KR20100012973A - Material managing system of equipment for manufacturing semiconductor - Google Patents

Abstract

The present invention relates to a logistics management system of a semiconductor manufacturing facility, the present invention includes a transmission and reception unit 10 provided in the run box 100; A plurality of reader units 20 for transmitting and receiving radio information to and from the transmission and reception unit 10; A relay unit (30) for collecting and filtering wireless data from the plurality of reader units (20); The control box 40 is configured to calculate and display the position of the run box 100 so that the position of the run box 100 can be accurately tracked in real time during the process, thereby ensuring stable process performance and economic process management. To make it possible.

Description

Logistics management system of semiconductor manufacturing equipment

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a logistics management system of a semiconductor manufacturing facility. The present invention enables precisely checking the position of a run box in which a plurality of wafers are mounted on a process line in real time, thereby precisely managing run boxes during process execution. The present invention relates to a logistics management system of a semiconductor manufacturing facility that enables a user to visually check a waiting time before a box is put into a process, thereby preventing a process error due to the waiting time exceeding.

In the semiconductor manufacturing process, a wafer cassette or a run box which allows a plurality of wafers to be mounted is generally defined as one lot, and the semiconductor process is performed in such a lot unit. It can be moved automatically or manually by belt or engineer.

Recently, however, inter-process movement is performed in a run box unit to accommodate the wafer cassette in order to protect the plurality of wafers mounted on the wafer cassette from the outside.

However, when a lot is moved by an engineer, the process may be delayed because it cannot find a lot to perform a specific process, and the whereabouts may not be found. In particular, as the waiting time of the lot is very delayed in a specific process facility, the process execution time is exceeded, and thus, there is an uneconomical problem of completely removing the film formed on the wafer in the previous process and performing the process again from the beginning.

Accordingly, the present invention is to solve the above problems, the present invention has a main object to provide a logistics management system of a semiconductor manufacturing equipment to enable accurate tracking of the logistics of the lot unit moving during the process in real time.

In addition, the present invention provides a logistics management system of the semiconductor manufacturing equipment to prevent the process rework and process errors by avoiding waiting over the set time by allowing the engineer to visually check the process stall time of the lot unit logistics. There is another purpose to provide.

Logistics management system of the semiconductor manufacturing equipment of the present invention for achieving the above object is a transmission and reception unit provided in the run box; A plurality of reader units for transmitting and receiving radio information with the transmitting and receiving unit; A relay unit for collecting and filtering wireless data from the plurality of reader units; It is characterized in that the configuration comprises a control unit for calculating and displaying the position of the run box.

According to the above configuration, the present invention enables accurate tracking of the run box on which a plurality of wafers are mounted while moving the process in real time, thereby enabling more precise management of the run box and stable process performance.

In addition, the present invention enables the human eye to check the process waiting time of the run box so that process rework or process failure due to excessive process waiting time can be prevented in advance.

The present invention is for tracking the location of a run box that moves a lot unit logistics during the semiconductor manufacturing process.

Inside the FAB, where semiconductor manufacturing processes are carried out, are equipped with facilities for performing various processes, which are automatically or manually supplied with lot boxes of run boxes. The run box can be moved automatically or manually.

The semiconductor manufacturing process performs a process using a lot of run boxes that accommodate a plurality of wafers. At this time, the process progress information of the logistics is obtained from the run box that is performing the process or is waiting to perform the process. It is very important to proceed.

In order to grasp the progress of the logistics process, most of the bar code is attached to the present box.

 Hereinafter, a management system of a semiconductor manufacturing apparatus according to the present invention will be described with reference to the accompanying drawings.

1 is a block diagram schematically illustrating a management system of a semiconductor manufacturing facility according to the present invention.

As shown in the figure, the management system for semiconductor manufacturing facilities according to the present invention is provided in units of fabs (F, FAB) in which various semiconductor manufacturing processes are performed.

The inside of the fab is provided with a large number of run boxes 100 to move and wait, these run boxes 100 are the most prominent feature of the present invention to be checked in real time by the management system of the present invention.

The management system of a semiconductor manufacturing facility according to an embodiment of the present invention is largely composed of a transmission / reception unit 10, a plurality of reader units 20, a relay unit 30, and a control unit 40.

The present invention is applied to the radio frequency identification (hereinafter referred to as "RFID") technology that is a representative radio recognition technology.

RFID is a field of automatic recognition such as barcode, magnetic sensor, IC-CARD, etc., and is a state-of-the-art technology for wirelessly recognizing data stored in a microchip using microwave or long wave.

RFID does not require the reader to directly contact the microchip or scan with the reader at a line of sight to obtain data stored in the microchip, and has the advantage of transmitting a large amount of data.

