KR20090081902A - Flexible copper clad laminate having good dimensional stability and copper foil structure for the same - Google Patents

Flexible copper clad laminate having good dimensional stability and copper foil structure for the same Download PDF

Info

Publication number
KR20090081902A
KR20090081902A KR1020080008075A KR20080008075A KR20090081902A KR 20090081902 A KR20090081902 A KR 20090081902A KR 1020080008075 A KR1020080008075 A KR 1020080008075A KR 20080008075 A KR20080008075 A KR 20080008075A KR 20090081902 A KR20090081902 A KR 20090081902A
Authority
KR
South Korea
Prior art keywords
clad laminate
copper clad
flexible copper
flexible
dimensional stability
Prior art date
Application number
KR1020080008075A
Other languages
Korean (ko)
Other versions
KR100990272B1 (en
Inventor
김경각
안중규
전상현
최성훈
Original Assignee
엘에스엠트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘에스엠트론 주식회사 filed Critical 엘에스엠트론 주식회사
Priority to KR1020080008075A priority Critical patent/KR100990272B1/en
Publication of KR20090081902A publication Critical patent/KR20090081902A/en
Application granted granted Critical
Publication of KR100990272B1 publication Critical patent/KR100990272B1/en

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/08PCBs, i.e. printed circuit boards

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Laminated Bodies (AREA)

Abstract

A flexible copper clad laminate having good dimensional stability and a copper foil structure for the same are provided to minimize or remove a problem that dimensions change before or after a copper layer removing process for forming circuit patterns by improving dimensional stability of the flexible copper clad laminate. A flexible copper clad laminate is constructed in a structure that a base film and a copper layer are adhered to each other without adhesive. The flexible copper clad laminate is characterized in that the copper layer satisfies an orientation index range of 0.45 or more in the direction. The orientation index is an orientation index(Io) of Wilson which uses X-ray diffraction and is represented by a mathematical expression, Io=relative intensity ratio of actually measured source peaks/intensity ratio of ASTM data.

Description

치수안정성이 좋은 연성 동장적층판 및 이를 위한 동박 구조{Flexible copper clad laminate having good dimensional stability and copper foil structure for the same}Flexible copper clad laminate having good dimensional stability and copper foil structure for the same

본 발명은 연성 동장적층판(FCCL: Flexible copper clad laminate)에 관한 것으로서, 더욱 상세하게는 베이스 필름(base film)과 구리층이 접착제 없이 부착된 구조를 가지며 치수안정성이 개선된 연성 동장적층판에 관한 것이다.The present invention relates to a flexible copper clad laminate (FCCL), and more particularly, to a flexible copper clad laminate having a structure in which a base film and a copper layer are attached without an adhesive and having improved dimensional stability. .

연성 동장적층판은 전자기기의 경박단소화 추세에 따라 수요가 급증하는 연성 회로기판의 주요 소재로서, 작업성이 뛰어나고 내열성, 내굴곡성 및 내약품성이 뛰어나 핸드폰, 디지털 카메라, LCD 분야 등에 사용되고 있다. 연성 동장적층판은 회로 배선이 형성된 이후 IC칩이나 전자소자들을 실장되거나, LCD 패널과 PCB 기판을 상호 접속시키는 역할을 하게 된다.Flexible copper clad laminates are the main material for flexible circuit boards, in which demand increases rapidly according to the trend of thin and short electronic devices. They are used in mobile phones, digital cameras and LCDs because they have excellent workability and excellent heat resistance, flex resistance, and chemical resistance. Flexible copper-clad laminates serve to mount IC chips or electronic devices after circuit wiring is formed or to interconnect LCD panels and PCB substrates.

특히 베이스 필름과 구리층 사이에 접착제가 개재되지 않는 구조의 연성 동장적층판은 접착제를 사용하는 특성상 친환경적이며 열이 많이 발생하는 분야에 유용하게 사용된다.In particular, a flexible copper clad laminate having a structure in which no adhesive is interposed between the base film and the copper layer is useful in an environment that is environmentally friendly and generates a lot of heat due to the use of the adhesive.

