KR20110038249A - Apparatus for adjusting a center of an ingot block and method for adjusting a center of an ingot block using it - Google Patents

Abstract

PURPOSE: Center adjusting device and method of an ingot block using the same are provided to reduce the failure of the ingot block by removing only the unnecessary part of the ingot block in a squaring process. CONSTITUTION: A center adjusting device(100) of an ingot block comprises a work table(200), a distance measuring unit(300), a control unit, and a center adjusting unit(400). The ingot block is placed on the work table. The distance measuring unit measures each distance between a plurality of parts of the ingot block in the longitudinal direction of the ingot block. The control unit calculates a correction value for the position of each central point of vertical sections at a plurality of parts of the ingot block based on the reference line of the top of the work table. The center adjusting unit lifts the ingot block so that a plurality of central points on the plurality of parts of the ingot block are located at the same position.

Description

Apparatus for adjusting a center of an ingot block and method for adjusting a center of an ingot block using it}

The present invention relates to an apparatus for adjusting the center of an ingot block and a method for adjusting the center of an ingot block using the same. More specifically, in order to prevent eccentricity when the shelf is mounted on the ingot block, the respective separation distances of the ingot blocks are automatically measured. In addition, the center adjusting device of the ingot block for raising and lowering the ingot block so that each center point of the vertical section in the plurality of parts of the ingot block is located at the same position on the ground using the measured plurality of separation distances, and the center adjustment of the ingot block using the same It is about a method.

In general, ingots grown into single crystals are used as base materials for the production of finished products such as wafers, and are manufactured as semi-finished products to facilitate the production of the finished products. Such a semi-finished product is formed through a process of growing a silicon melt into a single crystal ingot and a process of cutting the ingot to a certain size and then cutting the outer surface by cutting and polishing.

Referring to the process of the ingot grown in the single crystal growth apparatus is transformed into a semi-finished product, referring to Figure 1, the ingot 10 grown through the single crystal growth apparatus (not shown) is the growth direction (x direction; direction toward the ground during growth) ) Is divided into a growth initiation site (M ₁ ), a growth site (M ₂ ) and a growth endpoint (M ₃ ). Unlike the growth site (M ₂ ) where single crystal growth is in earnest, the growth start site (M ₁ ) and the growth end site (M ₃ ) have a cross-sectional size in the vertical direction (z direction) along the growth direction (x direction). It is not formed uniformly.

On the other hand, since the ingot 10 is grown in such a way that the silicon melt is laminated to the rotating seed seed, a bend is formed on the outer surface.

The ingot 10 formed with a constant growth length L is transferred to a subsequent process so that both ends, that is, the growth start point M ₁ and the growth end point M ₃ , are removed. After that, both ends are removed and the remaining growth site M ₂ is cut in units of a set length L ₁ to form an ingot block 20. Although the ingot block 20 is formed by cutting the growth site M ₂ , the ingot block 20 has a diameter D _x and D _y having a fine length difference in the growth direction (x direction) due to the bending of the outer surface.

Ingots 20 (20a, 20b) as described above is transformed into square pillar-shaped ingot blocks (20a ', 20b') through a chamfering process in a subsequent process. It is also finalized as a semi-finished product 30 through grinding on corners and outer surfaces. (Hereinafter, chamfering and polishing are referred to as 'squaring'.)

Square processing of the ingot block 20 is usually performed in a lathe equipped with a headstock and tailstock. One side of the shelf is provided with a workbench for seating the ingot block 20 to draw in and out the ingot block 20 to the shelf. In addition, between the shelf and the workbench is provided with a conveying device for lifting the ingot block 20 seated on the workbench to the shelf.

However, in the related art, there is a problem in that the ingot block 20 is mounted in an eccentric state when the ingot block 20 is automatically moved and mounted on a shelf. That is, conventionally, the ingot block 20 was mounted on the lathe as it was seated on the work table without measuring the center point in the vertical section of the ingot block 20, that is, the center. Since the ingot block 20 has different diameters (D _x , D _y ) sizes according to parts, the central axis of the ingot block 20 does not coincide with the rotation axis formed between the main shaft and the tail stock of the shelf. (In this case, the central axis means an axis connecting the center points at multiple portions of the ingot block 20.)

Therefore, the ingot block 20 may be mounted eccentrically to the lathe apparatus, and then the ingot block 20 may be deformed when the squaring operation is performed. That is, the ingot block 20 has a problem that the yield of expensive ingots is greatly reduced because many parts are removed more than necessary by chamfering and polishing.

