KR20100000719A - X-ray irradiation system and x-ray irradiation apparatus - Google Patents

Abstract

PURPOSE: An X-ray irradiation system and an X-ray irradiator are provided to improve sealing of a plate unit, a cylindrical unit, and a clamp unit using a first seal unit and a second seal unit. CONSTITUTION: An X-ray irradiator(1) includes an X-ray tube(8), a driver(35), a case, and a plate unit(36). The driver drives the X-ray tube. The case receives the X-ray tube and the driver. The plate unit has an opening corresponding to the opening of the case. A cable(42) has a connector(44) and a cylindrical unit(45). The connector is arranged in one side of the cable. The connector connects one side of the cable to the connection terminal detachably. The cylindrical unit surrounds the connector.

Description

X-ray irradiation system and X-ray irradiation apparatus}

The present invention relates to an X-ray irradiation system and an X-ray irradiation apparatus.

Conventionally, the X-ray irradiation apparatus is known (for example, refer patent document 1, 2). Patent Literature 2 describes, for example, a system for eliminating static electricity generated on a substrate by using soft X-rays from the X-ray irradiation apparatus described in Patent Literature 1. In particular, in this system, by eliminating the substrate while controlling the soft X-rays not to be irradiated to the substrate for a predetermined time or more, problems in substrate processing such as development unevenness are suppressed.

[Patent Document 1] Japanese Patent Application Laid-Open No. 2004-356056

[Patent Document 2] Japanese Patent Application Laid-Open No. 2000-21726

In such a system, for example, an X-ray irradiation apparatus is disposed in an apparatus for applying a resist on a substrate, and the X-ray irradiation apparatus and other portions of the resist coating apparatus are in terms of air movement. It is desirable to be isolated. That is, it is not preferable that the gas or the like in the X-ray irradiation apparatus flows out of the X-ray irradiation apparatus in a large amount into the resist coating apparatus, or that the gas (organic solvent) or the like in the resist coating apparatus enters the X-ray irradiation apparatus. This is because if the gas in the X-ray irradiation apparatus leaks out from the X-ray irradiation apparatus and flows in a large amount into the resist coating apparatus, it may cause contamination of the resist coating apparatus and deterioration of cleanliness. Moreover, when the gas of radical which exists in the process of apply | coating a resist enters into an X-ray irradiation apparatus, the components in an X-ray irradiation apparatus, etc. will be damaged by gas. In addition, in the case of flammable organic solvent, for example, when the flammable solvent is mixed with the X-ray irradiation apparatus, there is a possibility that ignition or explosion may occur in the X-ray irradiation apparatus due to a flame generated in the X-ray irradiation apparatus. Because there is. Moreover, the use of a flammable solvent and the apparatus being contaminated and the cleanliness fall are not limited to a resist coating apparatus, for example, It can be said also in a developing apparatus.

Therefore, this invention is made | formed in view of the above, and an object of this invention is to provide the X-ray irradiation system and X-ray irradiation apparatus which can improve the sealing property of an X-ray irradiation apparatus.

In order to solve the said subject, the X-ray irradiation system of this invention is an X-ray irradiation apparatus which irradiates X-rays, the X-ray control apparatus which controls the said X-ray irradiation apparatus, the said X-ray irradiation apparatus, and the said X-ray An X-ray irradiation system having a cable for electrically connecting a control device, the X-ray irradiation device comprising: an X-ray tube, a drive unit for driving the X-ray tube, a case accommodating the X-ray tube and the drive unit, and an opening; And a plate-shaped member provided in the case and having an opening at a position corresponding to the opening, wherein the cable is provided at one end of the cable, and electrically connected to one end of the cable and the drive unit. And a tubular member surrounding the connector, wherein the connector and the cable surround the connector. By the ruler and the said connector, attachment and detachment are freely and electrically connected through the said opening of the said case and the said opening of the said plate-shaped member. At this time, at one end of the tubular member, the male screw portion provided at the one end and the female screw portion provided at the opening of the plate member are screwed together, and the other end of the tubular member is used for clamping the cable. It is preferable that the clamp member is provided, and the other end and the clamp member are screwed together.

In the X-ray irradiation system of the present invention as described above, the connector detachably connects the cable and the X-ray irradiation apparatus. Thus, for example, after the clamp member is loosened from the cylindrical member and the cylindrical member is loosened from the plate member, the cable can be detached from the X-ray irradiation apparatus, whereby Therefore, only the X-ray irradiation apparatus can be replaced. As a result, irrespective of the lifetime of the X-ray irradiation apparatus, parts other than the X-ray irradiation apparatus, that is, a cable or an X-ray control apparatus can be used as they are even after the lifetime of the X-ray irradiation apparatus is over. The X-ray irradiation apparatus may be replaced in accordance with the life of the tube of the X-ray tube. In this case, the part of the X-ray irradiation system other than the X-ray irradiation apparatus may be related to the life of the tube of the X-ray tube. You can continue to use without.

In addition, the tubular member surrounds the connector, one end of the tubular member is screwed in the opening of the plate-shaped member, and the other end of the tubular member is screwed with the clamp member for clamping the cable. With the above structure, the sealing property in a plate-shaped member, a cylindrical member, and a clamp member can be maintained, and as a result, the outflow of gas generate | occur | produces in the periphery of a plate-shaped member, a cylindrical member, and a clamp member. Can be suppressed.

In the X-ray irradiation system of the present invention, one end of the cylindrical member is provided with a first seal member for sealing the plate member and the cylindrical member, and the other end of the cylindrical member. It is preferable that the 2nd seal member for sealing the said clamp member and the said cylindrical member is provided in it.

The first seal member is provided between the plate member and the cylindrical member, and the second seal member is provided between the clamp member and the cylindrical member, thereby providing a plate member, a cylindrical member, and a clamp member. It is possible to further increase the sealing property, and as a result, it is possible to more reliably suppress the outflow of gas from the periphery of the plate-shaped member, the cylindrical member, and the clamp member.

In the X-ray irradiation system of the present invention, the connector includes a connector body portion and an outer circumference portion covering a portion of the connector body portion at a side connecting with the connection terminal, and the outer circumference portion is another portion of the connector body portion by an operator. It is preferable that the said connector main body part is connected to the said connection terminal in the state tensioned by the predetermined | prescribed part toward, and the said tensioned state of the said outer peripheral part is maintained by the presence of the said 1st sealing member in the said connection state. .

If the corresponding tensioned state of the outer circumferential portion is maintained in the state in which the connector main body portion and the connection terminal are connected, the operator does not need to once tension the outer circumference of the connector toward the other portion of the main body portion when removing the connector from the connection terminal. Thereby, workability at the time of taking out a connector from a connection terminal can be improved.

In addition, the X-ray irradiation apparatus of the present invention includes an X-ray tube, a drive unit for driving the X-ray tube, a case accommodating the X-ray tube and the drive unit, and a gas introduction unit provided in the case to introduce gas into the case. And a gas exhaust unit provided in the case to exhaust the gas in the case.

By providing the gas introduction part and the gas exhaust part in this way, the gas can be introduced into the X-ray irradiation apparatus and the gas in the X-ray irradiation apparatus can be exhausted to the outside. Here, by appropriately controlling the flow rate of the gas, the pressure in the X-ray irradiation apparatus can be controlled higher than the pressure outside the X-ray irradiation apparatus. By controlling the inside of the X-ray irradiation apparatus with a positive pressure in this way, the gas outside the X-ray irradiation apparatus can be prevented from infiltrating into the X-ray irradiation apparatus and the sealing property of the X-ray irradiation apparatus can be improved.

