KR20110054620A - Linear motion apparatus using magnetic bearing - Google Patents

Abstract

PURPOSE: A transporting device using magnetic bearings is provided to enable economical constitution and reduce the weight of the transporting device. CONSTITUTION: A transporting device using magnetic bearings comprises a guide unit, body unit(130) and a magnetic bearing unit(20). The guide unit consists of a first guide(110) and a second guide(120), wherein the first guide comprises a plurality of guide surfaces including a slope and the second guide is formed symmetrically to the first guide. The body unit comprises a slide surface facing the guide surface of the guide unit at an interval and is inserted into the guide unit to be slidable. The magnetic bearing unit is installed to have bilateral or vertical symmetry on the slide surface including the slope of the body unit.

Description

Mobile device using magnetic bearings {LINEAR MOTION APPARATUS USING MAGNETIC BEARING}

The present invention relates to a moving device using a magnetic bearing, and more particularly, the number of magnetic bearings required for posture control by arranging the magnetic bearings on the sliding surface having the inclined body portion on which the magnetic bearings are mounted, and arranging the magnetic bearings on the sliding surface having the inclination. It is a mobile device using a magnetic bearing made of an economical configuration as well as reducing the weight of the mobile device by reducing the.

In general, in the conventional linear motion system, ball bearings or laurel bearings are mainly used as support bearings of moving bodies. However, these ball bearings and roller bearings have a disadvantage in that their precision is limited due to the elastic deformation and non-uniformity of the ball and roller.

Therefore, in a linear motion device requiring a high precision of 1 μm or less, a lubricating fluid such as oil or air is used to make a non-contact state between a table that performs linear motion and a guide surface for guiding linear motion of the table. Therefore, many fluid bearings that can support the linear motion table are used.

At this time, in order to use air or oil as a lubricating fluid of a bearing, it is essential to have a compressor for raising the fluid to a constant pressure and a filter for removing impurities from the fluid.

However, these compressors and filters are not only expensive, but by mounting them, the configuration of the transport system becomes larger and more complicated, which makes it difficult to manage and maintain.

On the other hand, some semiconductor manufacturing equipment or special processing equipment such as ion beam processing may require a vacuum environment. When a fluid (air) is used as a guide surface lubricant of a linear motion system, the system may be used in a special environment as described above. There is a problem that is difficult to apply.

Related technology to solve this problem is a linear motion device using a magnetic bearing. Republic of Korea Patent No. 10-0165371 (hereinafter referred to as a prior art) discloses a linear motion device using the magnetic bearing as described above.

Referring to FIG. 2, a general magnetic bearing is formed on a core body 21 and coil coils 22 formed of substantially ellipsoid so as to be positioned between each pole 21a, 21b, 21c of the core body 21. Is the shape into which is inserted.

In addition, referring to FIG. 3, the linear motion device using the magnetic bearing according to the related art includes a bed frame 30 having a sliding groove 30a, an upper plate 31a, and a lower plate 31b attached to the support member 31c. It is provided with a transfer table 31 for linear motion having a symmetrical structure to face each other up and down by each other, the lower plate 31b of the transfer table 31 is sliding in the sliding groove (30a) of the bed frame (30) It is coupled to be possible, the guide plate member 32 for guiding the sliding movement of the transfer table 31 is supported on the bed frame 30 in parallel with the support member 31c of the transfer table 31 It forms a structure.

In the structure formed as described above, the transfer table 31 has the upper plate magnetic bearing 20a, the lower plate magnetic bearing 20b, and the support member magnetic bearing 20c at one corner portion to slide on the guide plate member 32. It is composed of three magnetic bearings, and as a result, a total of 12 magnetic bearings are required.

In addition, the magnetic bearing 20 is attached with a sensor 41 for measuring the gap gap when the transfer table 31 linearly moves on the guide plate member 32.

However, in the configuration in which three magnetic bearings are used as one set as described above, when the transfer table becomes long, a large number of magnetic bearings for posture control is required (12 in the figure). In addition to increasing the weight of the table, there is a disadvantage that the manufacturing cost increases.

Accordingly, there is a need for a mobile device using a magnetic bearing made of an economical configuration while reducing the weight of the mobile device by reducing the number of magnetic bearings required for posture control during sliding motion.

The present invention has been made in view of the above-described problems of the prior art, and reduces the weight of the moving device by reducing the number of magnetic bearings necessary for posture control during a sliding motion, and a moving device using a magnetic bearing made of an economical configuration. For the purpose of providing it.

