KR20120022499A - Drying equipment provided to thin film coating apparatus - Google Patents

Abstract

PURPOSE: A drying device installed at a thin film coating apparatus is provided to save spaces and to improve the mass-productivity of a film coating process by accelerating the speed of transference. CONSTITUTION: A drying device installed at a thin film coating apparatus includes upper drying chamber forming parts(7A) and lower drying chamber forming parts(7B). The upper drying chamber forming parts and the lower drying chamber forming parts are arranged on the upper and the lower sides of movable blocks(6). The blocks are adjacently arranged to be transversally connected to form upper drying chambers(5A) and lower drying chambers(5B).

Description

Drying equipment installed in thin film coating equipment {DRYING EQUIPMENT PROVIDED TO THIN FILM COATING APPARATUS}

This invention is a drying apparatus provided in the thin film coating apparatus comprised, for example to convey the film-form to-be-formed body and to form a thin film on the surface with respect to the nozzle part which discharges a coating liquid from a slit-shaped tip discharge hole, for example, It relates to the drying apparatus which dries the coated film by conveying the drying chamber which hot air blows through this finished film-form to-be-processed body.

It has a nozzle part which discharges the coating liquid supplied from a liquid supply part from a slit-shaped tip discharge hole, and discharges a coating liquid from the tip discharge hole of this nozzle part, The film-shaped object to which this nozzle part opposes this nozzle part. In the thin film coating apparatus configured to coat the coating liquid in a thin film form on the film-shaped workpiece by conveying it, the drying apparatus is provided on the downstream side of the conveyance to finish the coating. Dry the coating film.

In order to improve the mass productivity of this film coating, it is preferable to lengthen the conveyance length (dry length) of this drying apparatus, or to raise a drying function itself, and to raise a drying capability and to raise a conveyance speed.

In particular, in the case of coating on both sides of a film-shaped workpiece, after coating on one side of the workpiece, the coating film is dried, and after coating on the opposite surface, the coating film on the opposite surface is also dried. The improvement of the drying capacity by the conveyance length of each drying apparatus or the improvement of a drying function has a big influence on mass productivity.

For example, a metal film such as aluminum or copper is used as the object to be coated, and a binder (solvent such as NNP) is mixed with a positive electrode active material such as lithium cobalt acid or a negative electrode active material such as graphite on this surface. When producing the lithium ion battery forming material which coats a 100 micrometer order thin film as a coating liquid, even if coating can be performed uniformly and uniformly, mass productivity will not improve unless drying after this coating can be speedily performed.

Therefore, even if the drying function is increased as much as possible, if the conveying speed is increased in order to improve mass productivity, the drying device becomes long and large by that amount, and in the case of double-side coating, if there is no space for the long and large drying chamber, For the sake of saving, it is inevitably configured as a two-layer structure and reciprocally dried. In any case, in order to increase mass productivity, the cost is very large.

In particular, in the case of producing the lithium ion battery forming material as described above, it is strongly required to improve the mass productivity, and the conveying length (drying length) is to be carried out quickly and continuously in one step of coating, drying, opposite coating and drying. Since it is necessary to take a long time, it is necessary to build a two-layer drying apparatus for reciprocating drying in the factory as described above.

In other words, in order to increase the drying capacity by increasing the drying length and increase the conveying speed to increase the productivity, for example, a single-side drying chamber for performing hot air drying is constructed as the lower side drying chamber, and due to the space saving and the space limitation of the factory, The upper side is further framed, and the opposite side drying chamber is constructed as the upper drying chamber, and the large-scale drying apparatus of the two-layer structure is constructed in the factory, and the film-shaped coated body whose coating is finished on one side by the thin film coating apparatus provided on one side is recalled. Hot air-drying by conveying to a lower side drying chamber, and also apply | coating to the opposite surface with the thin film coating apparatus which provided the film-form to-be-drawn which exited this lower side drying chamber on the opposite side, and reciprocally conveys this film-shaped to-be-processed ( Direction) from the other side to the upper drying chamber this time, and the coating film on the other side is hot air dried, It is comprised so that the film-shaped object to be taken out may be acquired.

As described above, the upper and lower drying chambers need to be secured sufficiently long to increase the drying capacity, and this should be constructed as a two-story structure due to space saving and space limitation in the factory. There was a problem that work was required, and therefore, the speed-up and mass production of this double-sided coating was expensive.

