KR20120018621A - Fluid temperature measurement apparatus - Google Patents

Fluid temperature measurement apparatus Download PDF

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Publication number
KR20120018621A
KR20120018621A KR1020100081579A KR20100081579A KR20120018621A KR 20120018621 A KR20120018621 A KR 20120018621A KR 1020100081579 A KR1020100081579 A KR 1020100081579A KR 20100081579 A KR20100081579 A KR 20100081579A KR 20120018621 A KR20120018621 A KR 20120018621A
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KR
South Korea
Prior art keywords
temperature measuring
sensor
fluid
housing
temperature
Prior art date
Application number
KR1020100081579A
Other languages
Korean (ko)
Inventor
박승민
Original Assignee
주식회사 휴인텍
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 휴인텍 filed Critical 주식회사 휴인텍
Priority to KR1020100081579A priority Critical patent/KR20120018621A/en
Publication of KR20120018621A publication Critical patent/KR20120018621A/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/08—Protective devices, e.g. casings
    • G01K1/10—Protective devices, e.g. casings for preventing chemical attack
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/14—Supports; Fastening devices; Arrangements for mounting thermometers in particular locations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K13/00—Thermometers specially adapted for specific purposes
    • G01K13/02—Thermometers specially adapted for specific purposes for measuring temperature of moving fluids or granular materials capable of flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer

Abstract

The present invention relates to a fluid temperature measuring device, comprising: a housing having a flow path for moving a fluid therein and having a temperature measuring sensor insertion hole which is a space in which a temperature measuring sensor is installed; A temperature measuring sensor installed in the temperature measuring sensor insertion hole and measuring a temperature of a fluid flowing through the flow path; A cap disposed above the temperature measuring sensor and engaged with the housing to prevent the fluid from leaking out of the housing; And a connection part including a first connection member connecting and fixing the fluid inlet and the pipe, and a second connection member connecting and fixing the fluid discharge part and the pipe.

Description

Fluid temperature measurement apparatus

The present invention relates to a fluid temperature measuring device, and more particularly, to a fluid temperature measuring device capable of accurate temperature measurement without corrosion caused by a fluid to be measured which is strongly acidic or alkaline.

In the semiconductor manufacturing process or the LCD manufacturing process, a large number of strongly acidic or strongly alkaline chemicals are used. For example, chemicals such as hydrofluoric acid, nitric acid, hydrochloric acid, phosphoric acid, hydrofluoric acid, sulfuric acid, ammonia, and the like are used in cleaning processes for removing impurities, oxides, and the like adhering to the surface of a silicon wafer.

Since such chemicals are formed with process equipment to flow along the pipe, when chemicals leak out of the pipe, fatal damage occurs to facilities or workers in the factory. Therefore, it is very important to manage the pressure of the fluid in the piping of the plant equipment.

In addition, the chemicals used in the semiconductor manufacturing process or the LCD manufacturing process are very important because the removal ability to remove oxides and the like varies greatly with the temperature of the chemicals.

In general, a temperature measuring sensor is used to measure the temperature of a chemical. The temperature measuring sensor includes a thermocouple made of a thermocouple, a platinum resistance thermometer, and the like, which measures corrosion from a chemical. In order to prevent it, it is formed of a structure in which a metal protective tube such as stainless steel or titanium is covered on the outside of the thermometer. However, if the thickness of the metal protective tube is too thin, there is a problem that the metal protective tube is corroded to damage the thermometer, on the contrary, if the thickness of the metal protective tube is too thick, the thermometer may be prevented from being corroded by chemicals. There was a disadvantage that the temperature of the drug could not be measured immediately.

Therefore, there is an urgent need for research on a fluid temperature measuring device which has good corrosion resistance and chemical resistance and improved temperature response by chemicals, and also prevents chemicals in a pipe from leaking to the outside through the fluid temperature measuring device. There is an urgent need for a study of a fluid temperature measuring device having improved airtightness.

The present invention is to overcome the above-mentioned conventional problems, the problem to be solved by the present invention is accurate temperature measurement without corrosion caused by the acid or alkaline strong fluid used in semiconductor, LCD manufacturing or chemical factory It is to provide a possible fluid temperature measuring device.

