KR20100023992A - Three-dimensional image sensing system - Google Patents

Abstract

PURPOSE: A three dimensional shape measuring system is provided to improve accuracy compared to a mirror scheme and to measure the three dimensional shape of an object regardless of the height. CONSTITUTION: A three dimensional shape measuring system comprises a work-stage(130), a plurality of projection units(110), an imaging unit(150), and a controller(140). The controller selectively operates or stops two or more of the projection units according to the shape of an object. Therefore, the three dimensional shape measuring system measures the three dimensional shape of the object using the grid image light received in the imaging unit through the turned-on projection units.

Description

Three-dimensional Image Sensing System

The present invention relates to a three-dimensional shape measuring apparatus, and more particularly to a three-dimensional shape measuring apparatus using a moire pattern.

The three-dimensional shape measuring apparatus is a device for measuring a three-dimensional shape of the measurement object by irradiating the grid image on the measurement object, receiving the grid image reflected from the measurement object and analyzing it.

However, the conventional three-dimensional shape measuring apparatus includes a projection unit for irradiating a grid image on the measurement object. However, in order to measure the three-dimensional shape on the measurement object, when the grid image is irradiated only on one side, a shadow area that cannot reach the grid image on the other side due to the protrusion of the measurement object is generated and thus is completely three-dimensional The shape was hard to grasp. To this end, since the projection unit is rotated and moved to the other side, and the grid image is irradiated again, it takes a relatively long time to measure the three-dimensional shape of the measurement object, which causes a problem of weakening the productivity of the product. .

Accordingly, the problem to be solved by the present invention is to provide a three-dimensional shape measurement apparatus that can improve the speed and accuracy of three-dimensional shape measurement.

An apparatus for measuring a three dimensional shape according to an exemplary embodiment of the present invention includes a measuring substrate, a work-stage, a plurality of projection units, an image forming unit, and a controller. The work-stage holds the measurement substrate. The plurality of projections each include a light source, a grating portion for transmitting light emitted from the light source, and a projection lens portion for forming grating image light of the grating portion on a measurement object in the measurement substrate, respectively for the measurement object. Examine the grid image in the other direction. The image forming unit receives the grid image light reflected by the measurement object. The controller selectively turns on / off at least two or more of the plurality of projection units according to the shape of the measurement object. The three-dimensional shape measuring apparatus measures the three-dimensional shape of the measurement object by using the grid image light received by the imaging unit by the two or more projection units selectively turned on.

For example, the controller may compensate for the shadow area of the measurement object by using the grid image light received by the imaging unit.

For example, the controller may replace the measured value corresponding to the shadow area with an opposite value.

For example, the lattice unit may include a liquid crystal display panel. In this case, the liquid crystal display panel may display two or more grid images. In this case, the controller may control to take a grid image while moving the light and dark portions displayed by the liquid crystal display panel of the turned-on projection unit by P / n (where P is a pitch composed of a transmission unit and a blocking unit, and n Is a natural number).

For example, the plurality of projection parts may be disposed such that a direction in which light irradiated from the light source travels and a normal line of the measurement substrate have a predetermined angle.

For example, the controller may include an operation control unit for controlling the operation of the work-stage, the projection unit, and the image forming unit, and a shape sensing unit that grasps the shape of a measurement object supported by the measurement substrate.

For example, the control unit may turn on the even number of the projection unit. In this case, it is preferable that the even number of projection units turned on are symmetrical with respect to the measurement object.

For example, the control unit may turn on two projection units when the measurement object detected by the shape detecting unit is a quadrilateral.

For example, the controller may turn on 50% or more of the plurality of projection units when the measurement object determined by the shape detecting unit is elliptical.

For example, the plurality of projections may be arranged at each vertex of the regular polygon.

An apparatus for measuring a three dimensional shape according to another exemplary embodiment of the present invention includes a work-stage, a plurality of projection units, an actuator, an imaging unit, and a controller. The work-stage fixes the measurement substrate measuring substrate which supports the measurement object. Each of the plurality of projection parts includes a light source, a grating for transmitting light emitted from the light source, and a projection lens part for forming grating image light of the grating on a measurement object in the measurement substrate, respectively, in different directions with respect to the measurement object. In order to irradiate the grid image in the vertex of the regular polygon is arranged at each vertex, the direction of the light irradiated from the light source and the normal of the measurement substrate has a certain angle.