In addition, there is a problem that the irregular load is applied to the shelf device causes a failure and failure of the shelf device, thereby increasing the management cost.

In addition, the process time for processing the ingot block 20 into the semi-finished product 30 is increased, there is a problem that the productivity is lowered.

In order to solve the above problems, the present invention provides an apparatus for adjusting the center of an ingot block for automatically measuring each separation distance at a plurality of portions of the ingot block to prevent the ingot block from being eccentric when the shelf is mounted on the ingot block; It provides a center adjustment method of the ingot block using the same.

In addition, the center adjusting device of the ingot block for raising and lowering the ingot block so that each center point of the vertical section in the plurality of parts of the ingot block is located at the same position on the ground by using the measured plurality of separation distances, and the center of the ingot block using the same Provide a method of adjustment.

An apparatus for adjusting the center of an ingot block according to an embodiment of the present invention measures a worktable for seating an ingot block and each separation distance spaced upward from a plurality of portions of the ingot block along a lengthwise direction of the ingot block. Computing a correction value by the position of the center point of the vertical cross-section at the plurality of portions of the ingot block on the basis of the reference line formed on the upper surface of the work table using the distance measuring unit and the measured plurality of separation distances And a center adjusting unit for raising and lowering the ingot block such that the plurality of center points in the plurality of portions of the ingot block are located at the same position from the ground using the calculation control unit and the calculated correction value.

In addition, the method for adjusting the center of the ingot block according to an embodiment of the present invention comprises the steps of setting the ingot block seated on the work table at a plurality of portions of the ingot block along the extending length direction of the ingot block Measuring each separation distance spaced upwardly, and using the measured plurality of separation distances, a center point position of each vertical section at a plurality of portions of the ingot block based on a reference line formed on an upper surface of the work table; Comprising a step of calculating the correction value by using the calculated value and the step of lifting up and down the ingot block so that the plurality of center points in the plurality of parts of the ingot block is located at the same position from the ground.

According to an embodiment of the present invention, the center of the ingot block may be automatically adjusted by measuring the separation distance at a plurality of portions of the ingot block. That is, the ingot block, which is formed with a different diameter size of the vertical cross section according to a part, can be easily and automatically mounted in an uneccentric state on a lathe that performs a squaring process.

In addition, the length of the ingot block and the radius of the vertical cross section at a plurality of portions of the ingot block can be automatically obtained.

In addition, by preventing the eccentricity of the ingot block it is possible to remove only the unnecessary portion of the ingot block during the squaring process to reduce the failure rate of the expensive ingot block, it is possible to improve the yield of the ingot block.

In addition, by reducing the irregular stress applied to the shelf device to improve the shelf life of the shelf and at the same time prevent the occurrence of failures can reduce the production cost.

In addition, productivity can be improved by shortening the process time for finalizing the ingot block into a semi-finished product.

Hereinafter, with reference to the accompanying drawings will be described embodiments of the present invention in more detail. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various forms, provided that the embodiments of the present invention are complete, and the scope of the invention to those skilled in the art. It is provided for complete information. In the drawings like reference numerals refer to like elements.

Figure 2 is a perspective view showing a center adjusting apparatus of the ingot block according to an embodiment of the present invention, Figures 3 and 4 are the center position of the length and both ends of the ingot block through the center adjusting apparatus of the ingot block according to the present invention. Figure 5 is a view showing a state of measuring, Figure 5 is a view showing a state of changing the seating posture of the ingot block shown in FIG.

2 to 5, the center adjusting apparatus 100 of the ingot block according to an embodiment of the present invention is a work table 200 for seating the ingot block 20 (see Figs. 6 to 9), and the ingot block Distance measurement for measuring the angular separation distance (H ₁ , H ₂ ; see FIG. 4) spaced upward from a plurality of portions of the ingot block 20 along the extending longitudinal direction (x direction) of 20. In the plurality of portions of the ingot block 20 on the basis of the reference line (L _b ) formed on the upper surface of the work table 200 using the unit 300 and the plurality of measured separation distances H ₁ and H ₂ . An arithmetic control unit (not shown) for calculating a correction value (ΔH; see Fig. 4) by the position of each center point C ₁ , C ₂ ; Center adjustment unit 400 for raising and lowering the ingot block 20 so that the plurality of center points (C ₁ , C ₂ ) in a plurality of parts of the ingot block 20 is located at the same position from the ground using Include.

