KR20090032604A - Fabrication method of esd films using carbon nanotubes, and the esd films - Google Patents

Abstract

A method of manufacturing an antistatic coating film is provided to solve the scattering problem of nanoparticles by using one part carbon nanotube binder coating liquid and to manufacture a transparent and semitransparent antistatic coating film excellent in permeability, abrasion resistance, scratch resistance, chemical stability, and dimensional stability. A method of manufacturing an antistatic coating film by using carbon nanotubes comprises the steps of: introducing -OH and carboxyl group to the end of carbon nanotube by using acid solution; dispersing the acid-treated carbon nanotube in solvent; melting at least one binder selected from the group consisting of a silane compound, thermosetting resin and photocurable resin in solvent to obtain the binder solution; mixing the binder solution and carbon nanotube dispersion formed from the solvent dispersion step; and applying the carbon nanotube/binder mixture coating liquid to a substrate and solidifying it.

Description

Manufacturing method of antistatic coating film using carbon nanotube and antistatic coating film produced thereby {Fabrication method of ESD films using carbon nanotubes, and the ESD films}

The present invention relates to an antistatic film, and more particularly, to be used in a tray of an electronic device manufacturing process such as a semiconductor and a liquid crystal display panel, and to solve the problem of scattering of nanoparticles by using a one-component carbon nanotube binder mixed coating liquid. The present invention relates to a method for preparing a transparent to translucent antistatic coating film using carbon nanotubes having excellent high strength and wear resistance, and a transparent to translucent antistatic coating film prepared thereby.

In general, in order to transport an integrated circuit chip (IC chip), which is the most important core component of the semiconductor industry, a transport container called an antistatic treatment called a shipping tray is used to prevent static damage. Or in the form of a roll using an antistatic carrier tape. Carrier tapes carrying integrated circuit chips in the form of rolls have been widely spotlighted as semiconductor integrated circuit chip transport containers because they are smaller in volume and simpler to move than the shipping tray, and various types of carrier tapes are being studied.

As a conventional technology for a film for a carrier tape, US Pat. Nos. 5,707,699 and 6,485,832 have a styrene-based polymer film as an intermediate layer, and a conductive compound made by mixing styrene-based resin and conductive carbon black on both surfaces thereof is subjected to triple extrusion. Extrusion coating to a thickness of -50㎛ has a description of the manufacturing method of the carrier tape film having a thickness of about 0.3mm as a whole.

In addition to the triple extrusion method, conductive carbon black may be mixed with a styrene resin and then coated or extruded as a single layer to be used as an antistatic carrier tape fabric.

However, in the production of a film for a carrier tape by an extrusion method such as a triple extrusion method or a single layer extrusion method, the smoothness of the extruded carrier tape film is difficult, and when the dispersion of the conductive carbon black is poor, the mechanical strength of the product becomes poor and the carbon black It causes various problems such as scattering in the form of dust.

In Japanese Patent No. 2000-015753, a conductive coating liquid obtained by dispersing a styrene polymer binder and conductive carbon black in an organic solvent is coated on one side of a styrene polymer film to form an antistatic layer, and on the other surface of the styrene polymer film, It describes about the content which coats ion conductive materials, such as an active agent, and manufactures the film for carrier tapes. In addition, the carbon black is scattered in the form of dust causing cleanliness problems.

Korean Patent Application Publication No. 2004-106947 discloses a conductive film or pattern forming method using metal nanoparticles and carbon nanotubes.

The prior art comprises the steps of obtaining acid treated carbon nanotubes; And ii) dispersing the metal nanoparticles and the carbon nanotubes in an organic solvent, coating the same on a substrate, and drying the conductive film. The film produced by the method is conductive by containing metal particles. Although excellent in properties, there is a problem that it is not suitable as an antistatic agent. In addition, the metal nanoparticles and the carbon nanotubes are bonded to each other by coulomb force, but when coated, there is a problem in that the wear resistance is not excellent.

Accordingly, the present invention has been made to solve the above problems of the prior art, by coating the substrate with a one-component coating liquid mixed with an acid-treated carbon nanotube dispersion and an organic binder such as silane compound, the carbon nanotube binder It is wrapped with materials to solve the problem of scattering of nanoparticles, and has high transmittance, abrasion resistance, scratch resistance, chemical stability, excellent dimensional stability of coating film when forming substrate, and excellent substrate adhesion and applicability. It is an object of the present invention to provide a transparent to translucent antistatic coating film production method using carbon nanotubes that can be used for various substrates, such as a flexible substrate, and a transparent to translucent antistatic coating film prepared thereby.

