KR101954850B1 - Plasma generating system and plasma generating method - Google Patents

Abstract

Thereby increasing the amount of active species generated and preventing moisture and moisture from adhering to the dielectric film. A coating film is provided on a surface of the dielectric film, having a pair of electrodes provided with a dielectric film on at least one side of the opposing face, and applying a predetermined voltage between the electrodes to perform plasma discharge.

Description

TECHNICAL FIELD [0001] The present invention relates to a plasma generating apparatus and a plasma generating method,

The present invention relates to a plasma generating apparatus and a plasma generating method.

Recently, there has been an increasing demand for control of air quality in living environments such as sterilization and deodorization due to an increase in risk of infectious diseases such as an increase in atopy, asthma, allergic symptoms, or an explosive epidemic of a new influenza virus. As the life becomes more abundant, the chances of increasing the amount of stored food and storing the leftover food are increasing, and the environmental control in the storage device represented by the refrigerator is also becoming more important.

In the prior art aiming at air quality control in the living environment, physical control represented by a filter is generally used. Physical control can also capture bacteria and viruses, depending on the size of relatively large dust and dirt floating in the air, and the size of the filter hole. If there are innumerable adsorption sites such as activated carbon, odorous odor molecules can be captured. However, in order to trap the air, it is necessary to pass the air in the space of the control object to all the filters, and there is a problem that the size of the device becomes large and the maintenance cost such as the filter exchange increases. Thus, as means for enabling sterilization or deodorization of the deposit, it is possible to release the chemically active species into a space to be sterilized or deodorized. Regular replenishment is essential as it requires preparation of active species before spraying of medicines, perfume and deodorant. In recent years, a means for generating a plasma in the atmosphere and attempting sterilization or deodorization using the chemically active species generated there has been increasing in recent years.

Techniques for generating plasma by discharging in the atmosphere and sterilizing or deodorizing by ions or radicals (hereinafter, active species) generated therefrom can be classified into the following two types.

(1) a so-called passive plasma generating apparatus in which bacteria or virus floating in the atmosphere (hereinafter referred to as "floating bacteria") or a malodorous substance (hereinafter referred to as a malodor) are reacted with active species within a limited volume of the apparatus One)

(2) The active species generated in the plasma generating unit are released into a closed space (for example, in a car of a living room, a toilet, or a passenger car) having a volume larger than (1) A so-called active plasma generating apparatus (for example, Patent Document 2)

An advantage of the passive plasma generating apparatus of the first embodiment is that a high concentration of active species is generated by generating a plasma in a small area, so that a high sterilizing effect and a deodorizing effect are expected. On the other hand, as a drawback, since it is necessary to introduce airborne bacteria or odor into the apparatus, it is necessary to introduce a filter which adsorbs or decomposes in order to make the apparatus larger and to easily generate ozone as a by- It needs to be installed.

Next, the advantage of the active plasma generating apparatus of (2) is that the apparatus can be made relatively small, and the bacteria adhering to the surface of clothes or household goods (hereinafter referred to as adherent bacteria) as well as sterilization of airborne bacteria, And decomposition of odor adsorbed on the surface can be expected. On the other hand, the disadvantage is that since the concentration is lowered in the closed space which is excessively larger than the volume of the active paper apparatus, the sterilizing or deodorizing effect can be expected only in the active species having a long lifetime. As a result, the deodorizing effect can hardly be expected in a space having a high odor concentration (a concentration about 10,000 times higher than the concentration of active species).

Thus, in the passive type plasma generating apparatus, the effect is limited only to the airborne bacteria and odor contained in the airflow flowing into the apparatus, and in the active plasma generating apparatus, the effect on the floating airborne bacteria, none. That is, what can be realized by using the conventional technique is limited to any one of "disinfection and deodorization of floating bacteria" or "deodorization of airborne microorganisms, adherent bacteria, and attached odors".

Further, in the electrode constituting the plasma generating section, for example, a porous dielectric film is often used at the plasma generation site of the electrode. Therefore, under high humidity, the electrical characteristics are changed due to the moisture absorption function of the dielectric film itself, thereby inhibiting the generation of plasma. Particularly, in an environment where the humidity is largely changed at a low temperature like a refrigerator, the dielectric film itself of the electrode tends to become dewy, so plasma generation stops, and sterilization and deodorization performance are lowered. Therefore, it is difficult to maintain the sterilizing performance if the inside of the refrigerator continues to be in a high humidity condition.

Prior art literature

Patent Document 1: JP-A-2002-224211

Patent Document 2: JP-A-2003-79714

Therefore, the present invention is a technique for realizing both sterilization and deodorization of adherent bacteria at the same time, and is a passive function for generating plasma and deodorizing by active species, and an active function 2 for sterilizing adherent bacteria by discharging the active species out of the device It is a principal task to increase the amount of active species generated and to prevent condensation or moisture from adhering to the dielectric film.

Another object of the present invention is to stabilize the generation of plasma by improving the drying performance of the dielectric film, thereby stabilizing the amount of active species produced.

In one embodiment of the present invention, a plasma generating apparatus has a pair of electrodes provided with a dielectric film on at least one side of an opposing surface, and a predetermined voltage is applied between the electrodes to perform plasma discharge. A coating film is provided on the surface of the dielectric film .

If this is the case, since a coating film is provided on the surface of the dielectric film, condensation and moisture adherence do not occur in the dielectric film. For example, sterilization performance can be prevented from lowering even under high humidity in the refrigerator. In addition, by providing the fluid flow holes in the corresponding portions of the respective electrodes so as to allow them to pass through, the amount of plasma generated in each corresponding fluid through hole can be increased as much as possible and the contact area of the plasma and the fluid Can be greatly increased. As a result, the amount of active species such as ions and radicals can be increased, so that the active species can be deodorized and the active species can be released to the outside of the apparatus to sterilize airborne and adherent bacteria. The corresponding portions in the present specification mean that the respective fluid flow holes formed in both electrodes viewed from the face plate direction of the electrode are substantially at the same position. When a pair of electrodes of xy plane type in the z-axis direction in the orthogonal coordinate system are viewed (X, y) coordinate position on both electrodes.