According to an exemplary embodiment of the present invention, there is provided a flow path for moving a fluid therein, a housing having a temperature sensor insertion hole which is a space in which a temperature sensor is installed; A temperature measuring sensor installed in the temperature measuring sensor insertion hole and measuring a temperature of a fluid flowing through the flow path; A cap disposed above the temperature measuring sensor and engaged with the housing to prevent the fluid from leaking out of the housing; And a connection part including a first connection member connecting and fixing the fluid inlet and the pipe, and a second connection member connecting and fixing the fluid discharge part and the pipe.

The housing includes a housing body in which a flow path and a temperature measuring sensor insertion hole are formed therein; A fluid inlet formed to protrude from one side of the housing body; And a fluid discharge part protruding from the other side of the housing body, and a temperature sensor insert part protruding upward or downward of the housing body.

The housing body, the fluid inlet part, the fluid outlet part, and the temperature sensor insertion part are integrally formed, the flow path is formed along the first axis direction inside the housing, and the temperature sensor insertion hole crosses the first axis direction. It is formed to communicate with the flow path along the second axis direction.

The temperature measuring sensor includes a sensor body portion; A temperature measuring element protruding from one end of the sensor body part and measuring a temperature of the fluid; A sensor head unit installed at the other end of the sensor body unit; A cable electrically connected to an end of the temperature measuring element and extending through the sensor body and the sensor head to extend outside the sensor head; An insertion space is formed at a connection portion at which the sensor body portion and the sensor head portion are connected, and a leakage preventing ring installed in the insertion space; And a protective film coated to surround the outside of the temperature measuring device and coated on the surface of the cable, wherein the protective film uses a fluorine-containing resin.

The temperature measuring sensor may include a first sealing part formed at a portion where the temperature measuring element and the sensor body part contact each other; And a second sealing part formed to seal a portion where the cable and the sensor head part contact each other, wherein the first sealing part and the second sealing part use a fluorine-containing resin.

The temperature measuring device measures a temperature of the fluid, the temperature measuring device electrically connected to the cable; A protective cap configured to cover the temperature measuring body to protect the temperature measuring body; And a filler filled in the protective cap such that the cable and the temperature measuring body are aligned in the protective cap.

According to the present invention, it is possible to obtain a fluid temperature measuring device having good corrosion resistance and chemical resistance and improved temperature response by chemicals.

In addition, by preventing the chemical in the pipe from leaking to the outside through the fluid temperature measuring device in multiple times, it is possible to obtain the effect of improving the airtightness.

1 is a schematic perspective view of a fluid temperature measuring device according to an exemplary embodiment of the present invention.
2 is a schematic exploded perspective view of a fluid temperature measuring device according to an exemplary embodiment of the present invention.
3 is a cross-sectional view taken along line AA of FIG. 1.
4 is a schematic perspective view of a housing of a fluid temperature measuring device according to the present invention.
5A and 5B are schematic perspective views of a temperature measuring sensor of a fluid temperature measuring device according to the present invention.
FIG. 6 is a cross-sectional view taken along line BB of FIG. 5A.

Hereinafter, with reference to the accompanying drawings will be described in detail a preferred embodiment of the present invention.

1 is a schematic perspective view of a fluid temperature measuring apparatus according to an exemplary embodiment of the present invention, FIG. 2 is a schematic exploded perspective view of a fluid temperature measuring apparatus according to an exemplary embodiment of the present invention, and FIG. 4 is a cross-sectional view of the housing of the fluid temperature measuring apparatus according to the present invention.

Referring to FIG. 1, the fluid temperature measuring device includes a housing 100, a connection part 200, a temperature measuring sensor 300, and a cap 400.

The housing 100 has a flow path 150 for moving a fluid therein, and a temperature measuring sensor insertion hole 160, which is a space in which the temperature measuring sensor 300 is installed, is formed.

Since the housing 100 provides a flow path through which a fluid such as a strong acid or strong alkaline chemical flows, the housing 100 is formed of a fluorine-containing resin such as Teflon having excellent corrosion resistance and chemical resistance.

One side of the housing 100 is formed by protruding the fluid inlet 120 (see Fig. 2) through which the fluid is introduced through the pipe, the other side fluid discharge unit 130 for discharging the fluid through the housing 100 to the pipe; 2) is formed.

The connection part 200 includes a first connection member 210 and a second connection member 220. The first connection member 210 serves to connect and fix the fluid inlet of the pipe and the housing, and the second connection member 220 serves to connect and fix the fluid outlet of the pipe and the housing. At this time, the connecting portion 200 is also formed of a fluorine-containing resin, such as Teflon, which is excellent in corrosion resistance and chemical resistance.

