KR20120123193A - Apparatus and method for manufacturing sheet-like device - Google Patents

Abstract

PURPOSE: A sheet-shaped device and a manufacturing apparatus for the same are provided to prevent the un-transferring and the fault of patterns. CONSTITUTION: A manufacturing apparatus for a sheet-shaped device comprises a mold(4), an elastic body(9), a press device(2), and a curing device(6). Patterns are formed on the mold. The elastic body is arranged oppositely to the mold. A workpiece is inserted between the mold and the elastic body and a press device presses the pattern forming surface on resin. The curing device hardens the resin on the workpiece. The surface of the elastic body is curved surface protruding toward the mold.

Description

A manufacturing apparatus of a sheet-like device, the manufacturing method of a sheet-like device {APPARATUS AND METHOD FOR MANUFACTURING SHEET-LIKE DEVICE}

This invention relates to the manufacturing apparatus of a sheet-like device, and the manufacturing method of a sheet-like device for transferring the pattern formed in the mold (frame) to resin on a base material.

There is an imprint as a microfabrication technique for forming a sheet-like device having a pattern of a fine concavo-convex shape (a nano-level concave-convex shape at the micron level). There are two types of imprints: thermal and optical. The optical imprint can produce a fine structure at low cost. For this reason, the correspondence for the practical use of the optical system imprint is progressing in many aspects.

In imprint, a mold (frame) in which a fine pattern is processed is used. The thermal imprint presses the fine pattern formed on the mold to the thermosetting resin on the substrate, and then heats the thermosetting resin in a state in which the fine pattern is pressed to cure the resin. It is a technique of transferring to a resin. Optical imprint presses the micropattern formed in the mold to photocurable resin on a base material, and then irradiates light to photocurable resin of the state in which the micropattern was pressed, and hardens the resin. Is a technique of transferring a resin to a resin. UV (ultraviolet) curable resin is mainly used for the imprint of a light system.

By the technique of such imprint, the sheet-like device imprinted with the pattern can be created by transferring the pattern to the resin on the substrate.

However, in imprint, when the mold and the resin on the substrate are in close contact with each other, a gas is likely to be sealed between the mold and the resin. When the gas enclosed between a mold and resin remains, a pattern non-transfer part or a pattern shape defect part will generate | occur | produce in resin. The pattern non-transfer portion is a portion where the pattern is not transferred. A pattern shape defect part is a part in which the shape of a pattern does not become a desired shape.

For the purpose of preventing the untransfer of the pattern and the shape defect of the pattern resulting from such gas encapsulation, an imprint using a chamber has been proposed, for example, in JP2007-194304A. 8 is a diagram showing a conventional imprint apparatus disclosed in JP2007-194304A.

If the imprint apparatus shown in FIG. 8 is used, imprint can be performed in the reduced pressure imprint chamber 101. Thereby, the imprint apparatus shown in FIG. 8 can prevent generation | occurrence | production of a residual bubble, and can reduce gas encapsulation. Moreover, according to the imprint apparatus shown in FIG. 8, the metal mold | die 106 is adjusted by adjusting the pressure in the auxiliary chamber 108 provided in the upper side of the metal mold 106 (the back side of the metal mold 106 in which the pattern is not formed). The strain can be controlled. Hereinafter, the imprint apparatus shown in FIG. 8 is demonstrated.

In the imprint apparatus shown in FIG. 8, the metal mold 106 is provided on the upper portion of the imprint chamber 101. An auxiliary chamber 8 is provided on the upper side of the mold 106 (the back side of the mold 106 on which the pattern is not formed). In addition, the imprint chamber 101 and the auxiliary chamber 108 are connected to the vacuum pump 115 via a pipe 111. A valve 113 is provided between the imprint chamber 101 and the vacuum pump 115. A valve 114 is provided between the auxiliary chamber 108 and the vacuum pump 115. In addition, the imprint chamber 101 and the auxiliary chamber 108 are connected via the piping 111. The valve 112 is provided between the imprint chamber 101 and the auxiliary chamber 108.

The imprint apparatus configured as described above operates as follows. That is, after the substrate 104 coated with the photocurable transfer member 105 is introduced into the imprint chamber 101, the imprint apparatus first opens the valves 112 to 114, and then the imprint chamber 101 and the auxiliary chamber. Exhaust 108. Next, the imprint apparatus raises the board | substrate 104 toward the metal mold | die 106 by the moving mechanism 102, and makes the to-be-transferred body 105 contact the pattern of the metal mold 106. Next, as shown in FIG. Next, the imprint apparatus closes the valve 112 and the valve 113, and then stops the vacuum pump 115 to return the auxiliary chamber 108 to atmospheric pressure. Thereby, the to-be-transferred body 105 adheres to the pattern of the metal mold 106. Thereafter, the imprint apparatus transfers the object 105 from the light source 110 provided above the auxiliary chamber 108 via the light transmitting portion 109 provided above the auxiliary chamber 108 and the light-transmitting mold 106. Irradiate light). Thereby, the to-be-transferred body 105 hardens.

Thus, using the imprint apparatus shown in FIG. 8, imprinting can be performed in a vacuum state. Therefore, the conventional imprint apparatus can prevent the untransfer of the pattern and the shape defect of the pattern resulting from the residual of a base. In addition, by arbitrarily adjusting the pressure in the auxiliary chamber 108 in accordance with the pressure in the imprint chamber 101, it is possible to avoid deformation of the mold 106.

As described above, an imprint apparatus capable of imprinting in a chamber and capable of performing deformation control of a mold has been proposed. However, this imprint apparatus is a structure in which the chambers are respectively provided above and below the mold (frame), and the resin applied to the base material inserted in the lower chamber adheres to the pattern formed in the mold. Therefore, in the case where a large area of the sheet-shaped device (device to which the fine pattern is transferred) is required, the imprint apparatus needs to enlarge the mold, and the apparatus is enlarged. In addition, when the mold becomes large, control of deformation of the mold becomes difficult. Therefore, due to the error in the planar properties of the mold and the base material, the non-contact portion (non-adherence portion) where the mold and the resin are in non-contact or non-adherence is likely to occur. As a result, the non-transfer of a pattern resulting from the non-contact part (non-contact part) of mold and resin, or the shape defect of a pattern tends to arise. The problem of untransfer of this pattern and the shape defect of a pattern arises remarkably as the pattern becomes finer.

