KR20110115788A - Valve, method for operating valve and vaccuum processing appratus - Google Patents

Abstract

The present invention is a valve for forming a vacuum for opening and closing the opening, the sealing portion which is in close contact with or detachable to the opening by horizontally moving in the front and rear direction with respect to the opening; And a shaft unit for vertically moving the seal in a vertical direction; and a link unit coupled to the seal and the shaft unit to convert the vertical movement of the shaft unit into horizontal movement, and horizontally move the seal in the front-rear direction.
In the vacuum forming valve according to the present invention, it is preferable to further include a driving unit coupled to one end of the shaft unit to vertically move the shaft unit.
In addition, the present invention is a valve for forming a vacuum for opening and closing the opening, the horizontal portion is moved horizontally in the front-rear direction with respect to the opening portion closed or in close contact with the opening; And a plurality of moving units connected to the sealing parts to vertically move the sealing part and horizontal movement of the sealing part, respectively, and a joint unit coupling the plurality of moving units to each other.
In addition, the present invention is a method of driving a valve to close the opening to form a vacuum, the sealing unit that can be in close contact or detachable to the opening and the shaft unit connected thereto by moving the vertical step in the vertical direction toward the opening in the first step vertically the opening front Waiting to; A second step of vertical movement of the shaft unit in the up and down direction in the standby state, and converting the second stage of vertical movement to the horizontal movement; Horizontally moving the sealing part by the converted horizontal motion to closely contact the opening part; It includes.
According to the exemplary embodiment of the present invention, the structure of the gate valve may be simplified by driving the sealing unit using one driving unit. In addition, the front and rear of the valve case can be sealed to maintain the vacuum of the chamber firmly. Therefore, the vacuum state can be maintained even when the pressure in the chamber is changed and a back pressure occurs. In addition, when a plurality of cylinders for pushing up the sealing part are provided, the pistons in the plurality of cylinders are connected to each other, thereby moving the plurality of pistons at the same speed, thereby preventing the parts of the gate valve from being deformed or damaged.

Description

VALVE, METHOD FOR OPERATING VALVE AND VACCUUM PROCESSING APPRATUS}

The present invention relates to a valve, and more particularly, to a gate valve for opening and closing a transfer passage through which a substrate enters and exits in a vacuum processing apparatus for processing the substrate.

In general, in a vacuum processing apparatus for processing a substrate, the substrate is introduced or taken out from various processing chambers through a substrate transfer passage connected to the outer wall of the vacuum chamber, and the substrate transfer passage is provided with a gate valve for opening and closing the transfer passage.

The substrate transfer passage may be provided with a valve case having an opening through which the substrate passes through the substrate (see FIG. 2). In this case, the gate valve is installed in the valve case and the opening of the gate valve is opened by driving the seal of the gate valve. Or close.

Conventionally, a device equipped with a cylinder device and a camshaft device is used to drive the seal of the gate valve, but the seal is moved to the opening position by moving the seal with the cylinder device and horizontally moving the seal with the camshaft device. This conventional gate valve has a disadvantage in that its structure is complicated and difficult to install and operate. In addition, only one side of the opening formed on the front or the rear of the valve case was sealed. In this case, when the pressure change or the external shock is applied to the chamber, the vacuum is broken while the sealing part is separated from the opening.

In addition, the gate valve generally uses a pneumatic cylinder to drive the seal for closing the opening. When a plurality of cylinders for driving the seal are provided, a difference in the movement speed of the piston disposed in each cylinder may occur. In this case, the sealing part does not seal the opening firmly and stably, and the parts of the gate valve are deformed.

The present invention provides a gate valve capable of moving the seal up and down and horizontally by using a single drive.

The present invention provides a gate valve that can be installed in the valve case having an opening on the front and rear, respectively, to seal the opening of the front and rear surfaces.

In another aspect, the present invention provides a gate valve in which the piston in the plurality of cylinders moves at the same speed when a plurality of cylinders for pushing up the seal is provided.

The present invention is a valve for forming a vacuum for opening and closing the opening, the sealing portion which is in close contact with or detachable to the opening by horizontally moving in the front and rear direction with respect to the opening; And a shaft unit for vertically moving the seal in a vertical direction; and a link unit coupled to the seal and the shaft unit to convert the vertical movement of the shaft unit into horizontal movement, and horizontally move the seal in the front-rear direction.