The actuator may control the grating portion of two neighboring projection portions among the plurality of projection portions. The image forming unit receives the grid image light reflected by the measurement object. The controller selectively turns on / off at least two of the plurality of projection units according to the shape of the measurement object.

For example, the actuator can move the grid of two neighboring projections at the same time.

For example, the controller may control the projection unit, the actuator, and the imaging unit to move the lattice of the turned-on projection unit by P / n and photograph the grid image (where P is a pitch consisting of a transmission unit and a blocking unit). And n is a natural number).

For example, when the projection units adjacent to each other among the plurality of projection units are sequentially driven, the driving direction of the actuator may be reversed.

For example, the controller may include an operation control unit for controlling the operation of the work-stage, the projection unit, and the image forming unit, and a shape sensing unit that grasps the shape of a measurement object supported by the measurement substrate.

For example, the control unit may turn on two projection units when the measurement object detected by the shape detecting unit is a quadrilateral.

For example, the controller may turn on 50% or more of the plurality of projection units when the measurement object detected by the shape detecting unit has a semi-circular shape.

According to the three-dimensional shape measuring apparatus according to the present invention, at least two or more projections of the plurality of projections are arranged in a position symmetrical with each other to move the projection in the conventional three-dimensional shape measuring apparatus to capture the opposite grid image compared to the measurement The required time can be shortened, increasing the efficiency of the inspection.

In addition, since the optical paths on both sides are the same, the accuracy can be improved as compared with the conventional mirror method.

In addition, since the grating part 112 is included in the projection part 110 instead of the upper part of the measurement object A, accurate three-dimensional shape measurement is possible irrespective of the step height of the measurement object A. FIG.

In addition, when the lattice image is formed by using the liquid crystal display panel in the lattice portion, it is not necessary to provide an actuator for transferring the lattice as compared to using the actual lattice. .

In addition, when the grating is adopted in the grating portion, the actuator for driving the grating simultaneously drives the gratings formed on two adjacent projections. Therefore, the number of actuators can be reduced to half the number of projections.

In addition, the conveying direction of the actuator can reduce the time required for driving because the direction of the grid is reversed when the neighboring projection unit is sequentially driven.

As the inventive concept allows for various changes and numerous embodiments, particular embodiments will be illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to the specific disclosed form, it should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the present invention.

Terms such as first and second may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as the second component, and similarly, the second component may also be referred to as the first component.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprise" or "having" are intended to indicate that there is a feature, number, step, action, component, part, or combination thereof described in the specification, and that one or more other features It should be understood that it does not exclude in advance the possibility of the presence or addition of numbers, steps, actions, components, parts or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art.

Terms such as those defined in the commonly used dictionaries should be construed as having meanings consistent with the meanings in the context of the related art, and shall not be construed in ideal or excessively formal meanings unless expressly defined in this application. Do not.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a schematic schematic side view of a three-dimensional shape measuring apparatus according to the present invention.

Referring to FIG. 1, a three-dimensional shape measuring apparatus 100 according to the present invention includes a work-stage 130, a plurality of projection units 110, an image forming unit 150, and a controller 140. do.

The measuring substrate 120 includes a measurement object (A).

The work-stage 130 secures the measurement substrate 120.

The work-stage 130 transfers and fixes the measurement substrate 120 in the x-axis or y-axis direction. After being controlled and controlled by the control unit 140, the measuring substrate 120 is transferred and fixed, the first auxiliary light source 160 and the second auxiliary light source 170 irradiates light to the measurement target A, The entire measurement area of the measurement substrate 120 is set using the recognition mark displayed on the measurement substrate 120.

The plurality of projections 110 are arranged to irradiate light at a predetermined angle with respect to the normal of the measurement substrate 120. In addition, the plurality of projections 110 are arranged symmetrically with respect to the normal.

The plurality of projections 110 irradiates a grid image toward the measurement object A. To this end, each of the plurality of projection units 110 includes a light source 111, a grid unit 112 that transmits light emitted from the light source 111, and a grid image of the grid unit 112. And a projection lens portion 113 to form an image in A).