The present invention for achieving the above object, an acid treatment step of introducing a hydroxyl group and a carboxyl group on the carbon nanotube (CNT) terminal and the surface using an acid solution; Solvent dispersion step of dispersing the acid-treated carbon nanotubes (CNT) in a solvent; Preparing a binder solution by dissolving at least one binder selected from the group consisting of silane compound, thermosetting resin, and photocurable resin in a solvent; A composition forming step of dispersing carbon nanotubes (CNT) by mixing a binder solution with the carbon nanotube dispersion formed in the solvent dispersion step to form a coating solution; And applying a carbon nanotube / binder mixed coating solution to the substrate and solidifying the transparent and semi-transparent antistatic coating film using the carbon nanotubes configured to include the transparent and semi-transparent to anterior coating film prepared thereby. Make a point.

Here, the substrate is made of one selected from the group consisting of glass, quartz, glass wafers, silicon wafers, plastics, and the coating film is spray, dip coating, spin coating, screen coating, inkjet printing, pad printing, knife coating, It is produced by any one of the key coating and gravure coating, and the solidification in the solidifying step using a heat or ultraviolet curing method, the acid solution used in the acid treatment step is nitric acid, hydrochloric acid, sulfuric acid, hydrogen peroxide and It is preferable that it is 1 type selected from these mixed liquids.

The carbon nanotubes are made of one selected from single-walled carbon nanotubes, double-walled carbon nanotubes, multi-walled carbon nanotubes, and mixtures thereof. The carbon nanotube dispersion solvent used in the solvent dispersion step may be acetone, Methyl ethyl ketone, methyl alcohol, ethyl alcohol, isopropyl alcohol, butyl alcohol, ethylene glycol, polyethylene glycol, tetrahydrofuran, dimethylformamide, dimethylacetamide, N-methyl-2-pyrrolidone, hexane At least one selected from the group consisting of cyclohexanone, toluene, chloroform, distilled water, dichlorobenzene, dimethylbenzene, trimethylbenzene, pyridine, methylnaphthalene, nitromethane, acrylonitrile, octadecylamine, aniline, and dimethyl sulfoxide. , The coating liquid formed in the composition forming step, the dilution solvent is added to adjust the concentration of the coating liquid, the dilution The solvent is acetone, methyl ethyl ketone, methyl alcohol, ethyl alcohol, isopropyl alcohol, butyl alcohol, ethylene glycol, polyethylene glycol, tetrahydrofuran, dimethylformamide, dimethylacetamide, N-methyl-2-pi Ralidone, hexane, cyclohexanone, toluene, chloroform, distilled water, dichlorobenzene, dimethylbenzene, trimethylbenzene, pyridine, methylnaphthalene, nitromethane, acrylonitrile, octadecylamine, aniline, dimethyl sulfoxide, methylene chloride and these It is preferably selected from a mixture of and the dispersion solvent and dilution solvent is preferably used as a binder dissolving solvent.

The silane may be one of tetraalkoxysilanes, trialkoxysilanes, and dialkoxysilanes. The carbon nanotubes have an outer diameter of less than 30 nm, and the binder may contain 100 parts by weight of the carbon nanotubes and the binder mixture. 30 to 99 parts by weight, and the antistatic coating film is preferably carbon nanotube is wrapped in a binder material does not protrude over the coating film.

As described above, the present invention is coated with a one-component coating solution in which an acid-treated carbon nanotube dispersion liquid and an organic binder such as a silane compound are mixed on a substrate, thereby transmitting permeability, abrasion resistance, scratch resistance, chemical stability, and at the time of forming the substrate. It has excellent dimensional stability of antistatic coating membrane, and can be used for various substrates such as hard substrates and flexible substrates due to its excellent adhesiveness and applicability of the antistatic coating film. There is an effect that can solve the problem of scattering of particles.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.

Method for producing an antistatic coating film using carbon nanotubes according to the present invention is largely an acid treatment step of carbon nanotubes, a solvent dispersion step of the acid-treated carbon nanotubes, a binder solution manufacturing step, a carbon nanotube dispersion and a binder A composition forming step of mixing the solution to form a coating solution, and a solidifying step of coating the mixture on the substrate to solidify.

