KR20080100594A - Apparatus of adjusting position of electric inspection apparatus contactor - Google Patents

Apparatus of adjusting position of electric inspection apparatus contactor Download PDF

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Publication number
KR20080100594A
KR20080100594A KR1020070046481A KR20070046481A KR20080100594A KR 20080100594 A KR20080100594 A KR 20080100594A KR 1020070046481 A KR1020070046481 A KR 1020070046481A KR 20070046481 A KR20070046481 A KR 20070046481A KR 20080100594 A KR20080100594 A KR 20080100594A
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KR
South Korea
Prior art keywords
coordinate data
contact
camera
processing unit
contact portions
Prior art date
Application number
KR1020070046481A
Other languages
Korean (ko)
Inventor
여동구
이남구
Original Assignee
세크론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 세크론 주식회사 filed Critical 세크론 주식회사
Priority to KR1020070046481A priority Critical patent/KR20080100594A/en
Publication of KR20080100594A publication Critical patent/KR20080100594A/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements

Abstract

A location compensation device is provided to easily correct a location of a contact face for electrical test device by removing a film mask or a glass mask. A location compensation device checks by contact of a contact face capable of inputting/outputting. An operation processing unit(10) produces a coordinate data of a test area location. A camera(12) films the contact face and obtains an image. A display unit(14) displays the image of the obtained contact face. A location compensation device compares the coordinate data with the contact face. The location compensation device conforms to the location of the contact face which does not agreed to coordinate data.

Description

Apparatus of adjusting position of electric inspection apparatus contactor}

1 is a schematic configuration diagram showing a position correcting device of a contact portion for an electrical inspection device according to Embodiment 1 of the present invention.

FIG. 2 is a schematic diagram illustrating an example of a method of using the position correction device of the contact portion for the electrical inspection device of FIG. 1.

3 is a schematic configuration diagram showing a position correcting device of a contact portion for an electrical inspection device according to Embodiment 2 of the present invention.

<Explanation of symbols for the main parts of the drawings>

10: arithmetic processing unit 12: camera

14 display unit 16 stage

30: control signal processor 32: position adjustment unit

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a position correcting device for a contact portion for an electrical inspection device, and more particularly, to a position correcting device for a contact portion for an electrical inspection device, such as a needle, included in a probe card.

In general, the electrical inspection apparatus, which may be collectively referred to as a probe card, includes mainly a contact portion that directly contacts an object to be inspected, such as a semiconductor substrate on which a circuit pattern is formed, a substrate connected to the aforementioned contact portion, and the like. Here, the contact portion may be variously classified according to its shape, but mainly includes a needle capable of probing in the inspection region of the inspected object, and the substrate includes a printed circuit board (PCB) having wiring therein. do.

An example of a probe card including the printed circuit board and the needle mentioned is disclosed in Korean Patent Application No. 2005-22742.

In the manufacture of a probe card, which is an electrical inspection device including a needle and a printed circuit board, the needle is mainly fixed to the printed circuit board, and then the position of the needle is corrected. That is, the position of the needle is adjusted through correction so that the needle can be accurately positioned in the inspection region of the subject.

In the aforementioned position correction of the needle, a film mask, a glass mask, a microscope, and the like are mainly used. Here, the film mask, the glass mask, or the like is an auxiliary member in which the coordinates of the needles are marked so as to be accurately positioned in the inspection region of the inspected object. In addition, the microscope is a member that helps the operator visually confirm the position and correction of the needle. Thus, after the film mask or glass mask is interposed between the probe card having the needle and the microscope, the position correction of the needle is achieved by directly moving the position of the needle to the coordinates indicated on the film mask or the glass mask.

However, in the position correction of the needle mentioned above, since a separate member such as a film mask or a glass mask is used, the cost of manufacturing the separate member increases. In addition, since a film mask or a glass mask is interposed between the probe card and the microscope, and it must be up / down, there is a problem that productivity is lowered due to a separate operation. In addition, since a work for correcting the position of the needle must be performed in a state where a film mask or a glass mask is interposed between the probe card and the microscope, it is not easy to secure a working space.

An object of the present invention is to provide an apparatus that can easily correct the position of a contact portion for an electrical inspection device without using a film mask, a glass mask, or the like.