In the case where the dielectric film is formed by the spraying method, since the formed dielectric film has a porous or fine concavo-convex structure, it is easily affected by humidity, so that the effect of providing a coating film as in the present invention becomes more remarkable.

In order to further prevent condensation and water adhesion at the plasma generation site, it is preferable that the coating film is water repellent.

The thickness of the coating film is preferably 0.01 m or more and 100 m or less. If the thickness of the coating film is 100 mu m or more, the physical properties of the dielectric film itself are impaired, and the irregularities formed on the surface of the dielectric film are buried, thereby deteriorating the plasma generating effect.

And a spacer having a thickness of 500 mu m or less is preferably provided between the pair of electrodes. By doing so, the distance between the electrodes can be increased, and the deodorization reaction field can be increased, so that the deodorization efficiency of the odor can be improved. In addition, since the distance between the electrodes is increased by the spacers, even if water adhesion occurs, fine droplets can easily be taken out from the electrodes to the outside. Here, examples of the method for forming the spacer include a thin film forming method such as a vapor deposition method, a CVD (Chemical Vapor Deposition), a sputtering method, and an ion plating method, or a plating method, a spraying method, a spray coating method, a spin coating method and a coating method.

In order to prevent condensation and moisture adhesion in the spacer, it is preferable that a coating film is provided on the surface of the spacer.

It is preferable to have a blowing mechanism for forcibly blowing the fluid toward the fluid flow hole in order to facilitate the generation of the active species by allowing the fluid to pass efficiently through the fluid flow hole and to increase the deodorizing effect.

Here, it is preferable that the flow velocity of the wind passing through the fluid flow hole by the blowing mechanism is within a range of 0.1 m / s to 30 m / s.

In order to increase the number of active species contained in the fluid passing through the fluid through hole as much as possible and to suppress the concentration of ozone generated, the voltage to be applied to each electrode is set to a pulse shape and its peak value is set to 100V or more and 5000V or less And the pulse width is preferably within a range of 0.1 占 퐏 ec to 300 占 퐏 ec.

According to another embodiment of the present invention, there is provided a plasma generating apparatus comprising a pair of electrodes provided with a dielectric film on at least one side of an opposing surface, and a predetermined voltage is applied between the electrodes to perform plasma discharge, Is provided with a heating element.

If this is the case, since a heating element is provided in the electrode or the dielectric film, condensation and moisture adherence do not occur in the electrode or the dielectric film, and moisture condensed or attached to the electrode or the dielectric film can be removed. It is possible to prevent the sterilizing performance from being lowered even under high humidity in the refrigerator, for example, and to exhibit the sterilizing performance for a long time. Even if condensation occurs on the surface of the dielectric film and the plasma generation is inhibited, the dielectric film can be dried by heating the heating element, so that plasma generation can be resumed. In addition, by providing a heating element in an electrode or a dielectric film, the heating time of the electrode or the dielectric film can be shortened because energy is directly heated, and energy can be saved more than radiation or indirect heating. In addition, since the electrode or the dielectric film is heated by the heating element, it is possible to supply the reaction heat of the deodorization reaction of the odor component, thereby promoting the deodorization reaction. In addition, by providing the fluid flow holes in the corresponding portions of the respective electrodes so as to penetrate them, the amount of plasma generated in each corresponding fluid through hole can be increased as much as possible, and the contact area between the plasma and the fluid is made as large as possible . As a result, the amount of active species such as ions and radicals can be increased, so that the active species can be deodorized and the active species can be released to the outside of the apparatus to sterilize airborne and adherent bacteria.

As a specific embodiment in which a heating element is provided in the plasma electrode portion, a heating element is provided inside the electrode, a heating element is provided between the electrode and the dielectric film, a heating element is provided inside the dielectric film And providing a heating element on a part of the surface of the dielectric film.

A plasma generating apparatus according to the present invention has a pair of electrodes provided with a dielectric film on at least one side of an opposing surface and a predetermined voltage is applied between the electrodes to perform plasma discharge and has a casing for supporting the pair of electrodes, And a heating element for heating the electrode or the dielectric film is provided in the casing.

If this is the case, by providing a heating element in the casing and heating the electrode and the dielectric film, condensation and adhesion of moisture to the dielectric film are prevented from occurring, and condensation or moisture adhering to the dielectric film can be removed.

It is preferable that the heating temperature of the heating element is 150 DEG C or less from the heat resistance temperature of the member or the dielectric film provided outside.

It is preferable that a coating film is provided on the surface of the dielectric film in order to prevent condensation and adhesion of water at the plasma generation site and to easily evaporate condensation or moisture to prevent deterioration of sterilizing performance and deodorization performance. At this time, it is particularly preferable that the coating film is water repellent (hydrophobic). In addition, by using the hydrophobic coating film, it is possible to easily adsorb the malodorous component having hydrophobicity to the membrane, thereby improving the deodorization efficiency.

The thickness of the coating film is preferably 0.01 m or more and 100 m or less. If the thickness of the coating film is 100 mu m or more, the physical properties of the dielectric film itself are impaired, the irregularities formed on the surface of the dielectric film are buried, and the plasma generating effect is lowered.

And a spacer having a thickness of 500 mu m or less is preferably provided between the pair of electrodes. By doing so, the distance between the electrodes can be increased, and the deodorization reaction field can be increased, so that the deodorization efficiency of the odor can be improved. In addition, since the distance between the electrodes is increased by the spacers, even if water adhesion occurs, fine droplets can easily be taken out from the electrodes to the outside. Here, examples of the method for forming the spacer include a thin film forming method such as a vapor deposition method, a CVD (Chemical Vapor Deposition), a sputtering method, and an ion plating method, or a plating method, a spraying method, a spray coating method, a spin coating method and a coating method.

It is preferable to have a blowing mechanism for forcibly blowing the fluid toward the fluid flow hole in order to facilitate the generation of the active species by allowing the fluid to pass efficiently through the fluid flow hole and to increase the deodorizing effect. It may also promote the evaporation of condensation or adhering moisture by forcing the wind.

