KR20120103415A - Plasma generating system and plasma generating method - Google Patents

Abstract

PURPOSE: A system and method for generating plasma are provided to stabilize plasma production by improving drying performance of a dielectric film. CONSTITUTION: A plasma electrode part(2) produces active species including ion or radical with micro gap plasma. A blowing device(3) forces to apply wind to a corresponding plasma electrode part. An explosion prevention device is installed outside the plasma electrode part. A power source(5) is provided to apply a high voltage to an electrode part. The plasma electrode part includes a pair of electrodes(21,22) having a dielectric film in an opposite side. An applying terminal applied with a voltage from the power source is formed in an edge part of the electrode in the electrode part. [Reference numerals] (AA) Wind; (BB,CC) Deodorization; (DD) Radical species(ion,radical); (EE) Attached virus sterilization

Description

Plasma generating device and plasma generating method {PLASMA GENERATING SYSTEM AND PLASMA GENERATING METHOD}

The present invention relates to a plasma generating apparatus and a plasma generating method.

Recently, the demand for controlling air quality in living environments such as sterilization and deodorization is increasing due to an increase in the risk of infectious diseases caused by an increase in atopy, asthma, allergic symptoms holders, and the explosive epidemic of swine flu. In addition, as life becomes more abundant, the amount of stored food is increased and the storage of leftover food is increasing, and environmental control in the storage equipment represented by the refrigerator is also increasing in importance.

In the prior art for controlling the air quality of the living environment, physical control represented by a filter is common. Physical control can also capture bacteria, viruses, and the like depending on the size of relatively large dust, dust, and filter pores suspended in the air. In addition, when there are a myriad of adsorption sites such as activated carbon, malodorous molecules of odor can be captured. However, in order to capture, it is necessary to pass the air in the space to be controlled through all the filters, and the apparatus has a large size, and the maintenance cost such as filter replacement also increases, and there is no effect on deposits. Thus, as means for enabling sterilization or deodorization of the deposit, it is possible to release chemically active species into the space to be sterilized or deodorized. When spraying drugs, releasing fragrances and deodorants, active species must be prepared in advance, so regular supplementation is indispensable. In recent years, means for generating plasma in the atmosphere and attempting to sterilize or deodorize using chemically active species generated therein has been increasing.

Techniques for generating plasma in the atmosphere by discharge and sterilizing or deodorizing by ions or radicals (hereinafter, active species) generated therein can be classified into two types.

(1) A so-called passive plasma generator (e.g., a patent document) which reacts a bacterium, virus (hereinafter, suspended bacteria) or malodorous substance (hereinafter, malodorous) suspended in the atmosphere with active species in a limited volume in the apparatus. One)

(2) The active species generated in the plasma generating unit is released into a closed space (e.g., living room, toilet, car, etc.) having a larger volume than (1). A so-called active plasma generator (e.g., patent document 2) which reacts by a collision

The advantage of the passive plasma generating apparatus of (1) is that high sterilization effect and deodorization effect are expected because plasma is generated in a small volume to generate high concentration of active species. On the other hand, as a drawback, airborne bacteria and odors need to be introduced into the apparatus, so that the apparatus becomes large and ozone is likely to be generated as a by-product of plasma generation, and a filter which adsorbs or decomposes in order not to leak ozone out of the apparatus is separately provided. Need to install

Next, the advantage of the active plasma generating apparatus of (2) is that the apparatus can be made relatively small, and bacteria attached to the surface of clothing or household goods as well as sterilization of suspended bacteria and decomposition of odors in the air (hereinafter, adhered bacteria) It can also be expected to sterilize and disintegrate odors adsorbed on the surface. On the other hand, as a drawback, since the active species diffuses in an enclosed space that is too large relative to the volume of the device and the concentration is lowered, only the active species having a long life can be expected to be sterilized or deodorized. As a result, the deodorizing effect can hardly be expected in a space with a high odor concentration (a concentration about 10,000 times higher than the active species concentration).

As described above, in the passive plasma generator, the effect is limited only on the airborne bacteria and odor contained in the air flow flowing into the apparatus, and in the active plasma generator, the effect is expected except for the low concentration of airborne bacteria, adherent bacteria, and odor. none. That is, what can be realized using the prior art is limited to any one of "sterilization and deodorization of floating bacteria" or "sterile bacteria of low concentration, sterilization of adherent bacteria and deodorization of adherent odors".

In the electrode constituting the plasma generating unit, for example, a porous dielectric film is often used for the plasma generating part of the electrode. Therefore, under high humidity, electrical properties change due to the hygroscopic action of the dielectric film itself, thereby inhibiting plasma generation. Particularly, in a low temperature environment such as a refrigerator, where the humidity is greatly changed, the dielectric film itself of the electrode tends to be condensed, and the generation of plasma stops and the sterilization and deodorization performance is reduced. Therefore, it is difficult to maintain sterilization performance when the humidity inside the refrigerator continues.

Prior art literature

Japanese Patent Application Laid-Open No. 2002-224211

Patent Document 2 JP 2003-79714 A

Therefore, the present invention is a technique for realizing both sterilization and deodorization of adherent bacteria at the same time, a passive function of generating plasma and deodorizing by active species, and an active function of releasing the active species outside the device to sterilize adherent bacteria. In order to combine the branches at the same time, the main aim is to increase the amount of active species produced and to prevent condensation or moisture adhesion on the dielectric film.

The present invention also aims to stabilize the generation of active species by stabilizing the generation of plasma by improving the drying performance of the dielectric film.

In one embodiment of the present invention, a plasma generating apparatus includes a pair of electrodes provided with a dielectric film on at least one of the opposing surfaces, and discharges plasma by applying a predetermined voltage between the electrodes, wherein a coating film is provided on the surface of the dielectric film. It is.

In such a case, since a coating film is provided on the surface of the dielectric film, condensation and moisture adhesion are less likely to occur on the dielectric film, so that the sterilization performance can be exhibited for a long time by preventing degradation of the sterilization performance even under high humidity in a refrigerator. In addition, by providing a fluid flow hole in each of the electrodes to correspond to the electrodes, the amount of plasma generated in each corresponding fluid through hole can be increased as much as possible, and the contact area between the plasma and the fluid is as much as possible. I can make it big. As a result, the production amount of the active species called ions and radicals can be increased to sufficiently deodorize the active species and release the active species to the outside of the apparatus to sterilize floating bacteria and adherent bacteria. In addition, the correspondence part used in this specification means that each fluid flow hole formed in both electrodes as seen from the face plate direction of an electrode is located in substantially the same position, and when a pair of electrodes of an xy-plane type are seen in the z-axis direction in a rectangular coordinate system, It is said to be approximately the same (x, y) coordinate position at both electrodes.

When the dielectric film is formed by the thermal spraying method, the deposited dielectric film has a porous or fine concavo-convex structure, and therefore is susceptible to humidity. Thus, the effect of providing a coating film becomes more remarkable.

In order to further prevent condensation and moisture adhesion at the plasma generating site, the coating film is preferably water repellent.

It is preferable that the thickness of the said coating film is 0.01 micrometer or more and 100 micrometers or less. If the coating film is 100 μm or more, the physical properties of the dielectric film itself are impaired, and the unevenness formed on the surface of the dielectric film is buried, and the effect of plasma generation is lowered.

