CN113685727B - Connector plug and gas supply device including connector plug - Google Patents
Connector plug and gas supply device including connector plug Download PDFInfo
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- CN113685727B CN113685727B CN202010883669.5A CN202010883669A CN113685727B CN 113685727 B CN113685727 B CN 113685727B CN 202010883669 A CN202010883669 A CN 202010883669A CN 113685727 B CN113685727 B CN 113685727B
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- connector
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- gasket
- connection pipe
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/08—Gripping heads and other end effectors having finger members
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/021—Sealings between relatively-stationary surfaces with elastic packing
- F16J15/022—Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L55/00—Devices or appurtenances for use in, or in connection with, pipes or pipe systems
- F16L55/10—Means for stopping flow in pipes or hoses
- F16L55/11—Plugs
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/002—Details of vessels or of the filling or discharging of vessels for vessels under pressure
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/04—Arrangement or mounting of valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/06—Closures, e.g. cap, breakable member
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/04—Apparatus for manufacture or treatment
- H10P72/0402—Apparatus for fluid treatment
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2201/00—Vessel construction, in particular geometry, arrangement or size
- F17C2201/01—Shape
- F17C2201/0104—Shape cylindrical
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2201/00—Vessel construction, in particular geometry, arrangement or size
- F17C2201/05—Size
- F17C2201/056—Small (<1 m3)
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
- F17C2205/0311—Closure means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
- F17C2205/037—Quick connecting means, e.g. couplings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
- F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
- F17C2223/0107—Single phase
- F17C2223/0123—Single phase gaseous, e.g. CNG, GNC
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2270/00—Applications
- F17C2270/05—Applications for industrial use
- F17C2270/0518—Semiconductors
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S277/00—Seal for a joint or juncture
- Y10S277/935—Seal made of a particular material
- Y10S277/944—Elastomer or plastic
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- Quick-Acting Or Multi-Walled Pipe Joints (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Abstract
Description
技术领域technical field
本发明涉及连接器插塞以及包括连接器插塞的气体供应装置,更加详细地,涉及能够简化容器更换过程而节省容器更换过程所需的时间和费用的连接器插塞以及包括其的气体供应装置。The present invention relates to a connector plug and a gas supply device including the connector plug, and in more detail, to a connector plug capable of simplifying the container replacement process and saving time and cost required for the container replacement process and a gas supply device including the same device.
背景技术Background technique
通常,对于向利用气体的装置(尤其,向诸如半导体设备等进行精细操作的气体需求处)供应气体的装置而言,要求适合各种目的的种类的气体满足预定的浓度和压力等。In general, for devices that supply gas to devices using gas (particularly, where gas is demanded for fine operations such as semiconductor equipment, etc.), types of gas suitable for various purposes are required to satisfy predetermined concentrations, pressures, and the like.
为了有效地提供这样的气体,以高压状态保管许多种类的气体,尤其是,具有可燃性、毒性、腐蚀性等有害性质的气体在与人类隔离的独立空间被严格管理。In order to efficiently supply such gases, many kinds of gases are kept under high pressure. In particular, gases with harmful properties such as flammability, toxicity, and corrosion are strictly managed in separate spaces separated from humans.
气体供应装置构成为包括:连接配管连接器,与连接在气体需求处的连接配管连接而与气体储存容器(以下,简称为“容器”)的阀连接器结合,所述气体供应装置连接容器与气体需求处而向气体需求处供应容器内部的气体。The gas supply device is configured to include: a connecting pipe connector connected to a connecting pipe connected to a gas demand place and combined with a valve connector of a gas storage container (hereinafter referred to simply as "container"), the gas supply device connecting the container and The gas demand place supplies the gas inside the container to the gas demand place.
如果容器中保管的气体被全部耗尽,则将所述连接配管连接器从连接的容器的阀连接器分离,之后更换容器,然后将所述连接配管连接器结合到更换后的容器的阀连接器而再次供应气体。If the gas stored in the container is completely depleted, separate the connecting pipe connector from the valve connector of the connected container, replace the container, and then couple the connecting pipe connector to the valve connection of the replaced container to supply gas again.
然而,在从与所述连接配管连接器连接的容器的阀连接器分离到更换后的容器的阀连接器结合到所述连接配管连接器的更换容器所需时间期间,所述连接配管暴露在外部,从而可能有气体从所述连接配管泄漏或者可能有异物进入所述连接配管。However, the connection piping is exposed to the outside, gas may leak from the connecting pipe or foreign matter may enter the connecting pipe.
为了防止这种现象,在所述容器更换所需时间期间,在将所述连接配管连接器结合到插塞而阻断所述连接配管向外部暴露,并且在所述连接配管连接器与所述阀连接器之间以及所述连接配管连接器与所述插塞之间分别安装了用于维持气密性的密封垫(gasket)。In order to prevent this phenomenon, during the time required for the replacement of the container, when the connection pipe connector is coupled to the plug to block the connection pipe from being exposed to the outside, and between the connection pipe connector and the Gaskets for maintaining airtightness are installed between the valve connectors and between the connecting pipe connector and the plug.