The light transmitted through the grating part 112 forms a grating image. To this end, the grating portion 112 includes a blocking portion (not shown) and a transmission portion (not shown). The blocking unit blocks the light irradiated from the light source 111, and the transmitting unit transmits the light. The grating portion 112 may be formed in various forms. The grating section 112 will be described later.

The projection lens 113 may be formed of, for example, a plurality of lens combinations, and focuses a grid image formed through the grating part 112 to form an image on the measurement object A disposed on the measurement substrate 120. Let's do it.

The imaging unit 150 receives grid image light reflected by the measurement object A. The imaging unit 150 includes, for example, a camera 151 and a light receiving lens unit 152. The grating image reflected by the measurement object A is captured by the camera 151 via the light receiving lens unit 152.

The control unit 140 may include an operation control unit 141 and a shape detecting unit 142. The motion control unit 140 controls the work-stage 130, the projection unit 110, and the image forming unit 150, and the shape detecting unit 142 is a measurement object located on the measurement substrate 120. Figure out the form of (A). In addition, when there is data information in advance in which the shape of the measurement object A of the measurement substrate 120 is known, the data information may be used without grasping the shape of the measurement object A. FIG.

The control unit 140 may turn on the projection unit 110 by selecting an even number, and in this case, the even number of projection units 110 turned on may be symmetrical with respect to the measurement object. When the grid image is captured only from one side, since the measurement object A is a three-dimensional shape protruding, the other side of the measurement object A may not be irradiated so that an accurate three-dimensional shape may not be measured. Therefore, by measuring again on the opposite side, a more accurate three-dimensional shape can be measured.

For example, the control unit 140 may turn on the two projection units 110 when the measurement object A identified by the shape detecting unit 142 is a quadrilateral, and the shape detecting unit 142 may be turned on. In the case where the measurement target A identified in the above is an ellipsoid, at least 50% of the plurality of projection units 110 may be turned on.

According to the three-dimensional shape measuring apparatus 100 according to the present invention, a plurality of projections 110 are arranged in a position symmetrical with each other compared to capturing the opposite grid image by moving the projection in the conventional three-dimensional shape measuring apparatus, The time required for measurement can be shortened, increasing the efficiency of the inspection.

FIG. 2 is a schematic plan view according to an exemplary embodiment of the three-dimensional shape measuring apparatus shown in FIG. 1, and FIG. 3 is a schematic plan view according to another exemplary embodiment of the three-dimensional shape measuring apparatus shown in FIG. to be.

1, 2 and 3, the projection unit 110 is arranged in a regular polygonal shape. For example, the projection unit 110 may be arranged in a square (FIG. 2), a regular hexagon (FIG. 3), or the like.

In the present exemplary embodiment, the liquid crystal display panel 112a is used for the grating portion 112 shown in FIG. When the grid image is formed using the liquid crystal display panel 112a, a graphic card (not shown) for controlling the grid image on the liquid crystal display panel 112a and a power supply for supplying power to the liquid crystal display panel 112a. It may further include a supply unit (not shown). In the case of using the liquid crystal display panel, it is not necessary to have an actuator for transferring the lattice as compared with the actual lattice.

4 and 5 are plan views illustrating the operation of the liquid crystal display panel constituting the grating portion shown in FIG. 2 or 3.

Referring to FIG. 4, the blocking unit 401 and the transmitting unit 402 are displayed on the liquid crystal display panel 102. The blocking unit 401 blocks the light, and the transmission unit 402 transmits the light, thereby projecting the grid image light onto the measurement object A.

In order to measure a precise three-dimensional shape, the pitch P is transmitted by the values obtained by dividing n equally, and the lattice image light is projected onto the measurement target A (in FIG. 5, for example, four buckets, that is, the pitch P). ) Is a figure which transfers the blocking part 401 and the permeation | transmission part 402 by the value divided by 1/4.

Therefore, it is not necessary to have an actuator for transferring the grating to the projection part.