In order to increase the number of active species contained in the fluid passing through the fluid through hole as much as possible and to suppress the concentration of ozone generated, the voltage to be applied to each electrode is set to a pulse shape and its peak value is set to 100V or more and 5000V or less And the pulse width is preferably within a range of 0.1 占 퐏 ec to 300 占 퐏 ec.

According to another embodiment of the present invention, there is provided a plasma generating apparatus comprising a pair of electrodes provided with a dielectric film on at least one side of an opposing surface, and a predetermined voltage is applied between the electrodes to perform plasma discharge, And a case for supporting the pair of electrodes, characterized in that the case opens at least a part of a side opening formed by the pair of electrodes .

In this case, since the case opens at least a part of the side openings formed by the pair of electrodes, the condensation water generated in the pair of electrodes can be easily evaporated, and condensation water can be prevented from accumulating in the pair of electrodes. This can improve the drying performance of the dielectric film and stabilize the generation of plasma to stabilize the amount of active species produced.

When the side openings are closed by covering the entire side openings of the pair of electrodes with the case, the dielectric film in the vicinity of the fluid communication holes in the condensed water generated in the pair of electrodes can be dried. However, The drying performance is remarkably poor. By opening the side openings of the electrode, the dielectric film in the vicinity of the fluid flow hole as well as the dielectric film in the other part can be dried.

In addition, by providing the fluid flow holes in the portions corresponding to the respective electrodes so as to pass through them, the amount of plasma generated in each corresponding fluid through hole can be increased as much as possible, and the contact area between the plasma and the fluid It can be as large as possible. As a result, the amount of active species such as ions and radicals can be increased, so that the active species can be deodorized and the active species can be released to the outside of the apparatus to sterilize airborne and adherent bacteria.

It is preferable that the case has a wall opposed to the open side opening so that the gas flow path is formed between the side open side and the wall so as to allow moisture to easily fall through the open side side opening, Or the like. Further, by providing a wall facing the side opening, it is possible to prevent the flame generated by the plasma in the vicinity of the side opening from being propagated to the outside.

In order to construct the gas flow path with a simple structure, it is preferable that a through-hole communicating with the side-face opening is formed in a side wall portion of the case, and the gas flow path is formed by the through-

It is preferable that a blowing mechanism is provided at a front end or a rear end of the pair of electrodes and the wind is sent to the opened side openings. By doing so, it is possible to efficiently send the air through the open side opening, thereby allowing moisture to easily escape from the side opening and further improve the drying performance of the dielectric film. Moreover, the fluid can efficiently flow through the fluid flow hole by the blowing mechanism, thereby promoting the generation of active species and increasing the deodorizing effect. For example, in the case of an electronic product such as a refrigerator, if it is interlocked with a sensor such as a humidity sensor or a temperature sensor, the blower can be operated efficiently with a minimum energy. In addition, since the condensation state can be detected by the decrease of the applied voltage, it is also effective to adjust the blowing amount.

Here, it is preferable that the flow velocity of the wind passing through the fluid flow hole by the blowing mechanism is within a range of 0.1 m / s to 30 m / s.

In the case where the dielectric film is formed by the spraying method, fine irregularities are formed on the surface thereof, and the drying performance is remarkably lowered by opposing them. However, by lowering the side openings as in the present invention, deterioration of the drying performance can be prevented.

It is preferable that a coating film is provided on the surface of the dielectric film in order to prevent condensation and moisture adhesion at the plasma generation site and to easily evaporate condensation or moisture to prevent the sterilization performance and the deodorization performance from deteriorating. At this time, it is particularly preferable that the coating film is water repellent (hydrophobic). In addition, by using the hydrophobic coating film, it is possible to easily adsorb the malodorous component having hydrophobicity to the membrane, thereby improving the deodorization efficiency.

The thickness of the coating film is preferably 0.01 m or more and 100 m or less. If the thickness of the coating film is 100 mu m or more, the physical properties of the dielectric film itself are impaired, the irregularities formed on the surface of the dielectric film are buried, and the plasma generating effect is lowered.

And a spacer having a thickness of 500 mu m or less is preferably provided between the pair of electrodes. By doing so, the distance between the electrodes can be increased, and the deodorization reaction field can be increased, so that the deodorization efficiency of the odor can be improved. In addition, since the distance between the electrodes is increased by the spacers, even if water adhesion occurs, fine droplets can easily be taken out from the electrodes to the outside. Here, examples of the method for forming the spacer include a thin film forming method such as a vapor deposition method, a CVD (Chemical Vapor Deposition), a sputtering method, and an ion plating method, or a plating method, a spraying method, a spray coating method, a spin coating method and a coating method.

In order to increase the number of active species contained in the fluid passing through the fluid through hole as much as possible and to suppress the concentration of ozone generated, the voltage to be applied to each electrode is set to a pulse shape and its peak value is set to 100V or more and 5000V or less And the pulse width is preferably within a range of 0.1 占 퐏 ec to 300 占 퐏 ec.

A plasma generating method according to the present invention is characterized in that a pair of electrodes provided with a dielectric film on at least one of opposite surfaces is used and a coating film is provided on the surface of the dielectric film by applying a predetermined voltage between the electrodes and performing plasma discharge .

According to the present invention, by increasing the amount of active species produced, it is possible to realize both sterilization and deodorization of adherent bacteria at the same time, and prevent condensation and water adhesion from occurring in the dielectric film and prevent deterioration of sterilization performance over a long period of time .

According to the present invention, both the sterilization and deodorization of the adherent bacteria can be realized simultaneously by increasing the amount of active species produced, and at the same time, condensation or moisture adhering to the dielectric film can be removed, thereby preventing the deterioration of the sterilizing performance over a long period of time .

In addition, according to the present invention, both the sterilizing and deodorization of the adherent bacteria can be realized simultaneously by increasing the amount of active species produced, and the generation of plasma can be stabilized by stabilizing the generation of active species by improving the drying performance of the dielectric film.

