KR20100086242A - Automatic attaching apparatus of protect film and attaching method thereof - Google Patents

Abstract

PURPOSE: An apparatus for automatically attaching a protective film is provided to minimize the contamination and a scratch due to a standby time and movement. CONSTITUTION: A clean booth(10) controls the generation of particles. A first protective film attaching unit(100) installed on one side of the clean booth attaches a protective film to one side of the substrate. A second protective film attaching unit(200) is installed on the other side of the clean booth in parallel to the first protective film attaching unit and attaches a protective film to the other side of the substrate.

Description

Automatic film protection device and method {AUTOMATIC ATTACHING APPARATUS OF PROTECT FILM AND ATTACHING METHOD THEREOF}

The present invention relates to a protective film automatic attachment device and method, and to a protective film automatic attachment device and method capable of automatically and stably attaching a protective film to prevent adhesion and scratches of particles on a substrate.

Recently, with the development of various portable electronic devices such as mobile phones, PDAs, and notebook computers, there is a growing demand for flat panel display devices for light and thin applications. Such flat panel displays are being actively researched such as liquid crystal display (LCD), plasma display panel (PDP), field emission display (FED), and vacuum fluorescent display (VFD).

The liquid crystal display device is composed of a lower substrate and an upper substrate and a liquid crystal layer formed between the lower substrate and the upper substrate. The lower substrate is a driving element array substrate, and a plurality of pixels are formed on the lower substrate, and a driving element such as a thin film transistor is formed in each pixel.

The upper substrate is a color filter substrate, and a color filter layer for real color is formed. In addition, a pixel electrode and a common electrode are formed on the lower substrate and the upper substrate, respectively, and an alignment layer for aligning liquid crystal molecules of the liquid crystal layer is coated. The lower substrate and the upper substrate are bonded by a sealing material, and a liquid crystal layer is formed therebetween to drive the liquid crystal molecules by a driving element formed on the lower substrate to control the amount of light that passes through the liquid crystal layer. Will be displayed. The liquid crystal display device is formed on a transparent glass substrate, and a protective film for protecting the substrate is attached before the element is formed on the glass substrate. Before the device is made, the substrate is attached with an upper protective film and a lower protective film on the upper and lower surfaces thereof. The protective film prevents the substrate from being contaminated from foreign matters and protects the surface to prevent scratches.

The conventional apparatus for attaching a protective film to a substrate has a structure in which a protective film is attached only to one end surface (one side) of the substrate. Is present, there is no device to clean the particles (contamination) in the protective film, the failure rate is increased, the equipment to attach to one side of the substrate when the protective film is attached to both sides of the substrate, and It has the disadvantage of having two equipments attached to the other side of the board, that is, adding two times the number of workers. Also, the overall attaching process cannot be processed quickly due to the waiting time. There is a problem of dropping.

The present invention has been made to solve the problems of the prior art as described above, by simultaneously driving two turntables to simultaneously process one side (front) and the other side (back) of the substrate in one process due to the waiting time It is an object of the present invention to provide a protective film automatic attachment device and method that can minimize the occurrence of contamination and scratch, and improve the problems caused by contamination by performing the cleaning process simultaneously with the attachment process.

In order to solve the above object, an automatic protective film attachment device according to an example of the present invention includes a clean booth for controlling particle generation; A first protective film attachment unit installed at one side of the clean booth to attach a protective film to one side of the substrate; A second protective film attaching unit installed on the other side of the clean booth in parallel with the first protective film attaching unit and receiving the substrate from the first protective film attaching unit to attach the protective film to the other side of the substrate. .

The first protective film attaching unit may include: a first turntable configured to suck and fix the substrate and rotate by 90 °; A substrate loader positioned in front of the first turntable to load the substrate on the first turntable; A first substrate cleaner positioned on a left side of the first turntable to clean one side of the substrate loaded on the first turntable; And a first protective film attacher positioned at a rear of the first turntable to attach a protective film to one side of the cleaned substrate.

The first turntable may include a rotating plate rotatably installed; A loading plate disposed vertically in four directions on an upper side of the rotating plate, and having a plurality of vacuum suction holes formed thereon for adsorbing and fixing the substrate; And a rotating motor installed below the rotating plate to rotate the rotating plate.

The substrate loading device includes a moving plate installed to be movable by the driving force of the transfer unit; And a pivoting arm which is rotatably installed on an upper portion of the moving plate and has a plurality of vacuum suction holes formed thereon for adsorbing and fixing the substrate on an upper surface thereof.