FIG. 6 is a schematic plan view according to still another exemplary embodiment of the three-dimensional shape measuring apparatus shown in FIG. 1, and FIG. 7 is a schematic diagram according to another exemplary embodiment of the three-dimensional shape measuring apparatus shown in FIG. 1. It is a top view. In the three-dimensional shape measuring apparatus shown in FIGS. 6 and 7 and the three-dimensional shape measuring apparatus shown in FIGS. 2 and 3 and the grating portion formed in the projection, respectively, the grating 112b is used instead of the liquid crystal display panel 112a. It is substantially the same as the three-dimensional shape measuring apparatus shown in FIGS. 2 and 3 except for further including an actuator 601. Therefore, the same or similar components bear the same reference numerals, and redundant descriptions are omitted.

6 and 7, the three-dimensional shape measuring apparatus according to an exemplary embodiment of the present invention, the three-dimensional shape measuring apparatus of FIG. 2 or 3 having a grating portion 112 using the liquid crystal display panel 112a. In contrast, the grating 112b is employed. The grid 112b may be formed by, for example, printing a grid pattern on a glass plate to form a blocking portion and a transmission portion. Two gratings may be formed simultaneously on the glass plate to be used in adjacent projections.

As described above, when the grating 112b is employed, an actuator 601 for finely conveying the grating 112b is formed.

The three-dimensional shape measuring apparatus according to the present embodiment includes a plurality of projections arranged at vertices of regular polygons, and the grating 112b formed on two neighboring projections is transferred by one actuator 601. As the actuator 601, PZT can be used.

At this time, it is preferable that the driving direction of the actuator 601 is reversed when the adjacent projections among the plurality of projections are sequentially driven. In more detail, after moving the grid 112b in the direction of arrow a and projecting the grid images onto the measurement target A, the grid 112b in the neighboring projection part moves in the direction of the arrow b. Project grid images.

In more detail, the grid image light is irradiated to the measurement object A through the grid 112b, and the image forming unit receives the reflected image reflected by the measurement object a predetermined number of times (eg, 4 times). Run Thereafter, the grid image light is irradiated to the measurement object A through the grid 112b, and the image forming unit receives a reflection image reflected by the measurement object a predetermined number of times (eg, four times) of the grid. do. Similarly, grids ③ and ④ execute the same. The control unit uses a total of 16 received grid images to generate a shadow area (the area where the grid image light on the opposite side cannot reach when projecting the grid image light to one side of the measurement object because the measurement object has a three-dimensional shape). The exact three-dimensional shape of this compensated measurement object is calculated. For example, the shadow areas # 1 and ③ are compensated by using the reflection grid image values of ① and ③, and the shadow area values of the zones ② and ④ are compensated by using the values of reflection grids ② and ④. The shadow area value compensation replaces the value corresponding to the facing area.

The actuator 601 employed in the three-dimensional shape measuring apparatus according to the present embodiment simultaneously drives the gratings 112b formed on two adjacent projections. Therefore, the number of actuators 601 can be reduced to half the number of projection portions.

In addition, the conveying direction of the actuator 601 may reduce the time required for driving because the direction of the grating 112b is reversed when the neighboring projection units are sequentially driven.

In the detailed description of the present invention described above with reference to the preferred embodiments of the present invention, those skilled in the art or those skilled in the art having ordinary skill in the art will be described in the claims to be described later And various modifications and variations of the present invention without departing from the scope of the art. Therefore, the above description and the drawings below should be construed as illustrating the present invention, not limiting the technical spirit of the present invention.

1 is a schematic schematic side view of a three-dimensional shape measuring apparatus according to the present invention.

FIG. 2 is a schematic plan view according to an exemplary embodiment of the three-dimensional shape measuring apparatus shown in FIG. 1.

3 is a schematic plan view according to another exemplary embodiment of the three-dimensional shape measuring apparatus shown in FIG.

4 and 5 are plan views illustrating the operation of the liquid crystal display panel constituting the grating portion shown in FIG. 2 or 3.

6 is a schematic plan view according to yet another exemplary embodiment of the three-dimensional shape measuring apparatus shown in FIG.

7 is a schematic plan view according to yet another exemplary embodiment of the three-dimensional shape measuring apparatus shown in FIG.

