KR20110032787A - Transferring system for magnetic levitation - Google Patents

Abstract

PURPOSE: The electromagnetic levitation transfer system has the unit upper plate and the efficient rigid structure where the unit lower plate etc are connected. In that way the structure of being stable the long term is kept. CONSTITUTION: The main body conveying unit(120) comprises the first of the pair and the second unit conveying unit is separately placed the reciprocity. The floating unit(140) injures the main body conveying unit as the height predetermined about the track rail. The propulsion unit(150) offers the driving force so that the main body conveying unit leaped into be transferred to according to the route of the track rail.

Description

Transfer system for magnetic levitation

The present invention relates to a magnetic levitation conveying system, and more particularly, by applying a magnetic levitation technique, which is one of the non-contact methods for conveying a conveyed object, it is possible to solve the problem of particle generation. Magnetic levitation type that can solve the problem of damage of parts due to friction, wear and noise, and to convey the conveyed goods at high speed, while maintaining the stable structure for a long time by the efficient rigid structure of the main conveying unit. It relates to a transport system.

The conveying system is a device for conveying a conveyed object. Here, the object to be transported includes a substrate including a liquid crystal display (LCD), a plasma display panel (PDP) and organic light emitting diodes (OLED), a wafer for semiconductors, a tray for receiving and supporting a substrate or a wafer. In addition to being a cassette or a carrier, it can be various various logistic products including a general box. Hereinafter, the transfer object will be described as a cassette.

Transfer systems for transferring cassettes can be largely divided into a contact type and a non-contact type.

The contact type can be further divided into a conveyor type, a roller type, a rail type, and the like. Since the contact type transfer system can generate a large number of particles during the transfer process, for example, a cassette loaded with an LCD substrate is used. The transfer may cause contamination of the substrate by the particles and contamination of the clean room.

In addition, the contact type transfer system is a wear or friction occurs in the contact portion of the transfer structure or the power transmission structure because of frequent damage to the parts, and also causing severe noise, there is a problem that high-speed transfer over a certain level is impossible.

In contrast, the non-contact conveying system not only solves the problem of particle generation, but also solves the problem of damage of parts due to friction, wear, and noise, and can also transfer the conveyed material at high speed. Because of the advantages, there is an active research on the non-contact transfer system.

A magnetic levitation transfer system can be considered as a non-contact transfer system. Magnetic levitation technology uses the principle of attraction and repulsion of magnets (magnets), and it is known that magnetic levitation technology is applied to railway vehicles. There is a delay.

As such, the magnetic levitation technology is applied to a magnetic levitation train that transports people but has not yet been applied to a transport system that loads and transports a transported object such as a cassette. Therefore, in order to apply the magnetic levitation technology to a conveying system for loading and transporting a conveyed object such as a cassette, it is necessary to develop a new technology in many parts from the magnetic levitation train.

In spite of the need for the development of new technologies in many areas, the development of a magnetic levitation conveying system not only solves the problem of particle generation in transferring various conveyed objects including cassettes, The necessity of the development is very large because it is possible to solve the problem of damage and noise generation, and to transfer the conveyed material at high speed.

On the other hand, in developing a conveying system for loading and conveying the object to be conveyed by using the magnetic levitation technology, the main body conveying unit conveyed along the path of the track rail must have an efficient rigid structure to maintain a stable structure for a long time Technology development is needed.

It is an object of the present invention to solve the problem of particle generation by applying the magnetic levitation technology, which is one of the non-contact methods in transferring the object to be conveyed, as well as the damage of parts due to friction, wear, and noise. It is possible to provide a magnetic levitation conveying system that can solve the problem and cause the conveyed object to be conveyed at a high speed while maintaining a stable structure for a long period of time by having an efficient rigid structure.

The object is, according to the present invention, a main body transfer unit having a pair of the first and second unit transfer unit which is coupled to one side, the loading unit on which the object to be loaded is disposed, spaced apart from each other; A track rail forming a path through which the main body conveying unit is conveyed; A floating unit connected to the main body conveying unit and causing the main body conveying unit to float by a predetermined height with respect to the track rail; And a pushing unit connected to the main conveying unit, the pushing unit providing a driving force so that the main conveying unit floated by the floating unit is conveyed along a path of the track rail, wherein the main conveying unit comprises: the first and First and second rotation shafts coupled to a second unit transport unit, respectively, to form rotation axis centers of the first and second unit transport units, respectively; A unit top plate coupled to the first and second rotational shafts in the upper region of the main body transfer unit to cover the upper portions of the first and second unit transfer units to reinforce the main body transfer unit; And a unit lower plate installed on the propulsion unit and disposed below the unit upper plate and coupled with the first and second rotational shafts to reinforce the main body transfer unit together with the unit upper plate. It is achieved by a maglev conveying system.

Here, the unit lower plate may be a common unit lower plate which is commonly applied to the first and second unit transfer units.

The main body transfer unit may further include a connection part connecting the first and second unit transfer units such that the first and second unit transfer units are rotatable relative to each other.

The connection part may be first and second connection gears having abutting surfaces with gear teeth.

