JP5277218B2 - Dryer provided in thin film coating equipment - Google Patents

Description

  The present invention, for example, a thin film coating configured to convey a film-like object to be coated and to form a thin film on the surface thereof with respect to a nozzle portion that discharges a coating liquid from a slit-like tip discharge hole The present invention relates to a drying apparatus provided in an apparatus, which relates to a drying apparatus that dries a coating film by transporting and passing a film-like object to be coated through a drying chamber into which hot air is sent.

  It has a nozzle part that discharges the coating liquid supplied from the liquid supply part from the slit-like tip discharge hole, and discharges the coating liquid from the tip discharge hole of this nozzle part while facing this nozzle part In the thin film coating apparatus configured to apply the coating liquid to the film-shaped coated body in a thin film shape by transporting the coated body to the nozzle portion, the transport downstream A drying apparatus is provided on the side to dry the coating film of the film-like object to be coated.

  In order to improve the mass productivity of this film coating, it is desirable to increase the drying capability and increase the conveying speed by increasing the conveying length (drying length) of the drying device or increasing the drying function itself.

  In particular, when coating on both sides of a film-like substrate, the coating film is dried once after coating on one side of the substrate, and then coated on the opposite side after coating on the other side. Since the film is also dried, the improvement in drying capacity by improving the transport length and drying function of each drying apparatus has a greater impact on mass productivity.

  For example, a metal film such as aluminum or copper is used as an object to be coated, and a positive electrode active material such as lithium cobaltate or a negative electrode active material such as graphite is mixed with a binder and a solvent such as NMP on the surface. When producing a lithium-ion battery forming material that forms and forms a thin film of the order of 100 μm as a working solution, even if the coating can be performed quickly and uniformly, if the drying after this coating cannot be performed quickly, the mass productivity is improved. Not.

  Therefore, even if the drying function is enhanced as much as possible, if the conveying speed is increased to increase the mass productivity, the drying apparatus becomes longer and larger in size, and for double-sided coating, this long and large drying chamber is connected to the side. In the case where there is not, there is no choice but to use a two-story structure for the purpose of space saving and a structure that is folded back and dried. In any case, in order to increase mass productivity, the size is increased and the cost is very high.

  In particular, when producing lithium ion battery forming materials as described above, improvement in mass productivity is strongly desired, and we want to perform a single-side coating, drying, opposite-side coating, and drying process in a speedy manner. Since it is necessary to take a long conveying length (drying length), it is necessary to construct a two-story drying device that folds and dries in the factory as described above.

  In other words, in order to ensure a long drying length, increase drying capacity, increase transport speed, and increase mass productivity, for example, a single-sided drying room that performs hot air drying is constructed as the lower drying room, saving space and limiting the factory space. Then, the upper part is further framed and the opposite-side drying chamber is constructed as the upper drying chamber, a two-story large-scale drying device is built in the factory, and coating is performed on one side by a thin-film coating device provided on one side. A thin film coating apparatus in which the finished film-like coated body is passed through the lower drying chamber and dried with hot air, and then the film-like coated body passing through the lower drying chamber is provided on the opposite side. Apply the coating on the opposite side, turn the film-like object back (conversion), pass it from the opposite side to the upper drying chamber, and dry the coating film on the opposite side with hot air. Take up this film-like coated body It is configured so as.

  As described above, the upper and lower drying chambers need to be secured long enough to increase the drying capacity, and must be constructed in two floors to save space and to limit space in the factory. Therefore, each factory requires a large-scale construction work, and thus there is a problem that it is very costly to speed up and mass-produce this double-side coating.

  In order to solve such problems, the present invention can increase the drying capacity of the drying device to increase the conveyance speed and improve the mass productivity of the film coating, and has a two-layer structure for the purpose of space saving. It is an object of the present invention to provide a drying apparatus provided in an epoch-making thin film coating apparatus that facilitates the construction of the drying apparatus that must be provided and can dramatically reduce costs.