A moving device using a magnetic bearing according to an aspect of the present invention is a moving device using a magnetic bearing, comprising: a first guide having a plurality of guide surfaces including an inclined surface and a second guide symmetrically with the first guide; Left and right or up and down on the slide surface comprising a guide portion consisting of a guide portion, a body portion inserted into the guide portion slidably provided with a slide surface facing the guide surface at regular intervals and the inclined surface of the body portion; It includes a magnetic bearing portion that is installed symmetrically.

In the moving device using the magnetic bearing of the present invention, a first inclined surface in which the first guide is obliquely formed downward and a horizontal plane extending from the first inclined surface and formed in a horizontal direction and extending in the horizontal plane and obliquely upward It may have a form in which a protrusion consisting of three surfaces of the second inclined surface to be formed.

In the moving device using the magnetic bearing of the present invention, the first guide surface of which the first guide is obliquely upwardly formed and the horizontal plane which extends from the first inclined surface and is formed in the horizontal direction and the horizontal plane is obliquely downwardly It may have a shape in which a groove consisting of three surfaces of the second inclined surface is formed.

In the moving device using the magnetic bearing of the present invention, the first guide and the second guide of the guide portion are each formed of a vertical plane extending downward from the horizontal plane and the horizontal plane, and a groove formed of the inclined plane extending downward from the vertical plane facing the horizontal plane, respectively. And a protrusion for guiding the body portion at the left and right sides of the body portion, and having a protrusion coupled to a table near the center of the upper surface of the body portion, and having a protrusion coupled with a linear motor at the center of the lower surface of the body portion. Can be.

According to the moving device using the magnetic bearing of the present invention, the moving device by reducing the number of magnetic bearings necessary for posture control by arranging the sliding surface of the body portion on which the magnetic bearing is mounted has an inclination and arranging the magnetic bearing on the sliding surface having the inclination. In addition to reducing the weight of the magnetic bearing can be implemented in an economical configuration.

The above-described features and effects of the present invention will become more apparent from the following detailed description taken in conjunction with the accompanying drawings, and thus, those skilled in the art to which the present invention pertains may easily implement the technical idea of the present invention. Could be. As the inventive concept allows for various changes and numerous embodiments, particular embodiments will be illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to a specific disclosure, it should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the present invention. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.

Hereinafter, the components described in the prior art are denoted by the same reference numerals and description thereof will be omitted.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

3 is a moving device using a magnetic bearing according to a first embodiment of the present invention.

Referring to the drawings, an upper guide 110 as a first guide is provided on the upper side, and a lower guide 120 as a second guide is installed on the lower side, and the upper guide 110 and the lower guide 120 face each other in a symmetrical manner. watching.

The guide surface of the upper guide is composed of three surfaces, the first inclined surface 111 is formed obliquely downward and the horizontal surface 112 and the horizontal surface 112 extending from the first inclined surface 111 and formed in a horizontal direction And a second inclined surface 113 extending upwardly and obliquely upward. That is, the cross section in the width direction of the upper guide has a long trapezoidal shape with a short upper side.

In addition, the lower guide 120 of the same shape is installed below the upper guide 110 to face the upper guide 110 symmetrically, and thus the lower guide 120 also has three guide surfaces 121, 122, and 123. .

In the space between the upper guide 110 and the lower guide 120 has a slide surface (131, 132, 133) opposed to the guide surface (111, 112, 113, 121, 122, 123) at regular intervals and between the upper guide 110 and the lower guide 120 Body portion 130 of the moving device is inserted into the slide is installed.

The shape of the slide surface (131, 132, 133) of the body portion 130 is a trapezoidal groove is formed in a symmetrical shape and accordingly the body portion 130 is formed in an X-pillar shape. At least one of the left side 134 and the right side 135 of the body 130 is connected to and fixed to a linear motor (not shown).

In addition, the inclined surfaces 131 and 133 of the slide surfaces 131, 132 and 133 of the body 130 are provided with a total of eight magnetic bearings 20, one each near the end of the body 130 in the sliding direction. This is an improvement compared to the conventional mobile device using a magnetic bearing requires a total of 12 magnetic bearings.

That is, the body portion 130 of the moving device has the inclined surfaces 111, 113, 121, and 123, and the magnetic bearings 20 are disposed on the inclined surfaces 111, 113, 121, and 123, so that the attitude control of the same performance can be performed with a small number of magnetic bearings.

4 is a moving device using a magnetic bearing according to a second embodiment of the present invention.