In addition, since gas from the outside is introduced into the X-ray irradiation apparatus through the gas introduction portion, and the gas in the X-ray irradiation apparatus is exhausted to the outside through the gas exhaust portion, the gas serves to cool the inside of the X-ray irradiation apparatus. You may.

Moreover, the X-ray irradiation system of this invention is the resist coating processing apparatus which performs a resist coating process to a 1st board | substrate, the developing processing apparatus which performs a developing process to a 2nd board | substrate, the said resist coating processing apparatus, and the said developing process An X-ray irradiation apparatus provided in at least one of the apparatuses and statically radiating the at least one substrate by radiating X-rays to at least one of the first substrate and the second substrate, and an X-ray for controlling the X-ray irradiation apparatus. An X-ray irradiation system including a control device and a cable for electrically connecting the X-ray irradiation device and the X-ray control device, wherein the X-ray irradiation device applies X-rays to the first substrate or the second substrate. An X-ray tube for irradiation, a drive unit for driving the X-ray tube, a case accommodating the X-ray tube and the drive unit, and having an opening, and provided in the case A plate-shaped member having an opening at a position corresponding to the opening, a gas introduction portion provided in the case and introducing gas into the case, and a gas exhaust portion provided in the case and exhausting gas in the case. The cable is provided at one end of the cable, and includes a connector for detachably connecting one end of the cable, a connection terminal electrically connected to the drive unit, and a tubular member surrounding the connector. It is provided, The said drive part and the cable are characterized in that attachment and detachment are freely and electrically connected by the said connection terminal and the said connector through the said opening of the said case and the said opening of the said plate-shaped member.

According to such an X-ray irradiation system of the present invention, by providing a gas introduction portion and a gas exhaust portion, it is possible to introduce gas into the X-ray irradiation apparatus and exhaust the gas in the X-ray irradiation apparatus to the outside. Here, by appropriately controlling the flow rate of the gas, the pressure in the X-ray irradiation apparatus can be controlled to be higher than the pressure outside the X-ray irradiation apparatus, that is, for example, the pressure in the resist coating apparatus or the developing processing apparatus. By controlling the inside of the X-ray irradiation apparatus with a positive pressure in this manner, the gas in the resist coating apparatus or the developing apparatus can be prevented from infiltrating into the X-ray irradiation apparatus and the sealing property of the X-ray irradiation apparatus can be improved.

In addition, the connector detachably connects a cable and an X-ray irradiation apparatus. Thus, for example, after the clamp member is loosened from the cylindrical member and the cylindrical member is loosened from the plate member, the cable can be detached from the X-ray irradiation apparatus, whereby X in the X-ray irradiation system Only the line irradiation device can be replaced. As a result, irrespective of the lifetime of the X-ray irradiation apparatus, even after the X-ray irradiation apparatus has reached the end of the X-ray irradiation apparatus, a portion other than the X-ray irradiation apparatus, that is, for example, a cable, an X-ray control apparatus, a resist coating apparatus, a developing treatment apparatus, or the like, is used. You can continue to use it. The X-ray irradiation apparatus may be replaced in accordance with the life of the tube of the X-ray tube. In this case, a portion other than the X-ray irradiation apparatus of the X-ray tube may be related to the life of the tube of the X-ray tube. You can continue to use without.

Moreover, in the X-ray irradiation system of this invention, the male screw part provided in the said one end and the female screw part provided in the said opening of the said plate-shaped member are screwed together at the one end of the said cylindrical member, and the said cylindrical member It is preferable that the other end of the clamp member for clamping the cable is provided, the other end and the clamp member is screwed.

In this case, the tubular member surrounds the connector, one end of the tubular member is screwed in the opening of the plate member, and the other end of the tubular member is screwed with the clamp member for clamping the cable. . With the above structure, the sealing property in a plate-shaped member, a cylindrical member, and a clamp member can be maintained, and as a result, the outflow of gas generate | occur | produces in the periphery of a plate-shaped member, a cylindrical member, and a clamp member. Can be suppressed. Therefore, it is possible to suppress that gas in the X-ray irradiation apparatus flows out of the X-ray irradiation apparatus and flows into the resist coating apparatus or the developing processing apparatus, and that gas in the resist coating apparatus or the developing processing apparatus enters the X-ray irradiation apparatus.

In addition, since gas from the outside is introduced into the X-ray irradiation apparatus through the gas introduction portion, and the gas in the X-ray irradiation apparatus is exhausted to the outside through the gas exhaust portion, the gas serves to cool the inside of the X-ray irradiation apparatus. You may.

In the X-ray irradiation system of the present invention, one end of the cylindrical member is provided with a first seal member for sealing the plate member and the cylindrical member, and the other end of the cylindrical member. It is preferable that the 2nd seal member for sealing the said clamp member and the said cylindrical member is provided in it.

The first seal member is provided between the plate member and the tubular member, and the second seal member is provided between the clamp member and the tubular member, thereby providing a plate member, a tubular member, and a clamp member. It is possible to further increase the sealing property, and as a result, it is possible to more reliably suppress the outflow of gas from the periphery of the plate-shaped member, the cylindrical member, and the clamp member. Therefore, it is possible to more reliably suppress that the gas in the X-ray irradiation apparatus flows out of the X-ray irradiation apparatus and flows into the resist coating apparatus or the developing processing apparatus, and that the gas in the resist coating apparatus or the developing processing apparatus enters the X-ray irradiation apparatus. .

In the X-ray irradiation system of the present invention, a gas introduction tube for introducing the gas from an external device into the case through the gas introduction unit, and for exhausting the gas in the case to the outside through the gas exhaust unit It is preferable to further provide a gas exhaust pipe.

The gas introduction pipe is for introducing gas from an external gas supply means into the X-ray irradiation apparatus through the gas introduction section, and the gas exhaust pipe is configured to introduce gas in the X-ray irradiation apparatus through the gas exhaust section, for example, external gas. It is for exhausting by a recovery means. These gas introduction pipes and gas exhaust pipes, together with the gas introduction part and the gas exhaust part, can also be used as means for air cooling using the gas.

According to this invention, the X-ray irradiation system and X-ray irradiation apparatus which can improve the sealing property of an X-ray irradiation apparatus can be provided.

EMBODIMENT OF THE INVENTION Hereinafter, with reference to an accompanying drawing, preferable embodiment of the X-ray irradiation apparatus and X-ray irradiation system which concerns on this invention is described in detail. In addition, in description of drawing, the same code | symbol is attached | subjected to the same element, and the overlapping description is abbreviate | omitted.

[First embodiment: X-ray irradiation apparatus 1 and X-ray irradiation system 100]

First, the X-ray irradiation apparatus 1 and X-ray irradiation system 100 which concern on 1st Embodiment of this invention are demonstrated, referring drawings.

As shown in FIGS. 1-3, the X-ray irradiation apparatus 1 has the protective case 2 (case) which consists of a box type, This protective case 2 consists of a material with good thermal conductivity, and is divided into three, have. That is, the protective case 2 is composed of a square pillar-shaped case body portion 4 made of stainless steel, a flat front panel 5 made of aluminum, and a flat back panel 6 made of aluminum. It consists of a split type box. And in this protective case 2, the total length is about 100 mm, and the thickness of the front panel 5 is set to about 10 mm. Therefore, the thickness of the front panel 5 reaches about 1/10 of the total length, and high heat dissipation can be expected by increasing the thickness of the front panel 5. In addition, a mounting base 7 made of aluminum is screwed to the protective case 2.

In such a protective case 2, an X-ray tube 8 for generating soft X-rays and removing static electricity is arranged. As shown in Fig. 4, the X-ray tube 8 has a cylindrical valve 9 made of kovar glass, and a stem 11 having an exhaust pipe 10 at the end of the valve 9 is provided. The output window holding part 12 made from the KOVA metal, which is formed in a cylindrical shape, is fused and connected to the open end of the valve 9. In addition, a disk-shaped output window 13 is fixed to the output window holding part 12 by Ag soldering so as to close the center opening 12a, and an X beam is collided on the inner surface side of the output window 13 by an electron beam. The target 14 which produces a line is deposited.

