KR20120024530A - Liquid drug delivery system and liquid drug container used in the same - Google Patents

Abstract

[ Problem ] Providing a chemical liquid supplying system with little foreign matter mixed in, and a chemical liquid container for use in the same.
[ Solution ] A chemical liquid supply system using a chemical liquid container in which an inner cap member sealed with a sealing member is fitted in an opening of the container. In use, the sealing member is opened such that the sealing member is broken, the opening is opened, the liquid feeding pipe is inserted, and connected to the header portion of the liquid feeding tube formed in the inner hollow portion of the inner cap member. Further, gas is introduced from the gas introduction pipe provided in the liquid supply pipe, and the pressure inside the container is increased to supply the chemical liquid in the container to the outside of the container.

Description

Liquid drug delivery system and liquid drug container used in the same}

The present invention relates to a liquid feeding device for liquid medicine. In particular, the present invention relates to a one-way container for storing, transporting and dispensing fluids such as electronic industrial chemicals, and a liquid chemical feeding apparatus using the same.

In general, chemicals used in the manufacture of semiconductor materials, for example, photoresist compositions and the like, are stored and transported in chemical containers, and are opened and used in manufacturing plants. The use of such a medicine container is roughly divided into a method of repeatedly using the same container called a link method, and a method of using a new container called a one-way method each time. Here, the one-way method is particularly preferable when the purity of the drug is important. However, from an economic point of view, there is room for improvement, and a double containment type container having a one-way method as an inner container in which the above two methods are in direct contact with each other is also used.

As for this double containment type container, it is common to use the bag which consists of a flexible film which consists of an inert material as an inner container. This inner container is disposed in the outer container, and the chemical liquid is filled into this inner container. After use of the container, that is, after discharging the chemical liquid from the inner container, the inner container is separated from the outer container and discarded, and a new inner container is mounted to the outer container. In this way, the chemical liquid is regenerated as a chemical liquid container, and the chemical liquid is filled into the inner container again.

Various such a double containment container is examined (for example, refer patent document 1). However, since a considerable time and cost are required for the recovery of the outer container, the regeneration of the seam or the outer container, and the newly-installed bag, the overall cost reduction effect is small, and rather a double containment type container is used. In that case, the cost tends to be relatively high.

On the other hand, a one-way container generally has a composite container having a double structure in which a resin container molded of molded chemical resistant synthetic resin and an inner container formed of molded chemical resistant synthetic resin are surrounded by a metal outer container. Since resin containers can be produced at low cost and can be easily disposed of after use, they are used relatively broadly. On the other hand, as a composite container, the pail can for liquid chemicals which can be manufactured at low cost, and which uses a metal and a synthetic resin easily separates and disassembles after use is discarded (refer patent document 2).

However, conventionally known resin containers and composite containers have been generally equipped with a connector with a liquid feeding tube in a liquid chemical container when the chemical liquid is supplied, and a liquid chemical tube is inserted into the container to discharge the liquid chemical. In this method, when the container to which the liquid feeding tube is connected is empty, it is necessary to reconnect the liquid feeding tube to the container containing the chemical liquid. At this time, while the liquid feeding tube is previously installed from a used empty container to a new container containing chemical liquid, the liquid feeding tube may be contaminated by impurities such as dust floating in the air, or the liquid feeding tube may be bottomed or the surface of the container due to an operation mistake. When contacted with the back, foreign matter might adhere to the feed tube. As a result, such an impurity or a foreign substance may get into a container with a liquid feed tube.

In the case of using a container having a liquid feeding tube installed therein, since the liquid is adhered to the entire inner surface of the liquid feeding tube, when the cap is opened, the chemical liquid attached to the liquid feeding tube is contaminated with impurities in the air and foreign substances There was a drawback that the possibility of getting into the apparatus was high.

In addition, the conventional chemical liquid container has a relatively long time for the chemical liquid in the container to contact the air because the container lid is opened and opened when the liquid feeding tube is inserted, and the chemical liquid and the air are agitated when the liquid feeding tube is inserted. There are relatively many contacts. For this reason, the deterioration of the chemical liquid due to air contact such as oxidation tended to be large.