The first substrate cleaner includes a guide installed vertically of the base; A feed screw installed vertically adjacent to the guide and rotated forward / backward by a servomotor; A lift plate coupled to the transfer screw to move up and down along the guide; A forward and backward plate installed in a lower portion of the elevating plate, the adhesive roller for adsorbing and removing particles from one side of the substrate; A forward and backward cylinder installed on the elevating plate to forward and backward the forward and backward plates; A transition tape roller installed at the base and transferring particles from the adhesive roller; And a transition tape rotating motor for rotating the transition tape roller.

The first protective film attacher includes a moving plate installed to be movable in the first turntable direction by a linear motor; A protective film winding roller installed on an upper surface of the moving plate; A plurality of tension rollers for maintaining the tension of the protective film; Left and right guides positioned on left and right sides of the protective film to guide movement of the protective film; Z-axis clamp for pulling the protective film in the Z-axis direction; An adhesion roller for bringing the protective film into close contact with one side of the substrate; And a cutter for cutting the protective film.

The second protective film attachment unit is located in the right direction of the first turntable, the second turntable to rotate by 90 ° after loading the substrate received from the first turntable; A second substrate cleaner positioned behind the second turntable to clean the other side of the substrate loaded on the second turntable; And a second protective film attacher for attaching a protective film to the other side of the substrate which is disposed on the right side of the second turntable and cleaned.

The second turntable may include a rotating plate rotatably installed; A loading plate installed vertically in the four directions on the top of the rotating plate and movably installed by a forward and backward cylinder, and having a plurality of vacuum adsorption holes formed to adsorb and fix the substrate; And a rotating motor installed below the rotating plate to rotate the rotating plate by 90 ° in four directions. The second turntable may be installed to be movable by a linear motor or a forward and backward cylinder.

The second substrate cleaner includes a guide installed vertically of the base; A feed screw installed vertically adjacent to the guide and rotated forward / backward by a servomotor; An elevating plate coupled to the conveying screw to elevate along the guide; A forward and backward plate installed at a lower portion of the elevating plate so as to be moved forward and backward, and having an adhesive roller for adsorbing and removing particles from the other side of the substrate; A forward and backward cylinder installed on the elevating plate to forward and backward the forward and backward plates; A transition tape roller installed at the base and transferring particles from the adhesive roller; And a transition tape rotating motor for rotating the transition tape roller.

The second protective film attacher includes a moving plate installed to be movable in the second turntable direction by a linear motor; A protective film winding roller installed on an upper surface of the moving plate; A plurality of tension rollers for maintaining the tension of the protective film; Left and right guides positioned at left and right sides of the protective film to guide the transfer of the protective film; Z-axis clamp for pulling the protective film in the Z-axis direction; An adhesion roller for closely contacting the protective film to the other side of the substrate; And a cutter for cutting the protective film.

An unloader is installed in front of the second turntable to unload the substrate on which both sides of the protective film are attached.

Automatic protective film attachment device according to another embodiment of the present invention comprises a clean booth for controlling the generation of particles; And a protective film attaching unit installed inside the clean booth and attaching a protective film to both sides of the substrate, wherein the protective film attaching unit includes a turntable for adsorbing and fixing the substrate and rotating by 90 °; A substrate loading / unloader positioned in front of the turntable to load / unload the substrate to the turntable; A substrate cleaner positioned on a left side of the turntable to clean the substrate loaded on the turntable; And a protective film attacher attached to a rear surface of the turntable to attach the protective film to the cleaned substrate.

On the other hand, the automatic protective film attachment method of the present invention comprises the steps of loading the substrate on the first turntable substrate loading substrate; Rotating the first turntable 90 degrees; A first cleaner cleaning one side of the substrate loaded on the first turntable; Rotating the first turntable 90 degrees; Attaching a protective film to one side of the substrate on which the first protective film attacher is cleaned; Rotating the first turntable 90 degrees; Moving the loading plate of the second turntable toward the first turntable by a cylinder to receive the substrate; Rotating the second turntable by 90 °; Cleaning a second side of the substrate loaded on the second turntable by a second cleaner; Rotating the second turntable by 90 °; And attaching a protective film to the other side of the substrate on which the second protective film attacher is cleaned.

In the cleaning of the one side / the other side of the substrate loaded on the first turntable / first turntable by the first cleaner / second cleaner, raising the adhesive roller of the elevating plate by rotating the feed screw forward; Driving the forward and backward cylinders to adhere the adhesive rollers to one side of the substrate; And removing particles from one side of the substrate while rotating the transfer screw to move the adhesive roller from the top to the bottom of the substrate.

In the attaching the protective film to one side / the other side of the substrate, the first protective film attacher / second protective film attacher is cleaned, Z-axis clamp pulling the protective film to a suitable position; Moving the moving plate to adhere the protective film to the substrate and attaching the protective film to the substrate by driving the contact roller; Cutting the protective film by the cutter; And repositioning the moving plate.

