KR20090047603A - Apparatus for conveying a substrate - Google Patents

Apparatus for conveying a substrate Download PDF

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Publication number
KR20090047603A
KR20090047603A KR1020070113519A KR20070113519A KR20090047603A KR 20090047603 A KR20090047603 A KR 20090047603A KR 1020070113519 A KR1020070113519 A KR 1020070113519A KR 20070113519 A KR20070113519 A KR 20070113519A KR 20090047603 A KR20090047603 A KR 20090047603A
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KR
South Korea
Prior art keywords
shaft
substrate
roller
lower roller
holder
Prior art date
Application number
KR1020070113519A
Other languages
Korean (ko)
Inventor
김영미
Original Assignee
세메스 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 세메스 주식회사 filed Critical 세메스 주식회사
Priority to KR1020070113519A priority Critical patent/KR20090047603A/en
Publication of KR20090047603A publication Critical patent/KR20090047603A/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G39/00—Rollers, e.g. drive rollers, or arrangements thereof incorporated in roller-ways or other types of mechanical conveyors 
    • B65G39/02—Adaptations of individual rollers and supports therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The substrate conveying apparatus includes a roller unit for transferring a substrate interposed between the lower roller and the upper roller by the rotation of the lower roller and the upper roller, a first shaft of a long axis type which continuously connects the lower rollers positioned at both ends, and both ends. And a second shaft of a single shaft type for discontinuously connecting each of the upper rollers positioned in the holder, and a holder portion integrally connected to the first shaft and the second shaft. Thus, sagging of the shaft can be prevented, and the holder portion can be made integral to improve damage.

Description

Apparatus for conveying a substrate}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for manufacturing a flat panel display device, and more particularly, to a substrate transfer device for transporting a glass substrate used in a flat panel display device.

In general, the flat panel display includes a liquid crystal display (LCD) using liquid crystal, a plasma display (PDP) using plasma, an organic light emitting display (OLED) using an organic light emitting element, and the like.

Such a flat panel display includes a display panel for substantially displaying an image. The display panel is usually manufactured using a glass substrate as a mother substrate. Specifically, the display panel is manufactured by repeatedly performing a deposition process, an etching process, a photolithography process, a cleaning process, and an inspection process on the mother substrate. In this case, the mother substrate is conveyed to a position where the processes are performed through a separate substrate transport apparatus or performs a process in order to perform the above processes.

The substrate conveying apparatus is composed of a roller which contacts an end of the substrate and substantially conveys the substrate through rotation, and a shaft connected to the roller to rotate the roller. In particular, in order to convey the substrate stably, the roller is also disposed on the upper portion together with the lower portion of the substrate.

Here, the size of the mother substrate also tends to increase as the flat panel display is enlarged in recent years, and thus the length of the shaft connecting the roller is also increased. Therefore, an auxiliary roller is provided at the center portion of the shaft located below the substrate to prevent sagging of the substrate.

However, since the process is performed on the upper surface of the substrate, it is difficult to add an auxiliary roller to the shaft located above. Therefore, a sag phenomenon occurs as the length of the shaft gradually increases. Due to the deflection caused by this deflection, the conveyance of the mother substrate is not made smoothly, and in severe cases, there is a problem that may damage the mother substrate.

In view of the above-mentioned problems, one problem to be solved through preferred embodiments of the present invention is to provide a substrate conveying apparatus that prevents sagging of a shaft connected to a roller and is easy to assemble and adjust.

In order to achieve the above object of the present invention, the substrate transfer device according to the present invention includes a roller portion, a first shaft, a second shaft, and a holder portion. The roller portion includes a lower roller and an upper roller, and conveys a substrate interposed between the lower roller and the upper roller by rotation of the lower roller and the upper roller. The first shaft continuously connects lower rollers positioned at both ends, and has a long axis structure. The second shaft discontinuously connects each of the upper rollers positioned at both ends thereof, and has a shortened structure. The holder portion is integrally connected to the first shaft and the second shaft.

