KR20110104392A - Probing apparatus for signal transmission characteristic of minute pitch between electrical transmission lines - Google Patents

Abstract

An aspect of the present invention is to provide an apparatus for measuring signal transmission characteristics of a fine pitch transmission line that enables measurement of signal transmission characteristics of a transmission line in a horizontal state or a vertical state of a specimen.
An apparatus for measuring signal transmission characteristics of a micropitch transmission line according to an exemplary embodiment of the present invention includes a plate-shaped base disposed horizontally and installed on the base to mount a specimen in a horizontal or vertical state, and to vertically position the specimen. A specimen adjusting part for adjusting a position, a pair of probe adjusting parts disposed between both sides of the specimen adjusting part and adjusting the position of the probe with respect to the specimen, and the specimen mounted on the specimen adjusting part. It includes a camera control unit for adjusting the position of the camera.

Description

Signal transmission characteristic measuring device of fine pitch transmission line {PROBING APPARATUS FOR SIGNAL TRANSMISSION CHARACTERISTIC OF MINUTE PITCH BETWEEN ELECTRICAL TRANSMISSION LINES}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for measuring signal transmission characteristics of a fine pitch transmission line, which enables calibration of a horizontal state and measurement of a horizontal / vertical state.

Due to the miniaturization and high speed of digital systems, the transmission characteristics of transmission lines in the system become important. Therefore, research to reduce the distortion and loss of the signal by the transmission line has been continued. In order to improve the signal transmission characteristics of the transmission line, it is necessary to examine the transmission line.

The transmission line is composed of numerous signal lines and via holes in a printed circuit board (PCB). The high speed of the signal causes signal distortion so that parasitic components are generated in signal lines and via holes, which were not generated at low frequencies. As crosstalk occurs due to the interaction between signal lines and via holes, it becomes difficult to analyze the transmission lines and via holes at high frequencies. Therefore, it is necessary to measure the individual signal transmission characteristics of the transmission line and the via hole.

A probe station using a vector network analyzer (VNA) is used to measure the propagation characteristics of a signal on a transmission line of an electrical signal. However, since the probe station is configured to perform horizontal measurement only, it is not applicable to the case where the signal transmission characteristic must be measured on both sides of a packaged sample such as a printed circuit board (PCB) having a via hole or a semiconductor chip.

An aspect of the present invention is to provide an apparatus for measuring signal transmission characteristics of a fine pitch transmission line that enables measurement of signal transmission characteristics of a transmission line in a horizontal state or a vertical state of a specimen.

An apparatus for measuring signal transmission characteristics of a micropitch transmission line according to an exemplary embodiment of the present invention includes a plate-shaped base disposed horizontally and installed on the base to mount a specimen in a horizontal or vertical state, and to vertically position the specimen. A test piece control unit for adjusting the position, and a pair of probe control unit disposed between the two sides, the probe control unit for adjusting the position of the probe with respect to the specimen, respectively.

The specimen adjusting unit may include: a first fixing block fixed to the base, a first guide rail fixed to the first fixing block and installed in parallel with the base, and a first guide block installed on the first guide rail and slidingly moved. And a mounting table disposed in parallel with the base, a second fixing block fixed to the lower surface of the mounting table, a second guide rail fixed to the second fixing block and installed in parallel with the mounting table, and installed on the second guide rail. A second guide block for sliding movement, a lead screw screwed to the second guide block and rotatably installed on the mounting table, a first connecting bar connecting the first fixing block and the second guide block with a pin, and the The first guide block and the second fixing block may be connected by a pin, and may include a second connection bar connected by the first connection bar and the pin. .

The specimen adjusting part may include a horizontal fixing part mounted on the mounting table to fix the specimen in a horizontal state.

The horizontal fixing part may include a body forming a vacuum chamber, a connector connected to one side of the body to provide a vacuum pressure to the vacuum chamber, and a plurality of upper surfaces of the body to form a vacuum pressure of the vacuum chamber. It may include a vacuum hole provided in.