The main body transfer unit may include an elastic member that provides an elastic force to return the first and second unit transfer units to their original state when the first and second unit transfer units are rotated relative to each other by the first and second connection gears. It may further include.

The elastic member may be a tension coil spring whose both ends are fixed to the first and second unit transfer units.

Each of the first and second unit transfer units may include a unit upper plate unit to which the connection unit is coupled; A unit side plate portion coupled to the unit upper plate portion in a direction crossing the unit upper plate portion at a side of the unit upper plate portion; And a unit lower plate portion coupled to the unit side plate portion in a direction parallel to the unit upper plate portion at an end portion of the unit side plate portion.

The main body transfer unit may further include a vertical reinforcing bar connected to the unit upper plate and disposed in a vertical direction and partially coupled to the non-contact power supply unit at an end thereof.

The loading unit may include: an exterior cover having a loading portion on which the object to be conveyed is formed and partially covering and covering the main body transportation unit; And a protection net cover coupled to a lower region of the outer cover to partially protect the lower structure of the main transport unit.

The exterior cover may include a fixed cover portion; And a movable cover part connected to the fixed cover part by a hinge and pivotally opened and closed with respect to the fixed cover part by the hinge, wherein the protection net cover has a lower end bent toward the track rail and has a plurality of penetrating surfaces. A ball can be formed.

The stacking unit may be spaced apart from each other along a vertical direction, and a stacking unit upper plate and a stacking unit lower plate arranged side by side; And it may include a plate connecting portion for connecting the upper plate and the lower loading plate.

When the power supply is cut off may further include an emergency braking unit for limiting the movement of the main body transfer unit, the object to be conveyed may be a cassette (Liquid Crystal Display) substrate is loaded (cassette).

According to the present invention, by applying the magnetic levitation technology, which is one of the non-contact methods in transferring the object to be conveyed, it is possible not only to solve the particle generation problem, but also to damage the parts due to friction, wear, and noise. The problem can be solved and the object to be conveyed at a high speed can be maintained, while the main body conveying unit has an efficient rigid structure, thereby maintaining a stable structure for a long time.

In order to fully understand the present invention, the operational advantages of the present invention, and the objects achieved by the practice of the present invention, reference should be made to the accompanying drawings which illustrate preferred embodiments of the present invention and the contents described in the accompanying drawings.

Hereinafter, the present invention will be described in detail by explaining preferred embodiments of the present invention with reference to the accompanying drawings. Like reference numerals in the drawings denote like elements.

1 is a perspective view of a magnetic levitation conveying system according to an embodiment of the present invention, Figure 2 is a plan view of Figure 1, Figure 3 is an enlarged view of region A of Figure 1, Figure 4 is a track rail in Figure 3 5 is a partially cutaway perspective view of the assembled state of FIG. 4, FIGS. 6 to 8 are perspective views of the main body transfer unit respectively shown at different angles, and FIG. 9 is a partially cutaway perspective view of the main body transfer unit. 10A and 10B are plan views according to operating states of the main body transfer unit, FIG. 11 is a cross-sectional view taken along the line BB of FIG. 3, FIG. 12 is a cross-sectional view taken along the line CC of FIG. 3, and FIG. Control block diagram of a magnetic levitation transfer system according to an embodiment of the present invention.

As shown in these figures, the magnetic levitation conveying system of this embodiment includes a loading unit 110 on which a conveyed object is loaded, a main body conveying unit 120 to which the loading unit 110 is coupled, and a main body. The track rail 101 forming a path through which the conveying unit 120 is conveyed, and the main conveying unit 120 connected to the main conveying unit 120 and the main conveying unit 120 have a predetermined height (H, FIG. 11) with respect to the track rail 101. And the floating unit 140, which is connected to the main body conveying unit 120 and injured by the floating unit 140, is moved along the path of the track rail 101. And a propulsion unit 150 that provides a propulsion force whenever possible.

In the magnetic levitation transfer system of the present embodiment, the main body transfer unit 120 includes a pair of first and second unit transfer units 121 and 122 and first and second unit transfer units 121 and 122 that are spaced apart from each other. The first and second rotary shafts 121a and 122a and the upper portions of the first and second unit transfer units 121 and 122 that are coupled to each other to form the rotary shaft centers of the first and second unit transfer units 121 and 122, respectively. A unit top plate 130 and a pushing unit 150 are installed to be coupled to the first and second rotation shafts 121a and 122a in the upper region of the main body transfer unit 120 to reinforce the main body transfer unit 120. A unit lower plate 131 disposed below the unit upper plate 130 and coupled with the first and second rotation shafts 121a and 122a to reinforce the main body transfer unit 120 together with the unit upper plate 130. do.

First of all, the track rail 101 will be described before sequentially describing the respective configurations. The track rail 101 forms a path through which the main unit transfer unit 120 to which the loading unit 110 is coupled is transferred. do. It's easy to understand from a typical train rail.

In this embodiment, since the track rail 101 is provided in a closed loop shape, the main body transfer unit 120 moves the cassette while rotating in the counterclockwise direction of FIG. 2 along the track rail 101. However, unlike the drawing, the track rail 101 may be a straight straight rail. In this case, the main conveying unit 120 may transfer the cassette while reciprocating on the straight straight rail.

