KR20130007469A - 이상 검출 장치 및 이상 검출 방법 - Google Patents

이상 검출 장치 및 이상 검출 방법 Download PDF

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Publication number
KR20130007469A
KR20130007469A KR1020120069186A KR20120069186A KR20130007469A KR 20130007469 A KR20130007469 A KR 20130007469A KR 1020120069186 A KR1020120069186 A KR 1020120069186A KR 20120069186 A KR20120069186 A KR 20120069186A KR 20130007469 A KR20130007469 A KR 20130007469A
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KR
South Korea
Prior art keywords
high frequency
signal
frequency signal
waveform pattern
abnormal discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020120069186A
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English (en)
Korean (ko)
Inventor
미치코 나카야
하루키 오미네
테츠 즈나모토
히로시 나가이케
Original Assignee
도쿄엘렉트론가부시키가이샤
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Publication date
Application filed by 도쿄엘렉트론가부시키가이샤 filed Critical 도쿄엘렉트론가부시키가이샤
Publication of KR20130007469A publication Critical patent/KR20130007469A/ko
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H01J37/32183—Matching circuits

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
KR1020120069186A 2011-06-27 2012-06-27 이상 검출 장치 및 이상 검출 방법 Withdrawn KR20130007469A (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2011141492 2011-06-27
JPJP-P-2011-141492 2011-06-27
JPJP-P-2012-142092 2012-06-25
JP2012142092A JP2013033726A (ja) 2011-06-27 2012-06-25 異常検出装置及び異常検出方法

Publications (1)

Publication Number Publication Date
KR20130007469A true KR20130007469A (ko) 2013-01-18

Family

ID=47789412

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120069186A Withdrawn KR20130007469A (ko) 2011-06-27 2012-06-27 이상 검출 장치 및 이상 검출 방법

Country Status (3)

Country Link
JP (1) JP2013033726A (https=)
KR (1) KR20130007469A (https=)
TW (1) TW201316374A (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111094996A (zh) * 2018-01-16 2020-05-01 株式会社日立高新技术 检体处理系统
CN111755310A (zh) * 2019-03-26 2020-10-09 日本电产株式会社 等离子处理装置
KR20230078406A (ko) 2021-11-26 2023-06-02 주식회사 뉴파워 프라즈마 잡음 특성 향상을 위한 rf 제너레이터 전원 제어 시스템

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI562252B (en) * 2014-02-17 2016-12-11 Shinkawa Kk Detecting discharging device, wire bonding device and detecting discharging method
JP6496579B2 (ja) * 2015-03-17 2019-04-03 東京エレクトロン株式会社 基板処理方法及び基板処理装置
WO2022064558A1 (ja) * 2020-09-23 2022-03-31 株式会社Kokusai Electric 半導体装置の製造方法、異常予兆検知方法、異常予兆検知プログラム、及び基板処理装置
EP4450966A4 (en) * 2021-12-13 2026-01-21 Proterial Ltd State monitoring system and state monitoring method
CN114935708B (zh) * 2022-05-24 2025-08-22 广西电网有限责任公司柳州供电局 一种线路放电异常的识别方法
TW202420392A (zh) 2022-07-22 2024-05-16 日商東京威力科創股份有限公司 檢測方法及電漿處理裝置
CN116378949A (zh) * 2023-03-21 2023-07-04 中国科学院沈阳科学仪器股份有限公司 一种新型极高真空离子泵异常放电检测与抑制装置
CN118091398B (zh) * 2024-04-09 2024-06-28 浙江索高电气科技有限公司 一种高压开关设备局部放电故障识别方法、设备及介质
JP2026011484A (ja) 2024-07-12 2026-01-23 東京エレクトロン株式会社 異常放電検出方法及び制御装置
CN118898363B (zh) * 2024-07-15 2025-03-18 无锡军工智能电气股份有限公司 矿用电力智能运行监控系统及方法
CN120632492B (zh) * 2025-08-13 2025-11-11 浙江冠博流体科技有限公司 流体管路系统隔膜阀故障自适应识别方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111094996A (zh) * 2018-01-16 2020-05-01 株式会社日立高新技术 检体处理系统
CN111755310A (zh) * 2019-03-26 2020-10-09 日本电产株式会社 等离子处理装置
KR20230078406A (ko) 2021-11-26 2023-06-02 주식회사 뉴파워 프라즈마 잡음 특성 향상을 위한 rf 제너레이터 전원 제어 시스템

Also Published As

Publication number Publication date
JP2013033726A (ja) 2013-02-14
TW201316374A (zh) 2013-04-16

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