KR20110047129A - Method for manufacturing liquid jet head, liquid jet device and liquid jet head - Google Patents

Method for manufacturing liquid jet head, liquid jet device and liquid jet head Download PDF

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Publication number
KR20110047129A
KR20110047129A KR1020100096769A KR20100096769A KR20110047129A KR 20110047129 A KR20110047129 A KR 20110047129A KR 1020100096769 A KR1020100096769 A KR 1020100096769A KR 20100096769 A KR20100096769 A KR 20100096769A KR 20110047129 A KR20110047129 A KR 20110047129A
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KR
South Korea
Prior art keywords
liquid
groove
nozzle
plate
piezoelectric plate
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KR1020100096769A
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Korean (ko)
Inventor
오사무 고세키
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에스아이아이 프린텍 가부시키가이샤
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Priority to KR1020100096769A priority Critical patent/KR20110047129A/en
Publication of KR20110047129A publication Critical patent/KR20110047129A/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/1433—Structure of nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1609—Production of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/12—Embodiments of or processes related to ink-jet heads with ink circulating through the whole print head

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  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

Provided is a liquid jet head (1) which reduces the pooling of liquid in the groove (5) formed in the piezoelectric plate (4), and enables to quickly discharge the foreign matter mixed in the groove (5).
A nozzle plate 2 having a nozzle 3 for liquid injection, a piezoelectric plate 4 for joining the nozzle plate 2, a liquid supply hole 9 for supplying and discharging liquid, and a liquid discharge hole 10; Has a laminated structure composed of a cover plate (8), and the cross section of the groove (5) is convex in the depth direction, communicates with the nozzle (3) at the top of the convex shape, and supplies liquid from the bottom of the convex shape. It was set as the structure which communicates with the hole 9 and the liquid discharge hole 10. FIG.

Description

LIQUID JET HEAD, LIQUID JET DEVICE AND MANUFACTURING METHOD FOR LIQUID JET HEAD

The present invention relates to a liquid jet head for discharging liquid from a nozzle to form an image, text, or thin film material on a recording medium, a liquid jet apparatus using the same, and a method for manufacturing a liquid jet head.

Recently, an ink jet liquid jet head using a liquid jet device using the head, which discharges ink droplets onto a recording sheet, draws letters and figures, writes them, or discharges a liquid material on the surface of an element substrate to form a functional thin film. It is becoming. This method supplies ink or a liquid material from a liquid tank to a liquid jet head through a supply pipe, discharges ink from a nozzle of the liquid jet head, records letters or figures, or ejects a liquid material to form a functional thin film. To form.

FIG. 9: shows the typical cross section of this kind of inkjet head 100 of patent document 1. As shown in FIG. The inkjet head 100 has a three-layer structure of a cover 125 and a PZT sheet 103 made of a piezoelectric body and a bottom cover 137. The cover 125 has a nozzle 127 for ejecting a small drop of ink. On the upper surface of the PZT sheet 103, an ink channel 107 made of elongated grooves whose cross-sectional shape is convex toward the bottom is formed. The ink channels 107 are formed in parallel in a direction orthogonal to the longitudinal direction, and are partitioned by side walls 113 between adjacent ink channels 107. The electrode 115 is formed on the upper wall surface of the side wall 113. Electrodes are also formed on the sidewall surfaces of the adjacent ink channel 107. Therefore, the side wall 113 is sandwiched between the electrode (not shown) and the electrode 115 formed on the side wall surface of the adjacent ink channel.

The ink channel 107 and the nozzle 127 are in communication. The supply duct 132 and the discharge duct 133 are formed in the PZT sheet 103 from the rear surface side, and communicate with the ink channel 107 in the vicinity of both ends thereof. Ink is supplied from the supply duct 132 and ink is discharged from the discharge duct 133. The recessed part 129 is formed in the surface of the PZT sheet 103 of the left end part and the right end part of the ink channel 107. As shown in FIG. An electrode is formed on the bottom surface of the recessed portion 129 and is electrically connected to the electrode 115 formed on the side wall surface of the ink channel 107. The connection terminal 134 is accommodated in the recessed part 129, and is electrically connected with the electrode of illustration not shown formed in the bottom surface of the recessed part 129. As shown in FIG.

This inkjet head 100 operates as follows. Ink supplied from the supply duct 132 fills the ink channel 107 and is discharged from the discharge duct 133. In short, ink circulates through the supply duct 133, the ink channel 107, and the discharge duct 133. When a voltage is applied to the right and left connection terminals 134, the sidewalls of the ink channel 107 are deformed by the piezoelectric thickness sliding effect. As a result, the volume of the ink channel 107 decreases momentarily, the internal pressure increases, and a small drop of ink is ejected from the nozzle 127.

In this inkjet discharge method, ink is always circulated through the supply duct 132 and the discharge duct 133. Therefore, even if foreign matters such as bubbles, dust, and dust enter the inside of the ink channel 107, these foreign matters can be quickly discharged to the outside, so that the ink cannot be exposed due to the clogging of the nozzle, or the printing density is increased. This can prevent the problem of staining.

[Patent Document 1] Japanese Patent Publication No. 2000-512233

However, in the conventional example of Fig. 9, a high level of skill is required when forming the supply duct 132 and the discharge duct 133 in the vicinity of both ends of the ink channel 107. The ink channel 107 formed in parallel to the surface of the PZT sheet 103 has, for example, a groove width of 70 to 80 µm, a groove depth of 300 to 400 µm, a groove length of several mm to 10 mm, and adjacent to each other. The thickness of the wall partitioning the ink channel 107 is 70 to 80 m. The groove of the ink channel 107 is formed by grinding the surface of the PZT sheet 103 while rotating a dicing blade in which whetstone particles such as diamond are embedded in the outer peripheral portion of the thin disk. Therefore, the cross section of the groove becomes convex in the depth direction. In particular, the outer shape of the grinding blade is transferred to both end portions in the longitudinal direction of the groove.

As a method of forming the ink channel 107 shown in FIG. 9, first, a case where the supply duct 132 and the discharge duct 133 are formed after forming a plurality of grooves is considered. The supply duct 132 and the discharge duct 133 need to communicate at the bottom of the plurality of grooves. However, the bottom surface is not flat near the both ends of the longitudinal direction of the groove. Therefore, it is extremely difficult to form the supply duct 132 and the discharge duct 133 in accordance with the bottom surface of the groove. In addition, when the PZT sheet 103 is ground from the back side, the deepest portion of the groove first opens, and the opening gradually widens. However, when a part of the bottom surface of the groove opens, the side wall near the opening is no longer supported from the bottom portion. Therefore, it was extremely difficult to grind the supply duct 132 and the discharge duct 133 without breaking the thin side wall 113 of the groove which the bottom part opened. Moreover, the electrode is formed in the side wall which partitions a groove | channel. When the PZT sheet 103 was deeply ground from the rear surface side, the electrodes formed on the sidewalls of the grooves were also ground, resulting in a problem such that the resistance of the electrodes was increased to cause variation in the power for driving the sidewalls.