The track rail 101 is manufactured by appropriately combining and arranging stainless steel having strong strength and corrosion resistance among the conductors, non-conductive aluminum (AL), and some other metal materials. That is, since the track rail 101 must interact with the floating unit 140 and the pushing unit 150, which will be described later, in order to lift the body transfer unit 120 or propel (drive) the body transfer unit 120. , It should have the above-described material characteristics, so that the rise and propulsion of the main body transfer unit 120 based on the electric or magnetic field is possible. The track rail 101 is supported by a plurality of rail support feet 103.

Next, the loading unit 110 is a portion on which the object to be conveyed is loaded, as shown in FIGS. 3 to 5. In this embodiment, the object to be conveyed means a cassette on which a liquid crystal display (LCD) substrate is loaded, but the present invention is not limited thereto. In other words, the object to be transported includes a substrate including a liquid crystal display (LCD), a plasma display panel (PDP) and organic light emitting diodes (OLED), a wafer for semiconductors, a tray for receiving and supporting a substrate or a wafer. In addition to being a cassette or a carrier, it can be various various logistic products or electronic products including a general box.

The stacking unit 110 on which the cassette as the object to be transported is stacked includes an exterior cover 112 having a stacking portion 111 on which the cassette is stacked in a central region and partially covering and covering the main body transfer unit 120, and an exterior. It is provided with a guard net cover 113 coupled to the lower region of the cover 112 to partially protect the lower structure of the body transfer unit 120.

The outer cover 112 is connected to the fixed cover portion 112a, the fixed cover portion 112a and the hinge 112b, and is movable cover portion 112c pivotally opened and closed with respect to the fixed cover portion 112a by the hinge 112b. ). Therefore, if necessary, after the movable cover portion 112c is pivotally opened with respect to the fixed cover portion 112a with the hinge 112b as the axis, the parts therein can be repaired and replaced. The monitor 114 is coupled to the outside of the exterior cover 112, and a slot 115 is formed at a portion of the exterior cover 112.

In the present embodiment, the exterior cover 112 has a form that rises upward from both sides with the middle loading portion 111 therebetween. This is one way to prevent the cassette from falling from the stacking portion 111 during the transfer of the cassettes stacked on the stacking portion 111. Therefore, the shape of the stacking unit 110 having the stacking portion 111 and the outer cover 112 need not be limited to the drawings. For example, the loading unit 110 may be a simple block structure in some cases, and in this case, the cassette may be placed on top of the loading unit 110 of the block structure.

Referring to FIG. 5, the stacking unit 111 includes a stacking unit upper plate 111a and a stacking unit lower plate 111b spaced apart from each other along the up and down direction and arranged side by side. The loading part upper plate 111a and the loading part lower plate 111b have a form connected by the plate connection part 111c.

Guard net cover 113 extends to the side of the track rail 101 as shown in Figure 3 serves to partially protect the lower structure disposed therein. The structure of the area of the protective net cover 113 may vary, and in particular, since the non-contact power supply unit 160 is provided, the protective net cover 113 serves to protect the non-contact power supply unit 160. The protection net cover 113 has a structure in which a lower end thereof is bent toward the track rail 101, and a plurality of through holes 113a are formed in the plate surface thereof. Of course, the protection net cover 113 is optional and is not necessarily a component to be provided.

Next, the main body conveying unit 120 is a configuration in which the above-described loading unit 110 is coupled and is substantially lifted by a predetermined height H (see FIGS. 11 and 12) on the track rail 101 and then the track rail ( 101 is a configuration that is driven along the line (run). Many parts or components to be described below are coupled to this body transfer unit 120. Therefore, the body transfer unit 120 should be excellent in structural strength, which can be solved by its structural features.

4 to 10, the main body transfer unit 120 described above briefly is coupled to the first and second unit transfer units 121 and 122 and the first and second unit transfer units 121 and 122, respectively. The first and second rotational shafts 121a and 122a and the first and second rotational units 121 and 122, which form the rotation centers of the first and second unit transfer units 121 and 122, respectively, and the first and second unit transfer units 121 and 122 may be rotated relative to each other. It is provided with a connecting portion 123 for connecting the two unit transfer unit (121, 122).

Referring to FIG. 2, the main body transfer unit 120 must travel a curved section in addition to the straight section of the track rail 101. If the main body transfer unit 120 travels only a straight section of the track rail 101, the main body transfer unit 120 does not need to be provided as the first and second unit transfer units 121 and 122.

However, although the main body transport unit 120 must travel the curved section of the track rail 101, if the main body transport unit 120 is implemented as a single body, there may be some restrictions in the travel of the curved section. To this end, that is, the main body transfer unit 120 is provided with the first and second unit transfer units 121 and 122 for smooth running of the curved section.

In this case, since the first and second unit transfer units 121 and 122 are not to be separated, the first and second unit transfer units 121 and 122 are connected by the connection part 123. On the other hand, since the radius of curvature of the track rail 101 in the transfer system of the present embodiment can be relatively very small, unlike the magnetic levitation train as shown in Figure 2, the cassette is mounted along the path of the track rail 101 The main body conveying unit 120 is provided with the first and second unit conveying units 121 and 122 so that the conveying main body conveying unit 120 smoothly conveys the curved section besides the straight section of the track rail 101. And the second unit transfer units 121 and 122 are connected by the connection part 123.

