KR20100055817A - Atmospheric pressure plasma generating device, and atmospheric pressure plasma generating method and atmospheric pressure plasma device for treating the surface having the same - Google Patents

Abstract

PURPOSE: The atmospheric pressure plasma surface treatment apparatus equipped with atmosphere pressure plasma generating apparatus, and method and the atmosphere pressure plasma generating apparatus for occurring the atmospheric pressure plasma. In the vacuum condition using the Venturi principle, using the reaction initial igniting, the plasma can be occurred under the atmospheric pressure to the power consumption lowing without the separate ignition means from the reaction gas. CONSTITUTION: The reaction space(110) forms the opened gas emit hole squirting the plasma gas which becomes. It leaves the reaction space in interval and the power electrode(120) and ground electrode(130) are separated. The gas feed port(140) forms the flow path for the reaction gas introduction into the reaction space. The fire drift space(160) instantaneously keeps the vacuum condition through the gas feed port with the flow [flow] of the reaction gas introduced to the reaction space.

Description

Atmospheric pressure plasma generating device, and atmospheric pressure plasma generating method and atmospheric pressure plasma device for treating the surface having the same}

The present invention relates to an atmospheric pressure plasma generating apparatus, a method for generating an atmospheric pressure plasma, and an atmospheric pressure plasma surface treatment apparatus having the same. Specifically, a separate ignition means under atmospheric pressure through initial reaction ignition in a vacuum state using the Venturi principle. The present invention relates to an atmospheric pressure plasma generator capable of generating plasma from a reaction gas with low power consumption, a method of generating atmospheric pressure plasma, and an atmospheric pressure plasma surface treatment apparatus having an atmospheric pressure plasma generator.

Plasma generators are applied to various fields such as surface modification of metals and nonmetal materials, cleaning processes of electronic components and semiconductor wafers. Conventionally, most industrial plasma generating apparatuses employ a vacuum plasma apparatus for generating a plasma by maintaining a low pressure close to a vacuum, but this is a difficult condition for achieving a vacuum, and many constraints such as an enlarged apparatus are followed. Therefore, in recent years, an attempt has been made to switch to an atmospheric pressure plasma generator that generates a plasma gradually at atmospheric pressure.

An example of a conventional atmospheric plasma generator is shown in FIG. The atmospheric pressure plasma generator includes a power source electrode 10 and a ground electrode 12 provided at predetermined intervals, a dielectric film 11 provided on an inner surface of at least one side of the power source electrode 10 and the ground electrode 12; And is installed between the power source electrode 10 and the ground electrode 12 to prevent arc discharge from occurring between the power source electrode 10 and the ground electrode 12, to generate a plasma, and to form a discharge gap g thereunder. The intermediate dielectric 14, the gas inlet path 16 formed inside the ground electrode 12, and the gas inlet path 16 and the discharge gap g communicate with each other and flow into the gas inlet path 16. It consists of a plurality of gas discharge orifices 18 which supply the injected gas evenly to the discharge gap g. In the drawing, reference numeral 24 denotes a block for matching impedance when the high frequency power supply 20 is supplied to the power supply pole 10.

In the atmospheric pressure plasma generator having the above configuration, when the high frequency power source 20 is applied to the power source electrode 10, an electric field is formed between the power source electrode 10 and the ground electrode 12, that is, the discharge gap g. As the injection gas flowing into the discharge gap g through the gas inlet path 16 is dissociated by the electric field, plasma is generated. The plasma thus generated is sprayed onto the surface of the object 22 to be transported to the lower side of the apparatus and used to modify, clean or sterilize the surface.

However, in order to ignite the injection gas at the initial stage in the atmospheric pressure plasma generating apparatus so that an electrical reaction with respect to the injection gas occurs, a very high starting voltage is required. In order to satisfy such a high starting voltage, the high frequency power source 20 must be used. In this case, however, the device becomes unstable, and there is a problem that the plasma does not generate and transitions into an arc. In addition, problems such as overheating of the device and damage of the object to be treated 22 are caused by the arc due to the high starting voltage.

In order to solve the above problems, by adopting an igniter as a separate ignition means, plasma can be generated with low power consumption, and an atmospheric pressure plasma generator capable of preventing damage to an object to be processed by an arc during initial ignition is registered in Korea. Proposed in heading 57.848. However, the Republic of Korea Patent No. 572848 has a problem that a separate ignition means such as igniter must be required for the initial electrical reaction to the injection gas, and in the case of such ignition means is a consumable, periodic replacement and management is required There are disadvantages.

