KR20100083974A - Medical sterilizing apparatus using cold plasma and vacuum pressure - Google Patents

Abstract

PURPOSE: A vacuum pressure medical sterilizer using low temperature plasma is provided to sterilized the inside and outside of medical devices and materials. CONSTITUTION: A vacuum pressure medical sterilizer using low temperature plasma includes: a chamber(11) which accepts medical devices and materials; a door installed at the front; a display unit formed in the front part of the body; a key operation part; and a small printer. The chamber includes: a first air filter(21) which filters impurities among the air; a first composite filter(23) which eliminates bacteria among the air; a first ozone decomposition device(25) which decomposes ozone gas among the air; a first vacuum pressure pump(26) which makes the inside of the chamber in the vacuum condition; and a second ozone decomposition device(27) which emits the ozone.

Description

TECHNICAL FIELD [0001] The present invention relates to a sterilization apparatus for sterilization of medical pneumatic medical use using a low-temperature plasma,

The present invention relates to a sterilizing apparatus for disinfecting medical equipment or medical equipment, and more particularly, to a sterilizing apparatus for disinfecting sterilization and sterilization of a medical equipment or medical equipment by applying a low-temperature plasma gas and ozone gas, Temperature plasma gas and ozone gas infiltrate into the interior of the object to be sterilized to completely sterilize the bacteria, thereby maximizing the disinfection and sterilization efficiency of the object The present invention relates to a sterilization apparatus for medical vacuum sterilization using a low-temperature plasma.

In the case of high-pressure sterilization and EO (Ethylene Oxide) gas sterilizer currently being used, it takes a long time to disinfect, such as 1 to 3 hours for high-pressure sterilization and 8 to 12 hours for EO gas disinfection. This causes not only human and time-wasting but also inefficiency in equipment operation. In addition, there has been a problem that the sterilizer for sterilization of medical equipments using hydrogen plasma is very expensive and the market can not be activated.

Also, in the conventional disinfection apparatus using plasma, disinfecting gas such as low-temperature plasma or ozone can not reach deep inside the object to be sterilized, that is, inside the pipe or pipe,

Disclosure of Invention Technical Problem [8] Accordingly, the present invention has been made keeping in mind the above problems occurring in the prior art, and it is an object of the present invention to provide a disinfection chamber, Temperature plasma gas and ozone gas penetrate into the interior of the object to be sterilized, thereby completely sterilizing the bacteria, and using the low-temperature plasma which maximizes sterilization and sterilization efficiency And to provide a vacuum sterilization sterilization apparatus for medical use.

It is another object of the present invention to provide a plasma processing apparatus and a plasma processing method capable of increasing the concentration of low temperature plasma and ozone as disinfection gases to increase the sterilization efficiency and to carry out a drying function by flowing hot air into the chamber, A sterilizing device for disinfecting medical disinfection using vacuum pneumatic equipment.

According to an aspect of the present invention, there is provided a medical treatment device including a chamber into which a medical instrument and a material to be sterilized are introduced, a door installed in front of the chamber, a display unit formed on a front surface of the main body, A sterilizing device for sterilizing equipment and medical equipment,

In the chamber,

An ozone sensor for sensing the concentration of ozone present in the chamber, and a vacuum pressure sensor for detecting the pressure inside the chamber,

A first pressure sensor for checking the pressure of the air flowing out through the first air filter, a second pressure sensor for detecting the pressure of the air flowing through the first air filter, A first composite filter for removing bacteria contained in the air, separating dust and moisture, filtering dust, and storing moisture as a first moisture canister; and a second composite filter for removing ozone gas contained in the air flowing out through the first composite filter A first vacuum pump which is connected to an output end of the first ozone decomposer and sucks air in the chamber to make the inside of the chamber into a vacuum state; A second ozone decomposer for decomposing ozone contained in the air and discharging the ozone from the outside of the main body is connected,

