KR20090024854A - Metal line and method for fabricating metal line of semiconductor device - Google Patents
Metal line and method for fabricating metal line of semiconductor device Download PDFInfo
- Publication number
- KR20090024854A KR20090024854A KR1020070089738A KR20070089738A KR20090024854A KR 20090024854 A KR20090024854 A KR 20090024854A KR 1020070089738 A KR1020070089738 A KR 1020070089738A KR 20070089738 A KR20070089738 A KR 20070089738A KR 20090024854 A KR20090024854 A KR 20090024854A
- Authority
- KR
- South Korea
- Prior art keywords
- film
- metal wiring
- forming
- interlayer insulating
- trench
- Prior art date
Links
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 73
- 239000002184 metal Substances 0.000 title claims abstract description 73
- 238000000034 method Methods 0.000 title claims abstract description 62
- 239000004065 semiconductor Substances 0.000 title claims abstract description 40
- 239000010410 layer Substances 0.000 claims abstract description 77
- 239000010949 copper Substances 0.000 claims abstract description 58
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 56
- 229910052802 copper Inorganic materials 0.000 claims abstract description 55
- 239000011229 interlayer Substances 0.000 claims abstract description 36
- 239000000758 substrate Substances 0.000 claims abstract description 25
- 238000005498 polishing Methods 0.000 claims abstract description 10
- 230000004888 barrier function Effects 0.000 claims description 28
- 229910004200 TaSiN Inorganic materials 0.000 claims description 6
- 229910008482 TiSiN Inorganic materials 0.000 claims description 6
- QRXWMOHMRWLFEY-UHFFFAOYSA-N isoniazide Chemical compound NNC(=O)C1=CC=NC=C1 QRXWMOHMRWLFEY-UHFFFAOYSA-N 0.000 claims description 6
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 4
- 229910004491 TaAlN Inorganic materials 0.000 claims description 3
- 229910004166 TaN Inorganic materials 0.000 claims description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 238000005530 etching Methods 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 230000009977 dual effect Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000009713 electroplating Methods 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000004380 ashing Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- PVNIIMVLHYAWGP-UHFFFAOYSA-N Niacin Chemical compound OC(=O)C1=CC=CN=C1 PVNIIMVLHYAWGP-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229960003512 nicotinic acid Drugs 0.000 description 1
- 235000001968 nicotinic acid Nutrition 0.000 description 1
- 239000011664 nicotinic acid Substances 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 150000004760 silicates Chemical class 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
- H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/7684—Smoothing; Planarisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
The embodiment relates to a method for forming metal wiring of a semiconductor device, and more particularly, to a method for forming metal wiring of a semiconductor device in which a scratch on a surface of a copper wiring is prevented from causing a short failure of copper wirings formed in a subsequent process. . In the method of forming a metal wiring of a semiconductor device according to the embodiment, forming an interlayer insulating film on a semiconductor substrate, selectively removing the interlayer insulating film so as to expose a portion of the surface of the semiconductor substrate to form via holes and trenches, Forming a metal film on the entire surface including the trench and the via hole, forming a metal wiring on the inside of the trench and the via hole by first polishing the front surface of the metal film, and forming a compensation film on the entire surface of the semiconductor substrate on which the metal wiring is formed And secondly polishing the entire surface of the compensation layer to planarize the metal wiring.
Description
The embodiment relates to metal wiring of a semiconductor device and a method of forming the same.
In general, in semiconductor devices, electronic devices, and the like, a conductor film such as aluminum (Al) or tungsten (W) is deposited on an insulating film as a wiring forming technique, and then the conductor film is subjected to a conventional photolithography process and a dry method. A technology of forming a wiring by patterning through a dry etching process has been established and widely used in this field. In particular, in recent years, a low resistivity metal such as copper (Cu) instead of aluminum (Al) or tungsten (W) as a part of reducing RC delay time centering on logic devices that require high speed among semiconductor devices. Has been studied to use a wire as a wiring.
However, in the wiring forming process using copper (Cu), the copper (Cu) patterning process is more difficult than that of aluminum (Al) or tungsten (W). After the trench is formed, the trench is buried to form wiring. The so-called 'Damascene' process is used.
