KR20080088862A - Baking apparatus - Google Patents

Baking apparatus Download PDF

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Publication number
KR20080088862A
KR20080088862A KR1020070031693A KR20070031693A KR20080088862A KR 20080088862 A KR20080088862 A KR 20080088862A KR 1020070031693 A KR1020070031693 A KR 1020070031693A KR 20070031693 A KR20070031693 A KR 20070031693A KR 20080088862 A KR20080088862 A KR 20080088862A
Authority
KR
South Korea
Prior art keywords
pallet
fixed
lower plate
install
slot
Prior art date
Application number
KR1020070031693A
Other languages
Korean (ko)
Inventor
조상만
Original Assignee
(주)아진
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)아진 filed Critical (주)아진
Priority to KR1020070031693A priority Critical patent/KR20080088862A/en
Publication of KR20080088862A publication Critical patent/KR20080088862A/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67098Apparatus for thermal treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping

Abstract

A baking apparatus is provided to shorten a time interval of baking plenty of processed articles by installing processed articles of the same size in parallel. A heating unit is installed in a chamber for baking a processed article(100) wherein an insertion hole is formed at one side of the chamber and an exhaust hole is formed at the other side of the chamber. A palette(30) installs or collects the processed article, circulating to the inside and outside through the insertion hole and the exhaust hole. The palette includes a lower plate having a slot(32) and a plurality of install bars(40) formed on the upper surface of the lower plate to be positioned in a direction perpendicular to the slot wherein the install bars form pairs to install the processed article. The install bar includes a plurality of fixed install bars fixed to the upper surface of the lower plate and a plurality of transferred install bars coupled to a slide member(47) capable of being transferred along the slot. A gap between the fixed install bar and the processed article is adjusted by the transfer of the transferred install bar so that processed articles of the same size are installed in parallel with each other. Protrusions of a step shape are lengthwise formed at the fixed and transferred install bars, confronting each other. Extension portions are formed at both ends of the protrusions, slanting in directions of its bottom and lateral surfaces.

Description

Curing apparatus

1 is a configuration diagram showing an example of a conventional curing apparatus

2 is a plan view showing a pallet of the present invention

Figure 3 is a side view showing a pallet of the present invention

Figure 4 is an installation state showing an embodiment of the present invention

5 is a plan view showing the main parts of the configuration of the present invention;

6 is a side view of the configuration according to FIG. 5;

<Description of the symbols for the main parts of the drawings>

30: Pallet 40: Mounting Bar

41: fixed anchor bar 42: moving anchor bar

43: stepped portion 47: the slide member

50: pallet reset device 51: gap adjusting means

53 driving means 57 support means

The present invention relates to a hardening apparatus, and more particularly, to a hardening apparatus having a pallet through which an object to be treated is cured in order to harden a resin or an adhesive in the manufacturing process of a PCB or LCD used as an electronic component.

Generally, in the process of forming an insulating layer of a printed circuit board, bonding a liquid crystal panel and a driving module of an LCD, sealing an OLED, or bonding a disk of a DVD, a curing device for curing an epoxy resin or an adhesive Used. An example of such a hardening apparatus will be described by the present applicant filed and registered by patent (No. 0060210).

As shown in FIG. 1, in the curing apparatus, an inlet 2 is formed at the lower front side of the chamber 1, and an outlet 4 is formed at the other side of the lower front side adjacent thereto. The uplifter 10 provided with the elevating plate 12 is disposed on the inlet 2 side, and the downlifter 20 is disposed on the outlet 4 side. In addition, the chamber 1 is largely divided into an upper hardened portion and a lower preheated portion by a partition plate 6 arranged horizontally at an intermediate height thereof. The upper hardened portion includes a heater 23, a duct 24, and a fan ( The heating means 22 including 25 is disposed, and the preheating means 26 including the heater 27 and the duct 28 are disposed separately in the lower preheating part. In addition, the lifting plate 12 is mounted with a pallet 8 on which the workpiece is mounted to cure the workpiece while circulating the uplifter 10 and the downlifter 20. At the upper end of 1), a slider 18 is provided such that the pallet 8 is horizontally moved from the uplifter 10 side to the downlifter 20 side.

According to this configuration, the space above the partition plate 6 is heated to a relatively high curing temperature by the heating means 22, and the space below the partition plate 6 is relatively by the preheating means 26. It is heated to a low preheating temperature, thereby the treated material is not heated rapidly, and the discharged processed material is also not cooled rapidly, there is an advantage that the quality of the processed material is maintained well, but the pallet 8 is one In addition to being able to mount the to-be-processed object, it is provided to only mount the to-be-processed object of a predetermined standard.