Referring to the drawings, an upper guide 210 as a first guide is provided on the upper side, and a lower guide 220 as a second guide is installed on the lower side, and the upper guide 210 and the lower guide 220 face each other in a symmetrical manner. watching.

The guide surface of the upper guide is composed of three surfaces, the first inclined surface 211 is formed obliquely upward and the horizontal surface 212 and the horizontal surface 212 extending from the first inclined surface 211 and formed in a horizontal direction And a second inclined surface 213 extending obliquely downward. That is, the cross section in the width direction of the upper guide has a shape having a trapezoidal groove having a short upper side and a long lower side.

In addition, the lower guide 220 of the same shape is installed below the upper guide 210 to face the upper guide 210 symmetrically, and thus the lower guide 220 also has three guide surfaces 221, 222, and 223. .

In the space between the upper guide 210 and the lower guide 220 has a slide surface (231, 232, 233) opposed to the guide surface (211,212,213,221,222,223) at regular intervals and between the upper guide 210 and the lower guide 220 Body portion 230 of the moving device is inserted is installed to slide.

The shape of the slide surface (231, 232, 233) of the body portion 230 is a trapezoidal protrusion is formed in a symmetrical shape and accordingly the body portion 230 is formed in an octagonal pillar shape. At least one of the left side 234 and the right side 235 of the body portion 230 is connected and fixed to the linear motor (not shown).

In addition, the inclined surfaces 231 and 233 of the slide surfaces 231, 232 and 233 of the body portion 230 are provided with a total of eight magnetic bearings 20, one each near the end portion of the body portion 230 in the sliding direction. This is an improvement compared to the conventional mobile device using a magnetic bearing requires a total of 12 magnetic bearings.

That is, the body portion 230 of the moving device has the inclined surfaces 211, 213, 221, and 223, and the magnetic bearings 20 are disposed on the inclined surfaces 211, 213, 221, and 223, so that the attitude control of the same performance can be performed with a small number of magnetic bearings.

In addition, since the body portion 230 has an octagonal pillar shape, the mounting position of the magnetic bearing 20 is farther from the center than the square or hexagonal pillar shape, and thus, more moment gain can be obtained during operation.

In addition, since the hole 235 is formed in the central portion of the body portion 230, the spindle is formed to be movable by inserting a spindle or the like.

5 is a moving device using a magnetic bearing according to a third embodiment of the present invention.

Referring to the drawings, a left guide 310 as a first guide is provided at the left side, and a right guide 320 as a second guide is installed at the right side, and the left guide 310 and the right guide 320 face each other in a symmetrical manner. watching.

The guide surface of the left guide 310 is composed of three surfaces and extends downward from the horizontal surface 311 and the horizontal surface 311 and the vertical surface 312 and the vertical surface 312 downwardly opposite the horizontal surface. It consists of the inclined surface 313 which becomes.

In addition, a right guide 320 having the same shape is provided on the right side of the left guide 310 to face the left guide 310 symmetrically, and thus the right guide 320 also has three guide surfaces 321, 322, and 323. .

In the space between the left guide 310 and the right guide 320 has a slide surface (331,332,333) facing the guide surface (311,312,313,321,322,323) at regular intervals and between the left guide 310 and the right guide 320 Body portion 330 of the moving device is inserted is installed to slide.

The shape of the slide surface of the body portion 330 is formed in a shape opposite to the guide surface (311, 312, 313, 321, 322, 323) of the left guide 310 and the right guide 320, the table near the center of the upper surface of the body 330 A protrusion 334 is formed to engage with 340, and a key-shaped protrusion 335 is coupled to a linear motor 350 near the center of the lower surface of the body 330 to form the linear motor 350. In accordance with the operation of the body portion 330 of the moving device to move the table 340 is integrated with the body portion 330 is to be able to transfer.

In addition, a total of eight magnetic bearings 20 on the horizontal surface 331 of the upper left and right sides and the inclined surfaces 332 of the lower left and right sides of the slide part of the body part 330, each one near the end of the sliding direction of the body part 330. Is installed.

This is an improvement compared to the conventional mobile device using a magnetic bearing requires a total of 12 magnetic bearings.

That is, the body portion 330 of the moving device has a shape having an inclined surface 333 and by arranging the magnetic bearing 20 on the inclined surface 333, it is possible to control the attitude of the same performance with a small number of magnetic bearings.

Next, the operation of the transfer device using the magnetic bearing according to an embodiment of the present invention will be described.

