KR20120127285A - Method and apparatus for manufacturing organic el device, and organic el device - Google Patents

Abstract

PURPOSE: A method and apparatus for manufacturing an organic electroluminescent device, and the organic electroluminescent device are provided to easily wind a basic material on which an organic EL layer is formed by preventing damage to the organic EL layer. CONSTITUTION: A material supply device(5) supplies a strip shaped basic material(21). A can roll(7) rotates according to the movement of the basic material. Deposition sources(9a,9b) form an organic EL layer on the basic material by discharging a vaporized organic layer forming material(22) and a cathode layer forming material(28). A recovery system(6) winds the basic material on which the organic EL layer is formed by the deposition source. A protection film supply device(8) supplies a protection film(30).

Description

The manufacturing method of an organic EL element, its manufacturing apparatus, and an organic EL element TECHNICAL FIELD AND METHOD OF MANUFACTURING ORGANIC EL DEVICE, AND ORGANIC EL DEVICE

The present invention relates to a method for producing an organic EL element, an apparatus for producing the same, and an organic EL element, wherein an organic EL film having an electrode layer and an organic layer is formed on a substrate and configured to emit light from the organic layer.

In recent years, an organic EL (electroluminescent) element has attracted attention as an element used in a next generation low power consumption light emitting display device. The organic EL element basically has an organic layer including a light emitting layer made of an organic light emitting material and a pair of electrodes. Such organic EL devices are attracting attention as display applications such as televisions (TVs) because they are derived from organic light emitting materials and emit light of various colors and are self-luminous devices.

Such an organic EL element is composed of a base material and an organic EL film, and the organic EL film is composed of an organic layer sandwiched between two electrode layers having electrodes opposite to each other (sandwich structure). The organic layer sandwiched between the electrode layers is supported on the substrate, and an organic EL element is formed by laminating the anode layer, the organic layer, and the cathode layer on the substrate in this order.

In the method of manufacturing such an organic EL device, a vacuum vapor deposition method or a coating method is generally known as a method of forming (forming) an organic layer and a cathode layer on an anode layer formed on a substrate, but among them, in particular, for forming an organic layer Since the purity of a material (organic layer forming material) can be improved and a high lifetime can be obtained, the vacuum evaporation method is mainly used.

In the vacuum deposition method described above, an organic layer and a cathode layer are formed by vapor deposition on a substrate using a vapor deposition apparatus having a vacuum chamber and a deposition source disposed corresponding to an organic layer and a cathode layer in the vacuum chamber, respectively. Specifically, the organic layer forming material and the cathode layer forming material are heated and vaporized by a heating section disposed in each deposition source, and the vaporized organic layer forming material and the cathode layer forming material (vaporizing material) are discharged from each deposition source, An organic layer is formed by depositing on the anode layer formed in the base material, and a cathode layer is formed by depositing on the said organic layer.

In such a vacuum vapor deposition method, what is called a batch process and a roll process is employ | adopted. The arrangement step is a step of depositing an organic layer and a cathode layer on the anode layer for each substrate on which the anode layer is formed. In addition, a roll process means that a strip | belt-shaped base material formed by an anode layer and wound up in roll shape is continuously unloaded, and it is continuous on an anode layer, moving and supporting it with the surface of the can roll which drives the unwound base material to rotate. It is a process of forming an organic layer and a cathode layer by this, and winding the base material in which the organic electroluminescent film was formed in roll shape in this way. Among them, from the viewpoint of reducing the cost, it is preferable to manufacture the organic EL device using a roll process.

However, in the case where the roll process is employed in the vacuum deposition method in this manner, when the substrate on which the organic EL film is formed is wound and recovered in a roll shape, the organic EL film formed on the substrate and the organic EL film in the substrate are not formed. The surface side (non-deposition surface side) which does not become friction. And since the surface of a base material normally has a fine unevenness | corrugation, the organic EL film | membrane scratches by the friction of a base material and an organic EL film, and it becomes a cause of leakage and light emission defect, and also a yield falls.

Therefore, when winding up and recovering the base material in which the organic EL film was formed, it is organic by winding up a base material through a protective film between the organic EL film on the base material first wound up, and the non-deposition surface of the base material next wound up. A technique for preventing scratches on the EL film has been proposed (see Patent Document 1).

Japanese Patent Laid-Open No. 2006-294536

However, simply sandwiching a protective film between the organic EL film on the substrate first wound up and the non-deposition surface side of the substrate to be wound next, is sandwiched between the organic EL film and the non-deposition surface side of the substrate described above. By winding up, there exists a possibility that the position shift of a protective film may arise with respect to an organic EL film. And since a protective film and an organic EL film are rubbed by such a position shift, even if a protective film is interposed between the said organic EL film and the non-deposition surface side of a base material, there exists a possibility that a scratch may arise in an organic EL film. have.