According to an embodiment of the present invention, it may further include a rotational force transmission unit for transmitting the rotational force of the first shaft to the second shaft, located at both ends.

According to another embodiment of the present invention, the second shaft may be disposed on top of one end and the other end of the first shaft, the central axis of which is parallel to the central axis of the first shaft.

According to another embodiment of the present invention, when the first shaft rotates, the first bearing interposed between the first shaft and the holder portion to reduce the friction with the holder portion, and the second shaft is rotated. The second bearing may further include a second bearing interposed between the second shaft and the holder to reduce friction with the holder.

According to another embodiment of the present invention, the lower roller is installed along its circumference, and includes a first strip for increasing friction with the substrate, and the upper roller is installed along its circumference, and the substrate It may include a second band for increasing the frictional force with the.

The substrate conveying apparatus according to the present invention configured as described above smoothly conveys the substrate by preventing the deflection of the shaft by discontinuously connecting the upper roller by using the single-shaft shaft, and moves the shafts positioned above and below the substrate. As the supporting holder has an integral structure, assembly and adjustment are easy.

Hereinafter, a substrate transfer apparatus according to an exemplary embodiment of the present invention will be described in detail with reference to the accompanying drawings. As the inventive concept allows for various changes and numerous embodiments, particular embodiments will be illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to the specific disclosed form, it should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the present invention. In describing the drawings, similar reference numerals are used for similar elements. In the accompanying drawings, the dimensions of the structure is shown to be larger than the actual size for clarity of the invention, or to reduce the actual size to illustrate the schematic configuration.

Terms such as first and second may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as the second component, and similarly, the second component may also be referred to as the first component.

The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting of the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprise" or "have" are intended to indicate that there is a feature, number, step, action, component, part, or combination thereof described on the specification, and one or more other features. It is to be understood that the present invention does not exclude the possibility of the presence or the addition of numbers, steps, operations, components, parts, or combinations thereof.

On the other hand, unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art. Terms such as those defined in the commonly used dictionaries should be construed as having meanings consistent with the meanings in the context of the related art and shall not be construed in ideal or excessively formal meanings unless expressly defined in this application. Do not.

1 is a schematic view showing a substrate transfer apparatus according to an embodiment of the present invention, Figure 2 is a side view of the substrate transfer apparatus shown in FIG.

1 and 2, the substrate transfer apparatus 100 according to an embodiment of the present invention may be used to transfer the substrate G in a process.

The substrate transfer device 100 includes a roller unit 110, a first shaft 120, a second shaft 130, and a holder unit 140.

The roller portion 110 is in contact with the substrate (G) to substantially convey the substrate (G). That is, the roller part 110 serves to convey the substrate G by contacting both ends of the width direction of the substrate G (for example, the direction perpendicular to the conveying direction). For example, the substrate G may include a glass substrate G for manufacturing a display panel, which is a core component of the flat panel display.

The roller unit 110 includes a lower roller 112 positioned below the substrate G and an upper roller 114 positioned above. The lower roller 112 and the upper roller 114 serve to convey the substrate G interposed between the lower roller 112 and the upper roller 114 through rotation. To this end, the lower roller 112 and the upper roller 114 are disposed at positions corresponding to both ends of the substrate (G) to be conveyed, and based on the substrate (G) for stable conveyance of the substrate (G) They are arranged to face each other (eg, to face each other). For example, the lower roller 112 is disposed to correspond to both ends of the lower portion of the substrate G, and the upper roller 114 at a position opposite to the lower roller 112 so that the substrate G can be interposed therebetween. ) Is placed.