据此,如果与所述连接配管连接器连接的容器的阀连接器被分离,则回收安装在所述连接配管连接器与所述阀连接器之间的密封垫,并安装用于密封所述连接配管连接器与所述插塞之间的新的密封垫,然后进行所述连接配管连接器与所述插塞的结合。According to this, if the valve connector of the container connected to the connection pipe connector is separated, the gasket installed between the connection pipe connector and the valve connector is recovered, and a gasket for sealing the valve connector is installed. A new seal between the pipe connector and the plug is connected, and then the joint of the connected pipe connector and the plug is performed.
并且,如果所述插塞和所述连接配管连接器被分离,则回收安装在所述连接配管连接器与所述插塞之间的密封垫,安装用于密封所述连接配管连接器与更换后的容器的阀连接器之间的新的密封垫,然后进行所述连接配管连接器与更换后的容器的阀连接器的结合。And, if the plug and the connecting pipe connector are separated, the gasket installed between the connecting pipe connector and the plug is recovered, and the connecting pipe connector for sealing and replacing is installed. A new gasket between the valve connector of the replaced container, and then carry out the combination of the connecting pipe connector and the valve connector of the replaced container.
然而,由于每次更换容器时需要大量时间进行密封垫的更换,因此开始寻找通过简化密封垫更换过程而简化容器更换过程,从而不仅可以节省所需时间,还可以节省容器更换过程中所需的自动化工序的电力的方法。However, since a lot of time is required for seal replacement every time the container is replaced, a search was started to simplify the container replacement process by simplifying the seal replacement process so as to save not only the required time but also the cost required in the container replacement process. Electric methods for automating processes.
并且,由于在执行密封垫更换操作时,所述连接配管以暴露在外部的状态被放置,因此开始寻找能够缩短密封垫更换过程且缩短更换时间而最小化所述连接配管暴露在外部的时间的方法。And, since the connecting pipe is placed in a state of being exposed to the outside when the gasket replacement operation is performed, a search has been started for a method that can shorten the gasket replacement process and shorten the replacement time while minimizing the time that the connecting pipe is exposed to the outside. method.
并且,开始寻找可以减少密封垫的消耗量而降低容器更换过程所需的费用并提高经济性的方法。Also, a search was started for a method that can reduce the consumption of the gasket to reduce the cost required for the container replacement process and improve economical efficiency.
作为关于半导体设备的气体供应装置的现有技术,公开有韩国授权专利第10-0242982号。As a prior art related to a gas supply device for a semiconductor device, Korean Patent No. 10-0242982 is disclosed.
发明内容Contents of the invention
本发明是为了解决上述诸般问题而想出的,更加详细地,其目的在于提供一种能够简化容器更换过程而节省容器更换过程所需的时间和费用的连接器插塞以及包括该连接器插塞的气体供应装置。The present invention is conceived in order to solve the above-mentioned problems, and in more detail, its object is to provide a connector plug that can simplify the container replacement process and save the time and cost required for the container replacement process, and a connector including the connector plug. Gas supply for plug.
用于达到所述目的的本发明的连接器插塞,构成为配备有:密封部件,结合在通过连接配管连接于气体需求处的气体供应装置的连接配管连接器而将所述连接配管与外部阻断,并且用于密封所述连接器插塞与所述连接配管连接器之间。The connector plug of the present invention for achieving the above object is configured to be equipped with a sealing member connected to a connecting pipe connector of a gas supply device connected to a gas demand place through a connecting pipe to connect the connecting pipe to the outside. blocking, and used to seal between the connector plug and the connecting pipe connector.
并且,在形成连接器插塞的主体的插塞主体可以形成有密封部件插入槽,所述密封部件可以插入于所述密封部件插入槽。In addition, a plug body forming a main body of the connector plug may have a seal member insertion groove formed therein, and the seal member may be inserted into the seal member insertion groove.
所述密封部件可以利用树脂材质构成,在此情形下,所述树脂材质可以利用聚氯三氟乙烯或者聚四氟乙烯构成。The sealing member may be made of a resin material, and in this case, the resin material may be made of polychlorotrifluoroethylene or polytetrafluoroethylene.
所述密封部件可以利用金属材质构成,在此情形下,所述金属材质可以利用镍材质构成。The sealing member may be made of a metal material, and in this case, the metal material may be made of a nickel material.
本发明的气体供应装置,可以包括:连接配管连接器,用于将连接在气体需求处的连接配管连接到配备于容器的阀连接器,连接器插塞,配备有密封部件,该密封部件与所述连接配管连接器结合而将所述连接配管与外部阻断,并且用于密封所述连接器插塞与所述连接配管连接器之间。The gas supply device of the present invention may include: a connection pipe connector for connecting a connection pipe connected to a gas demand place to a valve connector equipped with a container, a connector plug equipped with a sealing member, and the sealing member and The connection pipe connector is connected to block the connection pipe from the outside, and is used to seal between the connector plug and the connection pipe connector.
并且,可以构成为包括:插塞移送机构,支撑所述连接器插塞的端部并移送;控制部,控制所述插塞移送机构,以在所述连接配管连接器和所述阀连接器未被紧固的状态下使所述插塞移送机构移送所述连接器插塞而结合到所述连接配管连接器。In addition, it may be configured to include: a plug transfer mechanism that supports and transfers the end of the connector plug; and a control unit that controls the plug transfer mechanism so that the connecting pipe connector and the valve connector In an untightened state, the plug transfer mechanism transfers the connector plug to be connected to the connecting pipe connector.