In order to achieve the above object, a position correcting device for an electrical test apparatus according to an exemplary embodiment of the present invention coordinates a position of each test region of an inspected object in which an electrical test is performed by contacting each of the contact parts capable of electrical input / output. An arithmetic processing unit for generating data, a camera for enlarging photographing the contact parts, and a display unit for visually identifying coordinate data of the arithmetic processing unit and an image of the contact parts photographed with the camera. Include. Accordingly, the coordinate data displayed on the display unit and the position of each of the contact portions are compared to match the position of each of the contact portions that do not coincide with the coordinate data.

Here, matching the position of each of the contact portions that do not coincide with the coordinate data with the coordinate data is accomplished by hand.

According to another embodiment of the present invention, an apparatus for correcting a position of a contact portion for an electrical inspection device may coordinate positions of inspection regions of an object under test by contact with each of the contacts that are capable of electrical input and output. An arithmetic processing unit for generating data, a camera for zooming-in photographing the contact portions, and a position of each of the coordinate data and the contact portions obtained as an image by the camera, and comparing the result of the control signal And a control signal processor for generating a control signal, and finely adjusting the position of each of the contact parts so that the position of each of the contact parts that do not coincide with the coordinate data matches the coordinate data. It includes a fine position adjusting portion.

According to the embodiments of the present invention mentioned above, it is preferable that the calculation processing unit generates the coordinate data in an Excel file, and the camera can adjust magnification of several to several hundred times.

In addition, it is preferable to further include a stage that is positioned above the electrical inspection device, and movable in the X-axis, Y-axis and Z-axis.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. As the inventive concept allows for various changes and numerous embodiments, particular embodiments will be illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to the specific disclosed form, it should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the present invention. In describing the drawings, similar reference numerals are used for similar components. In the accompanying drawings, the dimensions of the structures are shown in an enlarged scale than actual for clarity of the invention.

Terms such as first and second may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as the second component, and similarly, the second component may also be referred to as the first component.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprise" or "having" are intended to indicate that there is a feature, number, step, action, component, part, or combination thereof described in the specification, and that one or more other features It should be understood that it does not exclude in advance the possibility of the presence or addition of numbers, steps, actions, components, parts or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art. Terms such as those defined in the commonly used dictionaries should be construed as having meanings consistent with the meanings in the context of the related art and shall not be construed in ideal or excessively formal meanings unless expressly defined in this application. Do not.

Example 1

1 is a schematic configuration diagram showing a position correcting device of a contact portion for an electrical inspection device according to Embodiment 1 of the present invention.

First, the inspected object subjected to the electrical inspection by the contact portion for the electrical inspection device mainly includes a semiconductor memory element, a high density integrated circuit element, etc. as a semiconductor element, and may also include a display element or the like. Therefore, it is preferable that the inspection regions of the inspected object include pads through which input and output of an electrical signal of the semiconductor element are performed when the inspected object is a semiconductor element. Therefore, as an example of the coordinate data referred to in the present invention, it can be understood that the position of each of the pads of the semiconductor element, which is the inspection regions of the object under test, is represented.

In addition, an example of a contact portion for an electrical test apparatus for performing the electrical test of the test target may include a needle capable of probing to each of the pads of the semiconductor device. As such, an example of the electrical inspection apparatus mentioned as the contact part includes a needle may include a probe card including a printed circuit board. Therefore, it can be understood that the electrical inspection apparatus of the present invention includes a probe card, and the contact portion includes a needle. At this time, the electrical test apparatus of the present invention is in a state where the needle is soldered to the probe card. Therefore, the position correction of the contact portion for the electrical inspection device of the present invention corresponds to the subsequent process after the manufacture of the probe card.

As described above, the electrical inspection object using the electrical inspection device of the present invention mainly includes a semiconductor element and the like, and the electrical inspection device includes a probe card and the like.

Therefore, referring to FIG. 1, the position correcting apparatus 100 of the contact unit for the electrical inspection apparatus of the present invention includes a calculation processing unit 10, a camera 12, a display unit 16, a stage 16, and the like.

Specifically, the calculation processing unit 10 is a member for generating the coordinate data mentioned. That is, the arithmetic processing unit 10 is a member for generating, as coordinate data, positions of each of the inspection regions of the inspected object to be electrically inspected by the contact of each of the contact portions capable of electrical input and output. As an example, the operation processor 10 is a member for generating positions of the pads of the semiconductor device as coordinate data. Therefore, as an example of the arithmetic processing part 10, the computer etc. which can operate the program which can generate | generate coordinate data are mentioned.

