KR20100026677A - Apparatus for driving a belt and apparatus for processing a glass including the same - Google Patents

Apparatus for driving a belt and apparatus for processing a glass including the same Download PDF

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Publication number
KR20100026677A
KR20100026677A KR1020080085778A KR20080085778A KR20100026677A KR 20100026677 A KR20100026677 A KR 20100026677A KR 1020080085778 A KR1020080085778 A KR 1020080085778A KR 20080085778 A KR20080085778 A KR 20080085778A KR 20100026677 A KR20100026677 A KR 20100026677A
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KR
South Korea
Prior art keywords
belt
sensor
substrate
pulleys
pulley
Prior art date
Application number
KR1020080085778A
Other languages
Korean (ko)
Inventor
최봉만
Original Assignee
세메스 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 세메스 주식회사 filed Critical 세메스 주식회사
Priority to KR1020080085778A priority Critical patent/KR20100026677A/en
Publication of KR20100026677A publication Critical patent/KR20100026677A/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G13/00—Roller-ways
    • B65G13/02—Roller-ways having driven rollers
    • B65G13/06—Roller driving means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE: An apparatus for driving a belt and an apparatus for processing a substrate including the same are provided to stop a motor which rotates a roller unit by transmitting a signal to a control unit with a sensor which detects the connection state of belts. CONSTITUTION: A first pulley(110) transfers torque to a roller unit which conveys a substrate(G). A second pulley(120) is connected to the motor which provides the torque. Belts(130) transfers the torque from the second pulley to the first pulley. A sensor(400) detects the connection state of the belt. Control unit(500) stops the motor based on the signal from the sensor.

Description

A belt drive device and a substrate processing device including the same {APPARATUS FOR DRIVING A BELT AND APPARATUS FOR PROCESSING A GLASS INCLUDING THE SAME}

The present invention relates to a belt driving apparatus and a substrate processing apparatus including the same, and more particularly, an apparatus for transmitting a rotational force to a roller unit through a belt to convey a glass substrate for manufacturing a flat panel display device, and the glass including the same. An apparatus for substantially treating a substrate.

In general, the flat panel display includes a liquid crystal display (LCD) using liquid crystal, a plasma display (PDP) using plasma, an organic light emitting display (OLED) using an organic light emitting element, and the like.

Such a flat panel display includes a display panel for substantially displaying an image. The display panel is manufactured based on a glass substrate.

In detail, the display panel is manufactured by performing a deposition process, an etching process, a photolithography process, a cleaning process, and the like on the substrate. At this time, the substrate transfers between the processes through a plurality of roller units corresponding to each of the processes.

Thus, a separate belt drive device is installed in each of the roller units to transmit rotational force. Specifically, the belt driving device connects the first pulley for transmitting the rotational force to the roller unit, a second pulley connected to the motor providing the rotational force, and the first and second pulleys to connect the rotational force to the second pulley. And a belt for transferring from the pulley to the first pulley.

However, since there is no means for detecting when the belt of the belt drive device installed in any one of the roller units is broken, the substrate is placed on the front end of the substrate on the roller unit receiving the rotational force from the broken belt. A problem may occur that is damaged by hitting the other substrate transported from the roller unit.

Accordingly, the present invention has been made in view of the above problems, and an object of the present invention is to provide a belt driving device capable of detecting boiling of a belt.

Another object of the present invention is to provide a substrate processing apparatus including the belt driving apparatus described above.

In order to achieve the above object of the present invention, a belt drive device according to one feature includes a first pulley, a second pulley, a belt, a sensor and a control unit. The first pulley transmits a rotational force to the roller unit that carries the substrate. The first pulley is connected to a motor that provides the rotational force. The belt connects the first and second pulleys to transfer the rotational force from the second pulley to the first pulley. The sensor is installed on the belt, and detects whether the belt is broken. The controller is connected to the sensor and the motor, and stops the motor when a signal is detected that the belt is broken from the sensor.

Here, the sensor may be an optical sensor for receiving the light reflected from the belt while irradiating light to the belt.

The belt driving device may further include an idle roller contacting the belt between the first and second pulleys and providing tension to the belt through an elastic force.

Thus, the sensor may detect the movement of the idle roller due to the change in tension when the belt is broken.

