KR20110123558A - Gas sensor - Google Patents

Gas sensor Download PDF

Info

Publication number
KR20110123558A
KR20110123558A KR1020100043104A KR20100043104A KR20110123558A KR 20110123558 A KR20110123558 A KR 20110123558A KR 1020100043104 A KR1020100043104 A KR 1020100043104A KR 20100043104 A KR20100043104 A KR 20100043104A KR 20110123558 A KR20110123558 A KR 20110123558A
Authority
KR
South Korea
Prior art keywords
sensing
electrode
sensing pad
pad
resistor
Prior art date
Application number
KR1020100043104A
Other languages
Korean (ko)
Other versions
KR101237879B1 (en
Inventor
이상훈
황하룡
Original Assignee
(주)와이즈산전
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)와이즈산전 filed Critical (주)와이즈산전
Priority to KR1020100043104A priority Critical patent/KR101237879B1/en
Publication of KR20110123558A publication Critical patent/KR20110123558A/en
Application granted granted Critical
Publication of KR101237879B1 publication Critical patent/KR101237879B1/en

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/128—Microapparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/4067—Means for heating or controlling the temperature of the solid electrolyte
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0031—General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/221—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance by investigating the dielectric properties
    • G01N2027/222—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance by investigating the dielectric properties for analysing gases

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Engineering & Computer Science (AREA)
  • Molecular Biology (AREA)
  • Combustion & Propulsion (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)

Abstract

PURPOSE: A gas sensor is provided to sense difference types of gases because two sensing pads are comprised in a single sensor. CONSTITUTION: A gas sensor comprises an insulating board(12), a first sensing pad(20), a second sensing pad(22), and a first heating wire. A first electrode(14) to which power supply voltage is applied, a second electrode(16) connected to the ground, and a third electrode(18) outputting a sensing signal are formed on a side of the insulating board. The first sensing pad is formed between the first electrode and the third electrode. The second sensing pad of a different material from the first sensing pad is formed between the second electrode and the third electrode. The first heating wire is formed on the rear side of the insulating board and heats the first sensing pad.

Description

Gas sensor

The present invention relates to a gas sensor, and more particularly, to a gas sensor that senses two or more gases with one chip and outputs a sensing signal corresponding thereto.

In a general environment such as a general home, a business, and a construction site, there are many kinds of dangerous gases, and gas sensors have been developed to sense the gas and detect or leak the gas.

The gas sensor senses gas in various ways. For example, the semiconductor gas sensor mostly uses a change in electrical conductivity that occurs when gas comes into contact with the ceramic semiconductor surface.

A general gas sensor is configured by mounting a single sensor for sensing a gas, and in order to sense a plurality of gases, a gas sensor must be configured with a corresponding plurality.

When several gas sensors or multiple gas sensors are configured as one module to sense a plurality of gases, a driving circuit must be additionally configured for each gas sensor. Therefore, an economic rise factor occurs in proportion to the addition of the driving circuit.

It is an object of the present invention to provide a gas sensor capable of sensing a plurality of gases by configuring two sensing resistors, that is, a sensing pad as one gas sensor.

Another object of the present invention is to provide a gas sensor capable of detecting a plurality of gases by configuring sensing resistors, that is, sensing pads of different materials or the same material, in one gas sensor and setting the sensitivity by changing their surface temperature. It is done.

It is an object of the present invention to provide a simple and economical gas sensor capable of detecting a plurality of gases.

According to an aspect of the present invention, there is provided a gas sensor comprising: an insulating substrate having a first electrode to which a power voltage is applied, a second electrode connected to ground, and a third electrode to output a sensing signal; A first sensing pad formed between the first electrode and the third electrode; A second sensing pad formed between the second electrode and the third electrode and formed of a material different from that of the first sensing pad; And a first heating wire formed on a rear surface of the substrate to heat the first sensing pad, wherein the first sensing pad and the second sensing pad have different surface temperatures and react with different gases to provide resistance values. The sensing voltage is changed and the sensing voltage corresponding to the resistance value change is output to the third electrode.