The specimen adjusting part may include a vertical fixing part mounted on the mounting table to fix the specimen in a vertical state.

The vertical fixing part may include a body forming a long moving hole in one direction, a lead screw disposed in the longitudinal direction of the moving hole and rotatably installed on the body, and screwed to the lead screw to move along the moving hole. It may include a first jaw and a second jaw holding the specimen in a vertical state.

The probe adjusting unit may include a bracket for mounting the probe, a rotation adjusting unit for mounting and rotating the bracket to adjust an angle of the probe with respect to the specimen, and a horizontal and vertical direction moving on the base by mounting the rotating control unit. It may include a position adjusting unit for adjusting the position of the probe relative to the specimen.

The position adjusting unit may include a fixed plate fixed on the base, a first plate reciprocating in a first direction on the fixing plate, a second plate reciprocating in a second direction orthogonal to the first direction on the first plate, An orthogonal member may be installed on the second plate in a third direction perpendicular to the first direction and the second direction, and a third plate reciprocating in the third direction from one side of the rectangular member.

The position adjusting unit may include a first micrometer installed on the fixed plate that is elastically supported with each other and connecting the rod to the first plate, and installed on the first plate that is elastically supported with each other and the rod may be mounted on the second plate. A second micrometer connected to the second micrometer, and a third micrometer installed on the third plate elastically supported to each other and connecting the rod to the right angle member.

The rotation controller may be rotatably mounted to the third plate of the position controller to firstly adjust an angle of the probe, and interposed between the first rotation member and the third plate. It may include a second rotating member selectively connected or separated from the first rotating member to adjust the angle of the probe in the secondary.

The rotation control unit includes a fourth micrometer installed on the third plate and connecting the rod to the second rotation member, and a connection screw provided on the second rotation member and selectively connected to the first rotation member. can do.

The position adjusting unit further includes a position adjusting base installed on the base to mount the fixing plate, and the position adjusting base is disposed along the first direction to set the first direction position of the fixing plate. A plurality of mounting holes may be provided.

In addition, the apparatus for measuring signal transmission characteristics of a fine pitch transmission line according to an embodiment of the present invention may further include a camera controller for adjusting a position of the camera with respect to the specimen mounted on the specimen control unit.

The base, the specimen control unit, and the probe control unit are formed of a nonmagnetic material, and the base may include a fixing / separation plate formed of a magnetic material to fix or separate the camera control part by magnetic.

The fixing / separation plate may include a first fixing / separation plate and a second fixing / separation plate provided on both sides of the specimen adjusting part between a pair of the probe adjusting parts.

The camera control unit, a magnetic regulator fixed to or separated from the first fixing / separating plate or the second fixing / separating plate, a pillar member installed in a direction perpendicular to the magnetic regulator, jointly connected to the pillar member It may include an arm member, a bracket mounted to the arm member so as to be movable in the longitudinal direction of the arm member via a moving part, and a holder connected to the bracket by a ball joint to mount the camera.

The moving part includes a body mounted on the arm member with a fixing screw and defining a moving groove therein, a pinion disposed inside the moving groove of the body, a handle connected to the pinion and positioned outside the body, and the pinion. Gear may be coupled to the moving groove is mounted to the moving groove for mounting the bracket.

As described above, according to one embodiment of the present invention, the specimen is mounted in a horizontal or vertical state in the specimen adjusting unit, and the position of the probe relative to the specimen is adjusted by the probe adjusting unit so that the specimen is kept in the horizontal state or vertical state of the transmission line. There is an effect that can measure the signal transmission characteristics. In addition, an embodiment of the present invention has the effect of enabling the calibration of the VNA to be calibrated on a predetermined basis even when the signal transmission characteristics of the transmission line between the probe and the VNA in a horizontal state.