In order to solve this problem, the present invention can improve the drying speed of the drying apparatus, improve the conveyance speed, improve the mass production of film coating, and at the same time, make the upper and lower two-layer structure to save space. It is an object of the present invention to provide a drying apparatus installed in a breakthrough thin film coating apparatus, such as facilitating construction and drastically reducing costs.

In particular, in the present invention, the drying apparatus of the conventional two-layer structure structure, which can achieve the mass savings and the space saving, and in particular the one-sided drying chamber and the opposite-side drying chamber in the case of double-sided coating as the upper and lower layer structure as before A space-saving device can be used to secure a sufficient conveying length (drying length), and a drying device capable of increasing the drying capacity is adjacent to each other in order to block blocks provided with an upper drying chamber forming unit and a lower drying chamber forming unit in advance. It can be configured by connecting them easily, and since there is no need to perform a large-scale construction work in the factory to build the upper drying chamber again after the lower drying chamber is constructed as in the prior art, the drying apparatus of this upper and lower two-layer configuration can be easily installed. It can be connected and manufactured, providing a drying device installed in the breakthrough thin film coating device that can significantly reduce costs. Aims are.

The gist of the present invention will be described with reference to the accompanying drawings.

By conveying the film-shaped to-be-shaped object 4 which opposes this nozzle part 1 with respect to this nozzle part 1, discharging a coating liquid from the front-end discharge hole 2 of the nozzle part 1, A drying apparatus provided in the thin film coating apparatus comprised so that the coating liquid may be coated in the film-form to-be-coated body 4 in a thin film form, The drying chamber which conveys and passes the film-shaped to-be-processed object 4 with which the said application | coating is complete | finished After providing a plurality of upper and lower stages, and conveying one drying chamber of 5 A of this upper side drying chambers, and 5 B of lower side drying chambers, the direction is changed and the other drying chamber is conveyed and passed through, and the said film-form to-be-processed object 4 In a drying apparatus configured to dry the coated film 3 coated on the s), a predetermined length is provided by vertically adjoining the block bodies 6 laterally above and below the movable block bodies 6 side by side. The upper side drying chamber 5A and the An upper side drying chamber forming portion 7A and a lower side drying chamber forming portion 7B, in which the side drying chamber 5B is formed upside down, are provided, and this upper side drying chamber forming portion 7A or lower side drying chamber forming portion 7B is provided. The entrance and exit part 8 which communicates with and is an exit or inlet through which the film-shaped to-be-processed object 4 conveys and passes is provided in the upper and lower sides of each said block 6, respectively, and each said block 6 ), And the apparatus is installed in a thin film coating apparatus, characterized in that the doors 8 are connected in a side-by-side manner so that the doors 8 are connected in series.

Moreover, the caster 9 is provided in the bottom part of each said block 6, and it arrange | positions so that it may move freely on the floor surface, and each said block 6 is arrange | positioned facing the said upper and lower entrances 8 in order. The drying apparatus provided in the thin-film coating apparatus of Claim 1 formed by connecting the said upper side drying chamber 5A and the said lower side drying chamber 5B of the predetermined length up and down, and connecting them so that they may be adjacently connected. will be.

Moreover, each block body 6 is the upper side which provided the hot-air introduction part 11 which introduces hot air, and the hot-air discharge part 12 which discharges this hot air in the skeleton structure 10 of the magnitude | size which can be movable ground fixed. The drying chamber forming portion 7A and the lower side drying chamber forming portion 7B are horizontally arranged vertically, and the above-described workpieces are formed at the left and right ends of the upper drying chamber forming portion 7A and the lower side drying chamber forming portion 7B. 4) provides the above-mentioned entrance and exit portion 8 through which the transfer passes, and each of the block bodies 6 is sequentially adjacent to each other so that the upper and lower entrance and exit portions 8 of the respective block bodies 6 come into contact with each other. It arrange | positions, The sealing part 7 which hot air does not leak is formed in the connection part of each block body 6, The said upper side drying chamber 5A and the said lower side drying chamber 5B are each block body 6 According to claim 1 or 2, characterized in that formed by joining the predetermined length up and down by the connection of The present invention relates to drying apparatus which is installed in the thin-film coating apparatus.