It is preferable to have a spacer having a thickness of 500 mu m or less between the pair of electrodes. This makes it possible to increase the distance between the electrodes and to increase the deodorization reaction field, thereby improving the odor deodorization efficiency. In addition, since the distance between the electrodes is increased by the spacer, even if moisture adheres, fine water droplets can be easily taken out between the electrodes. As the method for forming the spacer, thin film formation methods such as vapor deposition, chemical vapor deposition, sputtering and ion plating, or plating, thermal spraying, spray coating, spin coating, coating, and the like can be considered.

In order to prevent condensation and moisture adhesion on the spacer, it is preferable that a coating film is provided on the surface of the spacer.

It is desirable to have a blowing mechanism forcibly sending the fluid to the fluid distribution holes in order to allow the fluid to efficiently pass through the fluid distribution holes to promote the generation of active species and to increase the deodorizing effect.

Here, it is preferable to make the flow velocity of the wind which passes the said fluid flow hole by the said blowing mechanism into the range of 0.1 m / s or more and 30 m / s or less.

In order to increase the number of active species contained in the fluid passing through the fluid through-hole as much as possible, and to suppress the concentration of ozone generated, the voltage applied to each electrode has a pulse shape, and the peak value is 100 V or more and 5000 V or less. It is preferable to make it into a range and to make a pulse width into the range of 0.1 microsecond or more and 300 microseconds or less.

In another embodiment according to the present invention, a plasma generating apparatus includes a pair of electrodes provided with a dielectric film on at least one of the opposing surfaces, and plasma discharged by applying a predetermined voltage between the electrodes. The heating element is characterized in that the installation.

In such a case, since the heating element is provided on the electrode or the dielectric film, condensation and moisture adhesion are less likely to occur on the electrode or the dielectric film, and the water condensation or adhered to the electrode or the dielectric film can be removed. For example, the sterilization performance can be exhibited for a long time by preventing the sterilization performance from being lowered even under high humidity in the refrigerator. Even if condensation occurs on the surface of the dielectric film and the plasma generation is inhibited, the dielectric film can be dried by heating the heating element, so that the plasma generation can be resumed. In addition, since heating elements are directly heated by providing heating elements in the electrodes or dielectric films, not only can the heating time of the electrodes or dielectric films be shortened, but also energy can be saved than radiation or indirect heating. In addition, since the electrode or the dielectric film is heated by the heating element, the reaction heat of the deodorizing reaction of the malodorous component can be supplied, and the deodorizing reaction can be promoted. In addition, by providing a fluid flow hole in each of the electrodes corresponding to each other, the fluid flow holes are formed so that the amount of plasma generated in each corresponding fluid through hole can be increased as much as possible, so that the contact area between the plasma and the fluid can be made as large as possible. Can be. As a result, the production amount of the active species called ions and radicals can be increased to sufficiently deodorize the active species and release the active species to the outside of the apparatus to sterilize floating bacteria and adherent bacteria.

Here, as a specific embodiment for providing a heating element in the plasma electrode portion, providing a heating element inside the electrode, providing a heating element between the electrode and the dielectric film, and providing a heating element inside the dielectric film. And providing a heating element on a part of the surface of the dielectric film.

Moreover, the plasma generating apparatus which concerns on this invention has a pair of electrode which provided the dielectric film in at least one of the opposing surfaces, and discharges plasma by applying a predetermined voltage between these electrodes, and has a casing which supports the said pair of electrodes, A heating element for heating the electrode or the dielectric film is provided in the casing.

If this is the case, a heating element is provided in the casing to heat the electrode and the dielectric film so that condensation and moisture adhesion are less likely to occur on the dielectric film, and the moisture condensation or adhered to the dielectric film can be removed.

It is preferable that the heat generation temperature of the said heat generating body is 150 degrees C or less from the heat resistance temperature of the member or dielectric film installed externally.

In order to prevent condensation and moisture adhesion at the plasma generation site and to easily evaporate condensation or moisture to prevent degradation of sterilization performance and deodorization performance, a coating film is preferably provided on the surface of the dielectric film. At this time, it is particularly preferable that the coating film is water repellent (hydrophobic). In addition, by using a hydrophobic coating film can be easily adsorbed odor component having a hydrophobic to the film can improve the deodorization efficiency.

It is preferable that the thickness of the said coating film is 0.01 micrometer or more and 100 micrometers or less. In this case, when the coating film is 100 μm or more, the physical properties of the dielectric film itself are impaired, and the unevenness formed on the surface of the dielectric film is buried, and the effect of plasma generation is lowered.

It is preferable to have a spacer having a thickness of 500 mu m or less between the pair of electrodes. This makes it possible to increase the distance between the electrodes and to increase the deodorization reaction field, thereby improving the odor deodorization efficiency. In addition, since the distance between the electrodes is increased by the spacer, even if moisture adheres, fine water droplets can be easily taken out between the electrodes. As the method for forming the spacer, thin film formation methods such as vapor deposition, chemical vapor deposition, sputtering and ion plating, or plating, thermal spraying, spray coating, spin coating, coating, and the like can be considered.

It is desirable to have a blowing mechanism forcibly sending the fluid to the fluid distribution holes in order to allow the fluid to efficiently pass through the fluid distribution holes to promote the generation of active species and to increase the deodorizing effect. It is also possible to promote the evaporation of condensation or adhered moisture by forcibly sending wind.

In order to increase the number of active species contained in the fluid passing through the fluid through-hole as much as possible, and to suppress the concentration of ozone generated, the voltage applied to each electrode has a pulse shape, and the peak value is 100 V or more and 5000 V or less. It is preferable to make it into a range and to make a pulse width into the range of 0.1 microsecond or more and 300 microseconds or less.

Further, as another embodiment according to the present invention, the plasma generating apparatus has a pair of electrodes in which a dielectric film is provided on at least one of the opposing surfaces, and a plasma is discharged by applying a predetermined voltage between the electrodes. And a case for supporting the pair of electrodes, wherein the case opens the at least a part of the side openings formed by the pair of electrodes, and is configured to penetrate the fluid distribution holes in the portions to penetrate them. It is done.

In this case, since the case opens at least a part of the side openings formed by the pair of electrodes, the condensation water generated in the pair of electrodes can be easily evaporated to prevent the accumulation of condensation water in the pair of electrodes. As a result, the drying performance of the dielectric film can be improved, and the generation of active species can be stabilized by stabilizing the generation of plasma.

In addition, when the side opening was closed by covering the entire side opening of the pair of electrodes, the dielectric film near the fluid communication hole among the condensation water generated in the pair of electrodes could be dried, but other parts such as the periphery of the pair of electrodes were opened. As it is not done, drying performance is remarkably bad. The present invention can dry not only the dielectric film in the vicinity of the fluid flow hole but also the dielectric film in other parts by opening the side opening of the electrode.

Also, by providing a fluid flow hole in each of the electrodes corresponding to each of them, the fluid flow holes are formed so that the amount of plasma generated in each of the corresponding fluid through holes can be increased as much as possible, and the contact area between the plasma and the fluid can be increased. As large as possible. As a result, the production amount of the active species called ions and radicals can be increased to sufficiently deodorize the active species and release the active species to the outside of the apparatus to sterilize floating bacteria and adherent bacteria.

