KR20080079486A - Contact combustion mode gas sensor form micromachine - Google Patents
Contact combustion mode gas sensor form micromachine Download PDFInfo
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- KR20080079486A KR20080079486A KR1020070019737A KR20070019737A KR20080079486A KR 20080079486 A KR20080079486 A KR 20080079486A KR 1020070019737 A KR1020070019737 A KR 1020070019737A KR 20070019737 A KR20070019737 A KR 20070019737A KR 20080079486 A KR20080079486 A KR 20080079486A
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- 238000002485 combustion reaction Methods 0.000 title claims abstract description 20
- 239000000567 combustion gas Substances 0.000 claims description 13
- 239000007789 gas Substances 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 claims 1
- 238000001514 detection method Methods 0.000 abstract 5
- 238000010586 diagram Methods 0.000 description 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000011324 bead Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
- G01N27/16—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by burning or catalytic oxidation of surrounding material to be tested, e.g. of gas
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/122—Circuits particularly adapted therefor, e.g. linearising circuits
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/128—Microapparatus
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
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- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
Description
도 1은 본 발명에 따른 접촉연소식 가스센서의 휘스톤브릿지 회로를 나타낸 회로도,1 is a circuit diagram showing a Wheatstone bridge circuit of a contact combustion gas sensor according to the present invention;
도 2는 본 발명에 따른 접촉연소식 가스센서를 MEMS형태로 형성한 구성도,2 is a block diagram of a contact combustion gas sensor according to the present invention in the form of MEMS,
도 3은 본 발명에 따른 접촉연소식 가스센서의 감지소자의 구성을 나타낸 구성도.Figure 3 is a block diagram showing the configuration of a sensing element of a contact combustion gas sensor according to the present invention.
<도면의 주요 부분에 대한 부호의 설명><Explanation of symbols for the main parts of the drawings>
10 : 감지소자 20 : 보상소자10: sensing element 20: compensating element
11 : 접촉연소판 12 : 히팅라인11: contact burning plate 12: heating line
13 : 기판 14 : 감지전극13
15 : 홈15: home
본 발명은 MEMS 형태의 접촉연소식 가스센서에 관한것으로 상세하게는 접촉연소식 가스센서에 있어서, 기판의 중심부에 일정공간을 가지는 홈이 형성되어지 고, 상기 홈 중앙의 일정 높이에 접촉연소판이 형성되며, 상기 접촉연소판의 하측면에 평면상 지그재그형태로 형성된 홈에 삽입되는 히터가 삽입되는 감지소자와; 상기 감지소자와 동일한 형태로 형성되는 보상소자와; 상기 감지소자와 보상소자가 각각 2개이상으로 동일한 소자간에 대칭되어지도록 배치하여 하나의 휘스톤브릿지 회로의 형태로 구성되는 가스센서;를 포함하여 구성되는 것을 특징으로 하는 MEMS 형태의 접촉연소식 가스센서에 관한 것이다.The present invention relates to a contact combustion gas sensor of the MEMS type. Specifically, in the contact combustion gas sensor, a groove having a predetermined space is formed in the center of the substrate, and the contact combustion plate is formed at a predetermined height at the center of the groove. It is formed, and the sensing element is inserted into the heater is inserted into the groove formed in the flat zigzag form on the lower side of the contact burning plate; A compensation element formed in the same shape as the sensing element; A gas sensor configured in the form of one Wheatstone bridge circuit by arranging the sensing elements and the compensation elements to be symmetrical between two or more identical elements, respectively; Relates to a sensor.
일반적으로 접촉연소식 가스센서는 코일형태의 백금히터에 감지체가 Bead형태로 형성되어 진다. 이러한 센서가 가연성가스에 노출될시 가스가 연소되면서 발생되는 열에 의하여 온도가 증가하게 되고, 히터의 저항이 증가하게 되는데 이 저항변화를 회로에서 읽어 가스 농도를 측정하게 된다.In general, the contact combustion gas sensor is formed of a coil-shaped platinum heater in the form of a bead. When such a sensor is exposed to combustible gas, the temperature is increased by the heat generated as the gas is burned, and the resistance of the heater is increased. This resistance change is read from the circuit to measure the gas concentration.
