KR20120022092A - Light emitting device, method for fabricating the light emitting device, light emitting device package and lighting system - Google Patents
Light emitting device, method for fabricating the light emitting device, light emitting device package and lighting system Download PDFInfo
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- KR20120022092A KR20120022092A KR1020100082679A KR20100082679A KR20120022092A KR 20120022092 A KR20120022092 A KR 20120022092A KR 1020100082679 A KR1020100082679 A KR 1020100082679A KR 20100082679 A KR20100082679 A KR 20100082679A KR 20120022092 A KR20120022092 A KR 20120022092A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of group III and group V of the periodic system
- H01L33/32—Materials of the light emitting region containing only elements of group III and group V of the periodic system containing nitrogen
Abstract
The light emitting device according to the embodiment includes a substrate; A first conductivity type semiconductor layer disposed on the substrate; An active layer disposed on the first conductivity type semiconductor layer; And a second conductivity type semiconductor layer disposed on the active layer, wherein the first conductivity type semiconductor layer comprises: a first semiconductor layer; Wherein 1 In x Al y Ga 1 -x- y N / GaN (0≤x≤1, 0≤y≤1, 0≤x + y≤1) disposed on the semiconductor layer; And a second semiconductor layer disposed on the In x Al y Ga 1- x- y N / GaN layer.
Description
The present invention relates to a light emitting device, a light emitting device manufacturing method, a light emitting device package and an illumination system.
Group III-V nitride semiconductors have been spotlighted as core materials of light emitting devices such as light emitting diodes (LEDs) or laser diodes (LDs) due to their physical and chemical properties. The III-V conductive semiconductors are usually made of a semiconductor material having a composition formula of In x Al y Ga 1 -x- y N (0≤x≤1, 0≤y≤1, 0≤x + y≤1). .
Light emitting diodes (LEDs) are a type of semiconductor device that transmits and receives signals by converting electricity into infrared rays or light using characteristics of a compound semiconductor.
It is widely used as a light emitting device for obtaining light of a light emitting diode or a laser diode using such a conductive semiconductor material, and has been applied as a light source of various products such as keypad light emitting part of a mobile phone, an electronic board, a lighting device, and the like.
The embodiment provides a light emitting device having a new structure, a method of manufacturing the same, a light emitting device package, and an illumination system.
The embodiment provides a semiconductor light emitting device having improved light extraction efficiency, a method of manufacturing the same, a light emitting device package, and an illumination system.
The light emitting device according to the embodiment includes a substrate; A first conductivity type semiconductor layer disposed on the substrate; An active layer disposed on the first conductivity type semiconductor layer; And a second conductivity type semiconductor layer disposed on the active layer, wherein the first conductivity type semiconductor layer comprises: a first semiconductor layer; Wherein 1 In x Al y Ga 1 -x- y N / GaN (0≤x≤1, 0≤y≤1, 0≤x + y≤1) disposed on the semiconductor layer; And a second semiconductor layer disposed on the In x Al y Ga 1- x- y N / GaN layer.
In one embodiment, a method of manufacturing a light emitting device includes: forming a first semiconductor layer on a substrate; The first layer on a semiconductor In x Al y Ga 1 -x- y N and by repeating the GaN lamination In x Al y Ga 1 -x- y N / GaN layer (0≤x≤1, 0≤y≤1, Forming 0 ≦ x + y ≦ 1); Forming a second conductivity type semiconductor layer on the In x Al y Ga 1 -x- y N / GaN layer; Forming an active layer on the second semiconductor layer; And forming a second conductivity type semiconductor layer on the active layer.