Here, in order to prevent the damage of the organic electroluminescent film which arises by said position shift, it is also possible to adhere | attach a protective film to the vapor deposition surface side in a base material using an adhesive agent. However, when a protective film is adhere | attached on the vapor deposition surface side, an adhesive agent may adhere to an organic electroluminescent film and may damage an organic electroluminescent film.

Moreover, even if it interposes a protective film as mentioned above, a slight friction may generate | occur | produce between a protective film and an organic EL film by vibration etc., and there exists a possibility that a flaw may arise in an organic EL film.

SUMMARY OF THE INVENTION In view of the above problems, the present invention provides a method for producing an organic EL device, a manufacturing apparatus thereof, and an organic EL device which can wind a substrate on which the organic EL film is formed while preventing damage to the organic EL film formed on the substrate. The purpose.

MEANS TO SOLVE THE PROBLEM In order to solve the said subject, the manufacturing method of the organic electroluminescent element which concerns on this inventor organically supplies on the said base material by supplying a strip | belt-shaped base material, depositing the organic layer and electrode layer which comprise a light emitting layer on one surface side of the said base material at least one by one sequentially. It is a manufacturing method of the organic electroluminescent element which forms an EL film and performs winding of the said base material in which the said organic electroluminescent film was formed sequentially, and manufactures an organic electroluminescent element,

In the said winding, it is further characterized by winding up the said base material with the said protective film, supplying a strip | belt-shaped protective film softer than the said base material, and sticking to the non-deposition surface side of the said base material.

According to such a structure, it can prevent adhering an adhesive agent etc. to an organic EL film by winding up the said board | substrate, adhering a protective film to the non-deposited surface side of a base material, Moreover, a protective film can be prevented from attaching the non-deposited surface side of an base material and an organic EL film. When it is sandwiched between and, the positional shift with respect to the organic EL film can be prevented from occurring. As a result, it is possible to prevent the damage of the organic EL film by reducing the friction between the protective film and the organic EL film while preventing the adhesion of the adhesive or the like to damage the organic EL film. In addition, by using a protective film that is softer than the substrate, even when some friction occurs between the organic EL film and the protective film, damage to the organic EL film due to contact with the protective film can be prevented. Therefore, it becomes possible to wind up the base material on which the said organic EL film was formed, preventing the damage of the organic EL film formed on the base material.

Moreover, in the manufacturing method of the organic electroluminescent element which concerns on this invention, the said organic layer and the electrode opposite to the said 1st electrode layer on the said 1st electrode layer, supplying the said base material in which the 1st electrode layer was formed in the one surface side. It is preferable to deposit two electrode layers sequentially.

Moreover, in the manufacturing method of the organic electroluminescent element which concerns on this invention, it is preferable that the elasticity modulus of the said protective film is 4.2 GPa or less.

Thereby, damage to the organic EL film formed on the base material can be prevented more reliably.

Moreover, in the manufacturing method of the organic electroluminescent element which concerns on this invention, it is preferable that the said base material is formed from a metal material.

As a result, especially when a substrate having a large surface irregularities is used and a relatively hard substrate is used, the substrate on which the organic EL film is formed can be wound while preventing damage to the organic EL film formed on the substrate, which is more effective.

Moreover, in the manufacturing method of the organic electroluminescent element which concerns on this invention, the said protective film has the adhesive layer which enables adhesion | attachment and peeling with respect to the said base material on one side, and the said protective film is said through the said adhesive layer. It is preferable to adhere to the non-deposition surface side of a base material.

Thereby, since the said protective film can be adhere | attached and peeled with respect to the said base material, the shift | offset | difference of a protective film and a base material can be prevented.

Moreover, the manufacturing apparatus of the organic electroluminescent element which concerns on this invention,

A vapor deposition unit for forming an organic EL film on the substrate by supplying a band-shaped substrate, and sequentially depositing an organic layer and an electrode layer including an emission layer on one surface of the substrate;

It is a manufacturing apparatus of the organic electroluminescent element provided with the collection part which winds up the base material with which the said organic electroluminescent film was formed by the said vapor deposition part sequentially,

It is further provided with the protective film supply part which supplies the strip | belt-shaped protective film softer than the said base material,

The recovery part is configured to wind the substrate together with the protective film while adhering the protective film supplied from the protective film supply part to the non-deposition surface side of the substrate.

Moreover, in the manufacturing apparatus of the organic electroluminescent element which concerns on this invention, while the said vapor deposition part is supplied with the said base material in which the 1st electrode layer was formed in one surface side, it is opposite to the said organic layer and the said 1st electrode layer on the said 1st electrode layer. It is preferred to be configured to sequentially deposit a second electrode layer that is an electrode.

In addition, the organic EL device according to the present invention,

It is an organic electroluminescent element provided with the organic electroluminescent film which has a 1st electrode layer, the organic layer containing a light emitting layer, and the 2nd electrode layer which is an electrode opposite to the said 1st electrode layer on one surface side of a base material,

The protective film which is softer than the said base material is adhere | attached on the surface opposite to the said organic EL film in the said base material, It is characterized by the above-mentioned.