并且,可以构成为包括:连接配管连接器移送系统,支撑所述连接配管连接器并移送,其中,所述控制部可以构成为:控制所述连接配管连接器移送系统而将所述连接配管连接器紧固到所述阀连接器或者从所述阀连接器分离,并且有机地控制所述插塞移送机构和所述连接配管连接器移送系统,使得在所述连接配管连接器与所述阀连接器分离时将所述连接器插塞结合到所述连接配管连接器,并且在所述连接器插塞与所述连接配管连接器分离时将所述连接配管连接器结合到所述阀连接器。In addition, it may be configured to include: a connection pipe connector transfer system for supporting and transferring the connection pipe connector, wherein the control unit may be configured to control the connection pipe connector transfer system to connect the connection pipe. The valve connector is fastened to or separated from the valve connector, and the plug transfer mechanism and the connecting pipe connector transfer system are organically controlled so that when the connecting pipe connector and the valve coupling the connector plug to the connection pipe connector when the connector is separated, and coupling the connection pipe connector to the valve connection when the connector plug is separated from the connection pipe connector device.
并且,可以构成为包括:密封垫移送系统,支撑用于密封所述连接配管连接器与所述阀连接器之间的密封垫并移送,其中,所述控制部可以构成为:控制所述密封垫移送系统而将所述密封垫紧固到所述阀连接器或者从所述阀连接配管连接器分离,并且有机地控制所述连接配管连接器移送系统和所述插塞移送机构以及所述密封垫移送系统,使得在分离所述连接配管连接器与所述阀连接器之后,分离安装在所述连接配管连接器的所述密封垫,然后将所述连接器插塞结合到所述连接配管连接器,然后分离所述连接器插塞与所述连接配管连接器,然后将所述密封垫安装到所述连接配管连接器,然后将所述阀连接器结合到所述连接配管连接器。In addition, it may be configured to include: a gasket transfer system that supports and transfers a gasket for sealing between the connecting pipe connector and the valve connector, wherein the control unit may be configured to control the sealing gasket. The gasket is fastened to the valve connector or separated from the valve connection pipe connector by using a pad transfer system, and the connection pipe connector transfer system and the plug transfer mechanism and the plug transfer mechanism are organically controlled. A gasket transfer system such that after separating the connection piping connector and the valve connector, the gasket mounted on the connection piping connector is separated, and then the connector plug is bonded to the connection pipe connector, then separate the connector plug from the connection pipe connector, then install the gasket to the connection pipe connector, and then couple the valve connector to the connection pipe connector .
通过根据本发明的连接器插塞以及包括该连接器插塞的气体供应装置,不仅可以简化容器更换过程而节省所需时间,还可以节省容器更换过程中所需的自动化工序的电力,并且节省对使用电力征收的费用。By the connector plug and the gas supply device including the connector plug according to the present invention, not only can the container replacement process be simplified to save the required time, but also the electric power of the automation process required in the container replacement process can be saved, and the A charge for the use of electricity.
并且,通过缩短密封垫更换过程并缩短更换时间而最小化所述连接配管暴露到外部的时间,从而可以防止气体从所述连接配管泄漏或者异物进入所述连接配管。Also, the time during which the connection pipe is exposed to the outside is minimized by shortening the gasket replacement process and shortening the replacement time, thereby preventing gas from leaking from the connection pipe or foreign matter from entering the connection pipe.
并且,可以减少密封垫的消耗量而降低容器更换过程中所需的费用,并提高经济性。In addition, the consumption of the gasket can be reduced to reduce the cost required in the container replacement process, and the economy can be improved.
附图说明Description of drawings
图1是示出本发明的气体供应装置的立体图。FIG. 1 is a perspective view showing a gas supply device of the present invention.
图2是示出本发明的气体供应装置中,在容器的阀部结合有固定块的状态的立体图。Fig. 2 is a perspective view showing a state in which a fixing block is coupled to a valve portion of a container in the gas supply device of the present invention.
图3是示出根据本发明的气体供应装置的下部模块的立体图。3 is a perspective view showing a lower module of the gas supply device according to the present invention.
图4是示出根据本发明的气体供应装置中的连接配管连接器移送机构的立体图。Fig. 4 is a perspective view showing a connection pipe connector transfer mechanism in the gas supply device according to the present invention.
图5是示出本发明的气体供应装置中的密封垫供应部的立体图。Fig. 5 is a perspective view showing a gasket supply part in the gas supply device of the present invention.
图6是示出本发明的气体供应装置中的密封垫移送部的立体图。6 is a perspective view showing a gasket transfer unit in the gas supply device of the present invention.
图7是示出本发明的气体供应装置中的用于结合阀连接器和连接配管连接器的初始状态的平面图。Fig. 7 is a plan view showing an initial state of a connector for connecting a valve and a connecting pipe in the gas supply device of the present invention.
图8是示出本发明的气体供应装置中的插塞模块的立体图。Fig. 8 is a perspective view showing a plug module in the gas supply device of the present invention.
图9是示出根据本发明的连接器插塞的立体图。Fig. 9 is a perspective view showing a connector plug according to the present invention.
图10是根据本发明的连接器插塞的剖面图。Fig. 10 is a sectional view of a connector plug according to the present invention.