As described above, according to the present invention, by simultaneously driving two turntables, one side (front) and the other side (back) of the substrate are simultaneously processed in one process to minimize contamination and scratches caused by waiting time and movement. Defects can be greatly reduced.

In addition, by simultaneously performing the cleaning process in the process of attaching a protective film it is possible to further improve the stability of the substrate.

Hereinafter, with reference to the accompanying drawings, it will be described for the automatic protective film attachment method and method according to a preferred embodiment of the present invention.

1 is a block diagram showing an automatic protective film attachment device according to an embodiment of the present invention, Figure 2 is a side view showing the first turntable of Figure 1, Figure 3 is a side view showing the loading machine of Figure 1, Figure 4 5 is a side view of the first protective film applicator of FIG. 1, FIG. 6 is a perspective view of the first protective film applicator of FIG. 5, and FIG. 7 is a second turntable of FIG. 1. 8 is a side view showing the second adhesive cleaner of FIG. 1, and FIG. 9 is a side view showing the second protective film attacher of FIG. 1.

First, referring to Figure 1, the automatic protective film attachment device 1 of the present invention comprises a clean booth 10 for controlling the particle generation so that foreign matter from the outside is not introduced; A first protective film attachment unit 100 installed at one side of the clean booth 10 to attach the protective film F1 to one side (front) of the substrate G; The other side of the clean booth 10 is installed in parallel with the first protective film attaching unit 100, and the substrate G is transferred from the first protective film attaching unit 100 to the other side of the substrate G. A second protective film attachment unit 200 for attaching a protective film (F2) on the side.

The substrate G is a concept including all of an indium-tin oxide (ITO) protective film for a touch screen panel (TSP), a glass substrate, etc., in addition to a conventional substrate, and hereinafter referred to as a substrate for convenience. That is, the present invention is applicable to various objects to be protected by a protective film, and is not limited to a specific use, material, or shape.

As the protective film, various kinds of films of synthetic resins may be used, for example, polyethylene-terephthalate (PET) film and the like.

In the automatic protective film attachment device 1 of the present invention, the first protective film attaching unit 100 attaches the protective film F1 to one side (front) of the substrate, and subsequently, the second protective film attaching unit. 200 attaches the protective film F2 to the other side (back side) of the substrate.

In the automatic protective film attachment device 1 of the present invention, such a series of protective film attaching processes are performed sequentially and successively, so that a large amount of protective films can be simultaneously attached to a plurality of substrates.

Looking at the configuration of each component, first, the first protective film attachment unit 100 includes a first turntable 110 for adsorbing and fixing the substrate (G) and rotate by 90 °; A substrate loader (120) positioned in front of the first turntable (110) to load the substrate on the first turntable (110); A first substrate cleaner 130 positioned on a left side of the first turntable 110 to clean one side of the substrate loaded on the first turntable 110; And a first protective film attacher 140 attached to a rear surface of the first turntable 110 to attach the protective film F1 to one side of the cleaned substrate.

Although the positions of the substrate loader 120, the first substrate cleaner 130, and the first protective film attacher 140 are referred to as forward, leftward, and rearward with respect to the first turntable 110, this is for convenience of description. It is for. That is, the substrate loader 120, the first substrate cleaner 130, and the first protective film attacher 140 may be located in a direction other than the front, left, and rear sides of the first turntable 110, respectively. The substrate loader 120, the first substrate cleaner 130, and the first protective film attacher 140 may be positioned continuously. Description of this position is equally applicable to the second protective film attachment unit described later.

2, the first turntable 110 includes a rotation plate 111 rotatably installed; A loading plate 113 disposed vertically in four directions on the top of the rotating plate 111 and having a plurality of vacuum adsorption holes (H) formed thereon for adsorbing and fixing the substrate (G); And a rotating motor 115 installed below the rotating plate 111 to rotate the rotating plate 111 by 90 °. A vacuum motor (not shown) is connected to the vacuum suction hole H, and the substrate is sucked and fixed by the vacuum force generated by the operation thereof.

The substrate loader 120 serves to load the substrate G onto the first turntable 110. Referring to FIG. 3, the substrate loader 120 is movable to be movable. ); And a rotation arm 123 rotatably installed on an upper portion of the moving plate 121 and having a plurality of vacuum adsorption holes H formed thereon to adsorb and fix the substrate G on an upper surface thereof. The movement of the moving plate 121 may be performed by the same structure as the cylinder 125 and the guide rail 126. Of course, it is also possible by a structure such as a linear motor (not shown). In addition, a vacuum motor (not shown) is connected to the vacuum suction hole H, and the substrate is sucked and fixed by the vacuum force generated by the operation thereof.