In addition, when the supply duct 132 or the discharge duct 133 is to be formed in an area where the bottom surface of the groove is flat, ink is not circulated at both ends in the longitudinal direction of the groove. As a result, the pooling of ink occurs, and bubbles, dust, and dust remain in the pooling portion. Therefore, the advantage of the present system of removing foreign matter from the ink channel 107 by circulating the ink to prevent clogging of the nozzle 127 or the like is impaired.

On the other hand, the method of forming the supply duct 132 and the discharge duct 133 first from the back surface side of the PZT sheet 103, and forming a groove | channel from the surface side of the PZT sheet 103 can be considered. In this case, although grinding of the supply duct 132 and the discharge duct 133 is easy, high precision control is calculated | required when forming a groove | channel. Dicing blades typically have a diameter of 2 inches to 4 inches. For example, in the case of forming a groove having a depth of, for example, 350 μm from the surface by using a dicing blade having a diameter of 2 inches, when the depth of the groove is set to 10 μm, the error of the length of the groove is Is 12 times that of about 120μm. In the case of using a 4-inch dicing blade, the error in the longitudinal direction is approximately 16 times the error in the depth direction. Therefore, it becomes extremely difficult to match the opening end of the supply duct 132 and the discharge duct 133 to the edge part of the longitudinal direction of a groove | channel. If a position shift occurs at the end of the groove in the longitudinal direction and at the outer peripheral ends of the supply duct 132 and the discharge duct 133, the ink flows at the end of the ink channel 107, or the ink flows. The advantage of the present method of preventing blockage of 127 cannot be utilized.

Moreover, the inkjet head 100 of patent document 1 accommodates the connection terminal 134 in the recessed part 129 formed in the surface of the PZT sheet 103, and flattens the outer surface of the cover 125. FIG. The electrode formed on the lower surface of the connection terminal 134 and the electrode formed on the side wall surface of the side wall partitioning the ink channel 107 have a side wall surface, a surface of the PZT sheet 103 and a bottom surface of the recess 129. It is electrically connected through. The ink channels 107 are formed in large numbers at high density in the direction orthogonal to the longitudinal direction, and the electrodes of each side wall need to be electrically separated from each other. Therefore, it is necessary to separate and form a plurality of electrodes in the same manner on the surface of the PZT sheet 103 and the bottom surface of the recess 129. However, especially the bottom surface of the recessed part 129 is curved, and high patterning technique was required in order to form a high precision electrode pattern in this curved surface.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and provides a liquid jet head having a structure capable of reducing liquid pooling and retention without requiring advanced processing techniques, a liquid jet apparatus using the same, and a method of manufacturing a liquid jet head. will be.

The liquid jet head according to the present invention includes a nozzle plate having a nozzle for injecting liquid into a recording medium, a piezoelectric plate having a long and narrow groove on one side, and joining the nozzle plate to the other side, and the groove. And a cover plate provided on one side of the piezoelectric plate, the liquid supply hole for supplying the liquid and a liquid discharge hole for discharging the liquid from the groove. The cross section in the longitudinal direction and in the depth direction was convex in the depth direction, communicating with the nozzle at the top of the convex shape, and communicating with the liquid supply hole and the liquid discharge hole at the bottom of the convex shape.

Moreover, the said cross section of the said groove shall be circular arc shape convex in the depth direction.

Moreover, the said groove was made to communicate with the said liquid supply hole or the said liquid discharge hole in the opening edge part of the one or both sides of the longitudinal direction.

The cover plate is provided with a plurality of liquid supply holes for supplying the liquid to the liquid discharge holes for discharging the liquid from the grooves or the grooves.

Moreover, the said nozzle plate shall be equipped with the some nozzle which communicates with the said groove | channel.

Moreover, the flow path member which has the liquid supply chamber which hold | maintains the liquid supplied to the said liquid supply hole, and the liquid discharge chamber which hold | maintains the liquid discharged | emitted from the said liquid discharge hole, and is provided in the surface on the opposite side to the said piezoelectric plate of the said cover plate. It was to be provided.

In addition, a drive circuit for supplying drive power to an electrode formed on the sidewall of the groove, a flexible substrate on which the drive circuit is mounted and mounted on the piezoelectric plate, and the piezoelectric plate in a state where the nozzle plate is exposed to the outside. And a base for accommodating the cover plate and fixing the flexible substrate to an outer side surface.

The liquid ejecting apparatus according to the present invention supplies liquid to the liquid ejecting head according to any one of claims 1 to 7, and the liquid supply hole of the cover plate, and discharges the liquid discharged from the liquid ejection hole of the cover plate. A liquid tank to be stored, a pressure pump for pressurizing and supplying the liquid from the liquid tank to the liquid supply hole, and a suction pump for sucking and discharging the liquid from the liquid discharge hole to the liquid tank are provided.

Moreover, the degassing means which has a degassing function on the path | route from the said liquid discharge hole to the said liquid tank was provided.

The manufacturing method of the liquid jet head which concerns on this invention is the groove processing process of forming the elongate groove which becomes convex in a depth direction in one surface of a piezoelectric plate, and the cover plate which has a liquid supply hole and a liquid discharge hole, A cover plate bonding step of attaching to one side of the piezoelectric plate, a cutting process of cutting the other side of the piezoelectric plate, and a nozzle plate having a nozzle for liquid injection are attached to the other side of the piezoelectric plate. And a nozzle plate bonding step of communicating the nozzle and the groove.

Moreover, the flow path member bonding which adheres the flow path member which has the liquid supply chamber which hold | maintains the liquid supplied to the said liquid supply hole, and the liquid discharge chamber which hold | maintains the liquid discharged | emitted from the said liquid discharge hole to the opposite side to the piezoelectric plate of the said cover plate. To have a process.

