KR20100019156A - Air knife apparatus - Google Patents

Abstract

PURPOSE: An air knife apparatus which increase ejection efficiency of dry air is provided to reduce washing solution from a substrate by ejecting air through an ejection tip. CONSTITUTION: An air knife apparatus which increase ejection efficiency of dry air comprises a main body(2), first and second chamber parts(4,6), an ejecting unit(8), and first and second ejection slits(8a,8b). The main body has an air inlet. The first chamber part is received with drying air(A) from the air inlet. The second chamber part is apart from the first chamber part. The ejecting unit is composed of a plurality of the blade(B1,B2,B3) for ejection. The first and second ejection slits have first and second ejection tip. The first ejection tip ejects air in order to dry the first chamber part. The second ejection tip ejects air in a different direction with the first ejection tip.

Description

Air knife apparatus

The present invention relates to an air knife device, and more particularly, to an operation of drying a substrate for a flat panel display device, and in particular, an air knife that can easily dry a substrate while injecting drying air in a dual spray method. Relates to a device.

In general, an air knife is used as a means for removing and drying the remaining cleaning liquid (eg, deionized water) that adheres to the surface of the substrate during the cleaning operation of the flat panel display element while blowing it with the drying air.

As such, when drying the substrate using an air knife, it is very important to spray drying air at a predetermined pressure and direction toward the substrate so that the remaining cleaning liquid can be separated and removed from the substrate smoothly.

For example, if the remaining cleaning liquid is deposited on the cleaned substrate, water spots may occur on the surface of the substrate, which may be a factor in deteriorating the cleaning quality.

Briefly describing the structure of the air knife, the discharge unit is installed in the lower portion of the rectangular body is configured so that the drying air introduced into the main body can be injected toward the substrate through the discharge unit.

In addition, the discharge portion is of a single injection type having one discharge slit, or a dual injection type having two discharge slits (front and rear discharge slits).

In particular, among the two spray types, the dual spray type is dried in such a manner that the cleaning liquid of the substrate is first removed while blowing into the discharge slits on the front side, and then again blown out again by the second discharge slits on the rear side. Since the work can be performed, the effect of installing two air knifes (single injection type) with one air knife (dual injection type) can be obtained.

However, the two discharge slits provided in such a dual injection type air knife mostly have a simple discharge structure (ejection tip) for injecting drying air in the same injection direction (beveled or standing) toward the substrate.

According to such a discharge tip structure, satisfactory removal efficiency cannot be expected when the cleaning liquid is separated and removed first and second while injecting drying air toward the substrate to the discharge slits on the front and rear sides.

For example, when the drying air is sprayed in the same spraying direction, which is almost erected toward the substrate surface by the discharge slits on the front and rear sides, the phenomenon that the cleaning liquid springs up from the substrate, especially when the cleaning liquid is first removed, It can easily occur and cause water spots on the substrate during the drying operation.

In addition, when the front and rear discharge slits spray the drying air in the same direction inclined toward the substrate surface, in particular, the injection force is lost during the secondary removal, and the cleaning liquid may be abnormally removed.

In addition, when the discharge slits of the front and rear sides inject the drying air in the same direction, irregular air flows (eg, vortex phenomena) are easily formed in the space therebetween, which may be a factor of lowering the removal force of the cleaning liquid. .

The above problems are because the discharge slits on the front and rear sides provided to the air knife have a discharge structure (discharge tip) for injecting drying air only in the same direction.

The present invention has been proposed to solve the above problems,

SUMMARY OF THE INVENTION An object of the present invention is to provide an air knife device that can greatly improve the spraying efficiency of drying air when performing a drying operation of a substrate by a dual spray method.

In order to achieve the object as described above,

A main body having an air inlet therein;

A first chamber part formed inside the main body to receive drying air from the air inlet;

A second chamber part spaced apart from the first chamber part;

A discharge part comprising a plurality of discharge blades and providing a passage for injecting drying air to the outside of the first chamber part and the second chamber part;

A first discharge slit formed inside the discharge unit to have a first discharge tip capable of injecting drying air in the first chamber part in one direction;

A second discharge slit formed inside the discharge part to have a second discharge tip capable of injecting drying air of the second chamber part in a direction different from the first discharge slit;

It provides an air knife device comprising a.