Referring to FIG. 4, the first substrate cleaner 130 may include a guide 132 vertically installed on the base 131; A feed screw 134 vertically installed adjacent to the guide 132 and rotated forward / backward by the servomotor 133; A lifting plate 135 coupled to the transfer screw 134 to move up and down along the guide 132; A forward and backward plate 136 installed at a lower portion of the elevating plate 135 so as to be moved forward and backward, and having an adhesive roller R1 installed thereon to adsorb and remove particles from one side of the substrate G; A forward and backward cylinder 137 installed on the elevating plate 135 to forward and backward the forward and backward plates 137; A transition tape roller (R2) installed at the base (131) and transferring particles from the adhesive roller (R1); And a transition tape rotating motor 138 rotating the transition tape roller R2.

5 and 6, the first protective film attacher 140 includes a moving plate 141 installed to be movable in the direction of the first turntable 110 by a linear motor LM; A protective film winding roller 142 installed on an upper surface of the moving plate 141; A plurality of tension rollers 143 for maintaining the tension of the protective film F1; Left and right guides 144 positioned on the left and right sides of the protective film F1 to guide the movement of the protective film F1; A Z-axis clamp 145 for pulling the protective film F1 in the Z-axis direction; An adhesion roller 148 for closely contacting the protective film F1 to one side of the substrate G; And a cutter 146 for cutting the protective film (F1). The z-axis clamp 145 and the contact roller 148 is made to be raised and lowered in the z-axis direction.

Looking at the operation in the first protective film attachment unit 100 configured as described above are as follows. First, the substrate is adsorbed and fixed by the vacuum adsorption hole H of the substrate loader 120, and the moving plate 121 moves forward in the direction of the first turntable 110 while the rotation arm 123 is rotated and positioned vertically. The substrate G is loaded onto the loading plate 113 of the first turntable 110. Alternatively, the substrate G is loaded onto the loading plate 113 of the first turntable 110 while the moving plate 121 is advanced in the direction of the first turntable 110 and the pivoting arm 123 is rotated and positioned vertically. Done. When the loading process of the substrate G is further described, the substrate is brought into contact with the loading plate 113 of the first turntable 110 in a state of being fixed to the vacuum adsorption hole H of the substrate loader 120. do. In this contacted state, the vacuum applied to the vacuum suction hole H of the substrate loader 120 is released, and at the same time, the vacuum is applied to the loading plate 113 of the first turntable 110, so that the substrate G is now removed. 1 is to be loaded on the loading plate 113 of the turntable 110.

Next, the first turntable 110 is rotated by 90 ° while the substrate G is sucked and fixed by the rotation motor 115.

Next, the feed screw 134 is rotated forward by the servomotor 133 of the substrate cleaner 130. At this time, the lifting plate 135 is raised while being guided by the guide 132.

Then, the forward and backward plate 136 is advanced to an appropriate position by driving the forward and backward cylinder 137, and the adhesive roller R1 contacts one side surface of the substrate G. In this state, when the feed screw 134 is reversely rotated by the servomotor 133, the lifting plate 135 is lowered while being guided by the guide 132, and the adhesive roller R1 is formed on the substrate G. On one side the particles are tacked off.

 The transfer tape roller R2 serves to transfer particles from the adhesive roller R1, and the transfer tape roller R2 is connected to the transfer tape rotary motor 138 through the belt B.

Next, the first turntable 110 is rotated by 90 ° while the substrate G is sucked and fixed by the rotation motor 115.

Next, when the Z-axis clamp 145 of the first protective film attaching machine 140 pulls the protective film F1 in the Z-axis direction, the linear motor LM moves toward the first turntable 110 by the linear motor LM. The moving plate 141 moves. As the adhesion roller 148 moves in the z-axis direction while the protective film F1 approaches or contacts the substrate G by the movement of the moving plate 141, the protective film F1 moves to the substrate G. It is attached to the side, and then the cutter 146 cuts the protective film (F1). Here, the left and right guides 144 guide the movement of the protective film F1, and the plurality of tension rollers 143 serve to maintain the tension of the protective film F1.

When the protective film F1 is attached to one side of the substrate G as described above, the substrate G is moved to the second protective film attaching unit 200. For this, the loading of the second turntable 210 is performed. The plate 213 moves closer to the first turntable 110 to load the substrate G of the first turntable 110 to which the protective film F1 is attached.

Referring to Figure 1, looks at the configuration of the second protective film attachment unit 200.

Since the components of the second protective film attaching unit 200 are the same as the components of the first protective film attaching unit 100 described above only in their positions, the configuration thereof will be briefly described below. The operation is omitted.

The second protective film attaching unit 200 is positioned side by side with the first turntable 110 and moves closer to the first turntable 110 so that the second turntable 110 of the first turntable 110 has the protective film F1 attached thereto. A second turntable 210 which rotates by 90 ° after loading the substrate G; A second substrate cleaner 230 positioned behind the second turntable 210 to clean the other side of the substrate G loaded on the second turntable 210; And a second protective film attacher 240 attached to the other side of the substrate G, which is disposed at the right side of the second turntable 210 and is cleaned.