The present invention is to solve the problems described above, an object of the present invention is to provide a curing apparatus equipped with a pallet for mounting the workpiece, as well as to be able to mount a plurality of the processing object at the same time Even if the specifications are different, it is possible to mount the workpieces of various sizes in accordance with the specifications to provide a curing apparatus with a pallet that can increase productivity.

According to a feature of the invention, the inlet (2) is formed on one side and the outlet (4) is formed on the other side is provided with a heating means therein is provided with a chamber (1) for curing the object 100, In the curing apparatus provided with a pallet 30 so that the object 100 is mounted or collected while being circulated in and out of the chamber 1 through the inlet 2 and the outlet 4, the pallet 30 is a slot ( 32 is provided on the lower plate 31 and the upper surface of the lower plate 31 so as to be located in the orthogonal direction of the slot 32 and a plurality of mounting bars 40 paired to mount the object to be processed (100) It is made, including the mounting bar 40 is coupled to a plurality of fixed support bar 41 and the slide member 47 provided to be movable along the slot 32 is fixed to the upper surface of the lower plate (31). It is provided with a plurality of moving support bar 42, the fixed mounting bar 41 and by the movement of the moving support bar 42 The curing apparatus, characterized in that the spacing is adjustable through the side to be processed (100) of the same size are provided.

According to another feature of the present invention, the stepped stepped portions 43 are formed in the fixed and moving mounting bars 41 and 42 to face each other in the longitudinal direction, respectively, at both ends of the stepped portions 43. It is provided with a curing device characterized in that the expansion portion 46 is formed to be inclined to the bottom and side.

According to another feature of the invention, the slit member 47 is formed with an insertion hole 48, the pallet 30 between the inlet 2 and the outlet 4 of the outside of the chamber (1) Pallet reset device 50 is provided so as to be positioned in the upper portion, the pallet reset device 50 is a gap adjusting means 51 having an insertion pin 52 is provided at the top, the gap adjusting means 51 is horizontal It comprises a drive means 53 for driving to be movable, the drive means 53 is horizontally moved in the state in which the insertion pin 52 is inserted into the insertion hole 48 by the gap adjusting means 51 There is provided a curing device, characterized in that for automatically moving the moving bar 42.

According to another feature of the invention, the lower plate 31 is formed with a plurality of through holes 33 to be located on both sides of the slot 32, the pallet reset device 50 in the through holes 33 It is provided with a curing device, characterized in that the support means 57 is further provided so that the corresponding support pins 58 can be elevated.

The objects, features and advantages of the present invention described above will become more apparent from the following detailed description. Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

2 and 3 are a plan view and a side view showing a pallet of the present invention, Figure 4 is an installation state diagram of the pallet reset device of the present invention, Figures 5 and 6 are a front view and a plan view showing a pallet reset device of the present invention to be. The present invention is similar to the curing apparatus shown in FIG. 1, characterized by the structure of the pallet 30 as shown in FIG. As shown, the structure of the pallet 30 of the present invention is provided with a lower plate 31 in a substantially rectangular shape, the lower plate 31 is formed with guide grooves 34 on opposite sides of the pallet 30 This is to be conveyed stably. In addition, a pair of slots 32 are formed on the upper surface of the lower plate 31 so as to be biased in one side guide groove 34 in the transverse direction of the guide groove 34, and in the transverse direction of the slot 32. Is provided with a plurality of mounting bar 40 is fixed or movable.

In addition, the mounting bar 40 is coupled to both ends of the fixed support bar 41 fixed to the lower plate 31 and the slit member 47 that slides along the slot 32 is provided with a movable support bar ( 42). In addition, the fixed mounting bar 41 is fixed by maintaining a predetermined distance (L 1 ) at a position close to the central portion and one side guide groove 34 of the lower plate 31, the moving mounting bar 42 is fixed It is coupled to both ends of the slide member 47 so as to be located on both sides of the fixed support bar 41 located in the center to be alternately with the mounting bar 41 is provided so that the two moving support bar 42 is interlocked. . The fixed anchor bar 41 and the movable anchor bar 42 form a pair to mount the object 100 to be processed, and the interval L 2 of the movable anchor bar 42 is fixed to the fixed anchor bar. It is formed in the same manner as the interval (L 1 ) of 41 to maintain the same interval (L) at all times by the movement of the moving support bar 42, the interval (L) for mounting the workpiece 100 of the same size side by side ) Is easily adjusted. In addition, the slicing member 47 and the lower plate 31 are each formed with an insertion hole 48 and a through hole 33 to be described later, and are formed relatively larger than the insertion hole 48 and the through hole 33. Two long holes 35 are to facilitate the hardening of the air flows smoothly to the bottom of the workpiece 100 to be mounted. In addition, reference numerals not shown show guide holes 36 that guide the movable moving bar 42 so that it can be stably moved.