그런데, 접촉연소식 가스센서의 히터저항은 동작환경의 온도와 습도 및 장기동작으로인한 열화등의 요인으로 인하여 특성이 변화하여지므로, 보상소자를 함께 구성하게 된다. 즉, 상기 가스센서는 감지소자와 보상소자를 한쌍으로 구성되어 휘스톤 브릿지회로로 구성되어진다.However, the heater resistance of the contact combustion gas sensor is changed due to factors such as temperature and humidity of the operating environment and deterioration due to long-term operation, so that the compensation element is configured together. That is, the gas sensor is composed of a pair of sensing elements and a compensating element in a Wheatstone bridge circuit.
이로인해 감지소자에서 열로인해 저항이 증가하면 보상회로에서는 저항이 발생하지 않으므로 휘스톤브릿지회로에 출력이 발생하게 된다.As a result, if the resistance increases due to heat in the sensing element, the resistance does not occur in the compensation circuit, and thus an output occurs in the Wheatstone bridge circuit.
이때, 휘스톤브릿지 구성에 사용되는 고유저항인 Ra와 Rb는 동일한 값을 가져야 할 뿐만 아니라 온도와 습도등의 외적인 요인의 영향을 동일하도록 설정해야 하는데 이러한 구성은 매우 갖추기 힘들어 회로구성비용이 증가하게된다.At this time, Ra and Rb, the resistive resistances used in the Wheatstone bridge configuration, should not only have the same values but also have to be set to have the same influence of external factors such as temperature and humidity. do.
본 발명은 상기의 문제점을 해결하기 위해 안출된 것으로서, 기판의 중심부에 일정공간을 가지는 홈이 형성되어지고, 상기 홈 중앙의 일정 높이에 접촉연소판이 형성되며, 상기 접촉연소판의 하측면에 평면상 지그재그형태로 형성된 홈에 삽입되는 히터가 삽입되는 감지소자와; 상기 감지소자와 동일한 형태로 형성되는 보상소자와; 상기 감지소자와 보상소자가 각각 2개이상으로 동일한 소자간에 대칭되어지도록 배치하여 하나의 휘스톤브릿지 회로의 형태로 구성되는 가스센서;를 포함하여 구성되는 것을 특징으로 하는 MEMS 형태의 접촉연소식 가스센서를 제공하는데 그 목적이 있다.The present invention has been made to solve the above problems, a groove having a predetermined space is formed in the center of the substrate, a contact combustion plate is formed at a predetermined height of the center of the groove, the flat surface on the lower side of the contact combustion plate A sensing element into which a heater inserted into a groove formed in an zigzag shape is inserted; A compensation element formed in the same shape as the sensing element; A gas sensor configured in the form of one Wheatstone bridge circuit by arranging the sensing elements and the compensation elements to be symmetrical between two or more identical elements, respectively; The purpose is to provide a sensor.
본 발명은 상기의 목적을 달성하기 위하여 아래와 같은 특징을 갖는다.The present invention has the following features to achieve the above object.
본 발명은 접촉연소식 가스센서에 있어서, 기판의 중심부에 일정공간을 가지는 홈이 형성되어지고, 상기 홈 중앙의 일정 높이에 접촉연소판이 형성되며, 상기 접촉연소판의 하측면에 평면상 지그재그형태로 형성된 홈에 삽입되는 히터가 삽입되는 감지소자와; 상기 감지소자와 동일한 형태로 형성되는 보상소자와; 상기 감지소자와 보상소자가 각각 2개이상으로 동일한 소자간에 대칭되어지도록 배치하여 하나의 휘스톤브릿지 회로의 형태로 구성되는 가스센서;를 포함하여 구성된다.According to the present invention, in the contact combustion gas sensor, a groove having a predetermined space is formed in the center of the substrate, a contact combustion plate is formed at a predetermined height in the center of the groove, and a flat zigzag shape is formed on the lower side of the contact combustion plate. A sensing element into which a heater is inserted into a groove formed by the groove; A compensation element formed in the same shape as the sensing element; And a gas sensor configured in the form of one Wheatstone bridge circuit by arranging the sensing element and the compensating element to be symmetrical between two or more identical elements, respectively.
이하, 첨부된 도면을 참조하여 본 발명의 바람직한 실시예를 상세히 설명한다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.
도 1은 본 발명에 따른 접촉연소식 가스센서의 휘스톤브릿지 회로를 나타낸 회로도이고, 도 2는 본 발명에 따른 접촉연소식 가스센서를 MEMS형태로 형성한 구 성도이며, 도 3은 본 발명에 따른 접촉연소식 가스센서의 감지소자의 구성을 나타낸 구성도이다.1 is a circuit diagram showing a Wheatstone bridge circuit of a contact combustion gas sensor according to the present invention, Figure 2 is a configuration diagram of a contact combustion gas sensor according to the present invention in the form of a MEMS, Figure 3 is Fig. 1 shows the configuration of the sensing element of the contact combustion gas sensor according to the present invention.