1 is a perspective view showing a schematic configuration of an apparatus for measuring signal transmission characteristics of a fine pitch transmission line according to an embodiment of the present invention.
FIG. 2 is an exploded perspective view of the specimen adjusting part in FIG. 1. FIG.
Figure 3 is a perspective view of a state in which the horizontal fixing portion is installed on the mounting table in FIG.
FIG. 4 is an exploded perspective view of a state in which the vertical fixing part is installed on the mounting table of FIG. 2.
FIG. 5 is a perspective view of the probe adjustment unit in FIG. 1. FIG.
Figure 6 is an exploded perspective view of the rotation control in Figure 5;
7 is a cross-sectional view of the assembled state of FIG.
FIG. 8 is an exploded perspective view of the camera control unit of FIG. 1. FIG.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the present invention. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. In order to clearly illustrate the present invention, parts not related to the description are omitted, and the same or similar components are denoted by the same reference numerals throughout the specification.

1 is a perspective view showing a schematic configuration of an apparatus for measuring signal transmission characteristics of a fine pitch transmission line according to an embodiment of the present invention. Referring to FIG. 1, an apparatus for measuring signal transmission characteristics of a micropitch transmission line according to an exemplary embodiment (hereinafter, referred to as a “measurement apparatus” for convenience) may include a base 1, a specimen adjusting unit 2, and first and second devices. And a probe adjuster 3, 4 and a camera adjuster 5.

The base 1 provides a space for allowing horizontal calibration and horizontal / vertical measurement, and is formed in a plate shape and arranged horizontally. The specimen adjusting unit 2, the first and second probe adjusting units 3 and 4 and the camera adjusting unit 5 are installed on the base 1. The base 1 provides a planar space set in a first direction (x-axis direction) and a second direction (y-axis direction) orthogonal to each other. The test piece adjusting unit 2 is installed on the base 1 to mount the test piece S in a horizontal or vertical state, and is configured to adjust a vertical direction (z-axis direction) position of the test piece S. The first and second probe adjusting units 3 and 4 are disposed on both sides of the x-axis direction with the specimen adjusting unit 2 interposed therebetween to adjust the positions of the first and second probes with respect to the specimen S, respectively. It is configured to.

The specimen adjusting unit 2 mounts the specimen S in a horizontal or vertical state, and the first and second probe adjusting units 3 and 4 adjust the position of the probe with respect to the specimen S, respectively. While maintaining the specimen (S) in the horizontal state or vertical state it is possible to measure the signal transmission characteristics of the transmission line formed in the specimen (S). For example, when the specimen adjusting unit 2 mounts the specimen S in a horizontal state, each of the probes in which the first and second probe adjusting units 3 and 4 are connected to a VNA (not shown) may be used. Calibrate while keeping the level on (2). In this horizontal state, the probe is connected to the transmission line of the specimen (S) to measure the signal transmission characteristics in the transmission line. In addition, when the specimen adjusting unit 2 mounts the specimen S in the vertical state after the calibration in the horizontal state, in this vertical state, the probe is connected to the transmission line of the specimen S, for example, a via hole or a semiconductor. They are connected to both sides of a packaged state, such as a chip, to measure signal transmission characteristics between the two sides.

FIG. 2 is an exploded perspective view of the specimen adjusting part in FIG. 1. FIG. Referring to FIG. 2, the specimen adjusting unit 2 is formed to fix the specimen S and adjust the position in the z-axis direction. For example, the first and second fixing blocks 211 and 212 and the first may be adjusted. And second guide rails 221 and 222, first and second guide blocks 231 and 232, mounting brackets 24, lead screws 25, and first and second connecting bars 261 and 262. do.

The first fixing block 211 is spaced along the y-axis direction and fixed to the base 1. The first guide rails 221 may be formed in one piece parallel to the base 1, but may be formed in one pair spaced in the y-axis direction as shown in the x-axis direction. Accordingly, four first fixing blocks 211 are formed to support each end of the pair of first guide rails 221. The first guide block 231 may be mounted on the pair of first guide rails 221 to slide in the y-axis direction along the first guide rails 221.