In addition, as shown in FIG. 3, the stepped portions 43 are formed in the fixed and movable mounting bars 41 and 42 so as to face each other in the longitudinal direction, and the stepped portions 43 are stepped. Is formed so that the upper step portion 44 is relatively wider than the lower step portion 45 so as to mount the workpiece 100a, 100b having different sizes up or down or according to the characteristics of the workpiece 100 Alternatively, the lower stepped portions 44 and 45 may be selectively used. In addition, both ends of the stepped portion 43 are formed with an expansion portion 46 to be inclined to the bottom and side, by the expansion portion 46 is to facilitate the collection or collection of the workpiece 100.

In addition, as shown in FIG. 4, the pallet 30 is cured while the inside of the chamber 1 moves through the object 100 at the inlet 2 formed in the chamber 1. The cured object 100 is collected at the outlet 4 side, and the empty pallet 30 is moved back to the inlet 2 side and circulated to mount the object 100. By the way, when the size of the workpiece 100 to be cured varies, it is necessary to adjust the interval (L) of the pallet 30 to match the size of the workpiece 100, in the present invention the chamber (1) Pallet reset device 50 that can automatically adjust the interval (L) of the mounting bar 40 between the external inlet (2) and the outlet (4) is provided. The pallet reset device 50 is provided with a gap adjusting means 51 having an insertion pin 52 at the top thereof and a driving means 53 for driving the gap adjusting means 51 to move horizontally. Pallet 30 is moved from the outlet 4 side is to be positioned on top of the pallet reset device 50. In addition, both sides of the gap adjusting means 51 is provided with a support means 57 for fixing the pallet 30, and the pallet 30, the gap adjustment is completed to the inlet (2) side of the chamber (1) A conveying means 60 for conveying is provided.

5 and 6, the insertion member 48 is formed in the slide member 47 to which the moving support bar 42 of the pallet 30 is coupled (shown in FIG. 2). In the pallet 30, the insertion pin is raised by the gap adjusting means 51 while the insertion hole 48 is positioned to correspond to the insertion pin 52 of the gap adjusting means 51. When the gap adjusting means 51 is horizontally moved by the driving means 53 in the inserted state, the moving bar 42 of the pallet 30 moves to a predetermined position so as to be inserted into the ball 48. L) is controlled. In addition, the driving means 53 is provided so that the gap adjusting means 51 installed on the screw shaft 55 driven by the servo motor 54 capable of position control moves along the guide rail 56. In addition, the support means 57 corresponding to the through hole 33 of the pallet 30 is provided on both sides of the gap adjusting means 51 so as to be able to lift and lower, and the through hole at the tip of the support means 57. The support pin 58 is inserted into the 33 is provided. The support means 57 serves to support the pallet 30 when the moving support bar 42 is moved by the gap adjusting means 51. In addition, after the interval adjustment of the pallet 30 is completed, a conveying means 60 for conveying the pallet 30 to the inlet 2 side of the chamber 1 is provided, the conveying means 60 is a geared motor ( The drive shaft 62 coupled to the belt 61 and the drive shaft 62 are connected by a chain belt to convey the pallet 30.

The present invention described above is not limited to the above-described embodiment and the accompanying drawings, and various substitutions, modifications, and changes are possible within the scope without departing from the technical spirit of the present invention. It will be evident to those who have knowledge of.

As described above, according to the present invention, the pallet 30 is provided with a fixed bar 41 fixed to the upper plate 31 and the mounting bar 40 made of a movable bar 42 provided to be movable. By adjusting the distance (L) that can be mounted on the object 100 by the movement of the moving bar 42, it is possible to mount the object 100 of various sizes to be processed 100 Even if the specifications of the different can be used easily, thereby eliminating the need for a separate pallet according to the standard can significantly reduce the cost required to produce the pallet. In addition, the mounting bar 40 is not only provided with a plurality of pairs to mount the plurality of the workpiece 100 side by side, the plurality of moving bar 42 is interlocked with each other and fixed fixing bar 41 Since the interval (L) is adjusted to be the same, it is possible to mount the workpiece 100 of the same size side by side, thereby reducing the time required to cure a large amount of the workpiece 100.

