KR20080088862A - Baking apparatus - Google Patents
Baking apparatus Download PDFInfo
- Publication number
- KR20080088862A KR20080088862A KR1020070031693A KR20070031693A KR20080088862A KR 20080088862 A KR20080088862 A KR 20080088862A KR 1020070031693 A KR1020070031693 A KR 1020070031693A KR 20070031693 A KR20070031693 A KR 20070031693A KR 20080088862 A KR20080088862 A KR 20080088862A
- Authority
- KR
- South Korea
- Prior art keywords
- pallet
- fixed
- lower plate
- install
- slot
- Prior art date
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Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
Abstract
Description
1 is a configuration diagram showing an example of a conventional curing apparatus
2 is a plan view showing a pallet of the present invention
Figure 3 is a side view showing a pallet of the present invention
Figure 4 is an installation state showing an embodiment of the present invention
5 is a plan view showing the main parts of the configuration of the present invention;
6 is a side view of the configuration according to FIG. 5;
<Description of the symbols for the main parts of the drawings>
30: Pallet 40: Mounting Bar
41: fixed anchor bar 42: moving anchor bar
43: stepped portion 47: the slide member
50: pallet reset device 51: gap adjusting means
53 driving means 57 support means
The present invention relates to a hardening apparatus, and more particularly, to a hardening apparatus having a pallet through which an object to be treated is cured in order to harden a resin or an adhesive in the manufacturing process of a PCB or LCD used as an electronic component.
Generally, in the process of forming an insulating layer of a printed circuit board, bonding a liquid crystal panel and a driving module of an LCD, sealing an OLED, or bonding a disk of a DVD, a curing device for curing an epoxy resin or an adhesive Used. An example of such a hardening apparatus will be described by the present applicant filed and registered by patent (No. 0060210).
As shown in FIG. 1, in the curing apparatus, an
According to this configuration, the space above the
The present invention is to solve the problems described above, an object of the present invention is to provide a curing apparatus equipped with a pallet for mounting the workpiece, as well as to be able to mount a plurality of the processing object at the same time Even if the specifications are different, it is possible to mount the workpieces of various sizes in accordance with the specifications to provide a curing apparatus with a pallet that can increase productivity.
According to a feature of the invention, the inlet (2) is formed on one side and the outlet (4) is formed on the other side is provided with a heating means therein is provided with a chamber (1) for curing the
According to another feature of the present invention, the stepped stepped
According to another feature of the invention, the
According to another feature of the invention, the
The objects, features and advantages of the present invention described above will become more apparent from the following detailed description. Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.
2 and 3 are a plan view and a side view showing a pallet of the present invention, Figure 4 is an installation state diagram of the pallet reset device of the present invention, Figures 5 and 6 are a front view and a plan view showing a pallet reset device of the present invention to be. The present invention is similar to the curing apparatus shown in FIG. 1, characterized by the structure of the
In addition, the
In addition, as shown in FIG. 3, the
In addition, as shown in FIG. 4, the
5 and 6, the
The present invention described above is not limited to the above-described embodiment and the accompanying drawings, and various substitutions, modifications, and changes are possible within the scope without departing from the technical spirit of the present invention. It will be evident to those who have knowledge of.
As described above, according to the present invention, the
In addition, the mounting
In addition, the gap between the inlet (2) and the outlet (4) outside the chamber (1) is provided with an insertion pin (52) at the top so as to automatically adjust the distance (L) of the mounting
In addition, the
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020070031693A KR20080088862A (en) | 2007-03-30 | 2007-03-30 | Baking apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020070031693A KR20080088862A (en) | 2007-03-30 | 2007-03-30 | Baking apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20080088862A true KR20080088862A (en) | 2008-10-06 |
Family
ID=40150821
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020070031693A KR20080088862A (en) | 2007-03-30 | 2007-03-30 | Baking apparatus |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR20080088862A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012091426A2 (en) | 2010-12-28 | 2012-07-05 | 주식회사 포스코 | Nanoplatelet-type zirconium phosphate and method for preparing same |
-
2007
- 2007-03-30 KR KR1020070031693A patent/KR20080088862A/en active IP Right Grant
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012091426A2 (en) | 2010-12-28 | 2012-07-05 | 주식회사 포스코 | Nanoplatelet-type zirconium phosphate and method for preparing same |
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Legal Events
Date | Code | Title | Description |
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A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
NORF | Unpaid initial registration fee |