In the damascene process, after forming a via hole, filling the via conductor again, forming a wiring trench to fill the wiring, a single damascene process, and forming a via hole and a trench, At the same time, there is a dual damascene process in which wiring materials are refilled in via holes and wiring trenches to form wiring. In general, the dual damascene process is superior to the single damascene process in terms of process simplification.
In the dual damascene process, a pre-via method for forming a trench after forming a via hole first, and a post-via method for forming a via hole after forming a wiring trench are known. In general, the sun via method is superior to the post via method to ensure electrical contact with the lower layer.
1 to 3 are cross-sectional views illustrating a method of forming a copper wiring according to the prior art.
As shown in FIG. 1, when the
Although not shown in the drawing, the first
When the via hole and the trench are formed on the
Then, a copper seed layer (not shown) is formed on the barrier layer to form copper wiring, and copper is embedded in the via hole and the trench region according to an ECP (Erectrode Copper Plating) process.
As such, when copper is embedded in the via hole and the trench, annealing is performed to crystallize the copper formed by electroplating, followed by chemical mechanical polishing (CMP), and finally the first copper wiring. 20 is formed.
In the CMP process, the surface is polished so that copper exists only in the via hole and the trench region formed on the
However, unlike the case of using tungsten (W) or aluminum (Al) wiring, there is a problem that frequent scratches 30 occur on the surface of the
2 and 3, when the
In this case, since the insulating layers are formed along the
If the
The remaining
As such, scratches generated on the surface of the flexible copper wiring affect subsequent wiring processes and short circuits formed in a later process, resulting in a decrease in the yield of semiconductor devices.
The embodiment provides a method for metal wiring and formation of a semiconductor device capable of recovering scratches on metal wiring.
The embodiment provides a method for forming a metal wiring of a semiconductor device in which a scratch generated on a surface of a copper wiring during a semiconductor manufacturing process is prevented from being transferred to a subsequent process, thereby preventing short defects between wirings.
In the method of forming a metal wiring of a semiconductor device according to the embodiment, forming an interlayer insulating film on a semiconductor substrate, selectively removing the interlayer insulating film so as to expose a portion of the surface of the semiconductor substrate to form via holes and trenches, Forming a metal film on the entire surface including the trench and the via hole, forming a metal wiring on the inside of the trench and the via hole by first polishing the front surface of the metal film, and forming a compensation film on the entire surface of the semiconductor substrate on which the metal wiring is formed And secondly polishing the entire surface of the compensation layer to planarize the metal wiring.
The metallization of the semiconductor device according to the embodiment may include an interlayer insulating film formed on a semiconductor substrate, a via hole formed to expose a portion of the surface of the semiconductor substrate to the interlayer insulating film, and a trench formed to a predetermined depth in a region adjacent thereto, and the via hole. And a metal wiring formed in the tweezers and having a groove formed in a part of the surface thereof, and a compensation film pattern formed in the groove to planarize the surface of the metal wiring.
In the embodiment, since the scratches generated in the metal wiring can be recovered, the device yield is improved, and the performance of the device is improved.
Hereinafter, exemplary embodiments will be described in detail with reference to the accompanying drawings. However, one of ordinary skill in the art who understands the spirit of the present invention may easily propose another embodiment by adding, adding, deleting, or modifying elements within the scope of the same spirit, but this also belongs to the scope of the present invention. I will say.
With reference to the accompanying drawings will be described in detail the metal wiring and the method of forming the semiconductor device according to the embodiments. Hereinafter, when referred to as "first", "second", and the like, this is not intended to limit the members but to show that the members are divided and have at least two. Thus, when referred to as "first", "second", etc., it is apparent that a plurality of members are provided, and each member may be used selectively or interchangeably. In addition, the size (dimensions) of each component of the accompanying drawings are shown in an enlarged manner to help understanding of the invention, the ratio of the dimensions of each of the illustrated components may be different from the ratio of the actual dimensions. In addition, not all components shown in the drawings are necessarily included or limited to the present invention, and components other than the essential features of the present invention may be added or deleted. In the description of an embodiment according to the present invention, each layer (film), region, pattern or structure is "on / above / over / upper" of the substrate, each layer (film), region, pad or patterns or In the case described as being formed "down / below / under / lower", the meaning is that each layer (film), region, pad, pattern or structure is a direct substrate, each layer (film), region, It may be interpreted as being formed in contact with the pad or patterns, or may be interpreted as another layer (film), another region, another pad, another pattern, or another structure formed in between. Therefore, the meaning should be determined by the technical spirit of the invention.