In order to allow water to easily escape from the open side opening so that gas is easily passed through the open side opening, the case has a wall facing the open side opening, and a gas flow path is provided between the side opening and the wall. It is preferable to form. Moreover, by providing a wall opposite the side opening, the flame generated by the plasma near the side opening can be prevented from propagating to the outside.

In order to configure the gas flow passage in a simple configuration, it is preferable that a through hole communicating with the side opening is formed in the side wall portion of the case, and the gas flow passage is formed by the through hole.

It is preferable to install a blowing mechanism at the front end or the rear end of the pair of electrodes to send air to the open side opening. In this way, it is possible to efficiently blow air to the open side openings, so that moisture can easily escape from the side openings, thereby further improving the drying performance of the dielectric film. In addition, the blowing mechanism allows the fluid to efficiently pass through the fluid distribution hole, thereby promoting the generation of active species and increasing the deodorizing effect. For example, in the case of electronic products, such as a refrigerator, when it connects with sensors, such as a humidity sensor and a temperature sensor, a ventilation mechanism can be operated efficiently with minimum energy. In addition, since the dew condensation state can be detected by a decrease in the applied voltage, it is also effective to adjust the air blowing amount.

Here, it is preferable to make the flow velocity of the wind which passes the said fluid flow hole by the said blowing mechanism into the range of 0.1 m / s or more and 30 m / s or less.

When the dielectric film is formed by the thermal spraying method, fine irregularities are formed on the surface thereof and the drying performance is remarkably lowered by opposing them. However, by lowering the side openings as in the present invention, the decrease in the drying performance can be prevented.

In order to prevent condensation and moisture adhesion at the plasma generating site and to easily evaporate condensation or moisture to prevent deterioration of sterilization performance and deodorization performance, a coating film is preferably provided on the surface of the dielectric film. At this time, it is particularly preferable that the coating film is water repellent (hydrophobic). In addition, by using a hydrophobic coating film can be easily adsorbed odor component having a hydrophobic to the film can improve the deodorization efficiency.

It is preferable that the thickness of the said coating film is 0.01 micrometer or more and 100 micrometers or less. In this case, when the coating film is 100 μm or more, the physical properties of the dielectric film itself are impaired, and the unevenness formed on the surface of the dielectric film is buried, and the effect of plasma generation is lowered.

It is preferable to have a spacer having a thickness of 500 mu m or less between the pair of electrodes. This makes it possible to increase the distance between the electrodes and to increase the deodorization reaction field, thereby improving the odor deodorization efficiency. In addition, since the distance between the electrodes is increased by the spacer, even if moisture adheres, fine water droplets can be easily taken out between the electrodes. As the method for forming the spacer, thin film formation methods such as vapor deposition, chemical vapor deposition, sputtering and ion plating, or plating, thermal spraying, spray coating, spin coating, coating, and the like can be considered.

In order to increase the number of active species contained in the fluid passing through the fluid through-hole as much as possible, and to suppress the concentration of ozone generated, the voltage applied to each electrode has a pulse shape, and the peak value is 100 V or more and 5000 V or less. It is preferable to make it into a range and to make a pulse width into the range of 0.1 microsecond or more and 300 microseconds or less.

The plasma generating method according to the present invention is characterized in that a coating film is provided on the surface of the dielectric film by using a pair of electrodes provided with a dielectric film on at least one of the opposing surfaces by applying a predetermined voltage between the electrodes and performing plasma discharge. .

According to the present invention, by increasing the amount of active species produced, both sterilization and deodorization of adherent bacteria can be simultaneously realized, and condensation or moisture adhesion can be prevented from occurring on the dielectric film to prevent degradation of sterilization performance for a long time. .

In addition, according to the present invention, both the sterilization and deodorization of adherent bacteria can be simultaneously realized by increasing the amount of active species produced, and the deterioration of sterilization performance can be prevented over a long period of time by removing condensation or moisture adhering to the dielectric film. .

In addition, according to the present invention, by increasing the amount of active species produced, both the sterilization and deodorization of adherent bacteria can be simultaneously realized, and the drying performance of the dielectric film can be improved to stabilize the generation of plasma to stabilize the amount of active species generated.

1 is a perspective view showing an embodiment of a plasma generating apparatus of the present invention.
2 is a schematic diagram showing the operation of the plasma generating device.
3 is a plan view illustrating the electrode unit.
4 is a cross-sectional view showing the electrode portion and the explosion-proof mechanism.
5 is an enlarged cross-sectional view showing the configuration of the opposing surface of the electrode portion.
6 is a partially enlarged plan view and a cross-sectional view schematically showing the fluid flow hole and the through hole.
Fig. 7 is a diagram showing the pulse width dependency between ionized water density and ozone concentration.
8 is a view showing a relationship between the condensation cycle and the ionized water density of the prior art and the present invention.
9 is a conceptual diagram showing the difference of the deodorizing effect by the magnitude of the distance between electrodes.
10 shows the dependence of the spacer thickness on the deodorizing performance.
11 is an example of the temperature humidity change in the refrigerator.
12 is a perspective view showing another embodiment of the plasma generating apparatus of the present invention.
It is sectional drawing which shows the electrode part and explosion-proof mechanism of other embodiment of the plasma generating apparatus of this invention.
14 is an enlarged cross-sectional view showing the configuration of an opposing surface of an electrode portion of another embodiment of the plasma generating apparatus of the present invention.
15 is a plan view illustrating an example of a heating element formation pattern.
16 is a perspective view showing yet another embodiment of the plasma generating apparatus of the present invention.
It is sectional drawing which shows the electrode part and explosion-proof mechanism of another embodiment of the plasma generating apparatus of this invention.
18 is a plan view of a plasma electrode unit according to still another embodiment of the plasma generating apparatus of the present invention.
19 is an enlarged cross-sectional view mainly showing the configuration of a case of still another embodiment of the plasma generating apparatus of the present invention.
It is sectional drawing which shows typically the structure of the electrode part of the modified embodiment of the other embodiment of the plasma generating apparatus of this invention.
It is sectional drawing which shows typically the structure of the electrode part of the modified embodiment of the other embodiment of the plasma generating apparatus of this invention.
It is a perspective view which shows typically the structure of the electrode part of the modified embodiment of the other embodiment of the plasma generating apparatus of this invention.
It is a top view which shows typically the conductor pattern of the modified embodiment of the other embodiment of the plasma generating apparatus of this invention.
It is a figure which shows the voltage application pattern of the modified embodiment of other embodiment of the plasma generating apparatus of this invention.
25 is an enlarged cross-sectional view mainly showing the configuration of a case in a modified embodiment of still another embodiment of the plasma generating device of the present invention.
Fig. 26 is an enlarged cross-sectional view mainly showing the configuration of a case in a modified embodiment of still another embodiment of the plasma generating apparatus of the present invention.
27 is a plan view of a plasma electrode unit in a modified embodiment of still another embodiment of the plasma generating apparatus of the present invention.