The technical problem to be solved by the present invention, even without a separate ignition means such as igniter can lead to the initial electrical reaction to the injection gas even at low starting voltage under atmospheric pressure, and prevents damage to the object to be treated by the arc during the initial ignition An atmospheric pressure plasma generator, a method for generating an atmospheric pressure plasma, and an atmospheric pressure plasma surface treatment apparatus including an atmospheric pressure plasma generator are provided.

According to an aspect of the present invention for solving the above technical problem, a reaction space having a gas discharge port is formed at one side end to generate a plasma gas, the generated plasma gas can be ejected; A power electrode and a ground electrode spaced apart from each other with the reaction space therebetween; A barrier dielectric disposed between the power supply electrode and the ground electrode and spaced apart from the power supply electrode and the ground electrode; The space separated by the partition dielectric is a gas supply port and an ignition auxiliary gas introduction passage for delivering the reaction gas to the reaction space, respectively, and is vacuumed by the flow of the reaction gas introduced into the reaction space through the gas supply port. It provides an atmospheric pressure plasma generator comprising a; ignition induction space is maintained.

Here, an inlet for introducing an ignition auxiliary gas is formed at one side of the ignition induction space, and an outlet is formed at the other side in communication with the gas supply port and toward the reaction space.

In this case, the inlet for introducing the ignition auxiliary gas may be a gap formed by separating the barrier dielectric and the power electrode from the top of the barrier dielectric, and in this case, the ignition auxiliary gas introduced into the ignition induction space through the inlet is a low voltage. Argon (Ar) gas having excellent electrical reactivity in a vacuum state may be adopted.

Alternatively, the inlet for introducing the ignition auxiliary gas may be a bypass flow path on the partition dielectric that communicates the gas supply port and the ignition induction space. In this case, as the ignition auxiliary gas, a reaction gas for generating a general plasma supplied through a gas supply port, for example, nitrogen (N ₂ ) gas, may be adopted.

Preferably, the substrate may further include a dielectric covering the ground electrode or the power electrode.

In addition, the gas discharge port is configured to gradually decrease in diameter as the gas discharge port is closer to the direction in which the object to be processed is present, whereby the plasma gas discharged through the gas discharge port has a predetermined pressure and speed suitable for treating the object to be treated. It is desirable to.

Further, in performing the surface treatment on the object to be treated using the plasma gas generated through the atmospheric pressure plasma generating device, the power electrode or the ground electrode or the power source can reduce the overheating of the device and the surface damage of the object to be treated. It is preferable to form a cooling water supply line in both the electrode and the ground electrode.

As another aspect to solve the above technical problem, the present invention introduces an ignition auxiliary gas into the ignition induction space, and communicates with the ignition induction space and the gas supply port through a gas supply port separated from the ignition induction space. The reaction gas is introduced to the reaction space having a gas outlet on one side, and instantaneously a vacuum is formed in the ignition induction space by the flow of the reaction gas toward the reaction space, A method of generating an atmospheric pressure plasma by applying power and generating a plasma gas through a series of electrical reactions to a reaction gas in the reaction space through initial ignition of the ignition auxiliary gas in the vacuum ignition induction space. to provide.

As another aspect to solve the above technical problem, the present invention, an apparatus for performing a surface treatment for the object to be treated using a plasma gas, the atmospheric pressure plasma generating apparatus; And transfer means for transferring the object to be treated so that the surface of the object is exposed to the plasma gas injected through the gas discharge port of the atmospheric pressure plasma generating device.

Here, the atmospheric pressure plasma generating apparatus may further include an angle adjusting device for adjusting the spraying angle of the plasma gas injected to the surface of the object to be processed.

According to the present invention having the above-described configuration, the plasma gas can be generated by a series of electrical reactions to the reaction gas in the reaction space by the initial ignition in the vacuum state using the Venturi principle and the initial ignition. That is, as in the conventional vacuum plasma apparatus, it is possible to create an environment suitable for plasma gas generation without a separate vacuum forming means for forming a low pressure state close to vacuum, and plasma gas at atmospheric pressure without a separate ignition means for initial ignition. The effect that can be generated is expressed.

In addition, since a separate ignition means such as an igniter is not required, the device can be miniaturized, and thus, space constraints due to installation can be significantly reduced compared to a conventional vacuum or atmospheric plasma generator.