4 through 11 are cross-sectional views illustrating a method of forming metal wirings in a semiconductor device in accordance with an embodiment.
Here, the
As shown in FIG. 4, an interlevel dielectric 114 is formed on the
For example, the
The
The
Meanwhile, an
The
A photoresist pattern is formed on the
The
A protective layer made of a novolac or bottom anti-reflective coating (BARC) is formed in the
The
The
The via
The photoresist pattern that may remain on the
As shown in FIG. 5, a portion of the exposed
As illustrated in FIG. 6, a
The
The
The
The
As shown in FIG. 7, a
As shown in FIG. 8, a
The
Thereafter, as shown in FIG. 9, the
That is, the first
In the chemical mechanical polishing process, the
At this time, the
As shown in FIG. 10, a
The
The
The
The
The
The
The thickness of the
The second barrier layer pattern 125a and the compensation layer are formed in the
In the chemical mechanical polishing process, the
Accordingly, the second barrier layer pattern 125a and the
Although described above with reference to the embodiments, which are merely examples and are not intended to limit the present invention. Those skilled in the art to which the present invention pertains are not exemplified above without departing from the essential characteristics of the present invention. It will be appreciated that many variations and applications are possible. For example, each component specifically shown in the embodiment of the present invention can be modified. And differences relating to such modifications and applications will have to be construed as being included in the scope of the invention defined in the appended claims.
1 to 3 are cross-sectional views illustrating a method of forming a copper wiring according to the prior art.
4 through 11 are cross-sectional views illustrating a method of forming metal wirings in a semiconductor device in accordance with an embodiment.
<Description of Signs of Major Parts of Drawings>
100: substrate 110: lower metal wiring
112: etch stop film 114: interlayer insulating film
116: via hole 119: trench
122: first barrier film 123: seed film
124:
125: second barrier film 125a: second barrier film pattern
126:
145: home
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020070089738A KR20090024854A (en) | 2007-09-05 | 2007-09-05 | Metal line and method for fabricating metal line of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020070089738A KR20090024854A (en) | 2007-09-05 | 2007-09-05 | Metal line and method for fabricating metal line of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20090024854A true KR20090024854A (en) | 2009-03-10 |
Family
ID=40693482
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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KR1020070089738A KR20090024854A (en) | 2007-09-05 | 2007-09-05 | Metal line and method for fabricating metal line of semiconductor device |
Country Status (1)
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KR (1) | KR20090024854A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102971834A (en) * | 2010-07-08 | 2013-03-13 | 美国国家半导体公司 | Via with a substantially planar top surface |
KR20170070353A (en) * | 2015-12-11 | 2017-06-22 | 삼성전자주식회사 | Semiconductor device and method of manufacturing the same |
US20190229078A1 (en) * | 2018-01-19 | 2019-07-25 | Samsung Electro-Mechanics Co., Ltd. | Semiconductor package |
-
2007
- 2007-09-05 KR KR1020070089738A patent/KR20090024854A/en not_active Application Discontinuation
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102971834A (en) * | 2010-07-08 | 2013-03-13 | 美国国家半导体公司 | Via with a substantially planar top surface |
KR20170070353A (en) * | 2015-12-11 | 2017-06-22 | 삼성전자주식회사 | Semiconductor device and method of manufacturing the same |
US20190229078A1 (en) * | 2018-01-19 | 2019-07-25 | Samsung Electro-Mechanics Co., Ltd. | Semiconductor package |
KR20190088699A (en) * | 2018-01-19 | 2019-07-29 | 삼성전자주식회사 | Semiconductor package |
US10741510B2 (en) | 2018-01-19 | 2020-08-11 | Samsung Electronics Co., Ltd. | Semiconductor package |
TWI712132B (en) * | 2018-01-19 | 2020-12-01 | 南韓商三星電子股份有限公司 | Semiconductor package |
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