1 is a perspective view showing an embodiment of a plasma generating apparatus of the present invention.
2 is a schematic diagram showing the operation of the plasma generating apparatus.
3 is a plan view showing the electrode unit.
4 is a cross-sectional view showing an electrode portion and an explosion-proof mechanism.
5 is an enlarged cross-sectional view showing the configuration of the opposing surface of the electrode portion.
6 is a partially enlarged plan view and a cross-sectional view schematically showing the fluid flow hole and the through hole.
7 is a graph showing the dependence of the ion water density and the ozone concentration on the pulse width.
8 is a diagram showing the relationship between condensation cycles and ionized water density of the conventional product and the present invention.
Fig. 9 is a conceptual diagram showing the difference in deodorizing effect due to the magnitude of the distance between electrodes.
10 is a view showing the dependency of the spacer thickness on the deodorizing performance.
11 is an example of change in temperature and humidity in the refrigerator.
12 is a perspective view showing another embodiment of the plasma generating apparatus of the present invention.
13 is a cross-sectional view showing an electrode unit and an explosion-proofing mechanism of another embodiment of the plasma generating apparatus of the present invention.
Fig. 14 is an enlarged cross-sectional view showing the configuration of the opposing surface of the electrode portion of another embodiment of the plasma generating device of the present invention. Fig.
15 is a plan view showing an example of a heating element formation pattern.
16 is a perspective view showing still another embodiment of the plasma generating apparatus of the present invention.
17 is a cross-sectional view showing an electrode portion and an explosion-proofing mechanism of still another embodiment of the plasma generating device of the present invention.
18 is a plan view of a plasma electrode portion according to still another embodiment of the plasma generating device of the present invention.
19 is an enlarged cross-sectional view mainly showing the configuration of a case of another embodiment of the plasma generating apparatus of the present invention.
20 is a cross-sectional view schematically showing a configuration of an electrode portion of a modified embodiment of another embodiment of the plasma generating device of the present invention.
21 is a cross-sectional view schematically showing the configuration of an electrode portion of a modified embodiment of another embodiment of the plasma generating device of the present invention.
Fig. 22 is a perspective view schematically showing a configuration of an electrode portion of a modified embodiment of another embodiment of the plasma generating device of the present invention. Fig.
23 is a plan view schematically showing a conductor pattern of a modified embodiment of another embodiment of the plasma generating apparatus of the present invention.
24 is a view showing a voltage application pattern of a modified embodiment of another embodiment of the plasma generating apparatus of the present invention.
25 is an enlarged cross-sectional view mainly showing a configuration of a case in a modified embodiment of another embodiment of the plasma generating apparatus of the present invention.
26 is an enlarged cross-sectional view mainly showing a configuration of a case in a modified embodiment of another embodiment of the plasma generating apparatus of the present invention.
27 is a plan view of a plasma electrode portion in a modified embodiment of another embodiment of the plasma generating device of the present invention.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

<Embodiment>

The plasma generating apparatus 100 according to an embodiment of the present invention is used in household electric appliances such as a refrigerator, a washing machine, a clothes dryer, a vacuum cleaner, an air conditioner or an air purifier, And sterilizing airborne bacteria or adherent bacteria inside or outside the products.

Specifically, this is accomplished by forming a plasma electrode part 2 for generating active species such as ions and radicals by micro gap plasma as shown in FIGS. 1 and 2, (3) installed on the plasma electrode part (2) for forcibly sending wind (air flow) to the plasma electrode part (2) And an electric power source 5 for applying a high voltage to the electrode portion.

Hereinafter, each of the units (2) to (5) will be described with reference to the respective drawings.

The plasma electrode portion 2 has a pair of electrodes 21 and 22 provided with dielectric films 21a and 22a on the opposing surfaces as shown in Figs. And 22 is applied with a predetermined voltage to perform plasma discharge. Each of the electrodes 21 and 22 has a substantially rectangular shape when viewed in a plan view (as viewed in a planar direction of the electrodes 21 and 22) as shown in FIG. 3, SUS403 stainless steel. An application terminal 2T to which a voltage from the power source 5 is applied is formed at the edges of the electrodes 21 and 22 of the electrode unit 2 (see FIG. 3).

The method of applying the voltage to the plasma electrode portion 2 by the power source 5 is such that the voltage to be applied to each of the electrodes 21 and 22 is a pulse shape and its peak value is within a range of 100 V to 5000 V, And the pulse width was set within a range of 0.1 초 to 300 초 sec. As shown in FIG. 7, the ion water density is measured when the pulse width is 300 μseconds or less, and the ion water increases and the ozone concentration decreases as the ozone concentration decreases and the pulse width decreases. As a result, the amount of generated ozone can be suppressed, and the active species generated in the plasma can be efficiently discharged to a filter or the like frequently appearing in the prior art. As a result, sterilization of the attached bacteria can be realized in a short time.

5, dielectric films 21a and 22a are formed by applying a dielectric material such as barium titanate to the opposing surfaces of the electrodes 21 and 22, for example. The surface roughness (calculated average roughness Ra in this embodiment) of the dielectric films 21a and 22a is 0.1 占 퐉 or more and 100 占 퐉 or less. As the other surface roughness, the maximum height Ry and the 10-point average roughness Rz may be used. It is also conceivable that the surface roughness of the dielectric films 21a and 22a is controlled by a thermal spraying method. Examples of the dielectric substance to be applied to the electrode include aluminum oxide, titanium oxide, magnesium oxide, strontium titanate, silicon oxide, phosphoric acid silver, lead zirconate titanate, silicon carbide, indium oxide, cadmium oxide, bismuth oxide, A tube or the like may be used.

In addition, as shown in Figs. 3, 4, and 6, the fluid communication holes 21b and 22b are provided in the corresponding portions of the electrodes 21 and 22, respectively, At the same time, at least a part of the contours of the corresponding fluid through holes 21b, 22b are arranged at different positions when viewed from the face plate direction of the electrodes 21, 22 (in a plan view). That is, the shape of the fluid flow hole 21b formed in the one electrode 21 is different from the shape of the fluid flow hole 22b formed in the other electrode 22 in the plan view.

More specifically, the fluid flow holes 21b and 22b formed in the corresponding portions of the electrodes 21 and 22 are substantially circular in plan view (see FIGS. 3 and 6) The opening size (opening diameter) of the fluid communication hole 21b formed in the electrode 21 is smaller than the opening size (opening diameter) of the fluid communication hole 22b formed in the other electrode 22 10 mu m or smaller).