The temperature measuring sensor 300 measures the temperature of the fluid flowing through the flow path 150 inside the housing 100. The temperature sensor insertion hole 160 is formed in a direction crossing the flow path 150, and in the present embodiment, is formed to cross the flow path 150 in an upper direction of the flow path 150. The temperature measuring sensor 300 is inserted into and fixed to the temperature measuring sensor insertion hole 160, and the temperature measuring element of the temperature measuring sensor 300 extends to be disposed in the flow path 150.

In addition, in order to prevent corrosion of the temperature measuring element by the fluid, a protective film made of a synthetic resin having strong corrosion resistance and chemical resistance is formed outside the temperature measuring element. The detailed configuration of the temperature measuring sensor 300 will be described in detail with reference to FIGS. 5A to 6.

The cap 400 is disposed above the temperature measuring sensor 300 to secure the temperature measuring sensor 300 to the housing 100 and to prevent the fluid from leaking out of the housing 100, and the housing 100. ) Is fastened. Since the temperature measuring sensor insertion hole 160 connected to the flow path 150 by the temperature measuring sensor 300 is primarily packed and secondly packed by the cap 400, the fluid is inserted into the temperature measuring sensor insertion hole 160. Through) it is possible to prevent the outflow to the outside of the housing 100.

Looking at each component according to the present invention in more detail with reference to Figures 2 to 4, the housing 100 is inserted into the housing body 110, fluid inlet 120, fluid outlet 130, temperature measuring sensor The unit 140 includes a flow path 150 and a temperature sensor insertion hole 160.

The housing body 110 is formed in the shape of a polygonal column or a cylinder in which a flow path 150 and a temperature sensor insertion hole 160 are formed therein. In the present embodiment, the housing body 110 is formed as a square pillar, but is not limited thereto.

The fluid inlet 120 is formed to protrude from one side of the housing body 110. The fluid inlet 120 includes a fluid inlet body 121 and a fluid inlet fastening means 122 formed on an outer surface of the fluid inlet body 121. The fluid inlet body 121 is formed in a cylindrical pipe form to form a flow path 150 therein, and the fluid inlet fastening means 122 is formed to be coupled to the fastening means of the first connection member 210. In this embodiment, the fluid inlet fastening means 122 is formed in a male screw shape, and the fastening means of the first connection member is formed in a female screw shape corresponding thereto, but is not limited thereto.

The fluid discharge part 130 is formed to protrude from the other side of the housing body 110. The fluid outlet 130 includes a fluid outlet body 131 and a fluid outlet fastening means 132 formed on an outer surface of the fluid outlet body 131. The fluid outlet body 131 is formed in a cylindrical pipe form to form a flow path 150 therein, and the fluid outlet fastening means 132 is formed to be coupled to the fastening means of the second connection member 220.

The temperature sensor insertion unit 140 is formed to protrude above or below the housing body 110. That is, the temperature sensor insertion unit 140 is formed to protrude in a direction intersecting with the flow path 150 formed in the housing 100. The temperature sensor insertion unit 140 may include an insertion unit body 141, an insertion unit first fastening unit 142, and an insertion unit second fastening unit 143. In the present embodiment, the insertion unit body 141 is formed to protrude above the housing body 110, and the temperature measurement sensor insertion hole 160, which is a space into which the temperature measuring sensor 300 is inserted, is inserted into the insertion unit body 141. ) Is formed in communication with the flow path 150. The insertion part first fastening means 142 is formed at the inner end of the insertion body 141 and serves to fasten and fix the temperature measuring sensor 300. The insertion part second fastening means 143 is formed on the outer surface of the insertion part body 141 and is fastened with the fastening means of the cap 400 to serve to fix the cap 400.

The housing body 110, the fluid inlet 120, the fluid outlet 130, and the temperature sensor insert 140, which are components of the housing 100, may be integrally formed. In addition, a flow path 150 is formed in the first axis direction, that is, the x-axis direction inside the housing 100, and the temperature sensor insertion hole 160 has a second axis direction that crosses the first axis direction, It is formed to communicate with the flow path 150 along the y-axis direction.

In the present embodiment, the embodiment in which the fluid inlet and the fluid outlet are formed to be parallel to each other. However, the fluid inlet and the fluid outlet may be formed to intersect with each other according to the arrangement of the pipes. Implemented the same as the embodiment of.