The coordinate data generated by the arithmetic processing unit 10 of the present invention is preferably generated as an Excel file. Here, generating the coordinate data in an Excel file is advantageous compared to other files in consideration of cost and administrative aspects. However, the present invention is not limited to generating coordinate data in an Excel file. That is, in the case of the computer program which can represent the position of each test | inspection area | region of a test subject with coordinate data, it is not limited to the kind.

As described above, in the present invention, when the type of the inspected object is selected, the position of each of the inspected regions of the inspected object is generated as coordinate data by using the calculation processing unit 10.

The camera 12 is a member for photographing the contact portions of the electrical inspection apparatus to obtain an image. At this time, the camera 12 is mainly positioned to photograph the contacts from the top of the contact. Therefore, it is preferable to install the camera 12 to be positioned above the stage 16 mentioned above. In addition, it is preferable that the camera 12 be able to adjust the magnification of several to several hundred times. This is because obtaining an enlarged image at magnifications of several to several hundred times is more advantageous in the positional correction of subsequent contacts because the contacts of the electrical inspection apparatus are manufactured to be located at fine intervals. That is, the image can be obtained visually as possible by enlarging photographing using the camera 12. FIG. In addition, the camera 12 is provided with a member 12a capable of moving the camera 12 up and down in the vertical direction with respect to the plane where the contact is located when photographing the contacts. This is because, by moving the camera 12 up and down in the vertical direction, a clearer image can be obtained when photographing the contact portion of the electrical inspection device using the camera 12.

In addition, the display unit 14 is a member for displaying the coordinate data generated using the arithmetic processing unit 10 and an image representing the position of each of the contact portions obtained by imaging using the camera 12. At this time, it is preferable that the display unit 14 sufficiently display the coordinate data and the image with the naked eye. Accordingly, the display unit 14 of the present invention has a sufficient size and may include a monitor connected to the arithmetic processing unit 10 and the camera 12. In addition, it is preferable to display the coordinate data and the image displayed by the display unit 14 overlap each other. This is because, as mentioned, position correction of each of the contact portions can be performed more easily by overlapping the coordinate data and the image. Thus, in the present invention, a single display unit 14 may be included, and the operation processor 10 and the camera 12 may be simultaneously connected to the single display unit 14 mentioned above.

In addition, the display unit 14 can easily adjust the size of each image representing the position of the contact data and the displayed coordinate data. That is, the size of the coordinate data may be displayed in a reduced or enlarged form by the display unit 14, and the size of an image indicating the position of the contact portions may be displayed in a reduced or enlarged form by the display unit 14. It is. In particular, it is more efficient to determine the coordinate data and the size indicating the position of the contact points in conjunction with each other and display them.

In addition, the mentioned coordinate data can be displayed in various shapes. For example, it can be displayed in a circle, square, bar, or the like.

In addition, the stage 16 is a member capable of supporting and fixing the electrical inspection apparatus in which the contact portions are formed. That is, when performing the position correction of each of the contact portions of the electrical inspection apparatus is the member located on the upper portion. Here, the stage 16 is preferably movable in the X-axis, Y-axis and Z-axis when the electrical inspection device is located thereon. This is to continuously move the electrical inspection apparatus when comparing the coordinate data and the position of each of the contacts, and to obtain a clearer image when photographing the contacts using the camera 12. That is, by continuously moving the electric inspection device by the stage 16, position correction can be performed for the contacts over the entire area of the electric inspection device, and the distance from the camera 12 is further increased to obtain a clearer image. It can be easily adjusted.

In addition, the movement of the stage 16 to the X, Y and Z axes can be achieved by using a joystick 16a, a controller 16b, or the like connected to the stage 12. That is, in the present invention, the joystick 16a, the controller 16b, and the like are used to move the X, Y, and Z axes of the stage 16. Here, the joystick 16a and the controller 16b may be connected to the stage 16 at the same time, or may be selected and connected to the stage 16 by using any one of them.

Thus, the position of the contact portion for the electrical inspection apparatus using the position correction device 100 of the contact portion for the electrical inspection apparatus including the arithmetic processing unit 10, the camera 12, the display unit 14, the stage 16 and the like. In the calibration method, first, an electrical inspection apparatus having contacts is placed on the stage 16. In addition, by using the arithmetic processing unit 10, the aforementioned electrical inspection apparatus generates coordinate data indicating the position of each of the inspection regions of the object under test, and transmits the coordinate data to the display unit 14 for display. Then, the camera 12 photographs the contacts of the electrical inspection apparatus positioned on the stage 16. In this case, in the photographing using the camera 12, the camera may be moved up and down using the member 12a connected to the camera, and the stage 16 may also be moved in the Z-axis direction. Here, the movement mentioned in the imaging using the camera 12 is for obtaining a clearer image. As such, the display unit 14 also displays an image of the contact portions photographed using the camera 12. At this time, the coordinate data and the images of the contact portions obtained by using the camera 12 are displayed overlapping each other to compare the coordinate data and the position of each of the contact portions.

