so that the process gas leaked from the gas container 10 flows out to the workplace where the gas cabinet 100 is placed. In addition to preventing, the process gas leaked from the gas container 10 is exhausted quickly and effectively to the outside of the workplace.

Hereinafter, the configuration of the gas cabinet 100 according to the present embodiment will be described in detail.

The cabinet body 110 is opened to one side, the gas container 10 is disposed therein. Inside the cabinet body 110, not only the gas container 10 but also a pipe part 20 connected to the gas container 10 may be disposed. Here, the piping component 20 is for interconnecting the gas container 10 and a gas transfer line (not shown), and may include, for example, a CGA, a valve, a filter, a regulator, and the gas transfer line. Provides a passage for the process gas stored in 10 to be transferred to a process chamber (not shown).

The cabinet door 130 may be coupled to the cabinet body 110 to open and close the opening of the cabinet body 110. At this time, the cabinet door 130 may be hinged to the cabinet body 110, but is not limited thereto. When the cabinet door 130 closes the opening, the process gas leaked from the gas container 10 is prevented from leaking to the outside through the opening.

The process gas leaked from the gas container 10 into the cabinet body 110 is safely discharged to the outside through the exhaust pipe 113 provided in the cabinet body 110. In more detail, air is introduced into the cabinet body 110 through the intake pipe 111 provided in the cabinet body 110, and the introduced air is discharged through the exhaust pipe 113 together with the leaked process gas. do.

In this case, the gas container 10 may be upright in the vertical direction, the intake pipe 111 may be located at the lower end of the cabinet body 110, and the exhaust pipe 113 may be located at the upper end of the cabinet body 110. It is not limited to this.

According to this embodiment, the safety exhaust guide member 150 may be disposed in some of the surplus space inside the cabinet body 110. Here, the surplus space means a space that is normally left in the interior space of the cabinet body 110, that is, for example, the gas container 10 and the piping component 20, and the like and remain as an empty space. However, the article normally disposed in the internal space of the cabinet body 110 excludes the safety exhaust guide member 150 according to the present embodiment.

The process gas leaked from the gas container 10 into the cabinet body 110 is distributed in the surplus space, and provides a passage for moving the fluid when the process gas is discharged.

According to the present embodiment, the safety exhaust guide member 150 induces the process gas inside the cabinet body 110 to be safely discharged to the outside. To this end, the safety exhaust guide member 150 occupies a part of the surplus space to reduce the volume of the total surplus space.

Typically the flow rate inside the fluid passage is inversely proportional to the cross sectional area of the fluid passage when the flow rates are the same. Therefore, when the safety exhaust guide member 150 occupies a part of the surplus space, the cross-sectional area of the surplus space can be reduced as a whole, and the flow rate of air flowing along the surplus space increases. Here, increasing the flow rate of air flowing along the surplus space means that the leaked process gas is discharged through the exhaust pipe 113 more safely and effectively.

Conventionally, there is a known method of using a high capacity blower to increase the air flow rate inside the cabinet body, but such a method has a problem of increased cost. On the contrary, the gas cabinet 100 according to the present embodiment uses the safety exhaust guide member 150 to reduce the size of the surplus space inside the cabinet body 110, thereby inexpensively and effectively reducing the air flow rate inside the cabinet body 110. Increase.

2, the safety exhaust guide member 150 according to the present embodiment may be formed to surround a part of the gas container 10. Among the objects disposed inside the cabinet body 110, the gas container 10 is relatively large compared to other objects. Accordingly, the gas container 10 occupies a substantial portion of the internal space of the cabinet body 110. Therefore, when the safety exhaust guide member 150 is formed to surround the gas container 10, the size of the surplus space is effectively reduced, the flow rate of the air inside the cabinet body 110 can be effectively increased.

1 and 2, the container opposing portion 151 of the safety exhaust guide member 150 that faces the gas container 10 may have a shape corresponding to the outer shape of the gas container 10. For example, as can be seen in FIG. 2, the vessel opposing portion 151 has a circular cross section corresponding to the contour of the gas vessel 10.

In this case, as shown in FIG. 2, the container opposing part 151 may be spaced apart from the outer circumferential surface of the gas container 10 at a predetermined interval. Alternatively, although not shown, the container opposing portion 151 may be in close contact with the gas container 10.