An object of this invention is to provide the manufacturing apparatus of a sheet-like device, and the manufacturing method of a sheet-like device in which the problem of untransfer of a pattern, the shape defect of a pattern, etc. hardly arise.

In order to achieve the above object, the apparatus for manufacturing a sheet-like device of the present invention includes a mold having a pattern forming surface on which a pattern is formed, an elastic body disposed opposite to the mold, and a substrate between the mold and the elastic body. And a pressing device for pressing the pattern forming surface on the resin on the substrate, and a curing device for curing the resin on the substrate, wherein the surface of the elastic body in the projection area of the pattern forming surface of the mold is formed on the mold. It is a curved surface convex toward the side.

Moreover, in order to achieve the said objective, the manufacturing method of the sheet-like device of this invention faces the said pattern formation surface between the mold which has a pattern formation surface in which the pattern is formed, and the elastic body of predetermined shape which has a curvature. A process of pressurizing said resin by sandwiching the base material provided with resin on one side, pressing said pattern formation surface to said resin, and the process of hardening resin on the said base material, and at the time of pressurization, the said mold and the said elastic body are provided. As at least one of them moves in the direction in which the mold and the elastic body approach, the range where the pattern forming surface and the resin contact each other is widened from the inside of the pattern forming surface toward the outside.

According to the present invention, problems such as untransfer of the pattern and poor shape of the pattern are less likely to occur.

1 is a side view showing an imprint apparatus in Embodiment 1 of the present invention.
FIG. 2 is an enlarged side cross-sectional view showing main parts of an imprint apparatus according to the first embodiment of the present invention. FIG.
FIG.3 (a)-(d) are figures for demonstrating the pressurization process in Embodiment 1 of this invention.
It is a figure for demonstrating the hardening process in Embodiment 1 of this invention.
5 is a perspective view for explaining the operation of the imprint apparatus according to the first embodiment of the present invention.
FIG.6 (a)-(d) are figures for demonstrating the pressurization process in Embodiment 2 of this invention.
It is a figure for demonstrating the hardening process in Embodiment 2 of this invention.
8 is a diagram illustrating a configuration of a conventional imprint apparatus.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, the same code | symbol is attached | subjected to the same component and the overlapping description may be abbreviate | omitted. In addition, in order to make drawing easy to understand, each component is typically shown typically. Moreover, the thickness, length, etc. of each shown component differ from an actual thing in relation to drawing drawing.

(Embodiment Mode 1)

Embodiment 1 of this invention is demonstrated. BRIEF DESCRIPTION OF THE DRAWINGS It is a side view which shows the whole imprint apparatus as an example of the manufacturing apparatus of the sheet-like device in Embodiment 1 of this invention. In FIG. 1, the housing 3 in which the mold (frame) 4 for imprint is arrange | positioned at the bottom face is shown in the inside. Hereinafter, the mold for imprint is simply called a mold. As a sheet-like device manufactured by the manufacturing apparatus of a sheet-like device, there exists an anti-reflective sheet, for example.

In the imprint apparatus according to the first embodiment, first, by pressing the fine pattern 5 on a UV (ultraviolet) curable resin (not shown) that coats one side of the substrate 8 using the mold 4, Pressurize the UV-curable resin. Thereafter, this device causes the UV irradiation device 6 to emit UV light. This UV light passes through the mold 4 and is irradiated to the UV curable resin. The UV curable resin irradiated with UV light is cured. As a result, the fine pattern is transferred to the UV-curable resin on the sheet-shaped substrate 8. The mold 4 has a pattern formation surface on which the fine pattern 5 is formed. The base material 8 is a sheet-shaped seamless member. In this apparatus, the elastic body 9 is arrange | positioned under the sheet-like base material 8 at the time of pressurization, and the sheet-shaped base material 8 is sandwiched between the mold 4 and the elastic body 9. The surface of the elastic body 9 has a curved surface which is convex toward the base material 8 side at the part facing the mold 4. According to this apparatus, at the time of pressurization, the range where the pattern forming surface of the mold 4 and the UV-curable resin on the base material 8 come into contact with each other by the shape and elasticity of the elastic body 9 from the inside to the outside of the pattern forming surface. You can zoom in slowly. And in this way, the pattern forming surface of the mold 4 and the UV-curable resin on the base material 8 come into contact with each other, resulting in residual gas or non-contact portion (non-adherent part) of the mold 4 and the UV-curable resin. Problems such as untransfer of the pattern and poor shape of the pattern are less likely to occur.

Hereinafter, the manufacturing apparatus (imprint apparatus) of the sheet-like device and the manufacturing method (imprint method) of the sheet-shaped device in the first embodiment will be described in detail.

As shown in FIG. 1, the imprint apparatus in this Embodiment 1 is equipped with the X-axis table 1 and the Y-axis table 2 which are movable in the direction orthogonal to each other. The X-axis table 1 is the front-rear linear movement axis which linearly moves in the direction perpendicular | vertical to the paper surface of FIG. The Y-axis table 2 is an up-and-down linear movement axis which linearly moves in the up-down direction of the paper surface of FIG. The Y-axis table 2 is provided in the X-axis table 1. In the first embodiment, the direction in which the X-axis table 1 is movable is set as the X direction, the direction in which the Y-axis table 2 is movable is made as the Y direction, and the direction orthogonal to the X direction and the Y direction is Z. Direction.