In addition, even if a conventional container for chemical liquids is unintentionally or intentionally opened during transportation, the user of the chemical liquid cannot confirm it before use. For example, when the cap is loose, there is a possibility that oxygen is supplied into the container and the chemical liquid therein may deteriorate due to oxidation or the like.

Patent document 1: Unexamined-Japanese-Patent No. 6-100087 Patent Document 2: Japanese Unexamined Patent Publication No. 2008-100715

It is an object of the present invention to provide a liquid chemical delivery tube and a supply container thereof, which can be manufactured at low cost, can be confirmed that the container is unopened, and can reduce the chance of contact between the chemical liquid and the air when the container is replaced. Is in.

The chemical liquid supply system according to the present invention,

A chemical liquid supply system for supplying the chemical liquid from a chemical liquid container filled with a chemical liquid, wherein the chemical liquid container includes:

A container body having an opening,

A liquid delivery tube having a hollow cylindrical inner cap body fitted inside the opening, a liquid passage extending from the inner hollow portion of the inner cap body to the vicinity of the inner bottom of the container body, and an outer opening end of the inner cap body. An encapsulation member for encapsulating a metal, comprising an inner cap member having an encapsulation member capable of irreversibly opening the outer open end by breaking or removing it,

A connecting plug comprising a liquid supply pipe and a gas introduction pipe is connected to the inner cap member, and the sealing member is formed at a header formed at an end of the liquid supply tube at an inner hollow part of the inner cap body. Is connected to the distal end of the liquid supply pipe to be inserted by breaking or removing,

(a) Gas is introduced into the container body from the gas introduction pipe through a coating penetrating into the container body from the inner hollow portion of the inner cap body formed on the inner cap member. By the pressure of, the chemical liquid is extruded and supplied from the inside of the container body to the outside via the liquid feeding tube and the liquid feeding pipe, or

(b) The chemical liquid is sucked and supplied from the inside of the container body via the liquid feed pipe and the liquid feed tube.

Container for chemical liquids according to the present invention,

A container body having an opening,

A liquid delivery tube having a hollow cylindrical inner cap body fitted inside the opening, a liquid passage extending from the inner hollow portion of the inner cap body to the vicinity of the inner bottom of the container body, and an outer opening end of the inner cap body. A sealing member for encapsulating a metal, comprising: an inner cap member having a sealing member capable of irreversibly opening the outer opening end by breaking or removing it.

At the end of the liquid feeding tube in the inner hollow portion of the inner cap body, when connecting a plug having a liquid feeding pipe and a gas introduction pipe to the inner cap member to discharge the chemical liquid filled in the container body, A header portion connectable to a distal end portion of the liquid feeding pipe which is inserted by breaking or removing the sealing member, wherein the inner cap member has a coating for passing gas introduced from the gas introduction pipe into the container; It is to be done.

Since the container for a chemical liquid according to the present invention is integrated with a liquid feeding tube, it is used in a chemical liquid supply system, and the liquid feeding tube is contaminated with foreign matter or impurities when the container after the internal chemical liquid is used is replaced with the next new container. And also they do not enter the container. In addition, since it is not necessary to handle the liquid feeding tube wetted with the chemical liquid at the time of replacement, the handleability is better than that of the conventional chemical liquid container or the chemical liquid supply system.

In addition, the container for chemical liquids according to the present invention can be used as a one-way container, and is disposed of after use, including the liquid feeding tube provided therein, so that the container body and the liquid feeding tube do not need to be cleaned. In addition, there is no need to replace the bag with the outer container, which is necessary in the conventional double container composite container. In addition, in consideration of the improvement in manufacturing yield of the final product due to the reduction of chemical liquid contamination as described above, it is possible to achieve an overall economical chemical liquid supply system.