Likewise, as shown in Figs. 3 and 6, the fluid flow holes 21b formed in the one electrode 21 and the fluid flow holes 22b formed in the other electrode 22 are concentrically formed. In the present embodiment, the plurality of fluid communication holes 21b formed in the one electrode 21 have the same shape and the plurality of fluid communication holes 22b formed in the other electrode 22 have the same shape, All the fluid flow holes 21b formed in the one electrode 21 are formed to be smaller than the fluid flow holes 22b formed in the other electrode 22. [ In this embodiment, the effect is shown as a substantially circular shape. However, the opening may have any shape as well as a circular shape, and at least a part of the outline of each fluid through-hole corresponding to the flat state may be configured to be at a different position.

The total area of openings of the fluid flow holes 21b and 22b formed in each of the electrodes 21 and 22 is in the range of 2% to 90% of the total area of the respective electrodes 21 and 22 . Specifically, the total area of the openings of the fluid flow holes 22b formed in the other electrode 22 is set within a range of 2% or more and 90% or less with respect to the total area of the electrodes 22. The total area of the opening of the fluid communication hole 21b formed in the one electrode 21 may be within a range of 2% or more and 90% or less.

The plasma electrode portion 2 of this embodiment is provided with a through hole 21c in one electrode 21 separately from the fluid flow holes 21b and 22b as shown in Figs. 3 and 6, And the through hole 21c is closed by the other electrode 22 so that the opposed-side opening is blocked. In addition, there is a case in which the fluid communication holes 21b and 22b formed in the respective electrodes 21 and 22 are hereinafter referred to as complete openings. In comparison with this, the through holes 21c It is called semi-openings.

The opening size of the through hole 21c was formed to be smaller than the opening size of the fluid flow hole 21b by 10 mu m or more. The through hole 21c is formed by replacing a part of the regularly arranged fluid communication hole 21b and the through hole 21c is provided around the fluid communication hole 21b (see FIG. 3).

The blowing mechanism 3 is disposed on the other electrode 22 side of the plasma electrode part 2 and is forced toward the fluid flow holes 21b and 22b (full opening part) formed in the plasma electrode part 2. [ With a blowing fan to send the wind. Specifically, the blowing mechanism 3 has a flow velocity of the air passing through the fluid communication holes 21b, 22b within a range of 0.1 m / s to 30 m / s.

The explosion-proof mechanism 4 has a protective cover 41 disposed on the outside of the pair of electrodes 21 and 22 as shown in Fig. 4, and a flammable gas is supplied to the fluid flow holes 21b and 22b And the flame generated by the plasma is prevented from propagating to the outside beyond the protective cover 41. Specifically, the explosion-proof mechanism 4 has a protective cover 41 having a metal mesh 411 disposed outside the pair of electrodes 21 and 22, and the wire diameter of the metal mesh 411 is 1.5 mm And the opening ratio of the metal mesh 411 is 30% or more.

However, in this embodiment, as shown in Fig. 5, a single-layer coating film 23 is provided on the surfaces of the dielectric films 21a and 22a of the electrodes 21 and 22, respectively.

Coating film (23), is any of a glass, a fluorine resin, a silicone-containing diamond-like carbon (DLC), fluorinated DLC, SiO _2, ZrO _2, TiO _2, SrO _2, MgO, or a combination thereof as with a water repellent. The coating film 23 may be formed by a thin film forming method such as a vapor deposition method, a CVD method (Chemical Vapor Deposition), a sputtering method, or an ion plating method, or a plating method, a thermal spraying method, Spray coating, spin coating, coating or the like.

8 shows the relationship between the dew condensation cycle and the ionized water density in the plasma generating apparatus 100 (in the present invention) in which the coating film 23 is formed and in the plasma generating apparatus (conventional apparatus) in which the coating film 23 is not formed Respectively. As can be seen from FIG. 8, in the conventional product, the ion water density gradually decreases from the second cycle of the condensation cycle. In the present invention, however, the ion water density is not lowered regardless of the dew condensation cycle.

The electrodes 21 and 22 of the present embodiment are formed with a gap of a predetermined distance between the electrodes 21 and 22 by the spacer 24 made of an insulator material. The spacers 24 are provided at various places on the periphery of the electrodes 21 and 22 as shown in Fig. The position of the spacer is not limited to that shown in Fig. 3, and may be provided over the entire circumference, for example, and may be set at any position that does not block the fluid flow holes 21b, 22b and the through holes 21c, It may be installed. The thickness of the spacer 24 is preferably 500 mu m or less. If it is larger than 500 mu m, the voltage for generating plasma becomes large, and ozone easily occurs. The spacer 24 may be any one of fluororesin, epoxy, polyimide, alumina, and glass, or a combination thereof. The spacer 24 of the present embodiment is formed by the spraying method in the same manner as the dielectric films 21a and 22a. More specifically, by forming the members to be spacers 24 on the dielectric films 21a, 22a of the respective electrodes 21, 22 to, for example, 250 mu m or less and polymerizing them, Thereby forming the spacer 24. The spacer 24 may be formed on the dielectric film 21a (dielectric film 22a) of the other electrode 21 (or the electrode 22).

The coating film 23 of the present embodiment is formed by forming the dielectric films 21a and 22a by the thermal spraying method and forming a member to be the spacer 24 on the dielectric films 21a and 22a by the spraying method The film is formed. As a result, the spacer 24 is also covered by the coating film 23, so that condensation and moisture adhesion to the spacer 24 can be prevented. The spacers 24 may be formed after the dielectric films 21a and 22a are formed and the coating film 23 is formed.

By providing the spacers 24 as described above, the distance between the electrodes can be increased by the thickness of the spacer 24, and as shown in FIG. 9, the deodorization reaction field becomes larger and the contact volume between the air and the plasma becomes larger. do. Here, the deodorization performance and the thickness dependency of the spacer 24 are shown in Fig. The deodorization efficiency in the case where the spacer 24 having no spacer 24 is 20%, the deodorization efficiency when the spacer 24 having a thickness of 10 μm is provided is 30%, 32% Efficiency was improved. Further, the deodorization efficiency of 100 탆 is 30%, and the improvement of the deodorization rate is remarkable from 10 탆 to 100 탆. Further, the thickness of the spacer 24 is larger than 100 mu m and the deodorization efficiency is worse, but it is 20% or more to 500 mu m. On the other hand, if the thickness of the spacer 24 exceeds 500 탆, the deodorization efficiency becomes worse than when the spacer 24 is not provided.