When the container opposing portion 151 is in close contact with the gas container 10, the excess space can be reduced more effectively. Furthermore, as the container opposing portion 151 is in close contact with the gas container 10, the gas container 10 may be stably supported by the safety exhaust guide member 150.

The container opposing portion 151 may be made of an elastic material. In this case, the container opposing portion 151 can be brought into close contact with the gas container 10 effectively, and prevents damage to the gas container 10.

Referring to FIG. 3, the safety exhaust guide member 150 according to the present exemplary embodiment may extend in the longitudinal direction of the gas container 10. When the safety exhaust guide member 150 is formed to extend in the longitudinal direction of the gas container 10, a movement passage of air having a relatively small cross-sectional area is formed along the longitudinal direction of the gas container 10.

Among the objects occupying the internal space of the cabinet body 110, the gas container 10 is relatively longer than other objects. Accordingly, when the safety exhaust guide member 150 is formed to extend in the longitudinal direction of the gas container 10, the movement passage of air may be formed to extend in the longitudinal direction of the gas container 10.

The air introduced into the cabinet body 110 through the intake pipe 111 may be sufficiently accelerated while moving along the moving passageway of the air formed by the safety exhaust guide member 150, thereby ensuring safety against leakage gas. Rapid exhaust can be achieved.

According to the present embodiment, the position where gas leakage is likely, that is, the connection portion between the gas container 10 and the piping component 20 is located at the end of the air movement passage formed by the safety exhaust guide member 150. Thus, the flow rate of air at the connection between the gas vessel 10 and the piping component 20 may have a value sufficient to quickly and safely discharge the leaking gas.

1 to 3, the safety exhaust guide member 150 according to the present embodiment may be attached to an inner side surface of the cabinet door 130. At this time, the cabinet door 130 is hinged to the cabinet body 110, the safety exhaust guide member 150 is preferably manufactured so as not to interfere with the cabinet body 110 when the cabinet door 130 is hinged.

When the safety exhaust guide member 150 is attached to the inner side of the cabinet door 130 as described above, the gas container 10 or the piping parts 20 are immediately exposed only by opening the cabinet door 130. Repair or replacement of the gas container 10 or the piping component 20 disposed inside the body 110 is easy.

Alternatively, the safety exhaust guide member 150 may be disposed in a surplus space inside the cabinet body 110 in a state in which it is not shown but is not attached to the cabinet door 130. In this case, the safety exhaust guide member 150 may be disposed inside the cabinet body 110 through the opening of the cabinet body 110 in a state where the cabinet door 130 is opened. In this case, the safety exhaust guide member 150 may be directly attached to the outer circumferential surface of the gas container 10 or may be attached to the inner surface of the cabinet body 110.

Hereinafter, a process in which the gas cabinet 100 according to the present embodiment quickly and effectively safely discharges the leaked process gas will be described with reference to FIG. 3. For reference, arrows in FIG. 3 indicate the flow of air introduced into the cabinet body 110 through the intake pipe 111 and discharged through the exhaust pipe 113.

Predetermined air is introduced into the cabinet body 110 through the intake pipe 111. The air introduced through the intake pipe 111 moves to the exhaust pipe 113 side along the air movement passage formed by the safety exhaust guide member 150.

At this time, since the safety exhaust guide member 150 is formed to surround a part of the gas container 10 and extends along the longitudinal direction of the gas container 10, the air moving toward the exhaust pipe 113 is the gas container 10. Is sufficiently accelerated along the longitudinally extending air movement passage.

At this time, the position where the gas leakage is likely, that is, the connection portion between the gas container 10 and the piping component 20 is located at the end of the air passage formed by the safety exhaust guide member 150, so that the gas container 10 and Even if gas leaks from the connection between the piping parts 20, the leaked gas may be safely and quickly discharged through the exhaust pipe 113 together with the air accelerated by the safety exhaust guide member 150.

4 is a view schematically showing a gas cabinet according to another embodiment of the present invention. Referring to FIG. 4, the gas cabinet 200 according to the present embodiment includes a cabinet body 110, a cabinet door 130, and a safety exhaust guide member 250. The gas cabinet 200 according to the present embodiment is different from the gas cabinet 100 according to the previous embodiment in the position of the safety exhaust guide member 250.