In this embodiment, the connecting portion 123 is provided with first and second connecting gears 123a and 123b having abutting surfaces in gear teeth.

The first and second connection gears 123a and 123b are fixed to upper portions of the first and second unit transfer units 121 and 122 without gear teeth, respectively, and are provided such that the surfaces with gear teeth contact each other. . In this case, the surface with the gear tooth forms an arc shape for smooth relative rotation of the first and second unit transfer units 121 and 122.

Of course, the structure of the connecting portion 123 is only one embodiment, and the scope of the present invention is not necessarily limited thereto. That is, apart from the illustrated gear type, the connection part 123 may be a pin or link type.

Meanwhile, the first and second unit transfer units 121 and 122 are rotated relative to each other by the gear type first and second connection gears 123a and 123b, and then the linear section is again driven after driving the curved section of the track rail 101. When driving, the relatively rotated first and second unit transfer units 121 and 122 should be returned to their original states. To this end, the main body transfer unit 120 is provided with an elastic member 124.

In other words, the elastic member 124 is the first and second when the first and second unit transfer units 121 and 122 are rotated relative to the curved section by the first and second connection gears 123a and 123b. The unit conveying unit (121, 122) serves to impart an elastic force to return to the original state, in the present embodiment, the elastic member 124 is a tension coil spring (both ends thereof are fixed to the first and second unit conveying unit (121, 122) ( 124). 10A and 10B, the tension coil spring 124 is provided only on one side of the upper surfaces of the first and second unit transfer units 121 and 122 with respect to the first and second connection gears 123a and 123b. It is becoming. This is because the travel path of the main body transfer unit 120 is limited to the counterclockwise direction of FIG. 2.

Therefore, if the traveling path of the main body transfer unit 120 is also formed in the clockwise direction in addition to the counterclockwise direction, the tension coil spring 124, as shown in Figure 14 showing another embodiment of the first and second connecting gear 123a, It should be provided symmetrically on both top surfaces of the first and second unit transfer units 121 and 122 with respect to 123b).

The pair of first and second unit transfer units 121 and 122 forming the body transfer unit 120 are all provided in the same structure. That is, both of the first and second unit transfer units 121 and 122 may have a unit upper plate portion 120a to which the connecting portion 123 is coupled, and a unit upper plate portion 120 in a direction crossing the unit upper plate portion 120a from the side of the unit upper plate portion 120a. A unit side plate portion 120b coupled to the unit side plate portion 120b, and a unit lower plate portion 120c coupled to the unit side plate portion 120b in a direction parallel to the unit upper plate portion 120a at an end of the unit side plate portion 120b, These 120a, 120b, 120c are all welded.

Since the pair of first and second unit transfer units 121 and 122 both form an approximately rectangular box structure, the structural strength is very excellent. Therefore, the main body transfer unit 120 can be used for a long time without any deformation.

On the other hand, as described above, in the present embodiment, the main body transfer unit 120 is the unit top plate 130 and the unit bottom plate so that the main body transfer unit 120 can maintain a stable structure for a long time by having an efficient rigid structure 131 is provided.

The unit top plate 130 is disposed in the horizontal direction in the upper region of the main body transfer unit 120 and is coupled to the first and second rotation shafts 121a and 122a. To this end, a shaft coupling hole 130c is formed on the plate surface of the unit top plate 130 to be coupled while partially passing the first and second rotation shafts 121a and 122a, as shown in FIG. 4. A plurality of shaft coupling holes 130c are provided to correspond to the distance between the first and second rotation shafts 121a and 122a.

The unit top plate 130 is provided in a size similar to or slightly larger than the top size of the first and second unit transfer units 121 and 122. In this case, the unit top plate 130 may be in the form of covering the top surfaces of the first and second unit transfer units 121 and 122 at once as a single plate body, or the first and second unit transfer units 121 and 122 as a single plate body. It may also be a divided plate corresponding to each.

The unit lower plate 131 is a place where the pushing unit 150 is installed, and is connected to the first and second rotary shafts 121a and 122a together with the unit upper plate 130 at the lower portion of the unit upper plate 130. . The unit lower plate 131 may be a single common unit lower plate, or may be an individual unit lower plate separately coupled to the first and second unit transfer units 121 and 122, respectively.

As the unit upper plate 130 and the unit lower plate 131 are coupled to the first and second rotation shafts 121a and 122a in the upper and lower regions, the unit upper plate 130 and the unit lower plate 131 may be formed. By the structure, the main body transfer unit 120 may have an efficient rigid structure, thereby maintaining a stable structure for a long time. In particular, as in this embodiment, even if the main body transfer unit 120 is made of a relatively rotatable first and second unit transfer unit (121,122) by the above structure the main body transfer unit 120 can have an efficient rigid structure As a result, a stable structure can be maintained for a long time.

The pair of vertical reinforcing bars 132 connected to the unit top plate 130 and disposed in the vertical direction are connected to the unit top plate 130. The pick-up unit 162 is coupled to one end of the pair of vertical reinforcement bars 132 as a configuration of the contactless power supply 60.