본 발명은 접촉연소식 가스센서(1)에 있어서, 기판(13)의 중심부에 일정공간을 가지는 홈(14)이 형성되어지고, 상기 홈(14) 중앙의 일정 높이에 접촉연소판(11)이 형성되며, 상기 접촉연소판(11)의 하측면에 평면상 지그재그형태로 형성된 홈에 삽입되는 히터(12)가 삽입되는 감지소자(10)와; 상기 감지소자(10)와 동일한 형태로 형성되는 보상소자(20)와; 상기 감지소자(10)와 보상소자(20)가 각각 2개이상으로 동일한 소자간에 대칭되어지도록 배치하여 하나의 휘스톤브릿지 회로의 형태로 구성되는 가스센서;를 포함하여 구성된다.According to the present invention, in the contact combustion type gas sensor (1), a groove (14) having a predetermined space is formed in the center of the substrate (13), and the contact combustion plate (11) at a predetermined height in the center of the groove (14). A
이때, 다수의 상기 감지소자(10)와 보상소자(20)가 하나의 휘스톤브릿지 회로로 구성되어지며, 하나의 기판에 다수개의 휘스톤브릿지 회로가 형성되어진다.At this time, the plurality of
즉, 본 발명을 좀더 상세하게 설명하면 다음과 같다.That is, the present invention will be described in more detail as follows.
기판(13)의 중심부에 일정공간을 가지는 홈(14)이 형성되어지고, 상기 홈(14) 중앙의 일정 높이에 접촉연소판(11)이 형성되며, 상기 접촉연소판(11)의 하측면에 평면상 지그재그형태로 형성된 홈에 삽입되는 히터(12)가 삽입되는 감지소자(10)와; 상기 감지소자(10)와 동일한 형태로 형성되는 보상소자(20)가 다수개 배치되어 각각의 소자들이 대각선으로 대칭되어 배치되어지고, 이들 소자가 하나의 휘스톤브릿지 회로로 구성되어지거나, 이와 동일한 다수개의 휘스톤브릿지 회로를 하나의 기판(13)위에 동시에 형성하여 하나의 모듈로 구성하게된다.A
즉, 실시예를 들면 보상소자(20) 2개를 대각선으로 배치하고 감지소자(10) 2 개를 대각선으로 배치하여 사각형의 형태로 배치한뒤 4개의 소자를 휘스톤브릿지 회로로 구성하여 하나의 가스센서(1)로 구성하는 것이다.That is, for example, two
이는 다수의 휘스톤브릿지 회로가 하나의 기판(13)위에 형성되어 하나의 모듈로서 구성되어 서로간을 보상하면서 하나의 가스센서(1)로서 구성된다.It consists of a plurality of Wheatstone bridge circuits formed on one substrate 13 and configured as one module, compensating each other, as one gas sensor 1.
상기에서 기술된 바와같이 본 발명은, 기판의 중심부에 일정공간을 가지는 홈이 형성되어지고, 상기 홈 중앙의 일정 높이에 접촉연소판이 형성되며, 상기 접촉연소판의 하측면에 평면상 지그재그형태로 형성된 홈에 삽입되는 히터가 삽입되는 감지소자와; 상기 감지소자와 동일한 형태로 형성되는 보상소자와; 상기 감지소자와 보상소자가 각각 2개이상으로 동일한 소자간에 대칭되어지도록 배치하여 하나의 휘스톤브릿지 회로의 형태로 구성되는 가스센서로 다수의 감지소자와 다수의 보상소자가 동일한 측정을 하게되어 감지성능이 향상되어지고, 비용을 감소시키는 효과가 있다.As described above, in the present invention, a groove having a predetermined space is formed in the center of the substrate, a contact combustion plate is formed at a predetermined height of the center of the groove, and a flat zigzag shape is formed on the lower side of the contact combustion plate. A sensing element into which a heater inserted into the formed groove is inserted; A compensation element formed in the same shape as the sensing element; The sensing element and the compensation element are arranged in two or more so as to be symmetrical between the same element to form a gas sensor in the form of one Wheatstone bridge circuit, a number of sensing elements and a plurality of compensation elements are the same measurement is detected The performance is improved and the cost is reduced.
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