1 is a schematic diagram of a container for chemical liquids according to one embodiment of the present invention.
It is a schematic sectional drawing of the opening part of the container for chemical liquids which concerns on one Embodiment of this invention.
It is a schematic sectional drawing of the inner cap member used for the chemical | medical agent container of one Embodiment of this invention.
4 is a schematic plan view of a film-like sealing member used for a chemical liquid container according to one embodiment of the present invention.
5 is a schematic cross-sectional view (a) and a schematic perspective view (b) of an inner cap member including a cap-shaped sealing member used in the chemical liquid container according to one embodiment of the present invention, and a schematic cross-sectional view of the cap-shaped sealing member according to another embodiment. (c) and (d).
6 is a schematic diagram of a chemical liquid supply system according to one embodiment of the present invention.
It is a schematic sectional drawing of the connection plug used for the chemical liquid supply system of one Embodiment of this invention.
It is a schematic sectional drawing of the container connection part of the chemical | medical solution supply system which concerns on one Embodiment of this invention.
9 is a graph showing the average number of fine particles in the photoresist compositions of Example 1 and Comparative Example 1. FIG.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described in detail.

EMBODIMENT OF THE INVENTION One Embodiment for implementing this invention with reference to drawings is demonstrated.

1 is a side view of a chemical container 3 according to the present invention. The container main body 5 is provided with the opening part 6, the chemical liquid 12 is filled inside, and the opening part is sealed by the outer container cap 10. As shown in FIG. That is, in appearance, it is the same as the conventional general chemical liquid container. The material of the container body or the outer container cap can be arbitrarily selected from resins, metals, and the like, and handles or the like can be provided to further improve handleability.

The container for chemical liquids in the present invention is characterized by its internal structure. The schematic sectional drawing of the internal structure is as showing in FIG. The male screw 6a for attaching the outer container cap 10 is made in the outer side of the opening part of the container main body 5. Mounting of the outer cap may not necessarily be a screw structure. For example, an inserting structure or the like may also be used. However, in the present invention, the male screw 6a can also be used to fix the connection plug described later. It is desirable to have.

On the other hand, the inner cap member 20 is mounted inside the opening. The structure of the inner cap member 20 is as shown in FIG. The hollow cylindrical inner cap body 7 is a cylindrical member fitted inside the opening 6 of the container body.

At one end thereof, a liquid feeding tube 8 that reaches from the inner hollow portion of the inner cap body to the bottom of the container body is provided. The header part 8a to which the liquid supply pipe mentioned later is joined is provided in the terminal of the said liquid delivery tube in the inner hollow part of the said inner cap main body. In this header part 8a, the taper structure shown in FIG. 3 can be formed in order to facilitate the joining of the liquid feeding pipe and to improve the adhesion of the joining part and to prevent the liquid leakage and the gas leakage. Moreover, the coupling, O-ring, etc. for improving adhesiveness can also be provided. Since the liquid feeding tube material is immersed in the chemical liquid in the container body, one having high resistance to the chemical liquid is selected according to the kind of chemical liquid. For example, (a) polyolefin resins such as polyethylene, polypropylene, polybutylene, and copolymers thereof, (b) polyester resins such as polyethylene terephthalate, and polybutylene terephthalate, ( c) fluorine-containing resins such as tetrafluoroethylene, tetrafluoroethylene-perfluoroalkylvinylether copolymers, tetrafluoroethylene-ethylene copolymers, trifluoroethylene, polyvinylidene fluoride, polyvinyl fluoride, and 3 Fluorinated ethylene-ethylene copolymers and the like are used. These materials can also be used in combination of 2 or more type. In addition, the liquid feeding tube may be high rigidity, or may be soft. In the case of using a high rigidity, the length of the liquid feeding tube is generally the length to the vicinity of the bottom of the container body. This is because if it is short, the chemical liquid remaining in the main body increases. On the other hand, when the terminal of the liquid feeding tube is long enough to contact the bottom, it may be difficult to discharge the chemical liquid from the terminal of the liquid feeding tube. In such a case, it is possible to easily discharge the chemical liquid by providing a hole in the end side of the liquid feeding tube. In addition, a soft liquid feeding tube can be used. In such a case, the amount of the chemical liquid remaining upon discharge can be reduced by making the liquid feeding tube long enough to contact the bottom of the container body.