The plasma generating apparatus 100 constructed as described above can be preferably used in a storage space of a refrigerator. The inside of the storage space of the refrigerator becomes a high humidity state at the time of defrosting operation as shown in Fig. 11, so that condensation easily occurs between the electrodes 21 and 22, or moisture easily adheres. On the other hand, in the plasma generating apparatus 100 of the present embodiment, since the water repellent coating film 23 is provided on the surfaces of the dielectric films 21a and 22a of the electrodes 21 and 22, Do not. Further, since the distance between the electrodes 21 and 22 is increased by the spacer 24, even if condensation occurs, the condensed water easily escapes to the outside between the electrodes 21 and 22.

&Lt; Effects of one embodiment >

According to the plasma generating apparatus 100 according to the embodiment of the present invention configured as described above, the amount of plasma generated in the corresponding fluid through holes 21b, 22b can be increased as much as possible, It is possible to increase the contact area with the liquid. As a result, the amount of active species such as ions and radicals can be increased, so that the active species can be deodorized and the active species can be released to the outside of the apparatus to sterilize airborne and adherent bacteria. Also, since the water repellent coating film 23 is provided on the surfaces of the dielectric films 21a and 22a, condensation and moisture adherence do not occur well in the dielectric films 21a and 22a and, for example, even in the high humidity of the refrigerator, The sterilizing performance can be exerted for a long time.

<Other Embodiments>

FIG. 12 is a perspective view showing another embodiment of the plasma generating apparatus of the present invention, and FIG. 13 is a cross-sectional view showing an electrode section and an explosion proofing mechanism of another embodiment of the plasma generating apparatus of the present invention.

The plasma generating apparatus 100 according to another embodiment of the present invention has the most or substantially the same configuration as that of the above embodiment, but as shown in Fig. 14, the electrodes 21 and 22 A coating film 23 of one layer is provided on the surfaces of the dielectric films 21a and 22a of the respective electrodes 21 and 22 while the heating element 6 is buried.

The description of the plasma electrode unit 2, the blowing mechanism 3, the explosion-proof mechanism 4, the power source 5 and the coating film 23, which are the same as those of the above embodiment, will not be repeated.

The heating element 6 heats the electrodes 21 and 22 and the dielectric films 21a and 22a by resistance heating as shown in Figs. 14 and 15, Is disposed in the concave portion 21m formed in the portion excluding the through hole 21c and the through hole 21c and is disposed in the concave portion 22m formed in the portion of the electrode 22 other than the fluid communication hole 22b. The heat generating elements 6 are accommodated in the recessed portions 21m and 22m in a state of being electrically insulated from the electrodes 21 and 22 by the insulator 7 therein. Specifically, the heat generating element 6 is formed of any one or combination of a heat generating resistor, a varistor element, and an infrared LED, such as a Ni-Cr heat generating element, a molybdenum diatomic heat generating element, a silicon carbide heating element and a graphite heating element. The heat generating element 6 generates heat by being supplied with power from an external power source such as the power source 5. The exothermic temperature of the heat generating element 6 was set to 150 DEG C or lower.

The plasma generating apparatus 100 constructed as described above can be preferably used in a storage space of a refrigerator. The inside of the storage space of the refrigerator becomes a high humidity state at the time of defrosting operation as shown in Fig. 11, so that condensation easily occurs between the electrodes 21 and 22, or moisture easily adheres. On the other hand, in the plasma generating apparatus 100 of the present embodiment, the electrodes 21 and 22 and the dielectric films 21a and 22a are heated by providing the heating elements 6 on the electrodes 21 and 22, It is possible to dry them even if condensation and moisture adherence do not easily occur and condensation and water adhesion are generated. The water repellent coating film 23 is provided on the surfaces of the dielectric films 21a and 22a of the electrodes 21 and 22 and the distance between the electrodes 21 and 22 is increased by the spacer 24 It is possible to further promote the sterilization performance and the deodorization performance. The temperature of the heat generating element 6 can be used as an optimum temperature setting by detecting the temperature and humidity in the refrigerator. It is also effective to control the temperature of the heating element 6 or to control the on / off of the heating element 6 in conjunction with the operation of the compressor or the defrost heater in the refrigerator. The operation of the heating element 6 can also be controlled by detecting the operation state of the plasma generating apparatus 100. [ The temperature of the heating element 6 may be raised when the voltage applied between the electrodes 21 and 22 is detected and the applied voltage tends to decrease, that is, when the generation of plasma is weak.

<Effects of Other Embodiments>

According to the plasma generating apparatus 100 according to another embodiment of the present invention constructed as described above, the amount of plasma generated in each of the corresponding fluid through holes 21b, 22b can be increased as much as possible, It is possible to increase the contact area with the liquid. As a result, the amount of active species such as ions and radicals can be increased, so that the active species can be deodorized, and the active species can be released to the outside of the apparatus to sterilize airborne and adherent bacteria. Also, by providing the heating elements 6 on the electrodes 21 and 22, condensation and moisture adherence to the dielectric films 21a and 22a are not easily generated, and condensation or deformation on the dielectric films 21a and 22a The attached moisture can be removed. It is possible to prevent the sterilizing performance from being lowered even under high humidity in the refrigerator, for example, and to exhibit the sterilizing performance for a long time. It is possible to dry the dielectric films 21a and 22a by causing the heating element 6 to generate heat even if condensation occurs on the surfaces of the dielectric films 21a and 22a to prevent generation of plasma, have. Since the heating elements 6 are provided in the electrodes 21 and 22 to directly heat them, the heating time of the dielectric films 21a and 22a can be shortened and the heating energy can be saved .