In addition, the initial ignition in the vacuum state can lead to an initial electrical reaction to the reaction gas introduced even at a low starting voltage, and thus, the power consumption can be significantly lowered. As does not occur, it is also possible to prevent the device overheating and the damage of the object to be treated.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2 is a schematic configuration diagram schematically showing an overall configuration of an atmospheric pressure plasma surface treatment apparatus according to a preferred embodiment of the present invention, and FIG. 3 schematically illustrates an overall configuration of an atmospheric pressure plasma surface treatment apparatus according to another embodiment of the present invention. It is a schematic block diagram shown.

2 to 3, the atmospheric pressure plasma surface treatment apparatus according to an embodiment of the present invention is a device for performing a surface treatment on the object to be treated using a plasma gas, the atmospheric pressure plasma generating apparatus 100 and the And a transfer means 200 for transferring the object to be treated to the injection region of the plasma gas discharged from the atmospheric pressure plasma generator. The atmospheric pressure plasma generator 100 converts the reaction gas introduced from the outside according to the high frequency electric field between the opposite electrodes, and the transfer means 200 is the atmospheric pressure plasma at a position spaced apart from the atmospheric pressure plasma generator 100. The object 10 is transferred to one side while exposing the object 10 to the plasma gas emitted through the generator 100.

2 to 3, the atmospheric pressure plasma generating apparatus 100 has a reaction space 110 having a gas discharge port 112 opened at one end thereof so that plasma gas is generated and the generated plasma gas may be ejected. ), A gas supply port 140 forming a flow path for introducing a reaction gas into the power electrode 120 and the ground electrode 130 and the reaction space 110 which are spaced apart from each other with the reaction space 110 interposed therebetween. ) And an ignition induction space 160 that maintains a vacuum state instantaneously by the flow of the reaction gas introduced into the reaction space 110 through the gas supply port 140.

The power electrode 120 is made of a metal having excellent electrical reactivity, and one surface facing the ground electrode 130 is surrounded by a dielectric 125 for stable electrical reaction with the ground electrode 130. The power electrode 120 has a reaction area enough to generate a plasma by electrically reacting with the ground electrode 130, and is introduced from the outside in the reaction space 110 between the ground electrodes 130. In order to cause an electrical reaction to the reaction gas, the power is connected to an external high frequency low voltage power supply.

At this time, the dielectric 125 surrounding the power electrode 120 induces a stable electrical reaction between the power electrode 120 and the ground electrode 130 by ensuring insulation between each electrode, the metal material The plasma gas generated by the power supply electrode 120 and the ground electrode 130 mainly serves to prevent the substrate to be contaminated. In the present exemplary embodiment, the dielectric 125 is formed only on the power electrode 120, but in order to induce a more stable electrical reaction, the ground electrode facing the power electrode 120 and the reaction space 110 therebetween ( 130) It is preferable to form a dielectric (not shown) on one surface.

The ground electrode 130 is spaced apart from the power electrode 120 with the reaction space 110 interposed therebetween, and reacts with the power electrode 120 by a power supplied to the power electrode 120. An electric field is formed in the reaction space 110. Accordingly, when the reaction gas is introduced into the reaction space 110 through the gas supply port 140, the introduced reaction gas by the electrical reaction between the power electrode 120 and the ground electrode 130 is in a plasma state It is injected into the surface of the object 10 to be processed on the transfer means 200 through the gas outlet 112 on one side of the reaction space 110 is converted into and the plasma gas is ejected.

Here, although not shown in the figure, the gas discharge port 112 is preferably configured such that its diameter gradually narrows closer to the direction in which the object 10 to be processed on the feed stage 200 exists. As such, when the gas outlet 112 is configured to have a configuration in which the diameter thereof gradually decreases toward the outlet side facing outward, the plasma gas discharged through the gas outlet 112 has a predetermined pressure and speed. The processing efficiency can be further improved.

In order to convert the reaction gas into the plasma state in the reaction space 110, a process of igniting the reaction gas in the initial stage of the surface treatment, cleaning, or sterilization of the object to be treated 10 is required. For the initial ignition of the reaction gas, the present invention employs the ignition induction space 160 described above. In the embodiment of the present invention, the ignition induction space 160 has a configuration in communication with the gas supply port and the reaction space, the flow of the reaction gas introduced into the reaction space 110 from the gas supply port 140 By the venturi action by the vacuum moment is maintained.