In the vacuum forming valve according to the present invention, it is preferable to further include a driving unit coupled to one end of the shaft unit to vertically move the shaft unit.

In addition, the present invention is a valve for forming a vacuum for opening and closing the opening, the horizontal portion is moved horizontally in the front-rear direction with respect to the opening portion closed or in close contact with the opening; And a plurality of moving units connected to the sealing parts to vertically move the sealing part and horizontal movement of the sealing part, respectively, and a joint unit coupling the plurality of moving units to each other.

In addition, the present invention is a method for driving a valve to close the opening to form a vacuum, the sealing portion that can be in close contact with or detachable to the mouth portion and the shaft unit connected thereto by moving the vertical step in the vertical direction toward the opening in the first step vertically closed portion Waiting in front of the opening; A second step of vertical movement of the shaft unit in the up and down direction in the standby state, and converting the second stage of vertical movement to the horizontal movement; Horizontally moving the sealing part by the converted horizontal motion to closely contact the opening part; It includes.

According to the exemplary embodiment of the present invention, the structure of the gate valve may be simplified by driving the sealing unit using one driving unit.

In addition, the front and rear of the valve case can be sealed to maintain the vacuum of the chamber firmly. Therefore, the vacuum state can be maintained even when the pressure in the chamber is changed and a back pressure occurs.

In addition, when a plurality of cylinders for pushing up the sealing part are provided, the pistons in the plurality of cylinders are connected to each other, thereby moving the plurality of pistons at the same speed, thereby preventing the parts of the gate valve from being deformed or damaged.

By moving the plurality of pistons by using the power unit, it is possible to open and close the substrate transfer passage to the sealed portion more quickly.

1 is a front view of a valve according to an embodiment of the present invention.
2 is an exploded perspective view of a valve according to an embodiment of the present invention.
3 is a cross-sectional view of a cylinder according to an embodiment of the present invention.
4 is an operating state diagram of a valve according to an embodiment of the present invention.
5 is an operation state diagram of the valve main part according to an embodiment of the present invention.
6 is a front view of a valve according to another embodiment of the present invention.
7 is an operating state diagram of a valve according to another embodiment of the present invention.
8 is a conceptual diagram of a vacuum processing apparatus provided with a valve according to an embodiment of the present invention.
9 is a cross-sectional view taken along line AA ′ of FIG. 8.
10 is a flowchart illustrating a valve driving method according to an embodiment of the present invention.

Hereinafter, a valve according to the present invention will be described in detail with reference to the accompanying drawings. It will be apparent to those skilled in the art that the present invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, It is provided to let you know. Like numbers refer to like elements in the figures.

1 is a front view of a valve according to an embodiment of the present invention, Figure 2 is an exploded perspective view of the valve according to an embodiment of the present invention. 3 is a cross-sectional view of a cylinder according to an embodiment of the present invention, Figure 4 is an operating state diagram of the valve according to an embodiment of the present invention. 2 to 6, the left and right directions mean the x-axis direction, the front-rear direction indicates the y-axis direction, and the vertical direction indicates the z-axis direction.

The valve according to the embodiment of the present invention is configured to include a seal 800, shaft units 300, 400, link units 600, 700.

The valve 1 may be generally installed in the valve case 10. The valve case 10 may be formed in a box shape, and openings 11 and 12 through which a substrate may pass may be provided at the front part and the rear part. have.

The sealing part 800 is a means for sealing the openings 11 and 12 of the valve case 10, and may be provided in a plate shape larger than the sizes of the openings 11 and 12, as shown in FIG. 2. . The sealing part 800 may move horizontally in the front-rear direction (y-axis direction) with respect to the openings 11 and 12. The sealing part 800 may close the openings 11 and 12 by being in close contact with the openings 11 and 12. The openings 11 and 12 may be opened apart from the spaces 11 and 12. The sealing part 800 is connected to the link units 600 and 700 which will be described later to move horizontally in the front-rear direction (y-axis direction) to be in close contact or detachment with the openings 11 and 12. A groove is formed along the edge of the sealing portion 800 in close contact with the openings 11 and 12, and the sealing member 820 is fitted into the groove (see FIG. 2). The sealing member 820 may be formed of an elastic material such as rubber, and its cross section is circular in shape, the diameter of which is slightly larger than the depth of the groove of the surface of the sealing part 800, and a part of the sealing member 820 is formed on the surface of the sealing part 800. More protruded (see FIG. 5). In this case, when the sealing part 800 is in close contact with the valve case 10 to close the openings 11 and 12, the sealing member 820 is deformed and the sealing part 800 of the valve case 10 is harder. Close contact

The shaft units 300 and 400 are means for vertically moving the sealing part 800 in the vertical direction and are connected to the sealing part 800 through the link units 600 and 700 which will be described later. Specific features and embodiments will be described later.