In addition, one drying chamber of the upper side drying chamber 5A and the lower side drying chamber 5B is used as a single-sided drying chamber for drying the coated film 3 coated on one side of the film-like object to be coated 4. The other drying chamber is further coated on the opposite surface of the film-shaped to-be-processed body 4 after this drying is complete, and the coating of the opposite surface of the film-shaped to-be-processed body 4 by which this coating was complete | finished. The upper side drying chamber 5A and the lower side drying chamber 5B which serve as a drying chamber of the upper and lower layers which dry this film | membrane 3 as the other side drying chamber which dry this both surfaces, and the said block body 6 are plural It is related with the drying apparatus provided in the thin film coating apparatus of Claim 1 or 2 characterized by the structure formed by joining up and down by connecting in a parallel state.

In addition, one drying chamber of the upper side drying chamber 5A and the lower side drying chamber 5B is used as a single-sided drying chamber for drying the coated film 3 coated on one side of the film-like object to be coated 4. The other drying chamber is further coated on the opposite surface of the film-shaped to-be-processed body 4 after this drying is complete, and the coating of the opposite surface of the film-shaped to-be-processed body 4 by which this coating was complete | finished. The upper side drying chamber 5A and the lower side drying chamber 5B which serve as a drying chamber of the upper and lower layers which dry this film | membrane 3 as the other side drying chamber which dry this both surfaces, and the said block body 6 are plural It is related with the drying apparatus provided in the thin film coating apparatus of Claim 3, Comprising: It formed the structure which joined together up and down by connecting in a row state.

Since this invention is comprised as mentioned above, this drying apparatus which should make a top and bottom two-layer structure for space saving etc. while improving the drying ability of a drying apparatus, improving a conveyance speed, and improving the mass productivity of a film coating, etc. It becomes a drying apparatus installed in the breakthrough thin film coating apparatus, such as making it easy to implement | achieve and reducing the cost dramatically.

That is, a drying apparatus capable of securing a sufficient conveying length (drying length) and increasing drying capacity while conserving space is provided by adjoining block bodies provided with upper and lower drying chamber forming sections and lower and lower drying chamber forming sections in advance. Since it can be configured by connecting, it is not necessary to carry out large-scale construction work in the factory after constructing the lower side drying chamber as in the prior art, and it is easy to connect the upper and lower two-layer constitution apparatus. It is possible to produce a drastically reduced cost, and thus a drying apparatus installed in a groundbreaking thin film coating device with extremely high practicality that can easily realize the present device having excellent mass productivity.

Moreover, in invention of Claim 2, 3, it becomes the drying apparatus provided in the groundbreaking thin film coating apparatus which is further excellent in practicality which can implement | achieve this invention easily by further simpler and easier structure easily.

In addition, in the invention of Claims 4 and 5, the double-sided coating device that exhibits the above-described effects and effects, and performs one-side coating, drying, opposite-side coating and drying, can be easily realized, and the cost reduction can be drastically reduced. It becomes the drying apparatus installed in the extremely excellent double-sided thin film coating apparatus.

1 is a schematic configuration explanatory diagram of this embodiment.
2 is a schematic configuration explanatory cross sectional view of a part of the present embodiment.
3 is an explanatory perspective view of the main part of the present embodiment.

EMBODIMENT OF THE INVENTION Embodiment of this invention considered to be preferable is demonstrated based on drawing of the action of this invention based on drawing.

The film-shaped to-be-adhered body 4 by which the coating was completed by the thin-film coating apparatus passes the upper and lower drying chambers (upper side drying chamber 5A and lower side drying chamber 5B) reciprocally, and this surface of the to-be-coated object 4 The coating film 3 formed in the coating is dried.

That is, the hot air sent from the hot air introduction part 11 provided in each drying chamber drys the coating film 3 of the to-be-processed object 4, and this hot air is discharged | emitted from the said hot air discharge part 12 to the exterior of the drying chamber.

For example, even if vaporized gas of the property which has explosiveness or cannot be discharged to the outside of a drying chamber from the coating film 3 as it is without operation | movement generate | occur | produces it, it always discharges this from the hot air discharge part 12 with hot air, By drying, vaporization gas is prevented from becoming a dangerous concentration in a drying chamber.

In addition to the surface drying by the hot air, a heater 13 such as an IR heater that is heated and dried from the inside may be further provided.