Here, the lower roller 112 and the upper roller 114 may be provided with a member for improving the sliding of the substrate (G) around the. For example, the lower roller 112 is provided with a first band 112a made of a material having a high friction coefficient such as rubber, and the upper roller 114 has a second belt made of a material having a high friction coefficient around the lower roller 112. 114a is installed. The first band 112a and the second band 114a increase the frictional force with the substrate G to prevent slippage, and form a flat contact surface with the substrate G to maximize the frictional force. Let's do it. That is, it is preferable to have a form that can increase the contact area with the substrate (G).

The first shaft 120 is disposed along a direction perpendicular to the conveying direction of the substrate G. The first shaft 120 has a long axis structure for continuously connecting the lower roller 112 located at both ends. That is, the lower roller 112 is installed at both ends of the first shaft 120. The first shaft 120 is arranged in parallel with each other at a predetermined interval along the conveyance direction of the substrate (G).

A drive unit (not shown) for generating a rotational force is mechanically connected to the first shaft 120. The drive unit generally includes a drive motor. For example, the driving unit may include a servo motor which is easy to precisely control, an index motor which may be rotated in stages, and the like. Alternatively, the driving unit may be a variety of units that can generate a rotational force.

The first shaft 120 rotates by the rotational force provided from the driving unit (not shown), and rotates the lower roller 112 by this rotation. The lower roller 112 rotated by the first shaft 120 conveys the substrate G in contact with the lower roller 112 in the rotational direction. Therefore, the lower roller 112 may be integrally formed and fixed to the first shaft 120 so that the lower roller 112 may rotate by the rotation of the first shaft 120. Alternatively, the lower roller 1120 may be manufactured separately and then fixed to the first shaft 120 using a key or a locker.

On the other hand, when both ends are supported and conveyed by the lower roller 112 as the size of the substrate G increases, a phenomenon may occur in the center portion. Although not shown to prevent sagging of the substrate G, the center portion of the substrate G is supported between the middle portion of the first shaft 120, that is, the lower roller 112 located at both ends. One or more auxiliary rollers may be installed for this purpose. Since the auxiliary roller (not shown) does not need to substantially carry the substrate G, the auxiliary roller (not shown) may be configured to rotate together with the rotation of the first shaft 120.

The second shaft 130 has a shortened structure and discontinuously connects the upper roller 114 located at both ends. That is, the second shaft 130 has a shaft connected to the upper roller 114 located at one end and a shaft connected to the upper roller 114 located at the other end while having the same central axis (for example, a rotating shaft). Are configured individually. For example, the second shaft 130 may be connected to each of the upper rollers 114 positioned at both ends thereof, and disposed to have the same central axis.

The second shaft 130 is parallel to the central axis (rotational axis) of the first shaft 120 to stably transport the substrate G interposed between the lower roller 112 and the upper roller 114. To be placed. The second shaft 130 in which the upper roller 114 is installed may be disposed at a predetermined number corresponding to the first shaft 120 along the conveyance direction of the substrate G. Unlike this, a plurality of pieces may be disposed in succession for each predetermined number corresponding to the first shaft 120 or may be disposed in a one-to-one correspondence with the first shaft 120.

The second shaft 130 substantially serves as a rotation axis of the upper roller 114, and the length of the second shaft 130 may extend only from the outside to the position of the upper roller 114. Alternatively, the upper roller 114 may have a length that extends a little longer than the position of the upper roller 114 in consideration of being pulled out of the second shaft 130. That is, the second shaft 130 is disposed on one side and the other side of the width direction of the substrate G, respectively, the second shaft 130 extends from the outside to the position of the upper roller 114, It may have a distance that is equal to or slightly shorter than the separation distance of the lower roller 112 in consideration of extending slightly.

As mentioned, the second shaft 130 has a shortened structure and is individually disposed corresponding to one side and the other side of the first shaft 120, thereby increasing the size of the substrate G. The possibility of sagging in the center can be ruled out. That is, sagging that may occur when the second shaft 130 has the same long-axis structure as the first shaft 120 can be prevented.