In addition, two stem pins 15 and 15 are fixed to the stem 11, and a filament 16 as a cathode for emitting an electron beam at a predetermined voltage is provided in the valve 9. It is fixed to the tip of the stem pin 15. In addition, a stainless steel focus 17 having a cylindrical shape is fixed to one stem pin 15. Since the output window holding part 12 is made of a coba metal, the thermal conductivity and conductivity are good, and at the same time, the output window holding part 12 is electrically connected to the earthed protective case 2, which is at ground potential. As a result, the target 14 is also maintained at the ground potential.

Therefore, a high potential of -9.5 kV is supplied to the stem pin 15 of the X-ray tube 8 from the voltage generator 21 described later, and the electron beam is discharged from the filament 16 toward the target 14 at ground potential. Investigate. At this time, soft X-rays are radiated from the target 14 by the collision of electron beams, and these X-rays are emitted from the output window 13 to the outside. By configuring the X-ray tube 8 in this manner, the valve 9 can be made into a size of about 15 mm in diameter and about 30 mm in length, thereby enabling a compact X-ray tube 8 having a total length of about 40 mm. . At the time of use, the target 14 of the small X-ray tube 8 is at a high temperature, and the heat of the target 14 is appropriately exported to the outside for maintaining the generation efficiency of X-rays and preventing the target 14 from being damaged. There is a need.

1 and 2, the driving unit 35 is accommodated in the protective case 2. The driver 35 includes a circuit board 20, a voltage generator 21 mounted on the circuit board 20, a connection terminal 23, and the like. The voltage generator 21 supplies the high potential of -9.5 kV to the stem pin 15 to drive the X-ray tube 8. First, the potential is raised to -1 kV at the low voltage generation site in the voltage generation unit 21, and then the potential is increased to -9.5 kV at the high voltage generation site. The circuit board 20 is fixed to the steel base plate 22 through a screw. The wiring 21a extending from the high voltage generating portion of the voltage generator 21 is connected to the stem pin 15 of the X-ray tube 8 by a line, and the stem pin is connected to the valve 9 of the X-ray tube 8. A cylindrical cap 19 covering 15 is fixed. In the cap 19, the silicone resin P is filled after the wiring 21a and the stem pin 15 are joined together (see Fig. 6). In addition, on the circuit board 20, a head circuit 60 (see Fig. 7) incorporating a CPU 61 (see Fig. 7) is provided, so that the control signal from the head circuit 60 is routed through a predetermined wiring. It is output to the voltage generator 21.

An L-shaped first mounting piece 22a is integrally provided at the front end of the base plate 22, and a second mounting piece 22b made of an L shape is also integrated at the rear end of the base plate 22. It is provided as an enemy. In addition, the first mounting piece 22a is used to fix the voltage generator 21 to the protective case 2, and the second mounting piece 22b is connected to the low voltage generation site on the circuit board 20. It is used for the mounting of the connection terminal 23 connected by the. For example, the first mounting piece 22a is fixed to be pressed onto the front panel 5 via the set screw 25, and the connecting terminal 23 is attached to the second mounting piece via the tightening nut 24. It is fixed to 22b), and the back panel 6 is fixed so that it may be crimped | bonded to the 2nd mounting piece 22b through the screw 28. As shown in FIG. As described above, since the flat front panel 5 and the back panel 6 made of aluminum having good thermal conductivity are connected through the base plate 22 made of steel, the rear panel 6 can also radiate heat. Therefore, high heat dissipation by the protective case 2 is realized.

In addition, when fixing the X-ray tube 8 mentioned above to the protective case 2, the X-ray tube 8 is fixed to the front panel 5 which consists of aluminum. As shown in FIG. 1 and FIG. 5, the front panel 5 is formed with a circumferential opening 26 into which the output window holding part 12 of the X-ray tube 8 is inserted. An annular projection 27 is formed on the wall surface 26a to be formed inward. And the projection part 27 abuts against the annular flange part 18 integrally provided in the front-end | tip of the output window holding part 12. As shown in FIG.

In addition, a female screw portion 29 is formed on the wall surface 26a of the opening portion 26, and a fixing nut 30 having an external screw 30a is screwed into the female screw portion 29. The fixing nut 30 is made of brass having good thermal conductivity, and is composed of a substantially cylindrical eastern portion 31 inserted into the opening 26 and a hexagonal head portion 32 forming a hexagon nut.

Therefore, while the output window holding part 12 of the X-ray tube 8 is inserted in the opening part 26 of the front panel 5, the external thread part 30a of the fixing nut 30 is attached to the female thread part 29. FIG. Tighten the fixing nut 30 firmly to screw it. And by fully tightening the fixing nut 30, the annular flange part 18 provided in the output window holding part 12 of the X-ray tube 8 will collide with the protrusion part 27 of the front panel 5. As shown in FIG. As a result, the flange portion 18 is pressed toward the projection portion 27 by the tip end 30b of the fixing nut 30 so that the X-ray tube 8 is fixed to the front panel 5 (see FIG. 6). . Therefore, by using such a fixing nut 30, the X-ray tube 8 can be fixed simply and reliably in the protective case 2. In addition, since the fixing nut 30 is made of a material having good thermal conductivity, the transfer of heat from the output window holding part 12 of the X-ray tube 8 to the front panel 5 can be improved, and thus 100 degrees Celsius. By keeping the heat of the output window holding part 12 close to be easy, the maintenance of the generation efficiency of X-rays and the damage of the target 14 are prevented.

Moreover, the positioning surface 30c which protrudes inward is formed in the inner wall surface of the fixing nut 30, and this positioning surface 30c contacts the outer surface 12a of the output window holding part 12. Moreover, as shown in FIG. . Thereby, the positioning of the X-ray tube 8 by the fixing nut 30 is easily and reliably achieved, and furthermore, the heat from the output window holding part 12 provided in the X-ray tube 8 to the front panel 5 is maintained. Deliver more. Therefore, maintenance of the generation efficiency of X-rays and prevention of the damage of the target 14 in the X-ray tube 8 can further be improved.

In addition, when the rubber ring 34 is inserted in the tip portion 30b of the fixing nut 30 and the flange portion 18 of the output window holding portion 12, the flange portion 18 is tightened by tightening the fixing nut 30. Is firmly fixed to the protrusion 27 with an appropriate pressing force. In addition, if the above-mentioned fixing nut 30 is adopted, the thickness of the front panel 5 will inevitably become large, and accordingly, high heat dissipation in the front panel 5 can be expected. In addition, since the front panel 5 made of aluminum having good thermal conductivity and the back panel 6 are thermally connected with the base plate 22 made of steel as an intermediary, heat dissipation is also possible in the back panel 6. In this way, high heat dissipation by the protective case 2 is realized.

Referring again to FIGS. 1 to 3, an aluminum plate-like member 36 is screwed to the rear panel 6 with a plurality of screws 37. The back panel 6 and the plate-shaped member 36 each have an opening 6a and an opening 36a at corresponding positions, and the connecting terminal 23 faces the opening 6a and the opening 36a. It is fixed in position.