The mounting table 24 maintains a parallel state with the base 1 above the base 1 and is spaced apart from the base 1 in the z-axis direction according to the operation of the specimen adjusting unit 2. The second fixing blocks 212 are spaced apart along the y-axis direction and fixed to the bottom surface of the mounting table 24. The second guide rail 222 may be formed in one pair in parallel with the mounting table 24, but may be formed in one pair spaced in the y-axis direction as shown in the x-axis direction. Accordingly, four second fixing blocks 212 are formed to support each end of the pair of second guide rails 222. The second guide block 232 may be mounted on the pair of second guide rails 222 to slide in the y-axis direction along the second guide rails 222.

The lead screw 25 is screwed to the second guide block 232 and is rotatably installed on one side of the mounting table 24. A handle 251 is provided at one side of the lead screw 25. By rotating the handle 251, the lead screw 25 rotates in place of the mounting table 24, and the second guide block 232 installed on the lead screw 25 moves on the second guide rail 222.

The first and second connection bars 261 and 262 cross each other and are connected to each other by pins 263 at intersections, so that the second guide block 232 is moved horizontally (y-axis direction) by the lead screw 25. To vertical (z-axis direction) movement of the mounting table 24. The first connection bar 261 connects the first fixing block 211 and the second guide block 232 to each other with pins 263, and the second connection bar 262 is connected to the first guide block 231 and the first guide block 231. 2 fixing blocks 212 are connected to each other with a pin (263).

FIG. 3 is a perspective view of a horizontal fixing unit installed in the mounting stand in FIG. 2, and FIG. 4 is an exploded perspective view of a vertical fixing unit installed in the mounting stand in FIG. 2. 3 and 4, the specimen adjusting part 2 is a horizontal fixing part 27 (see Fig. 3) that fixes the specimen S in a horizontal state or a vertical fixing part 28 (fixing it in a vertical state) ( 4). In the specimen adjusting unit 2, the horizontal fixing unit 27 and the vertical fixing unit 28 may be selectively mounted on the mounting table 24.

Referring to FIG. 3, the horizontal fixing part 27 is mounted on the mounting table 24 and connected to one side of the body 272 and the body 272 to form a vacuum chamber 271 inside thereof, and the vacuum chamber 271. A connector 273 for providing a vacuum pressure to the sample, and a vacuum hole 274 formed on the upper surface of the body 272 to provide the vacuum pressure of the vacuum chamber 271 to the specimen S. The specimen S is fixed in a horizontal state by placing the specimen S on the upper surface of the body 272 and applying a vacuum pressure formed in the vacuum chamber 271 to the specimen S with the vacuum hole 274. Accordingly, the horizontal fixing part 27 fixes the specimen S in a horizontal state with respect to the mounting table 24 and the base 1, thereby enabling horizontal calibration using a commercially available calibration kit made to be used only in the horizontal state. In this horizontal state, it is possible to measure the signal transmission characteristic of the transmission line formed on one surface of the specimen (S).

4, the vertical fixing portion 28 is mounted to the mounting table 24, the body 282 to form a moving hole 281 elongated in the y-axis direction, the longitudinal direction (y-axis direction) of the moving hole 281 And a screw screwed to the lead screw 283 and the lead screw 283, which is disposed in the rotatable position of the body 282 and moves along the movement hole 281 to hold the specimen S in a vertical state. 1, 2 jaw (284, 285). The lead screw 283 is formed of screws in different directions at portions corresponding to the first and second jaws 284 and 285, respectively. For example, the first jaw 284 and the corresponding lead screw 283 portion may be formed with the left screw, and the second jaw 285 and the corresponding lead screw 283 portion may be formed with the right screw. The first and second jaws 284 and 285 are spaced apart or approach each other by placing the specimen S between the first and second jaws 284 and 285 and rotating the lead screw 283. By the first and second pairs 284 and 285 approaching, the specimen S is fixed in a vertical state. Accordingly, the vertical fixing part 28 fixes the specimen S in a vertical state with respect to the mounting table 24 and the base 1, thereby improving signal transmission characteristics between both surfaces of the specimen S such as via holes or semiconductor chip packages. Enable measurement

FIG. 5 is a perspective view of the probe adjustment unit in FIG. 1. FIG. Referring to FIG. 5, the first and second probe adjusting units 3 and 4 are formed in the same structure and are installed on both sides of the specimen adjusting unit 2 in the x-axis direction, respectively, so that the horizontal calibration and the horizontal of the specimen S are performed. It enables the measurement and also enables the vertical measurement of the specimen (S). For convenience, the first probe adjusting unit 3 will be described as an example.