A second air filter for filtering impurities in the air flowing from the outside of the main body; a second pressure sensor for checking the pressure of air introduced through the second air filter; A second composite filter for removing bacteria contained therein, separating dust and moisture to filter dust, and storing moisture in a second water bottle; and a second composite filter connected to an output end of the second composite filter for sucking outside air, A second check valve for allowing the air introduced from the second vacuum pump to be directed only toward the chamber side and a second check valve for controlling the flow of the low temperature plasma gas and the ozone Temperature plasma generated by the low-temperature plasma generator and the ozone gas generator, and a low-temperature plasma generated by the low-temperature plasma generator and the ozone generator, And a second check valve for allowing only gas to flow into the chamber is connected to one suction portion of the chamber.

In addition, the present invention provides a sterilization apparatus for sterilizing medical equipment and medical equipment including a chamber into which a medical instrument and a medical instrument to be sterilized are put, a door provided at a front side, a display unit formed at a front surface of the main body, In a disinfecting device,

In the chamber,

An ozone sensor for sensing the concentration of ozone present in the chamber, and a vacuum pressure sensor for detecting the pressure inside the chamber,

A first pressure sensor for checking the pressure of the air flowing out through the first air filter, a second pressure sensor for detecting the pressure of the air flowing through the first air filter, A first composite filter for removing bacteria contained in the air, separating dust and moisture, filtering dust, and storing moisture as a first moisture canister; and a second composite filter for removing ozone gas contained in the air flowing out through the first composite filter A first solenoid valve connected to an output end of the first ozone decomposer, a second solenoid valve connected to an output end of the first solenoid valve and adapted to suck air in the chamber and to evacuate the inside of the chamber, A second solenoid valve connected to an output end of the first vacuum pump; an ozone generator connected to an output end of the second solenoid valve and containing ozone contained in the air flowing out from the inside of the chamber, A second ozone decomposer for decomposing and releasing the outside of the main body is connected,

A second air filter for filtering impurities in the air flowing from the outside of the main body; a second pressure sensor for checking the pressure of air introduced through the second air filter; A second composite filter for removing bacteria contained therein, separating dust and moisture to filter dust, and storing moisture in a second reservoir, an output terminal connected to the output terminal of the second composite filter, A fourth solenoid valve connected to an output end of the first vacuum pump; a first check valve connected to an output end of the fourth solenoid valve; A low-temperature plasma generating device and an ozone gas generating device for generating a low-temperature plasma gas and an ozone gas by using the introduced air, and a low-temperature plasma generating device connected to an output end of the low-temperature plasma generating device and the ozone gas generating device And a second check valve for allowing the low-temperature plasma and ozone gas to flow into the chamber is connected to one suction portion of the chamber.

According to the present invention, the inside of the disinfection chamber is evacuated, and then a low temperature plasma gas and ozone gas are supplied to perform disinfection and sterilization while applying pressure to the outside of the medical equipment and the equipment, Temperature plasma gas and ozone gas penetrate even where the object to be sterilized is difficult to penetrate, thereby completely sterilizing the bacteria.

In addition, the present invention has the advantage of sterilizing and sterilizing medical equipment and medical equipment infected with bacteria quickly within a short time (within 20 minutes) by maximizing the concentration of low temperature plasma and ozone by generating oxygen.

In addition, if necessary, a multi-function can be performed so that hot air can be introduced into the chamber to perform the drying function.

In addition, the present invention contributes to the health and medical fields through the sterilization and disinfection treatment in a nature-friendly manner, and provides various safety devices to provide the stability and convenience of the user.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Reference will now be made in detail to the preferred embodiments of the present invention, examples of which are illustrated in the accompanying drawings.

1 is an external view of a vacuum sterilization sterilization apparatus using low temperature plasma according to an embodiment of the present invention.