EMBODIMENT OF THE INVENTION Hereinafter, one Embodiment of this invention is described with reference to drawings.

<One Embodiment>

Plasma generating device 100 according to an embodiment of the present invention is used in home electronics such as a refrigerator, a washing machine, a clothes dryer, a cleaner, an air conditioner, or an air purifier, and the inside or outside air of the home electronics. Deodorization or sterilization of suspended or adherent bacteria inside or outside their products.

Specifically, as illustrated in FIGS. 1 and 2, the plasma electrode unit 2 generates active species such as ions and radicals by a micro gap plasma, and the outside of the plasma electrode unit 2. A blowing mechanism (3) installed in the plasma electrode portion (2) and forcibly sending wind (air flow) to the plasma electrode portion (2), and a flame generated in the plasma electrode portion (2) outside the plasma electrode portion (2), The explosion-proof mechanism 4 which does not propagate to the inside, and the power supply 5 for applying a high voltage to an electrode part are provided.

Hereinafter, each part (2)-(5) is demonstrated with reference to each figure.

The plasma electrode part 2 has a pair of electrodes 21 and 22 provided with dielectric films 21a and 22a on opposite surfaces as shown in FIGS. 2 to 6, and those electrodes 21. A predetermined voltage is applied between and 22 to discharge the plasma. Each of the electrodes 21 and 22 forms a substantially rectangular shape in plan view (as viewed from the face plate direction of the electrodes 21 and 22), as shown in FIG. 3, for example. It is made of stainless steel called SUS403. At the edges of the electrodes 21 and 22 of the electrode portion 2, an application terminal 2T to which a voltage from the power source 5 is applied is formed (see FIG. 3).

Here, in the voltage application method to the plasma electrode part 2 by the power supply 5, the voltage applied to each electrode 21, 22 is made into a pulse shape, and the peak value shall be in the range of 100V or more and 5000V or less, Moreover, the pulse width was made into the range of 0.1 microsecond or more and 300 microsecond or less. As shown in Fig. 7, ion water density is measured at a pulse width of 300 mu sec or less, and the ozone concentration is lowered, so that the ion width increases and the ozone concentration decreases as the pulse width becomes smaller. As a result, the amount of ozone generated can be suppressed, and the active species generated in the plasma can be efficiently discharged with a filter or the like frequently shown in the prior art, and as a result, sterilization of adherent bacteria can be realized in a short time.

As shown in Fig. 5, on the opposing surfaces of the electrodes 21 and 22, for example, a dielectric such as barium titanate is applied to form the dielectric films 21a and 22a. The surface roughness (calculated average roughness Ra in this embodiment) of these dielectric films 21a and 22a is 0.1 micrometer or more and 100 micrometers or less. As other surface roughness, you may define using maximum height Ry and 10-point average roughness Rz. In addition, it is conceivable to control the surface roughness of the dielectric films 21a and 22a by the thermal spraying method. As dielectrics applied to the electrodes, aluminum oxide, titanium oxide, magnesium oxide, strontium titanate, silicon oxide, silver phosphate, lead zirconate titanate, silicon carbide, indium oxide, cadmium oxide, bismuth oxide, zinc oxide, iron oxide, carbon nano You may use a tube.

In addition, as shown in Figs. 3, 4 and 6, the fluid flow holes 21b and 22b are provided in corresponding portions of the electrodes 21 and 22, respectively, so that they can communicate with each other. At the same time, when viewed from the face plate direction of the electrodes 21 and 22 (in the plane), at least a part of the corresponding fluid through-holes 21b and 22b contours are configured to be in different positions. That is, the planar shape of the fluid flow hole 21b formed in the one electrode 21 and the planar shape of the fluid flow hole 22b formed in the other electrode 22 are comprised so that it may differ from each other.

Specifically, the fluid flow holes 21b and 22b respectively formed in the corresponding portions of the electrodes 21 and 22 are substantially circular in plan view (see FIGS. 3 and 6), one side The opening size (opening diameter) of the fluid flow hole 21b formed in the electrode 21 is smaller than the opening size (opening diameter) of the fluid flow hole 22b formed in the other electrode 22 (for example, the opening diameter is 10 micrometers or more) are formed.

Similarly, as shown in Figs. 3 and 6, the fluid flow holes 21b formed in one electrode 21 and the fluid flow holes 22b formed in the other electrode 22 are formed concentrically. In addition, in this embodiment, all the fluid flow holes 21b formed in one electrode 21 all have the same shape, and all the fluid flow holes 22b formed in the other electrode 22 also all have the same shape, All of the fluid flow holes 21b formed in one electrode 21 are formed smaller than the fluid flow holes 22b formed in the other electrode 22. In the present embodiment, the effect is shown as a substantially circular shape, but the opening may be any shape as well as a circular shape, and may be configured so that at least a part of each fluid through-hole contour corresponding to the planar view is in a different position.

In addition, the total opening area of the fluid flow holes 21b and 22b formed in each of the electrodes 21 and 22 is in the range of 2% or more and 90% or less with respect to the total area of the respective electrodes 21 and 22. . Specifically, the total opening area of the fluid flow hole 22b formed in the other electrode 22 was in the range of 2% or more and 90% or less with respect to the total area of the electrode 22. In addition, the total opening area of the fluid flow hole 21b formed in one electrode 21 may be in the range of 2% or more and 90% or less.

And the plasma electrode part 2 of this embodiment provides the through-hole 21c in one electrode 21 separately from the fluid flow holes 21b and 22b, as shown to FIG. 3 and FIG. The through-hole 21c is comprised so that the opposing surface opening may be blocked by the other electrode 22. As shown in FIG. In addition, what consists of the fluid flow holes 21b and 22b formed in each said electrode 21 and 22 is called a complete opening hereafter, Comparing with this, it is formed by the through hole 21c. It is called half-opening.

The opening size of the through hole 21c was formed to be 10 µm or more smaller than the opening size of the fluid flow hole 21b. The through hole 21c is formed by replacing a part of the fluid flow hole 21b regularly arranged, and the through hole 21c is provided around the fluid flow hole 21b (see FIG. 3).

The blowing mechanism 3 is arranged on the other electrode 22 side of the plasma electrode portion 2 and is forced toward the fluid flow holes 21b and 22b (complete openings) formed in the plasma electrode portion 2. It has a blower fan that sends wind to the wind. Specifically, the blowing mechanism 3 has a flow velocity of wind passing through the fluid flow holes 21b and 22b within a range of 0.1 m / s or more and 30 m / s or less.

The explosion-proof mechanism 4 has the protective cover 41 arrange | positioned at the outer side of the pair of electrodes 21 and 22, as shown in FIG. 4, and combustible gas is supplied to the fluid distribution holes 21b and 22b. The flame generated by the plasma is introduced so as not to propagate beyond the protective cover 41. Specifically, the explosion-proof mechanism 4 has the metal mesh 411 whose protective cover 41 is arrange | positioned on the outer side of the pair of electrodes 21 and 22, and the wire diameter of the said metal mesh 411 is 1.5 mm. It is in the following ranges, and the opening ratio of the metal mesh 411 is 30% or more.