The Y-axis table 2 is provided with a housing 3. On the bottom face of the housing 3, a mold 4 having a pattern formation surface on which the fine patterns 5 are formed is disposed downward. That is, the mold 4 is arrange | positioned so that the fine pattern 5 may become downward. Thereby, the fine pattern 5 of the mold 4 is arrange | positioned so that it may face the sheet-shaped base material 8. Moreover, the mold 4 is arrange | positioned in the state in which the inclination was adjusted so that the fine pattern 5 may be parallel to an XZ plane. In addition, in this Embodiment 1, as the mold 4, the shape of the surface direction of the area | region in which the fine pattern 5 is arrange | positioned is planar shape, and the size of the plane (the area | region in which the fine pattern 5 is arrange | positioned) in size) it was used to 20mm ² in the mold. For example, when manufacturing an antireflection sheet, the depth of the unevenness | corrugation of this fine pattern 5 is 200-300 nm.

Inside the housing 3, the UV irradiation apparatus 6 for hardening the UV curable resin not shown on the base material 8 is arrange | positioned. In addition, in this Embodiment 1, since the UV irradiation apparatus 6 is arrange | positioned above the mold 4, it is necessary to use the material which UV light permeates as a material of the mold 4. A fine pattern can be processed on the surface, and quartz glass can be used as a raw material through which UV light transmits.

The pressure sensor 7 which abuts on the bottom face of the Y-axis table 2 is arrange | positioned at the ceiling part of the housing 3. This pressure sensor 7 is provided in order to measure molding pressure.

Below the mold 4, the sheet | seat seamless base 8 is arrange | positioned. Therefore, the fine pattern 5 of the mold 4 faces the UV curable resin which is not shown in figure on the base material 8. In this Embodiment 1, the seamless base material which uses PET film as a base material 8 was used.

Below the base material 8, the elastic body 9 of predetermined shape which has a curvature is arrange | positioned so that the mold 4 may oppose. In this Embodiment 1, the elastic body 9 is cylindrical shape of diameter 800mm, and is arrange | positioned in parallel with an X-axis.

The material of the elastic body 9 is a material which is at least softer than the mold (frame) 4 and has a hardness of rigidity that does not destroy the fine pattern 5 of the mold 4 during molding. It needs to be selected. In this Embodiment 1, the silicone rubber whose elasticity modulus is 3.5 MPa was selected as a material of the elastic body 9. As shown in FIG.

It is suitable for the elastic body 9 to provide an antireflection structure for preventing the UV light from being reflected on the surface of the elastic body 9. This is in order to prevent UV light which permeate | transmitted the mold 4, UV hardening resin, and the base material 8 from the elastic body 9, and irradiate UV light to places other than a desired place. As an example of the antireflection structure, the surface of the elastic body 9 may be colored with a color capable of preventing reflection.

The meander control roller 10 and the rotation control roller 11 are arrange | positioned at the both sides of the elastic body 9 in this imprint apparatus. In the first embodiment, the meandering control roller 10 has a cylindrical shape having a diameter of 60 mm and is disposed in parallel with the X axis. Moreover, the rotation control roller 11 is cylindrical shape with a diameter of 60 mm, and is arrange | positioned in parallel with an X-axis. That is, the meandering control roller 10 and the rotation control roller 11 are all arranged in parallel with the cylindrical elastic body 9. Moreover, the base material 8 is wound over the elastic body 9, the meandering control roller 10, and the rotation control roller 11, and rotates using the rotation control roller 11 as a drive source. According to this structure, the imprint apparatus can send out the base material 8 on the elastic body 9 by the meandering control roller 10 and the rotation control roller 11.

This imprint apparatus is provided with the tension adjustment mechanism 12 which can move the rotation control roller 11 to Z direction. By this tension adjustment mechanism 12, the base material 8 is set so that curvature may not generate | occur | produce. In addition, the tension adjusting mechanism 12 continuously applies tension in the Z direction to the sheet-shaped substrate 8 during imprint so as to absorb the warpage of the substrate 8 that may occur during pressing.

In this Embodiment 1, the angle of the base material 8 between the meander control roller 10 and the elastic body 9, and the angle of the base material 8 between the rotation control roller 11 and the elastic body 9 are all The elastic body 9 is arrange | positioned so that it may become 5 degrees upward from an XZ plane. This angle is an angle required in order to wind the base material 8 along the curved surface of the elastic body 9. However, depending on the arrangement of the rotation control roller 11, the meander control roller 10, and the elastic body 9, an angle other than 5 ° may be set at this angle.

2 is an enlarged side cross-sectional view showing the main part of the imprint apparatus according to the first embodiment of the present invention. As shown in FIG. 2, UV curable resin 13 of predetermined amount is apply | coated to one surface of the base material 8 which faces a fine pattern in uniform thickness. In this Embodiment 1, the thickness of the base material 8 assumes 50-500 micrometers. Moreover, as an example of a light shielding structure, the light shielding film 14 which shields UV light is provided in the outer peripheral part (the area | region outside the area | region in which the micropattern 5 is arrange | positioned) of the pattern formation surface of the mold 4. Moreover, the inclined surface is formed in the outer side of the outer periphery line of the area | region in which the fine pattern 5 is arrange | positioned.

Next, the operation of the imprint apparatus in the first embodiment will be described.

FIG.3 (a)-(d) and FIG. 4 are the figures which showed the process of imprint-molding one location of the UV curable resin 13 on the base material 8 by the imprint apparatus in this Embodiment 1. FIG. In detail, FIGS. 3A to 3D show the substrate 8 sandwiched between the mold 4 and the elastic body 9, and the pattern forming surface of the mold 4 is attached to the UV-curable resin 13. It is the figure which showed the pressurization process to press in time series. 4 is a figure which shows the hardening process which hardens UV curable resin 13. As shown in FIG. This hardening process is a post process of the pressurization process shown to FIG. 3 (a)-(d). In each of FIGS.3 (a)-(d), the upper figure is a figure which shows the contact range of the pattern formation surface of the mold 4, and UV-curable resin 13, and the lower figure is a side cross-sectional view by process. In addition, in FIG. 4, the upper figure is a figure which shows the contact range of the pattern formation surface of the mold 4, UV curable resin 13, and the hardening range of UV curable resin 13, A lower figure is a side cross-sectional view by process. to be.