As mentioned above, according to this invention, it becomes possible to wind the base material in which the said organic EL film was formed, preventing the damage of the organic EL film formed on the base material.

BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic side sectional drawing which shows typically the manufacturing apparatus of the organic electroluminescent element which concerns on one Embodiment used for the manufacturing method of the organic electroluminescent element which concerns on one Embodiment of this invention.
FIG. 2 is a schematic cross-sectional view showing an enlarged S region indicated by a broken line in FIG. 1. FIG.
3 is a schematic side sectional view schematically showing a state in which a plurality of deposition sources are provided in a vacuum chamber.
Fig. 4A is a schematic side cross-sectional view schematically showing the layer structure of an organic EL element in which an organic EL film is formed on one surface side of a substrate and a protective film is adhered to the other surface side, showing a case where the organic layer is one layer.
Fig. 4B is a schematic side cross-sectional view schematically showing the layer structure of an organic EL element in which an organic EL film is formed on one surface side of a substrate and a protective film is adhered on the other surface side, showing a case where the organic layers are three layers.
Fig. 4C is a schematic side cross-sectional view schematically showing the layer structure of an organic EL element in which an organic EL film is formed on one surface side of a substrate and a protective film is adhered to the other surface side, showing a case where the organic layers are five layers.

EMBODIMENT OF THE INVENTION Below, the manufacturing method of the organic electroluminescent element which concerns on this invention, the manufacturing apparatus of this organic electroluminescent element, and an organic electroluminescent element are demonstrated, referring drawings.

1 and 2, the manufacturing apparatus 1 of organic electroluminescent element supplies from the base material supply apparatus 5 which is a base material supply part which supplies the strip | belt-shaped base material 21, and the said base material supply apparatus 5 The can roll 7 which is the conveyance part which drives rotationally in accordance with the movement of the said base material 21, and the vaporized organic layer formation material 22 and the negative electrode layer formation material 28 are discharged in contact with the non-deposited surface side of the obtained base material 21 The organic layer including the light emitting layer and the cathode layer are sequentially deposited on the anode layer 23 formed on the substrate 21 in contact with the can roll 7 to form the organic EL film 19 on the substrate 21. Supplying the vapor deposition source 9 which is a vapor deposition part, the recovery part 6 which is a recovery part which winds up the base material 21 in which the organic electroluminescent film 19 was formed by the said vapor deposition source 9, and the protective film 30 The protective film supply apparatus 8 which is a protective film supply part is provided. Moreover, the recovery apparatus 6 winds the said base material 21 together with the protective film 30, adhere | attaching the protective film 30 supplied from the protective film supply apparatus 8 to the non-deposition surface side of the base material 21. Consists of.

Moreover, the said manufacturing apparatus 1 is further equipped with the vacuum chamber 3, In the vacuum chamber 3, the said base material supply apparatus 5, the can roll 7, and the several deposition source ( 9), the protective film supply apparatus 8, and the collection | recovery apparatus 6 are arrange | positioned. The inside of the vacuum chamber 3 is made into a reduced pressure state by the vacuum generator which is not shown in figure, and can form a vacuum area inside.

As the said base material supply apparatus 5, the base material supply roller 5 which unwinds the strip | belt-shaped base material 21 wound in roll shape is provided. As the said collection | recovery apparatus 6, the winding roller 6 which winds up the unwrapped base material 21 with a protective film is provided. That is, the base material 21 unwound from the base material supply roller 5 is wound up by the winding roller 6 after being supplied to the can roll 7.

In addition, as said protective film supply apparatus 8, the protective film supply roller 8 which unwinds the strip | belt-shaped protective film 30 wound in roll shape is provided, and this protective film supply roller is mentioned later, The protective film 30 unwound from (8) is wound on the winding roller 6 while adhering to the non-deposition surface side of the base material 21.

The can roll 7 is formed from cylindrical stainless steel, and is to be rotationally driven. The can roll 7 is unwound (supplied) from the substrate supply roller 5, and is disposed at a position where the substrate 21 wound around the winding roller 6 is wound over a predetermined tension, and the can roll ( The non-deposition surface side (specifically, the side opposite to the side in which an anode layer was provided) of the base material 21 is supported by the peripheral surface (surface) of 7). In addition, by rotating the can roll 7 (counterclockwise in FIG. 1), the wound (supported) substrate 21 can be moved together with the can roll 7 in the rotation direction.

Such can roll 7 preferably has a temperature adjusting mechanism such as a cooling mechanism therein, whereby the temperature of the substrate 21 can be stabilized during film formation of the organic layer on the substrate 21 described later. have. The outer diameter of the can roll 7 can be set to 300-2000 mm, for example.