The end of the inner cap main body on the side where the liquid feeding tube is not provided, that is, the outer opening end of the inner cap main body, is sealed by the sealing member 7a. This sealing member can irreversibly open the outer opening end by breaking or removing it. Here, "opening end can be irreversibly opened" means that when the opening end is opened, the sealing material is broken or deformed and cannot be returned to the state before opening. As a preferable thing of such a sealing material, the film-type sealing material which consists of films, such as resin, is mentioned. In order to open an opening by adhering or welding a film, such as resin, to an opening, it is necessary to cut | disconnect or remove a film, and it is substantially impossible to return this to an original state. This film type sealing member functions substantially as a lid of the container for chemical liquids during the storage or transportation of the chemical liquids. In general, the outer container cap 10 is attached to the opening at the time of transportation or storage, but the outer container cap also has a function of protecting the film-like sealing member. On the other hand, the film type sealing member is broken or removed when the connecting plug described later is connected at the time of supplying the chemical liquid, and the end of the liquid feeding pipe can be introduced into the inner hollow portion of the inner cap member. In other words, the film-like sealing member can be broken through, for example, broken by a knife or the like through the tip of a connection plug processed in a sharp shape, or cut off or peeled off. In this way, the end of the liquid feeding pipe is introduced into the opening that is opened by breaking or removing the film-like sealing member to be coupled to the liquid feeding tube. It is preferable that the material of such a film type sealing member is selected from a comparatively flexible resin. Specifically, this material can be selected from those listed as materials for the above-mentioned liquid feeding tube. More specifically, polyethylene or polypropylene is a preferable material because it is inexpensive and breakage or removal is easy when connecting the connection plug. This film type sealing member is fixed to an inner cap main body by an adhesive agent or heat welding, for example.

The shape of a film sealing member is not specifically limited, It can be set as arbitrary shapes as needed. An example of the shape of such a film sealing member is as showing in FIG. Although the film-shaped sealing member 7a may have a uniform thickness, it can form a linear thin part, what is called the notch 11, in a film so that fracture | rupture becomes easy when connecting a connection plug. The shape of the notch 11 is not particularly limited, and may be formed radially (FIG. 4A) on the film surface, or may be an arc shape (FIG. 4B). The cross-sectional shape of the notch is preferably V-shaped, but may be semicircular or rectangular. In addition, when peeling at the time of use of a film type sealing member, in order to make peeling easy, you may form the tab 12, and it may make it easy for an operator to grasp (FIG. 4C). In addition, the film-like sealing member may be made larger than the outer diameter of the opening, and the entire outer peripheral portion may be a tab (FIG. 4D).

In addition, the sealing member is not limited to a film-shaped thing, It can be set as arbitrary shapes. Concept sectional drawing of one Embodiment of such a sealing member is shown in FIG. In this example, a cap-shaped sealing member 10a fitted to the inside of the inner cap body is shown. This cap-shaped sealing member 10a has a truncated truncated conical shape, as shown in FIG. 5A. In other words, the outer circumferential diameter of the cap-shaped sealing member 10a is larger as it approaches the bottom. By having such a shape, the cap-shaped sealing member is prevented from falling off, and the chemical liquid in the container is also prevented from leaking out. At this time, it is preferable to form the groove structure corresponding to the outer shape of the cap-shaped sealing member 10a in the inner wall of the inner cap main body 7, and to be mutually fitted. It is also possible to fix the cap-shaped sealing member by forming it with an elastic material and fitting the inner cap body. The bottom face of the cap sealing member 10a may be in contact with the header portion 8a. In addition, in use, the tab 10b and the notch 10c are formed in the cap-shaped sealing member so that the cap member can be easily removed or destroyed, and the tab 10b is pulled upward, It is preferable to form the cap member along the notch 10c so as to break. In addition, on one of the tabs 10b or the notches 10c, or both of them, a date and time that cannot be re-adhesive after peeling may be pasted to facilitate opening and closing of the container. In addition, in the example shown in FIG. 5B, although the notch is formed in linear form at the bottom face of the cap-shaped sealing member, and the tab 10b is formed in the notch end part of a bottom face, the shape of this tab and notch is not specifically limited, For example, the tab may be formed not only on the bottom surface of the film-like sealing member, but also on the inner side surface and the upper portion thereof, and the notch may be circular, not linear. In addition, when the cap member 10a is fitted inside the inner cap body, there is no problem even when the outer container cap 10 is used during transportation.