As shown in the drawing, the medical disinfecting apparatus 10 of the present invention is constructed in a rectangular shape and includes a chamber 11 into which medical equipment and equipment to be sterilized are charged, a door 12 installed in the front, And includes a display unit 13, a key operation unit 14, and a small printer unit 15 formed on the front surface of the main body.

According to the present invention, since the inside of the chamber is in a vacuum state, the structure of the door can be configured in a safe radial manner.

In addition, the display unit 13 can confirm the operation state of the sterilizing apparatus 10, and the key operation unit 14 can execute an operation start and stop command or commands of various operation functions. The touch panel 13 and the key operation unit 14 may be constituted by a touch screen.

The printer unit 15 prints out the operation state (operation state, error, etc.) of the sterilizing apparatus 10.

FIG. 2 is a block diagram illustrating a sterilizing apparatus for sterilization using a low-temperature plasma according to an embodiment of the present invention.

First, the chamber 11 is provided with an ozone sensor 16 for sensing the concentration of ozone present in the chamber, a vacuum pressure sensor 17 for detecting the pressure inside the chamber, A temperature / humidity sensor 17a, and a relief valve 18 for automatically discharging the inside of the chamber to a predetermined pressure or higher to maintain the pressure inside the chamber at a constant pressure.

A door sensor 19a for detecting the opening or locking state of the door 12 and a door lock device 19b for automatically locking or releasing the door 12 are further formed on the outside of the chamber 11 .

The first air filter 21 filters out impurities in the air flowing out from the chamber, and the pressure of the air flowing through the first air filter 21 is checked. The first pressure sensor 22 removes germs contained in the air introduced through the first pressure sensor 22 and separates the dust and moisture to filter the dust, , A first ozone decomposer (25) for decomposing ozone gas contained in the air discharged through the first composite filter (23), and a second air filter A first vacuum pressure sensor 21 for sucking air in the chamber 11 through a first pressure sensor 22, a first compound filter 23 and a first ozone decomposer 25, A pump (27), an air pump (26), and an air pump (26), which are contained in the air flowing out from the first vacuum pump (26) and the air flowing through the relief valve And a second ozone decomposer 27 for decomposing ozone to release the outside is connected.

The first pressure sensor 22 detects the pressure of the air passing through the first air filter 21 to determine whether the first air filter 21 is blocked or not. As a result, And notifies the replacement period of the filter 21.

A water level sensor 24a is further provided in the first water pipe 24 to inform the user that the first water pipe 24 is full so that the water in the first water pipe 24 can be emptied .

Also, the first ozone decomposer 25 decomposes ozone in the chamber 11, thereby extending the service life and efficiency of the first vacuum pump 26.

Next, a sterilizing gas for sterilization is introduced into one suction port of the chamber 11, which comprises a second air filter 31 for filtering impurities in the air introduced from the outside, a second air filter 31 The second pressure sensor 32 removes bacteria contained in the air introduced through the second pressure sensor 32 and separates the dust and moisture, A second composite filter 33 for storing the moisture in the second water tube 34 and a second composite filter 33 for storing the moisture through the second air filter 31, the second pressure sensor 32 and the second composite filter 33, A second vacuum pump 35 for sucking air into the chamber and a first check valve 36 for directing the air introduced from the second vacuum pump 35 to the chamber side, And the low-temperature plasma gas and the ozone gas are generated using the air introduced through the first check valve (36). Temperature plasma and ozone gas generated through the plasma generating device 37 and the ozone gas generating device 38 and the low temperature plasma generating device 37 and the ozone gas generating device 38 are introduced into the chamber 11 The second check valve 39 is provided.

Here, the second pressure sensor 32 detects the pressure of the air passing through the second air filter 31 to determine whether the second air filter 31 is blocked or not. As a result, And performs a function of notifying the replacement period of the air filter (31).

A water level sensor 34a is additionally provided in the second water pipe 34 to inform the user that the second water pipe 34 is full so that the water in the second water pipe 34 can be emptied .