Next, the floating unit 140 is connected to the main conveying unit 120 and serves to lift the main conveying unit 120 by the predetermined height H (see FIGS. 11 and 12) with respect to the track rail 101. do.

In this embodiment, the floating unit 140 receives power from the non-contact power supply unit 160 and interacts with the track rail 101 to move the body transfer unit 120 to a predetermined height (see H, 11 and 12). It may be provided with a plurality of electromagnet blocks 140 to float as much. In this case, the floating unit 140 as the electromagnet block 140 may be disposed in the unit lower plate portion 120c of the main body transfer unit 120 as shown in FIGS. 7 and 12.

When the main body transfer unit 120 is lifted by the floating unit 140, it may hit the track rail 101 again if it deviates from the predetermined height H (see FIGS. 11 and 12), and unnecessary power consumption It is expected.

Therefore, adjusting the height of injury H of the main body transfer unit 120 by the floating unit 140 may be an important factor, and thus, the floating of the main body transfer unit 120 with respect to the track rail 101 may be wound on the floating unit 140. A gap sensor 141 for detecting a gap along the height H is further provided. The range of the preferred gap by the gap sensor 141 may be the floating height H of the body transfer unit 120.

On the other hand, the manner in which the main body transfer unit 120 is lifted by the interaction between the track rail 101 and the floating unit 140 can be largely divided into a repulsion type using the repulsive force and a suction type using the attraction force.

The repulsion type gives rise to the track rail 101 and the floating unit 140 with different polarities, such as the N pole and the N pole, or the S pole and the S pole, so as to be connected to the main conveying unit 120 with respect to the track rail 101. The unit 140 is to be floated, and the suction type is a method of floating the main body transfer unit 120 as a structure opposite to the repulsive type, but any method may be applied, but in the present embodiment, the former is adopted. .

Next, the propulsion unit 150 is connected to the main body transfer unit 120 and the portion providing a driving force so that the main body transfer unit 120 injured by the floating unit 140 is transported along the path of the track rail 101. to be.

As described above, in the state where the main body transfer unit 120 is injured due to the interaction between the track rail 101 and the floating unit 140, that is, the N pole and the N pole, the front of the main body transfer unit 120 When the magnetism of the track rail 101 is changed to the S pole, the injured body transfer unit 120 is transferred along the track rail 101. In order to apply this method, an electromagnet must be applied to the entire track rail 101, and a substantially complicated and precise control is required to instantly change the polarity of the electromagnet.

Therefore, in this embodiment, instead of such a complicated control device or structure, the propulsion unit 150 is applied as the magnetic linear motor 150 that linearly drives with electromagnetic force by interaction with the track rail 101.

When the propulsion unit 150 is provided by the magnetic linear motor 150 as described above, the magnetic linear motor 150 is operated by the power supplied from the non-contact power supply unit 160, so that the electric field is separated from the track rail 101. Alternatively, since a magnetic field is generated and a propulsion force is generated based on the correlation with the electric field or the magnetic field, the main body transfer unit 120 can be driven on the track rail 101 without a complicated structure.

The propulsion unit 150 may be an independent single propulsion unit 150 disposed in common to both the first and second unit transfer units 121 and 122, but the propulsion unit 150 in the present embodiment may include the first and second propulsion units 150. It is provided with a first independent propulsion unit 151 and a second independent propulsion unit 152 individually coupled to the second unit transfer units 121 and 122, respectively. As such, when the first independent propulsion unit 151 and the second independent propulsion unit 152 are applied, not only the driving of the curved section on the track rail 101 but also the branch of the track rail 101 of the main conveying unit 120 are performed. There is an advantage that can be made possible (see FIGS. 10A and 10B). A partition plate 155 is provided between the first independent propulsion unit 151 and the second independent propulsion unit 152 to separate them.

On the other hand, a plurality of wheels (120a ~ 120c, wheel) is further provided in the main body transfer unit 120 adjacent to the floating unit 140.

As illustrated in FIGS. 11 and 12, the plurality of wheels 120a to 120c include a plurality of vertical wheels 120a and 120b respectively disposed on the upper and lower portions of the track rail 101 with the track rail 101 interposed therebetween. ) And a horizontal wheel 120c disposed in a direction crossing the vertical wheels 120a and 120b and disposed on the side of the track rail 101. The vertical wheels 120a and 120b and the horizontal wheel 120c may both be provided as non-powered free rotating wheels.

The horizontal wheel 120c serves to hold the left and right shakes of the main body transfer unit 120 when the main body transfer unit 120 travels along the track rail 101. In particular, when the main body transfer unit 120 travels on the curved section of the track rail 101, one of the horizontal wheels 120c is rotated in contact with the side of the track rail 101.

In contrast, the vertical wheels 120a and 120b are not in contact with the track rail 101 when the main body conveying unit 120 is floating and running. However, when the floating state of the main body transfer unit 120 is released, such as a cause of an abnormality or a stop at a predetermined point, it comes into contact with the track rail 101.