According to the present embodiment, the safety exhaust guide member 250 is disposed adjacent or proximate to the connection portion between the gas container 10 and the piping component 20 disposed inside the cabinet body 110. The piping component 20 is disposed inside the gas cabinet body 110 as described above, and may include, for example, a CGA, a valve, a filter, a regulator, and the like.

When the safety exhaust guide member 250 is disposed around the connection between the gas container 10 and the piping component 20, the surplus space having a different cross sectional area around the connection between the gas container 10 and the piping component 20 is surplus. It becomes relatively small compared to the cross sectional area of the space. This is seen from the point of view of the air flowing into the interior of the cabinet body 110 through the intake pipe 111 and moving to the connection side between the gas container 10 and the piping component 20, the gas container 10 and the piping The result is a sharp narrowing of the cross sectional area of the air movement passage around the connection between the parts 20.

Thus, the flow of air passing around the connection portion between the gas container 10 and the piping component 20 becomes relatively faster. In this case, the process gas leaked from the connection between the gas container 10 and the piping component 20 can be discharged through the exhaust pipe 113 quickly and effectively by the high flow rate of air.

The safety exhaust guide member 250 may be attached to the cabinet door 130 as shown in FIG. 4. Alternatively, the safety exhaust induction member may be attached directly to the connection between the piping component 20 or the gas container 10 and the piping component 20, although not shown. Alternatively, the safety exhaust guide member may be attached to an inner side surface of the cabinet body 130 although not shown.

Hereinafter, a process of discharging the leaked process gas quickly and effectively safely by the gas cabinet 200 according to the present embodiment will be described with reference to FIG. 4. For reference, arrows in FIG. 4 indicate the flow of air introduced into the cabinet body 110 through the intake pipe 111 and discharged through the exhaust pipe 113.

Predetermined air is introduced into the cabinet body 110 through the intake pipe 111. Air introduced through the intake pipe 111 moves to the exhaust pipe 113 side.

At this time, since the safety exhaust guide member 250 is disposed around the connection portion between the gas container 10 and the piping component 20, the air moving toward the exhaust pipe 113 is the gas container 10 and the piping component 20. The cross-sectional area around the connection between them is accelerated through the passage of the narrow air.

Therefore, even if the gas leaks from the connection between the gas container 10 and the piping component 20, the leaked gas safely and quickly discharged through the exhaust pipe 113 together with the air accelerated by the safety exhaust guide member 250. Can be.

Although the embodiments of the present invention have been described above, the spirit of the present invention is not limited to the embodiments presented herein, and those skilled in the art who understand the spirit of the present invention may add elements within the same scope. Other embodiments may be easily proposed by changing, deleting, adding, etc., but this will also fall within the scope of the present invention.

10: gas container
20: plumbing parts
110: cabinet body
111: intake pipe
113: exhaust pipe
130: cabinet door
150, 250: safety exhaust guide member
151: container facing part

Claims

In the gas cabinet for receiving a gas container in which the process gas is stored,
A cabinet body opened to one side and the gas container disposed therein;
A cabinet door coupled to the cabinet body to open and close the opening of the cabinet body;
Gas cabinet, characterized in that it comprises a safety exhaust guide member occupying a part of the surplus space inside the cabinet body.

The method of claim 1,
The safety exhaust guide member,
Gas cabinet, characterized in that formed to surround a portion of the gas container.

The method of claim 2,
The container facing part of the safety exhaust guide member facing the gas container has a shape corresponding to the outer shape of the gas container.

The method of claim 3,
And the container opposed portion is in close contact with the gas container.

5. The method of claim 4,
Gas container, characterized in that the container opposing portion made of an elastic material.

The method of claim 2,
The safety exhaust guide member,
Gas cabinet, characterized in that extending in the longitudinal direction of the gas container.

7. The method according to any one of claims 1 to 6,
The cabinet door is hinged to the cabinet body,
The safety exhaust guide member is a gas cabinet, characterized in that attached to the inner surface of the cabinet body.

The method of claim 1,
The safety exhaust guide member,
And a gas cabinet adjacent to or adjacent to a connection portion between the gas container and a pipe part connected to the gas container and disposed inside the cabinet body.