The second turntable 210 includes a rotating plate 211 rotatably installed; The top of the rotating plate 211 is installed in each of the four directions in the vertical direction and movable by the forward and backward cylinder 213a, a plurality of vacuum adsorption holes (H) for adsorbing and fixing the substrate (G) A loading plate 213 is formed; And a rotating motor 215 installed below the rotating plate 211 to rotate the rotating plate 211. The loading plate 213 is formed to be movable by the forward and backward cylinder 213a to receive the substrate G from the first turntable 110. That is, the substrate that has undergone each process made in the first turntable 110 is positioned adjacent to the second turntable 210. At this time, the loading plate 213 of the second turntable 210 is moved toward the first turntable 110 by the forward and backward cylinder 213a to receive the substrate. That is, when the loading plate 213 of the second turntable 210 contacts or approaches the substrate located on the loading plate 113 of the first turntable 110 by the forward and backward cylinder 213a, the first turntable 110 may be used. The vacuum is released to the vacuum adsorption hole H of the loading plate 113, and at the same time, the vacuum is applied to the vacuum adsorption hole H of the loading plate 213 of the second turntable 210 to receive the substrate G. Finally, the loading plate 213 of the second turntable 210 is returned to its original position by the forward and backward cylinder 213a. Through this process, the substrate is transferred between the first turntable 110 and the second turntable 210. Here, only the loading plate of the second turntable is described as being moved by the forward and backward cylinder, but it is also possible that the loading plate of the first turntable, not the second turntable, is moved by the forward and backward cylinder, and the first turntable and the second turntable are It is also possible to move the loading plate by the forward and backward cylinder at the same time. It is also possible to configure the turntable itself to move by a configuration such as a linear motor.

Referring to FIG. 8, the second substrate cleaner 230 may include a guide 232 vertically installed on the base 231; A feed screw 234 installed vertically adjacent to the guide 232 and forward / reversely rotated by the servomotor 233; A lifting plate 235 coupled to the transfer screw 234 to move up and down along the guide 232; A forward and backward plate 236 installed at a lower portion of the elevating plate 235 so as to be moved forward and backward, and having an adhesive roller R1 installed thereon to adsorb and remove particles from the other side of the substrate G; A forward and backward cylinder 237 installed on the elevating plate 235 to forward and backward the forward and backward plates 236; A transition tape roller (R2) installed at the base (231) to transfer particles from the adhesive roller (R1); And a transition tape rotating motor 238 for rotating the transition tape roller R2.

Referring to FIG. 9, the second protective film attacher 240 may include a moving plate 241 installed to be movable in the direction of the second turntable 210 by a linear motor LM; A protective film winding roller 242 installed on an upper surface of the moving plate 241; A plurality of tension rollers 243 for maintaining the tension of the protective film F2; Left and right guides 244 positioned on the left and right sides of the protective film F2 to guide the transfer of the protective film F2; Z-axis clamp 245 for pulling the protective film (F2) in the Z-axis direction; An adhesion roller 248 for closely contacting the protective film F2 to the other side of the substrate G; And a cutter 246 for cutting the protective film (F2). The z-axis clamp 245 and the contact roller 248 is made to be raised and lowered in the z-axis direction.

In front of the second turntable 210, an unloader 220 for unloading the substrate G having the protective films F1 and F2 attached to both surfaces thereof is installed. Here, the unloader 220 may be configured in the same structure as the above-described loader 110.

Vacuum adsorption holes (H) formed to adsorb the substrate are connected to a conventional vacuum pump (not shown), and thus, the conventional adsorption fixing method by driving the vacuum pump. The method can be easily carried out by those skilled in the art, and a detailed description thereof will be omitted.

Hereinafter, a method of attaching a protective film in an automatic protective film attachment device according to an embodiment of the present invention.

10 is a flowchart illustrating a method of automatically attaching a protective film according to an embodiment of the present invention, FIG. 11 is a flowchart illustrating a cleaning method of a first adhesive cleaner in FIG. 10, and FIG. 12 is a first protective film attaching machine in FIG. 10. 13 is a flowchart showing a method of attaching the second adhesive cleaner in FIG. 10, and FIG. 14 is a flowchart showing a method of attaching the second protective film attacher in FIG. 10.