First, provisional molding is performed before the main molding. This temporary molding is performed to match the position of the mold 4 and the elastic body 9. Thereafter, the process proceeds to the main molding.

In this molding, first, the Y-axis table 2 is lowered, so that the substrate 8 on which one surface facing the pattern formation surface is coated with the UV curable resin 13 is the pattern formation surface of the mold 4. And the surface (curved surface) of the cylindrical elastic body 9. And the pattern formation surface of the mold 4 is pressed by the UV curable resin 13. This pressurizes the UV-curable resin 13.

In this pressurization process, the Y-axis table 2 is sufficient so that a gas may not enter between the micropattern and UV curable resin 13 at least immediately before the micropattern 5 and UV curable resin 13 contact. It descend | falls at a slow uniform velocity, and the pattern formation surface of the mold 4 is pressed by the UV-curable resin 13. In this Embodiment 1, as an example, the Y-axis table 2 was lowered at a constant speed at 10 mm / min.

Before the micropattern 5 and the UV-curable resin 13 contact each other, the shape of the surface direction of the base material 8 on the elastic body 9 follows a part of the outer circumferential surface (cylindrical surface) of the cylindrical elastic body 9. It is shaped. Therefore, the pattern formation surface (fine pattern 5) and UV curable resin 13 make linear contact first (refer FIG. 3 (a)). That is, the initial contact range of the pattern forming surface of the mold 4 and the UV-curable resin 13 is linear. Then, as the Y-axis table 2 descends, the cylindrical elastic body 9 supporting the base material 8 is gradually crushed by the load from the Y-axis table 2. Therefore, as shown in Figs. 3A to 3D, the Y-axis table 2 descends and moves relatively in the direction in which the mold 4 and the elastic body 9 approach each other. The contact range of the pattern formation surface of 4) and UV-curable resin 13 expands gradually from the inner side of a pattern formation surface toward an outer side. That is, the contact range (contact point) gradually expands from the line segment toward the outside as the Y-axis table 2 descends.

According to the above operation | movement, gas becomes difficult to be enclosed between the pattern formation surface (fine pattern 5) and UV-curable resin 13, and the micropattern 5 and UV-curable resin 13 make sure contact (adherence | tightness). It becomes easy to become). Therefore, the untransfer of the pattern and the shape defect of the pattern are less likely to occur.

In addition, the load applied to the mold 4 from the Y-axis table 2 is measured by the pressure sensor 7. Therefore, in the first embodiment, control of the lowering operation of the Y-axis table 2 based on the measured value of the pressure sensor 7 can be realized. For example, in Embodiment 1, when the measured value of the pressure sensor 7 becomes more than a predetermined value, control which stops the falling operation of the Y-axis table 2 can be implement | achieved. In this way, by controlling the lowering operation of the Y-axis table 2 based on the measured value of the pressure sensor 7, it is possible to more difficult to untransfer the pattern and to generate the shape defect of the pattern.

As shown in FIG. 3 (d), when the fine pattern 5 is buried (adhered to) the UV-curable resin 13 to a depth at which the desired pattern is imparted to the UV-curable resin 13, the elastic body 9 By the deformation | transformation of), the base material 8 becomes horizontal or substantially horizontal with respect to the XZ plane. At this time, as shown in Fig. 3 (d), the pattern forming surface of the mold 4 is in contact with the UV-curable resin 13 even outside the range (area) in which the fine pattern 5 is disposed. Closely).

Thereafter, as shown in FIG. 4, the UV light from the UV irradiation device 6 to the UV curable resin 13 is passed through the mold 4 in a state where the fine pattern 5 is in close contact with the UV curable resin 13. Light is irradiated and the UV curable resin 13 hardens. As a result, the fine pattern is transferred to the UV-curable resin 13.

In this Embodiment 1, the pattern formation surface and UV of the mold 4 are formed by the light shielding structure provided in the outer peripheral part (region of the outer side of the area | region where the fine pattern 5 is arrange | positioned) of the pattern formation surface of the mold 4 The predetermined range is hardened among the ranges which the curable resin 13 contacts. Specifically, since the light shielding film 14 which shields UV light is provided in the outer peripheral part of the pattern formation surface of the mold 4, UV light is hard to reach the outer side of the fine pattern 5. Therefore, according to the first embodiment, the light-shielding structure can divide the UV-curable resin 13 into a curing range in which the resin is cured and a non-curing range in which the resin is not cured.

In addition, in this Embodiment 1, the inclined surface is formed outside the outer periphery line of the area | region in which the fine pattern 5 is formed (processed). Therefore, in the vicinity of the boundary line between the curing range and the non-curing range, the oxygen inhibition characteristic of the UV-curable resin 13 acts. Therefore, the boundary between a hardening range and a nonhardening range becomes an irregular curve rather than a straight line, as shown in FIG.

After the curing of the UV-curable resin 13, the Y-axis table 2 is raised so that the mold 4 moves away from the UV-curable resin 13.

By the above operation | movement, one location of the UV curable resin 13 on the base material 8 can be imprint-molded. In addition, the operation demonstrated above can be controlled automatically by providing the control apparatus which controls the operation | movement of the whole imprint apparatus.

Subsequently, by the imprint apparatus in this Embodiment 1, the above-mentioned imprint molding is repeated with respect to the large-area and seamless base material 8, and a fine pattern is provided in several places of the UV-curable resin 13 on the base material 8. The process of transferring (5) is demonstrated.

FIG. 5 is a perspective view for explaining the operation of the imprint apparatus when the imprint molding is repeated for the large-scale, seamless substrate 8.

As described above, the imprint apparatus of the first embodiment pressurizes the UV-curable resin 13 by the pattern forming surface of the mold 4, and irradiates UV light through the mold 4 to form the UV-curable resin ( By curing 13), the fine pattern is transferred to the UV curable resin 13.