One side of the worktable 200 is provided with a shelf 50 (see FIG. 2) for squaring the cylindrical ingot block 20. The work table 200 is used as a waiting place of the ingot block 20 for supplying and withdrawing the ingot block 20 to the shelf 50.

In the present exemplary embodiment, the work bench 200 has a frame portion 210 that forms an outer skeleton through a combination of a plurality of vertical frames 212 and a plurality of horizontal frames 214 and a straight line on an upper surface of the frame portion 210. At least one ingot block transfer part 220 having a plurality of drive rolls 222 aligned to seat and transport the ingot block 20.

Here, the frame portion 210 has a vertical frame 212 is located at the four corners so that the horizontal cross-section of the outer skeleton parallel to the ground to form a quadrangle block, a plurality of between the four vertical frame 212 The horizontal frame 214 is formed in a form that is coupled to a plurality of upper and lower ends.

Meanwhile, the height adjusting plate 216 is provided under the plurality of vertical frames 212 so that the plurality of horizontal frames 214 are kept horizontal with respect to the ground. The height adjusting plate 216 is coupled to the top of the plurality of vertical frames 212 so that four horizontal frames 214 forming the upper surface edges of the frame portion 210 maintain a horizontal plane with respect to the ground. To this end, in the present embodiment, the lower surface of the vertical frame 212 and the height adjusting plate 216 are screwed together, and the height of the vertical frame 212 may be adjusted according to the amount of rotation of the height adjusting plate 216.

The upper surface of the work table 200 as described above is provided with an ingot block transfer unit 220 for transferring the seated ingot block 20 in one direction. Here, the ingot block transfer part 220 is provided on the inside of the drive roll support 224 and the drive roll support 224 to support the plurality of drive rolls 222 on the upper surface of the worktable 200 and the plurality of drive rolls. One end of the power transmission means (not shown) for interlocking the 222 and the power supply means (not shown) and the driving roll support 224 provided on one side of the driving roll support 224 and providing a driving force to the power transmission means. A stopper 226 coupled to the portion stops the feeding of the ingot block 20.

The plurality of driving rolls 222 are inclined downward (A; see FIG. 4) from both edge portions to the center portion in order to easily seat the cylindrical ingot block 20. As shown in FIG. 3, when the ingot block 20 is seated on the inclined upper surface of the plurality of driving rolls 222, the center points C ₁ and C ₂ of the vertical cross section at a plurality of portions of the ingot block 20. Connecting the central axis (L _c ) is passed through the central portion of the plurality of drive rolls (222). (Figure 3 shows that a plurality of portions of the ingot block is set to both ends of the ingot block.)

The power transmission means is a means for connecting the plurality of driving rolls 222 so that the plurality of driving rolls 222 are integrally driven and stopped. In this embodiment, the driving shafts protrude from both ends of the plurality of driving rolls 222. Belts or gears were attached to the belts, and adjacent driving rolls were wound around the belts or the gears were engaged.

The distance measuring unit 300 is a means for measuring the separation distances H ₁ and H ₂ at a plurality of portions of the ingot block 20. In this embodiment, the length direction x of the ingot block 20 extends. Direction) and a plurality of separation distances H ₁ and H spaced apart from the ingot block 20 by placing the first sensor 324 and the second sensor 334 on one side and the other side of the ingot block 20, respectively. ₂ ) Measure. On the other hand, as a modification of the present invention by driving one sensor horizontally in the upper portion of the ingot block 20 along the extending length direction of the ingot block 20, the respective separation distance (a plurality of portions of the ingot block 20) H ₁ , H ₂ ) can be measured sequentially.

That is, the distance measuring unit 300 may measure a plurality of separation distances H ₁ and H ₂ from the ingot block 20 using the plurality of sensors 324 and 334 as in the present embodiment. As in the modification, a plurality of separation distances H ₁ and H ₂ from the ingot block 20 may be measured while driving one sensor horizontally.

The distance measuring unit 300 according to the present embodiment is coupled to be fixed to the measuring unit support body 310 coupled to one side of the frame unit 210, the position of the measuring unit support body 310 at one side, The first sensor unit 320 and the measuring body support body 310 for measuring the first separation distance (H ₁ ; see Fig. 4) is spaced above the one side of the ingot block 20 in contact with the stopper 226 Coupled to the horizontal direction along the conveying direction (x direction) of the ingot block 20 in the upper surface of the), and is spaced apart from the other end position of the ingot block 20 and the other side of the ingot block 20 above the second side And a second sensor unit 330 for measuring a separation distance H ₂ (see FIG. 4).