도 1에는 접착제를 사용하지 않는 일반적인 연성 동장적층판의 구성이 도시 되어 있다. 도면에 나타난 바와 같이 연성 동장적층판은 베이스 필름(100) 위에 이종금속으로 이루어진 타이코팅층(101), 구리 스퍼터링층(102) 및 구리 도전층(103)이 순차적으로 라미네이팅(laminating)된 구조를 갖는다.Figure 1 shows the configuration of a general flexible copper clad laminate without using an adhesive. As shown in the figure, the flexible copper clad laminate has a structure in which the tie coating layer 101, the copper sputtering layer 102, and the copper conductive layer 103 made of dissimilar metals are sequentially laminated on the base film 100.

연성 동장적층판에 있어서, 베이스 필름(100)으로는 IC칩 본딩 등의 안정성을 위해 동박형태의 구리층과 열팽창률이 유사하고 내열성에 뛰어난 폴리이미드(Polyimide) 수지가 널리 사용된다.In the flexible copper clad laminate, a polyimide resin having a similar thermal expansion coefficient and excellent heat resistance to a copper foil-type copper layer is widely used for the stability of IC chip bonding and the like.

그러나, 폴리이미드 수지를 사용하더라도 수지와 금속 간의 강도나, 열팽창계수 등의 차이로 인한 내부 응력은 여전히 존재하므로 회로 패턴의 형성을 위한 구리층 제거공정 전후에 치수가 변화하게 되며, 이로 인해 IC칩이나 전자소자의 실장시 편차가 발생하게 되는 문제가 발생하게 된다.However, even when the polyimide resin is used, the internal stress due to the difference between the strength and the thermal expansion coefficient between the resin and the metal still exists, so that the dimensions change before and after the copper layer removal process for forming the circuit pattern, thereby causing the IC chip. However, there is a problem that a deviation occurs when mounting the electronic device.

연성 동장적층판의 치수안정성을 높이기 위해 종래에는 주로 폴리이미드층의 물성을 콘트롤하는 방법을 사용하였으나, 회로선의 피치(pitch)를 35㎛ 정도 혹은 그 이내로 좁게 설계하는 경우에는 치수안정성으로 인한 문제가 있다.In order to increase the dimensional stability of the flexible copper clad laminate, conventionally, a method of controlling the physical properties of the polyimide layer is mainly used, but there is a problem due to the dimensional stability when the pitch of the circuit wire is narrowly designed to about 35 μm or less. .

본 발명은 상기와 같은 문제점을 해결하기 위해 창안된 것으로서, 구리층의 배향도를 최적화하여 치수안정성이 좋은 연성 동장적층판 및 이를 위한 동박 구조를 제공하는 데 그 목적이 있다.The present invention was devised to solve the above problems, and an object thereof is to provide a flexible copper clad laminate and a copper foil structure therefor having good dimensional stability by optimizing the degree of orientation of the copper layer.

상기와 같은 목적을 달성하기 위해 본 발명은 베이스 필름과 구리층이 접착 제 없이 부착된 구조의 연성 동장적층판에 있어서, 상기 구리층이 <220> 방향의 배향도 지수가 0.45 이상의 범위를 만족하는 것을 특징으로 하는 연성 동장적층판을 개시한다.In order to achieve the above object, the present invention provides a flexible copper clad laminate having a structure in which a base film and a copper layer are attached without an adhesive, wherein the copper layer satisfies a range of 0.45 or more in the degree of orientation index in the <220> direction. A flexible copper clad laminate is disclosed.

상기 배향도 지수는 X선 회절(XRD)을 이용하는 윌슨(Willson)의 배향도 지수(D)로서 수학식,The orientation index is Wilson's orientation index (D) using X-ray diffraction (XRD),

Figure 112008006465924-PAT00001
Figure 112008006465924-PAT00001

으로 표현될 수 있다.It can be expressed as.