<Short Description of Main Drawing Numbers>

100: three-dimensional shape measuring device 110: projection unit

111: light source 112: grid portion

112a: liquid crystal display panel 112b: grid

113: projection lens unit 120: measuring substrate

130: work-stage 140: control unit

141: motion control unit 142: shape detection unit

150: image forming unit 151: camera

152: light receiving lens unit 160: a first auxiliary light source

170: second auxiliary light source 401: blocking unit

402: transmission part

Claims (20)

A work-stage for securing the base member; A light source, a grating for transmitting the light emitted from the light source, and a projection lens portion for forming the grating image light of the grating on the measurement object in the base member, and irradiating the grating image in different directions with respect to the measurement object. A plurality of projections; An imaging unit configured to receive the grid image light reflected by the measurement object; And A control unit for selectively turning on / off at least two or more of the plurality of projection units according to the shape of the measurement object, by the two or more projection units selectively turned on 3D shape measuring apparatus for measuring the three-dimensional shape of the measurement object by using the grid image light received in the imaging unit. According to claim 1, And the control unit compensates a shadow area of the measurement object by using the grid image light received by the imaging unit. The method of claim 2, The control unit is a three-dimensional shape measuring apparatus, characterized in that for replacing the measured value corresponding to the shadow area facing. According to claim 1, And the grating includes a liquid crystal display panel. The method of claim 4, wherein And the liquid crystal display panel displays two or more grid images. The method of claim 4, wherein The control unit controls to take a grid image while moving the light and dark portions displayed by the liquid crystal display panel of the turned-on projection unit by P / n (where P is a transmission unit and a blocking unit). Pitch, and n is a natural number). According to claim 1, The plurality of projection unit is a three-dimensional shape measuring apparatus, characterized in that arranged in such a way that the direction of the light irradiated from the light source and the normal of the base member has a predetermined angle. According to claim 1, The control unit, An operation control unit controlling an operation of the work-stage, the projection unit, and the image forming unit; And And a shape detecting unit which grasps the shape of the measurement target supported by the base member. The method of claim 8, The control unit is a three-dimensional shape measuring apparatus, characterized in that for turning on by selecting an even number of the projection unit. The method of claim 9, The even number of the projection is turned on three-dimensional shape measuring apparatus, characterized in that symmetrical with each other about the measurement object. The method of claim 8, And the control unit turns on two projection units when the measurement object detected by the shape detecting unit is a quadrilateral. The method of claim 8, The control unit is a three-dimensional shape measuring device, characterized in that to turn on more than 50% of the plurality of projections, when the measurement object identified by the shape detecting unit is an elliptical shape. The apparatus of claim 1, wherein the plurality of projection units are arranged at each vertex of a regular polygon. A work-stage for fixing the measuring substrate; A light source, a grating for transmitting the light emitted from the light source, and a projection lens portion for forming the grating image light of the grating on the measurement object in the base member, and irradiating the grating image in different directions with respect to the measurement object. A plurality of projecting units arranged in a regular polygonal shape so as to have a predetermined angle between a direction in which light irradiated from the light source travels and a normal of the base member; A lattice actuator controlling movement of the lattice of two neighboring projections among the plurality of projections; An imaging unit configured to receive the grid image light reflected by the measurement object; And A grating received by the imaging unit by the two or more projection units selectively turned on, including a control unit to selectively turn on / off at least two or more of the plurality of projection units according to the shape of the measurement object Three-dimensional shape measuring device for measuring the three-dimensional shape of the measurement object using the image light. The method of claim 14, The actuator is a three-dimensional shape measuring apparatus, characterized in that for moving the grid of two adjacent projections at the same time. The method of claim 14, The control unit, The projection, the actuator and the imaging unit is controlled to move the grid of the turned-on projection by P / n to take a grid image, wherein the three-dimensional shape measuring device (wherein P consists of a transmission portion and a blocking portion Pitch, and n is a natural number). The method of claim 16, 3. The apparatus of claim 3, wherein the driving directions of the actuators are opposite when the adjacent projections among the plurality of projections are sequentially driven. The method of claim 14, The control unit, An operation control unit controlling an operation of the work-stage, the projection unit, and the image forming unit; And And a shape detecting unit which grasps the shape of the measurement target supported by the base member. The method of claim 18, And the control unit turns on two projection units when the measurement object detected by the shape detecting unit is a quadrilateral. The method of claim 18, The controller may be configured to turn on at least 50% of the plurality of projection units when the object to be detected determined by the shape detecting unit has a semicircular shape.

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