The liquid jet of the present invention provides a nozzle plate having a nozzle for injecting liquid into a recording medium, a piezoelectric plate having a long and narrow groove on one side, and joining the nozzle plate to the other side, and supplying liquid to the groove. And a cover plate provided on one side of the piezoelectric plate. The elongated groove of the piezoelectric plate is convex in the longitudinal direction of the groove and in the depth direction thereof, and communicates with the nozzle at the top of the convex shape, and the liquid supply hole and the liquid discharge hole at the bottom of the convex shape. It was configured to communicate with. Thereby, the liquid supplied in a groove | channel flows in from the side of the wide one surface of the opening which is a convex bottom part of a groove | channel, and flows out from the side of the same one surface. Therefore, the area | region where a liquid stays in the area | region inside a groove | channel is reduced, and the foreign material in the liquid which consists of foam | bubble, dust, and dust can be removed quickly from the groove | channel inner area. As a result, clogging of the nozzle is reduced, and it is possible to provide a highly reliable liquid jet head.

1 is a schematic exploded perspective view of a liquid jet head according to a first embodiment of the present invention.
2 is a schematic longitudinal sectional view of the liquid jet head according to the first embodiment of the present invention.
3 is a schematic longitudinal cross-sectional view of a liquid jet head according to a second embodiment of the present invention.
4 is a schematic longitudinal cross-sectional view of a liquid jet head according to a third embodiment of the present invention.
5 is a schematic perspective view of a liquid jet head according to a fourth embodiment of the present invention.
6 is a schematic longitudinal sectional view of a liquid jet head according to a fourth embodiment of the present invention.
It is explanatory drawing of the liquid ejecting apparatus which concerns on 5th Embodiment of this invention.
8 is a process chart showing the manufacturing method of the liquid jet head according to the sixth embodiment of the present invention.
9 is a schematic cross-sectional view of a conventionally known inkjet head.

A liquid jet head according to the present invention includes a nozzle plate having a nozzle for injecting liquid onto a recording medium, a piezoelectric plate having a thin elongated groove on one side and bonding the nozzle plate to the other side, and the groove. And a cover plate provided on one side of the piezoelectric plate, and having a liquid supply hole for supplying the liquid for injection into the liquid discharge hole and a liquid discharge hole for discharging the liquid supplied from the groove. Further, the longitudinal section of the elongated groove formed on one surface of the piezoelectric plate has a convex shape in the depth direction, and the groove communicates with the nozzle of the nozzle plate at the top of the convex shape, that is, at the bottom of the groove. In addition, the groove communicates with the liquid supply hole and the liquid discharge hole in the convex bottom portion, that is, the opening portion on one side in which the groove is formed.

By this configuration, the liquid flows in from the side of the wide one side of the opening of the groove and flows out from the side of the wide one side of the same opening. Therefore, the area where the liquid stays in the inner region of the groove is reduced, and it is possible to quickly remove foreign matters such as bubbles, dust, and dust from the inner region of the groove. As a result, recording misses due to clogging of the nozzles and variations in the amount of liquid discharged from the nozzles can be reduced. In addition, even if bubbles or the like are mixed in the grooves, this can be quickly removed. Therefore, even when used for a large-scale recording industry, losses due to continuous recording misses can be reduced.

In addition, the cross-sectional shape of a groove | channel can be made into the convex circular arc shape in the depth direction. By making the cross section of the groove arc-shaped, it is possible to reduce the pooling in the flow from the liquid supply hole to the liquid discharge hole, and to discharge the foreign matter mixed in the liquid more quickly. Moreover, a groove | channel can be easily created by cutting using a disk shaped dicing blade.

Further, the cover plate can be provided on one side of the piezoelectric plate so that the elongated grooves formed on one side of the piezoelectric plate communicate with the liquid supply hole or the liquid discharge hole at one or both opening ends in the longitudinal direction thereof. This makes it possible to almost eliminate the area where the liquid stays from the inside of the groove, so that bubbles, dust, and dust mixed in the liquid can be removed more quickly.

In addition, a plurality of nozzles may be connected to one groove in addition to one nozzle. Moreover, one liquid supply hole and one liquid discharge hole may be connected to one groove, and a plurality of liquid supply holes or a plurality of liquid discharge holes may be connected to one groove. By plural number of nozzles, the recording density or the recording speed can be improved. In addition, by plurally communicating the liquid supply hole or the liquid discharge hole, the flow velocity of the liquid can be increased, and the discharge speed of the mixed foreign matter can be increased, so that the nozzle can hardly be clogged and a highly reliable liquid jet head can be provided. .

Moreover, one side of the piezoelectric plate in which the groove was formed is flat. Therefore, the electrode terminal for connecting with a drive circuit can be easily formed in one surface of a piezoelectric plate.

In addition, according to the method for manufacturing a liquid jet head according to the present invention, a grooving step of forming an elongated groove having a convex shape in a depth direction on one surface of a piezoelectric plate made of a piezoelectric body or embedded with a piezoelectric body; A cover plate joining step of preparing a cover plate having a liquid supply hole and a liquid discharge hole on the other side, and attaching the other side of the cover plate to one side of the piezoelectric plate; and cutting the other side of the piezoelectric plate. The nozzle plate joining process which prepares the cutting process process to process, and the nozzle plate which formed the nozzle for liquid injection, and attaches a nozzle plate to the process surface of the cut piezoelectric plate so that this nozzle and the groove of a piezoelectric plate may communicate. It is included.

By manufacturing in this way, the liquid supply hole 9 and the liquid discharge hole 10 can be made to match or almost match the open end of both grooves 5, without requiring advanced grinding technique. . In addition, when the other surface of the piezoelectric plate is ground after the cover plate joining step, the cover plate becomes a reinforcing material of the piezoelectric plate, and thus the piezoelectric plate is easily ground. EMBODIMENT OF THE INVENTION Hereinafter, this invention is demonstrated in detail based on embodiment.

(1st embodiment)

1: is a schematic exploded perspective view of the liquid jet head 1 which is 1st Embodiment of this invention, FIG. 2 (a) is a typical longitudinal cross-sectional view of the part AA, and FIG. 2 (b) is a model of the part BB. Longitudinal section view.

The liquid jet head 1 has a structure in which the nozzle plate 2, the piezoelectric plate 4, the cover plate 8, and the flow path member 11 are stacked. As the piezoelectric plate 4, for example, piezoelectric ceramics made of PZT or the like can be used. The piezoelectric plate 4 has a plurality of elongated grooves 5 (5a, ... 5d) on one surface 7. Each groove 5a, ... 5d has the longitudinal direction in the x direction and is arranged in the y direction orthogonal to this. Each groove 5a, ... 5d is divided by each side wall 6a, 6b, 6c. The width of each groove can be, for example, 50 µm to 100 µm, and the width of each side wall 6a, 6b, 6c dividing the grooves 5a, ... 5d can also be 50 µm to 100 µm. The front side surface of the piezoelectric plate 4 shown in FIG. 1 has shown the cross section of the longitudinal direction and the depth direction of the groove | channel 5a. The cross-sectional shape of the groove 5 in the longitudinal direction (x direction) and the depth direction (-z direction) has a convex shape in the depth direction. More specifically, the convex arc shape is provided in a depth direction.