본 발명의 다른 측면에 따르면, 연성 동장적층판에 사용되는 동박에 있어서,According to another aspect of the present invention, in the copper foil used for the flexible copper clad laminate,

<220> 방향의 배향도 지수가 0.45 이상의 범위를 만족하는 것을 특징으로 하는 연성 동장적층판용 동박이 제공된다.The copper foil for flexible copper-clad laminates provided with the orientation degree index of a <220> direction satisfy | fills 0.45 or more range.

본 발명에 따르면 연성 동장적층판의 치수안정성이 개선되므로 회로 패턴의 형성을 위한 구리층 제거공정 전후에 치수가 변화하는 문제를 최소화하거나 제거할 수 있다.According to the present invention, since the dimensional stability of the flexible copper clad laminate is improved, the problem of changing the dimension before and after the copper layer removing process for forming the circuit pattern can be minimized or eliminated.

특히 본 발명에 따르면 TD(Transverse Direction) 방향의 치수안정성이 0~0.05%의 범위를 만족할 수 있는 연성 동장적층판이 제공되므로 회로선의 피치가35㎛ 이내인 협피치 제품의 요구를 만족할 수 있는 장점이 있다.In particular, the present invention provides a flexible copper clad laminate that can satisfy the range of 0 to 0.05% of dimensional stability in the direction of TD (Transverse Direction), so that the pitch of the circuit wire can satisfy the requirements of narrow pitch products within 35 μm. have.

이하, 첨부된 도면을 참조하여 본 발명의 바람직한 실시예를 상세히 설명하 기로 한다. 이에 앞서, 본 명세서 및 청구범위에 사용된 용어나 단어는 통상적이거나 사전적인 의미로 한정해서 해석되어서는 아니되며, 발명자는 그 자신의 발명을 가장 최선의 방법으로 설명하기 위해 용어의 개념을 적절하게 정의할 수 있다는 원칙에 입각하여 본 발명의 기술적 사상에 부합하는 의미와 개념으로 해석되어야만 한다. 따라서, 본 명세서에 기재된 실시예와 도면에 도시된 구성은 본 발명의 가장 바람직한 일 실시예에 불과할 뿐이고 본 발명의 기술적 사상을 모두 대변하는 것은 아니므로, 본 출원시점에 있어서 이들을 대체할 수 있는 다양한 균등물과 변형예들이 있을 수 있음을 이해하여야 한다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. Prior to this, terms or words used in the specification and claims should not be construed as having a conventional or dictionary meaning, and the inventors should properly explain the concept of terms in order to best explain their own invention. Based on the principle that can be defined, it should be interpreted as meaning and concept corresponding to the technical idea of the present invention. Therefore, the embodiments described in the specification and the drawings shown in the drawings are only the most preferred embodiment of the present invention and do not represent all of the technical idea of the present invention, various modifications that can be replaced at the time of the present application It should be understood that there may be equivalents and variations.

본 발명에 따른 연성 동장적층판은 폴리이미드 필름 위에 동박 형태의 구리층이 형성된 구조를 갖는다. 연성 동장적층판의 기본적인 적층 형태는 접착제가 없는(adhesiveless) 통상의 연성 동장적층판과 동일하게 구성될 수 있으므로 그 상세한 설명은 생략하기로 한다.The flexible copper clad laminate according to the present invention has a structure in which a copper layer in the form of copper foil is formed on a polyimide film. Since the basic laminated form of the flexible copper clad laminate may be configured in the same manner as the conventional flexible copper clad laminate, the detailed description thereof will be omitted.

본 발명에 따른 연성 동장적층판에 있어서, 구리층은 방위가 <220>인 결정립들의 배향도 지수가 0.45 이상의 범위에 포함되도록 구성됨으로써 협피치의 연성 동장적층판에 요구되는 치수안정성을 만족하게 된다.In the flexible copper clad laminate according to the present invention, the copper layer is configured such that the orientation index of crystal grains having an orientation of <220> is in the range of 0.45 or more, thereby satisfying the dimensional stability required for the flexible copper clad laminate of narrow pitch.