  In particular, in the present invention, the conventional two-story drying device that improves mass productivity and saves space, particularly the single-sided drying chamber and the opposite-side drying chamber in the case of double-sided coating, as the upper and lower layer structure as before. In addition, a drying device capable of securing a sufficient transport length (drying length) and improving the drying capacity while saving space is provided with an upper drying chamber forming portion and a lower drying chamber forming portion in the vertical direction in advance. It can be configured by connecting block bodies side by side one after another, and it is not necessary to perform large-scale construction work in the factory such as constructing a lower drying chamber and constructing an upper drying chamber as in the past, easily An object of the present invention is to provide a drying apparatus provided in an innovative thin film coating apparatus which can connect and manufacture the drying apparatus having the upper and lower two-layer structure and can drastically reduce the cost.

  The gist of the present invention will be described with reference to the accompanying drawings.

While discharging the coating liquid from the tip discharge hole 2 of the nozzle part 1, the film-like coated body 4 facing the nozzle part 1 is transported to the nozzle part 1, whereby the film-like coated object is obtained. A drying device provided in a thin film coating apparatus configured to apply a coating liquid to a work body 4 in a thin film shape, wherein the drying chamber is configured to convey and pass the film-shaped coated body 4 that has been coated. Are provided in a plurality of upper and lower stages, transported and passed through one of the upper drying chamber 5A and the lower drying chamber 5B, then changed in direction and transported through the other drying chamber. In the drying apparatus configured to dry the coating film 3 applied to the work body 4, one of the upper drying chamber 5 </ b> A and the lower drying chamber 5 </ b> B is set as the film-shaped coated body 4. One side drying chamber for drying the coating film 3 coated on one side of the other side is used as the other drying chamber. The other surface of the film-like coated body 4 that has been dried is further coated on the opposite surface, and the coating film 3 on the opposite surface of the film-shaped coated body 4 that has been coated is dried. The upper drying chamber 5A having a predetermined length and the lower drying are configured by connecting the block bodies 6 to each other in a row in a row, on the upper and lower sides of the movable block body 6 one after the other. The upper drying chamber forming portion 7A and the lower drying chamber forming portion 7B, in which the chambers 5B are formed side by side, are arranged side by side, and each block body 6 has a frame structure 10 of a size that can be fixed to the moving ground. In addition, the upper drying chamber forming portion 7A and the lower drying chamber forming portion 7B provided with the hot air introducing portion 11 for introducing hot air and the hot air discharging portion 12 for discharging the hot air are horizontally arranged in parallel, The left and right ends of the upper drying chamber forming portion 7A and the lower drying chamber forming portion 7B Each of the block bodies 6 is arranged next to each other so that the upper and lower entrance / exit sections 8 of the block bodies 6 communicate with each other. Then, a seal portion 7 that prevents hot air from leaking is applied to the connecting portion of each block body 6 to be connected in a plurality of rows, and the upper drying chamber forming portion 7A of each block body 6 and the lower side of each block body 6 The upper drying chamber 5A and the lower drying chamber 5B, which serve as two upper and lower drying chambers for drying both surfaces of the film-like object 4 by joining the drying chamber forming section 7B, respectively. The upper drying chamber forming portion 7A and the lower drying chamber forming portion 7B, which are arranged side by side vertically, are juxtaposed above and below the respective block bodies 6, and the opening / closing lid 16 is exposed when the lower portion is exposed. And open the open / close lid 16. Each of the support rollers 20 that support the film-like coated body 4 below is exposed, and the support rollers 20 can be replaced or cleaned in the upper drying chamber forming portion 7A and the lower drying chamber forming portion 7B. In addition, the film can be passed through the film-form coated body 4 on the support roller 20 in the upper drying chamber forming portion 7A and the lower drying chamber forming portion 7B. within the lid 16, the hot air introduction portion 11 for introducing the hot air is provided, the hot air introduction portion 11 is a structure provided on the end portion and the intermediate portion in the lid 16, even in this lid 16 In addition to the hot air drying by the hot air sent from the hot air introducing section 11 provided at the plurality of locations, a drying heater section 13 is provided for heating and drying the coating film 3 of the film-like object 4 by radiant heat, The heater 13 for drying passes the hot air. Through the air-passing clearances plurality of heater bar-like portion 14, the film-shaped proximate face the object to be coated member 4 film-like object to be coated member for transporting the supporting rollers 20 on the time of closing the lid 16 4 relates to a drying apparatus provided in a thin film coating apparatus characterized by being arranged in parallel in the plane direction.