Although the cap-shaped sealing member shown in FIG. 5 is one of a preferable form, other cap-shaped members can also be used. For example, the rim 10d is formed on the outer circumference of the cap-shaped sealing member (FIG. 5C) and fixed by fitting into a groove formed in the inner circumference of the inner cap body, or fixed or adhered to the inner cap member by fixing. can do. Moreover, the stopper 10e can also be formed in the outer periphery of the upper surface of a cap-shaped sealing member (FIG. 5D). This stopper 10e comes into contact with the surface of the upper rim of the inner cap body and contributes to the fixation of the cap-shaped sealing member. If necessary, the stopper portion may be bonded or heat welded to the inner cap body. In addition, a cap-type sealing material may be used that is fitted to the upper rim of the inner cap body or to the outside of the opening to cover the lid of the opening and to seal the container. Moreover, as long as these cap-shaped members are a shape which fits physically in an inner cap main body or a container opening part, they can also be fixed without adhesion | attachment, heat welding, etc., and they are preferable at the time of opening because a cap-shaped sealing member irreversibly deforms or breaks. In addition, in the case of bonding, once peeled, the adhesive force falls, and the date and time which cannot be reattached can also be used.

Moreover, when the inner cap member is fitted to the container main body, the inner cap member is formed with a coating 9 penetrating from the cap main body inner hollow to the inside of the container main body. This coating 9 is for (a) passing the gas introduced from the gas introduction pipe mentioned later through a container main body to raise the pressure in a container main body, and to discharge the chemical liquid in a container main body by this, or

(b) When the chemical liquid in the container body is sucked by a pump or the like formed externally via a liquid feeding pipe and a liquid feeding tube, which will be described later, external air is introduced into the container through any coating, and inside the container by suction. This is to adjust the negative pressure generated.

The inner cap member 20 having such a structure is fitted to the opening 6 of the container body 5. At this time, a stopper 7b for preventing the inner cap member 20 from falling off from the opening 6 can be provided in the inner cap member 20. With this structure, the inner cap member becomes difficult to separate unless a special jig is used. In addition, the inner cap member 20 may be fixed to the opening 6 by an adhesive or the like. By making it difficult for the inner cap member 20 to fall off in this manner, it is possible to prevent the container from being unnecessarily opened due to intentional or accidental accident.

In this way, since the inner cap member 20 is difficult to be detached once it is coupled to the container main body, it is generally attached to the opening 6 after filling the container main body 5 with the chemical liquid.

However, after attaching the inner cap main body 7 provided with the liquid feeding tube 8 to the opening part 6, a chemical | medical solution is filled, and a film type sealing member can also be heat-welded to the inner cap main body 7 after that. .

Next, the chemical liquid supply system using the chemical liquid container according to the present invention will be described. The overall conceptual diagram of such a chemical liquid supply system is as shown in FIG. In the system shown here, gas is introduced into the container main body through a coating penetrating into the container main body from the inner hollow part of the inner cap main body formed in the inner cap member from the gas introduction pipe, and the chemical liquid is caused by the pressure of the gas. It is extruded and supplied from the inside of a container main body through this liquid supply tube and the liquid supply piping. Instead of the outer container cap 10, the connection plug 31 is coupled to the chemical container 3. A gas introduction pipe 32 and a liquid supply pipe 33 are coupled to the connection plug 31. The gas introduction piping is connected to the gas tank 4, for example, by opening the valve 41, gas is introduced into the container main body, and the chemical liquid in the container main body is extruded by the pressure of the gas, and the liquid feed tube ( 8) and the liquid supply pipe 33 are supplied out of the chemical liquid container.

Here, conceptual sectional drawing of the connection plug 31 is as showing in FIG. The connection plug is provided with a liquid supply pipe 33 and a gas introduction pipe 32. The tip portion 33a of the liquid supply pipe 33 is shaped to be connected to the header 8a of the inner cap member. Here, if the tip portion 33a is tapered in conformity with the shape of the header 8a, it is advantageous to break the film-like sealing member. Moreover, the gas introduction piping 32 can also be made into a sharp shape so that it may penetrate a film-form sealing member as shown in FIG. However, the gas introduction pipe 32 does not necessarily need to penetrate to the inner side of the inner cap main body 7, but may have only a simple opening in the connection plug 31. This is because the gas introduced from the gas introduction pipe can flow into the container from the crack formed when the liquid supply pipe passes. In addition, when the film type sealing member is removed, there is no obstacle when gas is introduced from the gas introduction pipe.