In detail, the sensor may be disposed adjacent to the idle roller, and may be an optical sensor configured to receive light reflected from the idle roller while radiating light onto the idle roller.

Alternatively, the sensor may be a limit switch connected to the idle roller and switched through the movement of the idle roller.

In order to achieve the above object of the present invention, a substrate processing apparatus according to one aspect includes substrate processing units, roller units, belt driving units, sensors, and control unit.

The substrate processing units perform various processes on the substrate. The roller units are installed in each of the substrate processing units and carry the substrate. The belt driving units may include first pulleys for transmitting rotational force to each of the roller units, second pulleys respectively connected to a plurality of motors for providing rotational force, and connecting the first pulleys and the second pulleys, respectively. Thereby transmitting the rotational force from each of the second pulleys to each of the first pulleys.

The sensors are installed on each of the belts and detect whether each of the belts is broken. The controller is connected to the sensors and the motors and stops all the motors when a signal is detected that the belt is broken from any one of the sensors.

Thus, the controller is connected to the substrate processing units and stops all processes of the substrate processing units when a signal for detecting the break of the belt is received from any one of the sensors.

According to such a belt driving device and a substrate processing apparatus including the same, when any one of the belts is boiled, the sensors sense and transmit the same to the controller, thereby providing the rotational force for the controller to rotate the roller units through the belts. You can stop all the motors.

In this way, it is possible to prevent the plurality of substrates carried on the roller units from colliding with each other and breaking as one of the belts is broken. Thereby, the production yield of the flat panel display device manufactured from the said board | substrate conveyed can be improved.

Hereinafter, a belt driving apparatus and a substrate processing apparatus including the same according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. As the inventive concept allows for various changes and numerous embodiments, particular embodiments will be illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to the specific disclosed form, it should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the present invention. In describing the drawings, similar reference numerals are used for similar elements. In the accompanying drawings, the dimensions of the structures are shown in an enlarged scale than actual for clarity of the invention.

The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting of the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprise" or "have" are intended to indicate that there is a feature, number, step, action, component, part, or combination thereof described on the specification, and one or more other features. It is to be understood that the present invention does not exclude the possibility of the presence or the addition of numbers, steps, operations, components, parts, or combinations thereof.

On the other hand, unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art. Terms such as those defined in the commonly used dictionaries should be construed as having meanings consistent with the meanings in the context of the related art and shall not be construed in ideal or excessively formal meanings unless expressly defined in this application. Do not.

1 is a configuration diagram schematically illustrating a substrate processing apparatus according to an embodiment of the present invention, and FIG. 2 is a view of the substrate processing apparatus illustrated in FIG. 1 as viewed from above.

1 and 2, a substrate processing apparatus 1000 according to an embodiment of the present invention may include substrate processing units 200, roller units 300, belt driving units 100, and sensors 400. And the controller 500.

The substrate processing units 200 perform various processes for manufacturing a flat panel display device such as a deposition process, an etching process, a photolithography process, a cleaning process, and the like on the substrate G. The substrate G may be, for example, a thin film transistor (TFT) substrate or a color filter made of a glass material used to manufacture a liquid crystal display (LCD) for displaying an image using liquid crystals; CF) substrate. Alternatively, the substrate G may be a semiconductor substrate used to manufacture a semiconductor device.

The substrate processing units 200 may be disposed in a line in order. The substrate processing units 200 spray the chemical C on the substrate G according to the processes. For example, when the substrate processing unit 200 performs an etching process or a cleaning process on the substrate G, the chemical C may be sulfuric acid (H 2 SO 4), hydrochloric acid (HCl), hydrofluoric acid (HF), Hydrogen peroxide solution (H 2 O 2), deionized water (H 2 O), and the like.

The substrate processing units 200 are installed in a separate chamber 210 to prevent foreign substances from flowing in from the outside during the processing of the substrate G.

Each of the roller units 300 is installed corresponding to each of the substrate processing units 200. The roller units 300 transfer the substrate G placed thereon in the order of the processes. The roller units 300 are installed in the chamber 210.