  Further, casters 9 are provided at the bottom of each block body 6 so as to be movable on the floor surface, and the block bodies 6 are connected side by side so that the upper and lower entrance / exit portions 8 face each other one after another. 2. The drying apparatus provided in the thin film coating apparatus according to claim 1, wherein the upper drying chamber 5A and the lower drying chamber 5B having a predetermined length above and below are joined and formed side by side.

  Since the present invention is configured as described above, it is possible to increase the drying capacity of the drying device to increase the conveyance speed and improve the mass productivity of the film coating, and to make the upper and lower two-layer structure to save space. This drier becomes a drier provided in an innovative thin film coating apparatus that facilitates the construction of this drier and can dramatically reduce costs.

That is, a drying apparatus that can secure a sufficient transport length (drying length) and increase the drying capacity while saving space is provided in advance with an upper drying chamber forming portion and a lower drying chamber forming portion. It is easy to configure by connecting adjacent blocks one after the other, and it is not necessary to perform large-scale construction work in the factory, such as building a lower drying chamber and building an upper drying chamber as before. The two-layered drying device can be connected and manufactured, and the cost can be drastically reduced. This makes it easy to realize a double-sided coating device that performs single-sided coating, drying, opposite-side coating, and drying processes. This is a drying device provided in an extremely excellent double-sided thin film coating apparatus capable of drastically reducing costs.

Further, the upper drying chamber forming portion and the lower drying chamber forming portion arranged in parallel above and below each block body are each provided with an opening / closing lid that exposes the lower side when opened, and the opening / closing lid is opened. Since each of the supporting rollers for supporting the film-like object to be coated is exposed, the supporting roller can be replaced or the upper drying chamber forming portion and the lower drying chamber forming portion can be cleaned. The film passing operation for supporting the film-form coated body on the support roller in the upper drying chamber forming portion and the lower drying chamber forming portion can be easily performed.

Further, yet the present invention is the opening and closing inner lid, said hot air introduction portion for introducing the hot air is provided, the hot air introducing portion is a structure in which the end portion and the intermediate portion in the lid, this lid Further, in addition to hot air drying by hot air sent from the hot air introducing portion provided in the plurality of places, a drying heater unit is provided for drying the coating film of the film-like object by radiant heat. The heater part is close to and opposed to the film-like object to be transported on the support roller when a plurality of heater bar-like parts closes the opening / closing lid through a ventilation gap through which the hot air passes. Therefore, the drying apparatus is provided in an excellent double-sided thin film coating apparatus that further improves the drying ability.

In the invention of claim 2 Symbol placement, the drying apparatus provided in breakthrough film coating device more excellent in practicality can be easily realized further the invention in more simple structure.

It is schematic structure explanatory drawing of a present Example. It is some schematic structure explanatory sectional drawing of a present Example. It is a description perspective view of the principal part of a present Example.

  An embodiment of the present invention which is considered to be suitable will be briefly described with reference to the drawings showing the operation of the present invention.

  The film-like coated body 4 that has been coated by the thin film coating apparatus is folded and passed through the upper and lower drying chambers (the upper drying chamber 5A and the lower drying chamber 5B) to pass through the surface of the coated body 4 The coating film 3 formed by coating is dried.

  That is, the coating film 3 of the object to be coated 4 is hot-air dried by hot air sent from the hot-air introduction unit 11 provided in each drying chamber, and this hot air is discharged from the hot-air discharge unit 12 to the outside of the drying chamber.

  For example, even if a vaporized gas is generated from the coating film 3 that has explosive properties or cannot be exhausted as it is, it is dried by hot air while always discharging it from the hot air discharge section 12 together with hot air. The vaporized gas is prevented from reaching dangerous concentrations in the drying chamber.

  Further, in addition to the surface drying by the hot air, a heater unit 13 such as an IR heater for heating and drying from the inside may be further provided.

  In this way, it is possible to increase the transport speed by increasing the drying function in the drying chamber. However, it is not enough to improve the drying function. To further improve the drying capacity, a long transport length (drying length) is ensured. Therefore, it is desirable to further improve the drying capacity and increase the conveyance speed to achieve mass productivity. Therefore, as described above, the drying chamber is horizontally long, and it is necessary to make two floors for space saving. Thus, in double-sided coating, a drying chamber with a length sufficient for drying each coated surface is required, so it is necessary to use a longer drying device. It needs to be two stories.