The acid treatment step is to introduce a hydroxyl group and a carboxyl group to the carbon nanotube (CNT) terminal and the surface by using an acid solution. The acid solution used in the acid treatment step is one of nitric acid, hydrochloric acid, sulfuric acid, hydrogen peroxide and a mixture thereof. Selected and used to disperse the carbon nanotubes in an acid solution and then proceed to the method of filtration and drying, and through the acid treatment step, a carbon nanotube having a hydroxyl group and a carboxyl group introduced into the terminal and surface is obtained.

Here, the carbon nanotubes are selected from single wall carbon nanotubes, double wall carbon nanotubes, multiwall carbon nanotubes, and mixtures thereof.

Next, the solvent dispersion step of carbon nanotubes is carried out, and the acid-treated carbon nanotubes are mixed and dispersed in a solvent, and the solvent is acetone, methyl ethyl ketone, methyl alcohol, ethyl alcohol, isopropyl alcohol, Butyl alcohol, ethylene glycol, polyethylene glycol, tetrahydrofuran, dimethylformamide, dimethylacetamide, N-methyl-2-pyrrolidone, hexane, cyclohexanone, toluene, chloroform, distilled water, dichlorobenzene, One or more of dimethylbenzene, trimethylbenzene, pyridine, methylnaphthalene, nitromethane, acrylonitrile, octadecylamine, aniline, dimethylsulfoxide is used to complete the carbon nanotube solution.

Next, as a binder solution manufacturing step, a binder solution is formed by selecting one or more of silane compound, thermosetting resin, and photocurable resin and dissolving it in a solvent.

Then, a composition forming step of mixing and dispersing the carbon nanotube solution in a binder solution is performed. When the binder solution is completed, a desired coating solution composition is formed by mixing and dispersing the carbon nanotube solution formed in the binder solution. do. And dilute solvent may be added to adjust the concentration of the coating solution.

Here, the dissolved solvent is a diluent solvent and carbon added for controlling the concentration of the binder dissolving solvent for dissolving the binder, the mixed coating solution for a transparent conductive film containing the carbon nanotubes, depending on the type of binder used It is preferable to select and use at least one of the carbon nanotube dispersion solvent added for the dispersion of the nanotubes. That is, depending on the type of binder, only a binder dissolving solvent, a dilution solvent, a carbon nanotube dispersion solvent, or a mixture thereof is used.

The solvent or diluent is acetone, methyl ethyl ketone, methyl alcohol, ethyl alcohol, isopropyl alcohol, butyl alcohol, ethylene glycol, polyethylene glycol, tetrahydrofuran, dimethylformamide, dimethylacetamide, N- Methyl-2-pyrrolidone, hexane, cyclohexanone, toluene, chloroform, distilled water, dichlorobenzene, dimethylbenzene, trimethylbenzene, pyridine, methylnaphthalene, nitromethane, acrylonitrile, octadecylamine, aniline, dimethyl sulfoxide One selected from methylene chloride and mixtures thereof is used.

The carbon nanotube binder mixed coating solution formed above is coated on a substrate for use as an antistatic coating film, and thus the concentration must be adjusted according to the coating method, and as mentioned above, the dilute solvent in the final carbon nanotube binder mixed coating solution May be further added, and the dilution solvent may be used alone without using a binder dissolving solvent or a carbon nanotube dispersion solvent depending on the type of binder.

The carbon nanotube binder mixed coating solution diluted to an appropriate concentration is coated on the substrate by any one of spraying, dip coating, spin coating, screen coating, ink jet printing, pad printing, knife coating, key coating and gravure coating. In this case, the substrate may use a variety of conductive or non-conductive substrates due to the excellent reactivity and electrical conductivity of the carbon nanotubes, preferably made of glass, quartz, glass wafers, silicon wafers, plastics One kind selected from the group can be used.

The coating method is coated on the upper surface of the substrate to a thickness of several tens of nanometers to several tens of micrometers according to the use of the transparent to semi-transparent antistatic coating film, and the antistatic using carbon nanotubes by going through the solvent drying and solidification of the binder material The coating film is to be completed. In this case, the coating film is wrapped with a carbon nanotube binder material so that the carbon nanotubes do not protrude above the coating film.