The connection part 200 includes a first connection member 210 and a second connection member 220. The first connection member 210 serves to connect and fix the fluid inlet 120 of the pipe and the housing, and the second connection member 220 connects and fixes the fluid outlet 130 of the pipe and the housing. It plays a role.

The first connection member 210 includes a first connection member body 211 and a first connection member fastening means 212. The first connection member body 211 is formed in a ring shape, one end is connected to the pipe and the other end is inserted and fastened to the fluid inlet 120. The first connecting member fastening means 212 is formed on the inner surface of the first connecting member body 211, the first connecting member fastening means 212 is coupled to the fluid inlet fastening means 122 is fastened. In this embodiment, the fluid inlet fastening means 122 is formed in a male screw shape, and the first connection member fastening means 212 is formed in a female screw shape corresponding thereto.

The second connection member 220 includes a second connection member body 221 and a second connection member fastening means 222. The second connection member 220 is configured to correspond to the first connection member 210.

The cap 400 is disposed above the temperature measuring sensor 300 to secure the temperature measuring sensor 300 to the housing 100 and to prevent the fluid from leaking out of the housing 100. Is fastened with The cap 400 includes a cap body 410, a cap fastening portion 420, and a cap hole 430. The cap body 410 has a space in which the temperature sensor insert 140 is inserted. The cap fastening part 420 is formed on the inner side of the cap body 410 and is formed to be fastened to the insertion part second fastening means 143. In the present embodiment, the insertion portion second fastening means 143 is formed in the male screw shape, the cap fastening portion 420 is formed in the female screw shape. The cap hole 430 is formed to penetrate the upper surface of the cap body 410, and the cable of the temperature measuring sensor 300 is installed through the cap hole 430.

5A and 5B are schematic perspective views of a temperature measuring sensor of a fluid temperature measuring device according to the present invention, and FIG. 6 is a cross-sectional view taken along line B-B in FIG. 5A.

5A through 6, the temperature measuring sensor 300 may include a temperature measuring element 310, a sensor body 320, a sensor head 330, a cable 340, a leakage preventing ring 350, and The first sealing part 360, the passivation layer 370, and the second sealing part 380 are included.

The temperature measuring element 310 includes a temperature measuring element 311, a protective cap 312, and a filler 313. The temperature measuring body 311 serves to measure the temperature of the fluid, and the cable 340 is electrically connected to an end of the temperature measuring body 311. The protective cap 312 is configured to cover the temperature measuring body 311, and the filler 313 is inserted into the protective cap 312. The filler serves to allow the cable 340 and the temperature measuring element 311 to be aligned in the protective cap. As the filler 313, a silicone resin or an epoxy resin may be used.

The sensor body 320 is composed of a sensor body body 321 and a sensor body fastening means 322 formed on the outer surface of the sensor body body 321. In the present embodiment, the sensor body fastening means 322 is formed in the form of a male screw, and is fastened and fixed to the insertion part first fastening means 142 formed at the inner end of the insert body 141. At this time, the insertion first fastening means 142 is formed in the form of a female screw.

The temperature measuring element 310 protrudes from one end of the sensor body 320, and the sensor head 330 is installed at the other end of the sensor body 320.

A space where a leakage prevention ring 350 is inserted is formed at a connection portion where the sensor body 320 and the sensor head part 330 are connected, and the leakage prevention ring 350 is inserted and fixed inside the space. The cable 340 is connected to an end of the temperature measuring element 310 and extends through the sensor body 320 and the sensor head 330 to extend outside the sensor head 330.

The passivation layer 370 is coated to surround the outside of the temperature measuring element 310, and is also coated on the surface of the cable 340. The protective film 370 uses a resin having excellent corrosion resistance and chemical resistance, in order to prevent the temperature measuring element 310 from being corroded by the fluid. In this embodiment, PFA (tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer) resin is used.

The first sealing part 360 has a temperature measuring element 310 and a sensor body 320 to prevent the fluid from flowing out through the temperature sensor insertion hole 160 in communication with the flow path 150. Is formed at the site of contact. At this time, the first sealing portion 360 uses a fluorine-containing resin excellent in corrosion resistance and chemical resistance.

The second sealing part 380 may prevent the fluid from flowing out through the temperature sensor insertion hole 160 or the cable 340 in communication with the flow path 150. 330 is formed to seal the contact area. Like the first sealing part 360, the second sealing part 380 also uses a fluorine-containing resin having excellent corrosion resistance and chemical resistance.