Specifically, the ignition induction space 160 is separated and separated from the gas supply port 140 through the partition dielectric 150 installed in the space between the power electrode 120 and the ground electrode 130. An inlet 162 for introducing an ignition auxiliary gas is formed at one side of the ignition induction space 160 separated from each other, and an outlet 164 is formed at the other side in communication with the gas supply port 140 and toward the reaction space 110. have. Accordingly, when a reaction gas is introduced into the reaction space 110 through the gas supply port 140, the ignition induction space 160 is in a vacuum state that is advantageous for initial ignition of the reaction gas by the flow of the reaction gas. Will form.

In this case, the inlet 162 for introducing an ignition auxiliary gas may be a gap formed by separating the barrier dielectric 150 and the power electrode 120 on the barrier dielectric 150 from each other, as shown in FIG. Alternatively, as shown in FIG. 3, it may be a bypass flow path on the partition dielectric 150 that communicates the gas supply port 140 and the ignition induction space 160, and may form a vacuum for the ignition induction space 160. Advantageously, the outlet 164 formed in the ignition induction space 160 preferably has a slope inclined in the reaction gas flow direction introduced into the reaction space 110 through the gas supply port 140. .

As shown in FIG. 2, if the ignition induction space 160 is independent of the gas supply port 140 and an inlet 162 for introducing an ignition auxiliary gas is also provided separately, the ignition is performed through the inlet. As the ignition auxiliary gas introduced into the induction space 160, it is preferable to adopt argon (Ar) gas having excellent electrical reactivity in a low voltage vacuum state, and as shown in FIG. 3, the inlet 162 is bypassed. In the case of the flow path, since the reaction gas for generating a general plasma, for example, nitrogen (N ₂ ) gas, is supplied as the ignition auxiliary gas through the gas supply port 140, it is not necessary to use a separate ignition auxiliary gas.

Looking at the process of generating the atmospheric pressure plasma gas carried out by the atmospheric pressure plasma generating apparatus 100, introducing an ignition auxiliary gas into the ignition induction space 160, separated from the ignition induction space 160 By introducing the reaction gas through the gas supply port 140 to the reaction space 110 in communication with the ignition induction space 160 and the gas supply port 140 and having a gas discharge port 112 on one side, The ignition induction space 160 is instantaneously vacuumed by the flow of the reaction gas toward the reaction space 110.

When power is applied to the power electrode 120 in this state, the initial ignition of the ignition auxiliary gas in the ignition induction space 160 in a vacuum state is made, and the ignition auxiliary gas in the reaction space 110. By the initial ignition of the chain reaction may occur in the reaction gas can generate a plasma gas.

In performing the surface treatment on the object to be treated 10 using the plasma gas generated through the above process, there is a risk that the device may be overheated during the electrical reaction between the electrodes, the gas outlet 112 is There is a risk that the temperature of the plasma gas injected into the object 10 to be treated increases, thereby damaging the object to be processed. Therefore, a cooling water supply line (not shown) is formed on the power electrode 120 or the ground electrode 130 to perform surface treatment on the object to be treated using the plasma gas generated through the atmospheric pressure plasma generator 100. In practice, it may be desirable to prevent overheating of the device and surface damage of the object 10 to be treated.

On the other hand, by adjusting the injection angle of the plasma gas injected to the surface of the object 10 placed on the transfer means 200, the surface treatment can be performed by the plasma injection area and the plasma gas injected to the surface of the object 10 to be processed. The treatment area can be adjusted. Therefore, in the embodiment of the present invention, the atmospheric pressure plasma generating apparatus 100 can freely adjust the inclination angle with respect to the surface of the object 10 to be transferred by the transfer means 200 through an angle adjusting device (not shown). It is preferable to configure so that.

According to the embodiment of the present invention, the plasma gas can be generated by the initial reaction of the reaction in a vacuum state using the Venturi principle and a chain electrical reaction to the reaction gas in the reaction space by the initial ignition. That is, as in the conventional vacuum plasma apparatus, it is possible to create an environment suitable for plasma gas generation without a separate vacuum forming means for forming a low pressure state close to vacuum, and plasma gas at atmospheric pressure without a separate ignition means for initial ignition. Can be generated.