The link units 600 and 700 are connected to the sealing part 800 to horizontally move the sealing part 800 in the front-rear direction (y-axis direction). The link unit 600 and the shaft unit 300 and 400 are connected to the sealing part 800. By connecting the vertical and vertical movements generated by the shaft unit (300, 400) to be able to convert the horizontal movement back and forth (see Figure 4). Specific features and embodiments will be described later.

The valve according to the embodiment of the present invention may further include a driving unit. The driving unit is a means for vertically moving the shaft units 300 and 400 by being coupled to one end of the shaft units 300 and 400. As shown in FIG. And a piston 200 which is provided to reciprocate up and down inside the 100. The shaft units 300 and 400 may be coupled to an upper side of the piston 200.

The cylinder 100 is disposed below the valve case 10, and is formed in a cylindrical shape having an upper opening. The piston 200 is provided therein, and when the power is transmitted, the piston 200 moves upward. In the exemplary embodiment of the present invention, a pneumatic cylinder is used, but there is no limitation according to the type of cylinder, and may be selected from various types of cylinders capable of reciprocating the piston.

In this case, the shaft unit includes a first shaft 300 coupled to the piston 200 and interlocked with the piston; The second shaft 400 which is connected to the upper side of the piston 200 and the compressible elastic member 500 and cooperates with the first shaft 300; In this case, the second shaft 400 may have an inner space such that the first shaft 300 penetrates in the longitudinal direction.

As illustrated in FIG. 2, the first shaft 300 may be coupled to an upper side of the piston 200 and formed in a rod shape extending in the vertical direction, and may move up and down together with the piston 200. The first shaft 300 is installed to penetrate the second shaft 400 to be described later, and is formed longer than the length of the second shaft 400 so that an upper end thereof is exposed to the outside of the second shaft 400. The first shaft 300 may be provided with a hinge shaft that is rotatable by coupling the first link 600 to be described later. The first shaft 300 may further include a stopper 310 protruding from an end portion of the first shaft 300 coupled to the piston 200, and the function of the stopper 310 will be described later.

The second shaft 400 is provided in a cylindrical shape extending in the vertical direction and forming a space therein, and the first shaft 300 penetrates and is inserted therein. It is connected to the piston 200 through the elastic member 500, and can move up and down with the piston 200, like the first shaft 300. The upper end of the second shaft 400 is provided with a hinge shaft that is coupled to the second link 700 to be described later can be rotated.

In addition, the cylinder 100 may have a locking step 110 as shown in FIG. 3, and may include a stepped part 410 protruding from the outside of the second shaft 400. The second shaft 400 moves upward along the inside of the cylinder 100 and stops the second shaft 400 by being caught by the locking projection 110 protruding from the inside of the cylinder 100.

The elastic member 500 is disposed between the lower end of the second shaft 400 and the piston 200 and is made of a compressible material. The second shaft 400 into which the first shaft 300 is inserted is connected to the piston 200. When the piston 200 moves in the upper direction of the cylinder 100, not only the first shaft 300 connected to the piston 200 but also the second shaft 400 connected through the elastic member 500 move upward. At this time, when the stepped portion 410 formed on the second shaft 400 is caught by the locking step 110 of the cylinder, the second shaft 400 is no longer moved and stops. If pressure is continuously applied to move the piston 200 upward, only the first shaft 300 and the piston 200 move upward while the second shaft 400 is fixed while the elastic member 500 is compressed. (See Figure 4). The elastic member 500 may be provided in the form of a compression spring as shown in FIG. 2 and disposed at the bottom of the second shaft 400, and may be selected from various shapes and materials that may be compressed and then restored to its original shape. have.

When the shaft unit is composed of the first shaft 300 and the second shaft 400 as described above, the link unit may be composed of the first link 600 and the second link 700.

The first link 600 is a means for connecting the first shaft 300 and the sealing portion 800, is coupled to one side of the upper end of the first shaft 300 to convert the vertical movement of the piston 200 to the horizontal movement The seal 800 allows the openings 11 and 12 of the valve case 10 to be opened or closed. The first link 600 may be provided with a pair on the left and right of the first shaft 300, as shown in Figure 2 to firmly support the sealing portion 800, and up and down along the first shaft 300 One or more pairs may be provided.

