KR20120115890A - Solar cell apparatus and method of fabricating the same - Google Patents
Solar cell apparatus and method of fabricating the same Download PDFInfo
- Publication number
- KR20120115890A KR20120115890A KR1020110033471A KR20110033471A KR20120115890A KR 20120115890 A KR20120115890 A KR 20120115890A KR 1020110033471 A KR1020110033471 A KR 1020110033471A KR 20110033471 A KR20110033471 A KR 20110033471A KR 20120115890 A KR20120115890 A KR 20120115890A
- Authority
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- South Korea
- Prior art keywords
- layer
- solar cell
- sensor unit
- substrate
- back electrode
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title description 11
- 239000000758 substrate Substances 0.000 claims abstract description 44
- 238000000034 method Methods 0.000 claims description 21
- 239000012535 impurity Substances 0.000 abstract description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 13
- 239000010949 copper Substances 0.000 description 10
- 229910052733 gallium Inorganic materials 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 229910052738 indium Inorganic materials 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010408 film Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 239000011669 selenium Substances 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 5
- 239000011787 zinc oxide Substances 0.000 description 5
- KTSFMFGEAAANTF-UHFFFAOYSA-N [Cu].[Se].[Se].[In] Chemical compound [Cu].[Se].[Se].[In] KTSFMFGEAAANTF-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 4
- 239000002243 precursor Substances 0.000 description 4
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000005361 soda-lime glass Substances 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 229910052793 cadmium Inorganic materials 0.000 description 2
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 229910052711 selenium Inorganic materials 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- YNLHHZNOLUDEKQ-UHFFFAOYSA-N copper;selanylidenegallium Chemical compound [Cu].[Se]=[Ga] YNLHHZNOLUDEKQ-UHFFFAOYSA-N 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229920005570 flexible polymer Polymers 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/12—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof structurally associated with, e.g. formed in or on a common substrate with, one or more electric light sources, e.g. electroluminescent light sources, and electrically or optically coupled thereto
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/12—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof structurally associated with, e.g. formed in or on a common substrate with, one or more electric light sources, e.g. electroluminescent light sources, and electrically or optically coupled thereto
- H01L31/14—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof structurally associated with, e.g. formed in or on a common substrate with, one or more electric light sources, e.g. electroluminescent light sources, and electrically or optically coupled thereto the light source or sources being controlled by the semiconductor device sensitive to radiation, e.g. image converters, image amplifiers or image storage devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/12—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof structurally associated with, e.g. formed in or on a common substrate with, one or more electric light sources, e.g. electroluminescent light sources, and electrically or optically coupled thereto
- H01L31/16—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof structurally associated with, e.g. formed in or on a common substrate with, one or more electric light sources, e.g. electroluminescent light sources, and electrically or optically coupled thereto the semiconductor device sensitive to radiation being controlled by the light source or sources
-
- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47G—HOUSEHOLD OR TABLE EQUIPMENT
- A47G2200/00—Details not otherwise provided for in A47G
- A47G2200/08—Illumination
- A47G2200/085—Light sensor
-
- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47G—HOUSEHOLD OR TABLE EQUIPMENT
- A47G2200/00—Details not otherwise provided for in A47G
- A47G2200/16—Temperature
- A47G2200/166—Temperature sensor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Abstract
Solar cell according to the embodiment is a substrate; A back electrode layer on the substrate; A light absorbing layer on the back electrode layer; A first buffer layer on the light absorbing layer; A high resistance buffer layer doped with impurities on the first buffer layer; And a window layer on the high resistance buffer layer.
Description
An embodiment relates to a solar cell and a manufacturing method thereof.
Recently, as the demand for energy increases, development of solar cells for converting solar energy into electrical energy is in progress.
In particular, a CIGS-based solar cell, which is a pn heterojunction device having a support substrate structure including a glass support substrate, a metal back electrode layer, a p-type CIGS-based light absorbing layer, a first buffer layer, an n-type transparent electrode layer, and the like, is widely used.
In addition, various studies are underway to increase the efficiency of such solar cells.
Embodiments provide a solar cell including a sensor unit having a structure identical to that of solar cells, and provide a solar cell and a method of manufacturing the solar cell capable of knowing an operating temperature of the solar cell and an incident amount of sunlight.
A solar cell according to an embodiment includes at least one solar cell including a substrate, a back electrode layer on the substrate, a light absorbing layer on the back electrode layer, a buffer layer on the light absorbing layer, and a window layer on the buffer layer; And a sensor unit formed in a circumferential region on the substrate.
According to the embodiment, by manufacturing a solar cell including a sensor unit having the same structure as the solar cells, it is possible to know the operating temperature of the solar cell and the incident amount of sunlight.
1 is a plan view illustrating a solar cell apparatus according to an embodiment.
FIG. 2 is a cross-sectional view illustrating a cross section taken along AA ′ in FIG. 1.
3 to 6 are cross-sectional views illustrating a method of manufacturing a solar cell according to an embodiment.
7 is a plan view illustrating a junction box and a display unit disposed on a rear surface of a substrate.
In the description of the embodiments, when each support substrate, layer, film, or electrode is described as being formed "on" or "under" of each support substrate, layer, film, or electrode, etc. As used herein, “on” and “under” include both “directly” or “indirectly” other components. In addition, the upper or lower reference of each component is described with reference to the drawings. In the drawings, the size of each component may be exaggerated for description, and does not mean the size to be actually applied.