  Conventionally, such a two-story drying apparatus has to construct a lower drying chamber and then provide a frame on it to build the upper drying chamber in a stacked state, which requires extensive construction work in the factory. Cost.

  However, according to the present invention, a small block body 6 that can be moved, that is, a block body 6 that has a size that can be pushed and slid along the floor surface or that can be easily lifted and conveyed, is manufactured in advance. It is configured so that it can be joined and connected at the site (in the factory) to achieve the desired dry length.

  That is, an upper drying chamber forming portion 7A and a lower drying chamber forming portion 7B are provided above and below each block body 6 set to a movable size, and a plurality of block bodies 6 are arranged side by side in succession. As a configuration in which the upper drying chamber 5A and the lower drying chamber 5B having a desired length, that is, a drying length capable of increasing the conveyance speed for improving mass productivity by connecting in a row state, are vertically joined together. Yes.

  More specifically, an entrance / exit 8 serving as an exit or entrance through which the film-like coated body 4 passes is provided on both upper and lower sides of each block body 6, and each block body 6 is moved side by side. The upper and lower drying chambers 5A and 5B having the desired length are joined and formed in a row in the horizontal direction so that the respective inlet / outlet portions 8 communicate with each other.

  Therefore, the block body which is a movable joint part mass-produced in advance without the need to perform large-scale construction work in the factory, such as constructing the lower drying chamber and constructing the upper drying chamber as in the prior art. By bringing the 6s into the factory and connecting them one after another, it is easy to connect and produce the desired length of drying equipment in both the upper and lower drying chambers in this upper and lower two-layer configuration. It becomes a drying apparatus provided in an epoch-making thin film coating apparatus that can easily realize this apparatus having higher mass productivity.

  Specific embodiments of the present invention will be described with reference to the drawings.

  In this embodiment, the film-like object 4 pulled out from the take-up roll 17 is drawn out and conveyed through a support roll 15 facing the coating nozzle part 1 and the tip discharge hole of the nozzle part 1. After the coating liquid is discharged from 2 and this coating liquid is applied to one surface of the object 4 supported by this support roll 15, it is horizontally conveyed through the lower drying chamber 5B of the drying device. The film-like coated body 4 passed through and then continuously coated as it is on the opposite surface by the same thin film coating apparatus, and then folded back (changed) and dried on the upper side of the drying apparatus. The present invention is applied to the drying apparatus provided in the double-sided thin film coating apparatus which is further transported horizontally through the chamber 5A, dried and wound around the collection roll 18.

  That is, this drying apparatus of the present embodiment has a two-layer structure, and the film-like object 4 facing the nozzle part 1 is made to flow while discharging the coating liquid from the tip discharge hole 2 of the nozzle part 1. A thin film coating apparatus configured to apply a coating liquid in a thin film form on the film-like coated body 4 by being conveyed with respect to the nozzle unit 1 is provided on the left and right sides. It is set as the structure which provided the drying chamber in which the film-like to-be-coated body 4 which finished coating on the single side | surface and the other side was carried continuously through several steps.

  Specifically, in this embodiment, a single-sided drying chamber in which a film-like coated body 4 coated on one side is taken up by a thin film coating apparatus provided on one side and dried by passing, and an opposite side provided on the opposite side. This upper drying chamber is provided with upper and lower opposite drying chambers that take up and convey the object to be coated 4 that has been further coated on the opposite surface by a thin film coating device that coats the surface, and passes it to dry. After one of 5A and the lower drying chamber 5B is conveyed and passed as the single-sided drying chamber, the direction is changed, and the other drying chamber is conveyed and passed as the opposite-side drying chamber. The coating film 3 coated on both sides is continuously dried.

  In this embodiment, a small movable block body 6, that is, a block body 6 as a drying apparatus forming part that is slidable along the floor surface or can be easily lifted and conveyed is manufactured in advance. However, it is configured such that it can be connected and connected at the site (in the factory) as required to obtain a desired dry length.