8, the conceptual sectional drawing which shows the state in which the connection cap 31 was connected to the inner cap member 8 is shown. The distal end portion 33a of the liquid feeding pipe 33 is connected to the header portion 8a of the liquid feeding tube 8, and the male screw of the opening 6 is connected by the connection plug fixing screw 30 to fix it in that state. It is attached to 6a. At this time, the film-shaped sealing member of the inner cap main body 7 is broken by the penetration of the liquid feeding pipe 33. Under the present circumstances, you may peel previously and remove a film type sealing member.

Then, the gas introduced from the gas introduction pipe 32 is introduced into the interior of the container body via the coating 9, and at that pressure, the chemical liquid passes through the liquid feeding tube 8 and the liquid feeding pipe 33. It is supplied to the outside from the main body.

The chemical liquid supplied is temporarily stored in the accommodating container 1, for example, and is weighed and used by an appropriate measuring means or the like. Here, the gas tank which accommodates inert gas is generally connected to the gas introduction piping. Although the kind of gas is not specifically limited, In order to maintain the quality of the chemical liquid in a container, generally, an inert gas, for example, nitrogen, is used. However, depending on the type of chemical liquid, air may be used, and in such a case, air may be introduced into the container by using a pump or the like.

In addition, although the example which stored the chemical | medical solution supplied in the accommodating container was shown in FIG. 6, supply methods other than this are also possible. For example, it is also possible to connect the liquid supply pipe directly to the apparatus using chemical liquid, and to supply it to the apparatus quantitatively. However, it is preferable to provide an accommodating container because the supply of the chemical liquid may become impossible when the chemical container is empty or the supply amount may become unstable due to the pressure applied through the gas.

In Fig. 6, the gas is introduced into the container and the chemical liquid in the container is discharged by the pressure. However, the chemical liquid may be sucked and supplied from the container body via the liquid feed pipe and the liquid feed tube. In this case, a pump is installed in the middle of the liquid supply pipe to suck the chemical liquid in the container, or the container containing the discharged chemical liquid and the liquid supply pipe connected thereto are sealed to depressurize the chemical liquid in the container. You can do it. At this time, the coating has a function of adjusting the pressure in the container main body by introducing outside air into the container via the gas introduction pipe.

Example  One

A 20-liter pale can (manufactured by Japan Fail) was prepared, which was provided with clean air blow molded high-density polyethylene as an inner pocket. This pail can was used without being washed as it was purchased.

The photoresist composition was filtrated into the fail can, and an inner cap member and an outer container cap having a liquid feeding tube with a film type sealing member shown in FIG. 2 were provided and sealed. In this film-like sealing member, the radial notch 11 was formed in the film surface like FIG. 4A. Thus, ten containers in which the photoresist composition was enclosed were prepared.

Ten prepared containers were allowed to stand at room temperature (about 25 ° C.) for 1 hour. Then, after removing the outer container cap of the container for the first time, the film-shaped sealing member formed in the liquid feed tube was broken with a connection plug, the liquid supply piping was mounted in the container, the inside of the container was pressurized, and the photoresist composition was taken out. Subsequently, the same liquid feeding pipe was continuously used without washing, and the photoresist composition was taken out sequentially from all the containers.

Comparative example  One

In the same manner as in Example 1, the photoresist composition was filtrated into the pail can, and the eye drop and the outer container cap pre-installed in the pail can were installed and sealed. Thus, ten containers in which the photoresist composition was enclosed were prepared.