The imprint apparatus of this Embodiment 1 repeats the process of transferring the above-mentioned fine pattern to the UV curable resin 13, and applies the fine pattern 5 to a plurality of places of the UV curable resin 13 on the substrate 8. Warriors Moreover, the imprint apparatus of this Embodiment 1 performs pattern shaping | molding in the location adjacent to the pattern which is already shape | molded, when repeating the transfer of the fine pattern 5. By this operation, a large area sheet-like device to which a pattern is connected can be obtained. This step will be described in detail below.

As shown in FIG. 5, the imprint apparatus of this Embodiment 1 operates to the base material 8 on the cylindrical elastic body 9, operating the X-axis table 1, and moving the mold 4 to an X-axis direction. For the above, the imprint molding step described above is repeated a plurality of times. This completes the imprint molding for one line in the X-axis direction. After completion of a row of imprint molding, the imprint apparatus transfers the substrate 8 for one row by the rotation control roller 11, and performs the next row of imprint molding. By repeating the operation of a series of imprint moldings as described above, a large area fine pattern transfer surface connecting one fine pattern can be formed.

As described above, the boundary (the boundary of the curing range) of the pattern transferred to the UV-curable resin 13 is a curve without regularity, not a straight line. Since the curve without regularity is hard to see visually, the seam of a pattern can be made inconspicuous. In addition, the curve width (width h shown in FIG. 4) of the boundary of a pattern can be controlled by the shape (height or width) of the inclined surface provided in the outer peripheral part of the pattern formation surface of the mold 4, and the range of the light shielding film 14. have. In this Embodiment 1, the width h was about 50 micrometers.

In addition, as described above, according to the imprint apparatus in the first embodiment, the UV-curable resin 13 can be divided into a curing range in which the resin is cured and a non-curing range in which the resin is not cured. . Therefore, according to the imprint apparatus according to the first embodiment, pattern molding is performed in a non-hardened range in which the resin is not cured even when the patterns are connected by performing pattern molding at a location adjacent to the pattern already formed. Can be done. Thereby, in Embodiment 1, it becomes possible to make the level difference of the joint of adjacent patterns into 0.5 micrometer or less.

Therefore, according to this Embodiment 1, the sheet | seat device which has a seamless curve between adjacent patterns is irregular, and the seam has a level | step difference of 0.5 micrometer or less can be formed.

In addition, in the imprint apparatus according to the first embodiment, an imprint-molded portion is moved by the X-axis table 1 of the linear movement shaft and the rotation control roller 11 of the rotational movement shaft. However, the structure which moves the mold 4 and the base material 8 relatively is not specifically limited, For example, the movement of the linear movement axis or rotation which moves the mold 4 and the base material 8 relatively is for example. What is necessary is just the structure by which imprint molding in several places of the base material 8 is possible, such that at least one of the axes is provided with one or more axes.

Moreover, in this Embodiment 1, while the shape 4 of the area | region in which the fine pattern 5 is arrange | positioned is planar shape, and the mold 4 of 20 mm <^2> of the plane is used, the elasticity modulus is 3.5 MPa, The cylindrical elastic body 9 which consists of silicone rubber was used. From the shape and size of the surface direction of the area | region where this fine pattern 5 is arrange | positioned, and the elasticity modulus of the cylindrical elastic body 9, it turns out that the diameter of the cylinder of an elastic body is more than 800 mm by finite element analysis simulation. In this Embodiment 1, it set to 800 mm.

Moreover, in this Embodiment 1, the angle of the base material 8 between the meander control roller 10 and the elastic body 9, and the angle of the base material 8 between the rotation control roller 11 and the elastic body 9 are all The elastic body 9 was arrange | positioned so that it might be 5 degree upward from the XZ plane. However, when the shape of the surface direction of the area | region in which the fine pattern 5 is arrange | positioned is planar shape, the angle of the base material 8 between the meandering control roller 10 and the elastic body 9, and the rotation control roller 11 If the angle of the base material 8 between () and the elastic body 9 is not all negative, the pattern formation surface of the mold 4 and the UV-curable resin 13 on the base material 8 can be made in linear contact. However, according to the angle of the base material 8 between the meander control roller 10 and the elastic body 9, and the angle of the base material 8 between the rotation control roller 11 and the elastic body 9, shaping | molding of a press speed etc. It is necessary to adjust conditions suitably.

Moreover, in this Embodiment 1, the inclined surface which has the light shielding film 14 was provided in the mold 4. However, you may form a step shape instead of the inclined surface. In the case where the stepped shape is not an inclined surface, the light shielding range can be controlled more precisely.

Moreover, in this Embodiment 1, the cylindrical elastic body 9 was used. However, you may use the elastic body of the shape in which the surface in the range which opposes the pattern formation surface of the mold 4 (projection area of the pattern formation surface of the mold 4) forms a part of a cylindrical surface.

(Embodiment 2)

Next, Embodiment 2 of this invention is demonstrated. The second embodiment is different from the first embodiment described above in that the elastic body has a spherical shape. EMBODIMENT OF THE INVENTION Hereinafter, Embodiment 2 is demonstrated centering around a point different from Embodiment 1.

FIG.6 (a)-(d) and FIG. 7 are the figures which showed the process of imprint-molding one location of the UV curable resin 13 on the base material 8 by the imprint apparatus in this Embodiment 2. FIG. In detail, FIGS. 6A to 6D show that the substrate 8 is sandwiched between the mold 4 and the elastic body 15, and the pattern forming surface of the mold 4 is attached to the UV-curable resin 13. It is the figure which showed the pressurization process to press in time series. 7 is a figure which shows the hardening process which hardens UV curable resin 13. As shown in FIG. This hardening process is a post process of the pressurization process shown to FIG. 6 (a)-(d). In each of FIGS. 6 (a) to (d), the upper drawing is a diagram showing a contact range between the pattern forming surface of the mold 4 and the UV curable resin 13, and the lower drawing is a side cross-sectional view for each process. In addition, in FIG. 7, the upper figure is a figure which shows the contact range of the pattern formation surface of the mold 4, UV curable resin 13, and the hardening range of UV curable resin 13, and the lower figure is a side cross-sectional view by process. to be.