The rear panel 6 further has an opening 6b, and a gas introduction portion 38 is located in this opening 6b. The gas introduction part 38 has a substantially cylindrical shape, and is for introducing gas into the protective case 2. In addition, the rear panel 6 further has an opening 6c, and the gas exhaust section 39 is located in this opening 6c. The gas exhaust part 39 has a substantially cylindrical shape, and is for exhausting the gas in the protective case 2 to the outside. In the present embodiment, the female screw portions 6d and 6e are formed in the opening portions 6b and 6c, respectively, and the male screw portions 38a, which are formed at one end of each outer peripheral surface of the gas introduction portion 38 and the gas exhaust portion 39, respectively. 39a) are screwed to the female screw portions 6d and 6e, respectively. Thereby, the gas introduction part 38 and the gas exhaust part 39 are fixed to the back panel 6 in the opening part 6b, 6c, respectively. In addition, for example, nitrogen gas from the gas introduction tube 40 is introduced into the protective case 2 through the gas introduction unit 38, and the nitrogen gas in the protective case 2 is supplied to the gas exhaust unit 39. Exhaust is exhausted through the gas exhaust tube 41.

Referring again to FIGS. 1 to 3, the cable 42 includes a cable body 43, a connector 44, a cylindrical member 45, a first gasket 46 (first seal member), and a second gasket. 47 (2nd seal member) and the cap cone 48 (clamp member) are provided. The connector 44 is provided at one end of the X-ray irradiation apparatus 1 side of the cable main body 43, so that one end of the cable main body 43 and the connection terminal 23 are positioned at the positions of the opening 6a and the opening 36a. Desorption is for free connection. By connecting the cable main body 43 and the connection terminal 23 via the connector 44, the X-ray irradiation apparatus 1 and the control part 70 (refer FIG. 7) mentioned later are electrically connected.

The tubular member 45 made of aluminum surrounds the connector 44 by having a tubular shape. For this reason, the cylindrical member 45 can play a role as a member for protecting the connector 44. A male screw portion 45a is provided at one end of the cylindrical member 45, and the male screw portion 45a is a female screw portion formed in the wall surface 36b which forms the opening 36a of the plate-shaped member 36 ( Screwed with 36c). Moreover, the projection part 36d is provided in this wall surface 36b inward, and this projection part 36d is provided through the 1st gasket 46 which the end part 45b of the cylindrical member 45 mentions later. ), The male threaded portion 45a and the female threaded portion 36c are screwed together to maintain the sealing property between the plate-shaped member 36 and the cylindrical member 45. .

Here, the first gasket 46 is placed between the plate-shaped member 36 and the cylindrical member 45, that is, the projection 36d of the plate-shaped member 36 and the end portion of the cylindrical member 45 ( By providing further between 45b), the sealing property between the plate-shaped member 36 and the cylindrical member 45 can further be improved. This first gasket 46 is made of, for example, synthetic rubber.

Moreover, as the connector 44, as shown in FIG. 1, the outer peripheral part 44a which covers a part of connector main body part 44b by the side which connects with the connector main body part 44b and the connection terminal 23 is provided. It is available. Using such a connector 44, the operator picks up the outer circumferential portion 44a with a finger and slightly tensions it toward another portion of the connector body portion 44b (a portion not covered by the outer circumferential portion 44a), for example, by a distance d1. After that, attachment and detachment to the connection terminal 23 can be performed. In this case, as shown in FIG. 2, FIG. 3, FIG. 6, in the state where the connector 44 was connected to the connection terminal 23, by the presence of the 1st gasket 46, The outer circumferential portion 44a is always in a state in which the outer peripheral portion 44a is tensioned by the distance d1 toward the other portion of the connector main body portion 44b. When the connector 44 connects to the connection terminal 23, for example, the tip portion 44c of the outer circumferential portion 44a abuts against the first gasket 46, but the outer circumferential portion 44a is stretched. (When the distance d1 and the degree (d2 shown in FIG. 1) of the thickness of the first gasket 46 substantially match, for example, after the tip portion 44c abuts on the first gasket 46, This is because the tensioned outer circumferential portion 44a does not return to its original state due to the presence of the first gasket 46 even after being detached from the operator's hand. For this reason, when pulling out the connector 44 from the connection terminal 23, an operator does not need to tension the outer peripheral part 44a of the connector 44 once toward the other part of the connector main-body part 44b. Thereby, workability at the time of pulling out the connector 44 from the connection terminal 23 can be improved.

On the other end side of the cylindrical member 45, a cap cone 48 for clamping the cable main body 43 is provided. The cap cone 48 consists of three members, the main body member 49, the sleeve (bush) 50, and the fastening portion 51. As an example of the cap cone 48, "A short-foot type nylon super grand (type A) 70-015" of Japan Avishi Co., Ltd. can be used, for example.

In the main body member 49 of the cap cone 48, male threads 49a and 49b are formed at both ends, of which the male screw 45c and the screw are provided at the other end of the cylindrical member 45. Combined. Thereby, the sealing property between the cap cone 48 and the cylindrical member 45 can be maintained. Here, the second gasket 47 is further provided between the body member 49 of the cap cone 48 and the tubular member 45, thereby providing a gap between the cap cone 48 and the tubular member 45. The sealing property in it can further be improved. The second gasket 47 is made of synthetic rubber, for example.

Moreover, the sleeve 50 is put in the cavity of the main body member 49 in the state which let the cable main body 43 pass through the cavity provided in the inside. And the fastening part 51 is screwed with the main-body member 49 via the sleeve 50, and the sleeve 50 is received by the cable 42 and is fixed. Moreover, the female screw 51a is formed in the tightening part 51, and this female screw 51a is screwed with the male screw 49b of the main body member 49. As shown in FIG.

As described above, the cylindrical member 45 surrounding the connector 44 is screwed through the plate-shaped member 36 and the first gasket 46, and the cylindrical member 45 is also provided. Is screwed through the cap cone 48 and the second gasket 47, and the sleeve 50 is radially impregnated in the cable body 43, so that the plate-like member 36 and the cylindrical member are 45, the sealing state in the cap cone 48 is produced | generated, and the gas (for example, nitrogen gas) introduce | transduced inside the X-ray irradiation apparatus 1 becomes difficult to leak out from a connector part.

Moreover, the connector 44 can be pulled out from the connection terminal 23 by loosening the cap cone 48 and then squeezing the cylindrical member 45 from the plate-shaped member 36. Thereby, the apparatus containing the X-ray irradiation apparatus 1 (for example, the X-ray irradiation system 100 mentioned later, referring FIG. 7, and the coater / developer apparatus 200 mentioned later, referring FIG. 8 and FIG. 9). In)), only the X-ray irradiation apparatus 1 can be replaced. As a result, irrespective of the lifetime of the X-ray irradiation apparatus 1, portions other than the X-ray irradiation apparatus 1 can be used as it is. In addition, the X-ray irradiation apparatus 1 may be replaced in accordance with the life of the tube of the X-ray tube 8, in which case, other than the X-ray irradiation apparatus 1 regardless of the life of the tube of the X-ray tube 8. You can continue to use the part of.

Moreover, in this embodiment, between the front panel 5 and the case main body 4, between the back panel 6 and the case main body 4, between the back panel 6 and the plate-shaped member 36, a case The sealing property is maintained by apply | coating a caulking material between the screw part 52 for fixing a power supply part to the main body 4, and the case main body 4. As shown in FIG. In addition, in FIG. 2, the part which apply | coats a caulking material is shown as the part A. In addition, in FIG.

In FIG. 7, the structure of the X-ray irradiation apparatus 1 and its peripheral apparatus is shown. As shown in FIG. 7, the X-ray irradiation apparatus 1 controls the control unit 70 (see the connecting terminal 23 (see FIGS. 1 to 3) and the cable 42 (see FIGS. 1 to 3). X-ray control device), and the control unit 70 is connected to the accessory (80). The control part 70 is used by the user of the X-ray irradiation apparatus 1 for the control of the X-ray irradiation apparatus 1. The accessory 80 is used by the management company of the X-ray irradiation apparatus 1 and the control unit 70. These X-ray irradiation apparatus 1, the cable 42, the control part 70, and the accessory 80 comprise the X-ray irradiation system 100. FIG.