First, referring to FIG. 10, a method of automatically attaching a protective film according to an embodiment of the present invention includes loading a substrate on a first turntable by a substrate loader (S10); Rotating the first turntable by 90 ° (S20); A step (S30) of cleaning a side of the substrate loaded on the first turntable by a first cleaner; Rotating the first turntable by 90 ° (S40); Attaching a protective film to one side of the substrate on which the first protective film attacher is cleaned (S50); Rotating the first turntable by 90 ° (S60); Receiving, by the second turntable, the substrate from the first turntable (S70); Rotating the second turntable by 90 ° (S80); A second cleaner cleaning the other side of the substrate loaded on the second turntable (S90); Rotating the second turntable by 90 ° (S100); And attaching a protective film to the other side of the substrate on which the second protective film attacher is cleaned (S110).

Referring to FIGS. 11 and 1, the steps S30 and S90 of cleaning the one side / the other side of the substrate loaded on the first turntable / second turntable by the first cleaner / second cleaner, respectively, are transferred. Rotating the screw forward and raising the adhesive roller of the elevating plate (S31) (S91); Driving the forward and backward cylinders to adhere the adhesive roller to one side of the substrate (S32) (S92); And removing particles from one side of the substrate by rotating the feed screw to move the adhesive roller from the top to the bottom of the substrate (S33).

12 and 14, the first protective film attacher / second protective film attacher attaches the protective film to one side / the other side of the substrate cleaned (S50) (S110), respectively, Z-axis. The clamp pulls the protective film to a suitable position (S51) (S111); Moving the moving plate to adhere the protective film to the substrate and driving the adhesive roller to attach the protective film to the substrate (S52) (S112); The cutter cuts the protective film (S53) (S113); And repositioning the moving plate (S54) (S114).

On the other hand, Figure 15 is a block diagram showing an automatic protective film attachment device according to another embodiment of the present invention.

Referring to FIG. 15, the automatic protective film attachment device 2 according to another embodiment of the present invention includes a clean booth 10 ′ controlling particle generation; And a protective film attaching unit 400 installed inside the clean booth 10 ′ to attach the protective films F1 and F2 to both sides of the substrate G. Automatic protective film attachment device 2 according to another embodiment of the present invention is different from the automatic protective film attachment device 1 according to an embodiment of the present invention described above is composed of one turntable, using the substrate It is to attach the protective film (F1) (F2) to both or one side of the.

The protective film attachment unit 400 is a turntable for adsorbing and fixing the substrate (G) and rotated by 90 °; A substrate loading / unloader (420) (420 ') positioned in front of the turntable (410) to load / unload the substrate (G) onto the turntable (410); A substrate cleaner 430 disposed on the left side of the turntable 410 to clean the substrate loaded on the turntable 410; And a protective film attacher 440 attached to the rear surface of the turntable 410 to attach the protective films F1 and F2 to the cleaned substrate G. FIG.

In the automatic protective film attachment device 2 according to another embodiment of the present invention configured as described above, when the loading machine 420 loads the substrate on the turntable 410 at the beginning of the attachment process, the turntable 410 is rotated by 90 °. do. The substrate cleaner 430 cleans one side of the substrate, and the turntable 410 rotates 90 ° again. The protective film attacher 440 attaches the protective film F1 to one side (front) of the substrate. The unloader 420 ′ unloads the substrate G having the protective film F1 attached to one side thereof.

The loader 420 then loads the substrate on the turntable 410. At this time, the substrate is in a state where the protective film (F1) is attached to one side. The turntable 410 rotates 90 °. The substrate cleaner 420 cleans one side of the substrate, and the turntable 410 rotates 90 ° again. The protective film attacher 440 attaches the protective film F2 to the other side (back side) of the substrate. The unloader 420 ′ unloads the substrate on which the protective film F2 is attached to the other side.

Here, the loader 420 and the unloader 420 ′ may be configured separately or may be integrally formed.

Although the present invention has been described with reference to the preferred embodiments and the accompanying drawings, different embodiments may be constructed within the spirit and scope of the invention. Accordingly, the scope of the invention is defined by the appended claims, and should be construed as not limited by the specific embodiments described herein.

1 is a block diagram showing an automatic protective film attachment device according to an embodiment of the present invention.

FIG. 2 is a side view illustrating the first turntable of FIG. 1.

3 is a side view showing the loader of FIG.

4 is a side view illustrating the first adhesive cleaner of FIG. 1.

FIG. 5 is a side view illustrating the first protective film attacher of FIG. 1.

FIG. 6 is a perspective view illustrating the first protective film attacher of FIG. 5.

FIG. 7 is a side view illustrating the second turntable of FIG. 1.

8 is a side view illustrating the second adhesive cleaner of FIG. 1.

9 is a side view illustrating the second protective film attacher of FIG. 1.

10 is a flowchart illustrating a method of automatically attaching a protective film according to an embodiment of the present invention.

FIG. 11 is a flowchart illustrating a cleaning method of the first adhesive cleaner in FIG. 10.

12 is a flowchart illustrating a method of attaching a first protective film attaching machine in FIG. 10.