As a result, the substrate is maintained by continuously maintaining the second shaft 130 serving as the rotating shaft of the upper roller 114 in parallel with the first shaft 120 serving as the rotating shaft of the lower roller 112. (G) can be conveyed smoothly. In addition, as the length of the second shaft 130 is reduced to a shortened structure, material costs for producing the second shaft 130 may be reduced. On the other hand, the second shaft 130 may be used interchangeably since only the formation position of the second shaft 130 is changed when the size of the substrate G is changed.

The holder part 140 has an integrated structure connected to the first shaft 120 and the second shaft 130.

FIG. 3 is a schematic view of the holder part included in the substrate transport apparatus of FIG. 1 as viewed from the side. FIG.

Referring to FIG. 3, the holder part 140 is arranged such that the first shaft 120 and the second shaft 130 are arranged in parallel up and down, and the second shaft 120 and the second shaft 130 are disposed in parallel. It has an integrated structure capable of supporting together. In detail, both ends of the first shaft 120 and one end of the second shaft 130 are disposed to correspond to one side portion and the other side portion.

Here, the first bearing 142 interposed between the first shaft 120 and the holder portion 140 and the second bearing 144 interposed between the second shaft 120 and the holder portion 140. This may be further provided. The first bearing 142 serves to reduce friction between the first shaft 120 and the holder 140 when the first shaft 120 rotates. Similarly, the second bearing 144 serves to reduce friction between the second shaft 130 and the holder 140 when the second shaft 130 rotates.

As such, the holder part 140 serves to support the first shaft 120 and the second shaft 130 so as to be rotatable with ease. Here, as the holder portion 140 is configured to support the first shaft 120 and to support the second shaft 130 has a unitary structure without having a separate structure, between the individual configurations It can prevent equipment damage caused by flow and friction. This assists in smooth transportation of the substrate G while reducing the cost required for maintenance.

Meanwhile, the upper roller 114 connected to the second shaft 130 in the substrate transfer device 100 may be configured to rotate in response to the rotation of the lower roller 112. To this end, the rotational force of the first shaft 120 is disposed to the outside of the holder portion 140 and rotated by a rotational force provided from a driving unit (not shown) located on the outside to the second shaft 130. Rotation force transmission unit 150 may be provided to.

FIG. 4 is a schematic view viewed from the side of a rotational force transmitting unit included in the substrate transport apparatus of FIG. 1.

Referring to FIG. 4, the rotation force transmitting unit 150 transmits the rotational force of the first shaft 120 to the second shaft 130 so as to smoothly carry the transfer of the substrate G. Referring to FIG. Do it. That is, the second shaft 130 is rotated by the rotational force transmitting unit 150 transmitting the rotational force of the first shaft 120 to the second shaft 130, and through this rotation The upper roller 114 is rotated to correspond to the rotation of the lower roller 112. Therefore, the board | substrate G interposed between the said lower roller 112 and the upper roller 114 can be conveyed more smoothly.

For example, the rotation force transmitting unit 150 may have a gear structure. The rotational force transmitting unit 150 is connected to the first gear unit 152 connected to the first shaft 120 and the second shaft 130 to contact the first gear unit 152 at the circumferential portion. The second gear unit 154 can be divided into. The first gear part 152 and the second gear part 154 have a structure in which a magnet of an "N" pole and a magnet of an "S" pole are alternately disposed along a magnetic gear (for example, a magnetic gear), that is, a circumference thereof. Can have The first gear part 152 and the second gear part 154 have a structure in which the magnets of the "N" and "S" poles disposed along the circumference thereof engage with each other by a pulling force.

In contrast, the rotation force transmitting unit 150 may have a flat gear structure having a square concave-convex structure along its circumference, or may have a structure using a connection member such as a belt.

The rotational force transmitting unit 150 is the second shaft 130 is disposed on one side and the other side of the first shaft 120, respectively, so as to rotate each of the first shaft 120 It may be provided on the outside of the holder portion 140 located in one side and the other side, respectively.