In the X-ray irradiation apparatus 1, the CPU 61 of the head circuit 60 is connected to the X-ray tube 8 via the voltage generator 21 (see FIG. 2), and the CPU 61 generates a voltage. By monitoring the energization time of the X-ray tube 8 by the unit 21, the integration which measures the irradiation time of the X-ray in the X-ray tube 8 (that is, the operating time of the X-ray tube 8) )do. The integrated X-ray tube operation integration time is the head circuit by the CPU 61 together with information such as the manufacture number, the date of manufacture of the X-ray irradiation apparatus 1, the name of the inspector, the code unique to the X-ray irradiation apparatus 1, and the like. It is stored in 60 not shown EEPROM (Electrically Erasable and Programmable ROM).

The control part 70 is provided with the monitor 72 etc. which show the operating state of the CPU 71 and the X-ray tube 8. The CPU 71 measures and integrates the operating time of the control unit 70. The integrated controller operation integration time is controlled by the CPU 71 with information such as the manufacturing number, the date of manufacture of the X-ray irradiation apparatus 1, the name of the inspector, the code unique to the X-ray irradiation apparatus 1, and the like. 70 is stored in an EEPROM (not shown).

In the accessory 80, a CPU 81 for collectively managing the CPU 61 of the head circuit 60 and the CPU 71 of the control unit 70, a display unit 82 for displaying information, and inputting information An input unit 83 composed of a key board or the like is provided. As shown in FIG. 7, by connecting the X-ray irradiation apparatus 1, the control unit 70, and the accessory 80, the operator of the management company stores the information and the control unit 70 stored in the EEPROM of the X-ray irradiation apparatus 1. The information stored in the EEPROM at ") can be displayed on the display unit 82, and these information can be rewritten by the information input from the input unit 83.

For example, in the case of replacing only the X-ray irradiation apparatus 1, the worker of the management company may include the manufacturing number, the date of manufacture, the name of the inspector and the name of the X-ray irradiation apparatus 1 before the exchange stored in the EEPROM of the control unit 70. The information of the unique code of the X-ray irradiation apparatus 1 before the exchange can be rewritten with the information of the serial number of the new X-ray irradiation apparatus 1, the date of manufacture, the name of the inspector, and the unique code of the new X-ray irradiation apparatus 1. have.

In addition, the worker of the management company is integrated with the operation integration time of the X-ray tube 8 accumulated by the CPU 61 of the head circuit 60 and the CPU 71 of the control unit 70. The operation integration time can be displayed on the display unit 82, so that the operation integration time of the X-ray tube 8 and the control unit 70 can be accurately determined. In particular, since the X-ray tube 8 is a product having a lifetime, there is an advantage that the product management of the X-ray irradiation apparatus 1 can be properly performed by accurately grasping the operation integration time of the X-ray tube 8.

[Second Embodiment: Coater / Developer Device 200]

Then, the coater / developer apparatus 200 (X-ray irradiation system) which concerns on 2nd Embodiment of this invention is demonstrated.

<Configuration of Coater / Developer 200>

The coater / developer apparatus 200 which concerns on 2nd Embodiment of this invention is shown in FIG. The coater / developer device 200 is a device that connects a plurality of processing units to enable consistent processing. The coater / developer device 200 is connected to an exposure machine 250, a titler 260, and an edge exposure machine 270, and resists in a photolithography process. It is to make it possible to carry out continuously from washing before application | coating to resist application | coating, exposure, and image development. In addition, although the whole system which connected several processing units here is the coater / developer apparatus 200 which concerns on the X-ray irradiation system of this invention, you may recognize each processing unit as the X-ray irradiation system of this invention, respectively. In addition, the main processing part of each processing unit can also be recognized as the X-ray irradiation system of this invention, respectively. Moreover, the exposure machine 250 etc. are each the X-ray irradiation system of this invention.

The coater / developer device 200 mainly comprises an indexer portion 202, a cleaning unit 210, a dehydration baking unit 220a and 220b, a resist coating unit 230, a prebaking unit 240a and 240b, and a developing unit 280. ), Post-baking units 290a and 290b, and processing units of the air cooling unit 299, and swing robots 204a to 204e. The thin line from the indexer 202 to the exposure machine 250 includes a cleaning unit 210, a postbaking unit 290b, a dehydration baking unit 220a, a resist coating unit 230, a prebaking unit 240a, and the like. Is placed. The prebaking unit 240b, the developing unit 280, the dehydration baking unit 220b, the postbaking unit 290a, the air cooling unit 299, etc. are arrange | positioned at the return line from the exposure machine 250. As shown in FIG. In the vicinity of the swinging robot 204e, buffer portions 208a to 208c serving as a transfer place or a temporary evacuation place when exchanging a substrate with the exposure machine 250 are provided. This coater / developer apparatus 200 is a uni-cassette system, takes out a glass substrate (hereinafter referred to as a "substrate") from the cassette 203 placed on the indexer portion 202, and sends it to each processing unit, and carries out each processing step. The finished substrate is stored in the same cassette 203. The removal from the cassette 203 and the storage of the cassette 203 are performed by the indexer robot 202a having an arm that can hold a substrate and moveable along the rows of the cassette 203.

The cleaning unit 210 is a continuous sheet processing unit, and includes a carrying-in unit 212, a washing unit 213, a water drop removing unit 214, and a carrying-out unit 215. In addition, a UV ozone cleaning chamber 211 is provided above the carrying-in part 212. That is, the UV ozone cleaning chamber 211 is superimposed on the cleaning unit 210. The substrate is conveyed from the UV ozone cleaning chamber 211 to the carrying-in part 212 by the indexer robot 202a. From the carrying in part 212 to the carrying out part 215, while conveying a board | substrate with a conveyor, processes, such as washing | cleaning and water droplet removal, are performed. In the cleaning section 213, cleaning using a brush, ultrasonic waves, high pressure spray, or the like using pure water or a chemical liquid is performed. Moreover, the conveyor employ | adopts the roller conveyor with the small oscillation property corresponding to in the clean room.

The dewatering bake units 220a and 20b are units in which a stationary heat treatment chamber, a cooling treatment chamber, an adhesion reinforcement chamber, a conveyor chamber, a buffer chamber, and a passage chamber are stacked in multiple stages. The resist coating unit 230 is a sheet type processing unit, and is composed of an import unit 231, a spin coater unit 232, a leveling processing unit 233, an edge rinse unit 234, and an export unit 235. From the carrying in part 231 to the carrying out part 235, a board | substrate is conveyed by the sliders 205a-205d which in turn send a board | substrate to the adjacent process part.

The prebaking units 240a and 240b are stacks of stationary heating and cooling chambers, conveyor chambers, and passage chambers stacked in multiple stages. The developing unit 280 is a continuous sheet processing unit, and includes a carrying-in unit 281, a developing unit 282, a water washing unit 283, a drying unit 284, and a carrying-out unit 285. From the carry-in part 281 to the carry-out part 285, a board | substrate is conveyed in a horizontal direction by a conveyor. The postbaking units 290a and 290b are units in which a stationary heating chamber, a cooling chamber, a conveyor chamber, a buffer chamber, and a passage chamber are stacked in multiple stages.

The swinging robots 204a to 204e are so-called cluster type robots that can swing but do not have a mechanism moving in the horizontal direction. The sliders 205a to 205d slide the position of the substrate by a predetermined distance with respect to one direction by the rectangular motion, and are provided between the respective portions of the resist coating unit 230.