First, by performing caustic molding, the positions of the mold 4 and the elastic body 9 are aligned, and then the process proceeds to the main molding.

In this molding, first, the Y-axis table 2 is lowered, so that the base material 8 coated with the UV-curable resin 13 on one side facing the pattern formation surface is formed with the pattern formation surface of the mold 4. It fits in between the surfaces (curved surfaces) of the spherical elastic body 15. And the pattern formation surface of the mold 4 is pressed by the UV curable resin 13. This pressurizes the UV-curable resin 13. In addition, in this Embodiment 2, the spherical elastic body 15 of diameter 800mm which consists of silicone rubber of elasticity modulus 3.5MPa was used. Moreover, as the mold 4, the shape of the surface direction of the area | region in which the fine pattern 5 is arrange | positioned is planar shape, and the size of the plane (size of the area | region in which the fine pattern 5 is arrange | positioned) is 20 mm <^2> . Used.

In the above-described pressurization step, the Y-axis table 2 has a gas between the micropattern 5 and the UV curable resin 13 at least immediately before the micropattern 5 and the UV curable resin 13 come into contact with each other. It descend | falls at a constant speed slow enough so that it may not enter, and the pattern formation surface of the mold 4 is pressed by the UV-curable resin 13.

In this Embodiment 2, before the micropattern 5 and the UV curable resin 13 contact, the shape of the surface direction of the base material 8 on the elastic body 15 is the outer peripheral surface of the spherical elastic body 15 ( Spherical surface). Therefore, the pattern formation surface (fine pattern 5) and UV-curable resin 13 first make point contact (refer FIG. 6 (a)). Thereafter, as the Y-axis table 2 descends, the spherical elastic body 15 supporting the base material 8 is gradually crushed by the load from the Y-axis table 2. As a result, as shown in Figs. 6A to 6D, the Y-axis table 2 descends and the mold 4 and the elastic body 15 relatively move in a direction approaching each other. The contact range of the pattern formation surface of 4) and UV-curable resin 13 expands gradually from the inner side of a pattern formation surface toward an outer side. That is, the contact range (contact point) gradually expands from the point toward the outside as the Y-axis table 2 descends. According to the imprint apparatus of the second embodiment, the contact range of the pattern forming surface of the mold 4 and the UV curable resin 13 is expanded from the point, so that the contact range of the pattern forming surface and the UV curable resin is expanded from the line. Compared with the imprint apparatus of Embodiment 1 mentioned above, the possibility that a gas is encapsulated can be further reduced.

According to the above operation | movement, gas becomes difficult to be enclosed between the pattern formation surface (fine pattern 5) and UV-curable resin 13, and the micropattern 5 and UV-curable resin 13 make sure contact (adherence | tightness). It becomes easy to become). Therefore, the untransfer of the pattern and the shape defect of the pattern are less likely to occur.

As shown in FIG. 6 (d), when the fine pattern 5 is buried (adhered to) the UV-curable resin 13 to a depth at which the desired pattern is imparted to the UV-curable resin 13, the elastic body 15 ), The base material 8 is horizontal or substantially horizontal to the XZ plane. At this time, as shown in Fig. 6 (d), the pattern forming surface of the mold 4 is in contact with the UV-curable resin 13 even outside the range (area) in which the fine pattern 5 is disposed. Closely).

Thereafter, as shown in FIG. 7, the UV irradiation device 6 emits UV light while the fine pattern 5 is in close contact with the UV-curable resin 13. This UV light passes through the mold 4 and is irradiated with the UV curable resin 13. The UV curable resin 13 irradiated with UV light is cured. As a result, the fine pattern is transferred to the UV-curable resin 13.

Also in this Embodiment 2, similarly to Embodiment 1 mentioned above, the UV-curable resin 13 is hardened | cured by the light shielding structure (light shielding film 14) provided in the outer peripheral part of the pattern formation surface of the mold 4 It can be divided into non-hardening ranges. Moreover, by the inclined surface provided outside the outer periphery line of the area | region in which the fine pattern 5 is formed, the boundary of a hardening range and a nonhardening range can be made into the irregular curve rather than a straight line.

After the curing of the UV-curable resin 13, the Y-axis table 2 is raised so that the mold 4 moves away from the UV-curable resin 13.

By the above operation | movement, one location of the UV curable resin 13 on the base material 8 can be imprint-molded.

Subsequently, the above-mentioned imprint molding is repeated with respect to the large-area and seamless base material 8 by the imprint apparatus in the second embodiment, and a fine pattern is provided at a plurality of locations of the UV-curable resin 13 on the base material 8. The process of transferring (5) is demonstrated.

In the imprint apparatus of the second embodiment, similarly to the first embodiment described above, the process of transferring the fine pattern to the UV curable resin 13 is repeated, and a plurality of the UV curable resins 13 on the substrate 8 are provided. The fine pattern 5 is transferred to the location. In addition, similarly to the first embodiment described above, the imprint apparatus of the second embodiment performs pattern molding at a location adjacent to the pattern already formed in order to repeat the transfer of the fine pattern 5. By the operation of this pattern molding, in Embodiment 2, the sheet-like device of the large area to which the pattern was connected can be formed.

However, in the imprint apparatus according to the second embodiment, a spherical elastic body 15 is used. Therefore, the imprint apparatus of this Embodiment 2 is a mechanism (not shown) for moving the elastic body 15 in the X-axis direction with the mold 4 at the time of performing imprint molding for one line in the X-axis direction. ) Is provided.

In addition, in the second embodiment, the boundary of the pattern transferred to the UV-curable resin 13 (the boundary of the curing range) is a curve without regularity, not a straight line, as in the first embodiment described above. . Therefore, the seam of a pattern can be made inconspicuous. Moreover, also in this Embodiment 2, UV curable resin 13 can be divided into a hardening range and a nonhardening range. Therefore, it becomes possible to make the level difference of the joint of adjacent patterns into 0.5 micrometer or less.