구체적으로, 구리층은 X선 회절(XRD)을 이용하고 아래의 수학식으로 표현되는 윌슨(Willson) 배향도 지수(IO)가 0.45 이상을 만족해야 한다.Specifically, the copper layer uses X-ray diffraction (XRD) and the Wilson orientation index (I O ) expressed by the following equation should satisfy 0.45 or more.

Figure 112008006465924-PAT00002
Figure 112008006465924-PAT00002

수학식 1을 참조하면, 윌슨(Willson) 배향도 지수(IO)는 구리층을 이루는 결정립들의 방위별 실측 피크의 상대강도비를 ASTM(American Society of Testing Materials; 미국 재료시험협회) 데이터에서의 강도비로 나눈값으로 정의된다.Referring to Equation 1, the Wilson orientation index (I O ) is the strength of the relative strength ratio of the measured peaks of the grains constituting the copper layer by orientation in the ASTM (American Society of Testing Materials) data. Defined as ratio divided by ratio.

연성 동장적층판의 치수안정성은 IPC(International Printed Circuit) 규격에 의거하여 MD(Machine Direction)와 TD(Transverse Direction)의 치수변화를 측정함으로써 산출되며, 특히 TD 방향의 치수안정성이 중요하다.The dimensional stability of flexible copper clad laminates is calculated by measuring the dimensional change of MD (Machine Direction) and TD (Transverse Direction) based on the IPC (International Printed Circuit) standard, especially the dimensional stability of the TD direction is important.

연성 동장적층판의 최초 치수를 A, 회로 패턴 형성을 위해 염화구리나 염화제2철 용액을 이용한 화학적 에칭공정으로 구리층을 소정 패턴대로 제거한 후의 치수를 B, B의 시편을 예컨대, 150℃에서 30분간 열처리한 후의 치수를 C로 정의할 때, 치수안정성은 A에 대한 (B-A)의 백분율이나, A에 대한 (C-A)의 백분율로 정의된다.The initial dimensions of the flexible copper clad laminate are A, and the dimensions after removing the copper layer in a predetermined pattern by a chemical etching process using a copper chloride or ferric chloride solution to form a circuit pattern. When the dimension after heat treatment for minute is defined as C, the dimensional stability is defined as a percentage of (BA) to A or a percentage of (CA) to A.

도 2에는 연성 동장적층판에 대하여 수행된 <220> 방향의 윌슨(Willson) 배향도 지수(IO)별 치수안정성의 측정 결과가 나타나 있다. 도면을 참조하면, 회로선의 폭이 38㎛이고 회로선의 피치가 35㎛인 제품을 기준으로 했을 때, TD의 치수안정성은 0~0.08%가 요구되고, 보다 좁은 회로선 피치의 제품의 경우에는 0~0.05%의 범위가 요구되고 있는 점을 감안할 때, <220> 방향의 윌슨(Willson) 배향도 지수(IO)는 0.45 이상을 만족해야 함을 확인할 수 있다.FIG. 2 shows measurement results of dimensional stability for each Wilson orientation degree index (I 0 ) in the <220> direction performed on a flexible copper clad laminate. Referring to the drawing, when the width of the circuit line is 38 μm and the pitch of the circuit line is 35 μm as a reference, the dimensional stability of the TD is required to be 0 to 0.08%, and in the case of a product having a narrower circuit line pitch, 0 Given that the range of -0.05% is required, it can be confirmed that the Wilson orientation index (I 0 ) in the <220> direction must satisfy 0.45 or more.

즉, 도 2에서 IO가 예컨대 0.2, 0.25, 0.27, 0.30, 0.33 등인 경우에는 0~0.05%의 범위를 벗어나게 되므로 35㎛ 이내의 협피치 배선 제품에 부적합하다. 비록 IO가 0.44인 경우 상기 범위에 포함되긴 하나, 측정오차와 안정적인 수치범위를 감안할 때 IO는 0.45 이상을 만족하는 것이 가장 바람직하다.That is, in FIG. 2, when I 0 is, for example, 0.2, 0.25, 0.27, 0.30, 0.33, etc., it is out of the range of 0 to 0.05%, which is not suitable for narrow pitch wiring products within 35 μm. Even if the I O is 0.44 doegin one within the above range, it is most desirable to satisfy the I O is 0.45 or more, considering measurement errors and reliable numerical range.