In this way, the conveyance speed can be increased by increasing the drying function in the drying chamber. However, such a function up alone is not sufficient. Therefore, in order to further improve the drying capacity, the conveying length (dry length) is secured to further increase the drying capacity. It is desirable to achieve mass productivity by increasing the conveyance speed. Therefore, as described above, the drying chamber is lengthened horizontally, and in order to save space, it is necessary to have a two-layer structure. Since drying chambers of sufficient length are required for drying the respective coated surfaces, it is necessary to use a longer and larger drying apparatus. Therefore, it is necessary to have a two-layer structure due to space saving and space limitation of a factory.

Conventionally, such a two-layer construction apparatus had to build a lower side drying chamber and further provide a skeleton thereon to build the upper side drying chamber in a stacked state, which required large-scale construction work in the factory.

However, according to the present invention, the compact block 6 that is movable, that is, the pressure slide is suspended freely or easily along the floor surface. The block body 6 of the size which conveyance is freely produced is produced previously, and it is comprised so that it may be made to a desired drying length by connecting it in the field (in-house) as needed.

That is, the upper side drying chamber formation part 7A and the lower side drying chamber formation part 7B are provided above and below each block body 6 set to the magnitude | size which this movement is possible, and this block body 6 is turned side by side. The upper side drying chamber 5A and the lower side drying chamber 5B of the drying length which can raise a conveying speed for improving a desired length, ie, mass productivity, by connecting them adjacently to each other in parallel, and forming a parallel arrangement I am made to become the composition.

If it continues, the entrance part 8 used as the exit or inlet which the said film-form to-be-processed object 4 conveys will be provided in the upper and lower sides of each said block 6, respectively, and each said block 6 ) And move sideways adjacent to each other side by side in a row so that the respective entrances and exits 8 are connected in series, and the upper side drying chamber 5A and the lower side drying chamber 5B of the desired length are connected up and down. It is set as the structure formed in parallel.

Therefore, there is no need to perform a large-scale construction work in the factory after constructing the lower side drying chamber after the lower side drying chamber as in the prior art, and the block body 6, which is a mass produced movable joining part, is pre-fabricated in the factory. By transporting and connecting them in turn, it is possible to easily connect and manufacture a drying device having a desired length in both the upper and lower drying chambers in this upper and lower two-layer constitution, thereby dramatically reducing the cost, and thus, the device having excellent mass productivity. It becomes a drying apparatus installed in the breakthrough thin film coating apparatus which can be easily realized.

[Example]

EMBODIMENT OF THE INVENTION The specific Example of this invention is described based on drawing.

In this embodiment, the film-shaped to-be-drawn object 4 taken out from the winding-up roll 17 is pulled out and conveyed through the support roll 15 etc. which oppose the nozzle part 1 for coating, and this nozzle part After discharging the coating liquid from the tip discharging hole 2 of (1) and coating the coating liquid on one side of the object to be supported 4 by the supporting roll 15, the lower side drying chamber of the drying apparatus. (5B) is passed through the horizontal conveyance and dried, and after continuing coating on the opposite surface by the same thin film coating apparatus continuously as it is to this film-shaped to-be-applied body 4, reciprocating conveyance (direction switching) and drying This invention is applied to the said drying apparatus provided in the double-sided thin film coating apparatus which winds 5 A of upper side drying chambers of a apparatus horizontally, and further dries and winds around the said collection roll 18.

That is, this drying apparatus of this embodiment has a two-layer upper and lower structure, and discharges the coating liquid from the tip discharging hole 2 of the nozzle unit 1 while the film-shaped object to be opposed to the nozzle unit 1 is formed. By conveying (4) with respect to this nozzle part 1, the thin film coating apparatus comprised so that the coating liquid may be applied to the film-form to-be-processed object 4 in thin film form, and each thin film coating apparatus is provided. It is set as the structure which provided the drying chamber which conveys and passes the film-form to-be-processed object 4 which coat | finished by one side and the opposite surface in order in order up and down.

Specifically, in this embodiment, a single-sided drying chamber which receives, transports and dries the film-shaped object 4 coated on one side with a thin film coating apparatus provided on one side, and a thin film coating on the opposite side provided on the opposite side. A drying apparatus is provided with an upside down drying chamber for receiving and conveying the to-be-coated body 4 coated on the other side by means of an apparatus, wherein one of the upper side drying chamber 5A and the lower side drying chamber 5B is After conveying it as a single-sided drying chamber, the direction is changed, the other drying chamber is conveyed as an opposite surface drying chamber, and the coating film 3 coated on both surfaces of the said film-form to-be-adhered body 4 is continuously dried in order. It is configured to

In the present embodiment, a small block 6 that is movable, i.e., a block 6 as a drying device forming part having a size freely or easily hung by a sliding slide along the floor surface, is provided. It is manufactured in advance, and it is structured so that it can be made to a desired drying length by connecting them together in a site (in-house) as needed.

