KR20080078330A

KR20080078330A - Jig for measuring an end length of substrate

Info

Publication number: KR20080078330A
Application number: KR1020070018292A
Authority: KR
Inventors: 강인식
Original assignee: 세메스 주식회사
Priority date: 2007-02-23
Filing date: 2007-02-23
Publication date: 2008-08-27

Abstract

The measuring jig has a first surface facing the robot hand supporting the substrate and a second surface perpendicular to the first surface, the base plate having a ruler on the second surface, and moving along the base plate. And a measuring bar for coupling with the connecting member and the connecting member and for measuring the scale of the ruler along the second surface.

Description

Jig for Measuring An End Length of Substrate

1 is a schematic diagram illustrating a method of using a measuring jig according to an embodiment of the present invention.

2 is a plan view showing a measuring jig according to an embodiment of the present invention.

Figure 3 is a side view showing a measuring jig according to an embodiment of the present invention.

4 is a perspective view showing a measuring jig according to an embodiment of the present invention.

Explanation of symbols on the main parts of the drawings

10: substrate 11: robot hand

12: exhaust hole 100: jig for measurement

110: base plate 111: first side

112: second side 113: insertion groove

115: guide groove 120: ruler

130: fixing plate 132: screw

200: connecting member 212: screw groove

300: measuring bar 312: coupling screw

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a measuring jig, and more particularly, to a measuring jig capable of measuring the end length of a flat substrate for manufacturing a flat panel display device such as a liquid crystal display device.

Recently, information processing devices have been rapidly developed to have various types of functions and faster information processing speeds. This information processing apparatus has a display device for displaying the operated information. BACKGROUND With the rapid development of semiconductor technology, the use of flat panel displays that are light in weight and small in space is rapidly increasing.

In general, a glass substrate for a display device has a thin film layer made of a photoresist coating liquid, a photosensitive polyamide resin, a color filter chromosome, and the like formed on a main surface of the substrate, and the substrates are loaded in a substrate transfer device and moved in one direction. While going through a post-treatment process, for example, a chemical solution applying process, a washing process and a drying process.

As the demand for flat panel displays increases, its manufacturing facilities are increasingly mass-produced. For example, in-line processing of at least one substrate processing process during a process of moving a substrate using a transport track. type) manufacturing equipment is used.

During the manufacturing process of the in-line flat panel display device, the substrate to be processed is transferred to process chambers that perform each of these processes, and a substrate transfer robot is used to transfer the substrate.

For example, the substrate is transported by vacuum suction while being mounted on the robot hand of the substrate transfer robot. In particular, a substrate coated with a photoresist such as a photoresist is transferred to a chamber for the baking process.

When the substrate is mounted on the robot hand, inaccurate seating may occur due to a slight inclination of the robot hand. In addition, incorrect loading of the substrate may occur due to mechanical errors of the substrate transfer robot or a user's position setting mistake.

Since there is no device for detecting that the substrate is incorrectly loaded in the conventional baking apparatus, the next fixing is performed in a state where a defect is generated in the substrate, thereby reducing the overall yield. Therefore, the position where the substrate is seated on the robot hand is measured in advance, and the substrate transfer robot is controlled using the measured position to prevent defects.

However, conventionally, there is a problem that accuracy is lowered as the user visually measures using a ruler to measure the position or length of the substrate seated on the robot hand.

Embodiments of the present invention to provide a measuring jig that can accurately measure the end length of the substrate.

In order to achieve the object of the present invention, the measuring jig according to the present invention has a first surface facing the robot hand supporting the substrate and a second surface perpendicular to the first surface, and on the second surface. And a base plate having a ruler, a connecting member moving along the base plate, and a measuring bar for engaging with the connecting member and measuring the scale of the ruler along the second surface.

According to one embodiment of the invention, the base plate has a guide groove formed on the opposite surface of the second surface, one end of the connection member is inserted into the guide groove can be moved sliding. In addition, one end of the measurement bar may be screwed with the other end of the connection member.

According to one embodiment of the invention, the base plate may have an insertion groove formed in the second surface so that the ruler is seated.

The end length measuring jig of the substrate according to the present invention configured as described above includes a connecting member moving along the base plate and a measuring bar coupled to the connecting member, and the ruler seated on the base plate indicated by the measuring bar. The scale can be used to measure the length of the substrate exposed from one end of the robot hand.

Hereinafter, a measuring jig according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. As the inventive concept allows for various changes and numerous embodiments, particular embodiments will be illustrated in the drawings and described in detail in the text. However, it is not intended to limit the present invention to the specific disclosed form, it should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the present invention. In describing the drawings, similar reference numerals are used for similar elements. In the accompanying drawings, the dimensions of the structures are shown in an enlarged scale than actual for clarity of the invention.

The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting of the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprise" or "have" are intended to indicate that there is a feature, number, step, action, component, part, or combination thereof described in the specification, and one or more other features. It is to be understood that the present invention does not exclude the possibility of the presence or the addition of numbers, steps, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art. Terms such as those defined in the commonly used dictionaries should be construed as having meanings consistent with the meanings in the context of the related art and shall not be construed in ideal or excessively formal meanings unless expressly defined in this application. Do not.