FIG. 13 is a flowchart illustrating a cleaning method of a second pressure-sensitive adhesive cleaner in FIG. 10.

FIG. 14 is a flowchart illustrating a method of attaching a second protective film attaching machine in FIG. 10.

15 is a configuration diagram showing a protective film automatic attachment device according to another embodiment of the present invention.

* Drawing reference for the main part

10,10 ': Clean booth

G: Substrate

F1, F2: Protective Film

100,200: 1st / 2nd protective film attachment unit

110,210: first / second turntable

120: substrate loading machine

130,230: first / second substrate cleaner

140,240: first and second protective film attaching machine

111,211: rotating plate

113,213: Loading Plate

115,215: rotary motor

120,220: substrate loading machine

121,221: Moving plate

123,223: pivot arm

130,230: first / second substrate cleaner

131,231: bass

132,232: guide

133,233: servomotor

134,234: feed screw

135,235 lifting plate

136,236: forward and backward plates

137,237: forward and backward cylinder

R2: transition tape roller

138,238: Transition Tape Rotary Motor

140,240: first and second protective film attaching machine

141,241: moving plate

142,242: protective film winding roller

143: tension roller

144,244: left and right guides

145,245 Z-axis clamp

146,246: cutter

148,248: Crimp Roller Unit

Claims (15)