According to an aspect of the present invention, there is provided a gas sensor comprising: an insulating substrate having a first electrode to which a power voltage is applied, a second electrode connected to ground, and a third electrode to output a sensing signal; A first sensing pad formed between the first electrode and the third electrode; A second sensing pad formed between the second electrode and the third electrode and formed of the same material as the first sensing pad; And a first heating wire formed on a rear surface of the substrate to heat the first sensing pad, wherein the first sensing pad and the second sensing pad have different surface temperatures and react with different gases to provide resistance values. Is changed, and the sensing voltage corresponding to the resistance value change is output to the third electrode.

In addition, the first sensing pad reacts with a reducing gas such as hydrogen (H 2 ), ammonia (NH 3 ), toluene (C 7 H 8 ), carbon monoxide (CO), and the like to lower the resistance value, and the second sensing pad May react with an oxidizing gas such as nitrogen dioxide (NO 2 ), sulfur trioxide (SO 3 ), or the like, thereby increasing resistance.

A filter having selective permeability to the reducing gas may be further formed on the first sensing pad, and a filter having selective permeability to the oxidizing gas may be further formed on the second sensing pad.

The first sensing pad or the second sensing pad includes tin oxide (SnO 2 ), zinc oxide (ZnO), tungsten oxide (WO 3 ), ferric oxide (Fe 2 O 3 ), and indium oxide (IN 2 O 3). Paste added binder to ceramic powder mixed with the main raw material of metal oxide such as) and catalyst such as platinum (Pt), palladium (Pd), vanadium (V), rhenium (Re), ferrous oxide (FeO), etc. It is preferably formed by sintering after screen printing.

The display device may further include a second heating wire formed on the rear surface of the substrate to heat the second sensing pad, wherein the first sensing pad and the second sensing pad have a surface temperature difference within a range of 100 ° C to 500 ° C. Can be.

According to the present invention, a gas sensor includes: a first sensing resistor to which power is applied and in which a resistance value is lowered in response to a reducing gas; A second sensing resistor connected to ground and reacting with the oxidizing gas to increase resistance; And an output terminal connected between the first sensing resistor and the second sensing resistor to output a sensing signal, wherein the first sensing resistor, the second sensing resistor, and the output terminal are formed on the same substrate. The first and second sensing resistors have different surface temperatures by heating means formed on the substrate.

The first and second sensing resistors may have different materials, and the first and second sensing resistors may include SnO 2 , ZnO, WO 3 , Fe 2 O 3 , and IN 2 O. It is preferable that the paste is added to a ceramic powder mixed with a main raw material of a metal oxide such as 3 and a catalyst such as Pt, Pd, V, Re, FeO, etc., and then screen-printed and sintered.

The first sensing resistor and the second sensing resistor may have the same material, and the first sensing resistor and the second sensing resistor may be SnO 2 , ZnO, WO 3 , Fe 2 O 3 , IN 2 O 3, or the like. It is preferable that the paste is added to the ceramic powder mixed with the main raw material of the metal oxide and the catalyst such as Pt, Pd, V, Re, FeO, and the like.

A filter having selective permeability to the reducing gas may be further formed on the first sensing pad, and a filter having selective permeability to the oxidizing gas may be further formed on the second sensing pad.

The heating means may include a first heating wire formed on a rear surface of the substrate to heat the first sensing resistor, and further comprising a second heating wire formed on the rear surface of the substrate to heat the second sensing resistor. It may include. The first and second sensing resistors may have a surface temperature difference within a range of 100 ° C to 500 ° C.

According to the present invention, two sensing resistors, that is, sensing pads can be configured as one gas sensor, so that the gas sensor can be configured simply and economically, and accordingly, there is an effect of detecting a plurality of gases with one gas sensor. .