Therefore, also in this Embodiment 2, the sheet | seat device which has a seamless curve between adjacent patterns is irregular curve, and the step | step of 0.5 micrometer or less can be formed in the joint.

Moreover, in Embodiment 2, while the shape of the surface direction of the area | region in which the micropattern 5 is arrange | positioned is planar shape, the mold 4 of 20 mm <^2> of the plane is used, and the elasticity modulus is 3.5 MPa, A spherical elastic body 15 made of silicone rubber was used. From the shape and size of the surface direction of the area | region where this fine pattern 5 is arrange | positioned, and the elastic modulus of the spherical elastic body 15, it turns out that the diameter of the sphere of an elastic body is 800 mm or more by finite element analysis simulation. In this Embodiment 2, it set to 800 mm.

Moreover, in this Embodiment 2, the spherical elastic body was used. However, using an elastic body having a spherical shape or an elastic body having a shape in which a surface in a range facing the pattern forming surface of the mold 4 (projection area of the pattern forming surface of the mold 4) forms part of the spherical surface. You may also

In Embodiment 1 and 2 demonstrated above, the elastic bodies 9 and 15 which consist of silicone rubber were used. However, as long as the elastic modulus satisfies predetermined conditions, the material of the elastic body is not particularly limited. For example, at least one of synthetic rubber or natural rubber such as silicone rubber, fluorine rubber, urethane rubber, chloroprene rubber, nitrile rubber, ethylene propylene rubber, butyl rubber and chlorosulfonated polyethylene rubber can be used as the material of the elastic body. have. Or you may use the metal which can elastically deform as a raw material of an elastic body.

In addition, in above-mentioned Embodiment 1 and 2, the seamless base material 8 which consists of PET films was used. However, you may use other resin or metal with a thin mirror surface which can be used as a roll belt.

In Embodiments 1 and 2 described above, the base material 8 is sandwiched between the mold 4 and the elastic bodies 9 and 15, and the mold 4 is attached to the UV-curable resin 13 on the base material 8. The Y-axis table 2 was used as a pressurization apparatus which presses the pattern formation surface of the. However, the Y-axis table is an example, and the structure of a pressurization apparatus is not specifically limited.

Moreover, in above-mentioned Embodiment 1 and 2, UV curable resin 13 was used for resin provided on the base material 8. However, as long as problems such as untransfer of the pattern or poor shape of the pattern due to the residual of gas or the occurrence of uncontacted portions (non-adherent portions) of the resin on the mold 4 and the substrate 8 are difficult to occur, the substrate ( 8) Resin provided on is not specifically limited. For example, if it is difficult to cause problems such as untransfer of the pattern or poor shape of the pattern due to residual gas or generation of non-contact portions (non-adherent portions) of the resin on the mold 4 and the substrate 8, UV You may use resin hardened | cured by light other than light, resin hardened | cured by an electron beam, resin hardened | cured by heat, etc. In order to realize a large area of the sheet-shaped device (the surface on which the fine pattern is transferred), the seam between adjacent patterns can be made inconspicuous, and to realize an imprint that can almost eliminate the step difference between the seams, one place It is necessary to use resin which can divide a hardening range and a nonhardening range in imprint molding of the thing, and can make the boundary of a hardening range into a curve without regularity instead of a straight line. As an example of such resin, in the above-mentioned Embodiments 1 and 2, the UV curable resin 13 was used. However, resin provided on the base material 8 is not specifically limited, as long as the joint between adjacent patterns can be made inconspicuous, and the level | step difference of a joint can be almost eliminated. For example, if the seam between adjacent patterns can be made inconspicuous, and the level of the seam can be almost eliminated, the resin hardened by light other than UV light, the resin hardened by electron beam, or heat You may use resin etc. hardened | cured by it.

In the above-described embodiments 1 and 2, the UV curable resin 13 was used. Therefore, the UV irradiation apparatus 6 was used as a hardening apparatus which hardens resin which contacts the pattern formation surface of the mold 4. However, the apparatus which hardens resin is not limited to a UV irradiation apparatus, What is necessary is just to select according to the kind of resin.

Moreover, in embodiment 1 and 2 mentioned above, the structure which irradiates UV light to the UV curable resin 13 through the mold 4 was employ | adopted. Therefore, the material through which UV light transmits was selected as the material of the mold 4. However, the material of the mold 4 is not limited to the material which UV light transmits, and can be selected according to the kind of resin, the installation position of a hardening apparatus, etc.

Moreover, in Embodiment 1 and 2 mentioned above, the structure where the base material 8 is sent out on the elastic bodies 9 and 15 by the meandering control roller 10 and the rotation control roller 11 was employ | adopted. However, the structure of the mechanism which sends out a base material on an elastic body is not specifically limited.

In the first and second embodiments, the cylindrical elastic body 9 or the spherical elastic body 15 was used. However, the shape of the elastic body is not limited to the cylindrical or spherical shape. The elastic body is a shape that moves away from the pattern forming surface of the mold 4 toward the outside from the inside of the range to the range (projection area of the pattern forming surface of the mold 4) facing the pattern forming surface of the mold 4. You just need to have a curved surface. As a result, the surface of the elastic body in the range facing the pattern formation surface of the mold 4 (projection area of the pattern formation surface of the mold 4) may be a curved surface having a convex shape toward the mold side. By the surface shape of such an elastic body, at the time of pressurization, the contact range of the pattern forming surface of the mold 4 and the UV curable resin 13 can be expanded from the inside of the pattern forming surface toward the outside.