符号说明Symbol Description
1:气体供应装置 2:上部模块1: Gas supply device 2: Upper module
3:下部模块 4:阀开闭模块3: Lower module 4: Valve opening and closing module
10:容器 20:阀10: container 20: valve
30:阀连接器 31:盖体30: Valve connector 31: Cover body
50:手柄 211:上部板50: handle 211: upper plate
311:上部壳体 312:第一侧面壳体311: Upper shell 312: First side shell
313:第二侧面壳体 314:下部壳体313: Second side shell 314: Lower shell
315:内部壳体 320:盖体分离部315: Inner shell 320: Cover separation part
330:连接器紧固部 331:连接配管连接器330: Connector fastening part 331: Connection pipe connector
335:连接配管连接器移送机构 335-1:连接器卡接部件335: Connection pipe connector transfer mechanism 335-1: Connector clamping parts
335-2:卡接轴 335-3:引导轴335-2: Clamping shaft 335-3: Guide shaft
340:子模块移送机构 340a:第一移送机构340:
340b:第二移送机构 350:对准块340b: Second transfer mechanism 350: Alignment block
351:第二对准部 352:第二结合部351: Second alignment part 352: Second joint part
352a:凸起 360:插塞模块352a: Raised 360: Plug module
361:连接器插塞 362:插塞支撑部件361: Connector plug 362: Plug support part
363:插塞支撑壳体 364:插塞移送引导件363: Plug support housing 364: Plug transfer guide
370:密封垫供应部 371a:密封垫370:
372:密封垫收纳部 373:密封垫收纳部移送机构372: Gasket storage section 373: Gasket storage section transfer mechanism
380:密封垫移送部 381:密封垫夹持器380: Gasket transfer unit 381: Gasket holder
382:密封垫夹持器操作机构 383:密封垫夹持器移送机构382: Gasket holder operating mechanism 383: Gasket holder transfer mechanism
384:第二密封垫夹持器移送机构 510、520、530:固定块384: Second gasket
511:第一结合部 512:第一对准部511: First joint part 512: First alignment part
S:密封部件S: sealing part
具体实施方式Detailed ways
以下参照附图详细说明本发明。The present invention will be described in detail below with reference to the accompanying drawings.
此处,在指代方向时,将图1所示的X轴称作前后方向、Y轴称作左右方向、Z轴称作垂直方向。并且,水平方向包括由XY平面构成的所述左右方向和前后方向。并且,在区分前后方向时,将布置有容器10的一侧称作前方,布置有下部模块3的这一侧称作后方。并且,在以盖体分离部320和连接器紧固部330为基准区分左右方向时,将布置有盖体分离部320的这一侧定义为右侧,将布置有连接器紧固部330的这一侧定义为左侧。Here, when referring to directions, the X-axis shown in FIG. 1 is called the front-back direction, the Y-axis is called the left-right direction, and the Z-axis is called the vertical direction. In addition, the horizontal direction includes the above-mentioned left-right direction and front-rear direction formed by the XY plane. Also, when distinguishing the front and rear directions, the side on which the
参照图1至图3,本发明的气体供应装置1可以包括:上部模块2,包括设置为固定在从配备于容器10的上端的阀部朝上侧相隔的位置的上部板211;下部模块3,配备在所述上部模块2的下部,配备有盖体分离部320和连接器紧固部330,所述盖体分离部320分离覆盖阀连接器30(图2)的盖体31,所述连接器紧固部330用于将通过连接配管(未示出)连接到气体需求处的连接配管连接器331连接到所述阀连接器30;阀开闭模块4,用于开闭所述阀部的阀。Referring to FIGS. 1 to 3 , the gas supply device 1 of the present invention may include: an
所述容器10作为用于储存供应至半导体装置等气体需求处的工艺气体并将其供应的构成,在容器10的上部配备有所述阀部。The
所述阀部构成为包括:阀(未示出),用于控制气体的供应;阀连接器30,配备在所述阀的一侧而紧固到所述下部模块3的连接器紧固部330;盖体31,覆盖所述阀连接器30;阀闸(valve shutter,未示出)开闭所述阀;手柄50,连接于所述阀闸的上部,随着旋转而使阀闸升降,从而对阀进行开闭。The valve section is configured to include: a valve (not shown) for controlling the supply of gas; a
在所述阀部结合有固定块510、520、530。在所述固定块510、520、530配备有第一对准部512。Fixing blocks 510, 520, 530 are coupled to the valve portion. The fixing blocks 510 , 520 , 530 are equipped with a
所述固定块510、520、530可以利用围绕所述阀部的第一固定块510、第二固定块520以及第三固定块530构成。The fixing blocks 510, 520, 530 may be formed by using a
如果通过所述第二固定块520和第三固定块530的结合而围绕所述阀部,则所述阀部中所述阀连接器30和盖体31相对于所述固定块520、530向侧方向突出而暴露,所述阀部中所述手柄50相对于所述固定块520、530向上方向突出而暴露。If the valve part is surrounded by the combination of the
所述第一固定块510构成为具有沿Y轴方向的长度的四角桶状,在所述Y轴方向的一侧面结合有所述第二固定块520,在X轴方向的一侧面配备有第一对准部512。The
所述第一对准部512可以由在所述X轴方向的一侧面凹陷地形成的对准销插入槽512构成。The
所述下部模块3形成为在能够相对于上部模块2进行水平方向移送的同时,还能够进行垂直方向的升降移送。The
所述第一对准部512构成为在下部模块3进行水平方向移送时,通过与配备在下部模块3的第二对准部351的结合而实现容器10的对准。The
所述第二对准部351可以由从后述的下部模块3的对准块350沿作为与所述对准销插入槽512相对向的方向的X轴方向突出而具有水平方向的长度的对准销351构成。The
通过使所述对准销351被插入所述对准销插入槽512,从而实现所述容器10的对准。The alignment of the
虽然本实施例中示出了第一对准部512构成为对准销插入槽,第二对准部351构成为对准销的情形,但也可以将第一对准部构成为对准销,将第二对准部构成为对准销插入槽。Although the present embodiment shows that the
并且,虽然本实施例中示出了对准销被插入到对准销插入槽的情形,但并不限于此,也可以构成为第一对准部与第二对准部紧固或者结合的情形。将所述第一对准部和第二对准部被插入、紧固、结合的方式统称为“结合”。In addition, although the present embodiment shows that the alignment pin is inserted into the alignment pin insertion groove, it is not limited to this, and it may also be configured such that the first alignment portion and the second alignment portion are fastened or combined. situation. The ways in which the first alignment part and the second alignment part are inserted, fastened and combined are collectively referred to as "combination".