On the other hand, as described above, by the interaction between the track rail 101 and the floating unit 140, the main body transfer unit 120 is lifted by a predetermined height (see H, 11 and 12), and then the track rail Propulsion is provided by the interaction between the 101 and the propulsion unit 150 such that vibration or noise, in particular excessive vibration, is transmitted to the loading unit 110 when the body transfer unit 120 is transported along the track rail 101. It is difficult.

Vibration may be generated by structural features of the mechanical structure, but may be generated by the high frequency generated when the floating unit 140 and the pushing unit 150 are operated. If the vibration is not damped, i.e., not damped, the vibration can be transmitted as it is to the cassette through the loading unit 110, thereby damaging the LCD substrate in the cassette. In this embodiment, in order to solve this problem, a damping unit 170 is provided to damp vibration or noise transmitted to the loading unit 110.

The damping unit 170 of the present embodiment includes a first damping pad 171 provided on the floating unit 140 side, and a second damping pad 172 provided on the pushing unit 150 side. As described above, it is advantageous to install the first damping pad 171 and the second damping pad 172 in these areas because the vibrations can be severely generated on the floating unit 140 and the pushing unit 150 side.

Specifically, the first damping pad 171 is disposed between the floating unit 140 and the unit lower plate portion 120c of the main body transfer unit 120 to damp the floating unit 140 with respect to the main body transfer unit 120. It plays a role.

The second damping pad 172 is disposed between the propulsion unit 150 and the unit lower plate 131 of the main body transfer unit 120 to damp the pushing unit 150 with respect to the main body transfer unit 120. do. Both the first damping pad 171 and the second damping pad 172 may be any one of rubber, silicon, and urethane pads having a predetermined thickness or more, which are designed in consideration of the degree of vibration.

As described above, the position and role of the first damping pad 171 and the second damping pad 172 may be important. In the present embodiment, the first damping pad 171 and the second damping pad 172 may be important. In addition to this, additional damping means are further provided. One of them is an air spring 173 and the other is a damping showbar 175.

The air spring 173 is disposed between the loading unit 110 and the main body transfer unit 120 to damp up and down vibrations. The air spring 173 may be partially accommodated in the through hole 130a formed in the unit top plate 130.

The air spring 173 applied in the present embodiment is a highly efficient air spring 173 in which viscous damping of rubber and air is synthesized, and natural damping efficiency is, for example, 2.8 to 5.5 Hz. Dustproof efficiency can be provided. Of course, the numerical scope of the present invention does not need to be limited. The air spring 173 can be used for a long time, especially with only one air injection, and even if the air is completely discharged, the inner supporter (not shown), that is, the internal structure can support the load on the loading unit 110 side. Is sufficient to provide the desired damping effect.

The damping showbar 175 is connected to the vertical reinforcing bar 132, one end of which is connected to the main body transfer unit 120, that is, the main body transfer unit 120, as shown in FIG. Is connected to the unit 110 side to damp the vibration transmitted to the loading unit (110). In this case, a bracket 176 is connected to the other end of the damping showbar 175, and the bracket 176 passes through the bracket hole 130b formed in the unit upper plate plate 130 to lower the loading part of the loading part 111. Is directly connected to 111b. In the present embodiment, two damping showbars 175 are provided on the side of the main body transfer unit 120, but two damping showbars 175 are inclined to each other in the form of an English letter V.

On the other hand, in the present embodiment, the power supplied to the floating unit 140 and the pushing unit 150 is performed by the non-contact power supply unit 160 of the non-contact type. Of course, the scope of the present invention does not need to be limited thereto, but when the power is supplied to the floating unit 140 and the propulsion unit 150 by the non-contact power supply unit 160, there is an advantage that the power can be stably and safely supplied. have.

As shown in FIGS. 11 to 13, the non-contact power supply unit 160 is provided with an induction rail 161 extending along the track rail 101 and the induction rail 161 without being in contact with the induction rail 161. The pick-up unit 162 connected to the main body transfer unit 120 so as to be disposed adjacent to the main body transfer unit 120 to supply power to the floating unit 140 and the propulsion unit 150 by receiving a constant current in a non-contact state according to the law of electromagnetic induction. Equipped.

Induction rail 161 is provided with a pair of rail jaw (161a) spaced apart from each other and arranged side by side. In addition, the pickup unit 162 has an English capital letter E shape corresponding to the induction rail 161, that is, the electromotive force generating fingers 162a disposed between and outside the pair of rail jaws 161a.

Thus, when a high frequency AC power is applied to the induction rail 161, electromotive force may be generated by the law of electromagnetic induction to the pickup unit 162 adjacent to the induction rail 161, and the electromotive force may be generated from the floating unit 140 and propulsion. It can be used as a power source for the operation of the unit 150.

As an embodiment, the non-contact power supply unit 160 in the magnetic levitation transfer system of the present embodiment includes a regulator 163 (REGULATOR) to receive a voltage (electromotive force) from the pickup unit 162, as shown in FIG. A power supply 164 connected to the regulator 163 and having a distribution circuit 165 for distributing voltage to the floating unit 140 and the propulsion unit 150 may be further provided.