The first probe adjustment unit 3 is a bracket 31 for mounting the probe P, the rotation control unit 32 for adjusting the angle of the probe (P) relative to the specimen (S) by mounting and rotating the bracket (31). ), And a position adjusting unit 33 mounted to the rotation adjusting unit 32 to move in the horizontal and vertical directions on the base 1 to adjust the position of the probe P with respect to the specimen S. For example, the bracket 31 is bent at right angles and mounted on the rotation control part 32 to one side, and extended to the other side, and the probe P is mounted at the end thereof to attach the probe P to the specimen S. To be electrically connected. The probe P is connected to a tip provided at the end of the probe S to a transmission line of the specimen S, that is, a signal line and a ground line.

The position adjusting unit 33 is elastically supported by the position adjusting base 331 installed on the base 1, the fixing plate 332 fixed to the position adjusting base 331, and the fixing plate 332 and fixed plate. The first plate 333 reciprocating in the x-axis direction on the 332, the second plate 334 elastically supported on the first plate 333 and reciprocating in the y-axis direction on the first plate 333, and The right angle member 335 elastically supported by the second plate 334 and installed in the z-axis direction on the second plate 334, and one side of the right angle member 335 elastically supported by the right angle member 335. And a third plate 336 reciprocating in the z-axis direction. That is, the position adjusting unit 33 is configured to adjust the position of the rotation adjusting unit 32 and the probe P mounted thereon in the x, y and z axis directions on the base 1. The position adjusting base 331 has a plurality of mounting holes 337 which are disposed along the x-axis direction and are formed along the x-axis direction to set the position of the fixing plate 332 in the x-axis direction. The positioning base 331 and the mounting holes 337 formed thereon may allow the specimen S fixed to the mounting table 24 of the specimen adjusting unit 2 to effectively correspond to a semiconductor chip package or a printed circuit board of various sizes. do. Since the structure which is elastically supported can apply the well-known structure which interposes tension or a compression spring (not shown) between both, detailed description is abbreviate | omitted.

The position adjusting unit 33 supports the first, second, and third micrometers M1, M2, which support the first, second, and third plates 333, 334, and 336 in a direction that resists the elastic direction of the spring. M3). The first micrometer M1 is installed on the fixing plate 332 which is elastically supported with each other, and connects the rod to the first plate 333, so that the first micrometer M1 is on the fixing plate 332 in the x-axis direction. Adjust the position. The second micrometer M2 is installed on the first plate 333 which is elastically supported with each other and connects the rod to the second plate 334 so that the y of the second plate 334 on the first plate 333 can be obtained. Adjust the axial position. The third micrometer M3 is installed on the third plate 336 that is elastically supported with each other, and connects the rod to the right angle member 335 to adjust the z-axis position of the third plate 336. That is, by adjusting the first, second, and third micrometers M1, M2, and M3, the positions of the first, second, and third plates 333, 334, and 336 on the positioning base 331 are adjusted. In addition, the position of the rotation control unit 32 mounted on the third plate 336 is adjusted with respect to the specimen (S).

FIG. 6 is an exploded perspective view of the rotation controller of FIG. 5, and FIG. 7 is a cross-sectional view of the assembled state of FIG. 6. 5 to 7, the rotation controller 32 includes first and second rotation members 321 and 322 rotatably mounted to the third plate 336 of the position controller 33. . The first rotating member 321 is first coupled to the third plate 336 to adjust the angle of the bracket 31 and the probe P. When the first rotating member 321 is rotated, a large range of probe P angles is adjusted. The second rotating member 322 is interposed between the first rotating member 321 and the third plate 336 to be selectively connected or separated from the first rotating member 321 to secondaryly bracket 31 and the probe ( Combined to adjust the angle of P). When the first and second rotating members 321 and 322 are integrally rotated, the angle of the probe P is adjusted in a fine range. For example, the connecting screw 323 is provided by screwing the second rotating member 322 is selectively connected to the first rotating member 321. That is, when the connecting screw 323 which is screwed to the second rotating member 322 is tightened, the end of the connecting screw 323 comes into close contact with the hub 324 of the first rotating member 321, so that the first and second rotating members are closed. 321 and 322 are integrated, and when the connecting screw 323 is loosened, the end of the connecting screw 323 is spaced apart from the hub 324 of the first rotating member 321 so that the first and second rotating members 321, 322 are separated from each other.