In addition, the mounting bar 40 is formed with a stepped portion 43 is provided in a step shape, the stepped portion 43 has a relatively wider gap than the upper stepped portion 44 compared to the lower stepped portion 45 The upper or lower stepped portions 44 and 45 may be selectively mounted to fit the workpieces 100a and 100b having different sizes up or down, or the stepped portions 43 according to the characteristics of the workpiece 100. At both ends of the) is inclined expansion portion 46 is provided to facilitate the mounting or collection of the object 100.

In addition, the gap between the inlet (2) and the outlet (4) outside the chamber (1) is provided with an insertion pin (52) at the top so as to automatically adjust the distance (L) of the mounting bar 40, the gap adjusting means (51) And a pallet reset device (50) comprising a drive means (53) for driving the gap adjusting means (51) to move horizontally, whereby the size of the workpiece (100) to be cured is Even if it is different, the interval (L) can be automatically adjusted so as to fit the workpiece 100 automatically in the state in which the pallet 30 is mounted in the curing apparatus, regardless of the size of the workpiece 100 It is possible to increase productivity significantly.

In addition, the pallet reset device 50 is further provided with a support means 57 for supporting the pallet 30 when the gap is adjusted by the gap adjusting means 51 to increase the accuracy of the gap adjustment. .

Claims (4)

Inlet (2) is formed on one side and the outlet (4) is formed on the other side and the heating means is provided therein is provided with a chamber (1) for curing the object 100, the inlet (2) and outlet ( In the curing apparatus provided with a pallet 30 to mount or collect the workpiece 100 while being circulated into and out of the chamber 1 through 4), the pallet 30 has a lower plate 31 having a slot 32 formed therein. And a plurality of mounting bars 40 provided on the upper surface of the lower plate 31 so as to be located in the orthogonal direction of the slot 32 and paired to mount the object 100 to be processed. The mounting bar 40 includes a plurality of fixed support bars 41 fixed to the upper surface of the lower plate 31 and a plurality of movable support bars coupled to the slide member 47 provided to be movable along the slot 32. 42 is provided, and the distance with the fixed mounting bar 41 is adjusted by the movement of the moving mounting bar 42 is the same Curing system characterized in that the object to be processed 100 are mounted side by side in the group. According to claim 1, wherein the fixing and moving bar (41, 42) is formed so that the stepped stepped portion 43 is opposed to each other in the longitudinal direction, respectively, and the bottom surface and both ends of the stepped portion (43) Hardening apparatus characterized in that the expansion portion 46 is formed to be inclined to the side. According to claim 1, Insertion hole 48 is formed in the slice member 47, the pallet 30 between the inlet (2) and the outlet (4) outside the chamber (1) is fixed on the upper A pallet reset device 50 is provided to be positioned, and the pallet reset device 50 includes a gap adjusting means 51 having an insertion pin 52 at an upper end thereof, and the gap adjusting means 51 so as to move horizontally. It comprises a drive means for driving 53, the drive means 53 is horizontally moved in the state that the insertion pin 52 is inserted into the insertion hole 48 by the gap adjusting means 51 is moved Curing device, characterized in that for moving the mounting bar 42 automatically. According to claim 3, The lower plate 31 has a plurality of through holes 33 are formed so as to be located on both sides of the slot 32, the pallet reset device 50 support corresponding to the through hole 33 Curing device, characterized in that the pin (58) is further provided with a support means (57) provided to be elevated.
KR1020070031693A 2007-03-30 2007-03-30 Baking apparatus KR20080088862A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020070031693A KR20080088862A (en) 2007-03-30 2007-03-30 Baking apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020070031693A KR20080088862A (en) 2007-03-30 2007-03-30 Baking apparatus

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KR20080088862A true KR20080088862A (en) 2008-10-06

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012091426A2 (en) 2010-12-28 2012-07-05 주식회사 포스코 Nanoplatelet-type zirconium phosphate and method for preparing same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012091426A2 (en) 2010-12-28 2012-07-05 주식회사 포스코 Nanoplatelet-type zirconium phosphate and method for preparing same

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