With this structure, for example, when the regulator 163, which receives the voltage (electromotive force) from the pickup unit 162 adjacent to the induction rail 161, applies a voltage of DC 300V to the power supply 164, the power supply ( The distribution circuit 165 of 164 may distribute this voltage to, for example, DC 12V, DC 24V, DC 48V, and the like to provide the floating unit 140 and the propulsion unit 150 to perform their respective functions. have. If the distribution circuit 165 is integrally provided in the power supply 164 and the voltage from the regulator 163 is implemented as shown in FIG. 13 so that the power supply 164 is applied, the implementation is not only simple but also maintained. It is easy to repair, relatively easy to control, and in particular, there is an advantage in that it is possible to stably and safely supply power by a non-contact method.

On the other hand, the magnetic levitation conveying system of this embodiment is provided with an emergency braking unit 180, as shown in Figs. Emergency braking unit 180 serves to limit the movement of the main body transfer unit 120 when the power supply to the main body transfer unit 120 is cut off.

In this regard, the emergency braking unit 180 is connected to the upper vertical wheel 126a located above the track rail 101 among the vertical wheels 126a and 126b to force rotation of the upper vertical wheel 126a. By stopping, the movement of the main body transfer unit 120 is restricted. That is, when the power supply is cut off to the main body transfer unit 120 during the movement, the injured main body transfer unit 120 is lowered and the upper vertical wheel 126a contacts the upper portion of the track rail 101. The wheel 126a serves to move the body transfer unit 120 while continuously rotating at the top of the track rail 101. At this time, if the emergency braking unit 180 forcibly restricts the movement of the upper vertical wheel 126a, the upper vertical wheel 126a can be stopped by sliding only a certain distance from the upper portion of the track rail 101, Accordingly, the movement of the main body transfer unit 120 can also be stopped at that position.

The emergency braking unit 180 may be provided on all four upper vertical wheels 126a, but in this embodiment, the four upper vertical wheels 126a are connected to two front wheels or two rear wheels. In addition, the emergency braking unit 180 may be applied as an electronic emergency braking unit (not shown). However, in the present embodiment, the emergency braking unit 180 may be applied as a mechanical emergency braking unit 180 having a clutch or a brake pad, not shown, to implement a reliable operation. Doing.

The operation of the magnetic levitation transfer system having such a configuration will be briefly described as follows.

Each of the above-described units are assembled and placed on the track rail 101, and the cassette is loaded on the stacking unit 111 of the stack unit 110 at one point of the track rail 101. Then, when a high frequency AC power is applied to the induction rail 161, electromotive force is generated by the electromagnetic induction law to the pickup unit 162 adjacent to the induction rail 161, and the electromotive force is generated by the floating unit 140 and the propulsion unit. It is provided as a power source for the operation of 150. Thus, power can be supplied stably and safely.

When the floating unit 140 and the pushing unit 150 are operated, first, the main conveyance unit 120 has a predetermined height H, FIGS. 11 and 12 by the interaction between the track rail 101 and the floating unit 140. And the propulsion force is then provided by the interaction between the track rail 101 and the propulsion unit 150 so that the body conveying unit 120 is transported along the track rail 101 to transfer the cassette to a desired point. Let's do it. At this time, the vibration generated by the operation of the mechanical or floating unit 140 and the pushing unit 150 during the movement of the main body transfer unit 120 is damped by the damping unit 170.

When the main body conveying unit 120 reaches the desired point of the track rail 101, the high frequency AC power applied to the induction rail 161 is cut off, and the injured main body conveying unit 120 is lowered to the track rail 101. In this state, the cassette is moved and a new transport operation is performed again.

As such, when the transfer operation of the cassette is performed by the repeated operation of the main body transfer unit 120, the rigidity problem of the main body transfer unit 120 may be caused, but the main body transfer unit 120 of the present embodiment may be configured as described above. Since the unit upper plate 130 and the unit lower plate 131 have an efficient rigid structure to which the unit is connected, it is possible to maintain a stable structure for a long time.

As described above, according to the present embodiment, by applying the magnetic levitation technology, which is one of the non-contact methods, to transfer the cassette as the object to be conveyed, it is possible to solve the problem of particle generation, It is possible to solve the damage problem and the noise causing problem, and to transfer the cassette at high speed, but in particular, the main body transfer unit 120 can maintain a stable structure for a long time by having an efficient rigid structure.

15 is a partially exploded perspective view of a magnetic levitation transfer system according to another embodiment of the present invention.

As shown in this figure, a damping spring 173a may be used instead of the above-described air spring 173 (see FIG. 4), and the damping spring 173a thus installed also includes a loading unit 110 and a main body transfer unit 120. It is disposed between) serves to damp up and down vibration.

If there is enough space, the damping spring 173a may be provided at any position as long as it is between the loading unit 110 and the main body conveying unit 120. In this embodiment, the damping spring 173a is attached to the unit top plate 130. I am preparing. That is, the through hole 130a is formed in the unit upper plate 130, and the damping spring 173a is partially accommodated in the through hole 130a.

The rod plate 173b is connected to the damping spring 173a. The bar plate 173b is disposed on the lower surface of the loading unit 110 to support the loading unit 110. In the present embodiment, four damping springs 173a are provided, and the damping springs 173a are disposed to be inclined with respect to each other in the corner region of the unit upper plate 130. Therefore, the vibration transmitted to the loading unit 110 may be more stably damped. Of course, the arrangement direction is not necessarily the same as the drawing.

