KR20080096539A - 키홈 상호연동부에서 결속된 스테이브들로 형성된 관형 또는 다른 형태의 부재 - Google Patents

키홈 상호연동부에서 결속된 스테이브들로 형성된 관형 또는 다른 형태의 부재 Download PDF

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Publication number
KR20080096539A
KR20080096539A KR1020087019789A KR20087019789A KR20080096539A KR 20080096539 A KR20080096539 A KR 20080096539A KR 1020087019789 A KR1020087019789 A KR 1020087019789A KR 20087019789 A KR20087019789 A KR 20087019789A KR 20080096539 A KR20080096539 A KR 20080096539A
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KR
South Korea
Prior art keywords
staves
tubular member
axis
silicon
extending along
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020087019789A
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English (en)
Korean (ko)
Inventor
리즈 레이놀즈
마이클 스클야르
Original Assignee
인티그레이티드 머티어리얼스, 인크.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 인티그레이티드 머티어리얼스, 인크. filed Critical 인티그레이티드 머티어리얼스, 인크.
Publication of KR20080096539A publication Critical patent/KR20080096539A/ko
Withdrawn legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H10P95/90—Thermal treatments, e.g. annealing or sintering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • C30B33/02—Heat treatment
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure

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  • Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Chemical Vapour Deposition (AREA)
KR1020087019789A 2006-01-21 2007-01-17 키홈 상호연동부에서 결속된 스테이브들로 형성된 관형 또는 다른 형태의 부재 Withdrawn KR20080096539A (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US76099306P 2006-01-21 2006-01-21
US60/760,993 2006-01-21
US11/536,352 2006-09-28
US11/536,352 US20070169701A1 (en) 2006-01-21 2006-09-28 Tubular or Other Member Formed of Staves Bonded at Keyway Interlocks

Publications (1)

Publication Number Publication Date
KR20080096539A true KR20080096539A (ko) 2008-10-30

Family

ID=38284301

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020087019789A Withdrawn KR20080096539A (ko) 2006-01-21 2007-01-17 키홈 상호연동부에서 결속된 스테이브들로 형성된 관형 또는 다른 형태의 부재

Country Status (5)

Country Link
US (1) US20070169701A1 (https=)
JP (1) JP2009524243A (https=)
KR (1) KR20080096539A (https=)
TW (1) TWI372849B (https=)
WO (1) WO2007084492A2 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8119077B2 (en) * 2009-01-07 2012-02-21 General Electric Company Control joints in refractory lining systems and methods
JP5787563B2 (ja) * 2010-05-11 2015-09-30 株式会社日立国際電気 ヒータ支持装置及び加熱装置及び基板処理装置及び半導体装置の製造方法及び基板の製造方法及び保持用ピース
JP2015025623A (ja) * 2013-07-26 2015-02-05 光洋サーモシステム株式会社 熱処理装置用のチャンバ、および、熱処理装置
JP6387167B2 (ja) * 2017-08-28 2018-09-05 光洋サーモシステム株式会社 熱処理装置用のチャンバ、および、熱処理装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2336995A (en) * 1941-10-01 1943-12-14 Gen Timber Service Inc Wood conduit
JPS4934577Y1 (https=) * 1970-12-18 1974-09-19
US4897140A (en) * 1986-05-19 1990-01-30 Peter Opsvik Method for making a pipe-shaped body of wood
SE518184C2 (sv) * 2000-03-31 2002-09-03 Perstorp Flooring Ab Golvbeläggningsmaterial innefattande skivformiga golvelement vilka sammanfogas med hjälp av sammankopplingsorgan
US6450346B1 (en) * 2000-06-30 2002-09-17 Integrated Materials, Inc. Silicon fixtures for supporting wafers during thermal processing
US7305803B2 (en) * 2000-09-18 2007-12-11 Daniel Correa Block construction system
US20020170487A1 (en) * 2001-05-18 2002-11-21 Raanan Zehavi Pre-coated silicon fixtures used in a high temperature process
US7083694B2 (en) * 2003-04-23 2006-08-01 Integrated Materials, Inc. Adhesive of a silicon and silica composite particularly useful for joining silicon parts
US20050103267A1 (en) * 2003-11-14 2005-05-19 Hur Gwang H. Flat panel display manufacturing apparatus
US20060185589A1 (en) * 2005-02-23 2006-08-24 Raanan Zehavi Silicon gas injector and method of making

Also Published As

Publication number Publication date
TW200736567A (en) 2007-10-01
WO2007084492A3 (en) 2007-12-27
JP2009524243A (ja) 2009-06-25
TWI372849B (en) 2012-09-21
WO2007084492A2 (en) 2007-07-26
US20070169701A1 (en) 2007-07-26

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D12-X000 Request for substantive examination rejected

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