As a result, since a separate ignition means such as an igniter is not required, the device can be miniaturized, and thus the space constraints due to the installation can be significantly reduced compared to a conventional vacuum or atmospheric plasma generator. In addition, the initial ignition in a vacuum state can lead to an initial electrical reaction to the reaction gas introduced even at a low starting voltage, which can also significantly reduce power consumption and is economical. As does not occur, overheating of the apparatus and consequent damage to the object to be treated can also be prevented.

In the above described and described with respect to a specific embodiment with respect to the present invention, the present invention will be variously modified and changed without departing from the spirit or scope of the present invention provided by the claims below. It will be appreciated that one of ordinary skill in the art can readily understand that the present invention can be used.

1 is a schematic configuration diagram of a conventional general atmospheric pressure plasma surface treatment apparatus.

Figure 2 is a schematic configuration diagram schematically showing the overall configuration of the atmospheric pressure plasma surface treatment apparatus according to an embodiment of the present invention.

Figure 3 is a schematic configuration diagram schematically showing the configuration of an atmospheric pressure plasma surface treatment apparatus according to another embodiment of the present invention.

<Description of the symbols for the main parts of the drawings>

10.Object to be processed 100 ... Atmospheric plasma generator

110 Reaction space 112 Gas outlet

120 Power electrode 125 Dielectric

130 Grounding electrode 140 Gas supply port

150 bulkhead dielectric 160 ignition induction space

200 ... Transportation

Claims (11)

An atmospheric pressure plasma generator for plasmalizing a reaction gas introduced according to a high frequency electric field between opposite electrodes, A reaction space in which plasma gas is generated, and having a gas discharge port opened at one end thereof so that the generated plasma gas can be ejected; A power electrode and a ground electrode spaced apart from each other with the reaction space therebetween; A barrier dielectric disposed between the power supply electrode and the ground electrode and spaced apart from the power supply electrode and the ground electrode; The space separated by the partition dielectric is a gas supply port and an ignition auxiliary gas introduction passage for delivering the reaction gas to the reaction space, respectively, and is vacuumed by the flow of the reaction gas introduced into the reaction space through the gas supply port. Atmospheric pressure plasma generating apparatus comprising a; ignition induction space is maintained. The method of claim 1, The ignition induction space, An inlet for introducing an ignition auxiliary gas on one side, and an outlet for communicating with the gas supply port and an outlet toward the reaction space on the other side. The method of claim 2, The inlet for introducing an ignition auxiliary gas, Atmospheric pressure plasma generating apparatus characterized in that the gap formed on the partition dielectric and the power supply electrode spaced apart from each other. The method of claim 3, wherein Atmospheric pressure plasma generating apparatus characterized in that the ignition auxiliary gas introduced into the ignition induction space through the inlet is argon (Ar) gas. The method of claim 2, The inlet for introducing an ignition auxiliary gas, Atmospheric pressure plasma generating apparatus characterized in that the bypass passage on the partition dielectric for communicating the gas supply port and the ignition induction space. The method of claim 1, And a dielectric material surrounding the ground electrode or the power electrode. The method of claim 1, The gas discharge port, Atmospheric pressure plasma generating apparatus characterized in that the diameter is gradually narrowed closer to the direction in which the object to be treated. The method of claim 1, At least one of the power electrode and the ground electrode, the atmospheric pressure plasma generator, characterized in that the cooling water supply line is formed. The ignition auxiliary gas is introduced into the ignition induction space, and through the gas supply port separated from the ignition induction space, the reaction gas communicates with the ignition induction space and the gas supply port and faces a reaction space having a gas outlet at one side. In this case, a vacuum is instantaneously formed in the ignition induction space by the flow of the reaction gas toward the reaction space, and power is applied to a power supply electrode and a ground electrode in the ignition induction space in a vacuum state. Method for generating an atmospheric pressure plasma to generate a plasma gas by a series of electrical reactions to the reaction gas in the reaction space through the initial ignition of the ignition auxiliary gas of the. An apparatus for performing a surface treatment on a target object using a plasma gas, An atmospheric pressure plasma generating apparatus according to any one of claims 1 to 8; And And transport means for transporting the object to be treated so that the surface of the object is exposed to the plasma gas injected through the gas discharge port of the atmospheric pressure plasma generator. The method of claim 10, The atmospheric pressure plasma generator, An atmospheric pressure plasma surface treatment apparatus further comprises; an angle adjusting device for adjusting the injection angle of the plasma gas injected to the surface of the object to be treated.

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