As described above, according to the present invention, by preventing the chemical in the pipe from leaking to the outside through the fluid temperature measuring device in multiple times, the effect of improving airtightness can be obtained.

What has been described above is merely an exemplary embodiment of the fluid temperature measuring apparatus according to the present invention, and the present invention is not limited to the above-described embodiment, and as claimed in the following claims, it departs from the gist of the present invention. Without this, anyone skilled in the art to which the present invention pertains will have the technical spirit of the present invention to the extent that various modifications can be made.

100: Housing
200: connection
300: temperature measuring sensor
400: cap

Claims (6)

In the fluid temperature measuring device,
A housing in which a flow path for moving a fluid is formed and a temperature measuring sensor insertion hole is formed, which is a space in which a temperature measuring sensor is installed;
A temperature measuring sensor installed in the temperature measuring sensor insertion hole and measuring a temperature of a fluid flowing through the flow path;
A cap disposed above the temperature measuring sensor and engaged with the housing to prevent the fluid from leaking out of the housing; And
And a connection part including a first connection member for connecting and fixing the fluid inlet and a pipe, and a second connection member for connecting and fixing the fluid discharge part and the pipe.
The method of claim 1,
The housing,
A housing body having a flow path and a temperature sensor insertion hole formed therein;
A fluid inlet formed to protrude from one side of the housing body;
A fluid discharge part protruding from the other side of the housing body;
And a temperature measuring sensor insert formed to protrude upward or downward of the housing body.
The method of claim 2,
The housing body, the fluid inlet part, the fluid outlet part, and the temperature sensor insertion part are integrally formed, the flow path is formed along the first axis direction inside the housing, and the temperature sensor insertion hole crosses the first axis direction. Fluid temperature measuring device characterized in that it is formed in communication with the flow path along the second axis direction.
The method of claim 2,
The temperature measuring sensor,
Sensor body portion;
A temperature measuring element protruding from one end of the sensor body part and measuring a temperature of the fluid;
A sensor head unit installed at the other end of the sensor body unit;
A cable electrically connected to an end of the temperature measuring element and extending through the sensor body and the sensor head to extend outside the sensor head;
An insertion space is formed at a connection portion at which the sensor body portion and the sensor head portion are connected, and a leakage preventing ring installed in the insertion space; And
It is coated to surround the outside of the temperature measuring element, and includes a protective film coated on the surface of the cable,
The protective film is a fluid temperature measuring device, characterized in that using a fluorine-containing resin.
The method of claim 4, wherein
The temperature measuring sensor,
A first sealing part formed at a portion where the temperature measuring element and the sensor body part contact each other; And
And a second sealing part formed to seal a portion where the cable and the sensor head part contact each other, wherein the first sealing part and the second sealing part use a fluorine-containing resin.
The method of claim 4, wherein
The temperature measuring element,
A temperature measuring device measuring a temperature of the fluid and electrically connected to the cable;
A protective cap configured to cover the temperature measuring body to protect the temperature measuring body; And
And a filler filled in the protective cap such that the cable and the temperature measuring body are aligned in the protective cap.

KR1020100081579A 2010-08-23 2010-08-23 Fluid temperature measurement apparatus KR20120018621A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020100081579A KR20120018621A (en) 2010-08-23 2010-08-23 Fluid temperature measurement apparatus

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Application Number Priority Date Filing Date Title
KR1020100081579A KR20120018621A (en) 2010-08-23 2010-08-23 Fluid temperature measurement apparatus

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101240198B1 (en) * 2012-07-27 2013-03-06 이창호 Infrared sensor housing
KR101314841B1 (en) * 2013-01-17 2013-10-04 대진와이어 주식회사 Seal type limit sensor
KR102233736B1 (en) * 2020-06-15 2021-03-30 주식회사 위플랫 A Detecting Device of Water Leak
KR20220068343A (en) * 2020-11-19 2022-05-26 주식회사 지니 Oxygen gas sensor unit and substrate processing system having the same

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101240198B1 (en) * 2012-07-27 2013-03-06 이창호 Infrared sensor housing
KR101314841B1 (en) * 2013-01-17 2013-10-04 대진와이어 주식회사 Seal type limit sensor
KR102233736B1 (en) * 2020-06-15 2021-03-30 주식회사 위플랫 A Detecting Device of Water Leak
KR20220068343A (en) * 2020-11-19 2022-05-26 주식회사 지니 Oxygen gas sensor unit and substrate processing system having the same

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