An oxygen generating device 41 is added to the input terminals of the low temperature plasma generating device 37 and the ozone gas generating device 38 to supply oxygen to generate a low temperature plasma and ozone gas at a high concentration, You can let it double.

In addition, a hot air generating device 42 is added to the input end of the second check valve 39 to allow hot air to flow into the chamber 11 to dry the object to be sterilized.

FIG. 3 is a circuit block diagram of a vacuum pneumatic sterilizing apparatus for sterilization using low temperature plasma according to an embodiment of the present invention.

As shown in the figure, the ozone sensor 16 for detecting the concentration of ozone, the vacuum pressure sensor 17 for detecting the pressure inside the chamber, the temperature and humidity sensor 17a for detecting the temperature and the humidity inside the chamber, A door sensor 19a for sensing the opening or locking state of the first air filter 12, a first pressure sensor 22 for sensing the pressure of the air introduced through the first air filter 21, A water level sensor 24a for sensing the level of the first water pipe 24 and a water level sensor 24b for sensing the water level of the second water pipe 34. The second water pressure sensor 32 detects the pressure of the air, A key operation unit 14 having a plurality of switches for performing operation start and end, function setting, and the like; and a control unit for receiving a signal sensed by the sensors, (50) for automatically controlling the door (12) according to the driving control of the controller (50) A first ozone decomposer 25 for decomposing ozone gas contained in the air introduced through the first composite filter 23 and a second ozone decomposer 25 for sucking air in the chamber 11, The first vacuum pump 27 for decompressing the ozone contained in the air flowing out of the first vacuum pump 26 and the air flowing through the relief valve 18, A second vacuum pump 35 for sucking outside air into the chamber, a low-temperature plasma generator 37 for generating a low-temperature plasma gas, a second ozone decomposer 27 for generating ozone gas A display unit 13 for displaying the operating state of the sterilizing apparatus 10 and a printer unit 15 for printing and outputting the operating state of the sterilizing apparatus 10, .

The controller 50 further includes an oxygen generator 41 for generating oxygen and a hot air generator 42 for generating hot air to generate oxygen or hot wind under the control of the controller 50 .

In addition, it may further include a solenoid valve driving unit 51 for driving and controlling the first solenoid valve 28 through the fourth solenoid valve 30b according to another embodiment of the present invention.

The operation of the vacuum sterilization sterilization apparatus using low-temperature plasma according to an embodiment of the present invention will be described below.

First, medical equipment and equipment to be sterilized are put into the chamber 11 of the sterilizing and disinfecting apparatus 10, and then the door 12 is closed. Then, the disinfecting operation is started through the key operation unit 14.

The control unit 50 receives the operation start command from the key operation unit 14 and drives the first ozone decomposer 25, the first vacuum pump 26 and the second ozone decomposer 27.

The air inside the chamber 11 is sucked out to the discharge port by driving the first vacuum pump 26.

Therefore, the air inside the chamber 11 is filtered through the first air filter 21, and the bacteria contained in the air are removed while passing through the first composite filter 23 and the dust and moisture are separated And the separated water is stored in the first hydr.

The air passing through the first composite filter 23 is decomposed by the ozone gas contained in air while passing through the first ozone decomposer 25 and is passed through the first vacuum pump 26 and the second ozone decomposer 27 ) To decompose the secondary ozone, and then the ozone is discharged to the outside of the main body.

Accordingly, when the inside pressure of the chamber 11 is detected through the vacuum pressure sensor 17 and it is detected as a vacuum state, the control unit 50 detects the vacuum inside the chamber 11, Stops the driving of the first vacuum pump 26 and the first and second ozonizers 25 and 27. This process is referred to as " vacuum mode "

After the interior of the chamber 11 is evacuated in this manner, the control unit 50 drives the second vacuum pump 35, the low temperature plasma generator 37 and the ozone generator 38.