RFID is a technology that automatically recognizes an article equipped with an electronic tag when it enters the reader's recognition area by using radio frequency and reads information about the article. It is used in various applications such as inventory management and supply chain management.

The RFID system includes an electronic tag attached to the logistics and embedded with detailed information, an RFID reader that receives the information of the electronic tag using RF communication, an information server that collects information from the RFID reader, and builds a database. It is composed of ONS (Object Name Server) that connects and builds wide network.

As described above, the run box 100 is a logistics movement means for accommodating a plurality of wafers, and the run box 100 forms a movement unit for moving logistics in each process.

The run box 100 is composed of a combination of a box main body and a cover provided to open and close the inside of the box main body, and a display for displaying a bar code and process progress information of the run box on a run box is usually displayed. It is to be provided.

The barcode formed in the run box 100 is checked by a plurality of bar code readers (BCRs) provided in each process facility in the process line, except that the barcode is checked using a BCR located closest to each process line. I am trying to.

The run box 100 allows the process execution step to be checked using a BCR so that the information of the run box 100 can be checked through a bar code, and the process progress information of the run box 100 can be visually confirmed through the display. do.

The present invention is equipped with a transmission and reception unit 10 to enable the real-time tracking of the location of the run box 100 in each run box 100, which is a logistics movement means when performing a semiconductor manufacturing process.

Transmitting and receiving unit 10 according to an embodiment of the present invention provided for tracking the location of the run box 100 is mounted to the run box 100 is provided to transmit and receive a unique communication frequency signal, such a frequency signal and At the same time, it is possible to simultaneously transmit and receive specific data recorded on an existing barcode.

Transmitting and receiving unit 10 is provided so that the communication data is stored in each of the run box 100, the data stored in this way can communicate with each other, the power supply to the display in the existing run box 100 for this data communication The transmitting and receiving unit 10 is provided as close as possible to the power supply battery (not shown) provided for supplying, so that power can be supplied from the power supply battery.

It is most preferable to use the RFID tag of the RFID system as the transmission / reception unit 10 as described above, and it is more preferable to be integrally fixed to the run box 100 or provided as a card type detachable from the run box 100. .

On the other hand, the RFID tag includes a memory unit for storing an identification number unique to the run box 100, a communication unit for wirelessly transmitting and receiving communication frequencies, a transmission / reception module unit for modulating and demodulating a radio frequency signal, a controller for controlling a wireless transmission and reception operation, and the like. It is possible to have a configuration consisting of.

The reader unit 20 according to the embodiment of the present invention is configured to perform wireless data communication with the transmission / reception unit 10 of the run box 100, and transmits radio waves to obtain information stored in the transmission / reception unit 10. It receives a radio wave transmitted from the transmission / reception unit 10 and reads information.

The reader unit 20 has a function of enabling communication with the transmission / reception unit 10 by using RF (Radio Friquency) energy, and receives data included in the signal by receiving a wireless communication signal generated from the transmission / reception unit 10. Function to read.

Unlike the transceiving unit 10 provided in each run box 100, the reader unit 20 is provided as a plurality at a predetermined angle or a corresponding position to the inside of the fab in which the semiconductor process is performed, especially to the outside. Make the whole of the inside of the communication range possible.

Therefore, even if the inside of the fab is divided into a plurality of process lines by partitions, the RF communication frequency can pass through these walls, so that the communication frequency signal generated from the transmission / reception unit 10 can be safely transmitted to the reader unit 20. .

The reader unit 20 is more preferably applied to the RFID reader in the RFID system to enable RF wireless data communication with the transmission and reception unit 10.

At this time, the reader unit 20 includes an RF transmission / reception module for transmitting and receiving the unique communication address or frequency information of the run box 100 from the transmission / reception unit 10, a memory unit for storing the received information, and a controller for controlling the information transmission / reception operation. It consists of a configuration that includes.

The leader unit 20 is provided with a plurality of the outside from the inside of the fab, it is most preferable to be arranged in a configuration that conforms to each other.

Meanwhile, the relay unit 30 according to the embodiment of the present invention is configured to collect and filter wireless data from the plurality of reader units 20.

The relay unit 30 may be connected to each of the reader units 20 by wireless or wired, but it is more preferable that the relay unit 30 is connected by wire.

The control unit 40 makes it possible to detect the position of the run box 100 using the information collected from the relay unit 30.

The detected position of the run box 100 enables visual confirmation of the position through the monitor 41 provided in the control unit 40.

In order to monitor the run box 100, it is most preferable that the control unit 40 has a map already stored in the same structure as the inside of the fab.