In order to finely adjust the angle of the probe P, the rotation controller 32 further includes a fourth micrometer M4. The fourth micrometer M4 is connected to the second rotating member 322 installed on the third plate 336 and elastically supported by the rod, so that the second rotating member 322 and the first rotating member 321 are provided. , Finely adjust the rotation angle of the bracket 31 and the probe (P). As a result, the positions in the x, y and z directions of the rotation control unit 32 are adjusted with respect to the specimen S according to the first, second and third micrometers M1, M2 and M3. The angle is adjusted with respect to the specimen S of the bracket 31 and the probe P according to the first rotating member 321 and the fourth micrometer M4 on the adjusting unit 32.

FIG. 8 is an exploded perspective view of the camera control unit of FIG. 1. FIG. Referring to FIG. 8, the camera adjusting unit 5 is configured to adjust the position of the camera C with respect to the specimen S mounted on the specimen adjusting unit 2. A high magnification camera C is essential for enabling fine pitch probing in the specimen S. The camera control unit 5 of the present embodiment is configured to photograph both sides of the vertically standing specimen (S) with one camera when measuring the signal transmission characteristics at both sides of the specimen (S) in the vertical state, Reduce the number of cameras used. For example, the camera C may use a USB camera having a macro function for high magnification, and may use a lamp integrated camera that does not require a separate lamp. Since the camera C is connected to a computer, the position of the probe P with respect to the specimen S can be monitored in real time.

Referring back to FIG. 1, the base 1, the specimen adjusting unit 2, and the first and second probe adjusting units 3 and 4 are formed of a nonmagnetic material so that the specimen S can be freed from the influence of the magnetic field. The base 1 includes a fixing / separation plate 11 formed of a magnetic material to fix or separate the camera adjusting part 5 by magnetic. The fixing / separating plate 11 may include a first fixing / separating plate 111 provided at both sides of the specimen adjusting unit 2 in the y-axis direction between the pair of first and second probe adjusting units 3 and 4. Second fixing / separating plate 112. The first and second fixing / separating plates 111 and 112 allow the camera adjusting part 5 to be moved and installed on both sides of the y-axis direction of the specimen S.

Referring back to FIG. 8, the camera adjuster 5 is a magnetic regulator 51 or a magnetic regulator 51 that is magnetically fixed to the first and second fixing / separation plates 111 and 112 or separated by magnetic release. ) The pillar member 52 installed at right angles to the arm member, the arm member 54 connected to the joint member 53 to the pillar member 52, and the arm member 54 mounted to the arm member 54 via the moving part 55. A bracket 56 movably connected in the longitudinal direction of the 54, and a holder 58 connected to the bracket 56 by a ball joint 57 to mount the camera C.

The magnetic regulator 51 is formed to have or do not have magnetic by the rotation operation of the switch, it is possible to apply a known configuration. The joint 53 fixedly mounts the arm member 54 to the pillar member 52, and moves on the pillar member 52 and the arm member 54 to fix the pillar member 42 and the arm member 54 to each other. It is formed so that it can be, and a well-known structure can be applied. The moving part 55 is mounted to the arm member 54 by a fixing screw 551 and is disposed inside the moving groove 552 of the body 553 and the moving groove 552 of the body 553. A pinion 554, a handle 555 connected to the pinion 554 and positioned outside the body 553, and a movable member geared to the pinion 554 to be mounted to the moving groove 552 and to mount the bracket 56. 556.