As described above, the present invention is not limited to the described embodiments, and various modifications and changes can be made without departing from the spirit and scope of the present invention, which will be apparent to those skilled in the art. Therefore, such modifications or variations will have to be belong to the claims of the present invention.

1 is a perspective view of a magnetic levitation transfer system according to an embodiment of the present invention.

2 is a plan view of Fig.

3 is an enlarged view of region A of FIG. 1.

4 is a partially exploded perspective view except for the track rail in FIG. 3.

5 is a partially cutaway perspective view of the assembled state of FIG. 4.

6 to 8 are perspective views of the body conveying unit, respectively, shown at different angles.

9 is a partially cutaway perspective view of the body conveying unit.

10A and 10B are plan views according to operating states of the main body transfer unit, respectively.

FIG. 11 is a cross-sectional view taken along line B-B of FIG. 3.

12 is a cross-sectional view taken along the line C-C of FIG.

13 is a control block diagram of a magnetic levitation transfer system according to an embodiment of the present invention.

14 is a plan view of a main body transfer unit in the magnetic levitation transfer system according to another embodiment of the present invention.

15 is a partially exploded perspective view of a magnetic levitation transfer system according to another embodiment of the present invention.

* Explanation of symbols for the main parts of the drawings

101: track rail 110: loading unit

111: loading part 120: main body transfer unit

130: unit top plate 140: floating unit

141: gap sensor 150: propulsion unit

160: non-contact power supply unit 170: damping unit

180: emergency braking unit

Claims (12)

A main body transfer unit having a stacking unit on which a to-be-loaded object is loaded, coupled to one side, and having a pair of first and second unit transfer units spaced apart from each other; A track rail forming a path through which the main body conveying unit is conveyed; A floating unit connected to the main body conveying unit and causing the main body conveying unit to float by a predetermined height with respect to the track rail; And A propulsion unit connected to the main body conveying unit and providing a propulsion force so that the main body conveying unit injured by the floating unit is conveyed along a path of the track rail, The main body transfer unit, First and second rotation shafts coupled to the first and second unit transport units, respectively, to form rotation axis centers of the first and second unit transport units, respectively; A unit top plate coupled to the first and second rotational shafts in the upper region of the main body transfer unit to cover the upper portions of the first and second unit transfer units to reinforce the main body transfer unit; And The propulsion unit is installed, it is disposed below the unit upper plate and is coupled to the first and second rotational shaft and comprises a unit lower plate which reinforces the main body transfer unit together with the unit top plate Floating transport system. The method of claim 1, And the unit lower plate is a common unit lower plate which is commonly applied to the first and second unit transfer units. The method of claim 1, The main body transfer unit, the magnetic levitation transfer system further comprises a connecting portion for connecting the first and second unit transfer unit so that the first and second unit transfer unit can be rotated relative. The method of claim 3, The connecting portion is a magnetic levitation transfer system, characterized in that the contact surface is provided with a gear tooth first and second connection gears. The method of claim 4, wherein The main body transfer unit may include an elastic member that provides an elastic force to return the first and second unit transfer units to their original state when the first and second unit transfer units are rotated relative to each other by the first and second connection gears. Maglev conveying system, characterized in that it further comprises. The method of claim 5, The elastic member is a magnetic levitation transfer system, characterized in that the both ends of the tension coil spring is fixed to the first and second unit transfer unit. The method of claim 1, Each of the first and second unit transfer units, A unit upper plate portion to which the connection portion is coupled; A unit side plate portion coupled to the unit upper plate portion in a direction crossing the unit upper plate portion at a side of the unit upper plate portion; And And a unit lower plate portion coupled to the unit side plate portion in a direction parallel to the unit upper plate portion at an end of the unit side plate portion. The method of claim 1, The main body transfer unit further includes a vertical reinforcing bar connected to the unit top plate and disposed in a vertical direction and partially coupled to the non-contact power supply unit at an end thereof. The method of claim 1, The stacking unit, An exterior cover having a loading portion on which the object to be conveyed is formed and partially covering and covering the main body conveying unit; And And a guard net cover coupled to the lower region of the outer cover to partially protect the lower structure of the main body transfer unit. 10. The method of claim 9, The exterior cover, A fixed cover portion; And A movable cover portion hinged to the fixed cover portion and pivotally opened and closed with respect to the fixed cover portion by the hinge, The guard net cover is a lower portion is bent toward the track rail side, the plate surface is a magnetic levitation transfer system, characterized in that a plurality of through-holes are formed. 10. The method of claim 9, The loading portion, Spaced apart from each other along an up and down direction and disposed side by side with a top plate and a bottom plate; And Maglev conveying system comprising a plate connection for connecting the upper plate and the lower plate loading portion. The method of claim 1, Further comprising an emergency braking unit for mechanically limiting the movement of the main body transfer unit when the power supply is cut off, The object to be transported is a magnetic levitation transfer system, characterized in that the cassette (cassette) on which a liquid crystal display (LCD) substrate is loaded.

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