Each of the roller units 300 is disposed at regular intervals on the at least one shaft 310 and the shaft 310 which are arranged long along a direction perpendicular to the direction in which the substrate G is transferred, and thus the substrate G Rollers for conveying while supporting. That is, the rollers 320 have a structure fixed to the shaft 310 through a key material.

Alternatively, some of the roller units 300 may simply support the substrate G for conveying. In this case, the rollers 320 do not necessarily need to be fixed to the shaft 310, and conversely, between the rollers 320 and the shaft 310 to make the rotation of the rollers 320 more natural. Bearings may be installed.

In addition, the shaft 310 is made of a material having high strength to prevent sag even when the size of the substrate (G) is large, in some cases through a separate support member (not shown) at regular intervals Can be supported.

On the other hand, since the roller unit 300 has a long length along the conveying direction of the substrate G, the shaft 310 is generally disposed in parallel with each other.

Each of the belt driving units 100 is installed in each of the roller units 300. Each of the belt driving units 100 provides a rotational force for transferring the substrate G to each of the roller units 300.

Hereinafter, the belt driving unit 100 will be described in more detail with reference to FIG. 3.

3 is a diagram illustrating a belt driving unit of the substrate processing apparatus shown in FIG. 1.

3, each of the belt driving units 100 includes at least one first pulley 110, a second pulley 120, and a belt 130.

The first pulley 110 transmits a rotational force for transferring the substrate G to the roller unit 300. For example, the first pulley 110 may transmit the rotational force to the roller unit 300 using magnetics facing each other based on the outer wall of the chamber 210.

Alternatively, the first pulley 110 may be designed to penetrate the outer wall of the chamber 210 and then directly couple to the penetrated portion of the shaft 310.

When the first pulley 110 is made up of a plurality of shafts 310 of the roller unit 300, a plurality of first pulleys 110 may be installed to correspond to a part of the shafts 310 at regular intervals. In this case, a predetermined distance between the first pulleys 110 is determined according to the length along the transfer direction of the substrate G. This is because, when the interval is longer than the length of the substrate G, the substrate G cannot be continuously transferred.

The second pulley 120 is connected to a motor 140 that provides the rotational force. Specifically, the second pulley 120 is directly connected to the rotation shaft of the motor 140. In this case, the second pulley 120 may be disposed on substantially the same plane to enable the belt connection with the first pulley 110.

The belt 130 connects the first pulley 110 and the second pulley 120. As a result, the belt 130 transmits the rotational force generated from the motor 140 to the first pulley 110 through the second pulley 120 and finally the roller unit through the shaft 310. Allow 300 to rotate. As a result, the belt 130 allows the substrate G to be placed on the roller unit 300 to be transferred.

In this case, the belt 130 may connect one second pulley 120 and a plurality of first pulleys 110 adjacent to each other at a time. To this end, the motor 140 provides a rotational force of sufficient strength to rotate the roller units 300 corresponding to the first pulleys 110 at one time.

Meanwhile, when the belt 130 connects one second pulley 120 to a plurality of first pulleys 110, the belt driver 100 may be disposed between or between the first pulleys 110. The first idler roller 150 may be installed between the first pulleys 110 and the second pulleys 120. The first idle roller 150 provides tension to the belt 130 such that the belt 130 is in close contact with the first pulleys 110 and the second pulley 120.

In addition to this, the belt driving unit 100 is in contact with the belt 130 around the first idle roller 150 and more precisely maintains the tension provided by the first idle roller 150. At least one auxiliary roller 160 may be further included to prevent the 130 from being separated from the first idle roller 150.

Each of the sensors 400 is installed on each of the belts 130 of the belt driving units 100. Each of the sensors 400 detects a break of each of the belts 130. To this end, each of the sensors 400 is preferably installed in the belt 130 between the first pulley 110 and the second pulley 120.

Hereinafter, an embodiment of the sensor 400 will be described with reference to FIG. 4.

4 is a diagram illustrating a sensor according to an exemplary embodiment of the belt driving unit illustrated in FIG. 3.

Referring to FIG. 4, the sensor 400 according to an embodiment may be a photo sensor using light L to detect break of the belt 130.

That is, the sensor 400 includes a light irradiation unit 410 for irradiating the light L to the belt 130 and a light receiving unit 420 for receiving the light L reflected from the belt 130. do.