The first link 600 may be provided with a pair such that one end is hinged to one end of the upper end of the first shaft 300 and the other end is hinged to one side of the sealing part, so that the first link 600 is pivoted up and down. 600b) may be disposed in the front-rear direction (y-axis direction), respectively (see FIG. 5). The first link 600 may interact with the second link 700, which will be described later, to convert the vertical movement of the vertical link by the shaft unit into the front and rear horizontal motion, and the detailed structure and operation of the first link 600 will be described. Will be described later.

The second link 700 is a means for connecting the second shaft 400 and the sealing part 800, and is coupled to one side of the upper end of the second shaft 400 to convert vertical movement of the piston 200 into horizontal movement. The seal 800 allows the openings 11 and 12 of the valve case 10 to be opened or closed. The second link 700 may be provided with a pair of left and right sides of the second shaft 400 as shown in FIG. 2 to firmly support the sealing part 800.

The second link 700 may be provided with a pair such that one end is hinged to one side of the upper end of the second shaft 400 and the other end is hinged to one side of the sealing part to pivot up and down, and the pair of second links 700a, 700b may be disposed in the front-rear direction, respectively (see FIG. 4).

The two second links 700a and 700b may be disposed at the front and the rear, similarly to the first links 600a and 600b (see FIG. 4). The second link 700 may interact with the first link 600 to convert vertical vertical movement by the shaft unit into horizontal forward and rearward movement, and detailed structure and operation of the second link unit 700 may be described. It will be described later.

When the first link and the second link are each provided as a pair and disposed in the front-rear direction, the sealing part is hinged to the first link 600a and the second link 700a disposed in front, as shown in FIG. 4. It is coupled up and down and is hinged to the front closure part 800a for sealing the front opening part 11 and the first link 600b and the second link 700b disposed at the rear, respectively, to be able to pivot up and down, and the rear opening part. It may be composed of a rear sealing portion (800b) for sealing (12). In this case, as shown in FIG. 2, the sealing part 800 includes a flat connection member 810 having a hinge shaft formed at a rear side thereof, such that each link unit 600 or 700 may be coupled to the hinge shaft.

On the other hand, Figure 6 is a front view of the valve according to another embodiment of the present invention, Figure 7 is an operating state diagram of the valve according to another embodiment of the present invention.

According to another embodiment of the present invention, the vacuum valve for opening and closing the opening is configured to include a closure 800, a plurality of moving units, joint unit.

The sealing part 800 is a means for horizontally moving in the front-rear direction with respect to the opening portion to be in close contact with or detachable from the opening portion, and the structure and technical features thereof are as described above.

The mobile unit is connected to the sealing unit 800 and is a means for vertically moving the sealing unit 800 vertically and horizontally in the front-rear direction. A plurality of moving units are provided and are connected to the sealing unit 800. Each moving unit is combined with the sealing unit 800 and the shaft unit and the shaft unit 300, 400 for vertically moving the sealing portion 800 in the vertical direction, and converts the vertical movement of the shaft unit to the horizontal movement, And link units 600 and 700 for horizontally moving the sealing part 800 in the front-rear direction. The structure and technical features of each shaft unit and link unit are as described above. In addition, each moving unit may include a cylinder 100 having an upper opening and a piston 200 reciprocating inside the cylinder, in which case the shaft units 300 and 400 are coupled to the upper side of the piston 200. .

The joint unit is a means for coupling the plurality of mobile units to each other. When a plurality of moving units for moving the sealing part 800 are provided, the moving speed of each moving unit may be different. In this case, the sealing part 800 may be distorted, so that the openings 11 and 12 may not be properly sealed. It may cause damage to the valve parts. The joint unit serves to prevent this problem. The joint unit is configured to include a joint shaft 900 coupled to each piston 200 when each moving unit has a cylinder 100 and a piston 200.

The joint unit may include a rack gear 910 coupled to the lower side of the piston 200 and a pinion gear 920 engaged with the rack gear 910, as shown in FIG. 6, in this case the joint shaft 900. Is coupled to the pinion gear 920 axis. The piston 200 provided in the plurality of cylinders 100 may move at the same speed by the joint shaft 900 connected to the pinion gear 920.