The light emitting device package according to the embodiment includes a package body; A first electrode layer and a second electrode layer provided on the package body; And a light emitting device electrically connected to the first electrode layer and the second electrode layer, wherein the light emitting device comprises: a substrate; A first conductivity type semiconductor layer disposed on the substrate; An active layer disposed on the first conductivity type semiconductor layer; And a second conductivity type semiconductor layer disposed on the active layer, wherein the first conductivity type semiconductor layer comprises: a first semiconductor layer; Wherein 1 In x Al y Ga 1 -x- y N / GaN (0≤x≤1, 0≤y≤1, 0≤x + y≤1) disposed on the semiconductor layer; And a second semiconductor layer disposed on the In x Al y Ga 1- x- y N / GaN layer.
In an illumination system using a light emitting device as a light source, the illumination system includes a substrate, a package body installed on the substrate, a first electrode layer and a second electrode layer provided on the package body; A light emitting device electrically connected to the first electrode layer and the second electrode layer, the light emitting device comprising: a substrate; A first conductivity type semiconductor layer disposed on the substrate; An active layer disposed on the first conductivity type semiconductor layer; And a second conductivity type semiconductor layer disposed on the active layer, wherein the first conductivity type semiconductor layer comprises: a first semiconductor layer; An In x Al y Ga 1-xy N / GaN (0 ≦ x ≦ 1, 0 ≦ y ≦ 1, 0 ≦ x + y ≦ 1) layer disposed on the first semiconductor layer; And a second semiconductor layer disposed on the In x Al y Ga 1- x- y N / GaN layer.
The embodiment can provide a light emitting device having a new structure, a method of manufacturing the same, a light emitting device package, and an illumination system.
The embodiment provides a semiconductor light emitting device having improved light extraction efficiency, a method of manufacturing the same, a light emitting device package, and an illumination system.
1 is a view showing a laminated structure of a light emitting device according to an embodiment
2 and 3 illustrate a method of manufacturing a horizontal light emitting device to which the light emitting device of FIG. 1 is applied.
4 is a view showing a vertical light emitting device to which the light emitting device of FIG. 1 is applied;
5 is a cross-sectional view of a light emitting device package including a light emitting device according to the embodiment;
6 illustrates a backlight unit including a light emitting device package according to an embodiment.
7 is a perspective view of a lighting unit including a light emitting device package according to the embodiment.
In the description of the embodiments, each layer (film), region, pattern or structure layer is formed on or "under" the substrate, each layer (film), region, pad or pattern. In the case where it is described as "to", "on" and "under" include both "directly" or "indirectly" formed. In addition, the criteria for the top or bottom of each layer will be described with reference to the drawings.
In the drawings, the thickness or size of each layer is exaggerated, omitted, or schematically illustrated for convenience and clarity of description. In addition, the size of each component does not necessarily reflect the actual size.
Hereinafter, a light emitting device, a light emitting device manufacturing method, a light emitting device package, and a lighting system according to an embodiment will be described with reference to the accompanying drawings.
1 is a view showing a laminated structure of a
Referring to FIG. 1, the
For example, the
The
An Un-GaN
A first conductivity
The first
A
An AlGaN /
The AlGaN layer in the AlGaN /
The AlGaN /
The AlGaN / GaN
The AlGaN /
In the In x Al y Ga 1 -x- y N layer (106) x may have a value in the range of 0.05 to 0.2, y may have a value of 0.0001 to 0.08, and preferably have a value of 0.03 Can be.
Said In x Al y Ga 1 -x- y N / GaN
It said In x Al y Ga 1 -x- y N / GaN
It said In x Al y Ga 1 -x- y N layer and preferably can be formed to a thickness of 5 to 50Å, respectively may be formed to a thickness of 10Å. The GaN layer may be formed to a thickness of 15 to 150 15 each, preferably 25 있고 thick. The In x Al y Ga 1- xy N / GaN
Said In x Al y Ga 1 -x- y N layer and a GaN layer when the hayeoteul a pair, may form 10 to 50 pairs, embodiment, the In x Al y Ga 1 -x- y N layer and GaN It is illustrated that 15-25 pairs of layers were formed.