1 is a perspective view showing a preferred embodiment of a gas sensor according to the present invention.
2 is a view showing the front of FIG.
3 is a view showing the rear of FIG.
4 is a front view of another embodiment of FIG.
5 is an equivalent circuit diagram of the gas sensor of FIG. 1.
6 is a graph showing a change in sensitivity with temperature.
7 is a perspective view showing another embodiment of FIG.
8 shows a back side of another embodiment of FIG.

The present invention discloses a gas sensor, and an embodiment of the gas sensor according to the present invention comprises two sensing resistors, namely, a sensing pad as one gas sensor. In the description of an embodiment of the present invention, the reducing gas means that it has a property of reacting with itself and oxidizes, and the oxidizing gas reacts with the sense pad, which means that it has a property of reducing. For example, the reducing gas may be hydrogen (H 2 ), ammonia (NH 3 ), toluene (C 7 H 8 ) or carbon monoxide (CO), and the oxidizing gas may be nitrogen dioxide (NO 2 ) or sulfur trioxide (SO 3 ). have.

An embodiment of a gas sensor according to the present invention will be described with reference to FIGS. 1 to 3, FIG. 1 is a perspective view of an embodiment, FIG. 2 is a view showing a front surface of the embodiment, and FIG. 3 is a view showing a rear surface of the embodiment. .

The gas sensor 10 according to the present invention is implemented on a rectangular substrate 12, and the substrate 12 has insulation and high heat resistance, such as an alumina (Al 2 O 3 ) substrate or a silicon substrate having an oxide film. It may be made of a material.

The first electrode 14 to which the power voltage is applied, the second electrode 16 connected to the ground, and the third electrode 18 to output the sensing signal are formed on one surface or the front surface of the substrate 12 described above.

The first electrode 14 has a shape in which the pad region 14a and the expansion region 14b extending from the pad region 14a are integrally formed. The second electrode 16 also has the pad region 16a and the pad region ( The extended region 16b extending from 16a is integrally formed, and the third electrode 18 also has a shape formed from the pad region 18a and the extended region 18b extending from the pad region 18a. Each pad area 14a, 16a, 18a is an area for applying a power supply voltage, is connected to ground, or makes a contact for outputting a sensing signal, and the extension areas 14b, 16b, 18b are for transmitting a voltage or a signal. It serves as a section.

Here, the extended region 18b of the third electrode 18 is divided into two, one is formed in parallel with the extended region 14b corresponding to the extended region 14b of the first electrode 14, and the other Is formed parallel to the extension region 16b to correspond to the extension region 16b of the second electrode 16.

In addition, the first sensing pad 20 is formed to cover the upper portion of the one extended region 18b of the neighboring third electrode 18 in correspondence with the extended region 14a of the first electrode 14, and the second The second sensing pad 22 is formed to cover the upper portion of the other extended region 18b of the neighboring third electrode 18 in correspondence with the extended region 16a of the electrode 16. The first pad 20 and the second pad 22 may be formed in a rectangular shape while being spaced apart from each other.

In addition, the heating wire 30 is formed on the rear surface, that is, the rear surface of the substrate 12, and the heating wire 30 may also be formed of a pad 30a to which a voltage is applied and an extension region 30b subsequent thereto. The heating wire 30 may generate heat in the extension region 30b by a voltage applied from the outside between the pads 30a at both ends, and the surface temperature of the substrate 12 may be controlled by conducting the generated heat. Specifically, since the first sensing pad 20 on the substrate 12 is formed on a surface overlapping the region where the heating wire 30 is formed, the first sensing pad 20 may have a high surface temperature and may not have a second sensing pad (not overlapping the heating wire 30). 22 may have a relatively low surface temperature.

In addition, the first sensing pad 20 and the second sensing pad 22 may be formed of the first sensing pad 20 and the second sensing pad 22 on the front surface as shown in FIG. 4 to give selectivity to reacting gases. Filters 40 and 42 may be formed at the top, respectively.