The cover plate 8 is attached to one side 7 of the piezoelectric plate 4 and bonded. As the cover plate 8, the same material as that of the piezoelectric plate 4 can be used. Using the same material makes the coefficient of thermal expansion with respect to temperature change the same, which makes it difficult to deform or peel off with respect to the ambient temperature change. The cover plate 8 is provided with the liquid supply hole 9 and the liquid discharge hole 10 which penetrate from one surface to the other surface. The liquid supply hole 9 has one open end in the longitudinal direction of each groove 5a, ... 5d, and the liquid discharge hole 10 has a different open end in the longitudinal direction of each groove 5a, ... 5d. They are either matched or nearly matched. The cover plate 8 closes the openings of the grooves 5a,... 5d in the intermediate region between the liquid supply hole 9 and the liquid discharge hole 10. In other words, each of the grooves 5a, ... 5d communicates with the adjacent grooves 5a, ... 5d through the liquid supply hole 9 and the liquid discharge hole 10 of the cover plate 8.

In this way, the liquid supply holes 9 and the liquid discharge holes 10 of the cover plate 8 coincide or almost coincide with the opening ends of both the grooves 5a, ... 5d. The liquid retention region between 8) and the piezoelectric plate 4 can be reduced. The groove 5 has a convex cross section in the depth direction, and the liquid flows in and out from the side of the wide one surface of the opening which is the convex bottom portion, so that the liquid flows even inside the groove 5. Thereby, foreign matters, such as air bubbles, dust, and dust mixed in the liquid, can be quickly discharged from the region of the groove 5.

The nozzle plate 2 is attached to the other side of the piezoelectric plate 4 and joined. As the nozzle plate 2, a polymer material such as polyimide resin can be used. The nozzle plate 2 is provided with the nozzle 3 which penetrates from one surface on the piezoelectric plate 4 side to the other surface on the opposite side. The grooves 5 of the nozzle 3 and the piezoelectric plate 4 communicate with each other at the top of the groove 5 in the depth direction. The nozzle 3 has a funnel-shaped shape in which the opening end face is reduced from one face to the other face. The funnel-shaped inclined surface has, for example, an inclination angle of about 10 degrees with respect to the normal of the nozzle plate 2.

The flow path member 11 is attached to the surface on the side opposite to the piezoelectric plate 4 of the cover plate 8 and joined. The flow path member 11 is provided with the liquid supply chamber 12 and the liquid discharge chamber 13 which consist of recessed parts in the other surface by the cover plate 8 side. The liquid supply chamber 12 communicates in correspondence with the liquid supply hole 9 of the cover plate 8, and the liquid discharge chamber 13 communicates in correspondence with the liquid discharge hole 10 of the cover plate 8. The flow path member 11 has an opening which communicates with the liquid supply chamber 12 and the liquid discharge chamber 13 on one surface on the opposite side to the cover plate 8 side, and is further provided with a joint for supply fixed to each opening ( 14) and a discharge joint 15 are provided. In order to reduce the pooling and retention of liquid, the liquid supply chamber 12 inclines the upper surface toward the peripheral part of the reference direction from the opening for liquid supply, and the space becomes narrow. The same applies to the liquid discharge chamber 13.

With this configuration, the liquid supplied from the supply joint 14 fills the liquid supply chamber 12 and the liquid supply hole 9 and flows into the grooves 5a, ... 5d. In addition, the liquid discharged from the grooves 5a, ... 5d flows into the liquid discharge hole 10 and the liquid discharge chamber 13 and flows out of the discharge joint 15. The bottom surface of each groove | channel 5a, ... 5d becomes shallow toward the edge part of a longitudinal direction. Therefore, the liquid flows in the grooves 5a, ... 5d without accumulation.

This liquid jet head 1 operates as follows. First, the piezoelectric plate 4 is polarized. As shown in Fig. 2B, drive electrodes 16a, 16b, 16c, and 16d are formed on both sides of each sidewall 6a, 6b, and 6c, and each sidewall 6a, 6b, and 6c is formed, respectively. It sandwiches between drive electrodes 16a and 16b, drive electrodes 16b and 16c, and drive electrodes 16c and 16d. Then, a liquid is supplied to the supply joint 14 to fill the grooves 5a, 5b, and 5c with liquid, and a voltage is applied to the drive electrodes 16a and 16b formed on the sidewall 6a, for example. Then, the side wall 6a is deformed by the piezoelectric effect, for example, the piezoelectric thickness sliding effect, to change the volume of the groove 5a. By the volume change, the liquid filled in the groove 5a is discharged from the nozzle 3a. Each other side wall 6b, 6c can also be driven independently independently. For example, when ink is used as a liquid, it can be drawn on paper as a recording medium. Moreover, when a liquid metal material is used as a liquid, an electrode pattern can be formed on a board | substrate.

In particular, as shown in the first embodiment, the cover plate 8 for supplying and discharging liquid is provided on the opening side of the groove 5, and the bottom portion of the groove is convex in the depth direction to form an arc. Even in the case where foreign matter caused by bubbles or dust is mixed in the grooves 5a, 5b, and 5c, the residence time of the foreign matter is reduced, such as clogging of the nozzle 3 and the mixed bubbles absorbing the discharge pressure of the liquid. It can reduce the probability of problems.

In addition, the groove | channel 5 formed in the piezoelectric plate 4 can be made into several, for example, several to several hundred or more. The longitudinal section of the groove 5 in the longitudinal direction may be a convex inverted trapezoidal shape toward its depth direction, and both sides in the longitudinal direction of the groove 5 are arcuate shapes that are convex in the lateral or depth direction, and the bottom of the groove 5 is lower. This may be flat. Moreover, the groove 5d of the y-direction edge part of the piezoelectric plate 4 aims at forming an electrode in the side wall 6c. Therefore, the nozzle 3, the liquid supply hole 9 and the liquid discharge hole 10 are not necessarily configured to communicate with the groove 5d.