The first sensor unit 320 intersects the vertical support 321 which is vertically erected by the measuring unit support body 310 and the conveying direction (x direction) of the ingot block 20 at the upper portion of the vertical support 321. The first sensor 324 includes a horizontal support 322 connected in the direction (y direction), the lower surface of the horizontal support 322 to measure the separation distance H ₁ by irradiating light to the ingot block 20. ) Are combined.

Similarly, the second sensor unit 330 also includes a vertical support 331 which is erected vertically in the measuring unit support body 310 and a horizontal support 332 which is cross-connected at the upper portion of the vertical support 331. The second sensor 334 is coupled to the bottom surface of the horizontal support 332 to measure the separation distance H ₂ by irradiating light onto the ingot block 20. However, in the case of the first sensor unit 320, the vertical support 321 is coupled to the measurement unit support body 310 so as to be fixed, while the vertical support 331 of the second sensor unit 320 is the ingot block 20. Sensor unit drive cart 350 between the upper surface of the measuring body support body 310 and the lower surface of the vertical support 331 to be horizontally driven (S ₁ ) in a direction parallel to the transport direction (x direction) of Is provided. In addition, in the space between the upper surface of the measuring unit support body 310, that is, the vertical support 321 of the first sensor unit 320 and the vertical support 331 of the second sensor unit 330, the sensor unit driving cart ( A guide groove 352 is formed to guide the path of 350.

The first sensor 324 and the second sensor 334 are in a non-contact manner in a state spaced apart from the upper side of the ingot block 20, more specifically, above the center portion of the plurality of driving rolls 222 (see FIG. 3). The distance from the ingot block 20, that is, the distance (H ₁ , H ₂ ) is measured. In this embodiment, a laser sensor is used as the first sensor 324 and the second sensor 334.

The ingot block 20 is introduced into the ingot block transfer unit 220 formed on the upper surface of the work table 200, and the end of the ingot block 20 is connected to the stopper 226 coupled to one end of the ingot block transfer unit 220. When the surface is in contact with each other, the rotation of the plurality of driving rolls 222 of the ingot block transfer part 220 stops the ingot block 20 from being fed anymore.

As described above, when one end surface of the ingot block 20 comes into contact with the stopper 226 and stops, the horizontal surface of the ingot block 20 extends along the longitudinal direction (x direction) of the ingot block 20 at a spaced upper side of the ingot block 20. The second sensor unit 330 driven S ₁ detects the position of the other end surface of the ingot block 20 by horizontally driving the ingot block 20 in the opposite direction transferred to the stopper 226.

Since the first sensor 324 is positioned above the one end of the ingot block 20 in contact with the stopper 226, the ingot block 20 may be formed through a distance difference between the first sensor 324 and the second sensor 334. Measure the length (L ₁ ) of (see Fig. 3).

As described above, the center adjusting apparatus 100 of the ingot block according to the exemplary embodiment of the present invention may measure the length L ₁ of the ingot block 20. Through this, it is possible to check whether the ingot block 20 is cut to a predetermined length from the ingot 10 (see FIG. 1), and further, the shelf 50 in the process of automatically mounting the ingot block 20 on the shelf 50. The distance between the headstock and the tailstock can be adjusted in advance.

Meanwhile, at least one ingot block transfer part 220 may be provided on an upper surface of the work table 200. In the present embodiment, two ingot block transfer parts 220 may be provided on the upper surface of the work table 200.

When the ingot block transfer part 220 is arranged in plural in the direction (y direction) that intersects the longitudinal direction (x direction) of the ingot block 20 extending from the upper surface of the work table 200, one per ingot block transfer part Two ingot blocks 20 are seated and transported, and the plurality of ingot block transfer units measure the length of the ingot block 20 and the separation distances H ₁ and H ₂ at a plurality of portions of the ingot block 20. The first sensor 324 and the second sensor 334 are horizontally driven in the direction (y direction), that is, the alignment direction, which intersects the conveying direction of the ingot block 20 in the horizontal supports 322 and 332 (S _2). )do.

When the length (L ₁ ) measurement of the ingot block 20 is completed in the same manner as above, the first sensor unit 320 and the other side of the ingot block 20 located above one side of the ingot block 20 The distance spaced from the ingot block 20 through the second sensor unit 330 moving upward, that is, the first separation distance H ₁ and the second separation distance H ₂ is measured.