The average doping concentration in the In x Al y Ga 1 -x- y N /
In the
It said In x Al y Ga 1 -x- y N / GaN layer of claim 1, the
An
The second
A
2 and 3 illustrate a method of manufacturing the horizontal
Referring to FIG. 2, the horizontal
Meanwhile, a reflective electrode layer may be formed instead of the
Thereafter, Mesa etching is performed to expose a portion of the
Referring to FIG. 3, a
The first and
The first and
4 is a view showing a vertical
1 and 3, the vertical
The
Meanwhile, an adhesive layer (not shown) may be further formed between the
The
After the
After the
FIG. 5 is a graph illustrating an operating voltage of a light emitting device to which an InAlGaN / GaN superlattice layer is applied and a reference LED structure according to an embodiment of the present invention at a current of 20 mA. The graph on the left shows the operating voltage of the light emitting device according to the embodiment, and the graph on the right shows the operating voltage of the reference LED structure. As can be seen from the graph, the light emitting device according to the embodiment increases the amount of electrons that can be supplied by the InAlGaN / GaN superlattice layer, so that the operating voltage is relatively low, the electrical characteristics can be improved.
6 is a graph illustrating low current characteristics of a light emitting device and a reference LED structure to which an InAlGaN / GaN superlattice layer is applied according to an exemplary embodiment of the present invention. In both graphs, the red result on the left represents the Vf of the light emitting device according to the embodiment, and the blue result on the right represents the Vf of the reference LED structure. The left graph is the Vf value at 10 μA and the right graph is the Vf value at 1 μA. As shown, it can be seen from both graphs that the low current characteristics of the light emitting device to which the InAlGaN / GaN superlattice layer is applied are excellent.
FIG. 7 is a graph illustrating integrated sphere power measurement results of a light emitting device to which an InAlGaN / GaN superlattice layer is applied and a reference LED structure according to an exemplary embodiment of the present invention. As shown, it can be seen that the light emitting device to which the InAlGaN / GaN superlattice layer is applied has a short wavelength and an improved output power. In this graph, the InAlGaN / GaN superlattice layer is applied to the first conductivity
8 is a cross-sectional view of a light emitting device package including a vertical light emitting device according to the embodiment.
Referring to FIG. 8, the light emitting device package according to the embodiment may be installed on the
The
The
The
The
The
A plurality of light emitting device packages according to the embodiment may be arranged on a substrate, and a light guide plate, a prism sheet, a diffusion sheet, a fluorescent sheet, or the like, which is an optical member, may be disposed on a path of light emitted from the light emitting device package. The light emitting device package, the substrate, and the optical member may function as a backlight unit or as a lighting unit. For example, the lighting system may include a backlight unit, a lighting unit, an indicator device, a lamp, and a street lamp.
9 is a diagram illustrating a backlight unit using a light emitting device package according to an embodiment. However, the
Referring to FIG. 9, the
The
The
As shown, the
However, the
The
The
The
The
The
The
10 is a perspective view of a lighting unit using a light emitting device package according to embodiments. However, the
Referring to FIG. 10, the
The
The light emitting module 1230 may include a
The
In addition, the
The light emitting
The light emitting module 1230 may be arranged to have a combination of various light emitting diodes in order to obtain color and brightness. For example, a white light emitting diode, a red light emitting diode, and a green light emitting diode may be combined to secure high color rendering (CRI). In addition, a fluorescent sheet may be further disposed on a path of the light emitted from the light emitting module 1230, and the fluorescent sheet changes the wavelength of light emitted from the light emitting module 1230. For example, when the light emitted from the light emitting module 1230 has a blue wavelength band, the fluorescent sheet may include a yellow phosphor, and the light emitted from the light emitting module 1230 finally passes white light through the fluorescent sheet. Will be shown.
The
In the lighting system as described above, at least one of a light guide member, a diffusion sheet, a light collecting sheet, a luminance rising sheet, and a fluorescent sheet may be disposed on a propagation path of light emitted from the light emitting module to obtain a desired optical effect.