The present invention can easily remove and dry the cleaning liquid on the substrate while injecting the drying air to the discharge portion provided on the main body side in a dual injection method.

In particular, the first discharge slit and the second discharge slit provided on the discharge side are formed to have a discharge tip capable of injecting drying air in different directions toward the substrate.

According to this structure, the cleaning liquid can be more easily removed from the substrate while blowing the drying air in different directions toward the surface of the substrate when the cleaning liquid of the substrate is blown into the primary and secondary.

Therefore, the present invention can greatly increase the removal force of the cleaning liquid by the action of the first and second discharge slits when drying the substrate while injecting the drying air in a dual injection method using one air knife.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

Embodiments of the present invention are described to the extent that those of ordinary skill in the art can practice the present invention.

Therefore, since the embodiments of the present invention may be modified in various other forms, the claims of the present invention are not limited to the embodiments described below.

1 is a view schematically showing a preferred installation state of the air knife device according to an embodiment of the present invention, 2 denotes a main body, the main body 2 is a drying chamber D1 as shown in the figure And it can be installed in a conventional substrate drying apparatus (D) having a conveying means (D2).

The transfer means (D2) is for transferring the substrate (G) from one side to the other side inside the drying chamber (D1) can be made of a conventional roller conveyor type structure consisting of a plurality of transfer rollers (R). have.

That is, the main body 2 is installed in the transfer section of the transfer means D2 as shown in FIG. 1 so as to correspond to one surface (upper surface) of the substrate G in the drying chamber D1.

The main body 2 is formed in a general rectangular type extending left / right, and may be installed in the drying chamber D1 of the substrate drying apparatus D as follows.

For example, based on FIG. 2, it may be installed to be inclined within a predetermined inclination angle Q1 range from any vertical reference line K1 corresponding to the substrate G transfer section. The inclination angle Q1 may be formed in a range of approximately 30 degrees to 38 degrees.

If the inclination angle Q1 is greater than the above range, the injection pressure is easily lost when spraying the drying air A toward the substrate G to the first and second chamber portions 4 and 6 to be described later. If it is difficult to obtain a sufficient removal efficiency and is smaller than the inclination angle Q1, the residual cleaning liquid W (eg, deionized water) buried in the substrate G may be irregularly caused by the spraying pressure of the drying air A. Splashing may occur.

Inside the main body 2 is provided an air inlet (H) for supplying the drying air (A, for example, Clean Dry Air) from the outside.

The air inlet (H) is formed extending from one end of the main body 2 toward the other end.

Although not shown in the drawing, the air inlet (H) is connected to the tubular body so that the drying air (A) is supplied from a conventional air supply device used for drying the substrate (G), the supply line of the drying air (A) On top of this, various fluid supply and control peripherals such as a flow meter, a pressure gauge and a filter are installed.

The air knife device according to the embodiment of the present invention includes a first chamber part 4 and a second chamber part 6.

The first chamber part 4 and the second chamber part 6 are formed inside the main body 2 so as to receive the drying air A from the air inlet H.

That is, the first chamber portion 4 is composed of a chamber of a size that can contain a predetermined amount of the drying air (A) of the air inlet (H) as shown in FIG.

The first chamber part 4 is formed at one side with the air inlet H therebetween inside the main body 2.

And, the second chamber portion 6 is made of a chamber of a size that can hold a predetermined amount of the drying air (A) of the air inlet (H), as shown in Figure 2, the air inside the body (2) It is spaced apart from the first chamber part 4 with the inlet port H therebetween.

The discharge part 8 corresponding to the said 1st chamber part 4 and the 2nd chamber part 6 is provided in the lower side of the main body 2.

The discharge part 8 is provided by a plurality of blade couplings to provide a passage for injecting the drying air A of the first and second chamber parts 4 and 6 to the outside.

That is, as shown in FIGS. 2 and 3, the discharge part 8 includes a first discharge blade B1 positioned between the first chamber part 4 and the second chamber part 6, and A second discharge blade B2 disposed to face one surface of the first discharge blade B1 to form a passage, and a second discharge blade B2 disposed to face the other surface of the first discharge blade B1; It may comprise a third discharge blade (B3) for forming a.