When a plurality of separation distances H ₁ , H ₂ at a plurality of portions of the ingot block 20 seated on the horizontal line L _h formed by the upper surface of the work table 200 is measured, the upper portion of the work table 200 is measured. and a reference line formed on the surface (L _b), the shortest distance from the first sensor (324) (H ₃₎ from a, base line (L _b) from knowing the shortest distance (H ₄₎ to the second sensor 334. because The correction value DELTA H according to the position of the center points C ₁ and C ₂ of the vertical section at the plurality of portions of the ingot block 20 can be calculated as shown in Equation 1 below.

[Equation 1]

Here, H ₃ and H ₄ are the shortest distances from the reference line L _b to the first sensor 324 and the second sensor 334, and H ₁ and H ₂ are the first sensor 324 and the second sensor. A plurality of separation distances (first separation distance and second separation distance) respectively measured at 334.

Also, when the first sensor 324 and the second sensor 334 are located at the same position from the reference line L _b (that is, when H ₃ = H ₄ ), the plurality of portions of the ingot block 20 may be formed. The correction value ΔH by the center point C ₁ , C ₂ of the vertical cross section of can be calculated as shown in Equation 2 below.

[Equation 2]

Here, H ₁ and H ₂ are a plurality of separation distances respectively measured by the first sensor 324 and the second sensor 334.

As described above, according to the present embodiment, it can be seen that the correction value ΔH can be immediately calculated only by measuring the separation distances H ₁ and H ₂ at the plurality of portions of the ingot block 20. .

The correction value ΔH calculated as described above is used to adjust the centering so that the center axis L _c of the ingot block 20 is horizontal to the ground by elevating the ingot block 20 from the center adjusting unit 400 to be described later. do.

On the other hand, the radius (d ₁ , d ₂ ) of the vertical cross-section at a plurality of portions of the ingot block 20 can also be calculated as shown in Equation 3 below by measuring a plurality of separation distances H ₁ and H ₂ . Can be.

&Quot; (3) "

,

...[수학식 3]

,

... [Equation 3]

Here, H ₃ is the shortest distance between the reference line L _b and the first sensor 324, H ₄ is the shortest distance between the reference line L _b and the second sensor 334, and H ₁ is the first sensor. The first separation distance measured at 324, and H ₂ is the second separation distance measured at the second sensor 334.

Center adjustment unit 400 is provided on one side of the inside of the frame portion 210 to protrude from one side of the upper surface of the frame portion 210 in the separation space (P ₁ ) between the plurality of drive rolls 222 to drive up and down (S ₃ The first lifting means 410 for elevating one side of the lower surface of the ingot block 20, and the frame part so as to face the first lifting means 410 along the conveying direction (x direction) of the ingot block 20. It is provided on the other side of the inside of the 210, and driven up and down in the separation space (P ₁ ) between a plurality of drive rolls 222 so as to protrude from the other side of the upper surface of the frame portion 210, the other side of the lower surface of the ingot block 20 The second lifting means 420 for elevating (S ₄ ). A first difference between the lifting means 410, the vertical drive distance (H _5), and the vertical drive distance (H ₆₎ of the second lifting means (430) of have the same size as the correction value (△ H) (see Fig. 5 ).

Supporting the lower surface of the ingot block 20 on the upper end of the first lifting means 410 and the second lifting means 420, the ingot block 20 during the lifting driving (S ₃ , S ₄ ) frame portion 210 V-shaped support arms 412 and 422 which are lifted to be spaced apart from each other are provided respectively.

In addition, support arm driving means 414 and 424 for vertically reciprocating the support arms 412 and 422 are provided below the support arms 412 and 422, and the support arm driving means 414 and 424 are hydraulic cylinder type. The support arms 412 and 414 may be driven in various ways, such as a pneumatic cylinder method or an electric motor driving method.

Lifting the ingot block 20 so that the center point, that is, the center (C ₁ , C ₂ ) formed in the vertical section of the plurality of parts of the ingot block 20 through the center adjusting unit 400 as described above is located at the same height with respect to the ground. To change your posture. That is, the difference between the correction values ΔH calculated before the lifting driving (S ₃ , S ₄ ) of the support arm 412 of the first lifting means 410 and the support arm 422 of the second lifting means 420. The ingot block 20 is driven up and down at different driving distances H ₅ and H ₆ at different driving distances S ₃ and S ₄ so that the central axis L _c of the ingot block 20 is parallel to the ground. 20) Center (C ₁ , C ₂ ) position can be adjusted.