In addition, the joint shaft 900 may be further provided with a rotating device (not shown) connected thereto to rotate the joint shaft 900. In this case, it is possible to close the opening more quickly by increasing the piston moving speed. The rotating device is not limited to the type of motor and the like, and may be selected from various devices capable of rotating the joint shaft 900.

Hereinafter, a method of operating a valve according to an exemplary embodiment of the present invention having the above configuration will be described with reference to FIGS. 4 and 5.

Figure 4 is an operating state diagram of the valve according to an embodiment of the present invention, Figure 5 is an operating state diagram of the valve main portion according to an embodiment of the present invention.

First, when air is injected into an injection port (not shown) provided at the bottom of the cylinder 100, as shown in FIG. 4 (a), the piston 200 inside the cylinder moves upwards, The first shaft 300 and the second shaft 400 also move upwards. Accordingly, the sealing parts 800a and 800b coupled to the shaft units 300 and 400 and the link unit also move upwards. At this time, since the first shaft 300 and the second shaft 400 move together, the first link units 600a and 600b and the second link units 700a and 700b do not rotate, and therefore, the sealing part 800a, 800b) also does not move horizontally in the front-rear direction (y-axis direction).

While the piston 200 moves upward along the inside of the cylinder 100, as shown in FIG. 4B, the stepped portion 410 formed outside the bottom of the second shaft 400 is formed in the cylinder 100. When the locking jaw 110 is caught, the piston 200 can no longer move and stops. Naturally, the first shaft 300 inserted into the second shaft 400 and the sealing parts 800a and 800b connected to the second shaft 400 and the second link units 700a and 700b also naturally stop. At this time, the sealing parts 800a and 800b stop after reaching the position corresponding to the positions of the openings 11 and 12.

As air continues to be injected into the cylinder 100 through the injection port, the force to move the piston 200 upwards increases as the pneumatic pressure increases. At this time, as shown in (c) of FIG. 4, the elastic member 500 does not resist the pneumatic pressure and is compressed by the piston 200. As the elastic member 500 is compressed, the piston 200 moves upward as much as the compressed length. Accordingly, only the first shaft 300 coupled to the piston 200 is stopped while the second shaft 400 is stopped. It moves upward.

However, the first shaft 300 is connected to the second shaft 400 through the first links 600a and 600b, the sealing parts 800a and 800b and the second links 700a and 700b. That is, when the first shaft 300 is moved upward, the sealing parts 800a and 800b connected to the first shaft 300 and the first links 600a and 600b should also move upward, but are sealed. Since the parts 800a and 800b are connected to the second shaft 400 which is stationary, the parts 800a and 800b cannot move upward.

Therefore, when the first shaft 300 is moved upward, the second link 700a disposed forward and the second link 700b disposed rearward have respective sealing portions (as shown in FIG. 5A). 800a and 800b are pivoted upward with respect to the hinged axis (M, N). When the second links 700a and 700b are rotated in this manner, as shown in FIG. 5B, the shaft M hinged with the second link 700a disposed forward is moved forward and rearward. As the shaft N hinged to the two links 700b moves backward, the position movement occurs in the horizontal direction by the second link unit. That is, the sealing part 800a disposed at the front moves horizontally to the front opening 11 and the sealing part 800b disposed at the rear moves to the rear opening 12 and closes the opening. At this time, as shown in (b) of FIG. 5, when the first links 600a and 600b disposed in front and rear form 180 ° with each other, the sealing parts 800a and 800b may be tightly adhered to each other.

When the stopper 310 is further provided on the first shaft 300, the first shaft 300 is caught by the second shaft 400 so as not to move upward more than necessary. That is, when only the first shaft 300 moves upward by the compression of the elastic member 500, the sealing part 800 may be in close contact with the openings 11 and 12 by the first link unit 600. Make sure you move as much as you can.

In the case where the sealing parts 800a and 800b are in close contact with the openings 11 and 12 to maintain the vacuum in the chamber of the vacuum processing apparatus, the pneumatic cylinder may be continuously supplied with air to maintain the pressurized state. have.

If you want to release the vacuum in the chamber and open the opening, remove the pneumatic pressure from the pneumatic cylinder. When the pneumatic pressure is reduced, the compressed elastic member 500 is restored to the original shape, and the first shaft 300, which has been moved upward by the piston 200, moves downward. While the first shaft 300 moves downward, the sealing part 800 connected to the first link unit 600 is spaced apart from the openings 11 and 12. When the pneumatic pressure is further reduced, the piston 200 further moves downward, and eventually the second shaft 400, which has been stopped by the stepped portion 410 caught by the locking step 110, also moves downward.