The discharge blades B1, B2, and B3 are each formed in the shape of a long blade having a length corresponding to the length of the main body 2, and the first discharge blade B1 is as shown in FIG. A lower portion and one side of the partition wall 2a formed between the first and second chamber portions 4 and 6 are installed on the main body 2 side in a connected state.

The second and third ejection blades B2 and B3 are installed on the main body 2 in a state in which they are disposed to correspond to one surface and the other surface of the first ejection blade B1.

The discharge part 8 is, for example, so that pressure is not lost between the engagement gaps of the first, second and third discharge blades B1, B2, and B3 during the injection of the drying air A. Although not shown in the drawing, it is sealed in a conventional manner (eg, sealing material).

Meanwhile, the air knife device according to the embodiment of the present invention includes a first discharge slit 8a and a second discharge slit 8b.

The first discharge slit 8a and the second discharge slit 8b are formed to spray drying air A in different directions toward the substrate G from the inside of the discharge portion 8.

That is, as shown in FIGS. 2 and 3, the first discharge slit 8a is formed on the side of the passage between the first discharge blade B1 and the second discharge blade B2, and the second discharge slit 8b may be formed at a passage side between the first discharge blade B1 and the third discharge blade B2.

One end (upper end) of the first and second discharge slits 8a and 8b communicates with the first and second chamber parts 4 and 6, respectively, and the other end (lower end) is gradually wider when proceeding downward. This is made narrower (see Figure 2).

In addition, between the left and right ends of the first and second discharge slits 8a and 8b, as shown in FIG. 3, the reinforcement plates 8c are spaced apart from each other.

The reinforcement plates 8c serve to stably support the discharge blades B1, B2, and B3 so that their shape does not change when they are combined in an overlapping state as shown in FIG.

That is, the discharge ends of the first and second discharge slits 6a and 6b are parallel to each other while being extended in a slit form as shown in FIG. 4 by the discharge blades B1, B2 and B3. It is located in one state and has a discharge end divided into a plurality by said reinforcing plates 6c.

The first and second discharge slits 8a and 8b are set to have a first discharge tip T1 and a second discharge tip T2 capable of injecting drying air A in different directions.

The first and second discharge tips T1 and T2 are tips capable of spraying the drying air A in a direction in which the cleaning liquid W can be smoothly removed when the substrate G is dried in a dual spray method. (tip) form.

That is, the first discharge tip T1 may have a tip shape in which an end of the second discharge blade B2 is higher than an end of the first discharge blade B1 (see FIG. 2).

According to this tip structure, as shown in FIG. 2, the drying air A is transferred to the substrate G through the first discharge slit 8a in a state in which the main body 2 is inclined in the inclination angle Q1. When spraying to the side can be sprayed in a state inclined downward toward the front of the main body (2).

The second discharge tip T2 may have a tip shape in which the end of the third discharge blade B3 is positioned at a point substantially equal to or slightly higher than the end of the first discharge blade B1. Reference)

According to such a tip structure, as shown in FIG. 2, when the drying air A is sprayed onto the substrate G side through the second discharge slit 8b, the tip is almost erected downwardly of the main body 2. Spray in vertical direction.

The auxiliary chambers C1 and C2 as shown in FIG. 2 may be formed in the first and second discharge slits 8a and 8b, respectively.

As such, when the auxiliary chambers C1 and C2 are provided, the interior of the auxiliary chambers C1 and C2 when the drying air A is introduced into the first discharge slit 8a or the second discharge slit 8b. It can be sprayed in a state that is uniformly contained in the space.

Therefore, the drying air (A) is more uniform by securing a space (chamber) in which a predetermined amount can be uniformly contained before the drying air (A) is injected into the first and second discharge slits (8a, 8b). Can be sprayed. If the auxiliary chambers C1 and C2 do not exist as described above, a gap may occur in the length direction of the first and second discharge slits 8a and 8b so that the drying air A may be unevenly sprayed. have.

Therefore, the air knife device of the present invention having the above-described structure, when the substrate (G) is transferred by the transfer means (D2) in the drying chamber (D1) as shown in Figs. The drying operation of the substrate G may be performed by dual spraying while spraying drying air A in different directions by the first and second discharge slits 8a and 8b.

That is, the first discharge slit 8a is supplied with the drying air A from the first chamber part 4 in a state located in front of the second discharge slit 8b. The remaining cleaning liquid W of the substrate G can be blown primarily while spraying in a state inclined toward the front lower side of the main body 2.