Then, when the can roll 7 rotates, the substrate 21 is sequentially released from the substrate supply roller 5 in accordance with the rotation thereof, and the released substrate 21 contacts and supports the peripheral surface of the can roll 7. While moving in the rotational direction thereof, the substrate 21 spaced apart from the can roll 7 is wound by the winding roller 6.

As the material for forming the base material 21, a material having flexibility that is not damaged even when wound around the can roll 7 can be used. As such a material, although a metal material and a nonmetal material are mentioned, for example, It is preferable that the base material 21 is formed of a metal material among these. Accordingly, even in the case where the surface unevenness is large and a relatively hard substrate 21 is used, the organic EL film 19 is formed while preventing scratches of the organic EL film 19 formed on the substrate 21. Since the base material 21 can be wound, it is more effective.

As said metal material, stainless steel (SUS), iron (Fe), aluminum (Al), etc. are mentioned, for example. Moreover, it is preferable that the said metal material is stainless from a viewpoint of rigidity.

As said nonmetallic material, a glass film, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), etc. are mentioned, for example. In addition, it is preferable that the said nonmetallic material is a glass film from a viewpoint of gas barrier property.

The anode layer 23 (refer FIG. 2) is previously formed in the surface of the said base material 21 by sputtering.

Examples of the material for forming the anode layer 23 include indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), gallium dope zinc oxide (GZO), and antimony-doped zinc oxide (AZO). Zinc oxide type materials, such as these, can be used.

In addition, when using the material which can be vapor-deposited by a vapor deposition source as another material of the anode layer 23, the vapor deposition source for the anode layer 23 is arrange | positioned in the vacuum chamber 3, and on the base material 21, The anode layer 23 may be formed by depositing the anode layer 23.

The vapor deposition source 9 is for forming the organic layer (refer FIG. 2, FIG. 4A-FIG. 4C) containing the light emitting layer 25a, and the cathode layer 27. FIG. The deposition source 9 is composed of a first deposition source 9a for forming an organic layer and a second deposition source 9b for forming a cathode layer 27. Moreover, one or more 1st deposition source 9a is provided according to the organic layer to be formed, and in this embodiment, forming one light emitting layer 25a (refer FIG. 2, FIG. 4A) as an organic layer. For this purpose, one first deposition source 9a is provided.

In addition, at the position opposite to the support region of the substrate 21 on the circumferential surface of the can roll 7, the first deposition source 9a on the upstream side in the moving direction of the substrate 21, and the second deposition source (on the downstream side) 9b) is arranged. The first and second vapor deposition sources 9a and 9b are configured to be capable of discharging the organic layer forming material 22 and the cathode layer forming material 28 vaporized by heating or the like toward the substrate 21, respectively. Then, the organic layer forming material 22 is deposited on the anode layer 23 formed on the substrate 21 by the first deposition source 9a, thereby emitting the light emitting layer 25a (on the anode layer 23). 2, 4A to 4C) and the cathode layer forming material 28 is deposited on the light emitting layer 25a by the second deposition source 9b to form the cathode layer 27 on the light emitting layer 25a. Are formed.

As described above, the light emitting layer 25a and the cathode layer 27 are successively deposited on the anode layer 23 formed on the substrate 21, so that the anode layer 23 and the light emitting layer ( An organic EL film 19 having 25a and a cathode layer 27 is formed, whereby the organic EL element 20 is formed.

The organic layer is composed of one organic constituent layer or a plurality of organic constituent layers are laminated. When the organic layer is composed of one organic constituent layer, the organic constituent layer is the above-described light emitting layer 25a. When the organic layer is composed of plural organic constituent layers, the plural organic constituent layers are composed of the light emitting layer 25a and organic constituent layers other than the light emitting layer 25a. Moreover, as organic constituent layers other than the light emitting layer 25a, the hole injection layer 25b, the hole transport layer 25d, the electron injection layer 25c, and the electron transport layer 25e are mentioned, for example.

In addition, as shown in FIG. 3, when the 1st vapor deposition source 9a makes an organic layer into a 3-layer laminated body as shown in FIG. 4B, it is provided three along the rotation direction of the can roll 7, for example. It can also be configured. When the plurality of first deposition sources 9a are provided in the rotational direction of the can roll 7 as described above, the anode layer 23 is formed on the anode layer 23 by the first deposition source 9a disposed on the most upstream side in the rotational direction. After the first organic constituent layer is deposited on the second organic constituent layer, the second constituent organic constituent layers can be deposited and laminated on the first constituent organic constituent layer by the downstream first deposition source 9a. .