Hereinafter, a vacuum processing apparatus having a valve according to an exemplary embodiment of the present invention will be described with reference to the accompanying drawings.

8 is a conceptual diagram of a vacuum processing apparatus equipped with a valve according to an embodiment of the present invention, and FIG. 9 is a cross-sectional view taken along line AA ′ of FIG. 8.

Vacuum processing apparatus with a chamber of the present invention may be provided with a valve according to the above-described embodiment on the chamber outer wall. When the vacuum processing apparatus includes a plurality of chambers, a valve according to the above-described embodiment may be provided between the chambers.

Referring to FIG. 8, the vacuum processing apparatus may include a load lock chamber 20, a process chamber 30: 30a to 30e, a transfer chamber 40, and a robot arm 50.

The load lock chamber 20 is a chamber that creates an environment in which the substrate can enter the process chamber 30 before the substrate enters the process chamber 30, and the transfer chamber 40 is loaded with the process chamber 30. It is a chamber connecting the lock chamber 200. The transfer chamber 40 is provided with a robot arm 50 that transfers the substrate in the load lock chamber 20 to the process chamber 30 or the substrate in the process chamber 30 to the load lock chamber 20. .

A valve connecting the load lock chamber 20 and the transfer chamber 40 may be provided between the load lock chamber 20 and the transfer chamber 40 as shown in FIG. 9. In addition, a valve may be provided between the process chamber 30 and the transfer chamber 40. This is to stably preserve the vacuum state of each chamber when the substrate is moved between the chambers and to facilitate the process. In this embodiment, as described with reference to FIG. 8 as a device having a cluster type structure, the scope of the present invention is not limited thereto. In this case, the substrate is vertically transferred. It can also be applied to the vacuum processing device of other structure.

Hereinafter, a valve driving method according to an exemplary embodiment of the present invention will be described with reference to the accompanying drawings.

10 is a flowchart illustrating a valve driving method according to an embodiment of the present invention.

First, as shown in (a) of FIG. 4, the sealing part 800 and the shaft units 300 and 400 connected thereto, which are in close contact with or detachable from the openings 11 and 12, are moved upward and downward toward the openings 11 and 12. The first step vertical movement (S 10). Then, the opening portion causes the sealing portion 800 to wait at a position in front of the opening portions 11 and 12 (S 20). In this state, the shaft units 300 and 400 are vertically moved in the vertical direction in the second step as shown in FIG. 4B (S 30).

When the shaft unit for vertically moving the first stage and the second stage is composed of the first shaft 300 and the second shaft 400, the first shaft 300 and the second shaft 400 in the first stage vertical movement. 4 moves together ((a) → (b) of FIG. 4), and in the second stage vertical movement, only the first shaft 300 is vertically moved while the second shaft 400 is fixed (FIG. 4 (b)). ) → (c)).

The two-stage vertical movement of the shaft unit (300, 400) is converted into a horizontal movement (S 40). When the link units 600 and 700 are coupled between the shaft units 300 and 400 and the sealing part 800, the link units 600 and 700 receive vertical movements from the shaft units 300 and 400. Convert to horizontal motion (see FIG. 5).

The closed portion 800 is moved horizontally by the horizontal movement converted in this way (S 50), the closed portion 800 is in close contact with the opening (S 60).

When there are a plurality of openings facing each other, a plurality of sealing parts 800 may be formed corresponding to each opening, and each of the sealing parts may be in close contact with each opening at the same time. For example, when two openings are formed in the front-rear direction as shown in FIG. 4, two sealing parts are also formed in the front-back direction, and each of the openings 800a and 800b is formed by the symmetrically formed link unit. It will be in close contact with (11, 12) at the same time.

A plurality of shaft units are connected to the sealing unit, and each shaft unit may be coupled to each other to interlock with each other (see FIGS. 6 and 7).

The embodiments and drawings attached to this specification are merely to clearly show some of the technical ideas included in the present invention, and those skilled in the art can easily infer within the scope of the technical ideas included in the specification and drawings of the present invention. Modifications that can be made and specific embodiments will be apparent that both are included in the scope of the invention.