In addition, the second discharge slit 8b receives the drying air A from the second chamber part 6 in a state located behind the first discharge slit 8a, and thus, the substrate as shown in FIG. 2. (G) The residual washing liquid W can be blown in the secondary while spraying in a substantially standing state toward the surface.

Therefore, in the drying operation, the first discharge slit 8a and the second discharge slit 8b are sprayed twice in the different spraying directions toward the substrate G (primary, second). The washing liquid W can be removed over the car).

Particularly, when the drying operation is performed in the dual spray method, the structure in which the drying air A is sprayed in different directions by the first discharge slit 8a and the second discharge slit 8b as described above is as follows. There is an advantage.

That is, when the drying air A is sprayed in a direction inclined toward the surface of the substrate G by the first discharge slit 8a, the cleaning area is enlarged, so that a large amount of the cleaning liquid W is removed during the first removal. Can be removed from (G).

In addition, when the drying air A is sprayed in the direction substantially upright toward the surface of the substrate G by the second discharge slit 8b, it is possible to prevent the loss of the injection pressure. The removal force of the residual washing | cleaning liquid W which exists can be raised further.

In the above description, the air knife device is installed to correspond to one surface (upper surface) of the substrate G in the transport section of the transport means D2 as shown in FIG. 1. It is not limited to.

For example, in order to correspond to one surface (upper surface) and the other surface (lower surface) of the substrate G in the transport section of the transport means (D2), as shown in FIG. In addition, although not shown in the figure, it may be provided at one or more points within the transfer section of the substrate (G).

According to such a structure, a drying operation can be performed, spraying drying air A at one or more points toward the one surface and the other surface of the board | substrate G during the transfer of the board | substrate G.

Air knife device according to an embodiment of the present invention, may further comprise a tip adjusting means 10 as shown in FIG.

The tip adjusting means 10 is configured to set the shape of the first and second discharge tips T1 and T2 in various types while adjusting the positions of the discharge blades B1, B2 and B3. .

To this end, in the present embodiment, as shown in FIG. 6, the tip adjusting means 10 includes first and second adjusting screws 12 and 14, and screws of the adjusting screws 12 and 14 are rotated in the forward and reverse directions. The shape of the tip can be changed while adjusting the height positions of the second and third ejection blades B2 and B3 in an adjusting manner.

The first and second adjusting screws 12 and 14 have a conventional screw structure having a threaded portion S1 having a thread formed on an outer surface thereof and a head portion S2 formed at one end of the threaded portion S1. Is done.

Step portions S3 are formed at one side of the screw portions S1 of the first and second adjustment screws 12 and 14, respectively, and the step portions S3 are formed on the outer surface of the main body 2. Fit on the side

According to this structure, the first and second adjustment screws 12 and 14 can be fixed to the main body 2 side in a state capable of forward / reverse rotation about an axis.

The screw portion S end of the first adjusting screw 12 is fastened to one side of the second discharge blade B2 by screwing, and the screw portion S1 end of the second adjusting screw 14 is the third. It is fastened by screwing one side of the discharge blade (B3).

An extension part G1 as shown in FIG. 6 is formed on one side of the second and third discharge blades B2 and B3, and a groove part G2 corresponding to the extension part G1 is formed on the main body 2 side. ) Is formed so that the extension portion G1 is fitted to the groove portion G2 side, respectively.

As such, when the extension part G1 and the groove part G2 are fitted to each other, even if the height positions of the second and third discharge blades B1 and B2 are changed on the main body 2 side, the first and the second parts are changed. The inside of the two chamber portions 4 and 6 can be kept in a sealed state.

The coupling gap between the extension part G1 and the groove part G2 may be, for example, by attaching a normal sealing material G3 (eg, a rubber ring) so that drying air A is not lost to the outside through the coupling gap. It is good to seal.

According to the structure of the tip adjusting means 10, the second and third discharge blades (B2, B3) by the forward / reverse rotation of the first and second adjustment screws (12, 14) up / down. The position can be adjusted downward.

Therefore, for example, while changing the tip shape of the first and second discharge tips (T1, T2) to the symmetrical state as shown in Figs. 7 and 8 or the asymmetrical state as shown in Figs. The spraying direction of the drying air A may be variously set in the same or different directions.