Thus, if an organic layer contains a light emitting layer, it will not specifically limit, If needed, it can be comprised so that a some organic structural layer may be laminated | stacked and formed. For example, as shown in FIG. 4B, the hole injection layer 25b, the light emitting layer 25a, and the electron injection layer 25c can be laminated | stacked in this order, and an organic layer can also be set as a 3-layer laminated body. In addition, if necessary, the hole transport layer 25d (see FIG. 4C) is sandwiched between the light emitting layer 25a and the hole injection layer 25b shown in FIG. 4B or the light emitting layer 25a and the electron injection layer ( The organic layer can also be formed into a four-layer laminate by sandwiching the electron transporting layer 25e (see FIG. 4C) between 25c and 25c.

As shown in FIG. 4C, the electron transport layer 25e is interposed between the hole transport layer 25d, the light emitting layer 25a, and the electron injection layer 25c between the hole injection layer 25b and the light emitting layer 25a. The organic layer can also be formed into a five-layer laminate by sandwiching. In addition, although the film thickness of each layer is normally designed to be several nm to several tens nm, such a film thickness is suitably designed according to the organic layer forming material 22, light emission characteristics, etc., and is not specifically limited.

As a material for forming the light emitting layer 25a, for example, tris (8-quinolinol) aluminum (Alq3), [2-tert-butyl-6- [2- (2,3,6,7-tetra) Hydro-1,1,7,7-tetramethyl-1H, 5H-benzo [ij] quinolizine-9-yl) vinyl] -4H-pyran-4-ylidene] malononitrile (DCJTB) and the like can be used. Can be.

As a material for forming the hole injection layer 25b, for example, copper phthalocyanine (CuPc), N, N'-di (1-naphthyl) -N, N'-diphenyl-1,1'-ratio Phenyl 4,4 'diamine ((alpha) -NPD) etc. can be used.

As a material for forming the hole transport layer 25d, for example, N, N'-di (1-naphthyl) -N, N'-diphenyl-1,1'-biphenyl 4,4'diamine ( α-NPD), N, N, N ', N'-tetraphenyl-4,4'-diaminophenyl, N, N'-diphenyl-N, N'-bis (3-methylphenyl)-[1, 1'-biphenyl] -4,4'diamine (TPD) and the like can be used.

As a material for forming the electron injection layer 25c, for example, lithium fluoride (LiF), cesium fluoride (CsF), or the like can be used.

As a material for forming the electron transport layer 25e, for example, tris (8-quinolinol) aluminum (Alq3) or the like can be used.

As the cathode layer 27, aluminum (Al), magnesium silver (Mg / Ag), ITO, IZO, or the like can be used.

In this embodiment, as shown in FIG. 1 and FIG. 2, the winding roller 6 has the surface side (deposition surface side) in which the organic EL film 19 in the base material 21 in which the organic EL film 19 was formed was formed. The said base material 21 is wound up so that an outer side and a non-deposition surface side may be arrange | positioned inside. Moreover, the winding roller 6 adhere | attaches the said base material 21 with the protective film 30, adhere | attaching the protective film 30 extracted from the said protective film supply roller 8 to the non-deposition surface side of the said base material 21. It is to be wound up.

Moreover, the protective film 30 unwound from the said protective film supply roller 8 is comprised so that it may be softer than the base material 21, and the organic electroluminescent film 19 by the contact with the protective film 30 by this is formed. It is possible to prevent the occurrence of scratches in). In addition, as long as the protective film 30 is comprised so that it may be softer than the base material 21, it is not specifically limited, For example, it is preferable that the elasticity modulus of the protective film 30 is 4.2 GPa or less, and is 4.0 GPa or less It is more preferable. When the elastic modulus is 4.2 GPa or less, damage to the organic EL film 19 can be prevented more reliably.

Moreover, it is preferable that it is a material which is smoother than the base material 21 as a formation material of the protective film 30. As shown in FIG. Thereby, damage to the organic EL film 19 by the contact with the protective film 30 can be prevented more. Regarding the smoothness of the protective film 30, for example, it is preferable that the center line average roughness Ra is 2 nm or less, and the maximum height Rmax is 15 nm or less. Thereby, since the protective film 30 becomes smooth enough, the damage of the said organic EL film 19 can be prevented further.

Examples of the material for forming the protective film 30 include polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyimide (PI), polyethylene (PE), polypropylene (PP), and the like.

In this embodiment, the protective film 30 is comprised so that it may have the adhesive layer 30a which enables adhesion | attachment and peeling with respect to the said base material 21 on one surface side, and the protective film unwound from the protective film supply roller 8 The adhesive layer 30a of (30) is comprised so that it may adhere to the non-deposition surface side of the base material 21. As shown in FIG. That is, it is comprised so that the protective film 30 may adhere to the non-deposition surface side of the base material 21 through the adhesive layer 30a.

Thus, the protective film 30 has the adhesive layer 30a which enables adhesion | attachment and peeling with respect to the base material 21 on one side, and the protective film 30 is made into the base material through the said adhesive layer 30a ( By adhering to the non-deposition surface side of 21), the shift | offset | difference of the protective film 30 and the base material 21 can be prevented.