That is, the camera adjusting unit 5 adjusts the joint 53 to adjust the position of the arm member 54 on the pillar member 52, and the moving member 556 coupled to the pinion 554 by operating the handle 555. ) And by adjusting the position of the bracket 56, and by adjusting the direction of the holder 58 and the camera (C) in the desired direction by operating the ball joint 57, the specimen (S) and the probe ( Allows you to monitor the connection status of P).

Although the preferred embodiments of the present invention have been described above, the present invention is not limited thereto, and various modifications and changes can be made within the scope of the claims and the detailed description of the invention and the accompanying drawings. Naturally, it belongs to the scope of the invention.

1: Base 2: Specimen Control Part
3, 4: first and second probe adjustment unit 5: camera adjustment unit
11: fixing / separating plate 24: mounting table
25, 283: lead screw 27: horizontal fixing part
28: vertical fixing part 31: bracket
32: rotation control unit 33: position adjustment unit
51: magnetic regulator 52: pillar member
53: joint 54: arm member
55: moving part 56: bracket
57: ball joint 58: holder
111, 112: 1st, 2nd fixed / separation plate 211, 212: 1st, 2nd fixed block
221 and 222: first and second guide rails 231 and 232: first and second guide blocks
251, 555: handles 261, 262: first and second connecting bars
263: pin 271: vacuum chamber
272, 282, 553 Body 273 End Connection
274: vacuum hole 281: moving hole
284, 285: Article 1, 2 (jaw) 331: Adjustment base
332: fixing plate 333, 334, 336: first, second, third plate
335: right angle member 337: mounting hole
321, 322: first and second rotating member 323: connecting screw
324: hub 551: set screw
552: Moving Home 554: Pinion
556: moving member C: camera
M1, M2, M3, M4: first, second, third, fourth micrometer
P: Probe S: Specimen

Claims (17)