Therefore, air is introduced from the outside of the main body through the second air filter 31 by driving the second vacuum pump 35, and impurities in the air flowing through the second air filter 31 are filtered , The bacteria contained in the air are removed while passing through the second composite filter 33, and the moisture separated from the dust and moisture is separated and stored in the second water tube (34).

The air passing through the second composite filter 33 is supplied to the low temperature plasma generator 37 and the ozone gas generator 38 via the second vacuum pump 35 and the first check valve 36, And the low temperature plasma and the ozone gas generated through the low temperature plasma generator 37 and the ozone gas generator 38 are introduced into the chamber 11 through the second check valve 39.

At this time, the chamber 11 is maintained in a vacuum state, so that the low-temperature plasma gas and the ozone gas introduced into the chamber can be easily and quickly inserted into the inside (tube or pipe structure) as well as the outside of the object to be sterilized . This process is referred to as " sterilization mode "

In this manner, the control unit 50 repeats the <vacuum mode> and the <sterilization mode> several times (for example, 3-4 times).

Through this process, the medical equipment and the material to be sterilized in the chamber 11 are completely sterilized.

Then, the control unit 50 drives the first ozone decomposer 25, the first vacuum pump 26, the second ozone decomposer 27, and the second vacuum pump 35.

Accordingly, the air introduced from the outside flows through the second air filter 31, the second pressure sensor 32, the second compound filter 33, the second vacuum pump 35, the first check valve 36, The air in the chamber flows through the first air filter 21 → the first pressure sensor 22 and the second air filter 21 → the first pressure sensor 22, → first composite filter 23 → first ozone decomposer 25 → first vacuum pump 26 → second ozone decomposer 27 where the ozone is sent through the ozone sensor 16, The ozone is not detected in the chamber 11, and at the same time, when the inside of the chamber 11 becomes atmospheric pressure through the vacuum pressure sensor 17, the driving is stopped and the sterilization operation is terminated. This process is referred to as &quot; completion mode &quot; for the following convenience.

In the operation of the present invention, the sterilizing effect can be doubled by increasing the concentration of the low-temperature plasma and ozone by selectively driving the oxygen generator 41 in the <sterilizing mode> In the completion mode, the hot air generating device 42 is selectively operated to blow hot air into the chamber 11 to perform the drying function.

FIG. 4 is a conceptual diagram and block diagram of a sterilizing apparatus for vacuum pneumatic medical disinfection using a low-temperature plasma according to another embodiment of the present invention.

In another embodiment of the present invention, the same effect can be obtained by using a single vacuum pressure pump, and the configuration of the second vacuum pressure pump 35 is eliminated and only the first vacuum pressure pump 26 is used.

That is, as shown in the figure, a first solenoid valve 61 is interposed between the first ozone decomposer 25 and the first vacuum pump 26, and the first vacuum pump 26 and the second ozonizer 27. The third solenoid valve 63 is connected to the output end of the second compound filter 35 and the output end of the third solenoid valve 63 is connected to the first solenoid valve 62, The output of the first vacuum pump 26 is connected to the input of the fourth solenoid valve 64 and the output of the fourth solenoid valve 64 is connected to the input of the first solenoid valve 64, And is connected to the input end of the check valve 36.

In the operation of the present invention thus configured,

First, in the case of < vacuum mode >

The control unit 50 drives the first ozone decomposer 25, the first vacuum pump 26 and the second ozone decomposer 27 and at the same time the first solenoid valve 61 and the second solenoid valve 60, The second solenoid valve 62 is opened and the third solenoid valve 63 and the fourth solenoid valve 64 are closed.

Therefore, the air in the chamber 11 flows through the first air filter 21, the first pressure sensor 22, the first compound filter 23, the first ozone decomposer 25, the first solenoid valve 61, The second solenoid valve 62 and the second ozone decomposer 27. The inside of the chamber 11 is in a vacuum state.