As a material (adhesive material) for forming such an adhesive layer 30a, rubber-type, acryl-type, silicone type adhesives are mentioned.

Moreover, it is preferable that the peeling strength of the adhesive layer 30a is 5 N / m or more. Thereby, peeling from the said base material 21 can be prevented after adhering the protective film 30 to the base material 21. Moreover, it is preferable that it is 100 N / m or less, and, as for the peeling strength of the said adhesive layer 30a, it is preferable that it is 60 N / m or less. When the peeling strength of the pressure-sensitive adhesive layer 30a is 100 N / m or less, the peeling strength is prevented from becoming too strong and the base material 21 is deformed when the protective film 30 is peeled from the base material 21. You can prevent it.

Such a protective film 30 having the pressure-sensitive adhesive layer 30a on one surface side can be formed by coating to apply the pressure-sensitive adhesive to the protective film. Such coating can be performed using a comma coater, a gravure coater, a slot die coater, etc., for example.

In the method of manufacturing the organic EL device according to the present embodiment, the organic layer including the light emitting layer 25a and the cathode layer (electrode layer) 27 are provided on one surface side of the substrate 21 while supplying a strip-shaped substrate 21. The organic EL element manufacturing method of manufacturing an organic electroluminescent element which forms an organic electroluminescent film 19 on the base material 21 at least by sequentially depositing, and advances the winding of the base material 21 in which the organic electroluminescent film 19 was formed. In the above winding, the base 21 is wound together with the protective film 30 while further supplying a strip-shaped protective film 30 that is softer than the base 21 and adhering to the non-deposition surface side of the base 21. .

In the present embodiment, the light emitting layer 25a and the anode layer 23 are provided on the anode layer 23 while supplying the substrate 21 on which the anode layer (first electrode layer) 23 is formed on one surface side. It is assumed that the cathode layer (second electrode layer) 27, which is the electrode opposite to the above, is sequentially deposited. In addition, the anode layer is formed on the substrate by a deposition source for forming the anode layer while supplying the substrate on which the anode layer is not previously formed, and the light emitting layer 25a is formed on the anode layer thus formed. And the cathode layer 27 may be formed sequentially.

In this embodiment, specifically, for example, first, the anode layer 23 is formed in advance on one surface side by sputtering or the like, and the substrate 21 wound in a roll shape is released from the substrate supply roll 5.

Subsequently, the first deposition source (on the anode layer 23 on the substrate 21 supported by the can roll 7 while moving the non-deposited surface side of the released substrate 21 in contact with the surface of the can roll 7). The light emitting layer 25a which is an organic layer is formed by 9a, and the cathode layer 27 is formed on the light emitting layer 25a by the second deposition source 9b, thereby forming an organic EL film (on the substrate 21). 19). Moreover, the protective film 30 is unwound from the protective film supply roller 8, and this adhesive film 30a is attached to the non-deposition surface side of the base material 21 in which the organic EL film 19 was formed. The base material 21 is wound up by the winding roller 6 with the protective film 30, sticking through it.

By this manufacturing method, the organic EL film 19 is formed on one surface side of the strip-shaped base material 21, and the protective film 30 is adhered to the surface side (non-deposition surface side) opposite to the organic EL film 19. And the wound organic EL element 20 can be manufactured.

In addition, according to this manufacturing method, the protective film 30 is adhered to the non-deposition surface side of the base material 21 by the protective film 30 between the non-deposition surface side of the base material 21 and the organic EL film 19. It is possible to prevent the position shift from occurring with respect to the organic EL film 19 by being fitted in the. As a result, friction between the protective film 30 and the organic EL film 19 can be reduced, and damage to the organic EL film 19 can be prevented. In addition, by using the protective film 30 which is softer than the base material 21, even when some friction occurs between the organic EL film 19 and the protective film 30, the contact with the protective film 30 is prevented. It becomes possible to prevent the damage of the organic EL film 19 by this. Therefore, it becomes possible to wind the base material 21 in which the said organic EL film 19 was formed, preventing the damage of the organic EL film 19 formed on the base material 21.

In addition, by preventing the occurrence of such damage, the yield can be improved. After the organic EL film 19 is formed on the substrate 21, the protective film 30 is brought into contact with and adhered to the non-deposition surface side of the substrate 21, so that the protective film 30 is formed by the light emitting layer 25a or the like. The influence on the formation of the cathode layer 27 can be avoided.

In addition, as described above, the organic EL element 20 wound up by the winding roller 6 can be unwound, cut, or the like to form a sheet-like organic EL element 20. That is, the organic EL film 19 which has the anode layer 23, the organic layer containing the light emitting layer 25a as at least one layer, and the cathode layer 27 is provided in the one surface side of the base material 21, and the base material 21 ), The organic EL element 20 in which the protective film softer than the base material 21 is adhere | attached on the organic EL film 19 and the opposite surface side (non-deposition surface side) in () can be formed. Thus, when the organic electroluminescent element 20 is formed in the sheet form by cutting etc., the organic electroluminescent element 20 wound up by the winding roller 6 is prevented from being damaged of the organic electroluminescent film 19 as mentioned above. Therefore, the damage of the organic EL film 19 is prevented also in the organic EL element 20 formed in the sheet form.