By the way, in this embodiment, as shown in FIG. 5, the coating film 23 of one layer is provided in the surface of the dielectric films 21a and 22a of each electrode 21 and 22. As shown in FIG.

The coating film 23 is water repellent and is any one or combination of glass, fluorocarbon resin, silicon, diamond-like carbon (DLC), fluorine-containing DLC, SiO ₂ , ZrO ₂ , TiO ₂ , SrO ₂ , and MgO. In addition, the coating film 23 is formed by a thin film forming method such as a vapor deposition method, a chemical vapor deposition (CVD) method, a sputtering method, an ion plating method, or a plating method, a spraying method, to form a film almost uniformly on the upper surfaces of the dielectric films 21a and 22a. It is formed by spray coating, spin coating, coating or the like.

Here, the relationship between the dew condensation cycle and the ion water density in the plasma generating apparatus 100 (the present invention) in which the coating film 23 was formed and the plasma generating apparatus (the conventional product) in which the coating film 23 was not formed is shown in FIG. Illustrated. As can be seen from FIG. 8, the ion water density gradually decreases from the second condensation cycle in the conventional product, but it can be seen that in the present invention, the ion water density does not decrease regardless of the condensation cycle.

In the electrodes 21 and 22 of the present embodiment, a gap of a predetermined distance is formed between the electrodes 21 and 22 by a spacer 24 made of an insulator material. As shown in FIG. 3, the spacers 24 are provided at various peripheral portions of the electrodes 21 and 22. In addition, the position of a spacer is not limited to FIG. 3, For example, you may install over the whole periphery and in arbitrary positions which do not block the fluid flow holes 21b, 22b, and the through hole 21c, such as the center part of an electrode. You may install it. As thickness of this spacer 24, it is desirable to set it as 500 micrometers or less. This is because if it is larger than 500 mu m, the voltage for generating the plasma becomes large and ozone is easily generated. The spacer 24 is any one or combination of fluororesin, epoxy, polyimide, alumina and glass. The spacers 24 of the present embodiment are formed by the thermal spraying method similarly to the dielectric films 21a and 22a. More specifically, a member serving as the spacer 24 is formed on the dielectric films 21a and 22a of each of the electrodes 21 and 22, for example, 250 mu m or less, and polymerized them, so as to be 500 mu m or less. The spacer 24 was made. The spacer 24 may be formed in the dielectric film 21a (dielectric film 22a) of the other electrode 21 (or the electrode 22).

The coating film 23 of this embodiment forms the dielectric films 21a and 22a by the thermal spraying method, and forms the member which becomes the spacer 24 on the dielectric films 21a and 22a by the thermal spraying method. After it is formed. As a result, the spacers 24 are also covered by the coating film 23, thereby preventing condensation and moisture from occurring on the spacers 24. The spacers 24 may be formed after the dielectric films 21a and 22a are formed to form the coating film 23.

By providing the spacer 24 as described above, the distance between the electrodes can be increased by the thickness of the spacer 24. As shown in FIG. 9, the deodorization reaction field is increased, and as the contact volume between air and plasma increases, the deodorization efficiency is improved. do. Here, the deodorization performance and the thickness dependency of the spacer 24 are shown in FIG. While the deodorization efficiency is 20% when the spacer 24 is not provided, the deodorization efficiency when the spacer 24 having a thickness of 10 μm is provided is 30%, 32% at 20 μm, and up to 35% at 50 μm. The efficiency is improved. Moreover, the deodorization efficiency of 100 micrometers is 30%, and the improvement of deodorization rate is remarkable from 10 micrometers to 100 micrometers. Moreover, while the thickness of the spacer 24 becomes larger than 100 micrometers, deodorization efficiency worsens but it is 20% or more to 500 micrometers. On the other hand, if the thickness of the spacer 24 exceeds 500 µm, the deodorizing efficiency is worse than that of the case where the spacer 24 is not provided, which is not preferable.

The plasma generating apparatus 100 configured as described above can be preferably used in the storage space of the refrigerator. As shown in Fig. 11, the inside of the storage space of the refrigerator is in a high humidity state during defrosting operation, and condensation easily occurs between the electrodes 21 and 22, or moisture is easily attached. In contrast, in the plasma generating apparatus 100 of the present embodiment, since the water-repellent coating film 23 is provided on the surfaces of the dielectric films 21a and 22a of the electrodes 21 and 22, condensation and moisture adhesion are not easily generated. Do not. Moreover, since the distance between the electrodes 21 and 22 was enlarged by the spacer 24, even if dew condensation generate | occur | produces, the dew condensation water easily escapes to the exterior between the electrodes 21 and 22.

<Effect of one embodiment>

According to the plasma generating apparatus 100 according to the embodiment of the present invention configured as described above, the amount of plasma generated in the corresponding fluid through-holes 21b and 22b can be increased as much as possible. The contact area with can be made as large as possible. As a result, the production amount of the active species called ions and radicals can be increased to sufficiently deodorize the active species and release the active species to the outside of the apparatus to sterilize floating bacteria and adherent bacteria. In addition, since the water-repellent coating film 23 is provided on the surfaces of the dielectric films 21a and 22a, condensation and moisture adhesion do not easily occur on the dielectric films 21a and 22a, so that sterilization performance is achieved even under high humidity in a refrigerator, for example. It can prevent deterioration and can exert sterilization performance for a long time.

<Other Embodiments>

12 is a perspective view showing another embodiment of the plasma generating apparatus of the present invention, and FIG. 13 is a cross-sectional view showing the electrode portion and the explosion-proof mechanism of another embodiment of the plasma generating apparatus of the present invention.

In the plasma generating apparatus 100 according to another embodiment of the present invention, most of the configurations have the same or similar configuration as those of the above embodiment, but as shown in FIG. While the heating element 6 is embedded, one layer of coating film 23 is provided on the surfaces of the dielectric films 21a and 22a of the electrodes 21 and 22.

Here, the overlapping description of the plasma electrode portion 2, the blowing mechanism 3, the explosion-proof mechanism 4, the power supply 5, and the coating film 23 having the same configuration as the above-described embodiment will be omitted.

The heating element 6 heats the electrodes 21, 22 and the dielectric films 21a, 22a by resistance heating as shown in FIGS. 14 and 15, and the fluid flow holes in the electrodes 21 It is arrange | positioned in the recessed part 21m formed in the part except 21b and the through hole 21c, and is arrange | positioned in the recessed part 22m formed in the part except the fluid flow hole 22b in the electrode 22. As shown in FIG. Moreover, the heat generating body 6 is accommodated in the state electrically insulated from the electrodes 21 and 22 by the insulator 7 in those recessed parts 21m and 22m. Specifically, the heating element 6 is made of any one or a combination of a heat generating resistor, a varistor element, an infrared LED, such as a Ni-Cr-based heating element, a molybdenum disulfide heating element, a silicon carbide heating element, and a graphite heating element. The heat generator 6 generates heat by being supplied with electric power from an external power source such as the power source 5. Moreover, the heat generation temperature of the heat generating body 6 was 150 degrees C or less.