According to the action of the tip adjusting means 10, it is possible to easily set the spraying direction of the drying air (A) in a state consistent with this according to the working conditions during the drying operation of the substrate (G) further improved drying quality And work compatibility is achieved.

In addition, the tip adjustment means 10 is not limited to the structure of the screw adjustment method as described above.

For example, as shown in FIGS. 11 and 12, the height and height of the second and second discharge blades B2 and B3 are pushed or pulled using a driving source such as the motor M1 or the cylinder M2 to adjust the height position. You can also configure this to be possible.

Besides, although not shown in the drawings, various driving schemes (manual and automatic) that satisfy the object of the present invention can be variously implemented.

1 is a view schematically showing a preferred installation state of the air knife device according to an embodiment of the present invention.

2 is a view for explaining the detailed structure of the air knife device according to an embodiment of the present invention.

3 is a view for explaining the detailed structure of the discharge portion of the air knife device according to an embodiment of the present invention.

4 is a view schematically showing the end structure of the first discharge slit and the second discharge slit of the air knife device according to the embodiment of the present invention.

5 is a view for explaining another installation state of the air knife device according to an embodiment of the present invention.

6 is a view for explaining the structure of the tip adjusting means of the air knife device according to an embodiment of the present invention.

7 to 10 are views for explaining the operation of the tip adjusting means of FIG.

11 and 12 are views for explaining another structure of the tip adjusting means of FIG.

[Description of Symbols for Main Parts of Drawing]

2: main body 4: first chamber portion 6: second chamber portion

8: discharge part 10: tip adjusting means G: substrate

W: Washing liquid A: Drying air 8a: First discharge slit

8b: second discharge slit T1: first discharge tip T2: second discharge tip

B1: 1st discharge blade B2: 2nd discharge blade B3: 3rd discharge blade

Claims (9)

A main body having an air inlet therein; A first chamber part formed inside the main body to receive drying air from the air inlet; A second chamber part spaced apart from the first chamber part; A discharge part comprising a plurality of discharge blades and providing a passage for injecting drying air to the outside of the first chamber part and the second chamber part; A first discharge slit formed inside the discharge unit to have a first discharge tip capable of injecting drying air in the first chamber part in one direction; A second discharge slit formed inside the discharge part to have a second discharge tip capable of injecting drying air of the second chamber part in a direction different from the first discharge slit; Air knife device comprising a. The method according to claim 1, The first chamber portion and the second chamber portion, It consists of a chamber having a size that can be contained a certain amount of drying air of the air inlet, One side of each chamber is connected to the air inlet, the other side is the air knife device connected to the first discharge slit or the second discharge slit. The method according to claim 1, The discharge portion, A first discharge blade positioned at a boundary point between the first chamber portion and the second chamber portion below the main body; A second ejection blade disposed to correspond to one surface of the first ejection blade to form a passage of the first ejection slit between them; A third ejection blade disposed to correspond to the other surface of the first ejection blade to form a passage of the second ejection slit between them; Air knife device comprising a. The method according to claim 1, The first discharge tip, Air knife device, characterized in that formed in the form of a tip (tip) that can inject the drying air in the direction inclined toward the substrate surface. The method according to claim 1, The second discharge tip, Air knife device, characterized in that formed in the form of a tip (tip) that can inject the drying air in the vertical direction toward the substrate surface. The method according to claim 1, The air knife device, And a tip adjusting means for adjusting a tip shape of the first discharge tip or the second discharge tip while changing the discharge blade position of the discharge portion. The method according to claim 6, The tip adjusting means, Adjusting the tip shape to at least one type while changing the height of the blade for discharging so that the end positions of the discharging blades positioned with the first discharge tip or the second discharge tip interposed therebetween are symmetrical or asymmetrical. Air knife device made possible. The method according to claim 6, The tip adjusting means, Air knife device is set to adjust the height position while pushing or pulling the discharge blades using a screw or the power of the motor or cylinder. The method according to claim 1, The main body, It is installed to be inclined within a predetermined inclination angle range from any vertical reference line corresponding to the transfer direction of the substrate, The angle of inclination is an air knife device, characterized in that consisting of 30 to 38 degrees range.

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