As a result of the positional comparison of each of the aforementioned coordinate data and the contacts, the position of each of the contacts that do not coincide with the coordinate data is matched with the coordinate data. That is, as shown in FIG. 2, when the position 20a of the inspection region of the inspected object and the position of the actual contact portion 30 do not coincide with each other, the contact portion 30 is displayed on the coordinate data 20. The position of the contact portion 30 is moved in the direction of the arrow so as to coincide with the position 20a. At this time, the positional movement of the contact portion for coinciding with the coordinate data does not move the entire contact portion but moves the end portion of the contact portion. Here, the positional movement of the contact portion for coinciding with the coordinate data has little influence on the entire contact portion because the movement distance is minutely within several millimeters (mm). Therefore, the positional shift of the mentioned contact can be achieved by hand. That is, as mentioned by the operator, the position of each of the contacts is compared with the coordinate data displayed overlappingly on the display 12 such as a monitor and visually visible, and the ends of each of the contacts are based on the comparison result. The position of the contact portion is moved to match the coordinate data using a member that can hold.

Also, as mentioned, the stage 16 is used to continuously move the electrical inspection device. Then, the image obtained by photographing the position of each of the contact portions is also changed. That is, the stage 16 can be used to continuously move the electrical inspection device to perform correction for the position of each of the contacts throughout the entire area of the electrical inspection device.

As mentioned, when using the position correction device 100 of the contact portion for the electrical inspection device of the first embodiment of the present invention, the position of each of the inspection region of the object to be generated as coordinate data to be displayed visually, Based on this, the position of each of the contact portions of the electrical inspection device can be easily corrected.

Therefore, application of the position correction apparatus 100 of the contact portion for an electrical inspection device of the present invention can omit a film mask, a glass mask, or the like. Therefore, as a result of using the position correction apparatus 100 of the present invention, the cost according to manufacture of a film mask or a glass mask can be reduced sufficiently. In addition, the performance of a separate operation due to the use of a film mask or a glass mask can be omitted. Thus, when the position correction device 100 of the present invention can be used, it is possible to omit a separate work, and thus it is possible to expect an improvement in productivity. In addition, since the film mask or the glass mask is not interposed on the contact portion when performing the position correction of the contact portion, sufficient working space can be secured.

Example 2

3 is a schematic configuration diagram showing a position correcting device of a contact portion for an electrical inspection device according to Embodiment 2 of the present invention.

Referring to FIG. 3, the position correcting apparatus 200 of the contact unit for an electrical inspection apparatus of the present invention includes a calculation processing unit 10, a camera 12, a control signal processing unit 30, a position adjusting unit 32, and the like. In addition, the stage 16 and the display unit 14 may be further included. In particular, since the calculation processing unit 10, the camera 12, the stage 16 and the display unit 14 of the position correction apparatus 200 of FIG. 3 are similar to those of FIG. 1 mentioned above, the same reference numerals will be used for the same members. And detailed description thereof will be omitted.

Accordingly, the control signal processing unit 30 is a member for generating a control signal as a result of comparing the coordinate data generated by the operation processing unit 10 with the position of each of the contact portions obtained as an image using the camera 12. . Here, the control signal processor 30 mainly includes numerical control applied to a field for automatically controlling a machine tool or the like using a computer or the like. Therefore, the control signal processor 30 mentioned above generates a control signal such as numerical control based on a result of comparing the coordinate data with the positions of each of the contact parts represented by the image. In addition, although the control signal processor 30 may be separately provided, it is preferable that the control signal processor 30 is provided as a program in a computer together with the operation processor 10.

The position adjusting unit 32 is a member for receiving a control signal generated by the control signal processing unit 30 and finely adjusting the position of each of the contacting units based on this. That is, the position adjusting unit 32 is a member that receives the aforementioned control signal, and as a result, finely adjusts the position of each of the contact portions so that the position of each of the contact portions that do not coincide with the coordinate data coincides with the coordinate data. Therefore, as an example of the position adjusting part 32, the robot arm etc. which can finely control the movement according to a control signal are mentioned.