The plasma generating apparatus 100 configured as described above can be preferably used in the storage space of the refrigerator. As shown in Fig. 11, the inside of the storage space of the refrigerator is in a high humidity state during defrosting operation, and condensation easily occurs between the electrodes 21 and 22, or moisture is easily attached. In contrast, the plasma generating apparatus 100 of the present embodiment heats the electrodes 21, 22, and the dielectric films 21 a, 22 a by providing the heating elements 6 in the electrodes 21, 22. Therefore, condensation and moisture adhesion do not easily occur and they can be dried even if condensation and moisture adhesion occur. In addition, the water-repellent coating film 23 is provided on the surfaces of the dielectric films 21a and 22a of the electrodes 21 and 22 and dried by increasing the distance between the electrodes 21 and 22 by the spacer 24. Can be further promoted to reduce degradation of sterilization performance and deodorization performance. The temperature of the heat generating element 6 can also be used in the optimal temperature setting by detecting the temperature and humidity in a refrigerator. Alternatively, it is also effective to adjust the temperature of the heating element 6 or control the on / off of the heating element 6 in conjunction with an operation of a compressor, a defrost heater, or the like in the refrigerator. In addition, the operation of the heating element 6 can also be controlled by detecting the operation state of the plasma generating apparatus 100. For example, when the applied voltage between the electrodes 21 and 22 is detected and the applied voltage tends to decrease, that is, when the plasma generation is weakened, the temperature of the heating element 6 may be increased.

<Effects of Other Embodiments>

According to the plasma generating apparatus 100 according to another embodiment of the present invention configured as described above, the amount of plasma generated in each of the corresponding fluid through-holes 21b and 22b can be increased as much as possible. The contact area with can be made as large as possible. As a result, the production amount of the active species called ions and radicals can be increased to sufficiently deodorize the active species and release the active species to the outside of the device to sterilize floating bacteria and adherent bacteria. By providing the heat generators 6 on the electrodes 21 and 22, condensation and moisture adhesion on the dielectric films 21a and 22a are less likely to occur, and condensation or damage to the dielectric films 21a and 22a is prevented. The attached water can be removed. For example, the sterilization performance can be exhibited for a long time by preventing the sterilization performance from being lowered even under high humidity in the refrigerator. Even if condensation occurs on the surfaces of the dielectric films 21a and 22a and the plasma generation is inhibited, the heat generating element 6 can be heated to dry the dielectric films 21a and 22a and the plasma generation can be resumed. have. In addition, by providing the heating elements 6 to the electrodes 21 and 22 to heat them directly, not only the heating time of the dielectric films 21a and 22a can be shortened, but also the heating energy can be saved. .

Moreover, according to another embodiment which concerns on this invention, it can also forcibly create a condensation state and can increase the deodorization efficiency. That is, the first condensation absorbs odor components (eg, odors soluble in water such as trimethylamine) in the condensed water, and coagulates them. Then, the electrodes 21 and 22 are heated to generate plasma at a high voltage. Can decompose bad smell components.

<Another Embodiment>

FIG. 16 is a perspective view showing still another embodiment of the plasma generating apparatus of the present invention, and FIG. 17 is a cross-sectional view showing the electrode portion and the explosion-proof mechanism of another embodiment of the plasma generating apparatus of the present invention.

In the plasma generating apparatus 100 according to still another embodiment of the present invention, although most of the configurations have the same or similar configuration as the above-described embodiment, the case 25 supports the pair of electrodes 21 and 22. 18 forms a substantially rectangular edge shape, and is configured to open a portion of the side opening 2M formed by the pair of electrodes 21 and 22 on the side wall along the longitudinal direction thereof. . 18 and 19, the explosion-proof mechanism 4 is not shown.

Here, the overlapping description of the plasma electrode portion 2, the blowing mechanism 3, the explosion-proof mechanism 4, the power supply 5, and the coating film 23 having the same configuration as the above-described embodiment will be omitted.

The protective cover 41, which is one of the components of the explosion-proof mechanism 4, may be detachably installed on the upper and lower surfaces of the case 25.

Moreover, the case 25 has the wall 251 so that it may oppose the side opening 2M opened as shown to FIG. 18 and FIG. 19, and this wall 251 is between the side opening 2M. The gas flow path 25x which has an entrance and exit up and down is formed.

Specifically, a through hole 25h penetrating from the upper surface to the lower surface is formed in a pair of left and right side walls along the longitudinal direction of the case 25, and the gas flow passage 25x is formed by the through hole 25h. . Moreover, the wall 251 which opposes the side opening 2M is comprised by the side wall of this through hole 25h. The through holes 25h are straight long holes extending along the longitudinal direction as shown in Fig. 18. In the present embodiment, two through holes 25h are formed along each of the side walls in the longitudinal direction. . The wind (gas flow) generated by the blower mechanism 3 flows into the gas flow passage 25x formed by the through hole 25h. As a result, the air flows through the open side opening 2M, thereby facilitating evaporation of the condensation water generated between the pair of electrodes 21 and 22. In addition, the shape and number of the through-hole 25h are not limited to the above, It can change suitably.

The plasma generating apparatus 100 configured as described above can be preferably used in the storage space of the refrigerator. As shown in Fig. 11, the inside of the storage space of the refrigerator is in a high humidity state during defrosting operation, and condensation easily occurs between the electrodes 21 and 22, or moisture is easily attached. On the contrary, in the plasma generating apparatus 100 of the present embodiment, since water-repellent coating films 23 are provided on the surfaces of the dielectric films 21a and 22a of the electrodes 21 and 22, condensation and moisture adhesion easily occur. I never do that. In addition, since the side opening 2M is opened at the pair of left and right sides of the pair of electrodes 21 and 22, even if condensation occurs, the condensation water can be evaporated, and the spacers 24 allow the electrodes 21, Since the distance between (22) is enlarged, the dew condensation water falls easily to the outside between the electrodes 21 and 22.

Next, in order to confirm the drying performance of the plasma generator of this embodiment comprised in this way, the plasma generator was attached to the refrigerator and the ionized water was measured. As an experimental example, the plasma generating apparatus (No. 1) without opening the side openings and providing the coating film and the spacer, and the plasma generating device (No. .2), the plasma generating apparatus (No. 3) which provided the coating film and a spacer without opening a side opening, and the plasma generating apparatus (No. 4) which opened the side opening and provided the coating film and a spacer by the through-hole mentioned above. Was prepared. The ion number measurement results of these Nos. 1 to 4 are shown in Table 1 below.

From the results of the experiment in Table 1, it was found that when the side openings of the pair of electrodes were not opened, even when the coating film and the spacer were provided, the decrease in the ionized water became remarkable as the number of operating days in the refrigerator increased. Example No.1, No.3). On the other hand, as in Experimental Example No. 2, it can be seen that the opening of the side opening can minimize the decrease in the initial ionized water due to condensation. In addition, as in Experiment No. 4, it is more effective to combine the coating film and the spacer to open the side opening, so that it can be used stably even in an environment in which humidity fluctuation such as a refrigerator is large and condensation easily occurs between a pair of electrodes. Able to know.