Accordingly, in the sensor 400, when the belt 130 is not broken, the light L irradiated from the light irradiation unit 410 is normally reflected from the surface of the belt 130, so that the light receiving unit 420 is provided. ) Is detected by receiving the light (L), does not generate a signal.

However, the sensor 400 does not reflect the light L irradiated from the light irradiator 410 due to the absence of the belt 130 when the belt 130 is broken. 420 does not sense the light L, and thus generates a signal.

Therefore, the sensor 400 may check whether the belt 130 is broken according to whether the light receiving unit 420 detects the light L from the light irradiation unit 410.

Another embodiment of the sensor 400 will be described with reference to FIG. 5 different from FIG. 4.

5 is a diagram illustrating a sensor according to another exemplary embodiment of the belt driver illustrated in FIG. 2.

Referring to FIG. 5, the belt driving unit 100 may further contact the belt 130 between the first pulley 110 and the second pulley 120 to provide a second second idle roller. Install 170 additionally.

Thus, the belt driving unit 100 may further include an elastic body 180 that applies an elastic force to provide the tension to the second idle roller 170. In this case, the belt driving unit 100 may further include a bracket 190 for mounting the elastic body 180.

Accordingly, the sensor 400 according to another embodiment may include a first contact portion 430 coupled to the elastic body 180 and a second coupler coupled to the bracket 190 at an upper portion of the first contact portion 430. It may have a limit switch structure including a contact portion 440.

Accordingly, when the belt 130 is not broken, the sensor 400 maintains the first and second idle rollers 170 while providing the tension to the belt 130. The second contact parts 430 and 440 are separated from each other so that no signal is generated.

However, the sensor 400, when the belt 130 is broken, the second idle roller 170 suddenly moves in the direction of the belt 130 due to the elastic force, so that the first and second contact parts 430, 440 come into contact with each other to generate a signal.

 Therefore, the sensor 400 may check whether the belt 130 is broken according to whether the first and second contact parts 430 and 440 are in contact with the movement of the second idle roller 170. .

Here, since the sensor 400 only needs to sense the movement of the second idle roller 170, the sensor 400 may be formed of an optical sensor as in the embodiment of FIG. 4. That is, the sensor 400 may receive and detect the light reflected from the second idle roller 170 while irradiating light onto the second idle roller 170.

On the other hand, although the second idle roller 170 is disclosed as a separate configuration for the function of the first idle roller 150 and the sensor 400, the second idle roller 170 is substantially functional Since the first idle roller 150 may be the same, the sensor 400 may be installed on the first idle roller 150.

In this case, when the first idle roller 150 is to be used, it is necessary to have a structure in which elastic force is provided to the first idle roller 150 from a member such as the elastic body 180.

The controller 500 is connected to the sensors 400 and the motors 140. The controller 500 receives a signal detecting whether the belt 130 is broken from the sensors 400 and transmits a control signal to the motors 140.

In detail, when the control unit 500 detects a break of any one of the belts 130 from any one of the sensors 400, the controller 500 rotates the motor 140 accordingly. Send a control signal to stop. That is, the controller 500 cuts off the driving power supplied to the motors 140.

Therefore, when any one of the belts 130 is boiled, the substrate processing apparatus 1000 detects the same through the sensors 400 and transmits the detected signal to the controller 500 so that the controller 500 ) Stops all of the motors 140 that provide the rotational force transmitted to the roller units 300 through the belts 130, whereby the substrate G that is transported on top of the roller units 300 is It can be prevented from colliding with the substrate G which is continuously transferred at the front end. As a result, the production yield of the flat panel display device manufactured from the substrate G can be improved.

The controller 500 may be further connected to the substrate processor 200. Thus, the control unit 500 stops all the injection of the chemical (C) also when the break of any one of the belts 130 is detected from the sensors (400).

As a result, the substrate processing apparatus 1000 may reduce the defect rate of the substrate G by preventing the chemical C from being excessively sprayed onto the substrate G stopped by the broken belt 130. have.

Although the detailed description of the present invention has been described with reference to the preferred embodiments of the present invention, those skilled in the art or those skilled in the art will have the idea of the present invention described in the claims to be described later. It will be understood that various modifications and variations can be made in the present invention without departing from the scope of the present invention.