Hereinafter, a center adjusting method of an ingot block according to an embodiment of the present invention using the above-described center adjusting apparatus of an ingot block will be described with reference to FIGS. 6 to 10. 6 to 9 are operational state diagrams of an apparatus for adjusting the center of an ingot block according to an embodiment of the present invention, and FIG. 10 is a flowchart illustrating a method for adjusting the center of an ingot block according to an embodiment of the present invention. )

6 to 10, the center adjustment method according to an embodiment of the present invention is to set the ingot block seated on the work table at the reference position (S110, Figure 6), and the longitudinal direction of the ingot block extending According to the step (S120, Figure 7) measuring the separation distance from the plurality of parts of the ingot block to the upper side, and using the measured plurality of separation distance based on the reference line formed on the upper surface of the work table of the ingot block A step of calculating a correction value according to the position of the center point of each vertical section in the plurality of sites (S130) and using the calculated correction value, the ingot such that the plurality of center points in the plurality of sites of the ingot block are located at the same position from the ground. Step of lifting and lowering the block (S140, Figs. 8 and 9).

The setting of the reference position of the ingot block is determined by the ingot block seated on the upper surface of the work table being transferred in one direction, and the ingot block stops when one end surface of the ingot block contacts the stopper (S110). That is, the position of the ingot block in contact with the stopper is the reference position of the ingot block.

After the reference position of the ingot block is set as described above, the length of the ingot block may be measured before or after the step of measuring the plurality of separation distances.

In the step of measuring the length of the ingot block, the first sensor is positioned above the one end surface of the ingot block, and the second sensor is positioned above the other end surface of the ingot block through horizontal driving along the extending length direction of the ingot block. The distance between the two end faces of the block is measured by the length of the ingot block. That is, the other end surface of the ingot block by the first sensor is fixed to the one end surface of the ingot block in the state in which one end surface of the ingot block is in contact with the stopper, and the second sensor horizontally driven across the spaced upper side of the ingot block. The position of is measured and the distance between the first sensor and the second sensor is measured by the length of the ingot block.

In the measuring of the plurality of separation distances, the first sensor and the second sensor are positioned at one side and the other side of the ingot block along the extending length direction of the ingot block, respectively, and the ingot block from the first sensor and the second sensor. Measure each separation distance that is spaced up to (S120). Also, one sensor is horizontally driven at the top of the ingot block along the extending length direction of the ingot block without using two sensors (a first sensor and a second sensor) to measure a plurality of separation distances. It is also possible to sequentially measure a plurality of separation distances at a plurality of sites.

Subsequently, when a plurality of separation distances are measured, a correction value ΔH is calculated based on the position of the center point of each vertical section in the plurality of portions of the ingot block using the plurality of separation distances (S130).

The correction value ΔH is calculated as shown in Equation 4 below.

&Quot; (4) "

Here, H ₃ is the shortest distance between the reference line and the first sensor, H ₄ is the shortest distance between the reference line and the second sensor, H ₁ is the first separation distance measured by the first sensor, H ₂ is the second The second separation distance measured by the sensor.

In particular, when the first sensor and the second sensor is located at the same position from the reference line formed on the upper surface of the work table, the correction value ΔH is calculated as shown in Equation 5 below.

[Equation 5]

Here, H ₁ is the first separation distance measured by the first sensor, H ₂ is the second separation distance measured by the second sensor.

Meanwhile, after the measuring of the plurality of separation distances, calculating a radius of each vertical section at a plurality of portions of the ingot block.

The radii d ₁ and d ₂ of the vertical sections at the plurality of portions of the ingot block can be calculated as shown in Equation 6 below.

&Quot; (6) "

,

,

Here, H ₃ is the shortest distance between the reference line and the first sensor, H ₄ is the shortest distance between the reference line and the second sensor, and H ₁ and H ₂ are the ingot blocks measured at the first sensor and the second sensor, respectively. Is the separation distance.

When the correction value of the ingot block is calculated as described above, the seating attitude of the ingot block is changed using the calculated correction value (S140). The seating posture of the ingot block is changed by a center adjusting unit having first lifting means and second lifting means driven up and down to protrude from the upper surface of the work table.

That is, the difference between the up and down driving distance of the first lifting means and the up and down driving distance of the second lifting means is set to the same size as the correction value, so that a plurality of portions, that is, a plurality of separation distances, are measured in the extending length direction of the ingot block. The raised part is elevated to a different height.

Therefore, the center point of the vertical section in the plurality of portions of the ingot block, that is, the center is located at the same position with respect to the ground, and the center axis connecting the plurality of center points is parallel to the ground (centering adjustment).