<Effect of Another Embodiment>

According to the plasma generating apparatus 100 which concerns on further another embodiment which concerns on this invention comprised in this way, the quantity of the plasma which generate | occur | produces in each corresponding fluid through hole 21b, 22b can be made as large as possible, and this plasma The contact area between and the fluid can be made as large as possible. As a result, the production amount of the active species called ions and radicals can be increased to sufficiently deodorize the active species and release the active species to the outside of the device to sterilize floating bacteria and adherent bacteria. In addition, since the case 25 opens at least a part of the side opening 2M formed by the pair of electrodes 21 and 22, the condensation water generated in the pair of electrodes 21 and 22 can be easily evaporated. The condensation water can be prevented from accumulating in the pair of electrodes 21 and 22. As a result, the drying performance of the dielectric films 21a and 22a can be improved, and the generation of active species can be stabilized by stabilizing the generation of plasma.

<Other Modified Embodiments>

In addition, the present invention is not limited to the above embodiments.

For example, in the above-described embodiment, the coating film is provided on the dielectric film of each electrode, but the effect is also obtained when provided on either dielectric film.

In addition, in the said other embodiment, as a site | part which provides a heat generating body, it is not limited to the inside of an electrode like the said embodiment, For example, as shown in FIG. 20, on the surfaces of the dielectric films 21a and 22a. You may comprise the spacer 24 provided with a heat generating body. In this case, since the structure of the spacer 24 and the structure of the heating element can be made common, the electrode configuration can be simplified, and the evaporation of moisture due to the heating can be promoted together with the heating of the electrodes 21 and 22. have.

In addition, as shown in FIG. 21, an insulator film 25 is formed on the stainless steel sheets constituting the electrodes 21 and 22, a heat generator 6 is formed on the insulator film 25, and the heat generator ( 6) Dielectric films 21a and 22a may be formed. That is, the heating element 6 may be provided between the electrodes 21 and 22 and the dielectric films 21a and 22a. In this case, electrode processing for installing the heating element 6 in the electrodes 21 and 22 is unnecessary.

In addition, the heat generating element may be provided on a part of the surface of the dielectric films 21a and 22a so that the plasma generation amount can be sufficiently secured.

In addition, as shown in FIG. 22, the heating element 6 is provided on the surface or inside of the casing (protective cover 41 in the above embodiment) which supports the pair of electrodes 21 and 22 of the plasma electrode part 2. The electrodes 21 and 22 and the dielectric films 21a and 22a may be heated. In this case, the device configuration can be made simpler than the configuration in which the heating elements 6 are provided on the electrodes 21 and 22 or the dielectric films 21a and 22a, and the manufacturing thereof can be simplified.

In addition, as shown in FIG. 23, the conductive film pattern P is formed on or inside the electrode to apply a high frequency voltage to the conductive film pattern P, thereby inducing and heating the electrodes 21 and 22 to form the dielectric film ( 21a) and 22a may be heated.

In addition, as shown in FIG. 24, in the heating operation, a pulse voltage larger than the pulse voltage applied to the pair of electrodes 21 and 22 in the normal operation is applied to the pair of electrodes 21 and 22. The plasma may be generated by heating and applied. In addition, in this case, since the amount of ozone is increased, it is necessary to install a catalyst for decomposing the generated ozone.

Moreover, in the case 25 of the said another embodiment, in addition to the gas flow path 25x which has an entrance and exit up and down, the through-hole 251a is provided in the wall 251 which opposes the side opening 2M as shown in FIG. May be formed to form a gas flow path. This makes it possible to send a lot of wind through the side opening 2M while preventing the propagation of the flame.

In the case 25 according to another embodiment, a gas flow passage 25x having an entrance and exit is formed up and down, and as shown in FIG. 26, the side surface of the case 25 is laterally corresponding to the side opening 2M on the side wall of the case 25. The opened gas flow path 25y may be formed. This can also blow wind into the side opening 2M, thereby improving the drying performance of the dielectric films 21a and 22a.

In addition, as shown in FIG. 27, the case 25 may be configured to support the front and rear ends of the pair of electrodes 21 and 22 and not support the left and right ends of the electrodes 21 and 22. . This makes it possible to open almost the entire side opening 2M on the left and right sides, and further improve the drying performance of the dielectric films 21a and 22a. In addition, the case 25 may support the four corner portions of the pair of electrodes 21 and 22 to open almost the entire side edge opening 2M on the left and right sides and the front and rear sides.

In addition, a heating element may be provided inside the case or the pair of electrodes. As a result, in addition to the effect of opening the side opening to promote evaporation of the condensation water, the evaporation of the condensation water can be further promoted by the heating effect of the heating element, and the dielectric film can be dried in a shorter time. Particularly, in the case of electronic products such as refrigerators, interlocking with a sensor such as a humidity sensor or a temperature sensor enables the heating element to be efficiently operated with minimum energy.

In the above embodiments, the plurality of fluid flow holes 21b of the electrode 21 have the same shape, and the plurality of fluid flow holes 22b of the electrode 22 have the same shape, but each has a different shape. It may be achieved.

In the above embodiments, all the fluid flow holes 21b of the electrode 21 are formed smaller or larger than the plurality of fluid flow holes 22b of the electrode 22. 21b may be formed smaller than the fluid flow hole 22b of the electrode 22, and the other fluid flow hole 21b may be formed larger than the fluid flow hole 22b of the electrode 22.

In the above embodiments, a through hole is formed in either one of the electrodes 21 or the other electrode 22, and both may be provided with through holes (half openings).

In addition, in the above embodiments, the fluid flow holes have the same cross-sectional shape, but the fluid flow holes formed in the respective electrodes have tapered surfaces, mortar or rice ball, that is, from one opening to the other opening. It may be reduced or enlarged.

In addition, the fluid flow holes may be oval, rectangular, straight slit, concentric slit, corrugated slit, crescent, comb, honeycomb, or star in addition to circular.

Others The present invention is not limited to the above embodiments, and needless to say that various modifications can be made without departing from the spirit thereof.

100... Plasma generator
2… Plasma electrode
21 ... One electrode
22... The other electrode
21a, 22a... Dielectric film
21b, 22b... Fluid distribution hole
23 ... Coating film
24 ... Spacer
25... case
3 ... Blower
6 ... Heating element

Claims (57)