在所述第一固定块510,在与所述第一对准部512相邻的位置配备有第一结合部511,并且在所述下部模块3的对准块350配备有与所述第一结合部511实现结合的第二结合部352。In the
所述第一结合部511可以由所述第一固定块510中的与形成有所述第一对准部512的面相同的面沿X轴方向凹陷地形成的固定槽511构成。The
所述第二结合部352可以由在与所述第二对准部351相邻的位置的对准块350向所述第一结合部511突出的固定块结合部件352构成。The second combining
在所述固定块结合部件352的外侧面配备有多个凸起352a,所述多个凸起352a通过配备在内部的弹簧(未示出)而被弹性支撑。在所述固定槽511的内部形成有使所述凸起352a插入的凸起插入槽(未示出)。如果所述固定块结合部件352插入到所述固定槽511,则所述凸起352a被插入到所述凸起插入槽,从而可以防止所述固定块结合部件352从所述固定槽511脱离,进而使所述下部模块3维持结合在所述第一固定块510的状态。A plurality of
在从所述固定槽511拉出所述固定块结合部件352的情形下,如果供应空气(air)而使所述凸起352a克服所述弹簧的弹性力并从固定块结合部件352的表面向内侧移动,则所述凸起352a脱离所述凸起插入槽。因此,所述固定块结合部件352能够脱离固定槽511。In the case where the fixing
在所述上部模块2可以配备有移送引导件(未示出),以能够分别向X轴、Y轴以及Z轴方向移送所述下部模块3。如果操作人员用手抓住所述下部模块3并对其沿轴方向施加力,则下部模块3可以向X轴、Y轴以及Z轴中的某一个方向被移送。并且,可以通过这种下部模块3的移送而实现第一对准部512和第二对准部351的结合,通过这种结合可以实现容器10的对准。The
在所述下部模块3配备有多个壳体311、312、313、314、盖体分离部320;连接器紧固部330、子模块移送机构340、对准块350、插塞模块360、密封垫供应部370以及密封垫移送部380。The
所述多个壳体311、312、313、314构成为包括:上部壳体311,在所述下部模块3的上部配备为板状;第一侧面壳体312、第二侧面壳体313,分别结合在所述上部壳体311的Y轴方向两侧;下部壳体314,从所述上部壳体311向下侧相隔,两侧与所述第一侧面壳体312和第二侧面壳体313结合。The plurality of
所述上部壳体311和第一侧面壳体312、第二侧面壳体313以及下部壳体314配备为围绕所述下部模块3的前后方以外的上部和下部以及两侧部。The
所述盖体分离部320从所述阀连接器30分离覆盖阀连接器30的盖体31,其中所述阀连接器30配备于所述阀部。The
所述盖体分离部320形成有槽,以使所述盖体31被插入到内部,如果在所述盖体31被插入到所述盖体分离部320的槽的状态下驱动旋转机构(未示出)而旋转所述盖体分离部320,则所述盖体31从所述阀连接器30分离。与此相反地,可以驱动所述旋转机构将从所述盖体分离部320分离的盖体31结合到所述阀连接器30。The
所述连接器紧固部330包括:连接配管连接器331,连接到气体需求处;连接配管连接器壳体332(图4),围绕所述连接配管连接器331的外侧。所述连接器紧固部330配备为能够将所述连接配管连接器331连接到所述阀连接器30。如果在所述连接器紧固部330和阀连接器30连接的状态下旋转手柄50而开放阀,则容器10内部的气体通过阀连接器30和连接配管连接器331供应至气体需求处。所述连接配管连接器331和连接配管连接器壳体332通过所述旋转机构的驱动而一起旋转。The
所述子模块移送机构340将所述盖体分离部320和连接器紧固部330一体地向左右方向(Y轴方向)和前后方向(X轴方向)移送。所述子模块移送机构340可以构成为包括:第一移送机构340a,用于将所述盖体分离部320和连接器紧固部330一体地向前后方向移送;第二移送机构340b,用于将所述盖体分离部320和连接器紧固部330一体地向左右方向移送。The
所述第一移送机构340a可以利用用于沿前后方向进行移送的移送引导件和用于通过供应空气(air)而施加移送力的气缸构成。并且,所述第二移送机构340b可以利用用于沿左右方向进行移送的移送引导件和用于通过供应空气(air)而施加移送力的气缸构成。The
所述旋转机构旋转所述盖体分离部320和连接器紧固部330。所述旋转机构包括产生旋转力的马达和减速器,并且包括用于将所述旋转力传递至所述盖体分离部320和连接器紧固部330的旋转传递部件。The rotation mechanism rotates the
所述旋转传递部件将所述旋转力分别传递到盖体分离部320和连接器紧固部330,如果驱动所述马达,则所述盖体分离部320和连接器紧固部330将同时旋转。与此不同地,所述旋转机构还可以构成为配备有两个马达,并且利用所述两个马达使所述盖体分离部320和连接器紧固部330分别旋转。The rotation transmission part transmits the rotational force to the
可以配备有前方和后方被开放,并且围绕左右和上下的内部壳体315,以能够设置所述盖体分离部320和连接器紧固部330。所述内部壳体315能够与下部壳体314的上部结合。An
所述对准块350以从所述内部壳体315的前方端部突出的方式结合,并且构成为大致的多面体形状。在所述对准块350的前方表面以向所述阀部突出的形状形成有作为第二对准部351的对准销351,在所述对准销351的侧部以向所述阀部突出的形状形成有作为所述第二结合部352的固定块结合部件352。The