As described above, the apparatus for adjusting the center of the ingot block and the method for adjusting the center of the ingot block using the same according to an embodiment of the present invention can automatically adjust the center of the ingot block by measuring the separation distance at a plurality of portions of the ingot block. have. In other words, the ingot block, which is formed in a different diameter size of the vertical cross section according to a part, can be easily and automatically mounted in an uneccentric state on a shelf for performing a squaring process.

In addition, the length of the ingot block and the radius of the vertical cross section at a plurality of portions of the ingot block can be automatically obtained.

In addition, by preventing the eccentricity of the ingot block it is possible to remove only the unnecessary portion of the ingot block during the squaring process to reduce the failure rate of the expensive ingot block, it is possible to improve the yield of the ingot block.

In addition, by reducing the irregular stress applied to the shelf device to improve the shelf life of the shelf and at the same time prevent the occurrence of failures can reduce the production cost.

In addition, productivity can be improved by shortening the process time for finalizing the ingot block into a semi-finished product.

As mentioned above, although this invention was demonstrated with reference to the above-mentioned Example and an accompanying drawing, this invention is not limited to this, It is limited by the following claims. Therefore, it will be apparent to those skilled in the art that the present invention may be variously modified and modified without departing from the technical spirit of the following claims.

1 is a view schematically showing a process of transforming an ingot grown in a single crystal growth apparatus into a semi-finished product.

Figure 2 is a perspective view showing a center adjustment apparatus of the ingot block according to an embodiment of the present invention.

3 and 4 is a view showing a state of measuring the length and the center position of both ends of the ingot block through the center adjustment apparatus of the ingot block according to the present invention.

FIG. 5 is a view illustrating a state in which a seating posture of the ingot block illustrated in FIG. 4 is changed.

6 to 9 is an operational state diagram of the center adjusting apparatus of the ingot block according to the present invention.

10 is a flowchart illustrating a center adjusting method of an ingot block according to an embodiment of the present invention.

Description of the Related Art [0002]

100: center adjusting device of the ingot block 200: work table

210: frame portion 220: ingot block transfer portion

222: driving roll 226: stopper

300: distance measuring unit 320: first sensor unit

330: second sensor unit 400: center adjustment unit

410: first lifting means 420: second lifting means

Claims (20)

A worktable for seating the ingot block; A distance measuring unit measuring each separation distance spaced upward from a plurality of portions of the ingot block along a lengthwise direction of the ingot block; An arithmetic and control unit configured to calculate a correction value by each center point position of a vertical section at a plurality of portions of the ingot block based on a reference line formed on the upper surface of the work table using the measured plurality of separation distances; And A center adjusting unit which raises and lowers the ingot block such that the plurality of center points in the plurality of portions of the ingot block are located at the same position from the ground using the calculated correction value; Center adjusting device of the ingot block comprising a. The method according to claim 1, The distance measuring unit, Center adjustment of the ingot block for measuring the plurality of separation distances spaced from the ingot block by placing the first sensor and the second sensor on one side and the other side of the ingot block along the extending longitudinal direction of the ingot block, respectively Device. The method according to claim 1 or 2, The correction value ΔH due to the position of the center point of the vertical section at the plurality of portions of the ingot block is calculated as shown in Equation 1 below.

... [Equation 1] Here, H ₃ and H ₄ are the shortest distances from the reference line to the first sensor and the second sensor provided in the distance measuring unit, and H ₁ and H ₂ are respectively measured by the first sensor and the second sensor. Center adjustment apparatus of the ingot block, characterized in that the plurality of separation distance. The method of claim 3, When the first sensor and the second sensor is located at the same position from the reference line, the correction value ΔH is calculated as shown in Equation 2 below.