Although the manufacturing method of the organic electroluminescent element of this invention, its manufacturing apparatus, and organic electroluminescent element are as above-mentioned, this invention is not limited to each said embodiment, Design change is possible suitably in the intended range of this invention. For example, in the said embodiment, although the base material supply roller 5 was arrange | positioned in the vacuum chamber 3, if it is possible to pull out the base material 21 with the can roll 7, you may arrange | position outside the vacuum chamber 3, too. have. In addition, in the said embodiment, although the protective film supply apparatus 8 and the collection | recovery apparatus 6 were arrange | positioned in the vacuum chamber 3, the base material 21 in which the vapor deposition process was complete | finished as mentioned above to the said base material 21 is mentioned. As long as it can wind up, adhering the protective film 30, these can also be arrange | positioned outside the vacuum chamber 3.

In addition, in this embodiment, in order to adhere | attach the protective film 30 to the non-deposition surface side of the base material 21, although this protective film 30 was comprised so that it might have the adhesive layer 30a, it describes the protective film 30. The method of adhering to (21) is not particularly limited to the above embodiment. For example, after the protective film 30 is adhere | attached with respect to the base material 21, it is set as the structure which has an adhesive bond layer which cannot be peeled off easily on one surface side, and the protective film 30 is made through the said adhesive bond layer. It can also be set as the structure which adhere | attaches the non-deposition surface side of the base material 21. FIG.

Moreover, in the said embodiment, the structure which winds up the base material 21 so that the surface side in which the organic electroluminescent film 19 in the base material 21 was formed by the winding roller 6 is arrange | positioned outside, and the non-deposition surface side is inward. In addition, although the surface side in which the organic electroluminescent film 19 in the base material 21 was formed in the inside and the non-deposition surface side are arrange | positioned outside, it can also be set as the structure which winds up.

<Examples>

Next, an Example is given and this invention is demonstrated further in detail, but this invention is not limited to this.

<Production of Organic EL Device>

The manufacturing apparatus similar to the organic electroluminescent element manufacturing apparatus 1 shown in above-mentioned FIG. 1 was used. Moreover, roll-shaped SUS304 (width 50mm, length 1000m, thickness 0.05mm) was used as a base material. Moreover, after forming an insulating layer (film formation) by apply | coating, drying, and hardening acrylic resin (JSR-made, JEM-477) to one surface side of a base material, it sputters IZO on the said insulating layer, and is 100 nm thick. The anode layer was formed in advance.

In addition, as a protective film, as shown in Table 1, the film with an adhesive which has an acrylic adhesive layer in the one surface side of a PET film and the said film was used. That is, in Example 1, E-MASK TP-300 (manufactured by Nitto Denko Co., Ltd.), Example 2, Elev Masking ALS101 (manufactured by Nitto Denko Co., Ltd.), and Example 3, surface protective material SPV-364 for design metal plate. CK (Nitto Denko Co., Ltd. product) was used. The elasticity modulus of these three types of adhesive films is as showing in Table 1, respectively. In addition, all the thickness which included the adhesive layer of such a protective film was 60 micrometers.

While supplying the substrate on which the anode layer was formed, on the anode layer, copper phthalocyanine (CuPc) was 25 nm thick as the hole injection layer, α-NPD was 45 nm as the hole transport layer, Alq3 was 60 nm thick as the light emitting layer, and electrons An organic EL film was formed on the substrate by depositing LiF as an injection layer in this order so as to have a thickness of 0.5 nm and Al as a cathode layer having a thickness of 10 nm.

The non-deposition surface side of the substrate is on the outside, and the deposition surface side is on the inner side, while the protective film is adhered to the substrate by bonding the adhesive layers of the three types of protective films to the non-deposition surface side of the substrate on which the organic EL film is formed. The base material was wound up by the winding roller with a protective film so that it might be arrange | positioned at, and the organic electroluminescent element of Examples 1-3 was formed.

On the other hand, except having wound up a base material without using a protective film, it carried out similarly to Example 1, and formed the organic electroluminescent element of the comparative example 1. Moreover, using a roll-shaped SUS304 similar to a base material as a protective film, and apply | coating an acrylic adhesive to this protective film, adhering a protective film to the non-deposition surface side of a base material by the said adhesive agent, a base material is attached to a winding roller with a protective film. The organic EL device of Comparative Example 2 was formed in the same manner as in Example 1 except that the film was wound by. In addition, the said Example was used except that the PI film was used as a protective film, and the base film was wound up together with a protective film, without making an adhesive layer in a protective film, and simply contacting this protective film without adhering to the non-deposition surface side of a base material. In the same manner as in 1, the organic EL device of Comparative Example 3 was formed.