Meanwhile, the control unit 40 calculates a check angle of the run box 100 checked by the plurality of reader units 20 from the transmission / reception units 10 of the run box 100 to determine the position of the run box 100. The location of the run box 100 can be checked in various other ways.

Such a control unit 40 may be connected to a host computer that receives and processes various data and a network while controlling the entire process during the semiconductor manufacturing process, so that the control unit 40 may be provided to be connected to an existing process control communication system.

In addition, the process performance information is stored in the control unit 40 in association with the communication system of the semiconductor process line, and the run box 100 is called through the control unit 40 to check the position information. .

In particular, the run box 100 of the present invention is provided with a counter unit 50 such as a counter or a timer that counts the process waiting time of the run box 100 in addition to the transmission / reception unit 10, and counts from a process step that was previously performed. The waiting time can be visually confirmed by the engineer.

2 is a front view illustrating a counter unit in a management system of a semiconductor manufacturing facility according to the present invention.

The counter unit 50 is a structure provided so that the waiting time of the run box 100 may be counted. Whether the run box 100 is performing a process in the process line or is waiting for the process may be determined based on whether the cover 120 is opened from the box body 110 of the run box 100.

Figure 3 shows a configuration specifically illustrating the counter unit of the present invention.

As illustrated, the switch 51 is a surface facing each other at the front end of the cover 120 that is opened and closed from the box body 110 of the run box 100 so that the power is turned on / off according to the opening and closing of the cover 120. The switch 51 allows the standby time to be counted by the display means 52.

That is, the count time displayed through the display means 52 in the counter unit 50 is achieved only when the cover 120 is locked to the box body 110.

The counter unit 50 may display the count time by the number in the display means 52, but may also be provided in a configuration in which the color is changed so that the naked eye can check more visually according to the waiting time.

On the other hand, although the position of the display means 52 is not limited, it is most preferable to be provided in front of the cover 120.

According to the configuration described above will be described the location tracking process of the run box 100 using the management system of the present invention.

The present invention is to enable the location of all the run box 100 in the fab in real time during the semiconductor manufacturing process.

The semiconductor manufacturing process is performed in units of lots in the fab, and for this purpose, a large number of run boxes 100 are provided during the process.

In this case, unique information is input to the run box 100 by a barcode, and the process progress state of the run box 100 is displayed through a display.

During the process, the plurality of reader units 20 receive wireless communication signals through the transmission / reception units 10 mounted in each run box 100, and the received signals received by the reader units 20 are relay units 30. Are collected).

Since a unique wireless communication frequency is generated through the transmission / reception unit 10 of each run box 100, the reader unit 20 receives the same number of communication frequencies as the number of run boxes 100.

Information collected in the relay unit 30 checks and confirms the positions of the run boxes 100 by various operations or calculations in the control unit 40, and the position of the run boxes 100 is determined by the control unit 40. In order to be displayed to the naked eye by the engineer through the monitor (41).

That is, the monitor 41 stores the map reproducing the internal structure of the fab as it is so that the positions of the respective run boxes 100 may be displayed by calculation or calculation of information collected from the control unit 40 to the relay unit 30. To make it possible.

In addition, if the process progress information of the run box 100 is also received through the transmission and reception unit 10 at the same time, the control unit may not directly check the display of the run box 100 where the run box 100 should be moved or the process. Since the monitor 41 of FIG. 40 can be easily understood, management of the run box 100 by an engineer becomes very easy.

In particular, some of the semiconductor manufacturing processes, that is, KLA, CD, TOX, etc. are selectively performed, and thus, these process facilities do not include a BCR for recognizing barcodes mounted on the run box 100. In the process, the position of the run box 100 is not confirmed only by the system network.

However, since the reader unit 20 and the relay unit 30 of the present invention receives and collects the location information of the run boxes 100 in the fab in real time, it is always possible to safely manage.

Therefore, even if a case where the whereabouts of the run box 100 is not found during the process is performed, the position is always tracked in real time according to the present invention, so that the execution of the process is delayed or a process error occurs because the run box 100 is not found. Can be prevented in advance.

For example, if there are many run boxes 100 already waiting in a subsequent step in moving the run box 100 to a subsequent step, it is difficult to place the run box 100 in the process waiting line again. Therefore, when the run box 100 which has just finished the previous process is placed in a position other than the subsequent process line, when the subsequent process is performed on the membrane, the run box 100 cannot be found before, thus delaying the process. There is.