1 to 4 may be represented by an equivalent circuit as shown in FIG. 5. Referring to FIG. 5, a terminal to which a power voltage Vd is applied corresponds to a sensing resistor connected to the first electrode 14. R1 corresponds to the first sensing pad 20, a grounded terminal corresponds to the second electrode 16, and a sensing resistor R2 connected to the second sensing pad 22 corresponds to the second sensing pad 22. The output terminal corresponds to the third electrode 18. That is, the sensing signal Vo is output by being divided by the sensing resistors R1 and R2, and the sensing signal Vo varies depending on the resistance values of the sensing resistors R1 and R2.

In the embodiment according to the present invention, the resistance value of the sensing resistor R1, that is, the first sensing pad 20 and the sensing resistor R2, that is, the second sensing pad 20 changes as the gas reacts. It will be described later.

In the above-described embodiment according to the present invention, the first sensing pad 20 reacts with a reducing gas such as hydrogen (H 2 ), ammonia (NH 3 ), toluene (C 7 H 8 ), carbon monoxide (CO), and the like. The second sensing pad 22 may be configured to increase in resistance by reacting with an oxidizing gas such as nitrogen dioxide (NO 2), sulfur dioxide (SO 2 ), sulfur trioxide (SO 3 ), or the like. In this case, referring to FIG. 5, when the sensing resistor R1 is lowered or the sensing resistor R2 is increased, the sensing signal Vo output while the power supply voltage Vd is applied is increased. That is, when the reducing gas is sensed by the first sensing pad 20 or the oxidizing gas is sensed by the second sensing pad 22, the level of the output sensing signal Vo is increased and the level rising state of the sensing signal Vo is determined. Embodiments according to the present invention can determine the sensing state of the gas.

For the configuration of the above-described embodiment, the first sensing pad 20 or the second sensing pad 22 may be formed of metal oxide particles, metal oxide nanowires, or carbon nanotubes. Specifically, the first sensing pad 20 or the second sensing pad 22 may include tin oxide (SnO 2 ), zinc oxide (ZnO), tungsten oxide (WO 3 ), ferric oxide (Fe 2 O 3 ), and indium oxide ( Mixing the main raw materials of metal oxides or carbon nanotubes such as IN 2 O 3 ) with catalysts such as platinum (Pt), palladium (Pd), vanadium (V), rhenium (Re), ferrous oxide (FeO), etc. In addition, the mixed ceramic powder may be formed into a paste to which water and a binder are added, followed by screen printing of a paste, and sintering the printed paste.

 The first sensing pad 20 and the second sensing pad 22 according to the present invention sense gas by using a reaction between a surface and a gas, and the speed at which the gas is adsorbed and the selectivity of the gas to be adsorbed are the operating temperature of the sensor. As well as the catalyst component and amount.

Accordingly, the first sensing pad 20 and the second sensing pad 22 may be formed using different catalysts and may be responsive to different gases as they are implemented to operate at different temperatures. Sensitivity change according to temperature can be illustrated as shown in Figure 6, it can be seen that the sensitivity is changed for each gas according to the temperature change, for example, the first sensing pad 20 is set to the surface temperature 400 ℃ and the second sensing The pad 22 may be set to have reactivity with different gases by setting the surface temperature to 100 ° C. In general, the first sensing pad 20 and the second sensing pad 22 may be set to have a surface temperature difference within a range of 100 ° C. to 500 ° C. according to the type of gas to be sensed.

In addition, according to the exemplary embodiment of the present invention, the material of the first sensing pad 20 and the second sensing pad 22 may be configured in the same manner, and the gas sensor may be implemented by only changing the surface temperature. That is, as described above, the first and second sensing pads 20 and 22 may include main materials of metal oxides such as SnO 2 , ZnO, WO 3 , Fe 2 O 3 , IN 2 O 3 , Pt, Pd, Catalysts such as V, Re, FeO, etc. may be mixed into ceramic powder, the mixed ceramic powder may be formed into a paste to which water and a binder are added, and then screen printing of the paste may be performed by sintering the printed paste.