参照图4说明连接配管连接器移送机构335。The connecting pipe
所述盖体分离部320和连接器紧固部330可以通过第一移送机构340a实现向前方和后方的直线移送。虽然也可以构成为驱动所述第一移送机构340a而将连接配管连接器331结合到所述阀连接器30,但由于通过所述第一移送机构340a的驱动,包括分离部320和连接器紧固部330而用于使盖体分离部320和连接器紧固部330旋转的整个构成部件会一同被移送,因此由于其重量,在将连接配管连接器331结合到阀连接器30时可能产生冲击。The
为了防止这种问题,可以构成为与第一移送机构340a独立地配备了连接配管连接器移送机构335,从而在将连接配管连接器331结合到阀连接器30的情形下,不驱动第一移送机构340a,而是驱动连接配管连接器移送机构335,以仅使连接配管连接器331沿前后方向移送。In order to prevent such a problem, it is possible to configure the connection pipe
所述连接配管连接器移送机构335可以包括:连接器卡接部件335-1,下部的一部分被插入到形成在连接配管连接器331的端部的槽(未示出),从而实现与连接配管连接器331的卡接;卡接轴335-2,卡接到所述连接器卡接部件335-1的上部并配备为能够被沿前后方向直线移送;驱动部(未示出),提供驱动力以使所述卡接轴335-2能够被沿前后方向直线移送;引导轴335-3,在所述卡接轴335-2被直线移送的情形下起到引导功能。The connecting pipe
在所述阀连接器30和连接配管连接器331彼此相邻地布置的状态下,如果驱动所述连接配管连接器移送机构335的驱动部,则所述卡接轴335-2、被卡接在所述卡接轴335-2的连接器卡接部件335-1、卡接在所述连接器卡接部件335-1的连接器331被一体地移送到后方,从而使连接配管连接器331结合到阀连接器30。In the state where the
在此情形下,连接配管连接器331可以在结合到阀连接器30时通过旋转机构的驱动而同时实现旋转。并且,由于所述盖体分离部320、用于旋转盖体分离部320和连接器紧固部330的构成部件不与所述连接配管连接器331一起被移送,因此在连接配管连接器331与阀连接器30结合时可以最小化冲击。In this case, the
此外,将移送所述连接配管连接器331的所述子模块移送机构340以及所述连接配管连接器移送机构335统称为连接配管连接器移送系统340、335。In addition, the said
参照图3和图5说明密封垫供应部370。The
所述密封垫供应部370是为了供应在更换容器10时用于安装到连接配管连接器331与阀连接器30之间的新的密封垫(gasket)的部件,包括:收纳部372,收纳多个密封垫371a;密封垫收纳部移送机构373,用于沿前后方向移送所述密封垫收纳部372。The
所述密封垫收纳部移送机构373可以构成为包括:移送引导件,引导沿前后方向的移送;驱动部,提供驱动力以能够随着所述移送引导件而被移送。The gasket storage
在所述密封垫收纳部372以竖立的状态配备有多个密封垫371a,构成为在后述的密封垫夹持器381夹持位于一侧边沿的密封垫后使其能够通过作为形成在密封垫收纳部372的开口部的密封垫排出部372a脱离。A plurality of
参照图6和图7说明密封垫移送部380。The
所述密封垫移送部380构成为包括:密封垫夹持器381,为了夹持密封垫而利用一对密封垫夹持器部件381a、381b构成;密封垫夹持器操作机构382,用于使所述一对密封垫夹持器部件381a、381b以彼此靠近或者彼此远离的方式操作;密封垫夹持器移送机构383、384,用于将所述密封垫夹持器381和密封垫夹持器操作机构382一体地移送。The
所述密封垫夹持器移送机构383、384构成为包括:第一密封垫夹持器移送机构383,用于将所述密封垫夹持器381和密封垫夹持器操作机构382一体地沿前后方向移送;以及第二密封垫夹持器移送机构384,用于将所述密封垫夹持器381和密封垫夹持器操作机构382以及第一密封垫夹持器移送机构383一体地沿左右方向移送。The gasket
所述第一密封垫夹持器移送机构383和第二密封垫夹持器移送机构384可以利用用于在前后方向和左右方向上引导移送的移送引导件和提供驱动力以能够随着所述移送引导件被移送的驱动部构成。The first gasket
并且,配备有用于分离并回收安装在阀连接器30与连接配管连接器331之间的密封垫的密封垫回收部390。Furthermore, a
此外,将移送所述密封垫371a的所述密封垫收纳部移送机构373以及所述密封垫夹持器移送机构383、384统称为密封垫移送系统373、383、384。In addition, the gasket storage
参照图3和图8说明插塞模块360。The
所述插塞模块360包括:连接器插塞361,结合在连接器紧固部330,以防止在阀连接器30和连接配管连接器331没有被紧固的状态下气体从连接配管连接器331泄露或者异物进入连接配管连接器331内部;插塞支撑部件362,用于支撑所述插塞361的端部;插塞支撑壳体363,所述插塞支撑部件362被结合而支撑;插塞移送机构364、365,用于将所述连接器插塞361和插塞支撑部件362以及插塞支撑壳体363一体地向前后方向移送。The