Moreover, although the position of the nozzle 3 which communicates from the bottom of the groove | channel 5 is not specifically limited, As an installation position of the nozzle 3, Preferably the longitudinal direction (x direction) and the width direction ( Install in the symmetry axis or symmetry center of y direction). The shock wave imparted to the liquid by the deformation of the side wall 6 is likely to be focused at the position of the axis of symmetry or the center of symmetry of the region of the groove 5, and the discharge pressure from the nozzle 3 can be the highest.

In addition, although it demonstrates concretely later, the other surface of the piezoelectric plate 4 is ground after forming the groove | channel 5 in the one surface 7 of the piezoelectric plate 4, attaching and fixing the cover plate 8, and grinding it. do. When grinding the other surface of the piezoelectric plate 4, you may grind until the bottom surface of the groove | channel 5 opens, and grinding is stopped before the bottom surface of the groove | channel 5 opens, and the groove | channel 5 of The piezoelectric material may be left thin on the bottom surface. In the case where the piezoelectric material is left thin in the bottom surface of the groove 5, it is necessary to form a through hole corresponding to the nozzle 3 of the nozzle plate 2. As a result, high-precision drilling is required, and the number of processes also increases. Moreover, since the piezoelectric material remains on the bottom side of the groove 5, the distance from the region of the groove 5 to the discharge port of the nozzle 3 is long, the flow path resistance increases, and the discharge speed is lowered. Therefore, preferably, the bottom of the groove 5 is opened so that the surface of the nozzle plate 2 becomes the bottom of the groove 5.

In addition, in the said 1st embodiment, although the flow path member 11 is provided and the liquid which supplies and discharges is flowing, it flows, but the flow path member 11 is not an essential requirement of this invention. In particular, even when the number of the grooves 5 is small or when the number of the grooves 5 is large, the cover plate 8 can be configured to have the function of the flow path member 11.

In addition, in the first embodiment, as shown in FIG. 2 (b), the plurality of nozzles 3 are arranged in a parallel array in the y direction, but are not limited thereto. The predetermined number of nozzles 3 may be arranged at an angle with respect to the y direction. For example, in the case of driving three cycles of the drive electrode 16 formed on each side wall 6, three nozzles 3 are provided obliquely in the y direction. Then, a drive signal is applied to adjacent nozzles 3 in time series, and the recording medium is conveyed in synchronization with this drive signal. As a result, the adjacent nozzles 3 can be driven independently, and high speed recording can be performed on the recording medium.

(2nd embodiment)

3 is a schematic longitudinal sectional view of the liquid jet head 1 according to the second embodiment of the present invention. The second embodiment differs from the first embodiment in that the nozzle plate 2 includes two nozzles 3a and 3b corresponding to one groove, and the other points are the same as in the first embodiment. Do. Hereinafter, the part mainly different from 1st Embodiment is demonstrated. In addition, the same code | symbol is attached | subjected about the same part or the part which has the same function below.

As shown in FIG. 3, the liquid jet head 1 has a laminated structure in the order of the nozzle plate 2, the piezoelectric plate 4, the cover plate 8, and the flow path member 11. The piezoelectric plate 4 has an elongate groove 5 on one surface thereof, and the cross section in the longitudinal direction and the depth direction has a convex shape in the depth direction. The two nozzles 3a and 3b of the nozzle plate 2 communicate with the groove 5 at the convex top. The nozzle 3a is located on one end side than the center part in the longitudinal direction of the groove 5, and the nozzle 3b is located on the other end side of the groove 5. The liquid supplied from the supply joint 14 flows in through the liquid supply chamber 12 and the liquid supply hole 9 from one end of the convex bottom end of the groove 5, and from the other end of the same bottom. It flows out from the discharge joint 15 through the liquid discharge hole 10 and the liquid discharge chamber 13. In this case, the convex top in the depth direction of the groove 5 does not necessarily mean one point of the deepest portion of the groove 5, and when the widening exists at the bottom of the groove 5, The bottom is called the top. The same is true in other embodiments.

The opening ends of one or both of the grooves 5 formed in the piezoelectric plate 4 and the openings of the liquid supply hole 9 and the liquid discharge hole 10 of the cover plate 8 coincide or almost coincide. Moreover, the groove 5 has a convex shape in the cross section in the nozzle plate 2 side. Therefore, it is difficult to cause a liquid to form in the flow of the liquid between the cover plate 8 and the piezoelectric plate 4 or inside the groove 5, and is quickly discharged even if bubbles, dust, and dust are mixed therein, so that the nozzle 3 ), The problem that clogging and the mixed bubble become an air spring to absorb the internal discharge pressure, and the liquid is not discharged from the nozzle 3 can be reduced.

The drive electrodes (not shown) formed in the wall surface of the side wall which divides the groove | channel 5 are electrically isolate | separated in the center part of the longitudinal direction of the groove | channel 5. When the liquid is injected from the nozzle 3a, a drive voltage is applied to the drive electrode on the nozzle 3a side to deform the side wall on the nozzle 3a side, and when the liquid is injected from the nozzle 3b, the nozzle The drive voltage is applied to the drive electrode on the 3b side to deform the side wall on the nozzle 3b side. That is, since the liquid can be injected independently from the two nozzles, the recording density and the recording speed can be improved.

(Third embodiment)

4 is a schematic longitudinal sectional view of the liquid jet head 1 according to the third embodiment of the present invention. In the third embodiment, the nozzle plate 2 includes two nozzles 3a and 3b corresponding to one groove 5, and the cover plate 8 includes one liquid supply hole 9 and two. The point provided with the two liquid discharge holes 10a and 10b is different from 1st Embodiment, and the other point is the same as that of 1st Embodiment. Hereinafter, the part mainly different from 1st Embodiment is demonstrated.

As shown in FIG. 4, the liquid jet head 1 has a laminated structure in the order of the nozzle plate 2, the piezoelectric plate 4, the cover plate 8, and the flow path member 11. The piezoelectric plate 4 has an elongate groove 5 on one surface thereof, and the groove 5 has a convex shape in the depth direction of the cross section in the longitudinal direction and the depth direction. The cover plate 8 includes a liquid supply hole 9 corresponding to the opening in the center of the longitudinal direction of the groove 5, and two liquid discharge holes 10a corresponding to the openings at both ends in the longitudinal direction of the groove 5. , 10b). That is, the groove 5 communicates with the liquid supply holes 9 and the liquid discharge holes 10a and 10b at the bottom of the convex shape of the cross section.