That is, the upper side drying chamber forming part 7A and the lower side drying chamber forming part 7B are provided above and below each block body 6 set to this movable size, and this block body 6 is turned to the side one by one. The upper side drying chamber 5A and the lower side drying chamber 5B of a drying length which can raise a conveyance speed for improvement of a desired length, ie, mass productivity, by connecting adjacently and connecting in multiple rows state are formed in parallel with each other. I am doing it.

In addition, the entrance part 8 which is connected to this upper side drying chamber formation part 7A and the lower side drying chamber formation part 7B, respectively, becomes an exit or entrance through which the film-shaped to-be-processed object 4 conveys and passes through. Each block body 6 is provided above and below each side of each said block body 6, and each block body 6 is arrange | positioned adjacently in order so that the up-and-down entrance part 8 of each block body 6 may mutually connect, and this is connected, A seal portion 7 is formed in the connecting portion of each block body 6 so that hot air does not leak, and the upper side drying chamber 5A and the lower side drying chamber 5B are connected to each of the block bodies 6. It is set as the structure formed by joining the predetermined length up and down by this.

For example, the doors 8 may be arranged to face each other with the side surfaces of the block 6, and may be connected to each other by fastening them by engaging them or by locking them by pressing the packing part. It is good also as a structure which winds up this butt | sealed state (seamless seam) with tape, etc., and connects it. In the embodiment described later, the packing part 7 as the seal part 7 is provided in the protruding state so as to surround the entrance and exit part 8, and the packing part 7 is pressed to face each of the block bodies 6 so that a tape or the like is applied. We wind up and assume constitution that fixed more.

In addition, in this embodiment, the casters 9 are provided at the bottom of each block body 6 so as to be freely slideable on the floor surface, and the respective block bodies 6 are sequentially pressed and adjacent to each other. The doors 8 are arranged so as to face each other (to be connected to each other) by forming the seals therein. For example, as described above, the side surfaces around the doors 8 as the seals 7 are formed. Press the packing part 7 which protruded, and connect this butt | coupled part by winding, sealing, and fixing by sticking, and attaching, and by this connection, each upper side drying chamber formation part of each block body 6 up and down by this connection. The upper side drying chamber 5A of the predetermined length and the lower side drying chamber 5B are formed in a line by 7A and 7B of lower side drying chamber formation parts.

In addition, each block body 6 of the present embodiment has a hot air inlet portion 11 for introducing hot air into the skeletal structure 10 set to a size easy to transport to each factory to be installed, and a hot air discharge portion for discharging the hot air. The upper side drying chamber forming portion 7A and the lower side drying chamber forming portion 7B provided with (12) are formed side by side horizontally, and the upper side drying chamber forming portion 7A and the lower side drying chamber forming portion 7B are formed. The entrance and exit part 8 through which the to-be-coated object 4 conveys is provided in the left and right both ends, and after carrying in a factory, it slides along the floor surface by the lower caster 9, and each block body ( Each of the block bodies 6 are arranged adjacent to each other in turn so that the upper and lower entrance and exit portions 8 of 6) are in contact with each other, so that the hot air is not leaked to the connecting portions of the respective block bodies 6. ) To form a connection.

After the connection, the ground leg 19 is extended so as to be grounded and fixed.

In addition, in the present embodiment, as described above, the hot air introduction portion 11 for sending hot air to the upper drying chamber forming portion 7A and the lower drying chamber 7B of each block body 6 and the hot wind discharge for discharging the hot air. The part 12 is provided, heat-drys the surface of the coating film 3 with the hot air blown from this hot air introduction part 11, and this hot air drying hot air is dried with the vaporization gas which generate | occur | produces from this coating film 3 The hot air discharge unit 12 is configured to discharge to the outside of the drying chamber.