The following description will be made based on the first embodiment, but the operation method is the same in the other embodiments.

When the body 130 is linearly moved by a linear motor or the like, the sensor 41 detects the displacement of the magnetic bearing 20 mounted on the body 130, and the sensing signal detects the sensor amplifier (not shown). Passed and controlled by a control circuit (not shown), the controlled signal is converted into a current in a current amplifier (not shown) and amplified to drive the magnetic bearing 20.

As the magnetic bearing 20 is driven, the magnetic bearing 20 generates a magnetic force, and the body 130 is formed of the upper guide 110 and the lower guide 120 by the magnetic force generated by the magnetic bearing 20. Guide surface (111, 112, 113, 121, 122, 123) is a linear movement, at this time, the body portion 130 is supported by the magnetic bearing 20, so that it is supported in a completely frictionless state is a linear movement.

At this time, the control of the magnetic bearing 20 provided on the first inclined surface 131 and the second inclined surface 133 facing the upper guide can be performed by using coordinate axis decomposition, for example, to maintain the clearance between the inclined surfaces 131 and 133. By controlling, it is possible to control in the upward direction and the horizontal direction.

In addition, the control of the first inclined surface 131 and the second inclined surface 133 facing the lower guide is also possible by using the decomposition of the coordinate axis. Therefore, the control of maintaining the clearance between the inclined surfaces 131 and 133 is controlled downward and horizontally. You can do

Accordingly, a magnetic field is formed in a gap of 1 mm or less between the magnetic bearing and the guide part 32 to maintain a constant gap during transport and to maintain a constant displacement of the body part 31 with respect to external load or disturbance. The bearing acts actively.

Accordingly, it is possible to implement a mobile device using a magnetic bearing having a reduced weight and economical configuration. In addition, the moving device using the magnetic bearing can be applied under a special environment such as a vacuum, so that it can be used as a precision transfer system in future semiconductor manufacturing equipment, measurement and inspection, and a special dedicated processing machine.

In the detailed description of the present invention described above with reference to the preferred embodiments of the present invention, those skilled in the art or those skilled in the art having ordinary skill in the art will be described in the claims to be described later And it will be understood that various modifications and changes of the present invention can be made without departing from the scope of the art.

1 is a perspective view showing a magnetic bearing

Figure 2b is a perspective view of a moving device using a magnetic bearing according to the prior art Figure 2b is a perspective view showing a moving table of the moving device using a magnetic bearing according to the prior art

Figure 3a is a perspective view of a moving device using a magnetic bearing according to a first embodiment of the present invention 3b is a cross-sectional view in the A direction

Figure 4a is a perspective view of a moving device using a magnetic bearing according to a second embodiment of the present invention 4b is a sectional view in the B direction

Figure 5a is a perspective view of a moving device using a magnetic bearing according to a third embodiment of the present invention 5b is a cross-sectional view of the C direction

<Description of the symbols for the main parts of the drawings>

20: magnetic bearing 41: sensor

110,210,310: First guide 120,220,320: Second guide

130,230,330: body

Claims (4)

In a mobile device using a magnetic bearing, A guide part including a first guide having a plurality of guide surfaces including an inclined surface and a second guide symmetrically with the first guide; A body part having a slide surface facing the guide surface at regular intervals and inserted into the guide part to be slidable; And Magnetic bearings are installed on the slide surface including the inclined surface of the body portion symmetrically or vertically installed Mobile device using magnetic bearing The method of claim 1, The first guide of the guide part includes three surfaces of a first inclined plane formed obliquely downward and a horizontal plane extending from the first inclined plane and formed in a horizontal direction and a second inclined plane extending in the horizontal plane and formed obliquely upwards Moving device using a magnetic bearing, characterized in that the protrusion is formed The method of claim 1, The first guide of the guide part is composed of three surfaces of a first inclined surface formed obliquely upward and a horizontal plane extending from the first inclined plane and formed in a horizontal direction and a second inclined surface extending obliquely and downwardly formed in the horizontal plane. Mobile device using a magnetic bearing, characterized in that the groove is formed The method of claim 1, Each of the first guide and the second guide of the guide part has a groove formed of a horizontal plane and a vertical plane extending downward from the horizontal plane and an inclined plane extending downward from the vertical plane to face the horizontal plane. Guide the body, A moving device using a magnetic bearing having a protrusion coupled to a table is formed near the center of the upper surface of the body and a protrusion coupled to a linear motor near the center of the lower surface of the body.

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