Further, according to another embodiment of the present invention, the deodorization efficiency can be increased by creating a dew condensation state. In other words, the first moisture is absorbed and coagulated with malodorous components (for example, odor easily soluble in water such as trimethylamine), and then the electrodes 21 and 22 are heated to generate plasma at a high voltage, Can decompose odorous components.

<Another Embodiment>

FIG. 16 is a perspective view showing still another embodiment of the plasma generating apparatus of the present invention, and FIG. 17 is a sectional view showing an electrode section and an explosion proofing mechanism of still another embodiment of the plasma generating apparatus of the present invention.

The plasma generating apparatus 100 according to still another embodiment of the present invention has the same or similar structure as the above embodiment in most of the configurations, but the case 25 (see FIG. 1) supporting the pair of electrodes 21, Is formed in a substantially rectangular frame shape as shown in Fig. 18, and is configured to open a part of a side opening 2M formed by a pair of electrodes 21 and 22 on side walls along the longitudinal direction thereof . 18 and 19, the explosion-proof mechanism 4 is not shown.

The description of the plasma electrode unit 2, the blowing mechanism 3, the explosion-proof mechanism 4, the power source 5 and the coating film 23, which are the same as those of the above embodiment, will not be repeated.

The protection cover 41, which is one of the components of the explosion-proof mechanism 4, can be detachably installed on the upper and lower surfaces of the case 25. [

18 and 19, the case 25 has a wall 251 opposed to the opened side opening 2M, and the wall 251 is provided between the side wall opening 2M and the side wall opening 2M. A gas flow path 25x having upper and lower exit ports is formed.

Specifically, through holes 25h penetrating from the upper surface to the lower surface are formed in a pair of right and left side walls along the longitudinal direction of the case 25, and the gas passage 25x is constituted by the through holes 25h . The side wall of the through hole 25h constitutes a wall 251 opposed to the side opening 2M. The through hole 25h is a linear long hole extending along the longitudinal direction as shown in Fig. 18, and in this embodiment, two through holes 25h are formed along the longitudinal direction on each side wall . A wind (gas flow) generated by the blowing mechanism 3 flows into the gas flow path 25x formed by the through hole 25h. As a result, the flow of wind through the open side opening 2M can promote the evaporation of the condensation water generated between the pair of electrodes 21, 22. In addition, the shape and the number of the through holes 25h are not limited to those described above, and can be appropriately changed.

The plasma generating apparatus 100 constructed as described above can be preferably used in a storage space of a refrigerator. The inside of the storage space of the refrigerator becomes a high humidity state at the time of defrosting operation as shown in Fig. 11, so that condensation easily occurs between the electrodes 21 and 22, or moisture easily adheres. On the contrary, in the plasma generating apparatus 100 of the present embodiment, since the water repellent coating film 23 is provided on the surfaces of the dielectric films 21a and 22a of the electrodes 21 and 22, I never do that. Since the side openings 2M are opened at the pair of left and right side edges of the pair of electrodes 21 and 22, the condensed water can be evaporated even if condensation occurs, and the electrodes 21, Since the distance between the electrodes 21 and 22 is increased, the number of dew drops easily falls outside the electrodes 21 and 22.

Next, in order to confirm the drying performance of the plasma generating apparatus of the present embodiment constructed as described above, a plasma generator was attached to the refrigerator to measure ionized water. (No.1) in which a coating film and a spacer were not provided without opening the side openings and a plasma generator (No.1) in which side openings were opened by the above-mentioned through holes and a coating film and a spacer were not provided. A plasma generating apparatus No. 3 in which a side opening is opened by the above-mentioned through hole and a coating film and a spacer are provided, Were prepared. Table 1 below shows the results of measurement of the ionic water numbers Nos. 1 to 4.

From the results of the experiment in Table 1, it was found that when the side openings of the pair of electrodes are not opened, the decrease of the ionized water becomes remarkable as the number of days of operation in the refrigerator increases even if a coating film and a spacer are provided Yes No.1, No.3). On the other hand, as in Experimental Example No. 2, it can be seen that the decrease of the initial ionized water can be minimized by condensation by opening the side openings. Further, as in Experimental Example No. 4, it is more effective to combine the coating film and the spacer with the open side face opening, so that even in an environment where humidity fluctuation such as a refrigerator is large and condensation easily occurs between a pair of electrodes, Able to know.

&Lt; Effect of another embodiment >

According to the plasma generating apparatus 100 according to another embodiment of the present invention constructed as described above, the amount of plasma generated in the corresponding fluid through holes 21b, 22b can be increased as much as possible, The contact area between the fluid and the fluid can be increased as much as possible. As a result, the amount of active species such as ions and radicals can be increased, so that the active species can be deodorized, and the active species can be released to the outside of the apparatus to sterilize airborne and adherent bacteria. Since the case 25 opens at least a part of the side opening 2M formed by the pair of electrodes 21 and 22, the condensation water generated in the pair of electrodes 21 and 22 can be easily evaporated It is possible to prevent the condensation water from accumulating in the pair of electrodes 21 and 22. As a result, the drying performance of the dielectric films 21a and 22a can be improved, and the generation of plasma can be stabilized to stabilize the amount of active species produced.

<Other Modified Embodiments>

The present invention is not limited to the above embodiments.

For example, in the above embodiment, a coating film is provided on the dielectric film of each electrode, but the effect is obtained even when it is provided on one of the dielectric films.

In addition, in the above-described other embodiments, the portion where the heat generating element is provided is not limited to the inside of the electrode as in the above embodiment. For example, as shown in Fig. 20, the surface of the dielectric films 21a and 22a The spacer 24 to be installed may be constituted by a heating element. In this case, since the structure of the spacer 24 and the structure of the heating element can be made common, the electrode structure is simplified and the evaporation of moisture by the heating can be promoted together with the heating of the electrodes 21 and 22 have.

21, an insulator film 25 is formed on a stainless steel plate constituting the electrodes 21 and 22, a heat generating element 6 is formed on the insulator film 25, 6, the dielectric films 21a, 22a may be formed. That is, the heating element 6 may be provided between the electrodes 21 and 22 and the dielectric films 21a and 22a. In this case, it is not necessary to process the electrode for installing the heating element 6 in the electrodes 21 and 22. [

Further, a heating element may be provided on a part of the surface of the dielectric films 21a and 22a to such an extent that sufficient plasma generation can be ensured.