In the case of < sterilization mode >

The control unit 50 drives the first vacuum pump 26, the low temperature plasma generator 37 and the ozone generator 38 and simultaneously drives the first solenoid valve 61 and the second solenoid valve 61 via the solenoid valve driver 60. [ The two solenoid valve 62 is closed and the third solenoid valve 63 and the fourth solenoid valve 64 are opened.

Accordingly, the air introduced from the outside flows through the second air filter 31, the second pressure sensor 32, the second compound filter 33, the third solenoid valve 63, the first vacuum pump 26, And flows into the chamber 11 through the sol valve 64 → the first check valve 36 → the low temperature plasma generator 37 and the ozone generator 38 → the second check valve 39.

On the other hand, in the case of < completion mode &

First, the control unit 50 drives the first ozone decomposer 25, the first vacuum pump 26 and the second ozone decomposer 27 and at the same time the first solenoid valve 61 When the inside of the chamber 11 becomes atmospheric pressure via the vacuum pressure sensor 17 after the first solenoid valve 61 and the second solenoid valve 62 are opened, The second solenoid valve 64 and the third solenoid valve 63 are closed.

At this time, the flow of air is controlled by the first air filter -> first pressure sensor -> first compound filter -> first ozone decomposer -> first solenoid valve -> first vacuum pump -> fourth solenoid valve -> 1 check valve -> low-temperature plasma generator and ozone generator -> second check valve -> chamber to circulate the air inside the chamber to remove ozone through the first ozone decomposer.

If ozone is not detected in the chamber 11 through the ozone sensor 16, the driving is stopped and the sterilization operation is terminated.

Brief Description of the Drawings Fig. 1 is an external view of a vacuum sterilization sterilization apparatus using a low-temperature plasma according to an embodiment of the present invention. Fig.

FIG. 2 is a conceptual view and block diagram of a vacuum pneumatic sterilizing apparatus for sterilization using low-temperature plasma according to an embodiment of the present invention.

3 is a circuit block diagram of a vacuum sterilization sterilization apparatus using low-temperature plasma according to the present invention,

4 is a conceptual view and block diagram of a sterilizing device for vacuum pneumatic medical disinfection using a low-temperature plasma according to another embodiment of the present invention.

Description of the Related Art

10: sterilizing device 11: chamber

12: Door 13: Display

14: key operation unit 15: printer unit

16: ozone sensor 17: vacuum pressure sensor

17a: Temperature and humidity sensor 18: Relief valve

19a: door sensor 19b: door lock device

21: first air filter 22: first pressure sensor

23: first complex filter 24: first water pipe

24a: water level sensor 25: first ozone decomposer

26: first vacuum pump 27: second ozone decomposer

31: second air filter 32: second pressure sensor

33: second composite filter 34: second water pipe

34a: water level sensor 35: second vacuum pump

36: first check valve 37: low temperature plasma generator

38: ozone generator 39: second check valve

41: oxygen generating device 42: hot air generating device

61: first solenoid valve 62: second solenoid valve

63: third solenoid valve 64: fourth solenoid valve

50: control unit 60: solenoid valve driving unit

Claims (8)