In the present embodiment, in combination with this hot air drying, the heating heater 13 for drying the inside of the coating film 3 by radiant heat to enhance the drying function is placed in a state opposite to the film-shaped object to be coated 4. The heater heater 13 for drying is not formed as a plate, but a plurality of heater rod-shaped portions 14 are arranged in the plane direction of the workpiece 4 with a ventilation gap through which the hot air passes. In one configuration, the film-like workpiece 4 does not approach the position where it contacts when film vibration occurs, but it is as close as possible while considering the hot air drying and the risk of explosion caused by vaporized gas. And drying by radiant heat are used together, and the drying ability is improved further.

In more detail, the present embodiment uses, for example, a metal film made of, for example, aluminum or copper, as the object to be coated 4, and a positive electrode active material such as lithium cobalt acid, graphite, or the like on the surface thereof. A thin film coating apparatus for producing a lithium ion battery forming material which mixes a binder (a solvent such as NNP) and the like with a negative electrode active material and forms a thin film of 100 µm order on both sides as a coating liquid. It is a drying apparatus which arrange | positioned the upper side drying chamber 5A and the lower side drying chamber 5B which are respectively provided in the conveyance downstream of a thin film coating apparatus in two stages up and down.

In this embodiment, each of the drying chambers 5A, 5B is divided into a plurality of blocks by each block body 6, and each of them is formed so as to be formed in succession to the doorway section 8, and each of the block drying chambers is conveyed upstream. A support roller 20 having a hot air inlet 11 for sending hot air toward the direction and a pair or a plurality of hot air discharge parts 12 on the opposite side to face the hot air inlet 11 and provided below the block drying chamber. The film-like workpiece 4 is supported to be transported through the drying chamber and conveyed. The hot air is blown from the hot air inlet 11 to the hot air outlet 12 at the upper portion of the drying chamber. The coating film 3 formed on the upper surface of the to-be-processed object 4 is hot-air dried, and it arrange | positions in parallel with the to-be-processed object 4 in the state which adjoins this to-be-processed object 4, and is arrange | positioned. A plurality of the heater rod shape 14 The drying heater portion 13 formed above is disposed above the object to be coated 4, and hot air comes and goes through the ventilation gap between the heater rod-shaped portions 14 and the object to be coated 4 below. It is comprised so that it may blow into the coating film 3 of this.

Although not shown, hot air blowing from the hot air inlet 11 is applied to the object 4 through the ventilation gap, such as to form a hot air wind in the heater rod 14. The wind is guided toward the membrane 3 so that the drying heater unit 13 can be approached to increase the efficiency, thereby reliably sending hot air to the coating film 3 to hold the vaporized gas while maintaining hot air drying. It is configured to exhaust with no hot air.

In addition, the heater rod 14 includes a heat source such as a heating wire, or distributes a high temperature medium such as high temperature steam or oil, and emits infrared rays from the surface (ceramic) by the heat to an infrared heater (IR heater). Doing.

Specifically, in the present embodiment, the pipe through which the high temperature water vapor flows is formed of ceramic or the ceramic is coated, and the heater rod 14 is folded back at the end portion so as to cover a predetermined range of the object to be coated 4. The coating film 3 is covered with a plurality of parallel heater rod-shaped portions 14 which are folded back, and high-temperature water vapor is flowed through each of the heater rod-shaped portions 14 which are connected in succession. It consists of IR heater of the retracting rod shape part parallel type which heat-drys also from the inside.

In other words, it is not a plate-shaped IR heater, but an IR heater of a type in which a plurality of heater rod-shaped portions 14 are connected to each other to be reversed by inverting the left and right through the high temperature water vapor and radiating infrared rays from the surface. The length of each heater rod-shaped portion 14 is in a direction perpendicular to the conveying direction of the to-be-coated body 4 so as to be parallel to the conveying direction of the to-be-coated body 4, and the to-be-coated body 4 It is set as the structure arrange | positioned adjacently in the state opposite to the upper side of).

In addition, in the present embodiment, the drying heater connected to the hot air introduction portion 11 connecting the hot air introduction and discharge ducts, the hot air discharge portion 12, and the hot medium introduction and discharge pipes such as the IR heater. The part 13 is made into the structure provided in the opening-closing cover 16 which opens and closes each upper side drying chamber formation part 7A, and the lower side drying chamber formation part 7B of each block body 6. As shown in FIG.

Therefore, by opening and closing this opening and closing cover 16, the hot air introduction part 11, the hot air discharge part 12, and the heater part 13 which were provided in this opening and closing cover 16 with this opening and closing cover 16 move. Each of the lower rollers 20 is exposed, so that the rollers 20 can be easily replaced, or the upper drying chamber forming portion 7A and the lower drying chamber forming portion 7B can be easily cleaned. After this maintenance, it is possible to easily carry out a passing operation of passing the film-shaped to-be-processed object 4 over each of the supporting rollers 20 again.