22, a heating element 6 is provided on the surface or inside of the casing (the protective cover 41 in the above embodiment) for supporting the pair of electrodes 21, 22 of the plasma electrode portion 2 And the electrodes 21 and 22 and the dielectric films 21a and 22a may be heated. This makes it possible to simplify the apparatus configuration and simplify the manufacturing process as compared with a configuration in which the heating elements 6 are provided in the electrodes 21, 22 or the dielectric films 21a, 22a.

23, a conductor film pattern P is formed on the surface or inside of the electrode to induce heating of the electrodes 21 and 22 by applying a high frequency voltage to the conductor film pattern P, 21a, and 22a may be heated.

24, a pulse voltage larger than the pulse voltage applied to the pair of electrodes 21 and 22 during normal operation is applied to the pair of electrodes 21 and 22 during the heating operation The plasma may be generated and heated. In this case, since the amount of generated ozone increases, it is necessary to provide a catalyst for decomposing ozone generated.

The case 25 of the other embodiment is provided with a through hole 251a in the wall 251 opposed to the side opening 2M as shown in Fig. 25 in addition to the gas flow path 25x having the vertically- To form a gas flow path. This will prevent the spread of the flame, but it can send a lot of wind by the side opening (2M).

26, a gas passage 25x having upper and lower door openings is formed in the case 25 of the above-described another embodiment. However, as shown in Fig. 26, in the side wall of the case 25, The opened gas flow path 25y may be formed. As a result, it is possible to send wind to the side openings 2M, thereby improving the drying performance of the dielectric films 21a and 22a.

27, the case 25 may be configured so as to support the distal end portions and the rear end portions of the pair of electrodes 21 and 22 and not support the left and right end portions of the electrodes 21 and 22 . In this way, almost all the side openings 2M on the left and right sides can be opened, and the drying performance of the dielectric films 21a, 22a can be further improved. In addition, the case 25 may be supported at four corners of the pair of electrodes 21 and 22 so that the left and right sides and the side openings 2M near the front and rear sides may be opened as a whole.

Further, a heating element may be provided inside the case or the pair of electrodes. Thus, in addition to the effect of accelerating the evaporation of condensation water by opening the side openings, evaporation of the condensation water can be promoted further by the heating effect of the heating element, and the dielectric film can be dried in a shorter time. Especially, in case of electronic appliances such as refrigerator, it is possible to efficiently operate the heating element with minimum energy by interlocking with a sensor such as a humidity sensor or a temperature sensor.

In the above-described embodiments, the plurality of fluid flow holes 21b of the electrode 21 have the same shape and the plurality of fluid flow holes 22b of the electrode 22 have the same shape. However, .

All of the fluid flow holes 21b of the electrode 21 are formed to be smaller or larger than the fluid flow holes 22b of the electrode 22. In this case, 21b may be smaller than the fluid flow hole 22b of the electrode 22 and the other fluid flow holes 21b may be formed to be larger than the fluid flow hole 22b of the electrode 22. [

In the above-described embodiments, the through holes are formed in either the one electrode 21 or the other electrode 22, but both may be provided with through holes (half openings).

In addition, in the above-described embodiments, the fluid flow holes have the same cross-sectional shape, but the fluid flow holes formed in the respective other electrodes may have a tapered surface, a cut-out or rice pneumatic type, It may be reduced or enlarged.

In addition, the fluid flow hole may have an elliptical shape, a rectangular shape, a straight slit shape, a concentric circular slit shape, a wave slit shape, a crescent shape, a bezel shape, a honeycomb shape, or a star shape.

It is needless to say that the present invention is not limited to the above-described embodiment, and various modifications are possible without departing from the spirit of the present invention.

100 ... Plasma generator
2… The plasma electrode section
21 ... One electrode
22 ... The other electrode
21a, 22a ... Dielectric film
21b, 22b ... Fluid flow hole
23 ... Coating film
24 ... Spacer
25 ... case
3 ... Blowing mechanism
6 ... Heating element

Claims (57)

delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete A pair of electrodes having opposing surfaces;
A dielectric film disposed between the pair of electrodes, the dielectric film having first and second surfaces, wherein the first surface is disposed on at least one of the surfaces of the electrodes facing each other;
And a heating element configured to heat the second surface of the dielectric film,
And a predetermined voltage is applied to the electrode to discharge the plasma. 21. The plasma generator according to claim 20, wherein the heating element is provided inside the electrode. The plasma generating apparatus according to claim 20, wherein the heating element is provided between the electrode and the dielectric film. 21. The plasma generator according to claim 20, wherein the heating element is provided inside the dielectric film. The plasma generation device according to claim 20, wherein the heating element is provided on a part of the surface of the dielectric film. 21. The plasma generating apparatus according to claim 20, wherein the casing has a casing for supporting the pair of electrodes and the heating element is provided in the casing. 26. The plasma generator according to claim 20 or 25, wherein the heating temperature of the heating element is 150 DEG C or lower. The plasma generator according to claim 20 or 25, wherein a coating film is provided on a surface of the dielectric film. 28. The plasma generator according to claim 27, wherein the coating film is water repellent. 28. The plasma generator according to claim 27, wherein the thickness of the coating film is 0.01 m or more and 100 m or less. 26. The plasma generator according to claim 20 or 25, wherein the spacer has a thickness of 500 mu m or less between the pair of electrodes. delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete A dielectric film disposed between the pair of electrodes and having first and second surfaces and disposed on at least one of the surfaces of the first and second surfaces facing each other; Characterized in that the second surface of the dielectric film is heated by the heating element by applying a predetermined voltage to the electrode of the plasma generating apparatus and performing plasma discharge, the heating element being configured to heat the second surface of the film. Generation method. The plasma generating method according to claim 52, wherein the heating element is provided in a casing for supporting the pair of electrodes, and the second surface of the dielectric film is heated by the heating element. 21. The method of claim 20,
And an insulator configured to electrically insulate the heating element from the electrode. 21. The method of claim 20,
Wherein the heating element is arranged to contact the dielectric film. delete delete

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