A plasma generating device having a pair of electrodes provided with a dielectric film on at least one of the opposing surfaces, and having a predetermined voltage applied therebetween for plasma discharge, wherein a coating film is provided on the surface of the dielectric film. The plasma generating apparatus according to claim 1, wherein the dielectric film is formed by a thermal spraying method. The plasma generating device of claim 1, wherein the coating film is water repellent. The plasma generating apparatus of claim 1, wherein the coating film has a thickness of 0.01 μm or more and 100 μm or less. The plasma generating device of claim 1, wherein the plasma generating device has a spacer having a thickness of 500 μm or less between the pair of electrodes. The plasma generating device according to claim 5, wherein the spacer is formed by a thermal spraying method. The plasma generating device according to claim 5, wherein the coating film is provided on a surface of the spacer. The plasma generating apparatus according to any one of claims 1 to 7, wherein a heating element is provided in the electrode or the dielectric film. The plasma generating device according to claim 8, wherein the heating element is provided inside the electrode. The plasma generator according to claim 8, wherein the heating element is provided between the electrode and the dielectric film. The plasma generating device according to claim 8, wherein the heating element is provided inside the dielectric film. The plasma generating device according to claim 8, wherein the heating element is provided on a part of the surface of the dielectric film. The plasma generating apparatus of claim 8, wherein an exothermic temperature of the heating element is 150 ° C. or less. The plasma generating apparatus according to any one of claims 1 to 7, wherein a casing for supporting the pair of electrodes is provided, and a heating element for heating the electrode or the dielectric film is provided in the casing. 15. The plasma generating apparatus of claim 14, wherein an exothermic temperature of the heating element is 150 ° C or less. The case according to any one of claims 1 to 7, wherein each of the electrodes is provided with a case for supporting the pair of electrodes while providing a fluid flow hole in each of the corresponding portions to penetrate them.
And the case opens at least a part of side openings formed by the pair of electrodes. The plasma generation apparatus according to claim 16, wherein the case has a wall facing the open side opening, and forms a gas flow path between the side opening and the wall. The plasma generating apparatus according to claim 17, wherein a through hole communicating with the side opening is formed in a side wall of the case, and the gas flow path is formed by the through hole. 17. The plasma generating apparatus according to claim 16, wherein a blow mechanism is provided at a front end or a rear end of the pair of electrodes to send air to the open side opening. A plasma generating device comprising: a pair of electrodes provided with a dielectric film on at least one of the opposing surfaces, and a plasma discharged by applying a predetermined voltage between the electrodes, wherein a heating element is provided in the electrode or the dielectric film. 21. The plasma generator as set forth in claim 20, wherein said heating element is provided inside said electrode. 21. The plasma generator as set forth in claim 20, wherein said heating element is provided between said electrode and said dielectric film. 21. The plasma generator as set forth in claim 20, wherein said heating element is provided inside said dielectric film. 21. The plasma generator as set forth in claim 20, wherein said heating element is provided on a portion of a surface of said dielectric film. A pair of electrodes having a dielectric film provided on at least one of the opposing surfaces, and a plasma discharged by applying a predetermined voltage between the electrodes, wherein the casing supporting the pair of electrodes is heated to heat the electrode or the dielectric film to the casing. Plasma generator that is provided with a heating element. 26. The plasma generating device according to claim 20 or 25, wherein an exothermic temperature of the heating element is 150 ° C or less. 26. The plasma generating device according to claim 20 or 25, wherein a coating film is provided on the surface of said dielectric film. 28. The plasma generating device of claim 27, wherein the coating film has water repellency. 28. The plasma generating device of claim 27, wherein the coating film has a thickness of 0.01 µm or more and 100 µm or less. 26. The plasma generating device according to claim 20 or 25, having a spacer having a thickness of 500 mu m or less between the pair of electrodes. A pair of electrodes having a dielectric film provided on at least one of the opposing surfaces, and a plasma discharged by applying a predetermined voltage between the electrodes; A case for supporting the pair of electrodes,
And the case opens at least a part of side openings formed by the pair of electrodes. 32. The plasma generating apparatus of claim 31, wherein the case has a wall facing the open side opening, and forms a gas flow path between the side opening and the wall. 33. The plasma generating apparatus according to claim 32, wherein a through hole communicating with the side opening is formed in a side wall portion of the case, and the gas flow path is formed by the through hole. 32. The plasma generating apparatus according to claim 31, wherein a blow mechanism is provided at a front end or a rear end of the pair of electrodes to send air to the open side opening. 32. The plasma generating device according to claim 31, wherein the dielectric film is formed by a thermal spraying method. 32. The plasma generating device according to claim 31, wherein a coating film is provided on the surface of said dielectric film. 37. The plasma generating device of claim 36, wherein the coating film has water repellency. 37. The plasma generating device of claim 36, wherein the coating film has a thickness of 0.01 µm or more and 100 µm or less. 32. The plasma generating device of claim 31, wherein the plasma generating device has a spacer having a thickness of 500 m or less between the pair of electrodes. A plasma generating apparatus according to claim 39, wherein said spacer is formed by thermal spraying. 40. The plasma generating device of claim 39, wherein a coating film is provided on a surface of the spacer. A plasma generation method using a pair of electrodes provided with a dielectric film on at least one of the opposing surfaces and performing plasma discharge by applying a predetermined voltage between the electrodes, wherein the coating film is provided on the surface of the dielectric film. 43. The plasma generating method according to claim 42, wherein the dielectric film is formed by a thermal spraying method. 43. The method of claim 42, wherein said coating film is water repellent. 43. The plasma generating method according to claim 42, wherein the coating film has a thickness of 0.01 µm or more and 100 µm or less. 43. The plasma generating method according to claim 42, wherein a heating element is provided on the electrode or the dielectric film to heat the electrode or the dielectric film. 43. The plasma generating method according to claim 42, wherein a casing for supporting the pair of electrodes is provided, and a heating element for heating the electrode or the dielectric film is provided in the casing. 43. The method of claim 42, wherein the electrode is inductively heated by forming a conductor film pattern on the electrode and applying a high frequency voltage to the conductor film pattern. 43. The plasma generating method according to claim 42, wherein plasma is generated and heated by applying a voltage greater than an applied voltage applied to the pair of electrodes during normal operation to the pair of electrodes. 43. The apparatus of claim 42, further comprising: a case for supporting the pair of electrodes, each of which has a fluid flow hole formed in a corresponding portion thereof so as to penetrate them, and at least one side opening formed by the pair of electrodes. Plasma generation method which opens a part. 51. The plasma generating method according to claim 50, wherein a blow mechanism is provided at a front end or a rear end of the pair of electrodes to send air to the open side opening. A pair of electrodes having a dielectric film provided on at least one of the opposing surfaces, and a plasma discharged by applying a predetermined voltage between the electrodes, wherein a heating element is provided to the electrode or the dielectric film to heat the electrode or the dielectric film. Plasma generating method. A pair of electrodes provided with a dielectric film on at least one of the opposing surfaces, and a casing supporting the pair of electrodes, wherein a predetermined voltage is applied between the electrodes to cause plasma discharge, thereby generating a heating element for heating the electrode or the dielectric film to the casing. Plasma generating method characterized in that the installation. A pair of electrodes having a dielectric film provided on at least one of the opposing surfaces, and a plasma discharged by applying a predetermined voltage between the electrodes, by forming a conductor film pattern on the electrode and applying a high frequency voltage to the conductor film pattern Induction heating, characterized in that the plasma generating method. The pair of electrodes having a pair of electrodes provided with a dielectric film on at least one of the opposing surfaces, and having a predetermined voltage applied therebetween to discharge the plasma, and having a voltage larger than an applied voltage applied to the pair of electrodes during normal operation. Plasma generation method characterized in that the plasma is generated by heating to apply. A pair of electrodes provided with a dielectric film on at least one of the opposing surfaces, and a case for supporting the pair of electrodes, and a plasma discharged by applying a predetermined voltage between the electrodes, each having a fluid flow hole in a corresponding portion. And a plasma generating method, configured to penetrate through them and simultaneously open at least a part of the side openings formed by the pair of electrodes. 59. The plasma generating method according to claim 56, wherein a blow mechanism is provided at a front end or a rear end of the pair of electrodes to send air to the open side opening.

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