<Substrate Processing of Coater / Developer 200>

Next, the process of the board | substrate by the coater / developer apparatus 200 is demonstrated in order. The substrate taken out of the cassette 203 by the indexer robot 202a in the indexer 202 is first moved to the UV ozone cleaning chamber 211, and the organic contaminants on the surface are oxidatively decomposed by irradiation with ultraviolet rays. The board | substrate which finished this process is moved to the loading part 212 by the indexer robot 202a. The substrate is transferred from the loading section 212 to the cleaning section 213 to perform scrub cleaning with a roll brush, ultrasonic spray cleaning and pure water with high pressure jet spray. For example, the washing may be performed using an alkali cleaning liquid or the like. Thereafter, in the water droplet removing unit 214, the water droplet of pure water remaining on the surface of the substrate is removed by the air knife.

The substrate transferred to the carry-out unit 215 after the processing in the cleaning unit 210 passes through the post bake unit 290b by a conveyor (not shown) and enters the dewatering bake unit 220a. In the dehydration bake units 220a and 220b, the substrate is transferred to each processing chamber by the swinging robot 204a. The substrate conveyed to the conveyor chamber of the dehydration bake unit 220a is transferred to the heating chamber. Here, the board | substrate is heated by a hot plate, and moisture is removed. In this case, the substrate is temporarily stored in a buffer chamber and then transferred to a heating chamber in the case of performing mask change in the subsequent exposure machine 250, cleaning of the spin coater 232, or the like. The substrate is then transferred to the tight reinforcement chamber. In the adhesion reinforcement chamber, for the purpose of improving the adhesion between the resist film and the substrate, HMDS is applied in vapor form while heating the substrate. Thereafter, the substrate is transferred to the cooling chamber again and cooled by the cool plate. Thus, the board | substrate which performed dehydration baking as a preprocess of a resist coating process is moved to the loading part 231 of the resist coating unit 230. As shown in FIG.

In the resist coating unit 230, the substrate is first moved to the spin coater section 232 by the slider 205a to apply the resist to the substrate. The spin coater section 232 is constituted by a resist supply system, a spin motor, a cup, or the like. The resist is dropped on a horizontal substrate to rotate the substrate to form a uniform resist film on the substrate. The substrate on which the resist film is formed is transferred to the leveling processing section 233 by the slider 205b to perform the leveling and drying processing of the resist film. Thereafter, the substrate is moved to the edge rinse portion 234 by the slider 205c. In the edge rinse portion 234, a treatment is performed to remove the resist around the substrate surface or the end surface portion with a solvent in order to prevent the resist film on the end surface of the substrate from peeling off and oscillating. The board | substrate which finished each process regarding this resist application | coating is moved to the carrying out part 235 by the slider 205d.

The board | substrate moved from the carrying out part 235 to the prebaking unit 240a adjacent to the carrying out part 235 is moved to the heating chamber by the turning robot 204c. Here, heat treatment is performed for the purpose of evaporating the residual solvent in the resist film on the substrate and enhancing the adhesion of the substrate. Subsequently, the substrate is cooled in the cooling chamber and transferred to the multi-stage delivery section 209 by the swinging robot 204c.

Moreover, the board | substrate is moved to the exposure machine 250 by the turning robot 204d, 204e, and an exposure process is performed. Specifically, a process of exposing the pattern on the original with respect to the resist on the substrate is performed. The exposed board | substrate is taken out from the exposure machine 250 by the turning robot 204e, and is hold | maintained by the turning robot 204d via the buffer part 208c. At the time of carrying in and out of the exposure apparatus 250, the substrate is temporarily stored in the buffer portions 208a, 208b, and 208c if necessary.

Subsequently, the substrate is moved from the swinging robot 204d to the titler 260 and the edge exposure machine 270, and the edge exposure is performed by engraving the printed characters. In edge exposure, exposure processing is performed to remove resist around the substrate except for the display portion on the substrate. Although the edge exposure machine 270 is arrange | positioned in this position here, you may arrange | position a back surface exposure unit here as needed. In addition, the backside exposure unit may be disposed instead of the titler 260. The board | substrate which completed these processes is moved to the multistage guide part 209 by the turning robot 204d, and is loaded on the conveyor part 279 by the slider which is not shown in figure. And the board | substrate is conveyed from the conveyor part 279 to the carrying-in part 281 of the developing unit 280 through the prebaking unit 240b.

In the developing unit 280, the substrate is conveyed by the conveyor from the carrying in portion 281 to the carrying out portion 285. And in the developing part 282, the spray development which sprays a spray image developing solution from a nozzle on a surface of a board | substrate in a shower form, or the paddle development which forms a developer assembly on a board | substrate is performed. In the water washing part 283 and the drying part 284, washing and drying with a rinse liquid such as pure water are performed on the substrate after development. The board | substrate which completed these processes is moved to the post-baking unit 290a by the conveyer which is not shown in figure from the carrying out part 285 through the prebaking unit 220b.

In the post-baking units 290a and 290b, the rinse liquid remaining in or on the surface of the resist film on the substrate is evaporated to remove the rinse liquid, and heat treatment for the purpose of curing the resist and enhancing adhesion to the substrate is performed. Specifically, the substrate is heated by the hot plate of the heating chamber, and the substrate is cooled by the cool plate of the cooling chamber. In addition, the substrate is temporarily stored in the buffer chamber as appropriate. The substrate on which these treatments have been carried is transferred to the air cooling unit 299. The substrate cooled by the air cooling unit 299 is accommodated in the original cassette 203 by the indexer robot 202a.

<X-ray irradiation apparatus 1 in coater / developer apparatus 200>

X-ray irradiation described in the first embodiment to each processing unit or each chamber, the exposure machine 250, the titler 260, the edge exposure machine 270, and the buffer units 208a, 208b, and 208c of the above processing units, respectively. The device 1 is arranged. These X-ray irradiation apparatuses 1 are static elimination devices using soft X-rays, and generate high concentrations of ions in the space of the irradiation range by ionizing action of the soft X-rays to remove static electricity of a charged object in an instant. It is possible to do that. In addition, as a device of the light irradiation method, there is no generation of fine particles, ozone, dielectric voltage and the like.

FIG. 9: is a figure which shows the example which applied the X-ray irradiation apparatus 1 of 1st Embodiment to each processing unit of the coater / developer apparatus 200. As shown in FIG. As a place to which the X-ray irradiation apparatus 1 of 1st Embodiment is applied, each processing part of each processing unit, such as the resist coating unit 230 (resist coating apparatus) and the developing unit 280 (developing processing apparatus), etc. Or each thread, the exposure machine 250, the titler 260, the edge exposure machine 270, the buffer part 208a, 208b, 208c, etc. are mentioned. Hereinafter, the part to which the X-ray irradiation apparatus 1 is applied is named generically "each processing unit 300."

As shown in FIG. 9, the stage 302 is arrange | positioned on the mount 301, and the board | substrate 303 (1st board | substrate, 2nd board | substrate) is located on this stage 302. As shown in FIG. The board | substrate 303 is carried in each processing unit 300 by the automatic conveyance apparatus which is not shown in figure. Supply of the resist to the substrate is performed by the dispenser 304. Moreover, the X-ray irradiation apparatus 1 is arrange | positioned in the position which can irradiate soft X-ray to the board | substrate 303 in each processing unit 300. As shown in FIG. The X-ray irradiation apparatus 1 fixes the support rod 305 attached to the X-ray irradiation apparatus 1 and the support post 306 mounted on the mount 301 by using the connecting jig 307. It can be arrange | positioned at a predetermined position. With the above configuration, the X-ray irradiation apparatus 1 can perform static elimination of the substrate 303 by soft X-ray irradiation, for example, before and after the resist coating process or during the resist coating process. In addition, in FIG. 9, the soft X-ray irradiated to the board | substrate 303 from the X-ray irradiation apparatus 1 is represented by X. In FIG.