所述插塞移送机构364、365构成为包括:插塞移送引导件364,起到引导件功能;以及插塞移送驱动部365,提供用于将所述连接器插塞361、插塞支撑部件362以及插塞支撑壳体363一体地沿前后方向移送的驱动力。The
此外,在本发明的气体供应装置配备有控制部(未示出),所述控制部构成为有机地控制所述子模块移送机构340、旋转机构、连接配管连接器移送机构335、密封垫收纳部移送机构373、密封垫夹持器移送机构383、384以及所述插塞移送机构364、365等用于驱动本发明的气体供应装置的模块。In addition, the gas supply device of the present invention is equipped with a control unit (not shown) configured to organically control the
参照图3、图8、图9、图10说明连接器插塞361和利用其的容器更换过程。The
图9是示出所述连接器插塞361的立体图,图10是将图9所示的连接器插塞361沿水平方向截取的剖面图。FIG. 9 is a perspective view showing the
根据本发明,所述连接器插塞361为了密封连接器插塞361与所述连接配管连接器331之间的空间而在连接器插塞361与所述连接配管连接器331之间的接触部配备有密封部件S。According to the present invention, in order to seal the space between the
所述密封部件S构成为一侧在与所述连接配管连接器331接触的所述连接器插塞361的接触面成型,另一侧在与所述连接器插塞接触的所述连接配管连接器331的接触面成型,从而密封(sealing)与所述连接配管连接器331之间的空间。The sealing member S is configured such that one side is molded on the contact surface of the
所述连接器插塞361包括通过所述插塞支撑部件362支撑的插塞主体,并且形成有从所述插塞主体的后方端部沿连接器插塞361的长度方向凹陷地形成的密封部件插入槽。The
所述密封部件插入槽可以构成为形成在与所述连接配管连接器331接触的一侧的插塞主体,并且使所述密封部件S被插入所述密封部件插入槽。如果所述密封部件S被插入所述密封部件插入槽,则在所述密封部件S中,与所述连接配管连接器331接触的一侧端部配备为从所述密封部件插入槽的入口朝向所述连接配管连接器331而向外侧(后方)突出,并且在所述突出的部分的端部与所述连接配管连接器331接触而维持气密性。The sealing member insertion groove may be configured as a plug body formed on a side contacting the
所述插塞主体可以利用金属材质构成。The plug body can be made of metal material.
并且,所述密封部件S通过配备为具有较高的弹性、恢复性、耐热性、耐化学性、耐腐蚀性等性质的材质,从而替代现有技术中用于密封连接配管连接器和连接器插塞之间而安装的密封垫的作用。In addition, the sealing member S is equipped with a material with high elasticity, recovery, heat resistance, chemical resistance, corrosion resistance, etc., thereby replacing the pipe connectors and connections used in the prior art for sealing connection. The role of the gasket installed between the plugs.
例如,所述密封部件S可以利用树脂材质构成。并且,在所述树脂材质中,可以实现为聚氯三氟乙烯(PCTFE:Polychlorotrifluoroethylene)。并且,在所述树脂材质中,可以实现为聚四氟乙烯(PFTE:Poly tetra fluoroethylene)。所述PCTFE和PTFE的耐药性和机械特性优异。For example, the sealing member S may be made of a resin material. In addition, among the resin materials, polychlorotrifluoroethylene (PCTFE: Polychlorotrifluoroethylene) may be used. Also, among the resin materials, polytetrafluoroethylene (PFTE: Poly tetrafluoroethylene) can be realized. The PCTFE and PTFE are excellent in chemical resistance and mechanical properties.
并且,所述密封部件S可以利用镍构成或者利用其他金属材质构成。In addition, the sealing member S may be made of nickel or other metal materials.