Therefore, in the present invention, by including the control signal processing unit 30 and the position adjusting unit 32 receives the control signal mentioned above and automatically finely adjusts the position of each of the contact portions that do not match the coordinate data to match the coordinate data. Can be.

In addition, in the present invention, the display of the coordinate data and the position of each of the contact parts may be omitted. This is because the control signal processor 30 and the position adjuster 32 can automatically perform the task of matching the position of each of the contact portions that do not coincide with the coordinate data.

However, in the present invention, it is preferable to display the coordinate data and the positions of each of the contact portions overlapping each other on the display unit 14 such as a monitor so that the operator can visually check them.

Therefore, in the case of the second embodiment of the present invention, similarly to the first embodiment of the present invention, the film mask, the glass mask, or the like can be omitted. In addition, in the second embodiment of the present invention, fine adjustment of the position of the contact portion for automatically correcting the position of the contact portion can be performed automatically, so that a process error due to manual labor and the like can be sufficiently reduced, and productivity improvement is also expected. Can be.

Therefore, according to this invention, the position correction of the contact part for electrical inspection devices can be easily performed, without using a film mask, a glass mask, etc. Therefore, when performing the position correction of the contact portion of the electrical inspection apparatus using the position correction apparatus of the present invention, it is possible to achieve cost reduction, productivity improvement, ease of operation, and the like.

While the above has been described with reference to preferred embodiments of the present invention, those skilled in the art can variously modify and change the present invention without departing from the spirit and scope of the present invention as set forth in the claims below. It will be appreciated.

Claims (12)

An arithmetic processing unit for generating, as coordinate data, positions of each of the inspection regions of the inspected object to be electrically inspected by the contact of each of the contact portions capable of electrical input / output; A camera for magnifying the contact parts to obtain an image; And A display unit configured to visually display coordinate data of the arithmetic processing unit and images of contact units obtained by photographing the camera, The position of the contact unit for the electrical inspection apparatus, wherein the position of each of the contact portions that do not coincide with the coordinate data is matched with the coordinate data by comparing the position of each of the contact portions with the coordinate data displayed on the display unit. Correction device. The position correcting apparatus of claim 1, wherein the calculation processing unit generates the coordinate data in an Excel file. The apparatus of claim 1, wherein the display unit displays the coordinate data of the arithmetic processing unit and the images of the contact units obtained by photographing the camera so as to overlap each other. The apparatus of claim 3, wherein each of the coordinate data and the images of the contacts is displayed to be able to adjust the size thereof. The position correcting device of a contact portion according to claim 1, wherein the matching of the position of each of the contact portions, which does not coincide with the coordinate data, to the coordinate data is accomplished by manual operation. The apparatus of claim 1, wherein the electrical inspection device comprises a probe card and the contacts comprise a needle. The position correcting device of claim 1, further comprising: a stage positioned at an upper portion of the electrical test apparatus and movable in an X-axis, a Y-axis, and a Z-axis. An arithmetic processing unit for generating, as coordinate data, positions of each of the inspection regions of the inspected object to be electrically inspected by the contact of each of the contact portions capable of electrical input / output; A camera for magnifying the contact parts to obtain an image; A control signal processing unit for comparing the coordinate data with the positions of each of the contact portions obtained by the camera as an image, and generating a result of the comparison as a control signal; And An electrical inspection device which receives the control signal and as a result finely adjusts the position of each of the contact portions so that the position of each of the contact portions that do not coincide with the coordinate data coincides with the coordinate data. Position correcting device for contact. The position correcting apparatus of claim 8, wherein the calculation processing unit generates the coordinate data as an Excel file. 9. The apparatus of claim 8, wherein the electrical inspection device comprises a probe card and the contacts comprise a needle. 9. The position correcting device of claim 8, further comprising a stage positioned at an upper portion of the electrical test apparatus and movable in an X-axis, a Y-axis, and a Z-axis. The electric inspection apparatus of claim 8, further comprising a display unit configured to visually check coordinate data of the arithmetic processing unit and images of the contact units obtained by photographing the camera, and to display them superimposed on each other. Position correction device of the contact portion.
KR1020070046481A 2007-05-14 2007-05-14 Apparatus of adjusting position of electric inspection apparatus contactor KR20080100594A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101064553B1 (en) * 2009-12-23 2011-09-14 양 전자시스템 주식회사 Probe driving apparatus capable of automatically compensating location of probe pin

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101064553B1 (en) * 2009-12-23 2011-09-14 양 전자시스템 주식회사 Probe driving apparatus capable of automatically compensating location of probe pin

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