이상에서 본 발명은 비록 한정된 실시예와 도면에 의해 설명되었으나, 본 발명은 이것에 의해 한정되지 않으며 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자에 의해 본 발명의 기술사상과 아래에 기재될 특허청구범위의 균등범위 내에서 다양한 수정 및 변형이 가능함은 물론이다.Although the present invention has been described above by means of limited embodiments and drawings, the present invention is not limited thereto and will be described below by the person skilled in the art to which the present invention pertains. Of course, various modifications and variations are possible within the scope of the claims.

본 명세서에 첨부되는 다음의 도면들은 본 발명의 바람직한 실시예를 예시하는 것이며, 상술한 발명의 상세한 설명과 함께 본 발명의 기술사상을 더욱 이해시키는 역할을 하는 것이므로, 본 발명은 그러한 도면에 기재된 사항에만 한정되어 해석되어서는 아니된다.The following drawings, which are attached to this specification, illustrate preferred embodiments of the present invention, and together with the detailed description of the present invention serve to further understand the technical spirit of the present invention, the present invention includes matters described in such drawings. It should not be construed as limited to.

도 1은 일반적인 연성 동장적층판의 구성을 도시한 단면도이다.1 is a cross-sectional view showing the configuration of a general flexible copper clad laminate.

도 2는 본 발명에 따라 수행된 윌슨(Willson)의 배향도 지수별 치수안정성 측정 결과를 나타낸 테이블이다.Figure 2 is a table showing the measurement results of the dimensional stability of Wilson (Willson) index index according to the present invention.

Claims (4)

베이스 필름과 구리층이 접착제 없이 부착된 구조의 연성 동장적층판에 있어서,In the flexible copper clad laminate of the base film and the copper layer attached without an adhesive, 상기 구리층은 <220> 방향의 배향도 지수가 0.45 이상의 범위를 만족하는 것을 특징으로 하는 연성 동장적층판.The copper layer is a flexible copper clad laminate, characterized in that the orientation index in the <220> direction satisfies the range of 0.45 or more. 제1항에 있어서,The method of claim 1, 상기 배향도 지수는 X선 회절(XRD)을 이용하고 수학식,The degree of orientation index is X-ray diffraction (XRD) using the equation,
Figure 112008006465924-PAT00003
Figure 112008006465924-PAT00003
으로 표현되는 윌슨(Willson)의 배향도 지수(IO)인 것을 특징으로 하는 연성 동장적층판.The flexible copper clad laminate, characterized in that the orientation of the Wilson (Willson) index (I O ).
연성 동장적층판에 사용되는 동박에 있어서,In the copper foil used for the flexible copper clad laminate, <220> 방향의 배향도 지수가 0.45 이상의 범위를 만족하는 것을 특징으로 하는 연성 동장적층판용 동박 구조.The copper foil structure for flexible copper clad laminated boards whose orientation degree index of a <220> direction satisfy | fills 0.45 or more range. 제3항에 있어서,The method of claim 3, 상기 배향도 지수는 X선 회절(XRD)을 이용하고 수학식,The degree of orientation index is X-ray diffraction (XRD) using the equation,
Figure 112008006465924-PAT00004
Figure 112008006465924-PAT00004
으로 표현되는 윌슨(Willson)의 배향도 지수(D)인 것을 특징으로 하는 연성 동장적층판용 동박 구조.The copper foil structure for flexible copper clad laminates, characterized by the degree of orientation (D) of Wilson (Willson) expressed by.
KR1020080008075A 2008-01-25 2008-01-25 Flexible copper clad laminate having good dimensional stability and copper foil structure for the same KR100990272B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020080008075A KR100990272B1 (en) 2008-01-25 2008-01-25 Flexible copper clad laminate having good dimensional stability and copper foil structure for the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020080008075A KR100990272B1 (en) 2008-01-25 2008-01-25 Flexible copper clad laminate having good dimensional stability and copper foil structure for the same