Hereinafter, embodiments of the present invention will be described in detail.

First Embodiment

As Example 1 of the present invention, a method of preparing a carbon nanotube / silazole mixed coating solution by adding a silane sol solution to a carbon nanotube dispersion.

The carbon nanotube / silane sol mixed coating solution is prepared by the following procedure.

First, 0.1 g of carbon nanotubes (CNT), which are present in an aggregated state, and 50 ml of acid solution are placed in a 500 ml Erlenmeyer flask, and the carbon nanotubes are dispersed for 1 hour with a sonicator.

After refluxing the prepared solution for 24 hours, the acid solution remaining on the carbon nanotubes was removed through filtration four times or more using an filtration paper (Alumina filter, pore size: 200 nm), followed by drying to remove impurities. Removal of metal catalysts and the like and carbon nanotubes in which carboxyl groups (-COOH) and hydroxy groups (-OH) were substituted were prepared.

Then, a dispersion solution in which the carbon nanotubes were dispersed in a solvent was prepared as follows. 10 mg of the carbon nanotubes and 100 mL of the ethanol (Ethanol) solvent were mixed in an Erlenmeyer flask and dispersed for 2 hours by an ultrasonic wave to prepare a carbon nanotube solution.

As a binder in the solution there is mixing of the silane sol solution, a sol wherein the silane is methyl trimethoxysilane (MTMS, methyl trimethoxysilane) 7.5㎎ and tetraethylorthosilicate (TEOS, Tetraethyl orthosilicate) put into the flask 2.5㎎ H ₂ O 4.2 mg and 40 mg of ethanol (Ethanol) as a diluting solvent were added thereto, and then prepared by stirring for 30 seconds. HCl as an acid catalyst was added to the silane sol solution, and the acidity of the solution was adjusted to pH 3.8 to 4.0, followed by stirring for 48 hours.

The silane sol solution prepared above was added to the carbon nanotube dispersion, and then dispersed for 2 hours by an ultrasonic wave to prepare a carbon nanotube silane binder mixed coating solution.

In the prepared carbon nanotube / silane sol mixed composition, as shown in FIG. 1, the silane sol is not only a binder but also a dispersion stabilizer by hydrogen bonding to a hydroxyl group of an acid-treated carbon nanotube (CNT) surface. And Figure 2 shows that the dispersion is completed, the dispersion stability was found to be good.

The carbon nanotube / silazole mixed coating solution formed above was applied to the upper surface of the glass substrate and the polymer substrate (PES, or PET film) using a spray. After coating, the solvent was removed in a 90 ° C. hot air dryer, and then curing of the binder was completed at 90 ° C. for 120 minutes.

The sheet resistance of the prepared conductive film was 10 ⁴ ohms / square or less. As a result of measuring the transmittance, the film had a total transmittance of about 80% or more at 550 nm, and a PES film coated with an antistatic coating film. Is shown in FIG. 3. In addition, when forming an antistatic coating film on the PET sheet and then molding the bar as shown in Figure 4, it was confirmed that the coating film is maintained as it is.

In addition, the electron micrograph of the carbon nanotube / silane sol coating film is shown in Figure 5, it can be seen that the carbon nanotubes are evenly dispersed and the carbon nanotubes are wrapped by a silane binder.

Second Embodiment

Embodiment 2 of the present invention relates to a method for preparing a carbon nanotube / silazole mixed coating liquid by adding a silane compound to a carbon nanotube dispersion to prepare a silane sol in the carbon nanotube dispersion.

The carbon nanotube / silane sol mixed coating solution is prepared by the following procedure.

First, 0.1 g of carbon nanotubes and 50 ml of acid solution, which are present in an aggregated state, are placed in a 500 ml Erlenmeyer flask, and the carbon nanotubes are dispersed for 1 hour with a sonicator.

After refluxing the prepared solution at a boiling point for 24 hours, the acid solution remaining in the carbon nanotubes was removed through filtration four times or more using a filter paper (Alumina filter, pore size: 200 nm), followed by drying. To remove impurities (metal catalyst, etc.) and to prepare a carbon nanotube substituted with carboxyl group (-COOH) and hydroxy group (-OH).