1 is a side view showing a method of using a measuring jig according to an embodiment of the present invention. 2 is a plan view showing a measuring jig according to an embodiment of the present invention. 3 is a cross-sectional view showing a measuring jig according to an embodiment of the present invention. 4 is a perspective view showing a measuring jig according to an embodiment of the present invention.

1 to 4, the measuring jig 100 according to an exemplary embodiment of the present invention measures a base plate 110, a connection member 200 moving along the base plate, and the connection member. It may include a dragon bar (300).

The base plate 110 has a first surface 111 and a second surface 112 perpendicular to the first surface, and extends in a direction perpendicular to the first surface 111.

The ruler 120 is provided on the second surface 112 of the base plate. According to an embodiment of the present invention, the base plate 110 may include an insertion groove 113 formed on the second surface so that the ruler is seated. The insertion groove 113 extends along a direction perpendicular to the first surface 111. The insertion groove 113 has a suitable width and length so that the ruler 120 is seated.

For example, the ruler 120 may be a 300mm stainless steel ruler. Alternatively, the ruler 120 seated on the second surface 112 of the base plate may be a scale tape engraved along the second surface. The scale tape may be attached to the second side.

According to an embodiment of the present invention, the guide groove 115 is provided on the opposite surface of the first surface of the base plate 110. The guide groove 115 may be formed along an opposite surface of the first surface in a direction perpendicular to the first surface.

The connection member 200 moves along the base plate 110. Specifically, a protrusion 210 may be formed at one end of the connection member 200, and the protrusion 210 may be inserted into the guide groove 115. Accordingly, the connection member 200 may slide in a direction perpendicular to the first surface 111 along the guide groove 115 of the base plate 110.

The measuring bar 300 may be coupled to the connection member 200 and measure the scale of the ruler 120 along the second surface 112. Specifically, one end of the measurement bar 300 is coupled to the other end of the connecting member 200, and can slide in a direction perpendicular to the first surface 111 along the second surface 112. have.

According to one embodiment of the invention, one end of the measurement bar 300 may be screwed with the other end of the connection member 200. In detail, a screw groove 212 is formed at the other end of the connection member 200, and a coupling groove is formed at one end of the measurement bar 300 to correspond to the screw groove 212. A coupling screw 312 may be fastened to the screw groove 212 and the coupling groove.

According to an embodiment of the present invention, the ruler 120 may be seated in the insertion groove 113 formed in the second surface 112 of the base plate 110. The ruler 120 is seated, and the fixing plate 130 may be coupled to both ends of the base plate 110. The fixing plate 130 may fix the ruler 120. For example, the fixing plate 130 may be fixed to both ends of the base plate by screws 132.

The substrate 10 is seated on the robot hand 11 of the substrate transfer robot. A plurality of exhaust holes 12 may be formed in the robot hand 11. In addition, vacuum pressure may be formed in the exhaust hole 12, and the substrate 10 may be vacuum-adsorbed onto the robot hand 11.

For example, the substrate may be a flat substrate. In addition, the flat substrate may be a liquid crystal display (LCD), a plasma display (PDP), a vacuum fluorescent display (VFD), a field emission display (FED), or a field emission display. It may be a substrate for manufacturing an electro luminescence display (ELD).

The length of the substrate 10 exposed from one end of the robot hand 11 may be measured using the measuring jig 100. Specifically, the first surface 111 of the base plate 110 of the measuring jig 100 is in contact with one end of the robot hand 11. The measurement bar 300 is slid along the base plate to contact one end of the substrate 10. In this case, the measuring bar indicates the scale of the ruler 120 seated on the second surface 112 of the base plate, and the scale indicates the length of the substrate exposed from one end of the robot hand 11. Indicates.

Thereafter, the user may perform setting or calibration of the substrate transfer robot using the length measured using the measuring jig 100.

As described above, the end length measuring jig of the substrate according to the preferred embodiment of the present invention includes a connecting member moving along the base plate and a measuring bar coupled to the connecting member, and the base indicated by the measuring bar is indicated. The scale of the substrate exposed from one end of the robot hand can be measured using the scale of the ruler seated on the plate.

While the foregoing has been described with reference to preferred embodiments of the present invention, those skilled in the art will be able to variously modify and change the present invention without departing from the spirit and scope of the invention as set forth in the claims below. It will be appreciated.

Claims

A base plate having a first surface facing the robot hand supporting the substrate and a second surface orthogonal to the first surface, the base plate having a ruler on the second surface;

A connecting member moving along the base plate; And

Jig for measuring the end length of the substrate coupled to the connecting member, including a measuring bar for measuring the scale of the ruler along the second surface.

According to claim 1, wherein the base plate has a guide groove formed on the opposite surface of the second surface, one end of the connecting member is inserted into the guide groove for sliding the end length of the substrate, characterized in that Jig.

The jig for measuring end lengths of substrates according to claim 2, wherein one end of the measuring bar is screwed with the other end of the connecting member.

The jig for measuring end length of a substrate according to claim 1, wherein the base plate has an insertion groove formed in the second surface to seat the ruler.