Ten prepared containers were allowed to stand at room temperature (about 25 ° C) for 1 hour, as in Example 1. Then, after removing the outer container cap and the lid of a container for the first time, the connector with a liquid feeding tube was attached to the container, the inside of the container was pressurized, and the photoresist composition was taken out. Subsequently, the same liquid feeding tube connector was continuously used without washing, and the photoresist composition was taken out sequentially from all the containers.

evaluation

The number of microparticles | fine-particles in the photoresist composition extract | collected in Example 1 and the comparative example 1 was measured using the particle counter. About each composition, the number of fine particles exceeding 0.23 micrometer and the average number of fine particles exceeding 0.3 micrometer were measured. The obtained result was as showing in Table 1 and FIG. In addition, the average fine particle number corresponding to "vessel number 0" in a table means the average fine particle number measured about the photoresist composition immediately after container filling and before sealing.

From the obtained result, in the comparative example, the number of microparticles | fine-particles in a photoresist composition increased by using the same connector with a liquid feeding tube continuously, In this invention, even if it used the same piping for liquid feeding continuously, it did not increase. As mentioned above, it turned out that chemical liquid can be supplied stably by using the chemical liquid supply system of this invention.

1: receiving container
3: container for chemical liquid
4: gas tank
5: container body
6: opening
6a: opening male screw
7: inner cap body
7a: film type sealing member
7b: stopper
8: feeding tube
8a: header
9: coating
10: outer container cap
10a: cap type sealing member
10b: tab
10c: notch
10d: rim
10e: Stopper
20: inner cap member
30: connection plug fixing screw
31: connection plug
32: gas introduction pipe
33: liquid supply pipe
33a: distal end of liquid supply pipe

Claims (7)

A chemical liquid supply system for supplying the chemical liquid from a container for chemical liquid filled with a chemical liquid,
The chemical container:
A container body having an opening; And
A liquid delivery tube having a hollow cylindrical inner cap body fitted inside the opening, a liquid passage extending from the inner hollow portion of the inner cap body to the vicinity of the inner bottom of the container body, and an outer opening end of the inner cap body. An encapsulation member for encapsulating a metal, comprising an inner cap member having an encapsulation member capable of irreversibly opening the outer open end by breaking or removing it,
A connecting plug comprising a liquid supply pipe and a gas introduction pipe is connected to the inner cap member, and the sealing member is formed at a header formed at an end of the liquid supply tube at an inner hollow part of the inner cap body. Is connected to the distal end of the liquid supply pipe to be inserted by breaking or removing,
(a) Gas is introduced into the container main body through a coating penetrating into the container main body from the inner cap main body inner hollow part formed in the inner cap member from the gas introduction pipe, and by the pressure of the gas The chemical liquid is extruded from the inside of the container body to the outside via the liquid feed tube and the liquid feed pipe, or supplied;
(b) A chemical liquid supply system, characterized in that the chemical liquid is sucked and supplied from within the container body via the liquid supply pipe and the liquid supply tube. The chemical liquid supply system according to claim 1, wherein the gas is an inert gas. The chemical liquid supply system according to claim 1 or 2, wherein the chemical liquid extruded from the inside of the container body to the outside is temporarily stored in a receiving container. A container body having an opening,
A liquid delivery tube having a hollow cylindrical inner cap body fitted inside the opening, a liquid passage extending from the inner hollow portion of the inner cap body to the vicinity of the inner bottom of the container body, and an outer opening end of the inner cap body. An encapsulation member for encapsulating a liquid, comprising: an inner cap member having an encapsulation member capable of irreversibly opening the outer open end by breaking or removing the condensation member;
At the end of the liquid feeding tube in the inner hollow portion of the inner cap body, when connecting a plug having a liquid feeding pipe and a gas introduction pipe to the inner cap member to discharge the chemical liquid filled in the container body, A header portion connectable to a distal end portion of the liquid feeding pipe which is inserted by breaking or removing the sealing member, and wherein the inner cap member has a coating for passing gas flowing from the gas introduction pipe into the container. The container for chemical liquids characterized by the above-mentioned. The container for chemical liquids according to claim 4, wherein the sealing member is a film type sealing member that can be broken or removed. The chemical liquid container according to claim 5, further comprising an outer container cap fitted to an outer circumference of the opening and protecting the film-like sealing member. The chemical liquid container according to any one of claims 4 to 6, wherein the film-like sealing member is made of polyethylene or polypropylene.

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