Then, a dispersion solution in which the carbon nanotubes were dispersed in a solvent was prepared as follows. 10 mg of the carbon nanotubes and 100 mL of the ethanol (Ethanol) solvent were mixed in an Erlenmeyer flask and dispersed for 2 hours by an ultrasonic wave to prepare a carbon nanotube solution.

7.5 mg of methyl trimethoxysilane (MTMS), tetraethyl orthosilicate (TEOS) and 2.5 mg of H ₂ O were added to the solution, followed by stirring for 30 seconds. HCl as an acid catalyst was added to the carbon nanotube dispersion, and the acidity of the solution was adjusted to pH 3.8 to 4.0, followed by dispersion with an ultrasonic wave for 2 hours to prepare a carbon nanotube / silazole mixed solution.

The carbon nanotube / silazole mixed coating solution prepared above was applied to the upper surface of the glass substrate and the polymer substrate (PES, or PET film) using a spray coater. After coating, the solvent was removed from the hot air dryer at 90 ° C., and then the curing of the binder was completed at 90 ° C. for 120 minutes.

Sheet resistance and transmittance of the prepared conductive film were measured, and the dispersion of the binder was observed using an optical microscope and an electron scanning microscope. The sheet resistance was 10 ⁴ ohms. It was less than / square and had a total transmittance of about 80% or more at 550 nm, which was almost the same as in the first embodiment.

Third Embodiment

Embodiment 3 of the present invention relates to a method for preparing a carbon nanotube / photocuring epoxy mixed coating solution by adding epoxy for photocuring to a carbon nanotube dispersion.

The carbon nanotube / photocuring epoxy mixed coating solution is prepared by the following procedure.

First, 0.1 g of carbon nanotubes present in an aggregated state and 100 ml of nitric acid (HNO ₃ ) solution having a concentration of 30 vol% were placed in a 500 ml Erlenmeyer flask, and the carbon nanotubes were dispersed for 1 hour using an ultrasonic disperser.

After refluxing the prepared solution for 1 hour, the acid solution remaining in the carbon nanotubes was removed through filtration four times or more using filtration paper and then dried to remove impurities and replace the carboxyl group (-COOH). Carbon nanotubes were prepared.

Then, a dispersion solution in which the carbon nanotubes were dispersed in a solvent was prepared as follows. 15 mg of the carbon nanotubes and 100 mL of the ethanol (Ethanol) solvent were mixed in an Erlenmeyer flask and dispersed for 1 hour by an ultrasonic wave to prepare a carbon nanotube solution.

10 mg of photocuring epoxy (SK Cytec), a diethylene glycol methyl ethyl ether (MEDG) solvent and a photoinitiator were added thereto, followed by stirring for 6 hours, followed by treatment with an ultrasonic disperser for 2 hours. An epoxy mixed solution for photocuring was prepared.

The carbon nanotube / photocuring epoxy mixed coating solution prepared above was coated in the same manner as in Example 1. After coating, the solvent was removed from the hot air dryer at 80 ° C, and the epoxy binder was cured by irradiating with ultraviolet rays for 1 to 3 minutes. The sheet resistance was analyzed using the same method as Example 1, and the sheet resistance was 10 ⁴ ohms / square. In this case, having a total transmittance of about 80% or more at 550 nm, a result suitable for the transparent antistatic coating film was obtained.

<Comparative Example>

As a comparative example of the present invention, the present invention relates to a method of manufacturing an antistatic coating film by coating two materials sequentially on a substrate without using a mixture of carbon nanotubes and a binder material.

After coating the silane sol solution prepared in Example 1 on a glass or polymer substrate, the carbon nanotube dispersion was sequentially applied.

In the case of manufacturing the coating film, as shown in FIG. 6, the carbon nanotubes protruded over the binder, which may cause scattering problems of the carbon nanotubes.

1 is a conceptual diagram showing a shape in which carbon nanotubes are dispersed in a silane sol.

2 is a diagram showing a solution of carbon nanotube / silazole mixed composition.

3 is a view showing a transparent conductive film on which a carbon nanotube / silazole composition coating film is formed.

Figure 4 is a view showing a state after molding the transparent conductive film formed with a carbon nanotube / silane composition coating film.

5 is a view showing an electron micrograph of the carbon nanotube / silane composition coating film according to the present invention.