FIG. 1 is a plan view illustrating a photovoltaic device according to an embodiment, and FIG. 2 is a cross-sectional view illustrating a cross section taken along a line A-A 'of FIG. 1.
Referring to FIG. 1, a plurality of solar cells C1, C2, C3,... Are formed on a
The
The
The
The
The signal of the
The
2, a solar cell according to an embodiment includes a
The
The
When the
In addition, a ceramic substrate such as alumina, stainless steel, a flexible polymer, or the like may be used as the material of the
The
In addition, the
The
The
First through holes TH1 are formed in the
The width of the
By the first through holes TH1, the
The rear electrodes are arranged in a stripe shape. Alternatively, the rear electrodes may be arranged in a matrix. At this time, the first through grooves TH1 may be formed in a lattice form when viewed from a plane.
The light
The light
The
Materials for forming the
The high
The
The
In addition, the oxide may include conductive impurities such as aluminum (Al), alumina (Al 2 O 3 ), magnesium (Mg), or gallium (Ga). More specifically, the
The energy bandgap of the
The
Therefore, the
The
As shown, a portion of the upper surface of the
The
3 to 6 are cross-sectional views illustrating a method of manufacturing the solar cell apparatus according to the embodiment. For a description of the present manufacturing method, refer to the description of the photovoltaic device described above.
Referring to FIG. 3, the
The first through holes TH1 may expose an upper surface of the
An additional layer such as a diffusion barrier layer may be interposed between the supporting
Referring to FIG. 4, the
The
In order to form the
When the metal precursor film is formed and selenization is subdivided, a metal precursor film is formed on the
Thereafter, the metal precursor film is formed of a copper-indium-gallium-selenide-based (Cu (In, Ga) Se 2 ; CIGS-based) light absorbing layer by a selenization process.
Alternatively, the copper target, the indium target, the sputtering process using the gallium target, and the selenization process may be performed simultaneously.
Alternatively, the CIS-based or CIG-based
Thereafter, cadmium sulfide is deposited by a sputtering process or a chemical bath depositon (CBD) or the like, and the
Subsequently, zinc oxide (ZnO) is deposited on the
The high
Thereafter, a portion of the
The second through holes TH2 may be formed by a mechanical device such as a tip or a laser device.
In this case, the width of the second through holes TH2 may be about 50 μm to about 200 μm.
In addition, the second through holes TH2 are formed to expose a portion of the top surface of the
Referring to FIG. 5, a
In this case, the transparent conductive material is filled in the second through holes TH2, and the
The
Referring to FIG. 6, portions of the
As shown, the
Next,
The
Thereafter, the first and second bus bars 710 and 720 having different polarities may be connected at both ends of the cells C1 and C2... And the
The
The
FIG. 7 is a plan view illustrating the
As shown in FIG. 7, the
In addition,
According to the embodiment, by manufacturing a solar cell including a sensor unit having the same structure as the solar cells, it is possible to know the operating temperature of the solar cell and the incident amount of sunlight.
In addition, the features, structures, effects and the like described in the embodiments are included in at least one embodiment of the present invention, and are not necessarily limited to only one embodiment. Furthermore, the features, structures, effects, and the like illustrated in the embodiments may be combined or modified with respect to other embodiments by those skilled in the art to which the embodiments belong. Therefore, it should be understood that the present invention is not limited to these combinations and modifications.
While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, It will be understood that various modifications and applications are possible. For example, each component specifically shown in the embodiments can be modified and implemented. It is to be understood that all changes and modifications that come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.
Claims (9)
And a sensor unit formed in a circumferential region on the substrate.
The sensor unit is formed of a length of 5mm to 20mm solar cell.
The sensor unit is a solar cell electrically separated from the solar cell.
A solar cell comprising a groove formed between the sensor unit and the solar cell.
The groove is formed so that the upper surface of the substrate is exposed.
The sensor unit has a solar cell having the same layer as the solar cell.
And a first bus bar and a second bus bar formed at both ends of the at least one solar cell and electrically connected to the at least one solar cell and having different polarities.
And a wire electrically connected to the sensor unit.
And a display unit electrically connected to the sensor unit through the wires.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020110033471A KR101762958B1 (en) | 2011-04-11 | 2011-04-11 | Solar cell apparatus and method of fabricating the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020110033471A KR101762958B1 (en) | 2011-04-11 | 2011-04-11 | Solar cell apparatus and method of fabricating the same |
Publications (2)
Publication Number | Publication Date |
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KR20120115890A true KR20120115890A (en) | 2012-10-19 |
KR101762958B1 KR101762958B1 (en) | 2017-07-28 |
Family
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Family Applications (1)
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KR1020110033471A KR101762958B1 (en) | 2011-04-11 | 2011-04-11 | Solar cell apparatus and method of fabricating the same |
Country Status (1)
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KR (1) | KR101762958B1 (en) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2848993B2 (en) * | 1991-11-21 | 1999-01-20 | 株式会社富士電機総合研究所 | Method and apparatus for manufacturing thin-film solar cell |
DE10107600C1 (en) * | 2001-02-17 | 2002-08-22 | Saint Gobain | Method for operating a photovoltaic solar module and photovoltaic solar module |
JP4661433B2 (en) | 2005-07-29 | 2011-03-30 | Tdk株式会社 | Wireless transceiver |
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