Even in this case, the first sensing pad reacts with the reducing gas to decrease the resistance value according to the difference in the reaction characteristic according to the surface temperature difference, and the second sensing pad reacts with the oxidizing gas to increase the resistance value. Can be.

In addition, as shown in FIG. 4, a filter 40 having a selective permeability to a reducing gas may be further formed on the first sensing pad 20 to provide the selectivity of the gas, and an oxidizing gas may be formed on the second sensing pad 22. A filter 42 with selective permeability to may be further formed.

The filters 40 and 42 are configured to selectively transmit a gas to be sensed in the sensing pads 20 and 22 superimposed thereon, and an implementation method thereof may be variously provided, but as an example, while accelerating the reaction of the gas to be sensed. Reactions to gases that do not need to be sensed can be implemented by applying a thin film comprising a catalyst that slows or blocks.

On the other hand, the embodiment according to the present invention may be configured such that the voltage applied to the heating wire 30 is formed on the back of the substrate 12 is transmitted from the pad (50, 52) formed separately on the front, as shown in FIG. As shown in FIG. 7, in the configuration of the gas sensor, an integrated effect may be expected to apply and output all voltages to one surface. Here, the method of transferring the voltage to the pad region 30a of the heating wire 30 on the rear surface through the pads 50 and 52 on the front surface may be various methods such as coating or bonding a conductive paste through sidewalls. .

In addition, according to the embodiment of the present invention, as shown in FIG. 8, an additional heating wire 32 having a different temperature may be configured on the rear surface of the substrate. The heating wire 32 may use the same power source as the heating wire 30 or may use a separate power source having a different voltage level, and the shape of the heating wire 32 may include a pad area 32a and an expansion area similar to the heating wire 30. In comparison with this, the amount of heat generated can be reduced. Therefore, as shown in FIG. 6, the sensitivity may be adjusted by changing the surface temperatures of the first sensing pad 20 and the second sensing pad 22, and the first sensing pad 20 and the first sensing pad 20 may be adjusted according to the type of gas to be sensed. 2 may be adjusted to set the surface temperature difference of the sensing pad 22 to be in the range of 100 ° C to 500 ° C.

By configuring as described above, the embodiment according to the present invention consists of one sensor in which the first and second sensing pads made of different materials are connected in series, and the surface temperature thereof is changed to adjust sensitivity to gases. A gas sensor capable of sensing two or more gases simultaneously can be implemented.

In addition, the embodiment according to the present invention is composed of one sensor in which the first and second sensing pads made of the same material are connected in series, and the two or more gases are adjusted by adjusting the sensitivity to the gases by changing their surface temperature. A gas sensor that can sense at the same time can be implemented.

In addition, the embodiment of the present invention may add selectivity to the gases to be sensed by configuring the filters 40 and 42 on the first and second sensing pads.

In addition, the embodiment according to the present invention by the first and second sense pads are connected in series so that the change in the resistance value changes in response to the gas is connected in series to equalize the output characteristics of the sensing voltage output from the branch node therebetween Therefore, the gas may be sensed by increasing the sensing voltage when the gas is detected by the first and second sensing pads regardless of the type of gas.

Therefore, the embodiment according to the present invention can sense a plurality of gases with one gas sensor without the need of a separate driving circuit, so that the gas sensor can be implemented simply and economically.