6-shows an electron micrograph of a coating film coated with a pure carbon nanotube dispersion on the adhesive layer after coating the silane sol on the substrate by an adhesive layer by a multi-step method according to a comparative example of the present invention.

Claims (15)

An acid treatment step of introducing a hydroxyl group and a carboxyl group to the carbon nanotube (CNT) terminal and surface using an acid solution; Solvent dispersion step of dispersing the acid-treated carbon nanotubes (CNT) in a solvent; Preparing a binder solution by dissolving at least one binder selected from the group consisting of silane compound, thermosetting resin, and photocurable resin in a solvent; A composition forming step of dispersing carbon nanotubes (CNT) by mixing a binder solution with the carbon nanotube dispersion formed in the solvent dispersion step to form a coating solution; And, The carbon nanotube / binder mixed coating solution is applied to the substrate and solidified; Method for producing an antistatic coating film using a carbon nanotube, characterized in that it comprises a. According to claim 1, wherein the substrate is glass, quartz, glass wafer, silicon wafer, a method for producing an antistatic coating film using carbon nanotubes, characterized in that consisting of one selected from the group consisting of plastics. According to claim 1, wherein the coating film is carbon nanotubes, characterized in that made by any one method of spraying, dip coating, spin coating, screen coating, inkjet printing, pad printing, knife coating, key coating and gravure coating Method of manufacturing antistatic coating film using. The method of claim 1, wherein the solidification in the solidifying step is solidified using a heat or ultraviolet curing method. The method of claim 1, wherein the acid solution used in the acid treatment step is one selected from nitric acid, hydrochloric acid, sulfuric acid, hydrogen peroxide and a mixture thereof. The method of claim 1, wherein the carbon nanotube is a single-walled carbon nanotubes, double-walled carbon nanotubes, multi-walled carbon nanotubes, and an antistatic coating film production using carbon nanotubes, characterized in that consisting of one kind thereof Way. The method of claim 1, wherein the carbon nanotube dispersion solvent used in the solvent dispersion step is acetone, methyl ethyl ketone, methyl alcohol, ethyl alcohol, isopropyl alcohol, butyl alcohol, ethylene glycol, polyethylene glycol, tetrahydro Furan, dimethylformamide, dimethylacetamide, N-methyl-2-pyrrolidone, hexane, cyclohexanone, toluene, chloroform, distilled water, dichlorobenzene, dimethylbenzene, trimethylbenzene, pyridine, methylnaphthalene, nitromethane, acryl Method for producing an antistatic coating film using carbon nanotubes, characterized in that at least one selected from the group consisting of ronitrile, octadecylamine, aniline, dimethyl sulfoxide. The method of claim 7, wherein the coating liquid formed in the composition forming step, Method for producing an antistatic coating film using carbon nanotubes, characterized in that the diluent solvent is added to control the concentration of the coating solution. The method of claim 8, wherein the dilution solvent is acetone, methyl ethyl ketone, methyl alcohol, ethyl alcohol, isopropyl alcohol, butyl alcohol, ethylene glycol, polyethylene glycol, tetrahydrofuran, dimethylformamide, dimethylacetamide , N-methyl-2-pyrrolidone, hexane, cyclohexanone, toluene, chloroform, distilled water, dichlorobenzene, dimethylbenzene, trimethylbenzene, pyridine, methylnaphthalene, nitromethane, acrylonitrile, octadecylamine, aniline, Method for producing an antistatic coating film using carbon nanotubes, characterized in that one selected from dimethyl sulfoxide, methylene chloride and mixtures thereof. 10. The method of claim 9, wherein the dispersion solvent and the dilution solvent are used as a binder dissolving solvent. The method of claim 1, wherein the silane is one of tetraalkoxysilanes, trialkoxysilanes, and dialkoxysilanes. The method of claim 1, wherein the carbon nanotubes have an outer diameter of less than 30 nm. The method of claim 1, wherein the binder, Method for producing an antistatic coating film using carbon nanotubes, characterized in that added to 30 to 99 parts by weight based on 100 parts by weight of carbon nanotubes and binder mixture. The method of claim 1, wherein the antistatic coating film using the carbon nanotubes is carbon nanotubes are wrapped in a binder material, the antistatic coating film manufacturing method using carbon nanotubes, characterized in that do not protrude over the coating film. An antistatic coating film using carbon nanotubes, characterized in that formed by the method according to any one of claims 1 to 14.

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