The flow path member 11 includes a liquid supply chamber 12 corresponding to the liquid supply hole 9 of the cover plate 8 and a liquid discharge chamber 13a corresponding to each of the two liquid discharge holes 10a and 10b. 13b). The liquid supply chamber 12 opens to one surface on the opposite side to the cover plate 8, and supplies liquid from the supply joint 14 provided in the opening. Each of the liquid discharge chambers 13a and 13b opens to one surface of the cover plate 8 and discharges liquid from the discharge joints 15a and 15b provided in the opening. The groove 5 has a convex shape in the depth direction, and the two nozzles 3a and 3b of the nozzle plate 2 communicate with the groove 5 at the top thereof. The nozzle 3a is located between the liquid supply hole 9 and the liquid discharge hole 10a, and the nozzle 3b is located between the liquid supply hole 9 and the liquid discharge hole 10b.

The liquid supplied from the supply joint 14 flows in from the central portion of the groove 5 through the liquid supply chamber 12 and the liquid supply hole 9, and two liquid discharge holes 10a from both ends of the groove 5. , 10b) and outflow from the discharge joints 15a, 15b through the liquid discharge chambers 13a, 13b. The opening ends of both of the grooves 5 formed in the piezoelectric plate 4 and the openings of the two liquid discharge holes 10a and 10b of the cover plate 8 coincide or almost coincide. Moreover, the groove 5 has a convex shape in the cross section in the nozzle plate 2 side. As a result, the accumulation and retention of liquid between the cover plate 8 and the piezoelectric plate 4 or inside the groove 5 is reduced, and the air is quickly discharged even when bubbles, dust, and dust are mixed therein, so that the nozzle 3 ) Clogging can be reduced.

The drive electrode (not shown) provided in the side wall surface for deforming the side wall 6 which divides the groove 5 is electrically separated from the longitudinal center part of the groove 5. When the liquid is injected from the nozzle 3a, a drive voltage is applied to the drive electrode on the nozzle 3a side to deform the side wall on the nozzle 3a side, and when the liquid is injected from the nozzle 3b, the nozzle The drive voltage is applied to the drive electrode on the 3b side to deform the side wall on the nozzle 3b side. As a result, the recording density of the liquid can be increased or the recording speed can be improved. The shape of the grooves 5 and the flow of liquid are symmetrical about the center line CC of the grooves 5 as the axis. Therefore, the injection condition which injects a droplet from the nozzle 3a and the injection condition which injects the droplet from the nozzle 3b can be set similarly. For example, it becomes easy to make the droplet amount and injection timing of an injection droplet the same.

In addition, although the liquid was supplied from the center part of the groove | channel 5 and the liquid was discharged | emitted from both ends in the said 3rd Embodiment, it is not limited to this. For example, liquid may be supplied from both ends of the groove 5 and discharged from the center portion, or the liquid discharge hole 10 or the liquid supply hole 9 may be further extended.

(4th embodiment)

FIG.5 and FIG.6 is explanatory drawing of the liquid jet head 1 which is 4th Embodiment of this invention. 5 (a) is an overall perspective view of the liquid jet head 1, and (b) is a perspective view of the inside of the liquid jet head 1. 6A is a longitudinal cross-sectional view of the portion DD, and (b) is a longitudinal cross-sectional view of the portion EE.

As shown in Figs. 5A and 5B, the liquid jet head 1 has a laminated structure of the nozzle plate 2, the piezoelectric plate 4, the cover plate 8, and the flow path member 11. have. The nozzle plate 2 and the piezoelectric plate 4 are wider in the x direction than the cover plate 8 and the flow path member 11, and protrude from one end in the x direction. On one side 7 of the piezoelectric plate 4, a plurality of grooves 5 are arranged in the y direction. The cover plate 8 has a liquid supply hole 9 and a liquid discharge hole 10 penetrating from one side to the other side. The openings on the other side of the liquid supply hole 9 and the liquid discharge hole 10 coincide with each opening of one end and the other end in the longitudinal direction (x direction) of each groove 5, or Almost corresponded.

As shown in Figs. 6A and 6B, the flow path member 11 includes a liquid supply chamber 12 and a liquid discharge chamber 13, each of which has a recess opening to the other surface on the cover plate 8 side. And a supply joint 14 and a discharge joint 15 which communicate with the liquid supply chamber 12 and the liquid discharge chamber 13 on one surface on the side opposite to the cover plate 8, respectively.

A plurality of electrode terminals are formed intensively on one side surface 7 of the protruding one end of the piezoelectric plate 4, and each electrode terminal is electrically connected to a driving electrode (not shown) formed on the side wall of each groove 5. Connected. The flexible substrate (hereinafter referred to as FPC) 24 is adhesively fixed to one surface 7 of the piezoelectric plate 4. The FPC 24 includes a plurality of electrodes separated on the surface of the piezoelectric plate 4 side, and each electrode is electrically connected to each electrode terminal on the piezoelectric plate 4 via a conductive material. The FPC 24 is provided with the driver IC 25 and the connection connector 26 as a drive circuit on the surface. The driver IC 25 inputs a drive signal from the connecting connector 26 to generate a drive voltage for driving the sidewall of the groove 5, and generates an electrode on the FPC 24 and an electrode terminal on the piezoelectric plate 4. It supplies to the drive electrode not shown of the side wall through.

The base 21 houses the piezoelectric plate 4 and the like. The liquid jetting surface of the nozzle plate 2 is exposed on the lower surface of the base 21. The FPC 24 is drawn out from the protruding end side of the piezoelectric plate 4 to the outside, and is fixed to the outer surface of the base 21. The base 21 has two through-holes on its upper surface, and a supply tube 22 for supplying liquid penetrates one of the through-holes to connect to the liquid supply joint 14, and a discharge tube for discharging the liquid. 23 is connected to the liquid discharge joint 15 through the other through hole.

The nozzle 3 of the nozzle plate 2 communicates with the top of the convex shape in the depth direction of the groove 5. Each nozzle 3 formed in the nozzle plate 2 is aligned in a line in the y direction, and communicates with the corresponding groove 5. The cover plate 8 has a piezoelectric plate 4 such that the respective open ends of the liquid supply hole 9 and the liquid discharge hole 10 coincide with or nearly coincide with each of the open ends of the groove 5. ). That is, the groove 5 communicates with the liquid supply hole 9 and the liquid discharge hole 10 at the bottom portion having a convex cross section. The FPC 24 is fixed to the side wall of the base 21.