1: valve 10: valve case
11: front opening 12: rear opening
100: cylinder 110: locking jaw
200: piston 300: first shaft
400: second shaft 500: elastic member
600: first link unit 700: second link unit
800: sealing portion 900: joint shaft

Claims (19)

A vacuum valve for opening and closing the opening,
A sealing part which is horizontally moved in the front-rear direction with respect to the opening and is in close contact with or detached from the opening;
A shaft unit for vertically moving the seal in a vertical direction; and
And a link unit coupled to the closure part and the shaft unit to convert vertical movement of the shaft unit into horizontal movement and horizontal movement of the closure part in the front-rear direction. The method according to claim 1,
And a driving unit coupled to one end of the shaft unit to vertically move the shaft unit. The method according to claim 2,
The driving unit
A cylinder disposed below the shaft unit and having an upper opening;
And a piston provided to reciprocate up and down inside the cylinder.
A valve unit is coupled to the shaft unit above the piston. The method according to claim 3,
Shaft unit
A first shaft coupled to the piston and interlocked with the piston;
And a second shaft connected to the upper side of the piston by a compressible elastic member and interlocked with the first shaft. The method of claim 4,
The second shaft
An inner space is formed so that the first shaft penetrates in the longitudinal direction. The method according to claim 5,
The link unit
A pair of first links, one end of which is hinged to an upper end of the first shaft and the other end of which is hinged to one side of the sealing part, and rotates up and down, respectively, disposed in the front-rear direction; and
And a pair of second links, one end of which is hinged to an upper end of the second shaft and the other end of which is hinged to one side of the sealing part, and rotates up and down, respectively, disposed in the front-rear direction. The method of claim 6,
The sealing part
A front seal hinged to the first link and the second link disposed at the front, and rotatable up and down, and a rear seal pivoted up and down, respectively hinged to the first link and the second link disposed at the rear; valve. The method according to claim 5,
The stepped portion is provided on the outside of the lower end of the second shaft,
A locking jaw is formed inside the upper end of the cylinder,
And the stepped portion is in contact with the locking step when the piston moves upward. A vacuum valve for opening and closing the opening,
A sealing part which is horizontally moved in the front-rear direction with respect to the opening and is in close contact with or detached from the opening;
A plurality of moving units connected to the sealing parts to vertically move the sealing part and horizontal movement of the front and rear directions; and
And a joint unit coupling the plurality of moving units to each other. The method according to claim 9,
Each mobile unit
A shaft unit for vertically moving the seal in a vertical direction; and
And a link unit coupled to the closure part and the shaft unit to convert vertical movement of the shaft unit into horizontal movement and horizontal movement of the closure part in the front-rear direction. The method according to claim 10,
Each moving unit includes a cylinder having an upper opening and a piston reciprocating in the cylinder, and each shaft unit is coupled to the upper side of each piston,
Said joint unit comprising a joint shaft coupled to said respective pistons. The method of claim 11,
The joint unit includes a rack gear coupled to the lower piston, the pinion gear meshing with the rack gear,
The joint shaft is coupled to the pinion gearshaft. The method of claim 12,
And a rotary device connected to the joint shaft to rotate the joint shaft. A method of driving a valve that closes an opening to form a vacuum,
A first step of vertically moving the sealing unit which is in close contact with or detachable to the opening and the shaft unit connected thereto in a vertical direction toward the opening, causing the sealing unit to stand in front of the opening;
Moving the shaft unit vertically in a second step in the standby state and converting the second stage vertical motion into a horizontal motion;
Horizontally moving the closure part by the converted horizontal motion to closely contact the opening; Valve driving method comprising a. The method according to claim 14,
The shaft unit includes a first shaft and a second shaft,
The first step of vertical movement is the valve and the first shaft and the second shaft is vertical movement, the second stage of the vertical movement is the valve drive method of the vertical movement. The method according to claim 14,
And a link unit is coupled between the shaft unit and the seal to convert the vertical movement of the shaft unit into the horizontal movement. The method according to claim 14,
When a plurality of openings are formed to face each other, a plurality of the sealing portion is formed corresponding to each opening portion, the valve driving method in which each sealing portion is in close contact with each opening at the same time. The method according to claim 14,
A plurality of shaft units are connected to the seal, and each shaft unit is coupled to each other to drive the valve drive method. In the vacuum processing apparatus provided with a chamber,
Is installed on the outer wall of the chamber, or if provided with a plurality of chambers includes a valve installed between each chamber,
The valve is provided with a vacuum processing apparatus according to any one of claims 1 to 12.

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