  That is, an upper drying chamber forming portion 7A and a lower drying chamber forming portion 7B are provided above and below each block body 6 set to a movable size, and a plurality of block bodies 6 are arranged side by side in succession. As a configuration in which the upper drying chamber 5A and the lower drying chamber 5B having a desired length, that is, a drying length capable of increasing the conveyance speed for improving mass productivity by connecting in a row state, are vertically joined together. Yes.

  Further, the upper and lower drying chamber forming portions 7A and 7B communicate with the upper drying chamber forming portion 7B, and the inlet / outlet portions 8 serving as outlets or inlets through which the film-like coated body 4 is conveyed and passed are provided on both sides of each block body 6. Each block body 6 is provided next to each other so that the upper and lower entrances 8 of each block body 6 are in contact with each other so as to be in contact with each other, and a seal portion in which hot air does not leak into the connecting portion of each block body 6 7, the upper drying chamber 5 </ b> A and the lower drying chamber 5 </ b> B are formed so as to be connected in parallel by a predetermined length by connecting the block bodies 6.

  For example, the respective inlet / outlet portions 8 are abutted and arranged by abutting the side surfaces of the respective block bodies 6, and may be configured to be connected and fixed by engaging and locking them while pressing the packing portion. It is also possible to adopt a configuration in which this butted state (joint) is simply wrapped with a tape or the like and sealed and connected. In an embodiment to be described later, a packing part 7 as a seal part 7 is provided in a protruding state so as to surround the entrance / exit part 8, and the packing part 7 is pressed and each block body 6 is abutted with a tape or the like and further sealed. It is said.

  Further, in this embodiment, a caster 9 is provided at the bottom of each block body 6 so as to be easily slidable on the floor surface. 8 is arranged so as to face each other (but communicated with each other), and a seal portion is provided thereon. For example, as described above, the seal portion 7 is pressed by pressing the packing portion 7 protruding from the side surface around the entrance / exit portion 8. The butted joint portions are wound with tape and sealed and fastened to connect, and by this connection, the upper drying chamber forming portion 7A and the lower drying chamber forming portion 7B of each block body 6 are vertically connected by a predetermined length. The upper drying chamber 5 </ b> A and the lower drying chamber 5 </ b> B are joined and formed in parallel.

  Further, each block body 6 of the present embodiment includes a hot air introduction part 11 for introducing hot air and a hot air discharge part 12 for discharging the hot air in a frame structure 10 set to a size that can be easily transported to each factory to be installed. The provided upper drying chamber forming portion 7A and the lower drying chamber forming portion 7B are horizontally arranged side by side, and the upper and lower ends of the upper drying chamber forming portion 7A and the lower drying chamber forming portion 7B are placed on the left and right ends. The entrance / exit part 8 through which the coated body 4 is transported passes is provided, and after carrying in the factory, the upper and lower entrance / exit parts 8 of each block body 6 are brought into contact with each other by slidingly moving along the floor surface by the lower casters 9. The block bodies 6 are arranged next to each other one after another so as to communicate with each other, and the connecting portions of the block bodies 6 are connected with the seal portions 7 that do not leak hot air.

  Further, after the connection, the grounding leg 19 is extended to be grounded and fixedly held.

  In the present embodiment, as described above, the hot air introducing section 11 for sending hot air to the upper drying chamber forming section 7A and the lower drying chamber 7B of each block body 6 and the hot air discharging section 12 for discharging the hot air are provided. The surface of the coating film 3 is heated and dried by the hot air sent from the hot air introducing section 11, and the hot air to be dried by the hot air is discharged from the hot air discharge section 12 to the outside of the drying chamber together with the vaporized gas generated from the coating film 3. It is configured as follows.

  In this embodiment, in combination with this hot air drying, a drying heater portion 13 for heating and drying the inside of the coating film 3 by radiant heat to enhance the drying function is disposed in close proximity to the film-like coated body 4. However, the heater 13 for drying is not a plate body, but has a configuration in which a plurality of heater rod-like portions 14 are arranged in parallel in the surface direction of the object to be coated 4 through a ventilation gap through which the hot air passes. Although not close to the position where the film-like coated body 4 comes into contact when film vibration occurs, the radiant heat is as close as possible in consideration of the above-described hot air drying and the risk of explosion by vaporized gas. The drying ability is further improved by using the drying method.