As described above, the lighting system according to the embodiments may be improved reliability by including the light emitting device package according to the embodiments.
Features, structures, effects, and the like described in the above embodiments are included in at least one embodiment of the present invention, and are not necessarily limited to only one embodiment. Furthermore, the features, structures, effects, and the like illustrated in the embodiments may be combined or modified with respect to other embodiments by those skilled in the art to which the embodiments belong. Therefore, it should be understood that the present invention is not limited to these combinations and modifications.
In addition, the above description has been made with reference to the embodiment, which is merely an example, and is not intended to limit the present invention. Those skilled in the art to which the present invention pertains will be illustrated as above without departing from the essential characteristics of the present embodiment. It will be appreciated that various modifications and applications are possible. For example, each component specifically shown in the embodiment can be modified. And differences relating to such modifications and applications will have to be construed as being included in the scope of the invention defined in the appended claims.
Claims (10)
A first conductivity type semiconductor layer disposed on the substrate;
An active layer disposed on the first conductivity type semiconductor layer; And
A second conductivity type semiconductor layer disposed on the active layer,
The first conductivity type semiconductor layer,
A first semiconductor layer; The first semiconductor layer In x Al y Ga 1 -x- y N / GaN layer (0≤x≤1, 0≤y≤1, 0≤x + y≤1 ) that is placed on top; And a second semiconductor layer disposed on the In x Al y Ga 1 -x- y N / GaN layer.
The second conductive semiconductor layer is a light emitting device doped with a p-type dopant.
A light emitting element range of the In x Al y Ga 1 -x- y In x N layer is in the range of 0.05 to 0.2, y is from 0.0001 to 0.08.
It said In x Al y Ga 1 -x- y N / GaN layer is In x Al y Ga 1 -x- y N layer and a GaN layer are repeatedly stacked in a 10 to 50-pair light-emitting element formed of a super lattice layer.
Wherein each of the In x Al y Ga 1- x- y N layers has a thickness of 5 to 50 GPa and the GaN layers are each 15 to 150 GPa thick.
It said In x Al y Ga 1 -x- y N / GaN layer of the light emitting element 700 to a thickness of 800Å.
The first conductive type semiconductor layer of the first semiconductor layer and said In x Al y Ga 1 -x- y N / GaN layer between the Al z Ga 1 - z N more / GaN layer (0≤z≤1) Light emitting device comprising.
In x Al y Ga 1 -x- y N and GaN are repeatedly stacked on the first semiconductor layer to form an In x Al y Ga 1 -xy N / GaN layer (0 ≦ x ≦ 1, 0 ≦ y ≦ 1, 0 ≦ forming x + y ≦ 1);
Forming a second conductivity type semiconductor layer on the In x Al y Ga 1 -x- y N / GaN layer;
Forming an active layer on the second semiconductor layer; And,
A method of manufacturing a light emitting device comprising forming a second conductivity type semiconductor layer on the active layer.
Forming Un-GaN between the substrate and the first semiconductor layer; And,
Manufacturing a light emitting device including forming a z N / GaN layer (0≤z≤1) - the first semiconductor layer and an In x Al y Ga 1 -x- y N / GaN layer between the Al z Ga 1 Way.
A first conductive layer and a second conductive layer provided on the package body; And
A light emitting device package comprising the light emitting device according to any one of claims 1 to 7 electrically connected to the first conductive layer and the second conductive layer.
Priority Applications (1)
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KR1020100082679A KR20120022092A (en) | 2010-08-25 | 2010-08-25 | Light emitting device, method for fabricating the light emitting device, light emitting device package and lighting system |
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KR1020100082679A KR20120022092A (en) | 2010-08-25 | 2010-08-25 | Light emitting device, method for fabricating the light emitting device, light emitting device package and lighting system |
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KR20120022092A true KR20120022092A (en) | 2012-03-12 |
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