In a sterilization / disinfection apparatus for medical equipment and medical equipment including a chamber into which a medical instrument and a medical instrument to be sterilized are placed, a door provided at the front, a display portion formed on a front surface of the main body, a key operating portion, , In the chamber, An ozone sensor for sensing the concentration of ozone present in the chamber, and a vacuum pressure sensor for detecting the pressure inside the chamber, A first pressure sensor for checking the pressure of the air flowing out through the first air filter, a second pressure sensor for detecting the pressure of the air flowing through the first air filter, A first composite filter for removing bacteria contained in the air, separating dust and moisture, filtering dust, and storing moisture as a first moisture canister; and a second composite filter for removing ozone gas contained in the air flowing out through the first composite filter A first vacuum pump which is connected to an output end of the first ozone decomposer and sucks air in the chamber to make the inside of the chamber into a vacuum state; A second ozone decomposer for decomposing ozone contained in the air and discharging the ozone from the outside of the main body is connected, A second air filter for filtering impurities in the air flowing from the outside of the main body; a second pressure sensor for checking the pressure of air introduced through the second air filter; A second composite filter for removing bacteria contained therein, separating dust and moisture to filter dust, and storing moisture in a second water reservoir; and a second composite filter connected to an output end of the second composite filter for sucking outside air, A second check valve for allowing the air introduced from the second vacuum pump to be directed only toward the chamber side and a second check valve for controlling the flow of the low temperature plasma gas and the ozone Temperature plasma generated by the low-temperature plasma generator and the ozone gas generator, and a low-temperature plasma generated by the low-temperature plasma generator and the ozone generator, And a second check valve for allowing gas to flow only into the chamber is connected to one suction portion of the chamber. The method according to claim 1, Wherein the chamber is further provided with a relief valve for automatically releasing the pressure of the chamber to a predetermined level when the pressure inside the chamber is higher than a predetermined pressure so as to maintain the pressure inside the chamber at a constant pressure and an output stage of the relief valve is connected to the second ozone decomposer And a sterilizing unit for sterilizing the sterilized medicament using the low-temperature plasma. The method according to claim 1, Wherein a temperature and humidity sensor for detecting temperature and humidity is further installed in the chamber. The method according to claim 1, And a water level sensor is further installed in the first water pipe and the second water pipe. The method according to claim 1, Wherein the low-temperature plasma generator and the ozone generator are further connected to an input of an oxygen generator for supplying oxygen to the input end of the low-temperature plasma generator and the ozone generator. The method according to claim 1, Wherein the second check valve is further connected to a hot air generating device for generating hot air and introducing hot air into the chamber at an input end of the second check valve. The method according to claim 1, Wherein a door sensor for detecting the opening or locking state of the door is formed on the outer side of the chamber and a door lock device for automatically locking or unlocking the door is formed. In a sterilization / disinfection apparatus for medical equipment and medical equipment including a chamber into which a medical instrument and a medical instrument to be sterilized are placed, a door provided at the front, a display portion formed on a front surface of the main body, a key operating portion, , In the chamber, An ozone sensor for sensing the concentration of ozone present in the chamber, and a vacuum pressure sensor for detecting the pressure inside the chamber, A first pressure sensor for checking the pressure of the air flowing out through the first air filter, a second pressure sensor for detecting the pressure of the air flowing through the first air filter, A first composite filter for removing bacteria contained in the air, separating dust and moisture, filtering dust, and storing moisture as a first moisture canister; and a second composite filter for removing ozone gas contained in the air flowing out through the first composite filter A first solenoid valve connected to an output end of the first ozone decomposer, a second solenoid valve connected to an output end of the first solenoid valve and adapted to suck air in the chamber and to evacuate the inside of the chamber, A first solenoid valve connected to an output end of the first solenoid valve and connected to an output end of the first solenoid valve, Decomposed, and the second ozone decomposer which emits the external connection configuration unit, A second air filter for filtering impurities in the air flowing from the outside of the main body; a second pressure sensor for checking the pressure of air introduced through the second air filter; A second composite filter for removing bacteria contained therein, separating dust and moisture to filter dust, and storing moisture in a second reservoir, an output terminal connected to the output terminal of the second composite filter, A fourth solenoid valve connected to an output end of the first vacuum pump; a first check valve connected to an output end of the fourth solenoid valve; A low-temperature plasma generating device and an ozone gas generating device for generating a low-temperature plasma gas and an ozone gas by using the introduced air, and a low-temperature plasma generating device connected to an output end of the low-temperature plasma generating device and the ozone gas generating device And a second check valve for introducing a low-temperature plasma and an ozone gas into the chamber is connected to one suction portion of the chamber.

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