In addition, the X-ray irradiation apparatus 1 is electrically connected to the control unit 70 through the cable 42. The connection structure between the X-ray irradiation apparatus 1 and the cable 42 is as having described with reference to FIGS. 1-3 in 1st Embodiment. Thereby, the sealing property between the X-ray irradiation apparatus 1 and the cable 42 is maintained, and the gas (for example, nitrogen gas) in the X-ray irradiation apparatus 1 is It does not leak outside, ie, into each processing unit 300, such as, for example, the resist coating unit 230 or the developing unit 280.

In addition, after loosening the cap cone 48 (see FIGS. 1 to 3), the connector 44 is removed by removing the cylindrical member 45 (see FIGS. 1 to 3) from the plate-shaped member 36. It can be pulled out from the connection terminal 23. Thereby, for example, in each processing unit 300, such as the resist coating unit 230 and the developing unit 280, only the X-ray irradiation apparatus 1 can be changed. As a result, irrespective of the lifetime of the X-ray irradiation apparatus 1, portions other than the X-ray irradiation apparatus 1 can be used as it is. In addition, the X-ray irradiation apparatus 1 may be replaced in accordance with the life of the tube of the X-ray tube 8, in which case, other than the X-ray irradiation apparatus 1 regardless of the life of the tube of the X-ray tube 8. You can continue to use the part of.

Moreover, the X-ray irradiation apparatus 1 is connected with the gas introduction means 308 through the gas introduction tube 40 (gas introduction tube). The gas introduction means 309 is a means for supplying nitrogen gas, for example. Moreover, the X-ray irradiation apparatus 1 is connected with the gas exhaust means 309 via the gas exhaust tube 41 (gas exhaust pipe). The gas exhaust means 309 is an apparatus for recovering nitrogen gas from the gas exhaust tube 41 and is, for example, an exhaust pump. In addition, the gas introduction tube 40 and the gas exhaust tube 41 are attached to the gas introduction part 38 and the gas exhaust part 39 of the X-ray irradiation apparatus 1 so that attachment and detachment are possible, respectively. As the gas introduction tube 40 and the gas exhaust tube 41, for example, a tube made of Teflon is used. By the above structure, nitrogen gas is introduce | transduced into the X-ray irradiation apparatus 1 from the gas introduction means 309, and nitrogen gas in the X-ray irradiation apparatus 1 is exhausted to the gas exhaust means 309. This configuration is a configuration for maintaining the pressure in the X-ray irradiation apparatus 1 higher than the pressure outside the X-ray irradiation apparatus 1, that is, the pressure in each processing unit 300.

As described above, the pressure in the X-ray irradiation apparatus 1 is slightly higher than, for example, the pressure in the resist coating unit 230 or the pressure in the developing unit 280. It is possible to prevent the atmosphere gas in the infiltration into the X-ray irradiation apparatus 1. As the resist coating unit 230, the developing unit 280, or the like, for example, an organic solvent is used, and the organic gas is filled in the atmosphere of each process in the resist coating unit 230, the developing unit 280, or the like. Do it. The X-ray irradiation apparatus 1 is disposed and used in such an atmosphere, and when a gas of radicals existing in the atmosphere enters the X-ray irradiation apparatus during the process of applying the resist, the X-ray irradiation apparatus 1 The parts may be damaged. Moreover, when gas is combustible, when it enters into the X-ray irradiation apparatus 1, since the X-ray irradiation apparatus uses a high voltage, there exists a danger of a ignition or explosion in the X-ray irradiation apparatus 1. This makes it possible to reduce the risk by increasing the sealing property of the X-ray irradiation apparatus, but it is difficult in structure to completely seal the X-ray irradiation apparatus. Therefore, in the present embodiment, the gas in the resist coating unit 230 and the gas in the developing unit 280 are prevented from entering the X-ray irradiation apparatus 1, thereby causing damage to the components in the X-ray irradiation apparatus 1 or X. The risk of ignition or explosion in the radiation system can be reduced. Moreover, since it is not necessary to make a complete sealing, it can be simplified without complicating the structure of an X-ray irradiation apparatus, and it can be set as a compact X-ray irradiation apparatus.

In addition, in order to maintain the inside of the X-ray irradiation apparatus 1 at a positive pressure, the sealing property of the part of the connector 44 which has a big opening is important, and the inside of the X-ray irradiation apparatus 1 is preferable by the structure of the connector part of this invention. It is possible to keep it. When the sealing property of this connector part is high, since the clearance gap which exists in another part is small, the influence on each processing unit by the gas leaking out from inside an X-ray irradiation apparatus can be made small. In addition, the small gap is less gas discharged, and the gap may be closed with a resin material or the like that is resistant to the atmosphere gas.

In addition, in this embodiment, although nitrogen gas is used in order to hold the inside of the X-ray irradiation apparatus 1 at positive pressure, it is not limited to this, If it is an inert gas, it is not limited to nitrogen, For example, argon, helium, etc. You can also use rare gas.

Moreover, in this embodiment, both the flow volume of nitrogen gas in the gas introduction means 309 and the flow volume of nitrogen gas in the gas exhaust means 309 are adjusted, and the pressure in the X-ray irradiation apparatus 1 is positively pressured. Although control is carried out by the above, not only this but any one of the gas introduction means 309 and the gas exhaust means 309 may be adjusted, and the pressure in the X-ray irradiation apparatus 1 may be controlled by positive pressure. At this time, for example, when it is not an environmental problem, the gas from the gas exhaust tube 41 may be discharged to the outside as it is without using the gas exhaust means 309.

[Operations and Effects of the First Embodiment and the Second Embodiment]

Subsequently, the operation and effects of the X-ray irradiation apparatus 1 according to the first embodiment of the present invention, the X-ray irradiation system 100 and the coater / developer apparatus 200 according to the second embodiment will be described.

According to the above embodiment of the present invention, the cylindrical member 45 surrounds the connector 44, and one end of the cylindrical member 45 is screwed in the opening 36a of the plate-shaped member 36. The other end of the tubular member 45 is screwed into a cap cone 48 that clamps the cable body 43. By the above structure, the sealing property in the plate-shaped member 36, the cylindrical member 45, and the cap cone 48 can be maintained, As a result, the plate-shaped member 36 and the cylindrical member 45, it can suppress that gas outflow and inflow generate | occur | produces around the cap cone 48. FIG. Therefore, the gas in the X-ray irradiation apparatus 1 flows out of the X-ray irradiation apparatus 1 into the resist coating unit 230 or the developing unit 280, or the resist coating unit 230 or the developing unit 280 It is possible to suppress the gas inside the) from entering the X-ray irradiation apparatus 1.

In addition, the connector 44 detachably connects the cable 42 and the X-ray irradiation apparatus 1 to each other. Thus, for example, after the cap cone 48 is loosened from the tubular member 45 and the tubular member 45 is loosened from the plate-shaped member 36, the cable 42 is connected to the X-ray irradiation apparatus ( 1), and only X-ray irradiation apparatus 1 can be changed in an X-ray irradiation system by this. As a result, irrespective of the lifetime of the X-ray irradiation apparatus 1, parts other than the X-ray irradiation apparatus 1, ie, the cable 42, the control part 70, the resist coating unit 23, the developing unit, for example 280 and the like can be used as it is even after the life of the X-ray irradiation apparatus 1 has expired. In addition, the X-ray irradiation apparatus 1 may be replaced in accordance with the life of the tube of the X-ray tube 8, in which case, the portion other than the X-ray irradiation apparatus 1 in the coater / developer apparatus 200 may be replaced. Regardless of the lifetime of the tube of the X-ray tube 8, it can continue to be used. By the above, maintenance of the coater / developer apparatus 200 becomes easy.