  More specifically, in this embodiment, for example, a metal film such as aluminum or copper is used as the object to be coated 4, and a positive electrode active material such as lithium cobaltate or a negative electrode activity such as graphite is formed on this surface. This material is mixed on one side with a thin-film coating device that produces a lithium ion battery forming material that mixes a substance with a solvent such as binder and NMP and uses this as a coating solution to coat and form a thin film of the order of 100 μm on both sides. This is a drying apparatus in which an upper drying chamber 5A and a lower drying chamber 5B, which are to be provided on the downstream side of each thin film coating apparatus, are arranged in two stages.

  Further, in this embodiment, each drying chamber 5A, 5B is divided into a plurality of blocks by each block body 6, and each is connected to the inlet / outlet portion 8, and each block drying chamber is directed upstream in the transport direction toward the transport direction. A hot air introduction part 11 for sending hot air and a hot air discharge part 12 on the opposite side so as to face the hot air introduction part 11 or a plurality of pairs are provided and supported by a support roller 20 provided below each block drying chamber. The film-like coated body 4 is taken up and conveyed so as to pass through the drying chamber, and hot air is blown from the hot-air introduction unit 11 to the hot-air discharge unit 12 above the drying chamber. The coating film 3 formed by coating on the upper surface of the body 4 is dried with hot air, and is further placed in close proximity to the coated body 4 and arranged in parallel in the surface direction of the coated body 4. The drying heater portion 13 composed of the heater rod-like portion 14 is coated with the coating. 4 is arranged above, is configured so as hot air through the ventilation gap between the heater rod-shaped portion 14 is blown to the coating film 3 of the coating material 4 thereunder traverse.

  Although not shown, hot air sent from the hot air introducing portion 11 is applied to the object to be coated 4 through the ventilation gap by projecting a hot air guide portion on the heater rod-like portion 14. Even if the efficiency is improved by bringing the drying heater 13 close to the construction film 3 so as to guide the air toward the coating film 3, the hot gas is surely sent to the coating film 3 and the vaporized gas is retained while maintaining the hot air drying. It is configured to discharge with hot air without any problems.

  In addition, the heater rod-like portion 14 is a heat source such as a heating wire, or a high-temperature medium such as high-temperature steam or oil is circulated, and an infrared heater (IR heater) that emits infrared rays from the surface (ceramic) by this heat. .

  Specifically, in this embodiment, the pipe through which the high-temperature steam is circulated is formed of ceramic or coated with ceramic, and the heater rod-like portion 14 is folded at the end portion so that a predetermined range of the coated body 4 is folded back. Folded rod-shaped portion side-by-side configuration that covers the heater rod-shaped portions 14 arranged side by side, heats and dries the coating film 3 from the inside by radiant heat generated by infrared rays emitted from the surface by circulating high-temperature steam to each communicating heater rod-shaped portion 14 The IR heater is used.

  In other words, it is not a plate-shaped IR heater but an IR heater of a type in which a large number of connected heater rod-like portions 14 that are folded back and forth that emit infrared rays from the surface through high-temperature steam are arranged side by side. The vertical direction is set in a direction perpendicular to the conveying direction of the object to be coated 4 so as to be arranged in parallel with the conveying direction of the object to be coated 4, and in close proximity to the upper side of the object to be coated 4. The configuration is set up.

  Further, in this embodiment, the hot air introduction part 11 for connecting the hot air introduction / extraction duct, the hot air discharge part 12 and the drying heater part 13 for connection with the high temperature medium introduction / extraction pipe such as the IR heater are provided. The upper and lower drying chamber forming portions 7A and the lower drying chamber forming portion 7B of each block body 6 are provided on the opening / closing lid 16 that opens and closes.

  Therefore, by opening the opening / closing lid 16, the hot air introducing portion 11, the hot air discharging portion 12, and the heater portion 13 provided on the opening / closing lid 16 are moved together with the opening / closing lid 16, and the lower support rollers 20 are exposed. The support roller 20 can be easily replaced and the upper drying chamber forming portion 7A and the lower drying chamber forming portion 7B can be easily cleaned. After the maintenance, the film-like coated body 4 is again placed on the supporting rollers 20. The paper passing operation can be easily performed.