In addition, in Embodiment 1 and 2 mentioned above, the shape of the surface direction of the area | region in which the fine pattern 5 is arrange | positioned is planar shape, and the size of the plane (size of the area | region in which the fine pattern 5 is arrange | positioned) is A mold 4 of 20 mm ² was used. However, the shape and size of the surface direction of the area where the fine pattern 5 is arranged are not particularly limited. However, it is suitable to adjust the curvature of the surface (curved surface) of an elastic body according to the shape of the surface direction of the area | region in which the micropattern 5 is arrange | positioned. In detail, when the shape of the surface direction of the area | region in which the fine pattern 5 is arrange | positioned is a planar shape or the curved shape of the shape convex toward the elastic body side, the range which faces the pattern formation surface of the mold 4 (mold ( It is preferable to set the curvature of the curved surface (surface) of the elastic body in the projection area of the pattern formation surface of 4) smaller than the curvature of the shape of the surface direction of the area | region where the micropattern 5 is arrange | positioned. Moreover, when the shape of the surface direction of the area | region where the micropattern 5 is arrange | positioned is a curved surface shape (concave curved surface shape) convex toward the opposite side to an elastic body, it opposes the pattern formation surface of the mold 4 It is preferable to make the curvature of the curved surface (surface) of an elastic body in the range (projection area of the pattern formation surface of the mold 4) larger than the curvature of the shape of the surface direction of the area | region where the micropattern 5 is arrange | positioned. . By doing in this way, the contact range of the pattern formation surface of the mold 4 and the UV-curable resin 13 on the base material 8 can be gradually expanded toward the outer side from the inside of a pattern formation surface.

As described above, according to the embodiment of the present invention, the untransferred portion of the pattern and the shape defective portion of the pattern can be made difficult to occur. Moreover, according to embodiment of this invention, the level difference of the joint between adjacent patterns can be almost eliminated. Moreover, according to embodiment of this invention, the sheet-like device of the large area to which the micropattern was transferred can be obtained by the simple low cost installation.

Claims (15)

A mold having a pattern forming surface on which a pattern is formed,
An elastic body disposed opposite the mold;
A pressing device which sandwiches a substrate between the mold and the elastic body and presses the pattern forming surface on the resin on the substrate;
It is provided with the hardening apparatus which hardens the said resin on the said base material,
The surface of the said elastic body in the projection area | region of the said pattern formation surface is a curved surface of the shape convex toward the said mold side, The manufacturing apparatus of the sheet-like device characterized by the above-mentioned. The method according to claim 1,
The surface of the said elastic body in the projection area | region of the said pattern formation surface forms a part of cylindrical surface, The manufacturing apparatus of the sheet-like device characterized by the above-mentioned. The method according to claim 1,
The surface of the said elastic body in the projection area | region of the said pattern formation surface forms a part of spherical surface, The manufacturing apparatus of the sheet-like device characterized by the above-mentioned. The method according to claim 1,
The shape of the surface direction of the area | region in which the said pattern is arrange | positioned is planar shape or the curved surface shape of the shape convex toward the said elastic body side,
The surface of the said elastic body in the projection area | region of the said pattern formation surface has curvature smaller than the curvature of the shape of the surface direction of the area | region where the said pattern is arrange | positioned, The manufacturing apparatus of the sheet-like device characterized by the above-mentioned. The method according to claim 1,
The shape of the surface direction of the area | region in which the said pattern is arrange | positioned is the curved surface shape of the shape which convex on the opposite side to the said elastic body,
The surface of the said elastic body in the projection area | region of the said pattern formation surface has curvature larger than the curvature of the shape of the surface direction of the area | region where the said pattern is arrange | positioned, The manufacturing apparatus of the sheet-like device characterized by the above-mentioned. The method according to claim 1,
The elastic body has an antireflection structure for preventing the light for curing the resin on the base material from being reflected from the surface of the elastic body. The method according to claim 1,
At least 1 sort (s) of synthetic rubber and natural rubber is used as a raw material of the said elastic body, The manufacturing apparatus of the sheet-like device characterized by the above-mentioned. The method according to claim 1,
At least one of at least one of a linear axis of movement or a rotary axis of rotation for relatively moving the mold and the substrate,
Imprint molding is possible at multiple places of the said resin on the said base material, The manufacturing apparatus of the sheet-like device characterized by the above-mentioned. The method according to claim 1,
The said mold has a light shielding structure for hardening | curing a predetermined range among the range which the said pattern formation surface and said resin contact in the outer peripheral part of the said pattern formation surface, The manufacturing apparatus of the sheet-like device characterized by the above-mentioned. The method according to claim 1,
And a tension adjusting mechanism for adjusting the tension of the base material. Between the mold which has a pattern formation surface in which a pattern is formed, and the elastic body of a predetermined shape which has a curvature, the base material provided with resin was pinched on the one surface which faces the said pattern formation surface, and the said pattern formation surface was made to the said resin. Pressing to pressurize the resin;
And a step of curing the resin on the base material,
At the time of pressurization, as the at least one of the mold and the elastic body moves in the direction in which the mold and the elastic body approach, the range where the pattern forming surface and the resin contact each other is outside from the inside of the pattern forming surface. The manufacturing method of the sheet-like device characterized by spreading toward the side. The method of claim 11,
The surface of the said elastic body in the projection area | region of the pattern formation surface of the said mold is a curved surface of the shape which moves away from the said pattern formation surface toward the outer side inside the projection area, The manufacturing method of the sheet-like device characterized by the above-mentioned. The method of claim 11,
The surface of the said elastic body in the projection area | region of the pattern formation surface of the said mold forms a part of a cylindrical surface,
At the time of pressurization, as the at least one of the mold and the elastic body moves in a direction in which the mold and the elastic body approach, the range where the pattern forming surface and the resin contact is widened from the line segment to the outside. The manufacturing method of the sheet-like device made into. The method of claim 11,
The surface of the said elastic body in the projection area | region of the pattern formation surface of the said mold forms a part of spherical surface,
At the time of pressurization, as the at least one of the mold and the elastic body moves in a direction in which the mold and the elastic body approach, the range where the pattern-forming surface and the resin contact is widened from the point toward the outside. The manufacturing method of the sheet-like device made into. The method of claim 11,
After pressing the said resin by the said pattern formation surface, hardening the said resin repeats the process of transferring the said pattern to the said resin, and transfers the said pattern to several places of the said resin on the said base material, It is characterized by the above-mentioned. The manufacturing method of a sheet-like device.

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