<Evaluation method>

About the organic electroluminescent element wound up respectively in Examples 1-3 and Comparative Example 1, 10 samples of width 50mm x 1m in length are sampled in 100m interval from the start of winding of a base material, and the optical microscope (made by Olympus Corporation) , STM6-LM), the number of scratches of 100 µm or more in length was measured, and the average value of the scratches of 10 sheets was calculated. Moreover, about each sample, the electric field was applied between the anode layer and the cathode layer, and the presence or absence of light emission was investigated.

<Evaluation Criteria>

(Circle) and the case where three or less than five were made into the case where the average value of the number of scratches were less than three were made into (triangle | delta) and the case of five or more. In addition, about the presence or absence of light emission, (circle) and the case exceeding 3 sheets were made into (circle) and the case where the number of sheets which did not emit light in the whole surface was 1 or less, and the case of three or less sheets was made into x.

The evaluation results are shown in Table 1. As shown in Table 1, in Examples 1-3 which bonded the protective film to the base material through the adhesive using the protective film whose elastic modulus is smaller than a base material, there were few scratches and light emission was also favorable. On the other hand, in the comparative example 1 which did not use a protective film, the comparative example 2 which used the larger protective film of a modulus of elasticity than a base material, and the comparative example 3 which used the protective film whose elastic modulus is smaller than a base material but did not adhere a protective film to a base material, All had many scratches, and light emission was not good.

As a result, it turned out that the flaw of an organic EL film can be prevented by the manufacturing method of the organic electroluminescent element which concerns on this invention, and the manufacturing apparatus of an organic electroluminescent element.

1: Manufacturing apparatus of organic electroluminescent element
5: substrate feeder
6: Recovery device (collection section)
7: can roll
8: Protective film supply device (protective film supply part)
9: Deposition Source (Deposition Part)
9a: first deposition source
9b: second deposition source
19: organic EL film
20: organic EL device
21: description
23: anode layer (first electrode layer)
25a: light emitting layer (organic constituent layer, organic layer)
27: cathode layer (second electrode layer)
30: protective film
30a: adhesive layer

Claims (8)

While supplying a strip-shaped substrate, at least one organic layer including an emission layer and an electrode layer are sequentially deposited on one surface side of the substrate to form an organic EL film on the substrate, and the winding of the substrate on which the organic EL film is formed is sequentially performed It is a manufacturing method of the organic electroluminescent element which manufactures an EL element,
In the said winding, the base material is wound together with the said protective film, supplying the strip | belt-shaped protective film softer than the said base material, and adhering to the non-deposition surface side of the said base material, The manufacturing method of the organic electroluminescent element characterized by the above-mentioned. The said organic layer and the 2nd electrode layer which is an electrode opposite to a said 1st electrode layer are sequentially deposited on the said 1st electrode layer, supplying the said base material in which the 1st electrode layer was formed in the one surface side. The manufacturing method of the organic electroluminescent element. The elasticity modulus of the said protective film is 4.2 GPa or less, The manufacturing method of the organic electroluminescent element of Claim 1 characterized by the above-mentioned. The method for manufacturing an organic EL device according to claim 1, wherein the base material is formed of a metal material. The said protective film has the adhesive layer which enables adhesion | attachment and peeling with respect to the said base material in one side of Claim 1,
The said protective film is adhere | attached on the non-deposition surface side of the said base material through the said adhesive layer, The manufacturing method of the organic electroluminescent element characterized by the above-mentioned. A vapor deposition unit for forming an organic EL film on the substrate by supplying a band-shaped substrate, and sequentially depositing an organic layer and an electrode layer including an emission layer on one surface of the substrate;
It is a manufacturing apparatus of the organic electroluminescent element provided with the collection part which winds up the base material with which the said organic electroluminescent film was formed by the said vapor deposition part sequentially,
It is further provided with the protective film supply part which supplies the strip | belt-shaped protective film softer than the said base material,
And the recovery portion is configured to wind the substrate together with the protective film while adhering the protective film supplied from the protective film supply portion to the non-deposition surface side of the substrate. The method of claim 6, wherein the deposition unit is configured to sequentially deposit the organic layer on the first electrode layer and a second electrode layer opposite to the first electrode layer while the substrate having the first electrode layer formed thereon is supplied. The manufacturing apparatus of the organic electroluminescent element characterized by the above-mentioned. It is an organic electroluminescent element provided with the organic electroluminescent film which has a 1st electrode layer, the organic layer containing a light emitting layer, and the 2nd electrode layer which is an electrode opposite to the said 1st electrode layer on one surface side of a base material,
A protective film softer than the base material is bonded to the surface side opposite to the organic EL film in the base material.

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