10 gas sensor 12 substrate
14: first electrode 16: second electrode
18: third electrode 20: first sensing pad
22: second sensing pad 30, 32: heating wire
40, 42: filter 50, 52: pad

Claims (16)

An insulating substrate having a first electrode to which a power voltage is applied, a second electrode connected to ground, and a third electrode to output a sensing signal;
A first sensing pad formed between the first electrode and the third electrode;
A second sensing pad formed between the second electrode and the third electrode and formed of a material different from that of the first sensing pad; And
And a first heating wire formed on a rear surface of the substrate to heat the first sensing pad.
The first sensing pad and the second sensing pad have different surface temperatures, and a resistance value changes in response to different gases, and the sensing voltage corresponding to the change in the resistance value is output to the third electrode.
An insulating substrate having a first electrode to which a power voltage is applied, a second electrode connected to ground, and a third electrode to output a sensing signal;
A first sensing pad formed between the first electrode and the third electrode;
A second sensing pad formed between the second electrode and the third electrode and formed of the same material as the first sensing pad; And
And a first heating wire formed on a rear surface of the substrate to heat the first sensing pad.
The first sensing pad and the second sensing pad have different surface temperatures, and a resistance value is changed in response to different gases, and the gas sensor outputs the sensing voltage corresponding to the resistance value change to the third electrode. .
The method according to claim 1 or 2,
And a resistance value is lowered in response to the first sensing reducing gas, and the second sensing pad is configured to increase a resistance value in response to the oxidizing gas.
The method of claim 3,
And a filter having a selective permeability to the reducing gas is further formed on the first sensing pad.
The method of claim 3,
And a filter having a selective permeability to the oxidizing gas is further formed on the second sensing pad.
The method according to claim 1 or 2,
The first sensing pad or the second sensing pad includes at least one of metal oxide particles, metal oxide nanowires, and carbon nanotubes.
The method according to claim 1 or 2,
And a second heating wire formed on a rear surface of the substrate to heat the second sensing pad.
The method of claim 7, wherein
And the first sensing pad and the second sensing pad have a surface temperature difference within a range of 100 ° C to 500 ° C.
A first sensing resistor, to which power is applied and reacting with the reducing gas to lower the resistance value;
A second sensing resistor connected to ground and reacting with the oxidizing gas to increase resistance; And
And an output terminal connected between the first sensing resistor and the second sensing resistor to output a sensing signal.
The first sensing resistor, the second sensing resistor, and the output terminal are formed on the same substrate, and the first sensing resistor and the second sensing resistor have different surface temperatures by heating means formed on the substrate. sensor.
10. The method of claim 9,
And the first and second sensing resistors have different materials.
10. The method of claim 9,
And the first and second sensing resistors have the same material.
10. The method of claim 9,
And a filter having a selective permeability to the reducing gas is further formed on the first sensing resistor.
10. The method of claim 9,
And a filter having a selective permeability to the oxidizing gas is further formed on the second sensing resistor.
10. The method of claim 9,
The heating means is a gas sensor formed on the back surface of the substrate consisting of a first heating wire for heating the first sense resistor.
The method of claim 14,
The heating means further comprises a second heating wire formed on the rear surface of the substrate to heat the second sensing resistor.
10. The method of claim 9,
And the first and second sensing resistors have a surface temperature difference within a range of 100 ° C to 500 ° C.
KR1020100043104A 2010-05-07 2010-05-07 Gas sensor KR101237879B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020100043104A KR101237879B1 (en) 2010-05-07 2010-05-07 Gas sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020100043104A KR101237879B1 (en) 2010-05-07 2010-05-07 Gas sensor

Publications (2)

Publication Number Publication Date
KR20110123558A true KR20110123558A (en) 2011-11-15
KR101237879B1 KR101237879B1 (en) 2013-02-27

Family

ID=45393696

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020100043104A KR101237879B1 (en) 2010-05-07 2010-05-07 Gas sensor

Country Status (1)

Country Link
KR (1) KR101237879B1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101710908B1 (en) 2015-10-22 2017-02-28 한국과학기술원 Method of operating three-electrode gas sensor and apparatus for the same
EP3411698A4 (en) * 2016-03-24 2018-12-19 Kerdea Technologies, Inc. Resistive based nox sensing method and apparatus
KR102293183B1 (en) * 2020-02-27 2021-08-24 한국산업기술대학교산학협력단 Gas sensor using multiple sensing material
KR102294059B1 (en) * 2020-02-27 2021-08-26 한국산업기술대학교산학협력단 Gas sensor using multi - wavelength light