This configuration reduces the pooling between the cover plate 8 and the piezoelectric plate 4 or inside the grooves 5, and quickly discharges bubbles, dust, and dust mixed into the liquid. As a result, defects such as clogging of the nozzle 3 and insufficient discharge amount of the liquid can be reduced. In addition, although the side wall of the groove | channel 5 of the driver IC 25 and the piezoelectric plate 4 drives, it heats, but heat is transmitted to the liquid which flows inside through the base 21 or the flow path member 11. That is, heat can be radiated to the outside efficiently by using the liquid for recording on the recording medium as the cooling medium. Therefore, the fall of the drive capability by overheating of the driver IC 25 and the piezoelectric plate 4 can be prevented, and it becomes possible to provide the highly reliable liquid jet head 1.

In addition, two nozzles 3 may be provided in one groove as in the second embodiment. As in the third embodiment, the liquid is supplied from the central portion of the groove 5 through the liquid supply chamber 12 and the liquid supply hole 9, and the liquid discharge holes 10a and 10b are provided from both ends of the groove 5, respectively. And liquid may be discharged through the liquid discharge chambers 13a and 13b, and the liquid may be sprayed independently from the two nozzles. In addition, as shown in Fig. 6 (b), the arrangement of the nozzles 3 provided in the nozzle plate 2 in a line in the y direction is not a requirement, and the arrangement is arranged periodically with an angle with respect to the y direction. You may also

(Fifth Embodiment)

FIG. 7: is a schematic block diagram of the liquid ejecting apparatus 20 which is 5th Embodiment of this invention. The liquid jet device 20 includes a liquid tank 27 for supplying liquid to the liquid jet head 1 and the liquid jet head 1, and storing the liquid discharged from the liquid jet head 1, and a liquid tank ( A pressure pump 28 for pressurizing and supplying liquid from the liquid injection head 1 to the liquid injection head 1, and a suction pump 29 for sucking and discharging liquid from the liquid injection head 1 to the liquid tank 27, have. The suction side of the pressure pump 28 and the liquid tank 27 are supplied by a supply tube 22b, and the joint 14 for supply of the pressure side of the pressure pump 28 and the liquid injection head 1 is supplied with a supply tube 22a. ) Is connected. The pressurization side of the suction pump 29 and the liquid tank 27 are discharge tube 23b, and the suction side of the suction pump 29 and the discharge joint 15 of the liquid jet head 1 are discharge tube 23a. ) Is connected. The supply tube 22a is equipped with the pressure sensor 31 for detecting the pressure of the liquid which the pressurization pump 28 pressurized. Since the liquid jet head 1 is the same as that of 4th Embodiment, description is abbreviate | omitted.

As described above, the liquid jet head 1 may be provided with two nozzles 3 in one groove 5 as in the second embodiment. In addition, as in the third embodiment, the liquid is supplied from the center of the groove 5 through the liquid supply chamber 12 and the corresponding liquid supply hole 9, and two liquids are discharged from both ends of the groove 5. The liquid may be discharged through the holes 10a and 10b and the two liquid discharge chambers 13a and 13b correspondingly provided, and the liquid may be sprayed independently from the two nozzles. Moreover, the liquid ejecting apparatus 20 conveys the conveyance belt which reciprocates the liquid ejection head 1, the guide rail which guides the liquid ejection head 1, the drive motor which drives a conveyance belt, and the to-be-recorded medium. Although a roller, a control part for controlling these drives, etc. are provided, it abbreviate | omits in FIG.

In addition, in this embodiment, the degassing apparatus which is not shown in figure may be provided between the liquid discharge hole 10 and the liquid tank 27. As shown in FIG. That is, you may provide a degassing apparatus on discharge tube 23a, 23b. By adopting this configuration, the liquid is supplied from the liquid tank 27 to the grooves 5 and contained in the liquid in the paths on the discharge tubes 23a and 23b for circulating the liquid from the grooves 5 to the liquid tank 27. One gas can be degassed and removed. That is, by providing the degassing function in a circulation path, content of the gas to contain can be reduced and the liquid suitable for a liquid discharge environment can be supplied to the liquid tank 27, and the excellent liquid reuse system can be constructed.

By constituting the liquid ejecting device 20 as described above, the liquid is reduced in sticking or retention between the cover plate 8 and the piezoelectric plate 4 or inside the groove 5, so that bubbles, dust, and dust inside the liquid are reduced. It is discharged quickly even if mixed. In addition, heat generated in the sidewalls of the driver IC 25 or the piezoelectric plate 4 is transferred to the liquid flowing through the base 21 or the flow path member 11. Therefore, it is possible to efficiently dissipate heat to the outside by using the liquid for recording on the recording medium as the cooling medium, and to prevent the driver IC 25 and the sidewalls from overheating and deterioration of the driving capability, resulting in reliability. This high liquid ejection device 20 can be provided.

(6th Embodiment)

FIG. 8: is explanatory drawing which showed the manufacturing method of the liquid jet head 1 which is 6th Embodiment of this invention. The same code | symbol is attached | subjected to the same part or the part which has the same function.

FIG. 8 (a) shows a grooving process in which the groove 5 is ground on one side 7 of the piezoelectric plate 4 using the dicing blade 30. The piezoelectric plate 4 uses PZT ceramics. The dicing blade 30 consists of a disk-shaped metal plate or a synthetic resin plate, and the diamond grinding grains for grinding are embedded in the outer peripheral part. The rotating dicing blade 30 is dropped to one end of the piezoelectric plate 4 to a predetermined depth, ground to the other end horizontally, and raised. 8B shows a cross section of the groove 5 after grinding. Both ends of the groove 5 have an outer diameter of the dicing blade 30 transferred, and have an arc shape convex in the depth direction.

FIG. 8 (c) is a longitudinal cross-sectional view after the cover plate bonding step in which a cover plate 8 having a liquid supply hole 9 and a liquid discharge hole 10 is attached to one side 7 of the piezoelectric plate 4 and bonded. Indicates. The cover plate 8 was bonded by the adhesive material using the same material as the piezoelectric plate 4. The opening end of the liquid supply hole 9 and one opening end of the groove 5 coincide with, or almost coincide with, the opening end of the liquid discharge hole 10 and the other opening end of the groove 5. Match. Since the cover plate 8 is attached to the groove 5 side of the piezoelectric plate 4, positioning of both ends of the groove 5 and the opening end of the liquid supply hole 9 and the liquid discharge hole 10 is extremely easy. Become. The liquid supply hole 9 and the liquid discharge hole 10 substantially coincide with both ends of the groove 5, and the groove 5 has an arc shape convex in the depth direction. By this structure, when liquid flows into the groove 5 from the liquid supply hole 9 and is discharged from the liquid discharge hole 10, it is difficult to generate a hold or retention in the groove 5.