Publications (2)

Publication Number Publication Date
KR20090081902A true KR20090081902A (en) 2009-07-29
KR100990272B1 KR100990272B1 (en) 2010-10-26

Family

ID=41293113

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080008075A KR100990272B1 (en) 2008-01-25 2008-01-25 Flexible copper clad laminate having good dimensional stability and copper foil structure for the same

Country Status (1)

Country Link
KR (1) KR100990272B1 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63287394A (en) * 1987-05-18 1988-11-24 Daikin Ind Ltd Operation controller for air conditioner
JPH0613435A (en) * 1992-06-24 1994-01-21 Hitachi Cable Ltd Carrier tape and manufacturing method thereof
JP2754157B2 (en) * 1994-03-31 1998-05-20 三井金属鉱業株式会社 Manufacturing method of electrolytic copper foil for printed wiring board
JP4174746B2 (en) 1999-10-05 2008-11-05 東レ・デュポン株式会社 Method for producing copper clad laminate

Also Published As

Publication number Publication date
KR100990272B1 (en) 2010-10-26

Similar Documents

Publication Publication Date Title
KR20200015643A (en) Flexible printed circuit
ATE548430T1 (en) CUREABLE RESIN FILM FOR FLEXIBLE CIRCUIT BOARDS AND PRODUCTION METHOD THEREOF
MY159854A (en) Resin coated copper foil and method for manufacturing resin coated copper foil
CN102340937B (en) Manufacturing method of flexible multi-layer circuit board
KR101151473B1 (en) Flexible Printed Circuits Board and Manufacturing method of the same
CN106576428B (en) The manufacturing method of flexible copper wiring plate and its flexible copper-clad laminate used with support membrane
JP3202935B2 (en) Flexible wiring board and method of manufacturing the same
KR102404294B1 (en) Flexible printed circuit board and electronic device
KR100990272B1 (en) Flexible copper clad laminate having good dimensional stability and copper foil structure for the same
TW201813458A (en) Hollow flexible circuit board and method for manufacturing same
KR20090093126A (en) Flexible copper clad laminate improved in vibration resistance property
KR101118041B1 (en) Flexible Printed Circuits Board and Manufacturing method of the same
KR101024937B1 (en) Double side flexible copper clad laminate and method for fabricating the same
CN101472391B (en) Copper foil
JP2009224358A (en) Flexible printed wiring board and optical transmission/reception module
KR100689233B1 (en) Polyimide direct plating method
KR101151845B1 (en) Flexible Copper Clad Laminate and method for producting the same
KR100990288B1 (en) Flexible copper clad layer
WO2005027221A1 (en) Chip on flex tape with dimension retention pattern
US20140313683A1 (en) Tape carrier package and method of manufacturing the same
JP2002252469A (en) Multilayer flexible printed wiring board
KR20210001986A (en) Polyimide film, metal-clad laminate, and flexible printed circuits
CN111805998A (en) High-frequency transmission composite copper foil substrate and preparation method thereof
JP2021146516A (en) Flexible substrate, production method of the same and heating device therefor
CN115243462A (en) Circuit board and processing method

Legal Events

Date Code Title Description
A201 Request for examination
N231 Notification of change of applicant
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20130912

Year of fee payment: 4

FPAY Annual fee payment

Payment date: 20140912

Year of fee payment: 5

FPAY Annual fee payment

Payment date: 20150911

Year of fee payment: 6

FPAY Annual fee payment

Payment date: 20160909

Year of fee payment: 7

FPAY Annual fee payment

Payment date: 20170913

Year of fee payment: 8

FPAY Annual fee payment

Payment date: 20190903

Year of fee payment: 10