In addition, if the subsequent process fails to proceed in time, the run box 100 has a very serious problem that must proceed with the previous process from the beginning again. For example, in the case of a metal deposition process, if the metal process is not progressed from a previous process within a predetermined time, a process error occurs and a problem arises in that the film quality must be formed again from the beginning after completely removing the film quality formed in the previous process. Therefore, when the location of the run box 100 is tracked in real time through the present invention, the worst situation of exceeding the process waiting time can be prevented in advance, thereby providing more stable process performance.

On the other hand, the run box 100 of the present invention is provided with a counter unit 50 for visually checking the process waiting time of the run box 100 in addition to the transmission and reception unit 10 for the location tracking.

Therefore, when the locked state covering the cover 120 from the box body 110 of the run box 100 is completed, the process of the wafers is completed and ready to be transferred to the subsequent process, so that the box body 110 and the cover 120 are separated. The counter starts to be made by the switch 51 provided as follows.

That is, as the cover 120 is locked to the box body 110, the switch 51 is turned on and starts to counter, and the counter may be displayed on the display means 52 as a number. 52 can also be displayed in a configuration in which the color changes according to the counter time.

In the process of performing the semiconductor process in a lot unit, the cover 120 is opened from the box body 110 of the run box 100 to draw out the wafer mounted therein. At this time, in the run box 100 while the cover 120 is opened and closed, the time that is counted while the switch 51 is provided on the corresponding surface of the box body 110 and the cover 120 to face each other is displayed on the display means ( 52).

The wait time count by the counter unit 50 becomes a reset state at the moment the cover 120 is opened during the process, and the wait time starts counting from the moment the cover 120 is closed.

The count number or time counted can be easily checked by the engineer through the display means 52 or the color can be changed according to a predetermined time so that the waiting time of the run box 100 can be easily confirmed.

Thus, if the waiting time of the run box 100 can be known only by visually confirming the run box 100, excessive elapsed waiting time can be prevented in advance, thereby preventing process defects in advance.

As described above, the management system according to the present invention prevents rework and process defects due to the failure of finding the whereabouts of the run box 100 or the excessive process waiting time while performing the semiconductor manufacturing process. Make your productivity even higher.

While many matters are specifically described in the above description, they should be construed as illustrative of preferred embodiments rather than as limiting the scope of the invention.

Therefore, the scope of the present invention should not be defined by the embodiments described, but by the technical spirit described in the claims.

1 is a block diagram schematically showing a management system of a semiconductor manufacturing facility according to the present invention;

2 is a front view illustrating a counter unit in a management system of a semiconductor manufacturing facility according to the present invention;

3 is a schematic diagram specifically illustrating a counter unit of the present invention;

Explanation of symbols on the main parts of the drawings

10: transceiver unit 20: reader unit

30: relay unit 40: control unit

41: monitor 50: counter unit

100: run box

Claims (11)

A transmission / reception unit provided in the run box; A plurality of reader units for transmitting and receiving radio information with the transmitting and receiving unit; A relay unit for collecting and filtering wireless data from the plurality of reader units; A control unit for calculating and displaying the position of the run box; Logistics management system of a semiconductor manufacturing equipment comprising a. The logistics management system of claim 1, wherein the transmission / reception unit comprises an RFID tag using an RF radio frequency. 3. The RFID tag of claim 2, wherein the RFID tag comprises a memory unit for storing an identification number unique to the run box, a communication unit for wirelessly transmitting / receiving a communication frequency, a transmission / reception module unit for modulating and demodulating a radio frequency signal, and a wireless transmission / reception operation. Logistics management system of a semiconductor manufacturing equipment comprising a control unit for controlling. 3. The logistics management system of claim 2, wherein the reader unit is an RFID reader that receives information from an RFID tag of the transmission / reception unit by RF wireless communication. The semiconductor manufacturing apparatus according to claim 1, wherein the reader unit comprises an RF transceiver module for transmitting and receiving unique address information of the run box from the transceiver unit, a memory unit for storing the received information, and a controller for controlling information transmission and reception operation. Logistics management system of the facility. The logistics management system of claim 1, wherein the relay unit is wired to the plurality of leader units. The logistics management system of claim 1, wherein the control unit is capable of visually confirming a position of the detected run box through a monitor. 8. The logistics management system of claim 7, wherein the control unit stores a map having the same structure as the inside of the fab. The logistics management system according to claim 1, wherein the run box is provided with a counter unit for counting the process waiting time from the time when the cover is locked from the box body. 10. The method of claim 9, wherein the counter unit is provided with a surface facing each other at the front end of the box body and the cover to switch the power on / off according to the opening and closing of the cover, and the standby time is driven by the drive of the switch Logistics management system of a semiconductor manufacturing equipment consisting of a display means for displaying to the naked eye. 11. The logistics management system of claim 10, wherein the display means is configured to change color in response to a waiting time.

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