... [Equation 2] Here, H ₁ and H ₂ are the center adjustment apparatus of the ingot block, characterized in that the plurality of separation distances respectively measured by the first sensor and the second sensor. The method according to claim 2, The first sensor and the second sensor is a center sensor of the ingot block, characterized in that the laser sensor. The method according to claim 1, The distance measuring unit, An apparatus for adjusting a center of an ingot block in which a plurality of separation distances are sequentially measured at a plurality of portions of the ingot block by horizontally driving one sensor on an upper portion of the ingot block along an extending length direction of the ingot block. The method according to claim 1 or 2, The center adjustment unit, First lifting means for driving up and down to protrude from one side of an upper surface of the work table, and elevating one side of a lower surface of the ingot block; A second elevating means driven up and down to protrude from the other side of the upper surface of the work table and elevating the other side of the lower surface of the ingot block; Including, And a difference between the vertical driving distance of the first lifting means and the vertical driving distance of the second lifting means has the same size as the correction value. The method of claim 7, The center adjusting device of the ingot block is coupled to the upper end of the first elevating means and the second elevating means, respectively, the V-shaped support arms supporting the lower surface of the ingot block. The method according to claim 2, The distance measuring unit, The first sensor is positioned above the one end surface of the ingot block, and the second sensor is positioned above the other end surface of the ingot block through a horizontal drive along the extending length direction of the ingot block. An ingot block center adjusting device for measuring the distance between cross sections by the length of the ingot block. The method according to claim 2, The ingot block transfer part includes a plurality of driving rolls for mounting the ingot block in one direction and seating the ingot block, and a stopper for stopping driving of the plurality of driving rolls when one end surface of the ingot block contacts the upper surface of the work table. Center adjustment apparatus of the ingot block is provided with at least one. The method according to claim 10, When the ingot block transfer part is aligned in a direction crossing the longitudinal direction of the ingot block extending from the upper surface of the work table, the first sensor and the second sensor is the upper portion of the ingot block along the alignment direction Center adjustment of ingot blocks horizontally driven in the Setting an ingot block seated on a work table at a reference position; Measuring each separation distance spaced upward from a plurality of portions of the ingot block along an extending length direction of the ingot block; Calculating a correction value according to a center point position of each vertical section at a plurality of portions of the ingot block based on a reference line formed on an upper surface of the work table using the measured plurality of separation distances; And Elevating the ingot block such that the plurality of center points in the plurality of portions of the ingot block are located at the same position from the ground using the calculated correction value; Center adjustment method of the ingot block comprising a. The method according to claim 12, Measuring the plurality of separation distances, A first sensor and a second sensor are positioned at one side and the other side of the ingot block along a lengthwise direction of the ingot block, and are spaced apart from the first sensor and the second sensor to the ingot block. Center adjustment method of the ingot block consisting of measuring the distance. 14. The method of claim 13, In the step of calculating the correction value? H according to the position of the center point of each vertical section in the plurality of portions of the ingot block, the correction value? H is calculated as shown in Equation 3 below.

... [Equation 3] Here, H ₃ is the shortest distance between the reference line and the first sensor, H ₄ is the shortest distance between the reference line and the second sensor, H ₁ is the first separation distance measured by the first sensor. , H ₂ is the second separation distance measured by the second sensor. The method according to claim 14, When the first sensor and the second sensor is located at the same position from the reference line, the correction value ΔH is calculated as shown in Equation 4 below.

... [Equation 4] Wherein H ₁ is the first separation distance measured by the first sensor, and H ₂ is the second separation distance measured by the second sensor. The method according to claim 12, Measuring the plurality of separation distances, The method of adjusting the center of the ingot block to sequentially measure the plurality of separation distances in a plurality of portions of the ingot block by horizontally driving one sensor in the upper portion of the ingot block along the extending longitudinal direction of the ingot block. 14. The method of claim 13, And measuring a length of the ingot block before or after measuring the plurality of separation distances, and measuring the length of the ingot block by placing the first sensor on an upper end surface of the ingot block. Position the second sensor on the other end surface of the ingot block through a horizontal drive along an extended length direction of the ingot block, and measure a distance between both end surfaces of the ingot block as the length of the ingot block. How to adjust the center of the ingot block. 14. The method of claim 13, Calculating a radius of each vertical cross section at a plurality of portions of the ingot block after measuring the plurality of separation distances. 19. The method of claim 18, The radii d ₁ and d ₂ of the vertical sections at the plurality of portions of the ingot block are calculated as shown in Equation 4 below.

,

... [Equation 5] Here, H ₃ is the shortest distance between the reference line and the first sensor, H ₄ is the shortest distance between the reference line and the second sensor, H ₁ is the first separation distance measured by the first sensor. , H ₂ is the second separation distance measured by the second sensor. The method according to claim 12, Raising and lowering the ingot block, Drives up and down so as to protrude from the upper surface of the work table and supports and lifts one side and the other side of the lower surface of the ingot block by the first lifting means and the second lifting means, respectively, and the up and down driving distance of the first lifting means and the second The center adjustment method of the ingot block having a difference in the vertical driving distance of the lifting means having the same size as the correction value.

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