As described above, the substrate conveying apparatus according to the preferred embodiment of the present invention prevents the shaft from sagging by discontinuously connecting, for example, individually by using a single-axis shaft in connecting the upper rollers located at both ends thereof. The substrate can be smoothly conveyed by preventing the occurrence of eccentricity due to the deflection of the shaft.

In addition, in the arrangement in which the shaft connecting the lower roller and the shaft connecting the upper roller are rotatable in parallel with each other, it has an integrated structure for supporting the two shafts together, thereby facilitating their assembly and adjustment. In the case of having a structure supporting the shafts individually, it is possible to prevent equipment damage due to friction generated between the individual holder portions, thereby reducing costs and smoothly conveying the substrate.

While the foregoing has been described with reference to preferred embodiments of the present invention, those skilled in the art will be able to variously modify and change the present invention without departing from the spirit and scope of the invention as set forth in the claims below. It will be appreciated.

1 is a schematic view showing a substrate transport apparatus according to an embodiment of the present invention.

FIG. 2 is a side view of the substrate transfer device shown in FIG. 1.

FIG. 3 is a schematic view of the holder part included in the substrate transport apparatus of FIG. 1 as viewed from the side. FIG.

FIG. 4 is a schematic view viewed from the side of a rotational force transmitting unit included in the substrate transport apparatus of FIG. 1.

Explanation of symbols on the main parts of the drawings

100: substrate transfer device 110: roller portion

 112: lower roller 112a: first strip

114: upper roller 114a: second strip

120: first shaft 130: second shaft

140: holder portion 142: first bearing

144: second bearing 150: rotational force transmission portion

152: first gear portion 154: second gear portion

G: Substrate

Claims (5)

A roller unit having a lower roller and an upper roller, and transferring a substrate interposed between the lower roller and the upper roller by rotation of the lower roller and the upper roller; A first shaft having a long axis that continuously connects lower rollers positioned at both ends; A second shaft of a single shaft type for discontinuously connecting each of the upper rollers positioned at both ends; And And a holder portion integrally connected to the first shaft and the second shaft. The substrate conveyance apparatus of Claim 1 further equipped with the rotational force transmission part which is located in the both ends, and transmits the rotational force of the said 1st shaft to the said 2nd shaft. The substrate conveyance apparatus of Claim 1 WHEREIN: The said 2nd shaft is a board | substrate conveying apparatus characterized by the above-mentioned center axis being arrange | positioned in the upper part of the one end part and the other end part of the said parallel shaft parallel to the center axis of the said 1st shaft, respectively. The bearing of claim 1, further comprising: a first bearing interposed between the first shaft and the holder part to reduce friction with the holder part when the first shaft rotates; And And a second bearing interposed between the second shaft and the holder portion for reducing friction with the holder portion when the second shaft rotates. 2. The lower roller of claim 1, wherein the lower roller is disposed along a circumference thereof, and includes a first band for increasing friction with the substrate, and the upper roller is disposed along the circumference thereof. And a second band for increasing.
KR1020070113519A 2007-11-08 2007-11-08 Apparatus for conveying a substrate KR20090047603A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020070113519A KR20090047603A (en) 2007-11-08 2007-11-08 Apparatus for conveying a substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020070113519A KR20090047603A (en) 2007-11-08 2007-11-08 Apparatus for conveying a substrate

Publications (1)

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KR20090047603A true KR20090047603A (en) 2009-05-13

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KR1020070113519A KR20090047603A (en) 2007-11-08 2007-11-08 Apparatus for conveying a substrate

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102347437B1 (en) * 2020-10-28 2022-01-04 고려대학교 산학협력단 Robot griper having fastening function

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102347437B1 (en) * 2020-10-28 2022-01-04 고려대학교 산학협력단 Robot griper having fastening function

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