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03249555A (en) * 1990-02-28 1991-11-07 Fuji Electric Co Ltd Multicomponent gas sensor
JP4461634B2 (en) * 2001-04-25 2010-05-12 株式会社デンソー Thin film gas sensor and manufacturing method thereof

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101710908B1 (en) 2015-10-22 2017-02-28 한국과학기술원 Method of operating three-electrode gas sensor and apparatus for the same
EP3411698A4 (en) * 2016-03-24 2018-12-19 Kerdea Technologies, Inc. Resistive based nox sensing method and apparatus
US20190078491A1 (en) * 2016-03-24 2019-03-14 Kerdea Technologies, Inc. Resistive Based NOx Sensing Method and Apparatus
AU2017237818B2 (en) * 2016-03-24 2019-06-13 Kerdea Technologies, Inc. Resistive based NOx sensing method and apparatus
US10760466B2 (en) 2016-03-24 2020-09-01 Kerdea Technologies, Inc. Resistive based NOx sensing method and apparatus
EP3705880A1 (en) 2016-03-24 2020-09-09 Kerdea Technologies, Inc. Resistive based nox sensing method and apparatus
US11274591B2 (en) 2016-03-24 2022-03-15 Kerdea Technologies, Inc. Resistive based NOx sensing method and apparatus
KR102293183B1 (en) * 2020-02-27 2021-08-24 한국산업기술대학교산학협력단 Gas sensor using multiple sensing material
KR102294059B1 (en) * 2020-02-27 2021-08-26 한국산업기술대학교산학협력단 Gas sensor using multi - wavelength light

Also Published As

Publication number Publication date
KR101237879B1 (en) 2013-02-27

Similar Documents

Publication Publication Date Title
KR101237879B1 (en) Gas sensor
US20150285772A1 (en) Sensor device
KR910006223B1 (en) Gas sensor and method for production thereof
EP1281069B1 (en) Sensors for oxidizing gases
CN104364639A (en) Amperometric solid electrolyte gas sensor and detection method wherein the sensing electrode comprises at least one tungstate or molybdate compound
KR101268028B1 (en) Gas sensor
JPH1194786A (en) Tin oxide gas sensor and its production
Ménil et al. Screen-printed thick-films: from materials to functional devices
US7900501B2 (en) Air quality monitor
CN205720077U (en) Semiconductor gas sensor and encapsulating structure thereof
KR100844966B1 (en) Apparatus and sensor assembly for detecting gas
Dutronc et al. Influence of the nature of the screen-printed electrode metal on the transport and detection properties of thick-film semiconductor gas sensors
CN203070853U (en) Thermistor array and temperature sensor
JP4205601B2 (en) Carbon monoxide gas sensor and method for manufacturing P-type semiconductor
CN110088606A (en) For sensing the sensor of at least one characteristic of measurement gas
JP2946090B2 (en) Manufacturing method of ammonia gas sensor
KR20150081705A (en) Gas Sensor
KR100530003B1 (en) Gas Sensor Chip of Thick Film Type
KR20010056905A (en) Thick film gas sensor array for detecting exlposive gases with high selectivity and its fabricating method
GB2234074A (en) Gas sensor
JPH08226909A (en) Contact-combustion-type carbon monoxide gas sensor
CN218584710U (en) Catalytic combustion type gas sensor
KR100551772B1 (en) A gas sensor and the gas detecting method
JPH0335153A (en) Gas sensor
JPH0473744B2 (en)

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20160223

Year of fee payment: 4

FPAY Annual fee payment

Payment date: 20170221

Year of fee payment: 5

FPAY Annual fee payment

Payment date: 20180221

Year of fee payment: 6

FPAY Annual fee payment

Payment date: 20190201

Year of fee payment: 7