A clean booth 10 for controlling particle generation; A first protective film attachment unit 100 installed at one side of the clean booth 10 to attach the protective film F1 to one side of the substrate G; The other side of the clean booth 10 is installed in parallel with the first protective film attaching unit 100, and the substrate G is transferred from the first protective film attaching unit 100 to the other side of the substrate G. Automatic protective film attachment device comprising a; second protective film attachment unit 200 for attaching a protective film (F2) on the side. The method of claim 1, The first protective film attachment unit 100 is A first turntable 110 which sucks and fixes the substrate G and rotates by 90 °; A substrate loader (120) positioned in front of the first turntable (110) to load the substrate (G) on the first turntable (110); A first substrate cleaner 130 disposed on the left side of the first turntable 110 to clean one side of the substrate G loaded on the first turntable 110; And And a first protective film attacher (140) attached to one side of the cleaned substrate (G) located at the rear of the first turntable (110) to attach the protective film (F1). The method of claim 2, The first turntable 110 is Rotating plate 111 is rotatably installed; A loading plate 113 disposed vertically in four directions on the top of the rotating plate 111 and having a plurality of vacuum adsorption holes (H) formed thereon for adsorbing and fixing the substrate (G); And Automatic protective film attachment device characterized in that it comprises a rotary motor 115 is installed below the rotating plate 111 to rotate the rotating plate 111. The method of claim 2, The substrate loader 120 is A moving plate 121 installed to be movable by the cylinder 125 on the guide rail 126; And It is rotatably installed on the upper portion of the moving plate 121, characterized in that it comprises a rotation arm 123 is formed with a plurality of vacuum suction holes (H) for adsorbing and fixing the substrate (G) on the upper surface. Protective film automatic attachment device. The method of claim 2, The first substrate cleaner 130 Base 131; A guide 132 installed perpendicular to the base 131; A feed screw 134 vertically installed adjacent to the guide 132 and rotated forward / backward by the servomotor 133; A lift plate 135 coupled to the transfer screw 134 to move up and down along the guide 132; A forward and backward plate 136 installed at a lower portion of the elevating plate 135 so as to be moved forward and backward, and having an adhesive roller R1 installed thereon to adsorb and remove particles from one side of the substrate G; A forward and backward cylinder 137 installed on the elevating plate 135 to forward and backward the forward and backward plates 136; A transition tape roller (R2) installed at the base (131) and transferring particles from the adhesive roller (R1); And Automatic transfer film protection device comprising a; a transition tape rotation motor (138) for rotating the transition tape roller (R2). The method of claim 2, The first protective film attacher 140 is A moving plate 141 installed to be movable in the direction of the first turntable 110 by a linear motor LM; A protective film winding roller 142 installed on an upper surface of the moving plate 141; A plurality of tension rollers 143 for maintaining the tension of the protective film F1; Left and right guides 144 positioned on the left and right sides of the protective film F1 to guide the movement of the protective film F1; A Z-axis clamp 145 for pulling the protective film F1 in the Z-axis direction; An adhesion roller 148 for closely contacting the protective film F1 to one side of the substrate G; And Automatic protective film attachment device comprising a; cutter (146) for cutting the protective film (F1). The method of claim 1, The second protective film attachment unit 200 is A second turntable positioned to be parallel to the first turntable 110 and receiving a substrate to which the protective film F1 is attached from the first turntable 110, and then rotating by 90 ° after loading the substrate G. 210; A second substrate cleaner 230 positioned behind the second turntable 210 to clean the other side of the substrate G loaded on the second turntable 210; And And a second protective film attacher 240 attached to the other side of the substrate G, which is disposed at the right side of the second turntable 210 and is cleaned. Automatic film attachment device. The method of claim 7, wherein The second turntable 210 is A rotating plate 211 rotatably installed; Vertically installed in the four directions in the upper direction of the rotating plate 211, is installed so as to be movable by the forward and backward cylinder 213a, a plurality of vacuum suction holes (H) for adsorbing and fixing the substrate (G) A loading plate 213 is formed; And Automatic attachment of the protective film, characterized in that it comprises a rotary motor 215 is installed below the rotating plate 211 to rotate the rotating plate (211). The method of claim 7, wherein The second substrate cleaner 230 Base (231) A guide 232 installed perpendicular to the base 231; A feed screw 234 installed vertically adjacent to the guide 232 and forward / reversely rotated by the servomotor 233; A lift plate 235 coupled to the transfer screw 234 to move up and down along the guide 232; A forward and backward plate 236 installed at a lower portion of the elevating plate 235 so that an adhesive roller R1 is installed at a lower portion of the substrate to suck and remove particles from the other side of the substrate; A forward and backward cylinder 237 installed on the elevating plate 235 to forward and backward the forward and backward plates 236; A transition tape roller (R2) installed at the base (231) to transfer particles from the adhesive roller (R1); And Automatic transfer film protection device comprising a; a transition tape rotation motor (238) for rotating the transition tape roller (R2). The method of claim 7, wherein The second protective film attacher 240 is A moving plate 241 installed to be movable in the direction of the second turntable 210 by a linear motor LM; A protective film winding roller 242 installed on an upper surface of the moving plate 241; A plurality of tension rollers 243 for maintaining the tension of the protective film F2; Left and right guides 244 positioned on the left and right sides of the protective film F2 to guide the transfer of the protective film F2; Z-axis clamp 245 for pulling the protective film (F2) in the Z-axis direction; An adhesion roller 248 for closely contacting the protective film F2 to the other side of the substrate G; And Automatic protective film attachment device comprising a; cutter (246) for cutting the protective film (F2). The method of claim 7, wherein Automatically attaching the protective film, characterized in that the front of the second turntable 210, the unloading machine 220 for unloading the substrate G having the protective film (F1) (F2) attached to both sides is installed. A clean booth 10 'for controlling particle generation; And A protective film attachment unit 400 installed inside the clean booth 10 ′ to attach protective films F1 and F2 to both sides of the substrate G, The protective film attachment unit 400, A turntable 410 which sucks and fixes the substrate G and rotates by 90 °; A substrate loading / unloader (420) (420 ') positioned in front of the turntable (410) to load / unload the substrate (G) onto the turntable (410); A substrate cleaner 430 disposed on the left side of the turntable 410 to clean the substrate G loaded on the turntable 410; And And a protective film attacher (440) for attaching a protective film (F1) to the cleaned substrate (G) located at the rear of the turntable (410). Loading (S10) the substrate load the substrate on the first turntable; Rotating the first turntable by 90 ° (S20); A step (S30) of cleaning a side of the substrate loaded on the first turntable by a first cleaner; Rotating the first turntable by 90 ° (S40); Attaching a protective film to one side of the substrate on which the first protective film attacher is cleaned (S50); Rotating the first turntable by 90 ° (S60); Receiving, by the second turntable, the substrate from the first turntable (S70); Rotating the second turntable by 90 ° (S80); A second cleaner cleaning the other side of the substrate loaded on the second turntable (S90); Rotating the second turntable by 90 ° (S100); And And attaching a protective film to the other side of the substrate on which the second protective film attacher is cleaned (S110). The method of claim 13, The first cleaner / second cleaner cleans one side / the other side of the substrate loaded on the first turntable / second turntable (S30) (S90), respectively. Rotating the feed screw to raise the adhesive roller of the elevating plate (S31) (S91); Driving the forward and backward cylinders to adhere the adhesive roller to one side of the substrate (S32) (S92); And Rotating the transfer screw to remove particles from one side of the substrate while moving the adhesive roller from the top to the bottom of the substrate (S33) (S93); Automatic protective film attachment method characterized in that it comprises a. The method of claim 13, Attaching the protective film to one side / the other side of the substrate on which the first protective film applicator / second protective film applicator is cleaned (S50) (S110), respectively Z-axis clamp to pull the protective film to a suitable position (S51) (S111); Moving the moving plate to closely adhere the protective film to the substrate, and attaching the protective film to the substrate by an adhesive roller (S52) (S112); The cutter cuts the protective film (S53) (S113); And Automatically attaching the protective film, characterized in that comprises a; (S54) (S114) to the original position of the moving plate.

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