FIG.8 (d) shows the longitudinal cross-sectional view after the cutting process which cut the other surface 17 of the piezoelectric plate 4, and opened the top part of the groove 5 in the depth direction. Since the cover plate 8 is joined to one surface of the piezoelectric plate 4, the cover plate 8 functions as a reinforcing material of the piezoelectric plate 4. Therefore, the other surface 17 of the piezoelectric plate 4 can be easily cut by a grinder. Since the piezoelectric plate 4 can be ground so as to be polished from the other surface 17 side, the bottom surface of the groove 5 can be opened without destroying the side wall 6 partitioning the groove 5.

FIG. 8E shows a longitudinal cross-sectional view after the nozzle plate bonding step in which the nozzle plate 2 is attached to the other surface 17 of the piezoelectric plate 4 and bonded. Polyimide resin was used as the nozzle plate 2, and the piezoelectric plate 4 was bonded using an adhesive material. The nozzle 3 has a funnel shape in which the opening cross-sectional area gradually decreases from the groove 5 side toward the outside, and the through hole of the funnel shape is formed by laser light. The nozzle 3 was installed in the center part of the longitudinal direction of the groove | channel 5.

In addition to the process shown in FIG. 8, a flow path member bonding step of preparing a flow path member having a liquid supply chamber and a liquid discharge chamber and attaching to one side of the cover plate 8 may be included. At the time of joining, the liquid supply hole 9 and the liquid discharge hole 10 formed in the cover plate 8 are connected to each of the liquid supply chamber and the liquid discharge chamber. This makes it possible to supply the liquid to the plurality of grooves 5 evenly, and to function as a buffer chamber to mitigate the transfer of the pulsation of the liquid pump to the nozzle 3 side.

Moreover, in the said cutting process, you may leave a piezoelectric material in the top part of a depth direction, without grinding until the top part convex in the depth direction of the groove | channel 5 opens. When leaving the piezoelectric material on the bottom surface side of the groove 5, a through hole corresponding to the nozzle 3 is formed before or after the cutting process. The formation of this through hole does not grind the side wall 6 which partitions the groove 5, so that the side wall is not broken during grinding. If the piezoelectric material is left on the bottom surface of the groove 5, the distance from the region of the groove 5 to the discharge port of the nozzle 3 is long, and the flow path resistance increases, and the discharge speed is lowered. Therefore, preferably, the bottom of the groove 5 is opened so that the surface of the nozzle plate 2 is the bottom of the groove 5.

According to the manufacturing method of the liquid jet head 1 of the present invention, the liquid supply hole 9 or the liquid discharge hole 10 is matched to the open ends of both grooves 5 without requiring a high grinding technique. Or close match. Then, the liquid is supplied from the surface side in which the groove 5 is formed in the groove 5 having a convex shape in the depth direction, and the liquid is discharged from the same surface side. However, the retention can be reduced. Therefore, even if bubbles, dust, and foreign matter such as dust are mixed in the groove 5, it can be quickly discharged to the outside, whereby clogging of the nozzle 3 can be reduced.

1: liquid jet head 2: nozzle plate
3: nozzle 4: piezoelectric plate
5: groove 6: side wall
7: one side 8: cover plate
9: liquid supply hole 10: liquid discharge hole
20: liquid injector 24: FPC
25 driver IC 27 liquid tank
28: pressure pump 29: suction pump

Claims (11)

A nozzle plate having a nozzle for injecting liquid onto the recording medium;
A piezoelectric plate having an elongated groove on one side and joining the nozzle plate to the other side;
A cover plate having a liquid supply hole for supplying the liquid to the groove and a liquid discharge hole for discharging the liquid from the groove, and provided on one side of the piezoelectric plate,
The elongated groove of the piezoelectric plate is convex in the longitudinal direction and in the depth direction of the groove, and communicates with the nozzle at the top of the convex shape, the liquid supply hole at the bottom of the convex shape, and A liquid jet head in communication with the liquid discharge hole. The method according to claim 1,
The cross section of the groove has a circular arc shape convex in the depth direction. The method according to claim 1 or 2,
The groove is in contact with the liquid supply hole or the liquid discharge hole at one or both opening ends in the longitudinal direction. The method according to any one of claims 1 to 3,
The cover plate is provided with a plurality of liquid discharge holes for discharging the liquid from the grooves or a plurality of liquid supply holes for supplying the liquid to the grooves. The method according to any one of claims 1 to 4,
The nozzle plate includes a plurality of nozzles communicating with the grooves. The method according to any one of claims 1 to 5,
It has a liquid supply chamber which hold | maintains the liquid supplied to the said liquid supply hole, and the liquid discharge chamber which hold | maintains the liquid discharged | emitted from the said liquid discharge hole, and has the flow path member provided in the surface on the opposite side to the said piezoelectric plate of the cover plate. Liquid injection head. The method according to any one of claims 1 to 6,
A driving circuit for supplying driving power to electrodes formed on sidewalls of the grooves;
A flexible substrate on which the drive circuit is mounted and attached to the piezoelectric plate;
And a base for accommodating the piezoelectric plate and the cover plate while the nozzle plate is exposed to the outside and fixing the flexible substrate to an outer surface. The liquid jet head according to any one of claims 1 to 7,
A liquid tank for supplying liquid to the liquid supply hole of the cover plate and storing liquid discharged from the liquid discharge hole of the cover plate;
A pressurizing pump for pressurizing and supplying the liquid from the liquid tank to the liquid supply hole;
And a suction pump for sucking and discharging the liquid from the liquid discharge hole to the liquid tank. The method according to claim 8,
And a degassing means having a degassing function on a path from the liquid discharge hole to the liquid tank. A groove processing step of forming an elongated groove in which the depth direction becomes convex on one surface of the piezoelectric plate;
A cover plate bonding step of attaching a cover plate having a liquid supply hole and a liquid discharge hole to one side of the piezoelectric plate;
A cutting process for cutting the other surface of the piezoelectric plate;
And a nozzle plate joining step of attaching a nozzle plate having a nozzle for liquid ejection to the other side of the piezoelectric plate to communicate the nozzle and the groove. The method according to claim 10,
A flow path member joining step of attaching a flow path member having a liquid supply chamber for holding a liquid to be supplied to the liquid supply hole and a liquid discharge chamber for holding a liquid discharged from the liquid discharge hole, on the side opposite to the piezoelectric plate of the cover plate. The manufacturing method of the liquid jet head characterized by having.
KR1020100096769A 2009-10-29 2010-10-05 Method for manufacturing liquid jet head, liquid jet device and liquid jet head KR20110047129A (en)

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