Moreover, by providing the gas introduction part 38 and the gas exhaust part 39, gas can be introduced into the X-ray irradiation apparatus 1 and the gas in the X-ray irradiation apparatus 1 can be exhausted to the outside. Here, by appropriately controlling the flow rate of the gas, the pressure in the X-ray irradiation apparatus 1 is lower than the pressure outside the X-ray irradiation apparatus 1, that is, for example, the pressure in the resist coating unit 230 or the developing unit 280. I can control it high. By controlling the inside of the X-ray irradiation apparatus 1 with positive pressure in this manner, the gas in the resist coating unit 230 or the developing unit 280 is prevented from invading the X-ray irradiation apparatus 1 and the X-ray irradiation apparatus 1 ) Can improve the sealability.

In addition, gas from the outside is introduced into the X-ray irradiation apparatus 1 through the gas introduction unit 38, and the gas in the X-ray irradiation apparatus 1 is exhausted to the outside through the gas exhaust unit 39. Therefore, the gas may achieve the role of cooling the inside of the X-ray irradiation apparatus 1.

Moreover, the 1st gasket 46 is provided between the plate-shaped member 36 and the cylindrical member 45, and the 2nd gasket 47 is provided between the cap cone 48 and the cylindrical member 45. Moreover, as shown in FIG. ), The sealing property in the plate-shaped member 36, the cylindrical member 45, and the cap cone 48 can be further improved. As a result, the plate-shaped member 36 and the cylindrical shape are obtained. It is possible to more reliably suppress the outflow and outflow of gas around the member 45 and the cap cone 48. Therefore, the gas in the X-ray irradiation apparatus 1 flows out of the X-ray irradiation apparatus 1 and flows in the resist coating unit 230 or the developing unit 280, or the resist coating unit 230 or the developing unit 280. The gas inside can be suppressed more reliably from entering the X-ray irradiation apparatus 1.

1 is an exploded perspective view showing the X-ray irradiation apparatus 1 of the first embodiment.

FIG. 2 is a cross-sectional view of the X-ray irradiation apparatus 1 shown in FIG. 1.

3 is a cross-sectional view taken along the line III-III of FIG. 2.

4 is a cross-sectional view showing the X-ray tube 8.

FIG. 5 is an enlarged sectional view of an essential part of the X-ray irradiation apparatus 1 shown in FIG. 2.

6 is a perspective view showing a state in which the X-ray tube 8 is assembled to the front panel 5.

FIG. 7: is a block diagram which shows the structure of the X-ray irradiation system 100 of 1st Embodiment.

8 is a plan schematic view showing the coater / developer device 200 of the second embodiment.

FIG. 9: is a figure which shows the X-ray irradiation apparatus 1 in each processing unit 300 of the coater / developer apparatus 200. In FIG.

(Explanation of the sign)

One… X-ray irradiation apparatus, 2... Protective case, 6.. Back panel, 8... X-ray tube, 23... Connection terminal, 35.. 36, drive unit; Plate-shaped member, 38... Gas inlet, 39... Gas exhaust, 40... Gas introduction tube, 41... Gas exhaust tube, 42... Cable, 43.. Cable body 44... Connector, 45.. Cylindrical member, 46.. First gasket, 47... Second gasket, 48... Capcon, 70... Control unit, 80... Accessories, 100... X-ray irradiation system, 200... Coater / developer device, 230... Resist application unit, 280... Developing unit, 308... Gas introduction means, 309. Gas exhaust means.

Claims (10)

An X-ray irradiation system comprising an X-ray irradiation apparatus for irradiating X-rays, an X-ray control apparatus for controlling the X-ray irradiation apparatus, and a cable electrically connecting the X-ray irradiation apparatus and the X-ray control apparatus. , The X-ray irradiation apparatus, X-ray tube, A driving unit for driving the X-ray tube; A case accommodating the X-ray tube and the driving unit and having an opening; A plate-shaped member provided in the case and having an opening at a position corresponding to the opening; The cable, A connector which is provided at one end of the cable and detachably connects one end of the cable and a connection terminal electrically connected to the drive unit; A cylindrical member surrounding the connector, The drive unit and the cable are detachable and electrically connected to each other by the connection terminal and the connector via the opening of the case and the opening of the plate member. The method according to claim 1, At one end of the tubular member, a male screw portion provided at the one end and a female screw portion provided at the opening of the plate member are screwed together, A clamp member for clamping the cable is provided at the other end of the tubular member, and the other end and the clamp member are screwed to each other. The method according to claim 1 or 2, One end of the cylindrical member is provided with a first seal member for sealing the plate member and the cylindrical member, The other end of the said cylindrical member is equipped with the 2nd sealing member for sealing the said clamp member and the said cylindrical member, The x-ray irradiation system characterized by the above-mentioned. The method according to claim 3, The connector has a connector body portion and an outer circumference portion covering a part of the connector body portion at a side connecting with the connection terminal, The connector body part is connected to the connection terminal in a state where the outer circumferential portion is tensioned by a predetermined portion toward another part of the connector body part by an operator, and the presence of the first seal member in the connection state causes the X-ray irradiation system, characterized in that the tensioned state of the outer peripheral portion is maintained. X-ray tube, A driving unit for driving the X-ray tube; A case accommodating the X-ray tube and the driving unit; A gas introduction part provided in the case and for introducing gas into the case; An X-ray irradiation apparatus, provided in the case, comprising a gas exhaust unit for exhausting the gas in the case. A resist coating apparatus for applying a resist coating treatment to a first substrate, a developing apparatus for developing a second substrate, and at least one of the resist coating apparatus and the developing apparatus, wherein the first substrate is provided. An X-ray irradiation apparatus for static eliminating the at least one substrate by irradiating X-rays to at least one of the substrate and the second substrate, an X-ray control apparatus for controlling the X-ray irradiation apparatus, and the X-ray irradiation An X-ray irradiation system having a cable for electrically connecting a device and the X-ray control device, The X-ray irradiation apparatus, An X-ray tube for irradiating X-rays to the first substrate or the second substrate, A driving unit for driving the X-ray tube; A case accommodating the X-ray tube and the driving unit and having an opening; A plate-shaped member provided in the case and having an opening at a position corresponding to the opening; A gas introduction part provided in the case and for introducing gas into the case; A gas exhaust unit provided in the case and configured to exhaust the gas in the case; The cable, A connector provided at one end of the cable, for detachably connecting one end of the cable and a connection terminal electrically connected to the drive unit; A cylindrical member surrounding the connector, The drive unit and the cable are detachably and electrically connected to each other by the connection terminal and the connector via the opening of the case and the opening of the plate member. The method according to claim 6, At one end of the tubular member, a male screw portion provided at the one end and a female screw portion provided at the opening of the plate member are screwed together, A clamp member for clamping the cable is provided at the other end of the tubular member, and the other end and the clamp member are screwed to each other. The method according to claim 6 or 7, One end of the cylindrical member is provided with a first seal member for sealing the plate member and the cylindrical member, The other end of the said cylindrical member is equipped with the 2nd sealing member for sealing the said clamp member and the said cylindrical member, The x-ray irradiation system characterized by the above-mentioned. The method according to claim 6 or 7, A gas introduction pipe for introducing the gas from an external device into the case through the gas introduction unit; And a gas exhaust pipe for exhausting the gas in the case to the outside through the gas exhaust unit. The method according to claim 8, A gas introduction pipe for introducing the gas from an external device into the case through the gas introduction unit; And a gas exhaust pipe for exhausting the gas in the case to the outside through the gas exhaust unit.

Images