The present invention described above can be used in an apparatus capable of preventing breakage of the substrate in which conveyance is carried out by transmitting the rotational force of the belts by detecting the breakage of the belts by individually installing sensors on each of the belts.

1 is a configuration diagram schematically illustrating a substrate processing apparatus according to an embodiment of the present invention.

FIG. 2 is a view of the substrate processing apparatus shown in FIG. 1 seen from above. FIG.

3 is a diagram illustrating a belt driving unit of the substrate processing apparatus shown in FIG. 1.

4 is a diagram illustrating a sensor according to an exemplary embodiment of the belt driving unit illustrated in FIG. 3.

5 is a diagram illustrating a sensor according to another exemplary embodiment of the belt driver illustrated in FIG. 2.

<Explanation of symbols for the main parts of the drawings>

G: Substrate 100: Belt drive part

110: first pulley 120: second pulley

130: belt 140: motor

200: substrate processing unit 300: roller unit

400: sensor 500: control unit

600: substrate processing apparatus

Claims (8)

A first pulley for transmitting rotational force to the roller unit for conveying the substrate; A second pulley connected to the motor providing the rotational force; A belt connecting the first and second pulleys to transfer the rotational force from the second pulley to the first pulley; A sensor installed in the belt and detecting whether the belt is broken; And And a control unit connected to the sensor and the motor and stopping the motor when a signal from the sensor is detected that the belt is broken. The belt drive device according to claim 1, wherein the sensor is an optical sensor that receives light reflected from the belt while radiating light onto the belt. The belt drive device according to claim 1, further comprising an idle roller contacting the belt between the first and second pulleys and providing tension to the belt via an elastic force. The belt driving device of claim 3, wherein the sensor detects movement of the idle roller due to a change in tension when the belt is broken. The belt driving device according to claim 4, wherein the sensor is disposed adjacent to the idle roller, and is an optical sensor that receives light reflected from the idle roller while radiating light onto the idle roller. The belt driving device as claimed in claim 4, wherein the sensor is a limit switch connected to the idle roller and switched through movement of the idle roller. A plurality of substrate processing units for performing various processes on the substrate; A plurality of roller units installed in each of the substrate processing units and transporting the substrate; First pulleys for transmitting rotational force to each of the roller units, second pulleys respectively connected to a plurality of motors providing the rotational force, and connecting the first pulleys and the second pulleys respectively to provide the rotational force. A plurality of belt drives including belts transmitting from each of the second pulleys to each of the first pulleys; A plurality of sensors installed on each of the belts to detect whether each of the belts is broken; And And a control unit connected to the sensors and the motors and stopping all of the motors when a signal for detecting the break of the belt is received from any one of the sensors. The substrate processing apparatus of claim 7, wherein the controller stops all processes of the substrate processing units when the signal connected to the substrate processing units detects a break of the belt from any one of the sensors. Device.
KR1020080085778A 2008-09-01 2008-09-01 Apparatus for driving a belt and apparatus for processing a glass including the same KR20100026677A (en)

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Application Number Priority Date Filing Date Title
KR1020080085778A KR20100026677A (en) 2008-09-01 2008-09-01 Apparatus for driving a belt and apparatus for processing a glass including the same

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Application Number Priority Date Filing Date Title
KR1020080085778A KR20100026677A (en) 2008-09-01 2008-09-01 Apparatus for driving a belt and apparatus for processing a glass including the same

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KR20100026677A true KR20100026677A (en) 2010-03-10

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103928371A (en) * 2014-04-17 2014-07-16 京东方科技集团股份有限公司 Wet etching equipment
IT201800009570A1 (en) * 2018-10-18 2020-04-18 System Ceram Spa METHOD AND MACHINE FOR DIGITAL GLASS PRINTING

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103928371A (en) * 2014-04-17 2014-07-16 京东方科技集团股份有限公司 Wet etching equipment
IT201800009570A1 (en) * 2018-10-18 2020-04-18 System Ceram Spa METHOD AND MACHINE FOR DIGITAL GLASS PRINTING
WO2020079511A1 (en) * 2018-10-18 2020-04-23 System Ceramics S.P.A. A method and machine for the digital printing of glass

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