A plate-shaped base disposed horizontally;
A specimen adjusting unit installed on the base to mount the specimen in a horizontal or vertical state and to adjust a vertical position of the specimen; And
A pair of probe control units disposed on both sides of the specimen control unit to adjust the position of the probe with respect to the specimen.
Signal transmission characteristic measurement apparatus of a fine pitch transmission line comprising a. The method according to claim 1,
The specimen control unit,
A first fixing block fixed to the base,
A first guide rail fixed to the first fixing block and installed in parallel with the base;
A first guide block installed on the first guide rail and slidingly moved;
Mounting stand arranged in parallel with the base,
A second fixing block fixed to the lower surface of the mounting table;
A second guide rail fixed to the second fixing block and installed in parallel with the mounting table;
A second guide block installed on the second guide rail and slidingly moved;
A lead screw screwed to the second guide block and rotatably installed on the mounting table;
A first connecting bar connecting the first fixing block and the second guide block with a pin, and
A second connecting bar connecting the first guide block and the second fixing block with a pin and connecting the first connecting bar with a pin;
Signal transmission characteristic measurement apparatus of a fine pitch transmission line comprising a. The method of claim 2,
The specimen control unit,
The signal transmission characteristic measurement apparatus of the fine pitch transmission line is mounted to the mounting unit comprising a horizontal fixing unit for fixing the specimen in a horizontal state. The method of claim 3,
The horizontal fixing portion,
Body forming a vacuum chamber,
A connector connected to one side of the body to provide a vacuum pressure to the vacuum chamber, and
A plurality of vacuum holes formed on the upper surface of the body to provide a vacuum pressure of the vacuum chamber to the specimen
Signal transmission characteristic measurement apparatus of a fine pitch transmission line comprising a. The method of claim 2,
The specimen control unit,
The signal transmission characteristic measurement apparatus of the fine pitch transmission line is mounted to the mounting unit including a vertical fixing unit for fixing the specimen in a vertical state. The method of claim 5,
The vertical fixing portion,
A body forming a long moving hole in one direction,
A lead screw disposed in the longitudinal direction of the moving hole and rotatably installed in the body; and
A first jaw and a second jaw screwed to the lead screw to move along the moving hole to hold the specimen in a vertical state.
Signal transmission characteristic measurement apparatus of a fine pitch transmission line comprising a. The method according to claim 1,
The probe adjustment unit,
A bracket for mounting the probe,
Rotation control unit for mounting the bracket to rotate to adjust the angle of the probe relative to the specimen, And
Position adjusting unit for mounting the rotation control unit to adjust the position of the probe relative to the specimen by moving in the horizontal and vertical direction on the base
Signal transmission characteristic measurement apparatus of a fine pitch transmission line comprising a. The method of claim 7, wherein
The position adjusting unit,
A fixed plate fixed on the base,
A first plate reciprocating in a first direction on the fixing plate,
A second plate reciprocating in the second direction orthogonal to the first direction on the first plate,
A right angle member disposed on the second plate in a third direction perpendicular to the first direction and the second direction, and
A third plate reciprocating in the third direction from one side of the right angle member
Signal transmission characteristic measurement apparatus of a fine pitch transmission line comprising a. The method of claim 8,
The position adjusting unit,
A first micrometer installed on the fixing plate elastically supported by each other and connecting a rod to the first plate,
A second micrometer installed on the first plate that is elastically supported with each other and connecting a rod to the second plate, and
A third micrometer installed on the third plate that is elastically supported with each other and connects the rod to the right angle member
Signal transmission characteristic measurement apparatus of a fine pitch transmission line comprising a. The method of claim 8,
The rotation control unit,
A first rotating member rotatably mounted to the third plate of the position adjusting unit to adjust an angle of the probe primarily;
A second rotating member interposed between the first rotating member and the third plate and selectively connected or separated from the first rotating member to adjust an angle of the probe secondarily;
Signal transmission characteristic measurement apparatus of a fine pitch transmission line comprising a. The method of claim 10,
The rotation control unit,
A fourth micrometer installed on the third plate and connecting the rod to the second rotating member, and a connecting screw provided on the second rotating member and selectively connected to the first rotating member.
Signal transmission characteristic measurement apparatus of a fine pitch transmission line comprising a. The method of claim 8,
The position adjusting unit,
A position adjusting base installed on the base to mount the fixing plate;
The position adjustment base,
A plurality of mounting holes disposed along the first direction to set the first direction position of the fixing plate;
Signal transmission characteristic measuring device of fine pitch transmission line. The method according to claim 1,
Camera control unit for adjusting the position of the camera relative to the specimen mounted on the specimen control unit
Signal transmission characteristic measurement apparatus of a fine pitch transmission line further comprising. The method of claim 13,
The base, the specimen control unit, and the probe control unit is formed of a nonmagnetic material,
The base includes:
Fixing / separation plate formed of magnetic material to fix or separate the camera control part by magnetic
Signal transmission characteristic measurement apparatus of a fine pitch transmission line comprising a. The method of claim 14,
The fixing / separating plate,
A first fixing / separating plate and a second fixing / separating plate provided on both sides of the specimen adjusting unit between the pair of probe adjusting units
Signal transmission characteristic measurement apparatus of a fine pitch transmission line comprising a. The method of claim 15,
The camera control unit,
A magnetic regulator fixed to or separated from the first fixing / separating plate or the second fixing / separating plate,
Pillar member installed in the direction perpendicular to the magnetic regulator,
An arm member jointly connected to the pillar member,
A bracket mounted to the arm member and connected to the arm member so as to be movable in the longitudinal direction of the arm member;
Holder for mounting the camera connected to the bracket by a ball joint
Signal transmission characteristic measurement apparatus of a fine pitch transmission line comprising a. The method of claim 16,
The moving unit,
A body which is mounted to the arm member with a fixing screw and forms a moving groove therein;
A pinion disposed inside the moving groove of the body,
A handle connected to the pinion and positioned outside the body, and
A moving member geared to the pinion and mounted to the moving groove to mount the bracket;
Signal transmission characteristic measurement apparatus of a fine pitch transmission line comprising a.

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