In addition, this invention is not limited to an Example, The specific structure of each structural requirement can be designed suitably.

1 nozzle part
2 tip discharge part
3 coating film
4 Subject
5A upper side drying chamber
5B lower side drying chamber
6 block
7 days
7A Upper side drying chamber forming part
7B lower side drying chamber forming part
8 entrance
9 castors
10 skeleton constructs
11 hot air inlet
12 hot air outlet

Claims (5)

While discharging the coating liquid from the discharging hole at the tip of the nozzle portion, the film-shaped object to be opposed to the nozzle portion is conveyed with respect to the nozzle portion so as to coat the coating liquid in the thin film form on the film-shaped object to be coated. As a drying apparatus provided in the configured thin film coating apparatus, the drying chamber which conveys the film-form to-be-processed object which passed said coating is provided up and down in multiple stages, and the one drying chamber of this upper side drying chamber and the lower side drying chamber was conveyed and passed. Then, in the drying apparatus configured to dry the coated film coated on the film-shaped to-be-transformed body by conveying and passing the other drying chamber afterwards, this block body is adjoining laterally above and below the movable block body. The upper side drying chamber and the lower side drying chamber of a predetermined length are formed in parallel to each other in a row Is provided with an upper side drying chamber forming portion and a lower side drying chamber forming portion, each of which is connected to the upper side drying chamber forming portion or the lower side drying chamber forming portion and is an outlet or an entrance portion through which the film-shaped object to be conveyed passes. It is provided in each of the upper and lower sides of the block body, each of the block body is moved side by side adjacent to each other in order to be connected in a row state so that each of the entrance and exit portion connected to the drying apparatus installed in the thin film coating apparatus. 2. The caster according to claim 1, wherein a caster is provided at the bottom of each block body so as to move freely on the floor surface, and the block bodies are sequentially connected to each other so that the upper and lower doors face each other and are arranged upside down. And an upper side drying chamber of the length and the lower side drying chamber. 3. The upper drying chamber forming portion and the lower portion according to claim 1 or 2, wherein each block member has a hot air introduction portion for introducing hot air and a hot air discharge portion for discharging the hot air in a skeleton structure having a size capable of moving grounding fixing. The side drying chamber forming part was formed horizontally up and down, and the said door part which the said to-be-transmitted body conveys is provided in the left and right both ends of this upper side drying chamber formation part and the lower side drying chamber formation part, and the upper and lower entrance part of each block body, respectively Each block body is arranged adjacent to each other so as to be in contact with each other, and is formed in succession, and a seal portion where hot air is not leaked is formed at a connection portion of each block body, and the upper side drying chamber and the lower side drying chamber are connected to each block body. Drying apparatus provided in the thin-film coating apparatus characterized by forming the joint by the predetermined length up and down by this. The one drying chamber of the said upper side drying chamber and the said lower side drying chamber is a single side drying chamber which dries the coating film coated on the single side | surface of the said film-form to-be-coated object, The other drying chamber of Claim 1 or 2 The coating film on the opposite side of the film-shaped to-be-finished body after this drying is complete is made into the opposite surface drying chamber which dries the coating film of the opposite surface of the said film-form to-be-finished body, and this both surfaces The upper side drying chamber and the lower side drying chamber which become the drying chamber of the upper and lower two layers which dry the structure are formed by connecting the said block body in the parallel direction, and forming it in the up-and-down connection structure, It installed in the thin film coating apparatus characterized by the above-mentioned. Drying device. The drying chamber according to claim 3, wherein one drying chamber of the upper side drying chamber and the lower side drying chamber is used as a single-side drying chamber for drying the coated film coated on one side of the film-shaped object to be coated, and the other drying chamber is dried. Is further coated on the opposite surface of the film-shaped to-be-finished object, and it is set as the reverse surface drying chamber which dries the coating film of the opposite surface of the said film-form to-be-finished object, and this top and bottom which dry this both surfaces The upper side drying chamber and the lower side drying chamber which become a two-layer drying chamber were formed by connecting the said block body in the state of a plurality of rows, and connecting them up and down, and installing them in the thin film coating apparatus characterized by the above-mentioned.

Images