  Note that the present invention is not limited to the embodiments, and the specific configuration of each component can be designed as appropriate.

DESCRIPTION OF SYMBOLS 1 Nozzle part 2 Tip discharge part 3 Coating film 4 Coating object 5A Upper drying chamber 5B Lower drying chamber 6 Block body 7 Sealing part 7A Upper drying chamber forming part 7B Lower drying chamber forming part 8 Entrance / exit part 9 Casters
10 Framework structure
11 Hot air introduction part
12 Hot air exhaust
13 Heater for drying
14 Heater bar
16 Open / close lid
20 bearing rollers

Claims (2)

While discharging the coating liquid from the tip discharge hole of the nozzle part, the film-like coated object facing this nozzle part is conveyed to this nozzle part, thereby coating the film-like coated object. A drying apparatus provided in a thin film coating apparatus configured to apply a liquid in a thin film form, provided with a plurality of upper and lower drying chambers for transporting and passing the film-shaped coated body after the application, After passing through one drying chamber of the upper drying chamber and the lower drying chamber, the coating film is applied to the film-shaped coated body by changing the direction and passing through the other drying chamber. In the drying apparatus configured to dry a single-sided drying for drying one of the upper drying chamber and the lower drying chamber on one side of the film-like object to be coated And the other drying chamber is the film-like object to be dried. Further applied to the opposite surface, and configured as an opposite surface drying chamber for drying the coating film on the opposite surface of the film-like object to be coated, and above and below the movable block body, An upper drying chamber forming section and a lower drying chamber in which a predetermined length of the upper drying chamber and the lower drying chamber are formed side by side by connecting the block bodies side by side in a plurality of rows. The block forming units are arranged side by side, and each block body is provided with a hot air introducing portion for introducing hot air and a hot air discharging portion for discharging the hot air in a frame structure having a size that can be fixed to the moving ground. The drying chamber forming portion and the lower drying chamber forming portion are horizontally arranged in parallel, and the film-like coated body is provided on both left and right ends of the upper drying chamber forming portion and the lower drying chamber forming portion. An entrance / exit part is provided for each of the blocks. Each block body is arranged next to each other so that the upper and lower entrance / exit portions of the body communicate with each other, and a connecting portion of each block body is provided with a seal portion that does not leak hot air, and is connected in a plurality of rows. The upper drying chamber forming section and the lower drying chamber forming section of each block body are joined together to form the upper and lower two-layer drying chambers for drying both surfaces of the film-shaped coated body. The upper drying chamber and the lower drying chamber are joined together in the vertical direction, and the upper drying chamber forming portion and the lower drying chamber forming portion arranged in parallel above and below each block body are opened. Opening and closing lids that are exposed at the bottom are provided, and when the opening and closing lid is opened, the respective supporting rollers for supporting the lower film-like object to be exposed are exposed. Drying chamber forming section and lower drying chamber forming section The inside of the upper drying chamber forming portion and the lower drying chamber forming portion can be cleaned, and the film can be passed through a film-like object to be supported on the supporting roller in the lower drying chamber forming portion, and the opening and closing within the lid, said hot air introduction portion for introducing the hot air is provided, the hot air introducing portion is a structure in which the end portion and the intermediate portion in the lid, is provided further to the lid to the plurality of locations wherein In addition to hot air drying by hot air sent from the hot air introduction section, a drying heater section is provided for heating and drying the coating film of the film-like object by radiant heat. The drying heater section passes through the hot air. When a plurality of heater rod-shaped portions closes the opening and closing lid , the heater rod-shaped portions are close to and opposed to the film-shaped workpiece to be conveyed on the support roller, and in the surface direction of the film-shaped workpiece. A side-by-side configuration and Drying apparatus to provide a thin film coating apparatus characterized by a.   A caster is provided at the bottom of each block body so as to be movable on the floor surface. The block bodies are connected side by side so that the upper and lower entrances and exits face each other one after another. The drying apparatus provided in the thin film coating apparatus according to claim 1, wherein the upper drying chamber and the lower drying chamber are jointly formed.

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