所述密封部件S可以是以在现有技术中的连接器插塞成型的方式制造的,本发明的连接器插塞361可以是在现有技术中的连接器插塞贴附所述密封部件S而再加工的。The sealing member S can be manufactured in the form of a connector plug in the prior art, and the
接下来说明利用所述连接器插塞361的容器更换过程。Next, the container replacement process using the
在目前连接的容器中保管的气体被全部消耗的情形下,所述控制部通过所述连接配管连接器移送系统340、335移送所述连接配管连接器331而将其从目前连接的容器的阀连接器分离,然后通过所述密封垫夹持器移送机构383、384移送安装在所述连接部件连接器331的废密封垫而回收至所述密封垫回收部390,然后通过所述插塞移送机构364、365移送所述连接器插塞361并结合到所述连接配管连接器331。When all the gas stored in the currently connected container is consumed, the control unit transfers the connecting
此后,如果目前的容器被更换为新容器,则所述控制部通过所述插塞移送机构364、365移送所述连接器插塞361而从所述连接配管连接器331分离,之后通过所述密封垫收纳部移送机构373移送收纳在所述密封垫收纳部372的新密封垫而安装到所述连接配管连接器331,然后通过所述连接配管连接器移送系统340、335移送所述连接配管连接器331并将其结合至更换后的新容器的阀连接器。Thereafter, if the current container is replaced with a new container, the control unit moves the
即,根据本发明的利用连接器插塞361的容器更换过程与现有技术相比,通过省略在结合所述连接器插塞361与所述连接配管连接器331之前和之后安装和分离用于密封连接器插塞和连接配管连接器之间的密封垫的过程,从而缩短了密封垫更换过程,进而简化了容器更换过程。That is, the container replacement process using the
如上所述,通过根据本发明的连接器插塞361以及包括连接器插塞361的气体供应装置1,不仅可以简化容器更换过程而节省所需时间,还可以节省容器更换过程所需的自动化工序的电力,并且节省对使用电力征收的费用。As described above, with the
并且,通过缩短更换密封垫371a的更换过程,缩短更换时间而最小化连接配管暴露到外部的时间,从而可以防止气体从连接配管泄漏或者异物进入连接配管的情形。In addition, by shortening the replacement process of the
并且,可以降低所述密封垫371a的消耗量,从而降低容器更换过程所需的费用,并且提高经济性。Also, the consumption of the
如前所述,虽然以优选实施例为例详细说明了本发明,但本发明并不限于前述的实施例,可以在权利要求书和发明的详细说明以及附图的范围内进行多种变形而实施,并且这些也属于本发明。As mentioned above, although the present invention has been described in detail by taking the preferred embodiment as an example, the present invention is not limited to the foregoing embodiment, and various modifications can be made within the scope of the claims, the detailed description of the invention, and the accompanying drawings. implementation, and these also belong to the present invention.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU708590B2 (en) * | 1994-12-22 | 1999-08-05 | Walker And Gibson Pty. Limited | Self-sealing plug |
| CN2241263Y (en) * | 1995-08-03 | 1996-11-27 | 马桂池 | Valve plug |
| TW452048U (en) * | 2000-08-30 | 2001-08-21 | Iron Force Ind Co Ltd | Sealing device for pressure gas bottle |
| JP3989187B2 (en) * | 2001-04-25 | 2007-10-10 | 株式会社水道技術開発機構 | Chip discharging structure of existing pipe drilling equipment and chip discharging method of existing pipe drilling equipment |
| JP2010261577A (en) * | 2009-05-08 | 2010-11-18 | Katsura Seiki Seisakusho:Kk | Tension operative outgassing preventing type nipple joint |
| CN102448851A (en) * | 2009-05-29 | 2012-05-09 | Az电子材料(日本)株式会社 | Liquid drug delivery system and liquid drug container used in the same |
| FR2952618B1 (en) * | 2009-11-17 | 2011-11-25 | Serge Gandy | DOSING PLUG FOR CONTAINER CONTAINING PRESSURIZED FLUID AND CONTAINER HAVING SUCH PLUG |
| US10131486B2 (en) * | 2012-07-27 | 2018-11-20 | The Chemours Company Fc, Llc | Can tap |
| JP6546874B2 (en) * | 2016-04-13 | 2019-07-17 | 東京エレクトロン株式会社 | Gas supply mechanism and semiconductor manufacturing system |
| KR102035697B1 (en) * | 2017-08-02 | 2019-10-23 | 에이엠티 주식회사 | Automatic gas valve switching device and method |
| CN207298006U (en) * | 2017-08-21 | 2018-05-01 | 江苏民生重工有限公司 | A kind of cylinder for liquefied gas and its Intelligent anti-leakage safety valve |
| KR102040713B1 (en) * | 2017-10-11 | 2019-11-27 | 에이엠티 주식회사 | Automatic replacement system and method of high-pressure gas tank |
| WO2019124966A1 (en) * | 2017-12-19 | 2019-06-27 | 에이엠티 주식회사 | Method for automatically replacing high-pressure gas barrels |
| KR102074249B1 (en) * | 2018-04-04 | 2020-02-06 | 에이엠티 주식회사 | Holder with Gas Cap Outlete Prevention |
| KR102073165B1 (en) * | 2018-07-25 | 2020-02-04 | 주식회사 케이씨 | Apparatus for Replacing Gasket |
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| KR20210143138A (en) | 2021-11-26 |
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| TW202144699A (en) | 2021-12-01 |
| CN113685727A (en) | 2021-11-23 |
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